US20160256949A1 - Apparatus For Dispensing Flux-Free Solder On A Substrate - Google Patents

Apparatus For Dispensing Flux-Free Solder On A Substrate Download PDF

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US20160256949A1
US20160256949A1 US15/156,197 US201615156197A US2016256949A1 US 20160256949 A1 US20160256949 A1 US 20160256949A1 US 201615156197 A US201615156197 A US 201615156197A US 2016256949 A1 US2016256949 A1 US 2016256949A1
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Prior art keywords
stamp
solder
substrate
recess
wire
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US15/156,197
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Heinrich Berchtold
Rene Betschart
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Besi Switzerland AG
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Besi Switzerland AG
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Priority to US15/156,197 priority Critical patent/US20160256949A1/en
Publication of US20160256949A1 publication Critical patent/US20160256949A1/en
Assigned to BESI SWITZERLAND AG reassignment BESI SWITZERLAND AG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BETSCHART, RENE, BERCHTOLD, HEINRICH
Abandoned legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/06Solder feeding devices; Solder melting pans
    • B23K3/0607Solder feeding devices
    • B23K3/063Solder feeding devices for wire feeding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/06Soldering, e.g. brazing, or unsoldering making use of vibrations, e.g. supersonic vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/20Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/02Soldering irons; Bits
    • B23K3/025Bits or tips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/04Heating appliances
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08Auxiliary devices therefor
    • B23K3/085Cooling, heat sink or heat shielding means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
    • H01L23/49513Lead-frames or other flat leads characterised by the die pad having bonding material between chip and die pad
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
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    • H01L2224/0381Cleaning, e.g. oxide removal step, desmearing
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    • H01L2224/27Manufacturing methods
    • H01L2224/273Manufacturing methods by local deposition of the material of the layer connector
    • H01L2224/2733Manufacturing methods by local deposition of the material of the layer connector in solid form
    • H01L2224/27334Manufacturing methods by local deposition of the material of the layer connector in solid form using preformed layer
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    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83192Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
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    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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    • H01L2224/83801Soldering or alloying
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    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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    • H01L24/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L24/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
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    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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    • H01L2924/0001Technical content checked by a classifier
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    • H01L2924/30Technical effects
    • H01L2924/38Effects and problems related to the device integration
    • H01L2924/384Bump effects
    • H01L2924/3841Solder bridging

Definitions

  • the invention relates to an apparatus for dispensing flux-free solder on a substrate.
  • Soldering methods of this kind are typically but not exclusively used in the mounting of semiconductor chips on a metallic substrate, a so-called leadframe.
  • Power semiconductors are usually mainly connected by means of soft soldering with the substrate, which usually consists of copper, in order to ensure a more effective dissipation of the heat losses from the semiconductor chip via the soldered joint in comparison with mounting by means of an adhesive.
  • High requirements are placed on the homogeneity of the soldered joint, especially in the case of increased power density, i.e. a defined thickness, even distribution and perfect wetting of the solder layer over the entire chip area as well as complete freedom from bubbles and purity of the soldered joint are demanded.
  • the solder should not escape laterally from the soldering gap and spread next to the semiconductor chip, which again requires precise dosing and positioning of the solder portions.
  • the shape of the deposited solder is either round or a specific punching die needs to be produced for every rectangular shape.
  • Such a punching die comprises side walls which cover a part of the substrate.
  • the solder can therefore not be applied up to the edge of the chip island which accommodates the semiconductor chip.
  • the substrate needs to be heated up over the melting temperature of the solder and the deposited solder needs to be kept in liquid form from the application until the placement of the semiconductor chip.
  • the parts that come into contact with the liquid solder need to be cleaned regularly, for which purpose production needs to be interrupted.
  • solder preforms made of soldering metal
  • the solder preforms are then placed on the substrate and molten down by the same in order to form a soldering layer in the required dimensions.
  • This method is relatively expensive and offers little flexibility due to the required prefabrication of the solder preforms and the additional mounting operations.
  • solder wire is guided through the writing head of a solder dispenser, with the wire being brought into contact with the heated substrate when applying the solder, so that the solder will melt at the end of the wire, and with the writing head being moved along a predetermined path parallel to the surface of the substrate.
  • the solder dispenser writes a solder track in this manner on the substrate. It is disadvantageous in this method that the substrate can only be wetted insufficiently without preceding cleaning.
  • the invention is based on the object of developing a method and apparatus for the application of flux-free solder to a substrate which no longer shows the mentioned disadvantages.
  • the method for dispensing flux-free solder onto substrate places of a substrate uses a dispensing apparatus comprising a dispenser head which comprises a stamp, an ultrasonic head configured to apply ultrasound to the stamp and a wire feed.
  • the stamp has a working surface which has a recess open to a lateral surface of the stamp.
  • the wire feed feeds the solder wire under an angle diagonally to the surface of the substrate.
  • the method preferably further comprises feeding the solder wire through a nozzle and actively cooling the nozzle.
