CN107206548A - Sprayed before inclined induced with laser to conversion - Google Patents
Sprayed before inclined induced with laser to conversion Download PDFInfo
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- CN107206548A CN107206548A CN201680006659.5A CN201680006659A CN107206548A CN 107206548 A CN107206548 A CN 107206548A CN 201680006659 A CN201680006659 A CN 201680006659A CN 107206548 A CN107206548 A CN 107206548A
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- 230000003287 optical effect Effects 0.000 claims abstract description 20
- 230000005855 radiation Effects 0.000 claims abstract description 17
- 230000004927 fusion Effects 0.000 claims abstract description 12
- 230000008021 deposition Effects 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 32
- 238000002347 injection Methods 0.000 claims description 24
- 239000007924 injection Substances 0.000 claims description 24
- 230000000737 periodic effect Effects 0.000 claims description 7
- 239000007888 film coating Substances 0.000 claims description 2
- 238000009501 film coating Methods 0.000 claims description 2
- 239000007921 spray Substances 0.000 description 19
- 238000007639 printing Methods 0.000 description 15
- 238000000576 coating method Methods 0.000 description 8
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- 238000005516 engineering process Methods 0.000 description 7
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- 238000000151 deposition Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 230000002708 enhancing effect Effects 0.000 description 3
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- 241000287828 Gallus gallus Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 125000002015 acyclic group Chemical group 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/34—Laser welding for purposes other than joining
- B23K26/342—Build-up welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/225—Oblique incidence of vaporised material on substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/30—Organic material
- B23K2103/42—Plastics
Abstract
A kind of equipment of material deposition on receptor surface, including：Transparent donor substrate, with the first and second relative surfaces so that at least a portion of second surface is not parallel to receptor surface, the transparent donor substrate also includes the donor membrane on second surface.The equipment also optical module, it is configured to guiding radiation beam into the first surface through donor substrate, and be radiated in being not parallel at the position of the part of receptor surface for second surface on donor membrane, receptor surface is ejected into from donor membrane with the droplet of induced fusion material.
Description
Technical field
Present invention relates in general to laser direct-writing, more particularly, to before method from induced with laser to conversion injection and be
System.
Background technology
To conversion (LIFT) it is to be used to directly print the technology of various materials (such as metal and polymer) before induced with laser.
LIFT provides high printing quality, however, advanced electronic installation includes three-dimensional (3D) pattern chicken uniformly to coat.Carry below
For the example of prior art.
Duignan United States Patent (USP) 6792326 (the disclosure of which as be incorporated herein by reference) is described for micro-structural
The material delivery system of manufacture, its have substrate, the material support with sedimentary and towards material support element guide
Laser beam.The system is being added operator scheme or made subtracting each other mode of operation so that when operator scheme changes, no
Workpiece must be removed from instrument.
Auyeung et al. United States Patent (USP) 6805918 (the disclosure of which as be incorporated herein by reference) describes a kind of use
The method changed in laser and deposit Pheological fluid, wherein, laser energy, which hits, includes the target base plate of Pheological fluid, causes stream
A part for fluid is evaporated, and promotes the Pheological fluid that does not evaporate to receiving on substrate.
Huang United States Patent (USP) 7277770 (the disclosure of which as be incorporated herein by reference) describes one kind according to calculating
Machine Computer Aided Design (CAD) manufactures the direct-write process and equipment for expecting circuit block on the substrate surface of microelectronic device.
(the disclosure of which is as being incorporated by this for Babiarz et al. U.S. Patent Application Publication 2005/0095367
Text) a kind of method that noncontact is distributed on cohesive material to substrate surface is described, it is not orthogonal to substrate table using with edge
The injection valve of the nozzle of the injection direction guiding cohesive material stream in face.The injection direction of out of plumb causes to produce reduction on substrate
Humidification zones droplet.
The file being incorporated herein by reference is considered as the part of the application, unless fixed in these files being incorporated to
The term of justice is contradicted with the term of definition clear and definite in this manual or in secret, then only considers definition in this manual.
The content of the invention
Be described herein The embodiment provides a kind of material on receptor surface deposition equipment, acceptor
Surface includes the transparent donor substrate with the first and second relative surfaces so that at least a portion of second surface is not parallel
In receptor surface, transparent donor substrate also includes the donor membrane being located on second surface.The equipment also includes optical module, and it is matched somebody with somebody
Guiding first surface of the radiation beam by donor substrate is set to, and in the part for being not parallel to receptor surface of second surface
It is irradiated at position on donor membrane, with using droplet ejection to receptor surface from donor membrane induced fusion material.
