US20150085454A1 - Power module - Google Patents
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- US20150085454A1 US20150085454A1 US14/330,045 US201414330045A US2015085454A1 US 20150085454 A1 US20150085454 A1 US 20150085454A1 US 201414330045 A US201414330045 A US 201414330045A US 2015085454 A1 US2015085454 A1 US 2015085454A1
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- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
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Definitions
- Embodiments of the present invention relate to a power module. More particularly, embodiments of the present invention relate to a power module for a power converter.
- a semiconductor power device is an indispensable part in a conventional power converter.
- Power density of a power device corresponds to an output power of the power module per unit volume.
- the higher the power density the smaller the power module, so less space is occupied. Therefore, having a high power density has always been an industrial requirement for power modules.
- an integrated power module IPM is developed. The IPM integrates a number of semiconductor devices into a package, so high output power can be achieved with a small volume, ultimately increasing the power density.
- IPMs utilize direct bonded cooper (DBC) substrates.
- DBC direct bonded cooper
- a high-temperature sintering process is applied to a ceramic tile and a sheet of copper.
- a copper layer formed by the sintering process can then be etched to form conductive tracks.
- the high-temperature sintering process requires high energy consumption and therefore does not meet the trend of energy-saving.
- the power module has a high requirement for flow capacity, so the copper layer of the DBC substrate generally requires being thicker than 0.1 millimeters (mm). However, as the copper layer gets thicker, the copper layer needs to be eroded deeper for etching.
- etching's isotropic characteristics Due to etching's isotropic characteristics, a lateral etching of the copper layer becomes wider as the copper layer is being eroded deeper. Through such operation, widths of the conductive tracks and gaps between the conductive tracks are increased, meaning the widths of the conductive tracks and the gaps between the conductive tracks are constrained to a certain degree. Consequently the layout area of the electrical circuit per unit volume is decreased.
- a thicker copper layer such as one having a thickness of 0.5 mm, is usually required. However, such thickness is difficult to achieve, due to the coefficient of thermal expansion (CTE) of the high-temperature sintering process for DCB substrates. As a result, the output power of the power module per unit volume is reduced, thereby causing the power density of the power module to drop.
- CTE coefficient of thermal expansion
- the present invention provides a power module.
- the power module comprises a first substrate, a first metal layer, at least one conductive structure, at least one power device.
- the first metal layer is disposed on the first substrate.
- the first metal layer has a first thickness d1.
- the first thickness d1 satisfies: 5 ⁇ m ⁇ d1 ⁇ 50 ⁇ m.
- the at least one conductive structure is disposed at a position different to the first metal layer on the first substrate.
- the conductive structure has a second thickness d2.
- the second thickness d2 satisfies: d2 ⁇ 100 ⁇ m.
- the at least one power device is disposed on the first substrate, the first metal layer or the conductive structure.
- the driving electrode of the power device is electrically coupled to the first metal layer, and at least one power electrode of the power device is electrically coupled to the conductive structure.
- An aspect of the present invention provides a power module.
- the power module comprises a first substrate, a first metal layer, at least a conductive structure, a driving component and at least a power device.
- the first metal layer is disposed on the first substrate.
- the first metal layer has a first thickness d1.
- the first thickness d1 satisfies: 5 ⁇ m ⁇ d1 ⁇ 50 ⁇ m.
- the conductive structure is disposed at a position different to the first metal layer on the first substrate.
- the conductive structure has a second thickness d2.
- the second thickness d2 satisfies: d2 ⁇ 100 ⁇ m.
- the driving component is disposed on the first substrate or the first metal layer.
- the at least one power device is disposed on the first substrate, the first metal layer or the conductive structure.
- the driving electrode of the power device is electrically coupled to the driving component, and the at least one power electrode of the power device is electrically coupled to the conductive structure.
- a driving electrode of the power device is electrically coupled to the first metal layer or a driving component on the first metal layer.
- the gap within the first metal layer is formed by isotropic etching, and since the thickness of the first metal layer is merely between 5 ⁇ m and 50 ⁇ m, a width of the lateral etching is not too large, thereby effectively reducing a size of the gap of the first metal layer.
- the gap of the first metal layer can be narrower than the gap between wiring routes of a conventional direct bonded cooper (DBC) substrate. As a result the layout density per unit area can be increased, thus increasing the power density.