  • an apparatus for dispensing flux-free solder onto substrate places of a substrate comprises
  • a dispenser head which is movable in two horizontal directions, and, optionally, in the vertical direction, comprising
  • a stamp having a working surface, which has a recess open toward a lateral surface of the stamp, wherein the stamp is fastenable on the ultrasonic head,
  • a wire feed having a nozzle having a longitudinal borehole, through which the solder wire can be guided, wherein a longitudinal axis of the wire feed, which extends through the longitudinal borehole of the nozzle, enters at the lateral surface of the stamp into the recess and is incident on the substrate within a part of the working surface bounded by the recess, and
  • a cooling device which is configured to keep the working temperature of the stamp at a predetermined temperature.
  • the apparatus preferably further comprises a further cooling device for cooling the nozzle of the wire feed.
  • the apparatus preferably further comprises a drive fastened on the dispenser head, which is configured to move the ultrasonic head with the stamp up and down in the vertical direction.
  • the recess of the stamp is coated with a material which poorly wets flux-free solder.
  • FIG. 1 schematically shows a side view of a dispenser head of a dispensing station of a machine for soldering semiconductor chips on a substrate
  • FIG. 2 shows a stamp
  • FIG. 3 shows a path, which the stamp covers on a substrate place.
  • FIG. 1 schematically shows a side view of those parts of a dispensing station of a machine for soldering semiconductor chips on a substrate which are required for understanding the invention.
  • the dispensing station comprises an apparatus for applying flux-free solder onto the individual substrate places of a substrate 1 .
  • the substrate 1 rests on a heatable support 3 .
  • the apparatus comprises a dispenser head 2 , which is movable in two horizontal directions, designated with x and y, and, optionally, can be raised and lowered in the vertical direction, designated with z.
  • the dispenser head 2 comprises an ultrasonic head 4 , on which a stamp 5 is removably fastened, and a wire feed 6 .
  • the ultrasonic head 4 is configured to apply ultrasound to the stamp 5 , preferably longitudinal ultrasonic waves, which run in the z direction, i.e. their oscillation direction is directed perpendicularly to the support 3 .
  • the frequency of the ultrasonic waves is preferably in the range from 40 kHz to 200 kHz, typically at approximately 60 kHz.
  • the processing of the substrate 1 with ultrasound improves the wetting ability locally on the surface on which the solder is desired, and thus reduces the undesired running over of the solder, which is known in technical jargon as “solder bleed out”.
  • the wire feed 6 comprises a nozzle 7 , e.g., a capillary made of ceramic, having a longitudinal borehole, through which the solder wire 8 is guided, and drive means, in order to advance and retract the solder wire 8 .
  • the drive means comprise, for example, a drive roller 9 driven by a motor and a counter pressure roller 10 , between which the solder wire 8 is guided through.
  • the solder wire 8 is typically wound onto a roll, which is either arranged in a stationary manner on the dispensing station or is arranged on the dispenser head 2 .
  • the stamp 5 has a working surface 11 facing toward the substrate 1 , which is used to distribute the solder.
  • the stamp 5 is implemented with a recess 12 , which leads from a lateral surface 13 of the stamp 5 facing toward the wire feed 6 to the working surface 11 and therefore opens into the working surface 11 .
  • the nozzle 7 is aligned diagonally to the vertical at a predetermined angle ⁇ and is arranged in such a manner that a longitudinal axis 14 of the wire feed 6 , which extends through the longitudinal borehole of the nozzle 7 , enters at the lateral surface 13 of the stamp 5 into the recess 12 and is incident on the substrate 1 within the part of the working surface 11 bounded by the recess 12 .
  • FIG. 2 shows the stamp 5 placed on a substrate 1 in a perspective view. It can be seen clearly therein that the solder wire 8 is incident on the substrate 1 within the recess 12 of the stamp 5 , and since the temperature of the substrate 1 is higher than the melting temperature of the solder, the end of the solder wire 8 melts. As a result of the formation of the stamp 5 of the dispenser head 2 with the recess 12 and the diagonal feed of the solder wire 8 , the tip of the solder wire 8 touches the substrate place within the recess 12 of the dispenser head 2 . The solder wire 8 does not touch the stamp 5 : the melting of solder therefore occurs due to the contact with the hot substrate 1 and not due to contact with the stamp 5 .
  • the recess 12 of the stamp 5 therefore represents, as can be clearly seen in FIG. 2 , a cavity which is open toward the wire feed 6 and toward the working surface 11 .
  • the cavity is bounded on the side facing toward the substrate 1 on three sides and is only open toward the wire feed 6 .
  • the stamp 5 or at least its working surface 11 preferably consists of a copper alloy such as brass or bronze, or of a silver-copper alloy having a high proportion of silver and a low proportion of copper, which the flux-free solder wets well.
  • the surface of the stamp 5 delimited by the recess 12 can be coated with a material which is poorly wettable with solder. Chromium is such a material, for example. This prevents solder from adhering to the inner side of the recess 12 , which could have the result that the quantity of solder delivered is not always equal.
  • the outer side of the stamp 5 can also be coated with such a material.