In certain embodiments, second surface includes periodic structure.In other embodiments, second surface includes many points
Face structure.In another embodiment, second surface includes the first and second facets, and the first and second facets are taken with opposite angles
To, and coated with each different donor membranes.In alternative embodiments, second surface includes the first and second facets, wherein, only
First facet is coated with donor membrane.In one embodiment, second surface includes warp architecture.
Embodiments in accordance with the present invention, additionally provide a kind of equipment deposited for material, including with relative first
With the transparent donor substrate of second surface so that at least a portion of second surface is nonplanar, and transparent donor substrate is also wrapped
Include the donor membrane on the non-flat portion of second surface.The equipment also includes optical module, and it is configured to guide radiation beam
It is irradiated to by the first surface of donor substrate, and at the position of the non-flat portion of second surface on donor membrane, with from confession
Body film induced fusion material uses droplet ejection to receptor surface.
Embodiments in accordance with the present invention, additionally provide a kind of method deposited for material, including provide transparent donor base
Plate, it has the first and second relative surfaces and with the first and second facets being located on second surface, first and second
Facet is orientated with opposite angles, and transparent donor substrate also includes the donor membrane being located in the first and second facets.Donor substrate is adjacent
Nearly acceptor substrate positioning, second surface is towards acceptor substrate.Radiation beam is conducted through the first surface of donor substrate, and in sound
It should be radiated at the position that the first and second facets of second surface are selected on donor membrane, with from the first and second facets
Donor membrane induced fusion material uses droplet ejection to acceptor substrate.
Embodiments in accordance with the present invention, additionally provide a kind of method deposited for material, including provide transparent donor base
Plate, it has the first and second relative surfaces and with the donor membrane being located on second surface.Donor substrate is adjacent to acceptor base
The receptor surface positioning of plate, second surface is taken towards acceptor substrate, and relative to receptor surface with oblique angle (i.e. with non-perpendicular angles)
To.Radiation beam is conducted through the first surface of donor substrate, and is illuminated while second surface is orientated with oblique angle in donor
On film, with using droplet ejection to receptor surface from donor membrane induced fusion material.
Together with accompanying drawing, the present invention can be more fully understood from the detailed description to embodiments of the invention.
Brief description of the drawings
Fig. 1 is the schematic illustration of embodiments in accordance with the present invention system of direct write on substrate；
Fig. 2 is embodiments in accordance with the present invention, shows the schematic side elevation of the details of Fig. 1 system；
Fig. 3-6 is embodiments in accordance with the present invention, shows the details to conversion (LIFT) donor before on-plane surface induced with laser
Schematic sectional view；And
Fig. 7 is embodiments in accordance with the present invention, shows to be not parallel to the details of the on-plane surface LIFT donors of acceptor substrate
Schematic sectional view.
Embodiment
General introduction
Below to conversion (LIFT) technology before the induced with laser described herein The embodiment provides enhancing
Capacity and availability method and apparatus.The enhancing provided by these embodiments can be used for including the electricity of all kinds substrate
Printed on sub-circuit, particularly for being printed in three-dimensional (3D) structure.However, disclosed technology is never limited to these application-specifics
Background, each side of embodiment described herein can also it is mutatis mutandis on the substrate in addition to electronic circuit board based on LIFT
Printing.The enhancing includes type metal and nonmetallic materials.
In the typically system based on LIFT, the small distance between donor surface and acceptor substrate produces height on substrate
Printing quality.However, printing has two challenges in 3D structures on substrate：Between donor surface and the lower surface of acceptor
Possible big distance (low printing quality is produced on acceptor)；And the poor coating of possibility of the upright side walls of the 3D structures of substrate
(" stepcoverage ").
The donor constructions and orientation of the embodiment of the invention described below novel type different by providing and behaviour
Make LIFT systems corresponding method overcome these limitation in some.In certain embodiments, transparent donor substrate has phase
To the first and second surfaces so that at least a portion of second surface is not parallel to receptor surface, and also includes being located at it
On donor membrane.Optical module is configured to guide first surface of the radiation beam by donor substrate, with the injustice of second surface
Row is radiated on donor membrane at the position of the part of receptor surface.The irradiation is (such as golden from donor membrane induced fusion material
Category and polymer) use droplet ejection to receptor surface.
In other embodiments, second surface includes many facet periodic structures, wherein, at least some use in each facet
Donor membrane is coated.Many facet structures include the first substantially similar facet facet similar with second substantially, the first and second facets with
Opposite angles are orientated, and are coated with respective different donor membranes.In another embodiment, the second surface of donor includes being not parallel to
The first substantially similar facet facet similar with second substantially of the horizontal surface of substrate and the horizontal surface parallel to substrate but
It is the similar facet of the third-largest cause coated without donor membrane.3rd facet can be used for via donor Site Detection LIFT processes.
In alternative embodiments, second surface includes warp architecture.