- DBC direct bonded cooper
- FIG. 1 is a diagram illustrating a cross-sectional view of a power module according to a first embodiment of the present invention
- FIG. 2 is a circuit diagram illustrating a power module according to a first embodiment of the present invention
- FIG. 3 is another circuit diagram illustrating a power module according to a first embodiment of the present invention.
- FIG. 4 is a diagram illustrating a cross-sectional view of a power module according to a second embodiment of the present invention.
- FIG. 5 is diagram illustrating a cross-sectional view of a power module according to a third embodiment of the present invention.
- FIG. 6 is a diagram illustrating a cross-sectional view of a power module according to a fourth embodiment of the present invention.
- FIG. 7 is a diagram illustrating a cross-sectional view of a power module according to a fifth embodiment of the present invention.
- FIG. 8 is a diagram illustrating a cross-sectional view of a power module according to a sixth embodiment of the present invention.
- FIG. 9 is a diagram illustrating a cross-sectional view of a power module according to a seventh embodiment of the present invention.
- FIG. 10 is a diagram illustrating a cross-sectional view of a power module according to an eighth embodiment of the present invention.
- FIG. 11 is a diagram illustrating a cross-sectional view of a power module according to a ninth embodiment of the present invention.
- FIG. 12 is a diagram illustrating a cross-sectional view of a power module according to a tenth embodiment of the present invention.
- FIG. 13 is a diagram illustrating a cross-sectional view of a power module according to an eleventh embodiment of the present invention.
- FIG. 14 is a diagram illustrating a cross-sectional view of a power module according to a twelfth embodiment of the present invention.
- FIG. 15 is a diagram illustrating a cross-sectional view of a power module according to a thirteenth embodiment of the present invention.
- FIG. 16 is a diagram illustrating a cross-sectional view of a power module according to a fourteenth embodiment of the present invention.
- FIG. 17 is a diagram illustrating a cross-sectional view of a power module according to a fifteenth embodiment of the present invention.
- FIG. 18 is a diagram illustrating a cross-sectional view of a power module according to a sixteenth embodiment of the present invention.
- FIG. 19 is a diagram illustrating a cross-sectional view of a power module according to a seventeenth embodiment of the present invention.
- FIG. 1 is a diagram illustrating a cross-sectional view of a power module according to a first embodiment of the present invention.
- the power module comprises a sealing body 100 and a first substrate 210 .
- a first metal layer 210 , a second metal layer 314 , conductive structures 410 , 420 and 430 , and at least one power device 500 are disposed on the first substrate 210 .
- the first substrate 210 is disposed in the sealing body 100 .
- the sealing body 100 covers at least the first metal layer 312 , the conductive structures 410 and 430 , a part of the conductive structure 420 and the power device 500 for protection.
- the conductive structure 420 has an exposed part 422 .
- the exposed part 422 is exposed out of the sealing body 100 , and electrically connects to an external device.
- the exposed part 422 can be realized by a lead frame, for instance.
- the first substrate 210 comprises a top side 212 and a bottom side 214 which are relative to each other.
- the first metal layer 312 is disposed on the top side 212 of the first substrate 210 .
- the first metal layer 312 is thinner than the conductive structures 410 , 420 and 430 .
- the second metal layer 314 is disposed between the first substrate 210 and each of the conductive structures 410 , 420 and 430 , so as to carry the conductive structures 410 , 420 and 430 .
- the second metal layer 314 and the first metal layer 312 have the same thickness.
- the thickness of the second metal layer 314 can be different to that of the first metal layer 312 .
- the second metal layer 314 can be formed on the first substrate 210 via a process (e.g., etching, vapor deposition, sputtering or electroplating, etc.) independently.
- the second metal layer 314 can also be formed on the first substrate 210 via the same process as the first metal layer 312 .
- the second metal layer 314 and the first metal layer 312 can be formed on the first substrate 210 via a process at the same time.
- the first metal layer 312 is not covered by the conductive structure 410 .
- the first metal layer 312 is merely at a position different to the conductive structure 410 on the first substrate 210 .
- copper paste and the first substrate 210 are sintered to form the first metal layer 312 , at the same time, the copper and the first substrate 210 are sintered to form the conductive structure 410 .
- the power device comprises a driving electrode 510 and a plurality of power electrodes 520 and 530 .
