US20170306495A1 - Angled lift jetting - Google Patents
Angled lift jetting Download PDFInfo
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- US20170306495A1 US20170306495A1 US15/644,857 US201715644857A US2017306495A1 US 20170306495 A1 US20170306495 A1 US 20170306495A1 US 201715644857 A US201715644857 A US 201715644857A US 2017306495 A1 US2017306495 A1 US 2017306495A1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/34—Laser welding for purposes other than joining
- B23K26/342—Build-up welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/30—Organic material
- B23K2103/42—Plastics
Definitions
- the present invention relates generally to laser direct writing, and particularly to methods and systems for Laser Induced Forward Transfer jetting.
- LIFT Laser-Induced Forward Transfer
- U.S. Pat. No. 6,792,326, to Duignan whose disclosure is incorporated herein by reference, describes a material delivery system for miniature structure fabrication which has a substrate, a material carrier having a deposition layer, and a laser beam directed towards the material carrier element.
- the system operates in either an additive mode of operation, or a subtractive mode of operation so that a workpiece does not have to be removed from a tool when change of modes of operation takes place.
- An embodiment of the present invention that is described herein provides an apparatus for material deposition on an acceptor surface including a transparent donor substrate having opposing first and second surfaces, such that at least a part of the second surface is not parallel to the acceptor surface, and including a donor film on the second surface.
- the apparatus additionally includes an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the part of the second surface that is not parallel to the acceptor surface, so as to induce ejection of droplets of molten material from the donor film onto the acceptor surface.
- the second surface includes a periodic structure. In other embodiments, the second surface includes a multi-faceted structure. In yet other embodiments, the second surface includes first and second facets oriented at opposing angles and coated with different respective donor films. In alternative embodiments, the second surface includes first and second facets wherein only the first facet is coated with the donor film. In an embodiment, the second surface includes a curved structure.
- an apparatus for material deposition including a transparent donor substrate having opposing first and second surfaces, such that at least a part of the second surface is non-planar, and including a donor film on the non-planar part of the second surface.
- the apparatus additionally includes an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the non-planar part of the second surface, so as to induce ejection of droplets of molten material from the donor film onto an acceptor surface.
- a method for material deposition including providing a transparent donor substrate having opposing first and second surfaces and having first and second facets oriented at opposing angles on the second surface, and including a donor film on the first and second facets.
- the donor substrate is positioned in proximity to an acceptor substrate, with the second surface facing toward the acceptor substrate.
- a beam of radiation is directed to pass through the first surface of the donor substrate and impinge on the donor film at a location selected responsively to the first and second facets of the second surface, so as to induce ejection of droplets of molten material from the donor film on the first and second facets onto the acceptor substrate.
- a method for material deposition including providing a transparent donor substrate, which has opposing first and second surfaces and has a donor film on the second surface.
- the donor substrate is positioned in proximity to an acceptor surface of an acceptor substrate, with the second surface facing toward the acceptor substrate and oriented at an oblique angle, i.e., at a non-normal angle, relative to the acceptor surface.
- a beam of radiation is directed to pass through the first surface of the donor substrate and impinge on the donor film while the second surface is oriented at the oblique angle so as to induce ejection of droplets of molten material from the donor film onto the acceptor surface.
- FIG. 1 is a schematic, pictorial illustration of a system for direct writing on a substrate, in accordance with an embodiment of the present invention
- FIG. 2 is a schematic side view showing details of the system of FIG. 1 , in accordance with an embodiment of the present invention
- FIGS. 3-6 are schematic, sectional views showing details of non-planar Laser-Induced Forward Transfer (LIFT) donors, in accordance with embodiments of the present invention.
- LIFT Laser-Induced Forward Transfer
- FIG. 7 is a schematic sectional view showing details of a non-planar LIFT donor, which is not parallel to an acceptor substrate, in accordance with embodiments of the present invention.
- Embodiments of the present invention that are described hereinbelow provide methods and apparatus that enhance the capabilities and usability of Laser-Induced Forward Transfer (LIFT) techniques.
- the enhancements offered by these embodiments are useful for printing on electronic circuits comprising various types of substrates, and particularly for printing on three-dimensional (3D) structures.
- the disclosed techniques are by no means limited to these specific application contexts, however, and aspects of the embodiments described herein may also be applied, mutatis mutandis, to LIFT-based printing on substrates other than electronic circuit substrates.
- the enhancements include printing of both metallic and non-metallic materials.
- a small distance between a donor surface and an acceptor substrate yields high printing quality on the substrate.
- printing on 3D structures on the substrate poses two challenges: a possible large distance between the donor surface and the lower surfaces of the acceptor, (yielding low printing quality on the acceptor) and a possible poor coating (“step coverage”) of vertical sidewalls of the 3D structures of the substrate.
- a transparent donor substrate has opposing first and second surfaces, such that at least a part of the second surface is not parallel to an acceptor surface and comprises a donor film thereon.
- An optical assembly is configured to direct a beam of radiation to pass through the first surface of the donor substrate so as to impinge on the donor film at a location on the part of the second surface that is not parallel to the acceptor surface. The impingement induces ejection of droplets of molten material, such as metals and polymers, from the donor film onto the acceptor surface.
- the second surface comprises a multi-faceted, periodic structure, wherein at least some of the facets are coated with donor films.
- the multi-faceted structure comprises first substantially similar facets and second substantially similar facets, and the first and second facets are oriented at opposing angles and are coated with different respective donor films.
- the second surface of the donor comprises first substantially similar facets and second substantially similar facets, which are not parallel to a horizontal surface of the substrate, as well as third substantially similar facets, which are parallel to the horizontal surface of the substrate but which are not coated with donor films.
- the third facets may be used for in-situ inspection of the LIFT process through the donor.
- the second surface comprises a curved structure.
- a transparent donor substrate has opposing first and second surfaces, such that at least a part of the second surface is non-planar and has a donor film on the non-planar part of the second surface.
- An optical assembly directs a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the non-planar part of the second surface, so as to induce ejection of droplets of molten material from the donor film onto an acceptor surface.
- FIG. 1 is a schematic, pictorial illustration of a system for direct writing on a substrate 24 , in accordance with an embodiment of the present invention.
- This system and its components are shown here solely to illustrate the sort of environment in which the techniques described herein may be implemented. Such techniques may similarly be carried out using suitable equipment of other types and in other configurations.
- the system of FIG. 1 is built around a print and direct write apparatus 10 , which operates on substrate 24 of an electronic circuit 12 , such as a Flat panel Display (FPD) or a printed circuit board (PCB), which is held on a mounting surface 14 .
- substrate is also termed a receiver or an acceptor.
- FPD Flat panel Display
- PCB printed circuit board
- Apparatus 10 may be used to deposit new layers such as printing of metal circuitry on various substrates or in any other electronic devices.
- Apparatus 10 comprises an optical assembly 16 , containing a laser and optics for Laser-Induced Forward Transfer (LIFT).
- Optical assembly 16 and its operations are described with reference to FIG. 2 below.
- direct printing applications such as are performed by apparatus 10 , for example as patterning or layer deposition on a PCB or FPD or any other applicable device, may comprise other diagnostics capabilities that may be in-situ (i.e., monitoring and inspecting during the printing process), integrated (i.e., monitoring and inspecting selected devices immediately after completion of the LIFT process), or offline, by a stand-alone diagnostics system.
- a positioning assembly 20 in the form of a bridge, positions optical assembly 16 over pertinent sites on substrate 24 in question, by linear motion along the axes of apparatus 10 .