In another embodiment, transparent donor substrate has the first and second relative surfaces so that second surface is extremely
A few part is nonplanar, and with the donor membrane on the non-flat portion of second surface.Optical module guiding radiation
Beam is radiated on donor membrane by the first surface of donor substrate at the position of the non-flat portion of second surface, with from
Donor membrane induced fusion material uses droplet ejection to receptor surface.
System describe
Fig. 1 is the schematic illustration of the embodiments in accordance with the present invention system of direct write on substrate 24.This system and its portion
Part is merely shown as illustrating that applicable environment of technology described herein herein.This technology can be similarly used suitable other
Types of machines results is simultaneously implemented in other constructions.
Fig. 1 system is set up around printing and direct write equipment 10, and the equipment is in (the such as flat-panel monitor of electronic circuit 12
(FPD) or printed circuit board (PCB) (PCB)) substrate 24 on operate, electronic circuit is maintained in installation surface 14.In general LIFT
In technique, substrate 24 is also known as receiver or acceptor.Term " flat-panel monitor ", " FPD ", " printed circuit board (PCB) " and " PCB " exists
It is used to be generally referred to any kind of dielectric or metal or semiconductor substrate, such as the conductive material or ratio of metal herein
Non-conducting material such as dielectric and polymer is deposited on substrate, the type but regardless of baseplate material and the technique for deposition
How.Equipment 10 can be used for depositing new layer, such as the type metal circuit on various substrates or on any other electronic installation.
Equipment 10 includes optical module 16, and it, which is included, is used for the laser and optical system before induced with laser to conversion (LIFT)
System.Optical module 16 and its operation are described below with reference to Fig. 2.In certain embodiments, such as by equipment 10 perform it is straight
Connect printing application (such as PCB or FPD or any other can be on application apparatus patterning or layer deposition) may include other examine
Cutting capacity, diagnosis capability can built-in (monitor and detect), integrated (i.e. after completion LIFT techniques i.e. during printing process
Monitor and detect immediately the device of selection) or by independent diagnostics system off-line.
The positioning component of the form of bridge 18 is moved by the axis linearity along equipment 1 and is positioned at optical module 16 and is discussed
Substrate 24 on related place on.In other embodiments, positioning component can be other forms, such as in circuit 12 and quiet
Only mobile station of the lower section of component 16 along (X) axis, two (X, Y) axis or three (X, Y, Z) axis.Control unit 27 is controlled
The operation of optical module and positioning component processed, and implement additional functionality, such as temperature control, to implement required detection, printing, figure
Case and/or other manufactures and reparation operation, as described below.
Generally, control unit 27 is connected with operation terminal 23, together with user interface and software, and operation terminal includes tool
There is the all-purpose computer of processor 34 and display 36.
Fig. 2 is to show embodiments in accordance with the present invention, the schematic side elevation of the especially details of optical module 16 of equipment 10.
The pulse radiation of laser 13, impulse radiation is focused on by optical system 15.Laser can be for example including exporting with frequency multiplication
Pulse Nd:YAG laser, the impulse amplitude of laser can easily be controlled by control unit 27.Although (by unusual
Means, control unit 27 may be configured to control the pulse duration).Optical system 15 can be similarly controlled, to adjust
The position of the focus formed by laser beam and size.
In certain embodiments, the additional laser device (not shown) or any other with different beam characteristicses can be used
Light source (such as LED or light fixture).Additional laser device can be operated under another wavelength and with another optical settings, and can
With for example for Surface testing.
Optical module 16 is shown with LIFT constructions in fig. 2.Optical system 15 focuses on the light beam from laser 13
Donor 19, donor includes donor substrate 17, and one or more donor membranes 18 are deposited on substrate 17.Generally, substrate 17 includes saturating
Bright optical material, such as glass or plastic sheet, or other types of transparency carrier, such as silicon wafer or flexiplast paper tinsel.Come
It is aligned (by moving parts 18) from the selection place on the substrate 24 of the light beam of laser 13 with circuit 12, donor 19 is positioned at
Above the place, with substrate at a distance of expectation gap width D.Generally, the gap width is at least 0.1mm, and inventor has found, can
To use 0.2mm or even 0.5mm or bigger gap width, by rightly selecting parameters of laser beam.
Optical system 15 makes the outer surface of laser beam through substrate 17 focus on film 18, so as to cause the small of melted material
Drop sprays from film, across the gap, on the surface for reaching device substrate.
Fig. 3 is the schematic sectional view for showing on-plane surface LIFT donors 22A details according to an embodiment of the invention.For
Body 22A passes through laser beam 28, and including two surfaces, that is, is typically normal to laser beam 28 and parallel to the plane first of substrate 24
(on) surface 23A and towards substrate 24 second (under) surface 21A.In one embodiment, donor 22A lower surface is non-flat
Face, and including being not parallel to two or more facets of substrate 24.In the example of fig. 3, donor 22A lower surface includes
Substantially similar facet 32 and substantially similar facet 26.Facet 32 is typically parallel to laser 28, and facet 26 has gradient (slope), and
Coated with material 26M one or more films, to form the single layer or multiple-level stack of respective material.In the disclosure and power
During profit is required, it is assumed that facet has flat and plane surface.