- the driving electrode 510 and the power electrode 520 are disposed at a side, which is furthest away from the conductive structure 410 , of the power device 500 .
- the power electrode 530 is disposed at a side, which is closest to the conductive structure 410 , of the power device 500 . In other words, the power electrode 530 is disposed on the conductive structure 410 and is electrically connected to the conductive structure 410 .
- the driving electrode 510 is electrically connected to the first metal layer 312 .
- the power electrode 520 is electrically connected to the power device 500 on the conductive structure 420 .
- the power electrode of the power device 500 on the conductive structure 420 is electrically connected to the conductive structure 420 .
- the power device 500 can utilize the first metal layer 312 for circuit layouts.
- the first metal layer 312 is of a first thickness d1.
- the first thickness d1 satisfies the condition of 5 ⁇ m ⁇ d1 ⁇ 50 ⁇ m.
- the first metal layer 312 comprising a gap 316 , so the material around the gap 316 can form a routing pattern.
- the gap 316 within the first metal layer 312 is formed by isotropic etching.
- the first metal layer 312 Since the thickness of the first metal layer 312 is merely between 5 ⁇ m and 50 ⁇ m, the first metal layer 312 is relatively thin, so the lateral etching of the first metal layer 312 is not too large, thereby effectively reducing a size of the gap 316 of the first metal layer 312 .
- the gap 316 of the first metal layer 312 can be narrower than that of a conventional direct bonded cooper (DBC) substrate, and a width of the wiring route of the first metal layer can be narrower than that of the conventional DBC substrate.
- DBC direct bonded cooper
- the layout area per unit volume can be increased, thus increasing the power density.
- the first metal layer 312 can be formed on the first substrate 210 by utilizing processes other than etching.
- the first metal layer 312 can be formed on the first substrate 210 by vapor deposition, sputtering or electroplating, etc. Hence the first metal layer 312 is not affected by etching's isotropic characteristics, so the gap 316 and the width of the wiring routes can all be controlled to be even narrower. In addition, since the first metal layer 312 does not have to go through the high-temperature sintering process with the first substrate 210 , the energy consumption of the manufacturing process can be reduced.
- each of the conductive structure 410 has a second thickness d2.
- the second thickness d2 satisfies the condition of d2 ⁇ 100 ⁇ m, so as to meet a flow capacity requirement of the power module.
- the gap 316 within the first metal layer 312 is directly formed by the process (such as etching, etc.) that produces the first metal layer 312 , the size of the gap 316 is not affected by the thickness of the conductive structure 410 . Therefore, a thicker conductive structure 410 can be utilized to achieve a higher flow capacity, without having to consider the size of the gap 316 .
- the first thickness d1 corresponds to a one-dimensional length of the first metal layer 312 , measured in a direction of the normal of the top side 212 of the first substrate 210 which is horizontal to the first metal layer 312 .
- the second thickness d2 corresponds to a one-dimensional length of the conductive structure 410 , measured in a direction of the normal of the top side 212 of the first substrate 210 which is horizontal to the conductive structure 410 .
- the power device 500 can be a three-port device such as a MOSFET or an IGBT, etc., but the present invention is not limited thereto.
- the driving electrode 510 can be the gate (terminal G)
- the power electrode 520 can be the source (terminal S)
- the power electrode 530 can be the drain (terminal D).
- the gate 510 and the source 520 are at a top side, which is further away from the conductive structure 410 , of the MOSFET (as illustrated by FIG. 1 ).
- the drain 530 is disposed on the conductive structure 410 and is electrically connected to the conductive structure 410 .
- a circuit that applies a voltage in between the driving electrode 510 (the gate) and the power electrode 520 (the source) is a driving circuit, where a source of the driving circuit is of the same electrode as the power electrode 520 (the source).
- the driving electrode 510 is electrically connected to the first metal layer 312 , at least a part of the driving circuit can be realized by the first metal layer 312 .
- the gap 316 within the first metal layer 312 is narrower, the wiring routes of the driving circuit can be implemented even closer to each other, so as to increase a driving capability. Taking a MOSFET with 4 pins as an example, as shown in FIG.
- the MOSFET with 4 pins differs to the MOSFET with 3 pins in that an electrode 522 is led-out from the source 520 .
- a circuit that applies a voltage in between the driving electrode 510 (the gate) and the electrode 522 is the driving circuit.
