KR100698833B1 - A Vacuum Exhaust Valve - Google Patents

Abstract

A vacuum exhaust valve is provided to remove foreign substances and slurry from a bellows and a valve body by integrally forming a heat radiating member in a piston. A vacuum exhaust valve includes a body(20), a cylinder(30), a piston(40), a heat radiating unit(50), and a bellows(60). The body includes an interior space(22), a gas introduction opening(24), and a gas discharge opening(26). The cylinder includes a body(32), a port(34) and a seal member(36). The piston includes a piston head(42), a piston rod(44), a valve body(46), and an expansion member(48). The heat radiating unit includes a lead wire(52) and a heat radiating member(54). The lead wire is connected to a power source supply section to heat the piston. The heat radiating member is connected to the lead wire and is inserted into an insertion hole of the piston rod. A spiral is formed in the heat radiating member. One end of the bellows is fixed to the valve body and the other end thereof is fixed to the upper end of the valve body by a fixing member to protect the piston rod and the valve body.

Description

Vacuum Exhaust Valve

1 is a cross-sectional view showing an open state (exhaust state) of a conventional vacuum exhaust valve.

2 is a cross-sectional view showing a closed state of the vacuum exhaust valve of FIG.

3 is a cross-sectional view showing a closed state of the vacuum exhaust valve according to the present invention.

4 is a cross-sectional view showing an open state of the vacuum exhaust valve of FIG.

Figure 5 is a cross-sectional view showing another embodiment of the piston rod of the vacuum exhaust valve according to the present invention.

♣ Explanation of symbols for the main parts of the drawing ♣

20: main body 30: cylinder

40: piston 50: heating device

60: bellows

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum exhaust valve. More particularly, the present invention relates to a vacuum exhaust valve. The present invention relates to a vacuum exhaust valve capable of maintaining an optimum state.

In general, since semiconductors require high precision, high cleanliness and special manufacturing techniques are required. According to these requirements, semiconductors should be manufactured in a vacuum atmosphere where the contact of foreign matter contained in the air can be completely blocked. As a result, the vacuum working area of the semiconductor manufacturing apparatus and the airtight technology have a great influence on the productability of the semiconductor.

Meanwhile, a vacuum gate valve or a vacuum exhaust valve is installed between the process chamber outlet side of the semiconductor and LCD manufacturing apparatus and the vacuum pump for opening and closing of the piping line during maintenance and maintenance of additional equipment such as piping and vacuum pump. As a conventional example of a valve, there is a registered patent No. 10-256768.

As shown in FIGS. 1 and 2, Patent No. 10-256768 shows an air cylinder 4 at an upper side in a valve box 3 having a gas inlet 1 at one side and a gas outlet 2 at a lower side thereof. The bellows 6 is formed in a basic configuration using the seat gasket 8 of the valve body 5 which seals the operation connecting portion of the valve body 5 opened and closed by the bellows 6 and abuts against the valve seat 7. The upper plate 12 of the valve box 3 for sliding the piston rod 9 of the air cylinder 4 and the push rod 11 connected to the holder 10 of the upper surface center of the valve body 5 connected thereto. The elastically stretchable sheath heater 14 is arranged on the outer circumferential axis of the ordinary body 13 suspended and installed in the center of the body. The elastically stretchable sheath heater 4 is formed by a coil spring and passes through a heater wire inside. The bottom of the valve body 5 is wound inward in a spiral shape and pressed onto the holder 10 on the upper surface of the valve body 5 by the annular plate 15. And the fastening fixed to the root 16, the top is then fixed to the ceiling surface within the valve box 3 has a configuration to be connected to the valve casing (3) outside the lead wire (17).

According to such a configuration, when air is supplied to the loss of the air cylinder 4 as shown in FIG. 1, the push rod 11 connected to the piston rod 9 is pressed and the valve body 5 extends the bellows 6. When lowering, the seat gasket 8 of the lower surface of the valve body 5 is pressed against the valve seat 7 so as to close the valve. On the contrary, when the air of the air cylinder 4 is removed and air is supplied to the base, the push rod 11 connected to the piston rod 9 is raised, and the valve body 5 contracts the bellows 6 again. As shown in Figure 1 is to maintain the open state of the valve. On the other hand, during the operation of such a valve is provided with the radiant heat of 180 ~ 200 ℃ by the action of the sheath heater 14 and the heat transfer through the holder 10 to the valve body 5, the product of the valve body or bellows It is difficult to attach, and the frequency | count of washing | cleaning of the inside of a valve can be reduced, the life of a bellows can be extended, and durability can be improved.