  • the dispenser head 2 preferably has a first cooling device 15 ( FIG. 1 ), which ensures that the temperature of the solder wire 8 within the nozzle 7 is below the melting temperature of the solder and the solder wire 8 remains sufficiently stiff to be able to be advanced or retracted by the drive means.
  • the temperature of the support 3 and therefore also the temperature of the substrate 1 are above the melting temperature of the solder.
  • Essential parts of the apparatus protrude additionally into a nearly closed chamber (a furnace), in which typically a N 2 H 2 atmosphere prevails, in order to reduce oxides formed on the substrate.
  • the melting temperature of flux-free solders is typically in a range of 300 to 320° C.
  • the support 3 is heated to a temperature above this, typically of 360-380° C.
  • a temperature of 360-380° C. then also prevails relatively rapidly in the furnace.
  • the dispenser head 2 therefore preferably has a second cooling device 16 ( FIG. 1 ), which is used for the purpose of keeping the temperature of the stamp 5 within a predetermined temperature window.
  • the cooling device 16 is therefore configured to regulate the temperature of the stamp 5 to a predetermined working temperature.
  • the working temperature is in the range of the melting temperature of the solder, typically within a processing window which extends from a few degrees Kelvin below the melting temperature up to a few degrees Kelvin above the melting temperature of the solder. Experiments have shown that a to low working temperature has the result that solder collects on the working surface of the stamp, which falls off of the stamp 5 from time to time, while a to high working temperature can result in erosion of the stamp 5 .
  • the cooling device 16 is used for the purpose of dissipating heat from the stamp 5 , so that the working temperature of the stamp 5 remains within the predetermined temperature window, in which these effects do not occur or are at least greatly reduced.
  • the cooling device 16 can contain an integrated heater, which is used for the purpose of heating the stamp 5 to the working temperature before the beginning of the mounting process, on the one hand, and which is used for the purpose of regulating the temperature of the stamp 5 to the desired working temperature together with the cooling device 16 , on the other hand.
  • the dispenser head 2 Since the dispenser head 2 has a rather high mass and therefore also a relatively large inertia because of the diverse components, it is advantageous to attach a drive 17 on the dispenser head 2 , which allows the ultrasonic head 4 with the stamp 5 to be moved up and down in the vertical direction, i.e., in the z direction.
  • a voice coil detector for example, is provided for detecting the point in time at which the stamp 5 comes into contact with the substrate 1 as it is lowered.
  • the method according to the invention for applying flux-free solder onto the substrate places of the substrate 1 comprises the following steps, for which purpose the above-described dispensing apparatus is used:
  • the drive means continuously advance the solder wire 8 and solder is continuously melted off from its end.
  • the predetermined path can be designed in such a manner that the stamp 5 partially protrudes beyond the edge of the substrate place. In this manner, the solder can completely cover the substrate place.
  • the application of ultrasound to the stamp 5 causes the solder to be well wetted on the substrate place.
  • the application of the solder advantageously begins in the center of the substrate place, so that it is very well wetted there and no longer flows away.
  • ultrasonic waves it is possible to vary the strength and the frequency of the ultrasonic waves according to a predetermined profile, in particular, single or multiple ultrasonic pulses (ultrasonic bursts) can be applied.
  • the solder wire 8 Since the solder wire 8 conducts heat extraordinarily well, it always absorbs heat when it is brought into contact with the substrate 1 in step C to deposit a solder portion, whereby the nozzle 7 and/or further components of the wire feed 6 heat up.
  • the nozzle 7 is therefore actively cooled by the cooling device 15 if necessary, so that the temperature of the solder wire 8 remains below its melting temperature and the solder wire 8 remains sufficiently stiff to be able to be pushed out of the nozzle 7 and retracted back into the nozzle 7 by the drive without problems.
  • the semiconductor chip is mounted on a substrate place 18 , whose dimensions are approximately equal to the dimensions of the semiconductor chip.
  • the substrate is typically a so-called lead frame.
  • the substrate place 18 is connected via thin webs (not shown) to the frame of the lead frame.
  • the solder portion must then typically cover the entire substrate place 18 .
  • it is advantageous to move the stamp 5 along a path 19 which leads at least partially along the edge 20 of the substrate place 18 and is determined in such a manner that the working surface 11 of the stamp 5 protrudes beyond the edge 20 and therefore only still partially touches the substrate place 18 .
  • FIG. 3 illustrates this.
  • the path 19 begins in the center or close to the center of the substrate place 18 and then first leads along path sections located in the interior of the substrate place 18 step-by-step outward until it finally leads along the edge 20 of the substrate place 18 .
  • the path 19 leads from the inside to the outside. Since in the case of such a path 19 , firstly the regions of the substrate place 18 located in the interior are treated with ultrasound, the solder wets well there, so that as a result no solder is sprayed away from the substrate place 18 .
  • the path 19 is only shown as an example here, it can also be composed of other path sections.
  • the outline of the working surface 11 of the stamp 5 is square, however, it can also be rectangular or round or have any arbitrary other shape. It is advantageous in the case of certain applications to move the stamp 5 at the starting point of the path 19 in the direction which is opposite to the lateral surface 13 having the recess 12 . As a result of the capillary effect, the molten solder is nonetheless distributed.