- the electrode 522 is electrically connected to the first metal layer 312 , at least a part of the driving circuit can be realized by the first metal layer 312 . Also, since the gap 316 within the first metal layer 312 is narrower, the wiring routes of the driving circuit can be implemented to be even closer to each other, so as to increase a driving capability.
- the driving electrode 510 is electrically connected to the first metal layer 312 and the power electrode 520 is electrically connected to the power device on the conductive structure 420 .
- the electrode 522 which is led-out from the power electrode 520 can also be electrically connected to the first metal layer 312 .
- the driving electrode 510 and the electrode 522 which are led-out from the power electrode 520 can all be wired to the first metal layer 312 , and by performing circuit layouts through the first metal layer 312 , which comprises the gap 316 (i.e., the gap 316 is narrow), the power density can be increased. For instance, if the power electrode 520 is the source, the electrode 522 which is led-out from the source can be wired directly to the first metal layer 312 .
- the power module can further comprise a plurality of bonding structures, such as bonding layers 610 and 620 .
- the bonding layer 610 is disposed between the power device 500 and each of the conductive structures 410 , 420 and 430 , so as to fix the power device 500 on the conductive structures 410 , 420 and 430 , as well as to electrically connect the conductive structure 410 to the power electrode 530 of the power device 500 .
- the bonding layer 620 is disposed between the second metal layer 314 and each of the conductive structures 410 , 420 and 430 , so as to fix the conductive structures 410 , 420 and 430 on the second metal layer 314 .
- the bonding layers 610 and 620 can be a solder, a conductive adhesive, a conductive paste or a sintering paste, etc. Materials of the bonding layers 610 and 620 can be the same or different. For instance, the bonding layer 610 can be a solder and the bonding layer 620 can be a sintering paste.
- the first substrate 210 can be a ceramic substrate.
- FIG. 4 is a diagram illustrating a cross-sectional view of a power module according to a second embodiment of the present invention.
- the present embodiment differs to the first embodiment mainly in that the power module of the present embodiment further comprises a plurality of flattening structures 318 .
- the flattening structure 318 is disposed on a surface, which is opposite to the first substrate 210 , of the first metal layer 312 .
- the flattening structure 318 has a flat upper surface, which is suitable for wirings.
- the flattening structure 318 can be realized by a coating of platted nickel, silver, nickel gold or platted palladium, etc., on the first metal layer 312 .
- Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter.
- FIG. 5 is diagram illustrating a cross-sectional view of a power module according to a third embodiment of the present invention.
- the present embodiment differs to the first embodiment mainly in that the power module of the present embodiment further comprises an adhesive structure 710 .
- the adhesive structure 710 is disposed between the conductive structure 410 and the first substrate 210 , so as to conduct the heat of the conductive structure 410 to the first substrate 210 .
- FIG. 1 and FIG. 3 together it can be observed that the adhesive structure 710 has replaced the second metal layer 314 and the bonding layer 620 under the conductive structure 410 . Since the second metal layer 314 is omitted in the present embodiment, the manufacturing cost of the second metal layer 314 can be further saved.
- the adhesive structure 710 can be disposed below the conductive structure 410 so as to fill the gap between the conductive structures 410 and 420 . Through such operation, the sealing body 100 and the first substrate 210 can be combined more closely by the adhesive structure 710 .
- the adhesive structure 710 can be a thermal paste or a thermal film, etc., but the present invention is not limited thereto. Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter.
- FIG. 6 is a diagram illustrating a cross-sectional view of a power module according to a fourth embodiment of the present invention.
- the present embodiment differs to the first embodiment mainly in that the power module of the present embodiment further comprises a third metal layer 320 .
- the third metal layer 320 is disposed on the bottom side 214 of the first substrate 210 , so as to reduce electromagnetic noise and prevent moist infiltration.
- the third metal layer 320 can be a metal conductive layer which is disposed on a surface of the sealing body 100 , so as to reduce electromagnetic noise and prevent moist infiltration.
- Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter.
- FIG. 7 is a diagram illustrating a cross-sectional view of a power module according to a fifth embodiment of the present invention.
- the present embodiment differs to the first embodiment mainly in that the power module of the present embodiment further comprises a second substrate 220 .
- the sealing body 100 comprises a bottom surface 110 and an upper surface 120 which are relative to each other.
- the first substrate 210 and the second substrate 220 are separated from each other.