During LIFT techniques, laser beam 28 provides impulse radiation to donor 22A.Radiation is irradiated to choosing through surface 23A
The donor membrane for the facet 26 selected.Because the facet of selection is not parallel to the receptor surface 33A of substrate 24, so assuming herein
Parallel to the basal plane 35A of substrate, the droplet 30 of the melted material from donor membrane with angle 29 be ejected into substrate 24 by body surface
Face 33A.The receptor surface 33A of substrate 24 is also referred to as the top surface 33A of substrate.Generally, the injection of droplet 30 is orthogonal
Represented in facet 26, and by arrow 31.Therefore, although laser beam 28 is perpendicular to substrate 24, the gradient of facet 26 causes institute
Show on inclination injection, the side wall that droplet 30 is deposited to structure 25A on substrate 24.As shown in FIG., structure 25A has not
Parallel to receptor surface 33A (i.e. basal plane 35A) surface, such as side wall.In the following description, other structures 25B, 25C,
25D, 25E are installed on substrate 24.Other structures have with structure 25A identical attributes described herein, i.e., they are not with
Parallel to the surface of the basal plane of substrate 24.
In the example of fig. 3, droplet is mainly set from the spray angle of coating facet by donor 22A design.
In typical LIFT techniques, the small distance between donor 22A and substrate 24 (and structure 25A) is in the He of substrate 24
High printing quality is produced on structure 25A.In addition, many facet structures are provided on the preset expected direction perpendicular to each facet
Simple injection so that the high coating uniformity of the side wall of 3D structures is possibly realized.
In certain embodiments, donor 22A lower surface includes periodic structure (as shown in Figure 3).In other embodiments
In, the structure of donor 22A lower surface can have the aperiodicity knot for having different facet gradients along donor 22A lower surface
Structure.That is, the structure can be different to the edge of donor from donor 22A center.For example, the facet in donor 22A edge
Angle of inclination can be steeper than the angle of the facet in center.
In alternative embodiments, donor 22A lower surface may include more than two facet, as described with regard to fig. 5.
Fig. 4 is the schematic sectional view for showing on-plane surface LIFT donors 22B details according to an embodiment of the invention.For
Top surface 33As of the body 22B upper surface 23B parallel to substrate 24.Donor 22B lower surface 21B is nonplanar, and including many
Facet structure, such as substantially similar facet 40 and substantially similar facet 42, they are not parallel to the receptor surface 33A of substrate 24.
Thus, each facet has different gradients on the receptor surface of substrate 24.In one embodiment, facet relative to light beam 28 with
Opposite (may not be equal) angle (such as+45 ° and -30 °) orientation.Facet can each different donor membrane coatings, such as
On the material 26M and another material described in Fig. 3.
This bi-material layers structure can be manufactured by various technologies, such as photoetching, directly evaporation (situation about being coated in metal
Under) or double angles (such as cone) structure of placement with the different materials being coated in each facet.(in certain embodiments,
Some distributions can not coated).During LIFT is operated, two kinds of materials substantially can spray simultaneously, such as by using flat
Two or more capable light beams.Alternatively or additionally, High Repetition Laser can be scanned to effectively obtain simultaneously
Injection.Injection simultaneously can be used for forming mixing material (such as mixture) on basic 24.In addition alternatively or additionally, two kinds
Material can continuously print to form the material structure of mixing.
Because facet 40 and 42 is not parallel to the surface of substrate 24, so the droplet of melted material is closed from the injection of donor membrane
Occur in the surface of substrate 24 with an angle (i.e. Fig. 3 angle 29).In one embodiment, facet 40 with 42 with by similar or not
With the film coating of material formation.In alternative embodiments, only one facet (such as facet 40) is coated by film.Droplet 30 is from facet
40 injection is represented that droplet 30 on surface 40 with orthogonal angles by spraying, with coated structure 25B left side by arrow 41
Wall.Arrow 43 shows that droplet 30 is sprayed from facet 42 generally about facet 42 with orthogonal spray angle, with the coated structure 25B right side
Side wall.The top surface of coated substrate 24 and the structure 25B upper surface parallel to donor 22B is gone back in two injections.
In certain embodiments, the injection of droplet 30 is performed simultaneously, small in the case of the different materials in each facet
The injection of drop 30 can form the hybrid films (such as mixture or alloy) of respective material on substrate 24.In other embodiments,
Droplet 30 is performed from the droplet 30 that is injected in of facet 40 before or after the injection of facet 42.Difference in facet 40 and 42
In the case of material, the successive of droplet 30 can form sandwich construction or mixing material structure in the identical layer of substrate 24.