However, it has been shown that some problems arise in such a conventional vacuum exhaust valve. First, since the coil-type sheath heater must be installed outside of the conventional body, not only the configuration and the assembly are complicated, but the structure and the molding of the sheath heater itself are complicated, so that the overall configuration is complicated and assembly and disassembly are difficult.

In addition, since the radiant heat generated from the coil type sheath heater is transferred to the valve body through the holder, there is a problem in that the heat transfer efficiency of the valve body is lowered and the removal efficiency of the foreign matter or product is lowered.

In addition, since the air cylinder must be installed two air supply ports up and down in order to reciprocate the piston rod and the valve body, the operation is complicated and there is a high risk of failure.

The present invention has been invented to solve the above problems, and an object of the present invention is to provide a vacuum exhaust valve having a simple configuration and easy assembly and disassembly.

Another object of the present invention is to provide radiant heat by integrating the heating means in the piston without installing the heating means of a complicated structure, excellent heat transfer efficiency to the valve body, easy assembly and disassembly of the heating means To provide a vacuum exhaust valve.

It is still another object of the present invention to provide a vacuum exhaust valve in which a hydraulic inlet / outlet structure of the air cylinder is simple, and reciprocating movement of the piston is simple and accurate.

In order to achieve the above object, the present invention, the main body having an internal space, the gas inlet is provided on one side, and having a gas outlet for selectively communicating with the internal space; The valve body is releasably coupled to the valve body and the through hole is drilled in the center of the upper portion, the port is installed on one side lower portion of the body to enter the hydraulic or pneumatic through one side of the body, and the through hole is provided in the center A cylinder having a seal member for preventing hydraulic or pneumatic pressure flowing through the port from flowing out of the lower portion of the body; A piston head reciprocally inserted into the cylinder body, a piston rod integrally fixed to the center of the piston head and having an insertion hole formed along a central axis, and the piston rod for selectively opening and closing the gas outlet of the body. A piston having an integrally high-precision valve body at the lower end of the valve and an expansion member installed between the upper surface of the cylinder and the piston head to pressurize the valve body in a direction of closing the gas outlet; A heating device including a lead wire connected to a power supply and a heating member connected to the lead wire and inserted into and fixed to an insertion hole of the piston rod to heat the piston; And a bellows having one end fixed to the valve body and the other end fixed to the upper end of the valve body by a fixing member to protect the piston rod of the piston.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

3 is a cross-sectional view showing a closed state of the vacuum exhaust valve according to the present invention, Figure 4 is a cross-sectional view showing an open state of the vacuum exhaust valve of Figure 3, Figure 5 is another of the piston rod of the vacuum exhaust valve according to the present invention A cross-sectional view showing one embodiment. In the following description, each term indicating the direction is based on the case where the drawings are viewed from the front.

3 and 4, the vacuum exhaust valve according to the preferred embodiment of the present invention basically has a body 20 called a valve box or housing that defines the overall appearance of the valve. The main body 20 basically has an internal space 22 for reciprocating movement of the valve body described later. In addition, one side of the main body 20 is provided with a gas inlet 24 in which exhaust gas is introduced and communicates with the internal space 22, and a gas outlet port selectively communicating with the internal space 22 under the main body 20. 26).

The cylinder 30 is provided on the upper portion of the main body 20. The cylinder 30 has a housing-like body 32 which is hermetically coupled to the upper portion of the body 20 and is releasably coupled to the body 20 by a fastening member 32a such as a bolt. The through hole 32c is drilled in the center of the upper plate 32b of the body 32.

One lower end of the body 32 is provided with a port 34 for entering an operating source such as hydraulic or pneumatic into the cylinder. Of course, the port 34 is connected to a hydraulic supply source (not shown) for supplying hydraulic pressure into the body 32 through the port 34.

In addition, the inner lower portion of the body 32 is provided with a seal member 36 for preventing the hydraulic or pneumatic pressure flowing from the port 34 to flow out to the lower portion of the body (32). The seal member 36 is formed of a disc-shaped plate, and is provided with a through hole 36a formed in the center thereof so as to reciprocate the piston described later. Of course, the seal member 36 is provided with various types of seals 36b, O-rings 36c, packings 36d, and the like, to maintain the airtightness with the inner wall of the body 32 and the piston described later.

Inside the cylinder 30 and inside the valve body 20, a piston 40 for opening and closing the gas outlet 26 of the main body 20 is reciprocally installed to control the actual exhaust and blocking of the exhaust gas. do.

The piston 40 has a piston head 42 which is reciprocally inserted in the body 32 of the cylinder 30. The piston head 42 is formed in a disc shape, the center portion is formed with a spiral fixing hole (42a) to be fixed to the piston rod to be described later, the outer periphery of the inner surface of the body 32 and the airtight connection O-ring 42b and sealing 42c are preferably provided.