- the first substrate 210 is closer to the bottom surface 110 and the second substrate 220 is closer to the upper surface 120 .
- the first substrate 210 and the second substrate 220 are disposed within the sealing object 100 in a vertical symmetry, so as to prevent the power module from warpage or deformation.
- the power module can further comprise a fourth metal layer 330 .
- the second substrate 220 comprises a top side 222 and a bottom side 224 which are relative to each other.
- the top side 222 of the second substrate 220 is closer to the first substrate 210 than the bottom side 224 .
- the fourth metal layer 330 is disposed on the top side 222 of the second substrate 220 .
- the fourth metal layer 330 on the second substrate 220 can be utilized for circuit layouts, even if the first metal layer 312 does not have a sufficient area for circuit layouts.
- an electronic component 730 can be disposed on the fourth metal layer 330 .
- the power module can further comprise a connector 720 .
- the connector 720 is electrically connected to the conductive structure 420 and the fourth metal layer 330 , so the electronic component 730 on the fourth metal layer 330 can be electrically connected to the conductive structure 420 .
- the connector 720 can also support the second substrate 220 and the first substrate 210 .
- the connector 720 can also be electrically connected to the first metal layer 312 and the fourth metal layer 330 .
- Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter.
- FIG. 8 is a diagram illustrating a cross-sectional view of a power module according to a sixth embodiment of the present invention.
- the present embodiment differs to the fifth embodiment mainly in that the power module of the present embodiment further comprises a fifth metal layer 340 .
- the fifth metal layer 340 is disposed on the bottom side 224 of the second substrate 220 , so as to reduce electromagnetic noise and prevent moist infiltration.
- the fifth metal layer 340 can be a metal conductive layer, which is disposed on the surface of the sealing body 100 , so as to reduce electromagnetic noise and prevent moist infiltration.
- Other technical features of the present embodiment are similar to those of the fifth embodiment, so relative descriptions are omitted hereinafter.
- FIG. 9 is a diagram illustrating a cross-sectional view of a power module according to a seventh embodiment of the present invention.
- the present embodiment differs to the first embodiment mainly in that the first substrate 210 comprises a plurality of sub-substrates 210 a and 210 b .
- the sub-substrates 210 a and 210 b are separated from each other.
- the first substrate 210 of the present embodiment is divided to at least two separate sub-substrates 210 a and 210 b , the sub-substrate 210 a or the sub-substrate 210 b must be shorter than the whole first substrate 210 .
- the sub-substrates 210 a and the sub-substrate 210 b are warped due to heat, the corresponding warpage height is lower, so the warpage is reduced to a certain extent.
- the first metal layer 312 is disposed on the sub-substrates 210 a and 210 b .
- the conductive structure 410 and the power device 500 can be disposed on the sub-substrate 210 a
- the conductive structure 420 and the power device 500 can be disposed on the sub-substrate 210 b .
- the power devices 500 can be electrically connected by bonding wires.
- Other technical features of the present embodiment are similar to those of the fifth embodiment, so relative descriptions are omitted hereinafter.
- FIG. 10 is a diagram illustrating a cross-sectional view of a power module according to an eighth embodiment of the present invention.
- the present embodiment differs to the first embodiment mainly in that the shapes of the conductive structures 410 and 420 are different to those of the first embodiment.
- the conductive structure 410 comprises a body 412 and a locking structure 414 .
- the sealing body 100 is fixed by the locking structure 414 .
- the locking structure 414 is extended out of the body 412 and is covered by the sealing body 100 .
- the locking structure 414 is fixed within the sealing body 100 .
- the body 412 of the conductive structure 410 is not smooth without fluctuant forms, as the locking structure 414 is extended out of the body 412 .
- the conductive structure 420 also comprises a body 424 and a locking structure 426 .
- the locking structure 426 is fixed to the sealing body 100 . More specifically, the locking structure 426 is extended out of the body 424 and is fixed within the sealing body 100 , so the sealing body 100 is less likely to detach from the conductive structure 420 .
- each of the locking structures 414 and 426 can be a notch, a protrusion or a cavity, etc., but the present invention is not limited thereto. Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter.
- FIG. 11 is a diagram illustrating a cross-sectional view of a power module according to a ninth embodiment of the present invention.
- the present embodiment differs to the first embodiment mainly in that the power module of the present embodiment further comprises a heat dissipation structure 740 .