- positioning assembly 20 may be in other forms, such as a moving stage along one (X) axis, two (X, Y) axes, or three (X, Y, Z) axes below circuit 12 and static assembly 16 .
- a control unit 27 controls the operation of the optical and positioning assemblies, and carries out additional functions such as temperature control, so as to carry out the required inspection, printing, patterning and/or other manufacturing and repair operations, as described below.
- control unit 27 communicates with an operator terminal 23 , comprising a general-purpose computer including a processor 34 and a display 36 , along with a user interface and software.
- FIG. 2 is a schematic side view showing details of apparatus 10 , and particularly of optical assembly 16 , in accordance with an embodiment of the present invention.
- a laser 13 emits pulsed radiation, which is focused by optics 15 .
- the laser may comprise, for example, a pulsed Nd:YAG laser with frequency-doubled output, and the pulse amplitude of the laser may be controlled conveniently by control unit 27 .
- Control unit 27 may also be configured, albeit possibly by non-trivial means, to control the pulse duration.
- Optics 15 are similarly controllable in order to adjust the location and size of the focal spot formed by the laser beam.
- an additional laser (not shown) or any other illumination source (e.g., LED or lamp), with different beam characteristics, may be used.
- the additional laser may operate in another wavelength and with another optics setup, and may be used, for example, for surface inspection.
- Optical assembly 16 is shown in FIG. 2 in the LIFT configuration.
- Optics 15 focus the beam from laser 13 onto a donor 19 , which comprises a donor substrate 17 with one or more donor films 18 deposited on substrate 17 .
- substrate 17 comprises a transparent optical material, such as glass or a plastic sheet, or other types of transparent substrates, such as silicon wafers or flexible plastic foils.
- the beam from laser 13 is aligned (by positioning assembly 20 ) with a selected site on substrate 24 of circuit 12 , and donor 19 is positioned above the site at a desired gap width D from the substrate.
- this gap width is at least 0.1 mm, and the inventors have found that gap widths of 0.2 mm or even 0.5 mm or greater can be used, subject to proper selection of the laser beam parameters.
- Optics 15 focus the laser beam through the outer surface of substrate 17 onto film 18 , thereby causing droplets of molten material to be ejected from the film, across the gap and onto the surface of substrate 24 (e.g. into an opening in a structured layer 25 ).
- FIG. 3 is a schematic, sectional view showing details of a non-planar LIFT donor 22 A, in accordance with an embodiment of the present invention.
- Donor 22 A is transparent to a laser beam 28 and comprises two surfaces, a planar first (upper) surface 23 A, typically perpendicular to laser beam 28 and parallel to substrate 24 , and a second (lower) surface 21 A, which faces substrate 24 .
- the lower surface of donor 22 A is non-planar and comprises two or more facets, which are not parallel to substrate 24 .
- the lower surface of donor 22 A comprises substantially similar facets 32 , and substantially similar facets 26 .
- Facets 32 are typically parallel to laser 28 , and facets 26 have a slope (gradient) and are coated with one or more films of materials 26 M to form a single layer or a multilayered stack of respective materials.
- a facet is assumed to have a surface which is flat and plane.
- laser beam 28 provides pulsed radiation on donor 22 A.
- the radiation passes through surface 23 A and impinges on the donor film of a selected facet 26 . Since the selected facet is not parallel to an acceptor surface 33 A of substrate 24 , herein assumed to be parallel to a base surface 35 A of the substrate, ejection of droplets 30 of molten material from the donor film occurs at an angle 29 to acceptor surface 33 A of substrate 24 .
- Acceptor surface 33 A of substrate 24 is also referred to herein as top surface 33 A of the substrate.
- the ejection of droplets 30 is orthogonal to facet 26 , and is indicated by an arrow 31 .
- structure 25 A has surfaces, such as the sidewall, which are not parallel to acceptor surface 33 A, i.e., to base surface 35 A.
- other structures 25 B, 25 C, 25 D, 25 E are mounted on substrate 24 .
- the other structures have the same property as structure 25 A described here, i.e., they have surfaces which are not parallel to the base surface of substrate 24 .
- the angle of droplet ejection from coated facets is set primarily by the design of donor 22 A.
- the multi-faceted structure provides easy jetting in predefined desired directions perpendicular to each of the facets, and thus enables high coating uniformity of sidewalls of a 3D structure.
- the lower surface of donor 22 A comprises a periodic structure (as shown in FIG. 3 ).
- the structure of the lower surface of donor 22 A may have a non-periodic structure with different slopes of facets along the lower surface of donor 22 A. I.e., the structure may be different from the center of donor 22 A to the edge of the donor. For example the slope angle of facets at the edge of donor 22 A may be steeper than the angle of the facets at the center.
- the lower surface of donor 22 A may comprise more than two facets as will be described with respect to FIG. 5 .
- FIG. 4 is a schematic, sectional view showing details of a non-planar LIFT donor 22 B, in accordance with an embodiment of the present invention.
- Donor 22 B is transparent to laser beam 28 (not shown in FIG. 4 ).
- An upper surface 23 B of donor 22 B is parallel to top surface 33 A of substrate 24 .
- a lower surface 21 B of donor 22 B is non-planar and comprises a multi-faceted structure, such as substantially similar facets 40 and substantially similar facets 42 , which are not parallel to acceptor surface 33 A of substrate 24 .
- Each facet thus has a different slope with respect to the acceptor surface of substrate 24 .
- the facets are oriented at opposing, not necessarily equal, angles (e.g., +45° and) ⁇ 30° with respect to beam 28 .
- Both facets may be coated with different respective donor films such as material 26 M, as described with respect to FIG. 3 , and another material.
- Such dual material structures may be manufactured by various techniques, such lithography, direct evaporation (in the case of metal coating), or by placing bi-angled (e.g., pyramidal) structures with different materials coated on each facet. (In some embodiments some of the facets may be left uncoated.)
- the two materials may be ejected substantially simultaneously, for example by using two or more beams in parallel.
- a high repetition rate laser may be scanned to effectively achieve simultaneous jetting.
- the simultaneous ejection may be used to form a mixed material (e.g., a compound) on substrate 24 .
- the two materials may be printed consecutively to form mixed material structures.
- facets 40 and 42 are not parallel to the surface of substrate 24 , the ejection of droplets 30 of molten material from the donor film occurs at an angle to the surface of substrate 24 , (i.e., angle 29 in FIG. 3 ).
- both facets 40 and 42 are coated with films formed by similar or by different materials.
- only one facet e.g., facet 40
- the ejection of droplets 30 from facet is indicated by an arrow 41 , and droplets 30 eject, typically at an orthogonal angle to surface 40 , so as to coat the left sidewall of a structure 25 B.
- An arrow 43 illustrates ejection of droplets 30 from facet 42 , typically at an orthogonal ejection angle to facet 42 , so as to coat the right sidewalls of structure 25 B. Both ejections also coat the top surfaces of substrate 24 and structures 25 B, which are parallel to the upper surface of donor 22 B.
- the ejections of droplets 30 are performed simultaneously, and in the case of different materials on each facet, the ejections of droplets 30 may form a mixed film (e.g., a compound or an alloy) of the respective materials on substrate 24 .
- the ejection of droplets 30 from facet 40 is performed before or after the ejection of droplets 30 from facet 42 .
- the sequential ejections of droplets 30 may form a multilayered structure or a mixed material structure in the same layer on substrate 24 .