The spray angle of droplet is limited by the gradient of facet 40 and 42 respectively.In certain embodiments, in facet 40 and 42
Coating material be similar, to print identical material across structure 25B and substrate 24.In other embodiments, coating material
Can be different, to print mixing or multilayer material on structure 25B and substrate 24.
Fig. 5 is the schematic sectional view for showing on-plane surface LIFT donors 22C details according to an embodiment of the invention.For
Body 22C passes through laser beam 28 (not shown in Fig. 5).In certain embodiments, donor 22C can be configured to through for LIFT techniques
Another laser or another light source of detection, such as LED or luminaire, as described below.
Top surface 33As of the donor 22C upper surface 23C parallel to substrate 24.Donor 22C lower surface 21C includes injustice
Row is in the surface 33A and 35A of substrate 24 substantially similar facet 50 and substantially similar facet 52 and parallel to the big of surface 33A
Cause similar facet 54.
Facet 50 and 52 can be coated with the identical material or different materials in each facet, as described in relation to fig. 4.One
In a little embodiments, facet 54 is not coated with, and for the Site Detection during LIFT techniques, to monitor LIFT typographies
Quality.Alternatively or additionally, uncoated facet can be used for additional detections application, such as registration and/or alignment.Via uncoated
Facet detection can be used with for spray identical laser or extra laser (not shown in Fig. 5) or it is any its
Its suitable light source (such as LED or luminaire), as described above.
In other embodiments, facet 54 can be coated with the material to be sprayed, generally in the injection shown in arrow 55
Perpendicular to substrate 24.The He of facet 50 is generally respectively perpendicular to from the injection (being shown respectively by arrow 51 and 53) of facet 50 and 52
52.Arrow 51 shows the left side wall and top surface of the coated structure 25C of droplet 30 from facet 50.Arrow 55 shows that droplet 30 is applied
Cover structure 25C top surface.Arrow 53 shows the coated structure 25C of droplet 30 right surface.The spray angle master of facet 50 and 52
To be set by the corresponding slope of facet.
Fig. 6 is the schematic sectional view for showing on-plane surface LIFT donors 22D details according to an embodiment of the invention.For
Body 22D passes through laser beam 28.Top surface 33As of the donor 22C upper surface 23D parallel to substrate 24.Donor 22D lower surface
21D includes one or more warp architectures 71, and they are coated on the top of donor 22D flat bottom surface 77 by donor membrane.
Each warp architecture 71 has thickness h and width L.Structure 71 is also referred to as element 71.For example, four flexure elements
Figure 6 illustrates and be assumed to be the section of the corresponding sphere with equal curvatures radius 73 to part 71.
However, it should be understood that element 71 may include substantially any curved surface, thus can for example including cylindrical cross-section or
The section of another bending entity (such as oval).Moreover, element 71 can be arranged on the 21D of surface in a periodic manner, or can be with
It is arranged to acyclic.
Generally, the width L of each element 71 is substantially greater than the thickness h of similar elements, to avoid when light beam is radiated at member
The distortion of the hot spot of light beam 28 when on part 71.In one embodiment, for the gap 79 between donor 22D and surface 33A 200
μm in 300 μ ms or bigger, thickness h is about 100 μm or smaller.These values in thickness and gap ensure donor 22D and base
Printing condition between plate 24 is substantially consistent.
The curvature and light beam 28 of element 71 are radiated at spray angle θ of the droplet 30 of the position restriction on element from elemente,
Droplet is usually orthogonal to irradiation area injection.Therefore, operator can control position of the light beam 28 on bending donor, with for base
Desired locations on plate obtain the required spray angle of given droplet 30.Generally, by controlling light beam 28, donor 22D and/or base
The position of plate 24, it is any angle in successive range that the spray angle of droplet 30, which may be selected, in operator, and thus can change every
Landing angle and landing place of the individual droplet 30 on surface 33A and structure 25D.In one embodiment, spray angle is continuous
Scope is located relative between+30 ° and -30 ° of the measurement of light beam 28.
For example, when light beam 28 is radiated on the center of element 71 and (assumed herein parallel to surface 33A), droplet 30
Surface 33A injections are usually orthogonal to, as indicated by arrow 72.In this case, droplet coating surface 33A or top surface 25D.Work as light
When beam 28 is radiated at the right side of element 71, droplet 30 occurs from the injection of donor membrane with an angle, as shown by arrows 74.In the feelings
Under condition, droplet drops to receptor surface 33A with non-normal angle (than angle 29 as described in Figure 3), or to structure 25D left side
Wall.Similarly, when light beam 28 is radiated at the left side of element 71, droplet 30 is from the injection of donor membrane to be radiated at element with light beam
The opposite angle in right side occurs, as shown in arrow 76.In this case, droplet with opposite angles (with the example shown in arrow 74
Compared to) drop to receptor surface 33A, or to structure 25D right side wall.