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Abstract

An apparatus for dispensing flux-free solder comprises a dispenser head with a stamp to which ultrasound can be applied. Solder is dispensed by:
  • A) moving the dispenser head above a next substrate place,
  • B) lowering the stamp until the working surface of the stamp touches the substrate place or is located at a predetermined height above the substrate place,
  • C) dispensing solder by:
    • C1) advancing the solder wire until the solder wire touches the substrate place, in such a manner that the tip of the solder wire touches the substrate place within a recess of the stamp,
    • C2) further advancing of solder wire to melt a predetermined quantity of solder, and
    • C3) retracting the solder wire,
  • D) moving the dispenser head to distribute the solder on the substrate place, and simultaneously applying ultrasound to the stamp, and
  • E) raising the stamp.

Description

  • PRIORITY CLAIM
  • Applicant hereby claims foreign priority under 35 U.S.C. §119 from Swiss Patent Application No. 1044/12 filed Jul. 5, 2012, the disclosure of which is herein incorporated by reference.
  • FIELD OF THE INVENTION
  • The invention relates to an apparatus for dispensing flux-free solder on a substrate.
  • BACKGROUND OF THE INVENTION
  • Soldering methods of this kind are typically but not exclusively used in the mounting of semiconductor chips on a metallic substrate, a so-called leadframe. Power semiconductors are usually mainly connected by means of soft soldering with the substrate, which usually consists of copper, in order to ensure a more effective dissipation of the heat losses from the semiconductor chip via the soldered joint in comparison with mounting by means of an adhesive. High requirements are placed on the homogeneity of the soldered joint, especially in the case of increased power density, i.e. a defined thickness, even distribution and perfect wetting of the solder layer over the entire chip area as well as complete freedom from bubbles and purity of the soldered joint are demanded. On the other hand, the solder should not escape laterally from the soldering gap and spread next to the semiconductor chip, which again requires precise dosing and positioning of the solder portions.
  • In the field of mounting semiconductor chips a method is widely spread in practical use in which the end of a solder wire is brought into contact with the substrate that his heated over the melting temperature of the solder in order to melt down a piece of the wire. This method is generally well suited for mass production due to its simplicity and flexibility. However, the obtained approximately circular wetting surface is badly adapted to the rectangular or square shape of the semiconductor chips. A punching die is further known from U.S. Pat. No. 6,056,184 with which the portion of solder deposited on the substrate can be brought into a flat shape which is adjusted to the rectangular shape of the semiconductor chips. It is also known to move the end of the soldering metal wire with a writing head along a specific path, with the heated substrate continuously melting down the solder. A track of solder is thereby deposited on the substrate.
  • From U.S. Pat. No. 5,878,939 a method is known in which liquid solder is injected into a cavity formed between a molding die and the substrate.
  • These known methods come with a number of disadvantages. The shape of the deposited solder is either round or a specific punching die needs to be produced for every rectangular shape. Such a punching die comprises side walls which cover a part of the substrate. The solder can therefore not be applied up to the edge of the chip island which accommodates the semiconductor chip. Moreover, the substrate needs to be heated up over the melting temperature of the solder and the deposited solder needs to be kept in liquid form from the application until the placement of the semiconductor chip. It is also disadvantageous that the parts that come into contact with the liquid solder need to be cleaned regularly, for which purpose production needs to be interrupted.
  • From U.S. Pat. No. 4,577,398 and U.S. Pat. No. 4,709,849 a method is known in which flat preforms made of soldering metal (so-called “solder preforms”) are prefabricated, the dimensions of which are adjusted to the semiconductor chips. The solder preforms are then placed on the substrate and molten down by the same in order to form a soldering layer in the required dimensions. This method is relatively expensive and offers little flexibility due to the required prefabrication of the solder preforms and the additional mounting operations.
  • From US 2009-145950 a method and apparatus are known in which a solder wire is guided through the writing head of a solder dispenser, with the wire being brought into contact with the heated substrate when applying the solder, so that the solder will melt at the end of the wire, and with the writing head being moved along a predetermined path parallel to the surface of the substrate. The solder dispenser writes a solder track in this manner on the substrate. It is disadvantageous in this method that the substrate can only be wetted insufficiently without preceding cleaning.
  • SUMMARY OF THE INVENTION
  • The invention is based on the object of developing a method and apparatus for the application of flux-free solder to a substrate which no longer shows the mentioned disadvantages.