- the ejecting angles of the droplets are defined by the slopes of facets 40 and 42 respectively.
- the coated materials on facets 40 and 42 are similar, so as to print the same material across structures 25 B and substrate 24 .
- the coated materials may be different, so as to print mixed or multilayered materials on structures 25 B and substrate 24 .
- FIG. 5 is a schematic, sectional view showing details of a non-planar LIFT donor 22 C, in accordance with an embodiment of the present invention.
- Donor 22 C is transparent to laser beam 28 (not shown in FIG. 5 ).
- donor 22 C may be configured to be transparent to another laser or another illumination source, such as an LED or a lamp, that may be used for LIFT process inspection, as is described hereinbelow.
- An upper surface 23 C of donor 22 C is parallel to top surface 33 A of substrate 24 .
- a lower surface 21 C of donor 22 C comprises substantially similar facets 50 and substantially similar facets 52 , which are not parallel to surfaces 33 A and 35 A of substrate 24 , and substantially similar facets 54 , which are parallel to surface 33 A.
- Facets 50 and 52 may be coated with the same materials or with different materials on each facet, as described with reference to FIG. 4 .
- facets 54 are not coated and may be used for in-situ inspection during a LIFT process so as to monitor the quality of the LIFT printing process.
- the uncoated facets may be used for additional inspection applications such as registration and/or alignment.
- the inspection via the uncoated facets may use the same laser as is used for ejection or an additional laser (not shown in FIG. 5 ) or any other suitable illumination source (e.g., a LED or a lamp) as is described above.
- facets 54 may be coated with material to be ejected, typically perpendicularly to substrate 24 in an ejection illustrated by arrow 55 .
- the ejections from facets 50 and 52 are typically perpendicular to facets 50 and 52 respectively.
- Arrows 51 illustrate that droplets 30 from facets 50 coat the left sidewalls and the top surfaces of structures 25 C.
- Arrows 55 illustrate that droplets 30 coat the top surfaces of structures 25 C.
- Arrows 53 illustrate that droplets 30 coat the right surfaces of structures 25 C.
- the ejection angles of facets 50 and 52 are set primarily by the respective slopes of the facets.
- FIG. 6 is a schematic, sectional view showing details of a non-planar LIFT donor 22 D, in accordance with an embodiment of the present invention.
- Donor 22 D is transparent to laser beam 28 .
- An upper surface 23 D of donor 22 C is parallel to top surface 33 A of substrate 24 .
- a lower surface 21 D of donor 22 D comprises one or more curved structures 71 which are coated by a donor film on top of a flat lower surface 77 of donor 22 D.
- Each curved structure 71 has a thickness h and a width L. Structures 71 are also referred to herein as elements 71 .
- four curved elements 71 are shown in FIG. 6 , and are assumed to be sections of respective spheres with equal radii of curvature 73 .
- elements 71 may comprise substantially any curved surface, and so, for example, may comprise sections of a cylinder, or sections of another curved entity such as an ellipsoid. Furthermore, elements 71 may be arranged in a periodic manner on surface 21 D, or may be arranged to be non-periodic.
- each element 71 is substantially larger than the thickness h of the same element, so as to avoid distortion of the spot of beam 28 when it impinges on element 71 .
- thickness h is about 100 ⁇ m or less, for a gap 79 between donor 22 D and surface 33 A in a range of 200 ⁇ m to 300 ⁇ m or more. Such values of the thickness and the gap ensure that the printing conditions between donor 22 D and substrate 24 are substantially uniform.
- the curvature of element 71 and the location of beam 28 where it impinges on the element define an ejection angle ⁇ e of droplet 30 from the element, the droplet typically being ejected orthogonally to the region of impingement.
- an operator may control the position of beam 28 on the curved donor so as to achieve a required ejection angle of a given droplet 30 for a desired position on the substrate.
- the operator may select the ejection angle of droplets 30 to be any angle within a continuous range, and may thus change the landing angle and the landing position of each droplet 30 on surface 33 A and on structures 25 D.
- the continuous range of ejection angles lies between +30° and ⁇ 30° measured with respect to beam 28 .
- droplet 30 is typically ejected orthogonally to surface 33 A, as is illustrated by arrow 72 .
- the droplet coats surface 33 A or the top surface of 25 D.
- ejection of droplets 30 from the donor film occurs at an angle, as is illustrated by arrow 74 .
- the droplets land at a non-normal angle (such as angle 29 described in FIG. 3 ) to acceptor surface 33 A, or on a left sidewall of structure 25 D.
- ejection of a droplet 30 from the donor film occurs at an opposite angle to that when the beam impinges on the right side of the element, as is illustrated by arrow 76 .
- the droplet lands at an opposite angle (compared to the example represented by arrow 74 ) to acceptor surface 33 A, or on a right sidewall of structure 25 D.
- width L is dictated by a maximal allowed ejection angle and thickness h of element 71 . If ⁇ m is the maximal ejection angle, then the width of element 71 (for the element a section of a sphere) is given by the following equation:
- the curved surface width L is about 750 ⁇ m, which is substantially larger than a typical spot size. Similar considerations apply for other compact curved structure cases.
- FIG. 7 is a schematic sectional view showing details of a non-planar LIFT donor 22 E, which is not parallel to surfaces 33 A and 35 A of substrate 24 , in accordance with embodiments of the present invention.
- Donor 22 E is tilted at a tilt angle 66 , measured between a plane upper surface 23 E of donor 22 E, and a horizontal line parallel to surfaces 33 A and 35 A of substrate 24 .
- Surface 23 E acts as a defining plane surface of donor 22 E, and tilt angle 66 is between surface 23 E and a line parallel to surfaces 33 A, 35 A of substrate 24 .
- Donor 22 E is transparent to laser beam 28 and comprises a lower surface 21 E which is coated by donor films and which faces substrate 24 at an oblique angle. Structures 25 E are located on substrate 24 and typically have a three-dimensional (3D) structure as shown in FIG. 7 .
- a user 11 of apparatus 10 ( FIG. 1 ) identifies a topographic feature on the 3D structure of structures 25 E and positions donor 22 E so that the lower surface of the donor is aimed towards a surface of the 3D structure at an angle that is oblique, i.e., non-normal, to the surface.
- the user directs beam 28 to impinge on donor 22 E so as to eject material from the donor films, typically orthogonal to the lower surface of donor 22 E, onto the 3D structure.
- angle 66 10° and droplets 30 are ejected orthogonally to the lower surface of donor 22 E, the droplets will be ejected at 100° with respect to the horizontal line parallel to substrate 24 , and will land on the top surface of structures 25 E at an angle of 80° (90° ⁇ 10°) measured relative to surface 33 A of substrate 24 .
- surface 21 E of donor 22 E comprises multiple facets, such as facets 62 and 64 , which are typically coated by donor films.
- surface 21 E is planar (i.e., does not comprise facets), and is coated with a donor film.
- laser beam 28 emits pulsed radiation onto donor 22 E.
- the radiation passes through surface 23 E and impinges on the donor films on the lower surface of donor 22 E, so as to induce ejections of droplets of molten material from the donor film, onto the acceptor surfaces, comprising portions of surface 33 A of substrate 24 and upper surfaces of structure 25 E in the example of FIG. 7 .
- the ejection angle from the donor film is constant across the donor, and thus, beam 28 ejects droplets towards structure 25 E at an angle 90°+angle 66 .