In the close packing of element 71, width L is indicated by the maximum allowable spray angle and thickness h of element 71.If
θmIt is maximum spray angle, then the width (for the element in the section of sphere) of element 71 is given by：
Thus, for example, setting thickness h as 100 μm, it is assumed that maximum spray angle is 30 °, and curved surface width L is about 750
μm, it is significantly greater than typical spot size.Similar consideration is applied to other compact warp architecture situations.
Fig. 7 is to show that on-plane surface LIFT donors 22E according to embodiments of the present invention (is not parallel to the surface 33A of substrate 24
And 35A) details schematic sectional view.Donor 22E is with donor 22E plane upper surface 23E and parallel to substrate 24
The angle of inclination 66 measured between surface 33A and 35A horizontal line is tilted.Surface 23E serves as donor 22E restriction flat table
Face, angle of inclination 66 is located at surface 23E and parallel between surface 33A, 35A of substrate 24 line.
Donor 22E pass through laser beam 28, and including by donor membrane coating and with skew angle towards substrate 24 lower surface
21E.Structure 25E is located on substrate 24, and generally has three-dimensional (3D) structure as shown in Figure 7.
In one embodiment, the shape characteristic in the identification structure of user 11 25E of equipment 10 (Fig. 1) 3D structures, and fixed
Position donor 22E cause the lower surface of donor at a skewed angle (i.e. anon-normal meets at surface) towards the surface of 3D structures.Once it is fixed
Position donor 22E and substrate 24, then user light beam 28 is guided to be radiated on donor 22E, with from donor membrane blasting materials to
3D structures, are usually orthogonal to donor 22E lower surface.For example, if angle 66 is equal to 10 °, droplet 30 is orthogonal to donor 22E's
Lower surface is sprayed, then droplet can be sprayed relative to the horizontal line parallel to substrate 24 with 100 °, and with the table relative to substrate 24
80 ° of the angle (90 ° -10 °) of face 33A measurements is dropped on structure 25E top surface.
In certain embodiments, donor 22E surface 21E include multiple facets, such as facet 61 and 64, they generally by
Donor membrane is coated.In other embodiments, surface 21E is plane (not including facet), and is coated with donor membrane.
During LIFT techniques, impulse radiation is transmitted into donor 22E by laser beam 28.The radiation is shone through surface 23E
Penetrate on the donor membrane of donor 22E lower surfaces, receptor surface is ejected into from donor membrane with the droplet of induced fusion material, in Fig. 7
Example in, each several part of the surface 33A and structure 25E of receptor surface including substrate 24 upper surface.
In the case of the first of donor 22E plane (non-facet) surface 21E, the spray angle from donor membrane is on donor
It is constant, thus, light beam 28 is towards structure 25E with the droplet ejection of 90 °+angle of angle 66.As a result, droplet 66 is with non-orthogonal angles
Degree is dropped on substrate 24 and structure 25E top surface.As described in above example, angle 66 is equal to 10 °, thus, from donor 22E
Spray angle be 100 °, the landing angle on structure 25E top surface is 80 °.Structure 25E side wall is dropped in droplet
In the case of on (being orthogonal to the surface of substrate 24), the surface that landing angle is commonly angled relative to side wall is 10 °.
In the second situation (shown in Fig. 7), donor 22E lower surface includes substantially similar facet 62 and substantially similar facet
64.In this embodiment, during LIFT techniques, light beam 28 passes through surface 23E, and is radiated on the donor membrane of facet 62, leads
Droplet 30 towards right side wall and structure 25E horizontal top surface is caused to spray (shown in arrow 68).In this case, spray and land
Angle depends on the skew angle of angle 66 and facet 62 relative to surface 21E.
For example, if angle 66 is equal to 10 °, facet 62 is 60 ° relative to the angle of donor 22E lower surface, and injection is just
The surface of facet 62 is met at, then sprays from the angle (arrow 68) of facet 62 and is equal to 10 °+60 °+90 °, relative to donor 22E's
Lower surface is equal to 160 °.Landing angle on the small top surface for dropping in structure 25E can be 20 ° (90 ° -70 °), structure 25E's
Landing angle in left orthogonal side walls can be 70 °.
Similarly, light beam 28 passes through donor 22E upper surface, and is radiated on the donor membrane of facet 64, causes droplet 30
Sprayed towards right side wall and structure 25E horizontal surface (shown in arrow 70).