  • The method for dispensing flux-free solder onto substrate places of a substrate uses a dispensing apparatus comprising a dispenser head which comprises a stamp, an ultrasonic head configured to apply ultrasound to the stamp and a wire feed. The stamp has a working surface which has a recess open to a lateral surface of the stamp. The wire feed feeds the solder wire under an angle diagonally to the surface of the substrate. The method comprises the following steps:
    • A) moving the dispenser head to a predetermined position above the next substrate place onto which solder is to be dispensed,
    • B) lowering the stamp until
      • B1) the working surface of the stamp touches the substrate place, or
      • B2) the working surface of the stamp is located at a predetermined height above the substrate place, or
      • B3) the working surface of the stamp touches the substrate place, and raising the stamp to a predetermined height above the substrate place,
        wherein the height mentioned in B2 and B3 is set in such a manner that the working surface of the stamp is wetted with solder in the later following step D,
    • C) dispensing flux-free solder to the substrate place by:
      • C1) advancing the solder wire until the solder wire touches the substrate place, in such a manner that the tip of the solder wire touches the substrate place within the recess of the stamp,
      • C2) further advancing of solder wire, in order to melt a predetermined quantity of solder, and
      • C3) retracting the solder wire,
    • D) moving the dispenser head along a predetermined path in order to distribute the solder on the substrate place, and simultaneously applying ultrasound to the stamp, and
    • E) raising the stamp, wherein
      step D is carried out either after step C3 or already begins during step C2.
  • The method preferably further comprises feeding the solder wire through a nozzle and actively cooling the nozzle.
  • According to the invention, an apparatus for dispensing flux-free solder onto substrate places of a substrate comprises
  • a dispenser head, which is movable in two horizontal directions, and, optionally, in the vertical direction, comprising
  • an ultrasonic head,
  • a stamp having a working surface, which has a recess open toward a lateral surface of the stamp, wherein the stamp is fastenable on the ultrasonic head,
  • a wire feed having a nozzle having a longitudinal borehole, through which the solder wire can be guided, wherein a longitudinal axis of the wire feed, which extends through the longitudinal borehole of the nozzle, enters at the lateral surface of the stamp into the recess and is incident on the substrate within a part of the working surface bounded by the recess, and
  • a cooling device, which is configured to keep the working temperature of the stamp at a predetermined temperature.
  • The apparatus preferably further comprises a further cooling device for cooling the nozzle of the wire feed.
  • The apparatus preferably further comprises a drive fastened on the dispenser head, which is configured to move the ultrasonic head with the stamp up and down in the vertical direction.
  • Preferably, the recess of the stamp is coated with a material which poorly wets flux-free solder.
  • BRIEF DESCRIPTION OF THE DRAWING FIGURES
  • The accompanying drawings, which are incorporated into and constitute a part of this specification, illustrate one or more embodiments of the present invention and, together with the detailed description, serve to explain the principles and implementations of the invention. The figures are not to scale. In the drawings:
  • FIG. 1 schematically shows a side view of a dispenser head of a dispensing station of a machine for soldering semiconductor chips on a substrate,
  • FIG. 2 shows a stamp, and
  • FIG. 3 shows a path, which the stamp covers on a substrate place.
  • DETAILED DESCRIPTION OF THE INVENTION
  • FIG. 1 schematically shows a side view of those parts of a dispensing station of a machine for soldering semiconductor chips on a substrate which are required for understanding the invention. The dispensing station comprises an apparatus for applying flux-free solder onto the individual substrate places of a substrate 1. The substrate 1 rests on a heatable support 3. The apparatus comprises a dispenser head 2, which is movable in two horizontal directions, designated with x and y, and, optionally, can be raised and lowered in the vertical direction, designated with z. The dispenser head 2 comprises an ultrasonic head 4, on which a stamp 5 is removably fastened, and a wire feed 6. The ultrasonic head 4 is configured to apply ultrasound to the stamp 5, preferably longitudinal ultrasonic waves, which run in the z direction, i.e. their oscillation direction is directed perpendicularly to the support 3. The frequency of the ultrasonic waves is preferably in the range from 40 kHz to 200 kHz, typically at approximately 60 kHz. The processing of the substrate 1 with ultrasound improves the wetting ability locally on the surface on which the solder is desired, and thus reduces the undesired running over of the solder, which is known in technical jargon as “solder bleed out”.
  • The wire feed 6 comprises a nozzle 7, e.g., a capillary made of ceramic, having a longitudinal borehole, through which the solder wire 8 is guided, and drive means, in order to advance and retract the solder wire 8. The drive means comprise, for example, a drive roller 9 driven by a motor and a counter pressure roller 10, between which the solder wire 8 is guided through. The solder wire 8 is typically wound onto a roll, which is either arranged in a stationary manner on the dispensing station or is arranged on the dispenser head 2.
  • The stamp 5 has a working surface 11 facing toward the substrate 1, which is used to distribute the solder. The stamp 5 is implemented with a recess 12, which leads from a lateral surface 13 of the stamp 5 facing toward the wire feed 6 to the working surface 11 and therefore opens into the working surface 11. The nozzle 7 is aligned diagonally to the vertical at a predetermined angle α and is arranged in such a manner that a longitudinal axis 14 of the wire feed 6, which extends through the longitudinal borehole of the nozzle 7, enters at the lateral surface 13 of the stamp 5 into the recess 12 and is incident on the substrate 1 within the part of the working surface 11 bounded by the recess 12.