- droplets 66 land on the top surfaces of substrate 24 and structures 25 E at a non-orthogonal angle.
- angle 66 equals 10° and thus the ejection angle from donor 22 E is 100° and the landing angle on the top surface of structures 25 E is 80°.
- the landing angle will typically be 10° with respect to the surface of the sidewall.
- the lower surface of donor 22 E comprises substantially similar facets 62 and substantially similar facets 64 .
- beam 28 passes through surface 23 E and impinges on the donor film of facet 62 resulting in ejection (represented by arrow 68 ) of droplets 30 towards the right sidewalls and the horizontal top surfaces of structures 25 E.
- the ejecting and landing angles depend on angle 66 and the slope angle of facet 62 with respect to surface 21 E.
- angle 66 10°
- the angle of facet 62 is 60° with respect to the lower surface of donor 22 E
- the ejection is orthogonal to the surface of facet 62
- the angle of ejection from facet 62 (arrow 68 ) equals 10°+60°+90°, which equals 160° with respect to the lower surface of donor 22 E.
- the landing angle of droplets 30 on the top surface of structures 25 E will be 20° (90° ⁇ 70°), and the landing angle on the left orthogonal sidewalls of structures 25 E will be 70°.
- beam 28 passes through the upper surface of donor 22 E and impinges on the donor film of facet 64 resulting in ejection of droplets 30 (represented by arrow 70 ) towards the right sidewalls and the horizontal surfaces of structures 25 E.
- a non-zero tilt angle 66 provides specific locations on donor 22 E that are closer to substrate 24 compared to a parallel donor-to-acceptor configuration. Smaller distance between the donor and the acceptor typically results high printing quality in a LIFT process.
- the left side of donor 22 E is lower than the right side due to tilt angle 66 , and together with facets 62 and 64 , may provide short distances between the films on donor 22 E and structures 25 E (so as to provide higher printing quality of droplets 30 on structures 25 E at these short distances) compared to prior art systems.
- the tilted embodiment provides high printing performance in cases of non-uniform height across structures 25 E, as shown in FIG. 7 , where the right side of structure 25 E is higher than the left side of the structure.
- the combination of a non-zero tilt angle 66 and a multi-faceted structure on the lower surface of donor 22 E provides a flexibility to adapt the LIFT process with respect to specific topographies of structures 25 E.
- the highest 3D structure is in the right side of structures 25 E and thus the donor 22 E is tilted down to the left.
- donor 22 E may be tilted down to the right, which means that tilt angle 66 is opposite to the angle shown in FIG. 7 .
- angle 66 instead of 10°, angle 66 will be ⁇ 10° (or 170°).
- a combination of adaptable tilt angle and multi-faceted structure of the donor provides flexibility that can be used to achieve small distances between surface 21 E of donor 22 E and structures 25 E, and thus, to provide high printing quality for any type of 3D features of structures 25 E.
Abstract
An apparatus for material deposition on an acceptor surface includes a transparent donor substrate having opposing first and second surfaces, such that at least a part of the second surface is not parallel to the acceptor surface, and including a donor film on the second surface. The apparatus additionally includes an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the part of the second surface that is not parallel to the acceptor surface, so as to induce ejection of droplets of molten material from the donor film onto the acceptor surface.
Description
- This application is a continuation-in-part of International Patent Application PCT/IL2016/050007, entitled “Angled LIFT jetting,” filed Jan. 5, 2016, which claims the benefit of U.S.
provisional application 62/105,761, entitled “Angled LIFT jetting,” filed Jan. 21, 2015. The respective disclosures of the aforementioned applications are incorporated herein by reference. - The present invention relates generally to laser direct writing, and particularly to methods and systems for Laser Induced Forward Transfer jetting.
- Laser-Induced Forward Transfer (LIFT) is a technology for direct printing of various materials such as metals and polymers. LIFT provides high printing quality however advanced electronic devices comprise three-dimensional (3D) patterns that are hard to coat uniformly. Examples of prior art techniques are provided below.
- U.S. Pat. No. 6,792,326, to Duignan, whose disclosure is incorporated herein by reference, describes a material delivery system for miniature structure fabrication which has a substrate, a material carrier having a deposition layer, and a laser beam directed towards the material carrier element. The system operates in either an additive mode of operation, or a subtractive mode of operation so that a workpiece does not have to be removed from a tool when change of modes of operation takes place.
- U.S. Pat. No. 6,805,918, to Auyeung, et al., whose disclosure is incorporated herein by reference, describes a method for laser transfer and deposition of a rheological fluid wherein laser energy strikes a target substrate comprising a rheological fluid, causing a portion of the rheological fluid to evaporate and propel non-evaporated rheological fluid onto a receiving substrate.
- U.S. Pat. No. 7,277,770, to Huang, whose disclosure is incorporated herein by reference, describes a direct write process and apparatus for fabricating a desired circuit component onto a substrate surface of a microelectronic device according to a computer-aided design (CAD).
- U.S. Patent application publication 2005/0095367, to Babiarz, et al., whose disclosure is incorporated herein by reference, describes a method of noncontact dispensing a viscous material onto a surface of a substrate, which uses a jetting valve having a nozzle directing the viscous material flow in a jetting direction nonperpendicular to the surface of the substrate. The nonperpendicular jetting direction results in the droplet producing a reduced wetted area on the substrate.
- Documents incorporated by reference in the present patent application are to be considered an integral part of the application except that, to the extent that any terms are defined in these incorporated documents in a manner that conflicts with definitions made explicitly or implicitly in the present specification, only the definitions in the present specification should be considered.
- An embodiment of the present invention that is described herein provides an apparatus for material deposition on an acceptor surface including a transparent donor substrate having opposing first and second surfaces, such that at least a part of the second surface is not parallel to the acceptor surface, and including a donor film on the second surface. The apparatus additionally includes an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the part of the second surface that is not parallel to the acceptor surface, so as to induce ejection of droplets of molten material from the donor film onto the acceptor surface.
- In some embodiments, the second surface includes a periodic structure. In other embodiments, the second surface includes a multi-faceted structure. In yet other embodiments, the second surface includes first and second facets oriented at opposing angles and coated with different respective donor films. In alternative embodiments, the second surface includes first and second facets wherein only the first facet is coated with the donor film. In an embodiment, the second surface includes a curved structure.
- There is additionally provided, in accordance with an embodiment of the present invention, an apparatus for material deposition including a transparent donor substrate having opposing first and second surfaces, such that at least a part of the second surface is non-planar, and including a donor film on the non-planar part of the second surface. The apparatus additionally includes an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the non-planar part of the second surface, so as to induce ejection of droplets of molten material from the donor film onto an acceptor surface.
- There is additionally provided, in accordance with an embodiment of the present invention, a method for material deposition including providing a transparent donor substrate having opposing first and second surfaces and having first and second facets oriented at opposing angles on the second surface, and including a donor film on the first and second facets. The donor substrate is positioned in proximity to an acceptor substrate, with the second surface facing toward the acceptor substrate. A beam of radiation is directed to pass through the first surface of the donor substrate and impinge on the donor film at a location selected responsively to the first and second facets of the second surface, so as to induce ejection of droplets of molten material from the donor film on the first and second facets onto the acceptor substrate.