In both embodiments, compared with parallel D-A construction, non-zero angle of inclination 66 provides donor 22E
Closer to the accurate location of substrate 24.Smaller distance typically results in the high printing quality of LIFT techniques between donor and acceptor.
In the figure 7, due to angle of inclination 66, donor 22E left side is less than right side, and can be carried together with facet 62 and 64
For the short distance between the film on donor 22E and structure 25E (to provide compared with the prior art systems in these short distances
The higher printing quality of droplet 30 on structure 25E).Tilt the feelings that embodiment provides the non-homogeneous height on structure 25E
High printing energy under condition, as shown in fig. 7, wherein, structure 25E right side is higher than the left side of structure.
As shown in fig. 7, the combination of many facet structures on non-zero angle of inclination 66 and donor 22E lower surface provides phase
Specific morphology for structure 25E is adapted to the flexibility of LIFT techniques.For example, in the figure 7, highest 3D structures are located at structure 25E
Right side, thus donor 22E be tilted to the left downwards.In 3D structures under the higher reverse situation in structure 25E left side, donor
22E can be tilted downwardly and to the right, it means that angle of inclination 66 is opposite with angle shown in Fig. 7.For example, except 10 °, angle 66 is-
10°(170°).The angle of inclination that can be adapted to and the combination of many facet structures of donor provide the table that can be used for obtaining donor 22E
The flexibility of small distance between face 21E and structure 25E, and thus provide any types 3D features for structure 25E
High printing quality.
It should be appreciated that above-described embodiment is referred in an illustrative manner, the invention is not restricted to what is be particularly shown and describe above.Really
Ground is cut, the scope of the present invention includes combination and the sub-portfolio of various features described above, and those skilled in the art are reading
It is described above it is conceivable that and undocumented various modifications and transformation in the prior art.
Claims (22)
1. for the equipment of the material deposition on receptor surface, including：
Transparent donor substrate, with the first and second relative surfaces so that at least a portion of second surface be not parallel to by
Body surface face, the transparent donor substrate also includes the donor membrane on second surface；And
Optical module, is configured to radiation beam guiding into first surface through donor substrate, and in the not parallel of second surface
Be radiated at the position of the part of receptor surface on donor membrane, with the droplet of induced fusion material from donor membrane be ejected into by
Body surface face.
2. equipment as claimed in claim 1, wherein, the second surface includes periodic structure.
3. equipment as claimed in claim 1, wherein, the second surface includes many facet structures.
4. equipment as claimed in claim 3, wherein, the second surface includes the first and second facets, and described first and the
Two facets are coated with opposite angular orientation with each different donor membranes.
5. equipment as claimed in claim 3, wherein, the second surface includes the first and second facets, and wherein, and only the
One facet is coated with donor membrane.
6. the equipment deposited for material, including：
Transparent donor substrate, with the first and second relative surfaces so that at least a portion of the second surface is non-flat
Face, the transparent donor substrate also includes the donor membrane on the non-flat portion of second surface；And
Optical module, is configured to radiation beam guiding into first surface through donor substrate, and in the on-plane surface of second surface
It is radiated at partial position on donor membrane, receptor surface is ejected into from donor membrane with the droplet of induced fusion material.
7. equipment as claimed in claim 6, wherein, the second surface includes periodic structure.
8. equipment as claimed in claim 6, wherein, the second surface includes warp architecture.
9. equipment as claimed in claim 6, wherein, the second surface includes many facet structures.
10. equipment as claimed in claim 9, wherein, the second surface includes the first and second facets, and described first and the
Two facets are coated with opposite angular orientation with each different donor membranes.
11. equipment as claimed in claim 9, wherein, the second surface includes the first and second facets, and wherein, only
First facet is coated with donor membrane.
12. a kind of method deposited for material, including：
Transparent donor substrate is provided, it has the first and second relative surfaces, and with the first He being located on second surface
Second facet, the first and second facets are with opposite angular orientation, and transparent donor substrate also includes being located at the first and second facets
On donor membrane；And
Neighbouring acceptor substrate positions donor substrate, and second surface is towards acceptor substrate；And
Radiation beam is guided into the first surface through donor substrate, and in the first and second facets in response to second surface and
It is radiated on donor membrane, is sprayed with the droplet of induced fusion material from the donor membrane in the first and second facets at the position of selection
To acceptor substrate.
13. method as claimed in claim 12, wherein, the droplet of melted material is from the donor membrane in the first and second facets
Injection is performed simultaneously.
14. method as claimed in claim 12, wherein, the droplet of melted material is from the donor membrane in the first and second facets
Injection is one after the other performed.