  • FIG. 2 shows the stamp 5 placed on a substrate 1 in a perspective view. It can be seen clearly therein that the solder wire 8 is incident on the substrate 1 within the recess 12 of the stamp 5, and since the temperature of the substrate 1 is higher than the melting temperature of the solder, the end of the solder wire 8 melts. As a result of the formation of the stamp 5 of the dispenser head 2 with the recess 12 and the diagonal feed of the solder wire 8, the tip of the solder wire 8 touches the substrate place within the recess 12 of the dispenser head 2. The solder wire 8 does not touch the stamp 5: the melting of solder therefore occurs due to the contact with the hot substrate 1 and not due to contact with the stamp 5. The recess 12 of the stamp 5 therefore represents, as can be clearly seen in FIG. 2, a cavity which is open toward the wire feed 6 and toward the working surface 11. The cavity is bounded on the side facing toward the substrate 1 on three sides and is only open toward the wire feed 6.
  • The stamp 5 or at least its working surface 11 preferably consists of a copper alloy such as brass or bronze, or of a silver-copper alloy having a high proportion of silver and a low proportion of copper, which the flux-free solder wets well. The surface of the stamp 5 delimited by the recess 12 can be coated with a material which is poorly wettable with solder. Chromium is such a material, for example. This prevents solder from adhering to the inner side of the recess 12, which could have the result that the quantity of solder delivered is not always equal. The outer side of the stamp 5 can also be coated with such a material.
  • The dispenser head 2 preferably has a first cooling device 15 (FIG. 1), which ensures that the temperature of the solder wire 8 within the nozzle 7 is below the melting temperature of the solder and the solder wire 8 remains sufficiently stiff to be able to be advanced or retracted by the drive means.
  • The temperature of the support 3 and therefore also the temperature of the substrate 1 are above the melting temperature of the solder. Essential parts of the apparatus protrude additionally into a nearly closed chamber (a furnace), in which typically a N2H2 atmosphere prevails, in order to reduce oxides formed on the substrate.
  • The melting temperature of flux-free solders is typically in a range of 300 to 320° C. The support 3 is heated to a temperature above this, typically of 360-380° C. A temperature of 360-380° C. then also prevails relatively rapidly in the furnace. These values are examples, they can deviate therefrom in the specific case.
  • The dispenser head 2 therefore preferably has a second cooling device 16 (FIG. 1), which is used for the purpose of keeping the temperature of the stamp 5 within a predetermined temperature window. The cooling device 16 is therefore configured to regulate the temperature of the stamp 5 to a predetermined working temperature. The working temperature is in the range of the melting temperature of the solder, typically within a processing window which extends from a few degrees Kelvin below the melting temperature up to a few degrees Kelvin above the melting temperature of the solder. Experiments have shown that a to low working temperature has the result that solder collects on the working surface of the stamp, which falls off of the stamp 5 from time to time, while a to high working temperature can result in erosion of the stamp 5. The cooling device 16 is used for the purpose of dissipating heat from the stamp 5, so that the working temperature of the stamp 5 remains within the predetermined temperature window, in which these effects do not occur or are at least greatly reduced.
  • The cooling device 16 can contain an integrated heater, which is used for the purpose of heating the stamp 5 to the working temperature before the beginning of the mounting process, on the one hand, and which is used for the purpose of regulating the temperature of the stamp 5 to the desired working temperature together with the cooling device 16, on the other hand.
  • Since the dispenser head 2 has a rather high mass and therefore also a relatively large inertia because of the diverse components, it is advantageous to attach a drive 17 on the dispenser head 2, which allows the ultrasonic head 4 with the stamp 5 to be moved up and down in the vertical direction, i.e., in the z direction. A voice coil detector, for example, is provided for detecting the point in time at which the stamp 5 comes into contact with the substrate 1 as it is lowered.
  • The method according to the invention for applying flux-free solder onto the substrate places of the substrate 1 comprises the following steps, for which purpose the above-described dispensing apparatus is used:
    • A) moving the dispenser head 2 to a predetermined position above the next substrate place onto which solder is to be dispensed,
    • B) lowering the stamp 5 until
      • B1) the working surface 11 of the stamp 5 touches the substrate place, or
      • B2) the working surface 11 of the stamp 5 is located at a predetermined height above the substrate place, or
      • B3) the working surface 11 of the stamp 5 touches the substrate place, and raising the stamp 5 to a predetermined height above the substrate place,
        wherein the height mentioned in B2 and B3 is set in such a manner that the working surface 11 of the stamp 5 is wetted with solder in the later following step D,
    • C) dispensing flux-free solder to the substrate place by:
      • C1) advancing the solder wire 8 until the solder wire 8 touches the substrate place, in such a manner that the tip of the solder wire 8 touches the substrate place within the recess 12 of the stamp 5,
      • C2) further advancing of solder wire 8, in order to melt a predetermined quantity of solder, and
      • C3) retracting the solder wire 8,
    • D) moving the dispenser head 2 along a predetermined path in order to distribute the solder on the substrate place, and simultaneously applying ultrasound to the stamp 5, and
    • E) raising the stamp 5, wherein
      step D is carried out either after step C3 or already begins during step C2.