- There is further provided, in accordance with an embodiment of the present invention, a method for material deposition including providing a transparent donor substrate, which has opposing first and second surfaces and has a donor film on the second surface. The donor substrate is positioned in proximity to an acceptor surface of an acceptor substrate, with the second surface facing toward the acceptor substrate and oriented at an oblique angle, i.e., at a non-normal angle, relative to the acceptor surface. A beam of radiation is directed to pass through the first surface of the donor substrate and impinge on the donor film while the second surface is oriented at the oblique angle so as to induce ejection of droplets of molten material from the donor film onto the acceptor surface.
- The present invention will be more fully understood from the following detailed description of the embodiments thereof, taken together with the drawings in which:
-
FIG. 1 is a schematic, pictorial illustration of a system for direct writing on a substrate, in accordance with an embodiment of the present invention; -
FIG. 2 is a schematic side view showing details of the system ofFIG. 1 , in accordance with an embodiment of the present invention; -
FIGS. 3-6 are schematic, sectional views showing details of non-planar Laser-Induced Forward Transfer (LIFT) donors, in accordance with embodiments of the present invention; and -
FIG. 7 is a schematic sectional view showing details of a non-planar LIFT donor, which is not parallel to an acceptor substrate, in accordance with embodiments of the present invention. - Embodiments of the present invention that are described hereinbelow provide methods and apparatus that enhance the capabilities and usability of Laser-Induced Forward Transfer (LIFT) techniques. The enhancements offered by these embodiments are useful for printing on electronic circuits comprising various types of substrates, and particularly for printing on three-dimensional (3D) structures. The disclosed techniques are by no means limited to these specific application contexts, however, and aspects of the embodiments described herein may also be applied, mutatis mutandis, to LIFT-based printing on substrates other than electronic circuit substrates. The enhancements include printing of both metallic and non-metallic materials.
- In a typical LIFT-based system, a small distance between a donor surface and an acceptor substrate yields high printing quality on the substrate. However, printing on 3D structures on the substrate poses two challenges: a possible large distance between the donor surface and the lower surfaces of the acceptor, (yielding low printing quality on the acceptor) and a possible poor coating (“step coverage”) of vertical sidewalls of the 3D structures of the substrate.
- Embodiments of the present invention that are described hereinbelow overcome some of these limitations by providing different, novel types of donor structures and orientations, and corresponding methods of operation of LIFT systems. In some embodiments, a transparent donor substrate has opposing first and second surfaces, such that at least a part of the second surface is not parallel to an acceptor surface and comprises a donor film thereon. An optical assembly is configured to direct a beam of radiation to pass through the first surface of the donor substrate so as to impinge on the donor film at a location on the part of the second surface that is not parallel to the acceptor surface. The impingement induces ejection of droplets of molten material, such as metals and polymers, from the donor film onto the acceptor surface.
- In other embodiments, the second surface comprises a multi-faceted, periodic structure, wherein at least some of the facets are coated with donor films. The multi-faceted structure comprises first substantially similar facets and second substantially similar facets, and the first and second facets are oriented at opposing angles and are coated with different respective donor films. In yet other embodiments, the second surface of the donor comprises first substantially similar facets and second substantially similar facets, which are not parallel to a horizontal surface of the substrate, as well as third substantially similar facets, which are parallel to the horizontal surface of the substrate but which are not coated with donor films. The third facets may be used for in-situ inspection of the LIFT process through the donor.
- In alternative embodiments, the second surface comprises a curved structure.
- In another embodiment, a transparent donor substrate has opposing first and second surfaces, such that at least a part of the second surface is non-planar and has a donor film on the non-planar part of the second surface. An optical assembly directs a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the non-planar part of the second surface, so as to induce ejection of droplets of molten material from the donor film onto an acceptor surface.
-
FIG. 1 is a schematic, pictorial illustration of a system for direct writing on asubstrate 24, in accordance with an embodiment of the present invention. This system and its components are shown here solely to illustrate the sort of environment in which the techniques described herein may be implemented. Such techniques may similarly be carried out using suitable equipment of other types and in other configurations. - The system of
FIG. 1 is built around a print anddirect write apparatus 10, which operates onsubstrate 24 of anelectronic circuit 12, such as a Flat panel Display (FPD) or a printed circuit board (PCB), which is held on amounting surface 14. In generic LIFT processes substrate is also termed a receiver or an acceptor. The terms “Flat panel Display”, “FPD”, “printed circuit board”, and “PCB” are used herein to refer generally to any sort of a dielectric or a metal or a semiconductor substrate on which conductive materials such as metals, or non-conductive materials such as dielectrics and polymers are deposited, regardless of the type of substrate material and the process used for deposition.Apparatus 10 may be used to deposit new layers such as printing of metal circuitry on various substrates or in any other electronic devices. -
Apparatus 10 comprises anoptical assembly 16, containing a laser and optics for Laser-Induced Forward Transfer (LIFT).Optical assembly 16 and its operations are described with reference toFIG. 2 below. In some embodiments, direct printing applications, such as are performed byapparatus 10, for example as patterning or layer deposition on a PCB or FPD or any other applicable device, may comprise other diagnostics capabilities that may be in-situ (i.e., monitoring and inspecting during the printing process), integrated (i.e., monitoring and inspecting selected devices immediately after completion of the LIFT process), or offline, by a stand-alone diagnostics system. - A
positioning assembly 20, in the form of a bridge, positionsoptical assembly 16 over pertinent sites onsubstrate 24 in question, by linear motion along the axes ofapparatus 10. In other embodiments, positioningassembly 20 may be in other forms, such as a moving stage along one (X) axis, two (X, Y) axes, or three (X, Y, Z) axes belowcircuit 12 andstatic assembly 16. Acontrol unit 27 controls the operation of the optical and positioning assemblies, and carries out additional functions such as temperature control, so as to carry out the required inspection, printing, patterning and/or other manufacturing and repair operations, as described below. - Typically,
control unit 27 communicates with anoperator terminal 23, comprising a general-purpose computer including aprocessor 34 and adisplay 36, along with a user interface and software. -
FIG. 2 is a schematic side view showing details ofapparatus 10, and particularly ofoptical assembly 16, in accordance with an embodiment of the present invention. Alaser 13 emits pulsed radiation, which is focused byoptics 15. The laser may comprise, for example, a pulsed Nd:YAG laser with frequency-doubled output, and the pulse amplitude of the laser may be controlled conveniently bycontrol unit 27. (Control unit 27 may also be configured, albeit possibly by non-trivial means, to control the pulse duration.)Optics 15 are similarly controllable in order to adjust the location and size of the focal spot formed by the laser beam. - In some embodiments an additional laser (not shown) or any other illumination source (e.g., LED or lamp), with different beam characteristics, may be used. The additional laser may operate in another wavelength and with another optics setup, and may be used, for example, for surface inspection.