- the conductive structure 410 is disposed on the top side 212 of the first substrate 210 .
- the heat dissipation structure 740 is disposed on the bottom side 214 of the first substrate 210 , meaning the heat dissipation structure 740 is disposed below the first substrate 210 .
- the heat dissipation structure 740 can then conduct the heat to an external environment.
- the power module can further comprise an adhesive layer 630 .
- the adhesive layer 630 is disposed between the bottom side 214 of the first substrate 210 and the heat dissipation structure 740 , so as to fix the first substrate 210 to the heat dissipation structure 740 .
- the adhesive layer 630 can be a thermal paste or a thermal film, etc., so the heat can be conducted to the heat dissipation structure 740 more effectively.
- Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter.
- FIG. 12 is a diagram illustrating a cross-sectional view of a power module according to a tenth embodiment of the present invention.
- the present embodiment differs to the ninth embodiment mainly in that the power module of the present embodiment further comprises a third metal layer 320 .
- the third metal layer 320 is disposed at the bottom side 214 of the first substrate 210 .
- the heat dissipation structure 740 is disposed below the third metal layer 320 . More specifically, the third metal layer 320 is disposed between the bottom side 214 of the first substrate 210 and the adhesive layer 630 , so as to conduct the heat from the first substrate 210 to the adhesive layer 630 .
- the third metal layer 320 can also lower the electromagnetic noise.
- Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter.
- FIG. 13 is a diagram illustrating a cross-sectional view of a power module according to an eleventh embodiment of the present invention.
- the present embodiment differs to the first embodiment mainly in that the sealing body 100 in the first embodiment is replaced by a case 810 and a sealing paste 820 in the present embodiment.
- the case 810 is disposed on the first substrate 210 and the case 810 has an accommodating space 812 .
- the sealing paste 820 is within the accommodating space 812 .
- the sealing paste 820 covers at least the first metal layer 312 , the conductive structures 410 , 420 and 430 , and the power device 500 for protection.
- the exposed part 422 is exposed out of the case 810 .
- Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter.
- FIG. 14 is a diagram illustrating a cross-sectional view of a power module according to a twelfth embodiment of the present invention.
- the present embodiment differs to the eleventh embodiment mainly in that the power module of the present embodiment further comprises a third metal layer 320 , an adhesive layer 630 and a heat dissipation structure 740 .
- the third metal layer 320 is disposed at the bottom side 214 of the first substrate 210 .
- the heat dissipation structure 740 is disposed below the third metal layer 320 .
- the adhesive layer 630 is disposed between the third metal layer 320 and the heat dissipation structure 740 .
- the case 810 is disposed on the heat dissipation structure 740 .
- the first substrate 210 , the first metal layer 312 , the second metal layer 320 , the conductive structures 410 , 420 and 430 and the power device 500 are disposed within the accommodating space 812 .
- the adhesive paste 820 covers at least the first substrate 210 , the first metal layer 312 , the conductive structures 410 , 420 and 430 , and the power device 500 for protection.
- the exposed part 422 is exposed out of the case 810 .
- the heat generated by the power device 500 can be conducted to the heat dissipation structure 740 and the heat dissipation structure 740 can then conduct the heat to an external environment.
- the power module can further comprise a heat dissipation structure.
- the heat dissipation structure is disposed below the first substrate 210 mentioned above.
- the case 810 is disposed on the heat dissipation structure.
- the first substrate 210 , the first metal layer 312 , the conductive structures 410 , 420 and 430 and the power device 500 are disposed within the accommodating space 812 .
- the adhesive paste 820 covers at least the first substrate 210 , the first metal layer 312 , the conductive structures 410 , 420 and 430 , and the power device 500 for protection.
- the heat generated by the power device 500 can be conducted to the heat dissipation structure 740 , so the heat dissipation structure 740 can then conduct the heat to an external environment.
- Other technical features of the present embodiment are similar to those of the first embodiment and the eleventh so relative descriptions are omitted hereinafter.
- FIG. 15 is a diagram illustrating a cross-sectional view of a power module according to a thirteenth embodiment of the present invention.
- the present embodiment differs to the first embodiment mainly in that the power module of the present embodiment can further comprise a driving component 910 .
- the driving component 910 is disposed on the first metal layer 312 .
- the driving electrode 510 of the power device 500 is electrically connected to an output electrode of the driving component 910 .