The piston rod 44 is integrally fixed to the center of the piston head 42. The upper end of the piston rod 44 is provided with a fixed end 44a having a spiral threaded to be releasably screwed into the fixing hole 42a of the piston head 42, and a valve described later by a bolt 44b at the lower end thereof. A fastening hole 44c for fixing to the sieve is formed.

In particular, the insertion hole 44d is formed in the piston rod 44 along its central axis. The insertion hole 44d is preferably formed through the entire length or to a position where only a part of the lower end is left so that the heating element of the heat generating device to be described later is inserted.

Optionally, as shown in FIG. 5, a heat radiating fin 44e may be integrally formed on the outer surface of the piston rod to improve the heat generation property of the piston rod 44 heated by the heat generating member described later. have. Of course, the heat dissipation fins 44e are preferably formed from the central part to the lower end so as not to come into contact with the peripheral parts, in particular the seal member 36, during reciprocation of the piston.

The lower end of the piston rod 44 is coupled with a valve body 46 for opening and closing the gas outlet 26 of the main body 20 to actually control the entry and exit of the gas. The valve body 46 is releasably coupled to the piston rod 44 by bolts 44b. A seal gasket 46a is provided around the bottom of the valve body 46 for hermetic connection with the upper surface of the gas outlet, of course.

On the other hand, the piston 40 is installed between the upper surface of the piston head 42 and the upper surface 32b of the body 32 of the cylinder 30, the expansion member 48 for pressing the piston head 42 downward More). The expansion member 48 is preferably formed of a coil spring, but other types of expansion means may be applied as long as it can pressurize the piston head 42. According to the configuration and arrangement of the piston head 42 as described above, it is pressurized by the expansion member 48 to maintain the valve in a closed state, and when the hydraulic pressure is supplied through the port 34, the piston by the hydraulic pressure 30 is pressed upwards in the opposite direction to maintain the open state.

According to the main feature of the present invention, the piston 40 has a heating device 50 for heating the piston 30 to remove the slurry or foreign matter that may eventually be generated inside the bellows and valve body 20 to be described later ) Is connected.

The heating device 50 has a lead wire 52 connected to an outlet (not shown) or another power supply. The lead wire 52 passes through the through hole 32c formed in the center of the upper surface 32b of the body 32 of the cylinder 30, and the portion 52a located inside the body 32 is coiled. It is preferably formed so as not to interfere with the reciprocating motion of the piston (40).

An end portion of the lead wire 52 is connected to a heat generating member 54 that generates heat by the power supplied by the lead wire. The heat generating member 54 is preferably formed in a rod shape so as to be releasably inserted into the insertion hole 44d formed in the piston rod 44.

Optionally, the insertion hole 44d of the piston rod 44 is formed to communicate with the fastening hole 44c, and a spiral is formed at the end of the heat generating member 54 so as to be releasably screwed into the fastening hole 44c. The fastening end 54a may be formed. Here, the helix formed at the fastening end 54a of the heat generating member 54 is formed in the opposite direction to the helix of the bolt 44b.

On the other hand, inside the valve body 10 is contracted or expanded in accordance with the reciprocating motion of the piston 40, a bellows 60 for protecting the piston rod 44 and the valve body 46 from the gas is provided.

The lower end of the bellows 60 is fixed to the valve body 46 of the piston 40 and the upper end is fixed to the upper end of the valve body 20 and the lower end of the cylinder 30 by the fixing member 62, It is installed to completely surround the piston rod 44 in 20).

Hereinafter, the operation of the vacuum type exhaust valve configured as described above and its operation mode will be described in detail.

First, as shown in FIG. 3, in the closed state of the valve, the piston 40 is pressed downward by the expansion force of the expansion member 48, and the main body (B) by the valve body 46 of the piston 40 is pressed. As the gas outlet 26 of 20 is closed, entry and exit of gas are blocked.

At this time, the heat dissipated by the heat generating member 54 supplied with power through the lead wire 52 of the heating device 50 is transmitted to the bellows 60 and the valve body 46 through the piston rod 44, The debris or slurry that may be produced in the bellows 60 and surroundings is removed.

Optionally, in the case where the heat radiation fins 44e are formed on the piston rod 44 of the piston 40, the heat radiation fins 44e may more effectively heat transfer or heat dissipate to the bellows 60 and its surroundings, whereby Removal efficiency can be improved.