-
Optical assembly 16 is shown inFIG. 2 in the LIFT configuration.Optics 15 focus the beam fromlaser 13 onto adonor 19, which comprises adonor substrate 17 with one ormore donor films 18 deposited onsubstrate 17. Typically,substrate 17 comprises a transparent optical material, such as glass or a plastic sheet, or other types of transparent substrates, such as silicon wafers or flexible plastic foils. The beam fromlaser 13 is aligned (by positioning assembly 20) with a selected site onsubstrate 24 ofcircuit 12, anddonor 19 is positioned above the site at a desired gap width D from the substrate. Typically, this gap width is at least 0.1 mm, and the inventors have found that gap widths of 0.2 mm or even 0.5 mm or greater can be used, subject to proper selection of the laser beam parameters. -
Optics 15 focus the laser beam through the outer surface ofsubstrate 17 ontofilm 18, thereby causing droplets of molten material to be ejected from the film, across the gap and onto the surface of substrate 24 (e.g. into an opening in a structured layer 25). -
FIG. 3 is a schematic, sectional view showing details of anon-planar LIFT donor 22A, in accordance with an embodiment of the present invention.Donor 22A is transparent to alaser beam 28 and comprises two surfaces, a planar first (upper)surface 23A, typically perpendicular tolaser beam 28 and parallel tosubstrate 24, and a second (lower)surface 21A, which facessubstrate 24. In an embodiment, the lower surface ofdonor 22A is non-planar and comprises two or more facets, which are not parallel tosubstrate 24. In the example ofFIG. 3 , the lower surface ofdonor 22A comprises substantiallysimilar facets 32, and substantiallysimilar facets 26.Facets 32 are typically parallel tolaser 28, andfacets 26 have a slope (gradient) and are coated with one or more films ofmaterials 26M to form a single layer or a multilayered stack of respective materials. In the disclosure and in the claims, a facet is assumed to have a surface which is flat and plane. - During a LIFT process,
laser beam 28 provides pulsed radiation ondonor 22A. The radiation passes throughsurface 23A and impinges on the donor film of a selectedfacet 26. Since the selected facet is not parallel to anacceptor surface 33A ofsubstrate 24, herein assumed to be parallel to abase surface 35A of the substrate, ejection ofdroplets 30 of molten material from the donor film occurs at anangle 29 toacceptor surface 33A ofsubstrate 24.Acceptor surface 33A ofsubstrate 24 is also referred to herein astop surface 33A of the substrate. Typically, the ejection ofdroplets 30 is orthogonal tofacet 26, and is indicated by anarrow 31. Thus, whilelaser beam 28 is perpendicular tosubstrate 24, the slope offacet 26 causes the angled ejection illustrated, so as to depositdroplets 30 on a sidewall of astructure 25A onsubstrate 24. As is illustrated in the figure,structure 25A has surfaces, such as the sidewall, which are not parallel toacceptor surface 33A, i.e., tobase surface 35A. In the description hereinbelow,other structures substrate 24. The other structures have the same property asstructure 25A described here, i.e., they have surfaces which are not parallel to the base surface ofsubstrate 24. - In the example of
FIG. 3 , the angle of droplet ejection from coated facets is set primarily by the design ofdonor 22A. - In typical LIFT processes, a small distance between
donor 22A and substrate 24 (as well asstructure 25A) yields high printing quality onsubstrate 24 andstructure 25A. In addition, the multi-faceted structure provides easy jetting in predefined desired directions perpendicular to each of the facets, and thus enables high coating uniformity of sidewalls of a 3D structure. - In some embodiments, the lower surface of
donor 22A comprises a periodic structure (as shown inFIG. 3 ). In other embodiments, the structure of the lower surface ofdonor 22A may have a non-periodic structure with different slopes of facets along the lower surface ofdonor 22A. I.e., the structure may be different from the center ofdonor 22A to the edge of the donor. For example the slope angle of facets at the edge ofdonor 22A may be steeper than the angle of the facets at the center. - In an alternative embodiment, the lower surface of
donor 22A may comprise more than two facets as will be described with respect toFIG. 5 . -
FIG. 4 is a schematic, sectional view showing details of anon-planar LIFT donor 22B, in accordance with an embodiment of the present invention.Donor 22B is transparent to laser beam 28 (not shown inFIG. 4 ). Anupper surface 23B ofdonor 22B is parallel totop surface 33A ofsubstrate 24. Alower surface 21B ofdonor 22B is non-planar and comprises a multi-faceted structure, such as substantiallysimilar facets 40 and substantiallysimilar facets 42, which are not parallel toacceptor surface 33A ofsubstrate 24. Each facet thus has a different slope with respect to the acceptor surface ofsubstrate 24. In an embodiment, the facets are oriented at opposing, not necessarily equal, angles (e.g., +45° and)−30° with respect tobeam 28. Both facets may be coated with different respective donor films such asmaterial 26M, as described with respect toFIG. 3 , and another material. - Such dual material structures may be manufactured by various techniques, such lithography, direct evaporation (in the case of metal coating), or by placing bi-angled (e.g., pyramidal) structures with different materials coated on each facet. (In some embodiments some of the facets may be left uncoated.) During LIFT operation the two materials may be ejected substantially simultaneously, for example by using two or more beams in parallel. Alternatively or additionally, a high repetition rate laser may be scanned to effectively achieve simultaneous jetting. The simultaneous ejection may be used to form a mixed material (e.g., a compound) on
substrate 24. Further alternatively or additionally, the two materials may be printed consecutively to form mixed material structures. - Since
facets substrate 24, the ejection ofdroplets 30 of molten material from the donor film occurs at an angle to the surface ofsubstrate 24, (i.e.,angle 29 inFIG. 3 ). In an embodiment bothfacets droplets 30 from facet is indicated by anarrow 41, anddroplets 30 eject, typically at an orthogonal angle to surface 40, so as to coat the left sidewall of astructure 25B. Anarrow 43 illustrates ejection ofdroplets 30 fromfacet 42, typically at an orthogonal ejection angle tofacet 42, so as to coat the right sidewalls ofstructure 25B. Both ejections also coat the top surfaces ofsubstrate 24 andstructures 25B, which are parallel to the upper surface ofdonor 22B. - In some embodiments, the ejections of
droplets 30 are performed simultaneously, and in the case of different materials on each facet, the ejections ofdroplets 30 may form a mixed film (e.g., a compound or an alloy) of the respective materials onsubstrate 24. In other embodiments, the ejection ofdroplets 30 fromfacet 40 is performed before or after the ejection ofdroplets 30 fromfacet 42. In the case of different materials onfacets droplets 30 may form a multilayered structure or a mixed material structure in the same layer onsubstrate 24. - The ejecting angles of the droplets are defined by the slopes of
facets facets structures 25B andsubstrate 24. In other embodiments, the coated materials may be different, so as to print mixed or multilayered materials onstructures 25B andsubstrate 24. -
FIG. 5 is a schematic, sectional view showing details of anon-planar LIFT donor 22C, in accordance with an embodiment of the present invention.Donor 22C is transparent to laser beam 28 (not shown inFIG. 5 ). In some embodiments,donor 22C may be configured to be transparent to another laser or another illumination source, such as an LED or a lamp, that may be used for LIFT process inspection, as is described hereinbelow. - An
upper surface 23C ofdonor 22C is parallel totop surface 33A ofsubstrate 24. Alower surface 21C ofdonor 22C comprises substantiallysimilar facets 50 and substantiallysimilar facets 52, which are not parallel tosurfaces substrate 24, and substantiallysimilar facets 54, which are parallel to surface 33A. -
Facets FIG. 4 . In some embodiments,facets 54 are not coated and may be used for in-situ inspection during a LIFT process so as to monitor the quality of the LIFT printing process. Alternatively or additionally, the uncoated facets may be used for additional inspection applications such as registration and/or alignment. The inspection via the uncoated facets may use the same laser as is used for ejection or an additional laser (not shown inFIG. 5 ) or any other suitable illumination source (e.g., a LED or a lamp) as is described above. - In other embodiments,