  • If steps C2 and D are carried out simultaneously, this means that the drive means continuously advance the solder wire 8 and solder is continuously melted off from its end. The predetermined path can be designed in such a manner that the stamp 5 partially protrudes beyond the edge of the substrate place. In this manner, the solder can completely cover the substrate place. The application of ultrasound to the stamp 5 causes the solder to be well wetted on the substrate place. In order to prevent solder from spraying away, the application of the solder advantageously begins in the center of the substrate place, so that it is very well wetted there and no longer flows away.
  • It is possible to vary the strength and the frequency of the ultrasonic waves according to a predetermined profile, in particular, single or multiple ultrasonic pulses (ultrasonic bursts) can be applied.
  • Since the solder wire 8 conducts heat extraordinarily well, it always absorbs heat when it is brought into contact with the substrate 1 in step C to deposit a solder portion, whereby the nozzle 7 and/or further components of the wire feed 6 heat up. The nozzle 7 is therefore actively cooled by the cooling device 15 if necessary, so that the temperature of the solder wire 8 remains below its melting temperature and the solder wire 8 remains sufficiently stiff to be able to be pushed out of the nozzle 7 and retracted back into the nozzle 7 by the drive without problems.
  • In many applications, the semiconductor chip is mounted on a substrate place 18, whose dimensions are approximately equal to the dimensions of the semiconductor chip. The substrate is typically a so-called lead frame. The substrate place 18 is connected via thin webs (not shown) to the frame of the lead frame. The solder portion must then typically cover the entire substrate place 18. To achieve this, it is advantageous to move the stamp 5 along a path 19, which leads at least partially along the edge 20 of the substrate place 18 and is determined in such a manner that the working surface 11 of the stamp 5 protrudes beyond the edge 20 and therefore only still partially touches the substrate place 18. FIG. 3 illustrates this. Those parts of the path 19 in which the working surface 11 of the stamp 5 protrudes beyond the edge 20 are shown by solid arrows, the remaining parts of the path 19 are shown by dashed arrows. The path 19 begins in the center or close to the center of the substrate place 18 and then first leads along path sections located in the interior of the substrate place 18 step-by-step outward until it finally leads along the edge 20 of the substrate place 18. In other words, the path 19 leads from the inside to the outside. Since in the case of such a path 19, firstly the regions of the substrate place 18 located in the interior are treated with ultrasound, the solder wets well there, so that as a result no solder is sprayed away from the substrate place 18. The path 19 is only shown as an example here, it can also be composed of other path sections. In this example, the outline of the working surface 11 of the stamp 5 is square, however, it can also be rectangular or round or have any arbitrary other shape. It is advantageous in the case of certain applications to move the stamp 5 at the starting point of the path 19 in the direction which is opposite to the lateral surface 13 having the recess 12. As a result of the capillary effect, the molten solder is nonetheless distributed.
  • While embodiments and applications of this invention have been shown and described, it would be apparent to those skilled in the art having the benefit of this disclosure that many more modifications than mentioned above are possible without departing from the inventive concepts herein. The invention, therefore, is not to be restricted except in the spirit of the appended claims and their equivalents.

Claims (9)

1-16. (canceled)
17. An apparatus for dispensing flux-free solder onto substrate places of a substrate, comprising
a dispenser head, which is movable in two horizontal directions, and, optionally, in the vertical direction, comprising
an ultrasonic head,
a stamp having a working surface, which has a recess open toward a lateral surface of the stamp, wherein the stamp is fastenable on the ultrasonic head,
a wire feed having a nozzle having a longitudinal borehole configured to guide the solder wire, wherein the wire feed is mounted on the dispenser head such that an axis, which extends through the longitudinal borehole of the nozzle, enters at the lateral surface of the stamp into the recess and is incident on the substrate within a part of the working surface bounded by the recess, and
a cooling device, which is configured to keep the working temperature of the stamp at a predetermined temperature.
18. The apparatus according to claim 17, further comprising
a further cooling device for cooling the nozzle of the wire feed.
19. The apparatus according to claim 17, further comprising
a drive fastened on the dispenser head, which is configured to move the ultrasonic head with the stamp up and down in the vertical direction.
20. The apparatus according to claim 18, further comprising
a drive fastened on the dispenser head, which is configured to move the ultrasonic head with the stamp up and down in the vertical direction.
21. The apparatus according to claim 17, wherein the recess of the stamp is coated with a material which is poorly wettable by flux-free solder.
22. The apparatus according to claim 18, wherein the recess of the stamp is coated with a material which is poorly wettable by flux-free solder.
23. The apparatus according to claim 19, wherein the recess of the stamp is coated with a material which is poorly wettable by flux-free solder.
24. The apparatus according to claim 20, wherein the recess of the stamp is coated with a material which is poorly wettable by flux-free solder.