15. a kind of method deposited for material, including：
Transparent donor substrate is provided, it has the first and second relative surfaces, and with the donor membrane being located on second surface；
And
The receptor surface positioning donor substrate of neighbouring acceptor substrate, second surface is towards acceptor substrate, and with receptor surface
Angle of inclination orientation；And
Radiation beam is guided into the first surface through donor substrate, and irradiated while second surface is orientated with angle of inclination
On donor membrane, receptor surface is ejected into from donor membrane with the droplet of induced fusion material.
16. method as claimed in claim 15, wherein, positioning donor substrate includes the shape characteristic on identification receptor surface
Three-dimensional (3D) shape, and in response to 3D shape orientation donor substrates.
17. method as claimed in claim 15, wherein, the second surface includes warp architecture.
18. method as claimed in claim 15, wherein, the second surface of the donor substrate includes many facet structures.
19. method as claimed in claim 18, wherein, many facet structures are included with opposite angular orientation and with donor
First and second facets of film coating.
20. method as claimed in claim 19, including simultaneously from the donor membrane droplet ejection of the first and second facets to 3D shapes
Shape.
21. method as claimed in claim 19, including one after the other from the donor membrane droplet ejection of the first and second facets to 3D
Shape.
22. method as claimed in claim 15, wherein, the second surface of the donor substrate includes periodic structure.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562105761P | 2015-01-21 | 2015-01-21 | |
| US62/105,761 | 2015-01-21 | ||
| PCT/IL2016/050007 WO2016116921A1 (en) | 2015-01-21 | 2016-01-05 | Angled lift jetting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107206548A true CN107206548A (en) | 2017-09-26 |
| CN107206548B CN107206548B (en) | 2019-08-13 |
Family
ID=56416516
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201680006659.5A Expired - Fee Related CN107206548B (en) | 2015-01-21 | 2016-01-05 | It is sprayed before inclined induced with laser to conversion |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20170306495A1 (en) |
| EP (1) | EP3247529A4 (en) |
| KR (1) | KR20170102984A (en) |
| CN (1) | CN107206548B (en) |
| IL (1) | IL253169A0 (en) |
| TW (1) | TW201639654A (en) |
| WO (1) | WO2016116921A1 (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9925797B2 (en) | 2014-08-07 | 2018-03-27 | Orbotech Ltd. | Lift printing system |
| US10193004B2 (en) | 2014-10-19 | 2019-01-29 | Orbotech Ltd. | LIFT printing of conductive traces onto a semiconductor substrate |
| EP3247816A4 (en) | 2015-01-19 | 2018-01-24 | Orbotech Ltd. | Printing of three-dimensional metal structures with a sacrificial support |
| EP3322835A4 (en) | 2015-07-09 | 2019-02-27 | Orbotech Ltd. | Control of lift ejection angle |
| CN108349120B (en) | 2015-11-22 | 2020-06-23 | 奥博泰克有限公司 | Surface property control of printed three-dimensional structures |
| TW201901887A (en) * | 2017-05-24 | 2019-01-01 | 以色列商奧寶科技股份有限公司 | Electrical interconnection circuit components on the substrate without prior patterning |
| EP3521483A1 (en) * | 2018-02-06 | 2019-08-07 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Lift deposition apparatus and method |
| CN113767451A (en) * | 2019-05-07 | 2021-12-07 | 奥宝科技有限公司 | LIFT printing using thin donor foil |
| US11446750B2 (en) | 2020-02-03 | 2022-09-20 | Io Tech Group Ltd. | Systems for printing solder paste and other viscous materials at high resolution |
| US11622451B2 (en) | 2020-02-26 | 2023-04-04 | Io Tech Group Ltd. | Systems and methods for solder paste printing on components |
| EP3893611A1 (en) | 2020-04-07 | 2021-10-13 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO | Controlled deposition method of a donor material onto a target surface and plate therefor |
| US11497124B2 (en) * | 2020-06-09 | 2022-11-08 | Io Tech Group Ltd. | Methods for printing conformal materials on component edges at high resolution |
| US11691332B2 (en) | 2020-08-05 | 2023-07-04 | Io Tech Group Ltd. | Systems and methods for 3D printing with vacuum assisted laser printing machine |
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- 2016-01-05 WO PCT/IL2016/050007 patent/WO2016116921A1/en active Application Filing
- 2016-01-05 CN CN201680006659.5A patent/CN107206548B/en not_active Expired - Fee Related
- 2016-01-05 KR KR1020177022327A patent/KR20170102984A/en unknown
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201639654A (en) | 2016-11-16 |
| WO2016116921A1 (en) | 2016-07-28 |
| US20170306495A1 (en) | 2017-10-26 |
| CN107206548B (en) | 2019-08-13 |
| EP3247529A1 (en) | 2017-11-29 |
| KR20170102984A (en) | 2017-09-12 |
| IL253169A0 (en) | 2017-08-31 |
| EP3247529A4 (en) | 2019-01-16 |
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