facets 54 may be coated with material to be ejected, typically perpendicularly tosubstrate 24 in an ejection illustrated byarrow 55. The ejections fromfacets 50 and 52 (illustrated byarrows facets Arrows 51 illustrate thatdroplets 30 fromfacets 50 coat the left sidewalls and the top surfaces ofstructures 25C.Arrows 55 illustrate thatdroplets 30 coat the top surfaces ofstructures 25C.Arrows 53 illustrate thatdroplets 30 coat the right surfaces ofstructures 25C. The ejection angles offacets -
FIG. 6 is a schematic, sectional view showing details of anon-planar LIFT donor 22D, in accordance with an embodiment of the present invention.Donor 22D is transparent tolaser beam 28. Anupper surface 23D ofdonor 22C is parallel totop surface 33A ofsubstrate 24. Alower surface 21D ofdonor 22D comprises one or morecurved structures 71 which are coated by a donor film on top of a flatlower surface 77 ofdonor 22D. Eachcurved structure 71 has a thickness h and awidth L. Structures 71 are also referred to herein aselements 71. By way of example, fourcurved elements 71 are shown inFIG. 6 , and are assumed to be sections of respective spheres with equal radii ofcurvature 73. - However, it will be understood that
elements 71 may comprise substantially any curved surface, and so, for example, may comprise sections of a cylinder, or sections of another curved entity such as an ellipsoid. Furthermore,elements 71 may be arranged in a periodic manner onsurface 21D, or may be arranged to be non-periodic. - Typically, the width L of each
element 71 is substantially larger than the thickness h of the same element, so as to avoid distortion of the spot ofbeam 28 when it impinges onelement 71. In an embodiment, thickness h is about 100 μm or less, for agap 79 betweendonor 22D andsurface 33A in a range of 200 μm to 300 μm or more. Such values of the thickness and the gap ensure that the printing conditions betweendonor 22D andsubstrate 24 are substantially uniform. - The curvature of
element 71 and the location ofbeam 28 where it impinges on the element define an ejection angle θe ofdroplet 30 from the element, the droplet typically being ejected orthogonally to the region of impingement. Thus, an operator may control the position ofbeam 28 on the curved donor so as to achieve a required ejection angle of a givendroplet 30 for a desired position on the substrate. In general, by controlling the positions ofbeam 28,donor 22D, and/orsubstrate 24, the operator may select the ejection angle ofdroplets 30 to be any angle within a continuous range, and may thus change the landing angle and the landing position of eachdroplet 30 onsurface 33A and onstructures 25D. In an embodiment, the continuous range of ejection angles lies between +30° and −30° measured with respect tobeam 28. - For example, when
beam 28 impinges on the center of element 71 (herein assumed to be parallel to surface 33A),droplet 30 is typically ejected orthogonally to surface 33A, as is illustrated byarrow 72. In this case the droplet coats surface 33A or the top surface of 25D. Whenbeam 28 impinges on the right side ofelement 71, ejection ofdroplets 30 from the donor film occurs at an angle, as is illustrated byarrow 74. In this case, the droplets land at a non-normal angle (such asangle 29 described inFIG. 3 ) toacceptor surface 33A, or on a left sidewall ofstructure 25D. Similarly, whenbeam 28 impinges on the left side ofelement 71, ejection of adroplet 30 from the donor film occurs at an opposite angle to that when the beam impinges on the right side of the element, as is illustrated byarrow 76. In this case, the droplet lands at an opposite angle (compared to the example represented by arrow 74) toacceptor surface 33A, or on a right sidewall ofstructure 25D. - In close packing of
elements 71, width L is dictated by a maximal allowed ejection angle and thickness h ofelement 71. If θm is the maximal ejection angle, then the width of element 71 (for the element a section of a sphere) is given by the following equation: -
- Thus for example, setting the thickness h to 100 μm and assuming a maximal ejection angle of 30°, the curved surface width L is about 750 μm, which is substantially larger than a typical spot size. Similar considerations apply for other compact curved structure cases.
-
FIG. 7 is a schematic sectional view showing details of anon-planar LIFT donor 22E, which is not parallel tosurfaces substrate 24, in accordance with embodiments of the present invention.Donor 22E is tilted at atilt angle 66, measured between a planeupper surface 23E ofdonor 22E, and a horizontal line parallel tosurfaces substrate 24.Surface 23E acts as a defining plane surface ofdonor 22E, andtilt angle 66 is betweensurface 23E and a line parallel tosurfaces substrate 24. -
Donor 22E is transparent tolaser beam 28 and comprises a lower surface 21E which is coated by donor films and which facessubstrate 24 at an oblique angle.Structures 25E are located onsubstrate 24 and typically have a three-dimensional (3D) structure as shown inFIG. 7 . - In an embodiment, a
user 11 of apparatus 10 (FIG. 1 ) identifies a topographic feature on the 3D structure ofstructures 25E andpositions donor 22E so that the lower surface of the donor is aimed towards a surface of the 3D structure at an angle that is oblique, i.e., non-normal, to the surface. Oncedonor 22E andsubstrate 24 are positioned, the user directsbeam 28 to impinge ondonor 22E so as to eject material from the donor films, typically orthogonal to the lower surface ofdonor 22E, onto the 3D structure. For example, ifangle 66 equals 10° anddroplets 30 are ejected orthogonally to the lower surface ofdonor 22E, the droplets will be ejected at 100° with respect to the horizontal line parallel tosubstrate 24, and will land on the top surface ofstructures 25E at an angle of 80° (90°−10°) measured relative to surface 33A ofsubstrate 24. - In some embodiments, surface 21E of
donor 22E comprises multiple facets, such asfacets 62 and 64, which are typically coated by donor films. In other embodiments, surface 21E is planar (i.e., does not comprise facets), and is coated with a donor film. - During a LIFT process,
laser beam 28 emits pulsed radiation ontodonor 22E. The radiation passes throughsurface 23E and impinges on the donor films on the lower surface ofdonor 22E, so as to induce ejections of droplets of molten material from the donor film, onto the acceptor surfaces, comprising portions ofsurface 33A ofsubstrate 24 and upper surfaces ofstructure 25E in the example ofFIG. 7 . - In a first case of a planar (non-faceted) surface 21E of
donor 22E, the ejection angle from the donor film is constant across the donor, and thus,beam 28 ejects droplets towardsstructure 25E at an angle 90°+angle 66. As a result,droplets 66 land on the top surfaces ofsubstrate 24 andstructures 25E at a non-orthogonal angle. As described in the above example,angle 66 equals 10° and thus the ejection angle fromdonor 22E is 100° and the landing angle on the top surface ofstructures 25E is 80°. In the case of the droplets landing on a sidewall ofstructure 25E, which is orthogonal to the surface ofsubstrate 24, the landing angle will typically be 10° with respect to the surface of the sidewall. - In a second case (shown in
FIG. 7 ) the lower surface ofdonor 22E comprises substantiallysimilar facets 62 and substantially similar facets 64. In this embodiment during the LIFT process,beam 28 passes throughsurface 23E and impinges on the donor film offacet 62 resulting in ejection (represented by arrow 68) ofdroplets 30 towards the right sidewalls and the horizontal top surfaces ofstructures 25E. In this case, the ejecting and landing angles depend onangle 66 and the slope angle offacet 62 with respect to surface 21E. - For example, if
angle 66 equals 10°, the angle offacet 62 is 60° with respect to the lower surface ofdonor 22E, and the ejection is orthogonal to the surface offacet 62, then the angle of ejection from facet 62 (arrow 68) equals 10°+60°+90°, which equals 160° with respect to the lower surface ofdonor 22E. The landing angle ofdroplets 30 on the top surface ofstructures 25E will be 20° (90°−70°), and the landing angle on the left orthogonal sidewalls ofstructures 25E will be 70°. - Similarly,
beam 28 passes through the upper surface ofdonor 22E and impinges on the donor film of facet 64 resulting in ejection of droplets 30 (represented by arrow 70) towards the right sidewalls and the horizontal surfaces ofstructures 25E. - In both embodiments a