In this closed state, as shown in FIG. 4, when hydraulic or pneumatic pressure is supplied through the port 34 of the cylinder 30 to exhaust the gas, the piston head 42 of the piston 40 moves upward. At the same time, as the expansion member 48 is contracted and the piston rod 44 is moved upward, the bellows 60 is contracted. As a result, the valve body 46 is moved upward to open the gas outlet 26. . Here, during the upward movement of the piston 30, the coiled portion of the lead wire 52 of the heating device 50 is also contracted, and the piston head 42 and the seal member 32 are formed of the O-ring 42b and the sealing 42c. The airtight state is maintained by the sealing 36b, the O-ring 36c, the packing 36d, and the like.

Accordingly, the gas outlet 26 and the gas inlet 24 are communicated with each other through the internal space 22 of the valve body 20 to discharge the gas, and at the same time, the bellows 60 and the valve body in the closed state. The foreign matter or slurry separated or dropped at 46 is also discharged through the gas outlet 26. Of course, even in this case, heat is transferred or diffused to the bellows 60, the valve body 46, and the surroundings by the heating device 50 to continuously remove the foreign matter or prevent the adhesion of the foreign matter on these parts.

Then, when the supply of hydraulic pressure through the port 34 is shut off or the hydraulic pressure is drawn out through the port 34 to close the valve again, the piston 40 is pushed downward by the expansion member 48 so that the valve body 46 closes the gas outlet 26, thereby achieving a closed state. Of course, even in this state, heat is provided by the heat generator 50 so that foreign matter and slurry can be continuously removed.

Thus, heat can be provided in a simple and stable manner to remove debris or slurry from the bellows, the valve body and its surroundings so that the interior of the valve body can always be kept in good condition.

As described above, according to the vacuum exhaust valve according to the present invention, it is possible to remove the foreign matter or slurry from the bellows and the valve body by providing heat by integrating the heat generating member inside the piston to improve the reliability, simple configuration It is easy to assemble and disassemble, has excellent heat transfer efficiency to the valve body, simple hydraulic access structure to the air cylinder, and reciprocating movement of the piston can be made simply and accurately, which improves the productability and workability. It works.

In the above, the preferred embodiment according to the present invention has been described, it will be understood by those skilled in the art that various modifications and variations can be made without departing from the scope of the appended claims.

Claims (5)

A main body 20 having an inner space 22 through which gas can flow, and a gas inlet 24 on one side, and a gas outlet 26 selectively communicating with the inner space 22; The body 32 is releasably coupled to the main body 20 and the through-hole 32c is drilled in the center of the upper surface 32b, and the body (32) to allow the hydraulic or pneumatic pressure to enter or exit the interior of the body (32). A port 34 installed at one lower side of the 32 and a through hole 36a are provided at the center thereof, and the hydraulic or pneumatic pressure flowing through the port 34 is prevented from flowing out of the lower portion of the body 32. Cylinder 30 having a sealing member 36 for; The piston head 42 reciprocally inserted into the body 32 of the cylinder 30, and integrally fixed to the center of the piston head 42 and the insertion hole 44d is formed along the central axis, The piston rod 44 having a spiral and provided with a fastening hole 44c communicating with the insertion hole 44d and the piston rod 44 for selectively opening and closing the gas outlet 26 of the body 20. Valve body 46 integrally fixed to the lower end of the upper and upper portions of the body 32 of the cylinder 30 to press the valve body 46 in the direction of closing the gas outlet 26. A piston (40) having an expansion member (48) installed between a surface (32b) and the piston head (42); In order to heat the piston 30, a lead wire 52 connected to a power supply unit, a lead wire 52 connected to the lead wire 52 and inserted into and fixed to an insertion hole 44d of the piston rod 44, and a lower end of the piston ( A heat generating device 50 having a heat generating member 54 having a fastening end 54a having a spiral formed therein to be releasably fastened to the fastening hole 44c of the 40; And One end is fixed to the valve body 46 and the other end is fixed to the upper end of the valve body 20 by the fixing member 62 to protect the piston rod 44 and the valve body 46 of the piston 40. Vacuum exhaust valve, characterized in that consisting of a bellows (60). The method of claim 1, wherein the center of the piston head 42 of the piston 40 is formed with a spiral fixing hole 42a, the upper end of the piston rod 44 can be released to the fixing hole 42a Vacuum exhaust valve, characterized in that provided with a fixed end (44a) is screwed. 2. The valve body (46) according to claim 1, wherein the valve member (46) is fixed to the piston rod (44) by a bolt (44b) releasably fixed to the fastening hole (44a) of the piston rod (44). Vacuum exhaust valve. delete The vacuum exhaust valve according to claim 1, wherein the piston rod (44) of the piston (40) is integrally formed with a heat dissipation fin (44e).

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