US15/156,197 2012-07-05 2016-05-16 Apparatus For Dispensing Flux-Free Solder On A Substrate Abandoned US20160256949A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020160915A1 (en) 2019-02-08 2020-08-13 Jenoptik Optical Systems Gmbh Method for soldering one or more components

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014109934A1 (en) * 2014-07-15 2016-01-21 Pac Tech - Packaging Technologies Gmbh Device for isolated application of connection material depots
CN108326390B (en) * 2017-01-17 2021-03-23 白光株式会社 Fusion control device and computer-readable storage medium
CN110190001B (en) * 2019-06-05 2020-11-03 扬州扬杰电子科技股份有限公司 Processing technology of axial diode

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1352558A (en) * 1970-05-22 1974-05-08 Kollmorgen Corp Apparatus for making wire scribed circuit boards
JPS57188832A (en) * 1981-05-18 1982-11-19 Hitachi Ltd Soldering method
JPS6334269Y2 (en) * 1981-05-28 1988-09-12
US4577398A (en) 1984-09-07 1986-03-25 Trilogy Computer Development Partners, Ltd. Method for mounting a semiconductor chip
US4709849A (en) 1985-11-27 1987-12-01 Fry Metals, Inc. Solder preform and methods employing the same
JPS6450595A (en) 1987-08-21 1989-02-27 Oki Electric Ind Co Ltd Connection of semiconductor device
US4898117A (en) * 1988-04-15 1990-02-06 International Business Machines Corporation Solder deposition system
CH680176A5 (en) * 1989-11-14 1992-06-30 Esec Sa
JPH04178266A (en) * 1990-11-08 1992-06-25 Apollo Seiko Kk Structure of soldering iron tip
GB9126530D0 (en) * 1991-12-13 1992-02-12 Spirig Ernest Soldering device
JPH0745646A (en) 1993-07-28 1995-02-14 Hitachi Ltd Solder application device
EP0970774B1 (en) 1995-07-01 2002-07-24 ESEC Trading SA Molding die for dispensing liquid solder
DE19619771A1 (en) * 1996-02-12 1997-08-14 David Finn Ultrasonic bonding method e.g. for mounting wire conductor on substrate surface
JP2844330B2 (en) * 1996-05-09 1999-01-06 黒田電気株式会社 Ultrasonic soldering method and apparatus
DE59708121D1 (en) 1997-01-08 2002-10-10 Esec Trading Sa Device for forming liquid portions of solder when soldering semiconductor chips
EP1011132A2 (en) * 1998-12-18 2000-06-21 Ford Motor Company Ultrasonic bumping of electronic components
SG91867A1 (en) * 2000-05-24 2002-10-15 Casem Asia Pte Ltd Improved apparatus and method for dispensing solder
JP3319740B2 (en) * 2000-06-02 2002-09-03 株式会社日鉱マテリアルズ Brazing material coating device
US6744003B1 (en) * 2001-07-30 2004-06-01 Harry Ono Automatic soldering machine
JP4080326B2 (en) 2002-12-27 2008-04-23 キヤノンマシナリー株式会社 Brazing material supply nozzle
JP2006315043A (en) * 2005-05-13 2006-11-24 Toko Inc Reflow welding equipment
JP2007287934A (en) * 2006-04-17 2007-11-01 Npc:Kk Ultrasonic soldering device
JP2008296265A (en) * 2007-06-01 2008-12-11 Canon Inc Soldering device
US7699208B2 (en) * 2007-11-30 2010-04-20 Nordson Corporation Soldering tip, soldering iron, and soldering system
US7735715B2 (en) * 2007-12-07 2010-06-15 Asm Assembly Automation Ltd Dispensing solder for mounting semiconductor chips
JP5411542B2 (en) * 2008-10-27 2014-02-12 和仁 鬼頭 Welding equipment
JP2011051007A (en) * 2009-09-04 2011-03-17 Japan Unix Co Ltd Ultrasonic soldering device
DE102010000520A1 (en) * 2010-02-23 2011-08-25 SCHOTT Solar AG, 55122 Method and device for applying solder to a workpiece
US20110272452A1 (en) 2010-05-04 2011-11-10 Kui Kam Lam System for dispensing soft solder for mounting semiconductor chips using multiple solder wires
DE102010016814B3 (en) * 2010-05-05 2011-10-06 Schott Solar Ag Method and device for applying solder to a workpiece
JP5498879B2 (en) * 2010-07-09 2014-05-21 本田技研工業株式会社 Soldering apparatus and method
CH705035B1 (en) * 2011-05-23 2016-03-31 Esec Ag Method for dispensing solder on a substrate and method for mounting a semiconductor chip.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020160915A1 (en) 2019-02-08 2020-08-13 Jenoptik Optical Systems Gmbh Method for soldering one or more components
DE102019103140A1 (en) * 2019-02-08 2020-08-13 Jenoptik Optical Systems Gmbh Method for soldering one or more components

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TW201408409A (en) 2014-03-01
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US9339885B2 (en) 2016-05-17
US20140008421A1 (en) 2014-01-09
CH706712A1 (en) 2014-01-15
TWI561324B (en) 2016-12-11
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CN103521871B (en) 2016-12-28
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CH706738A2 (en) 2014-01-15
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ITAN20130119A1 (en) 2014-01-06
MX362114B (en) 2019-01-07

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