non-zero tilt angle 66 provides specific locations ondonor 22E that are closer tosubstrate 24 compared to a parallel donor-to-acceptor configuration. Smaller distance between the donor and the acceptor typically results high printing quality in a LIFT process. - In
FIG. 7 , the left side ofdonor 22E is lower than the right side due totilt angle 66, and together withfacets 62 and 64, may provide short distances between the films ondonor 22E andstructures 25E (so as to provide higher printing quality ofdroplets 30 onstructures 25E at these short distances) compared to prior art systems. The tilted embodiment provides high printing performance in cases of non-uniform height acrossstructures 25E, as shown inFIG. 7 , where the right side ofstructure 25E is higher than the left side of the structure. - As is illustrated in
FIG. 7 , the combination of anon-zero tilt angle 66 and a multi-faceted structure on the lower surface ofdonor 22E provides a flexibility to adapt the LIFT process with respect to specific topographies ofstructures 25E. For example, inFIG. 7 the highest 3D structure is in the right side ofstructures 25E and thus thedonor 22E is tilted down to the left. In an opposite case where the 3D structures are higher on the left side ofstructures 25E,donor 22E may be tilted down to the right, which means thattilt angle 66 is opposite to the angle shown inFIG. 7 . For example, instead of 10°,angle 66 will be −10° (or 170°). A combination of adaptable tilt angle and multi-faceted structure of the donor provides flexibility that can be used to achieve small distances between surface 21E ofdonor 22E andstructures 25E, and thus, to provide high printing quality for any type of 3D features ofstructures 25E. - It will be appreciated that the embodiments described above are cited by way of example, and that the present invention is not limited to what has been particularly shown and described hereinabove. Rather, the scope of the present invention includes both combinations and sub-combinations of the various features described hereinabove, as well as variations and modifications thereof which would occur to persons skilled in the art upon reading the foregoing description and which are not disclosed in the prior art.
Claims (22)
1. Apparatus for material deposition on an acceptor surface, comprising:
a transparent donor substrate having opposing first and second surfaces, such that at least a part of the second surface is not parallel to the acceptor surface, and comprising a donor film on the second surface; and
an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the part of the second surface that is not parallel to the acceptor surface, so as to induce ejection of droplets of molten material from the donor film onto the acceptor surface.
2. The apparatus according to claim 1 , wherein the second surface comprises a periodic structure.
3. The apparatus according to claim 1 , wherein the second surface comprises a multi-faceted structure.
4. The apparatus according to claim 3 , wherein the second surface comprises first and second facets oriented at opposing angles and coated with different respective donor films.
5. The apparatus according to claim 3 , wherein the second surface comprises first and second facets and wherein only the first facet is coated with the donor film.
6. Apparatus for material deposition, comprising:
a transparent donor substrate having opposing first and second surfaces, such that at least a part of the second surface is non-planar, and comprising a donor film on the non-planar part of the second surface; and
an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the non-planar part of the second surface, so as to induce ejection of droplets of molten material from the donor film onto an acceptor surface.
7. The apparatus according to claim 6 , wherein the second surface comprises a periodic structure.
8. The apparatus according to claim 6 , wherein the second surface comprises a curved structure.
9. The apparatus according to claim 6 , wherein the second surface comprises a multi-faceted structure.
10. The apparatus according to claim 9 , wherein the second surface comprises first and second facets oriented at opposing angles and coated with different respective donor films.
11. The apparatus according to claim 9 , wherein the second surface comprises first and second facets and wherein only the first facet is coated with the donor film.
12. A method for material deposition, comprising:
providing a transparent donor substrate having opposing first and second surfaces and having first and second facets oriented at opposing angles on the second surface, and comprising a donor film on the first and second facets;
positioning the donor substrate in proximity to an acceptor substrate, with the second surface facing toward the acceptor substrate; and
directing a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location selected responsively to the first and second facets of the second surface, so as to induce ejection of droplets of molten material from the donor film on the first and second facets onto the acceptor substrate.
13. The method according to claim 12 , wherein the ejection of droplets of molten material from the donor film on the first and second facets is performed simultaneously.
14. The method according to claim 12 , wherein the ejection of droplets of molten material from the donor film on the first and second facets is performed sequentially.
15. A method for material deposition, comprising:
providing a transparent donor substrate, which has opposing first and second surfaces and has a donor film on the second surface;
positioning the donor substrate in proximity to an acceptor surface of an acceptor substrate, with the second surface facing toward the acceptor substrate and oriented at an oblique angle relative to the acceptor surface; and
directing a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film while the second surface is oriented at the oblique angle so as to induce ejection of droplets of molten material from the donor film onto the acceptor surface.
16. The method according to claim 15 , wherein positioning the donor substrate comprises identifying a three-dimensional (3D) shape of a topographical feature on the acceptor surface, and orienting the donor substrate responsively to the 3D shape.
17. The method according to claim 15 , wherein the second surface comprises a curved structure.
18. The method according to claim 15 , wherein the second surface of the donor substrate comprises a multi-faceted structure.
19. The method according to claim 18 , wherein the multi-faceted structure comprises first and second facets oriented at opposing angles and coated with the donor film.
20. The method according to claim 19 , and comprising ejecting the droplets from the donor film of the first and second facets, onto the 3D shape, simultaneously.
21. The method according to claim 19 , and comprising ejecting the droplets from the donor film of the first and second facets, onto the 3D shape, sequentially.
22. The method according to claim 15 , wherein the second surface of the donor substrate comprises a periodic structure.
Priority Applications (1)
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US15/644,857 US20170306495A1 (en) | 2015-01-21 | 2017-07-10 | Angled lift jetting |
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US201562105761P | 2015-01-21 | 2015-01-21 | |
PCT/IL2016/050007 WO2016116921A1 (en) | 2015-01-21 | 2016-01-05 | Angled lift jetting |
US15/644,857 US20170306495A1 (en) | 2015-01-21 | 2017-07-10 | Angled lift jetting |
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PCT/IL2016/050007 Continuation-In-Part WO2016116921A1 (en) | 2015-01-21 | 2016-01-05 | Angled lift jetting |
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EP (1) | EP3247529A4 (en) |
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IL (1) | IL253169A0 (en) |
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WO2020225810A1 (en) * | 2019-05-07 | 2020-11-12 | Orbotech Ltd. | Lift printing using thin donor foils |
JP2021513006A (en) * | 2018-02-06 | 2021-05-20 | ネーデルランドセ オルガニサティエ フォール トエゲパスト−ナトールヴェテンシャッペリク オンデルゾエク ティエヌオー | LIFT depositor and method |
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Also Published As
Publication number | Publication date |
---|---|
EP3247529A4 (en) | 2019-01-16 |
CN107206548B (en) | 2019-08-13 |
TW201639654A (en) | 2016-11-16 |
EP3247529A1 (en) | 2017-11-29 |
WO2016116921A1 (en) | 2016-07-28 |
CN107206548A (en) | 2017-09-26 |
KR20170102984A (en) | 2017-09-12 |
IL253169A0 (en) | 2017-08-31 |
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