- the driving component 910 can be a driving chip, which drives the power device 500 through the driving electrode 510 .
- the driving electrode 510 of the power device 500 can be wired directly to the driving component 910 .
- a number of the driving component 910 is not limited to one.
- One driving component can correspond to one power device 500 , or to a plurality of power device 500 .
- the driving component 910 when a lower surface of the driving component 910 is not electrically led-out, the driving component 910 can be disposed directly on the first substrate 210 .
- An electrode on an upper surface of the driving component 910 can be electrically connected to the first metal layer 312 via methods such as conjunction wirings, etc., and the driving electrode 510 of the power device 500 can be wired directly to the first metal layer 312 . Through such operation, a driving circuit can be formed.
- the driving electrode 510 of the power device 500 and the driving component 910 can be electrically connected by wiring to the first metal layer 312 respectively.
- the driving component 910 can also be replaced by a controlling component.
- the controlling component can be a controller chip, which controls the power device 500 via the driving electrode 510 .
- the controlling component can be disposed on the first metal layer 312 or on the first substrate 210 .
- An output electrode of the controlling component can be electrically connected to the driving electrode 510 of the power device 500 , so as to control the power device 500 .
- Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter.
- FIG. 16 is a diagram illustrating a cross-sectional view of a power module according to a fourteenth embodiment of the present invention.
- the present embodiment differs to the thirteenth embodiment mainly in that the power module of the present embodiment can further comprise a passive component 920 .
- the passive component 920 is disposed on the first substrate 210 . More specifically, the passive component 920 is disposed on the first metal layer 312 and is electrically connected to the driving component 910 .
- the passive component 920 can be a capacitor, a resistor, a diode or an inductor, etc., but the present invention is not limited thereto. Although only one passive component 920 is illustrated in FIG. 16 , a number of the passive component 920 is not limited to one. There can be a plurality of passive components 920 and the present invention is not limited thereto. Other technical features of the present embodiment are similar to those of the first embodiment and the thirteenth embodiment, so relative descriptions are omitted hereinafter.
- FIG. 17 is a diagram illustrating a cross-sectional view of a power module according to a fifteenth embodiment of the present invention.
- the present embodiment differs to the fourteenth embodiment mainly in that the passive component 930 can be formed by applying/printing a material of the passive component 930 directly to the first substrate 210 and the respective electrically led-out part of the passive component 930 can be formed directly via the first metal layer 312 .
- a resistive material can be printed on the first substrate 210 to form a resistor, where two electrodes of the resistor can be formed by covering the resistive material directly on the first metal layer 312 . More specifically, a material of the first metal layer 312 is firstly printed and the resistive material is then printed to a desired location.
- the first metal layer 312 and the resistor can then be formed by sintering.
- the first metal layer 312 can also be formed first before printing the resistive material to a desired location to form a resister.
- the resistive material can also be printed on the first metal layer 312 to form a resistor.
- the resistive material can be printed on both of the first substrate 210 and the first metal layer 312 to form a resistor.
- a sandwich-like structure of a metal layer/a high di-electric material layer/a metal layer can be printed onto the first metal layer 312 in an interlaced manner, so as to form a capacitor.
- a sandwich-like structure of a high permeability material/a metal/a high permeability material can be printed onto the first metal layer 312 in an interlaced manner, so as to form an inductor (such method can also be utilized to form a hollow inductor or a semi-hollow inductor).
- a sandwich-like structure of a metal layer/a high di-electric material layer/a metal layer can be printed onto the first substrate 210 in an interlaced manner, so as to form a capacitor.
- a sandwich-like structure of a high permeability material/a metal/a high permeability material can be printed onto the first substrate 210 in an interlaced manner, so as to form an inductor.
- a sandwich-like structure of a metal layer/a high di-electric material layer/a metal layer can be printed onto the first substrate 210 and the first metal layer 312 in an interlaced manner, so as to form a capacitor.
- a sandwich-like structure of a high permeability material/a metal/a high permeability material metal layer can be printed, in an interlaced manner, onto the first substrate 210 and the first metal layer 312 to form an inductor.
- a plurality of metal layout layers (the metal layout layers can be designed to become different circuit patterns according to practical needs) and a plurality of insulating layers can be formed on the first substrate 210 through a printing process, meaning the metal layout layers and the insulating layers are printed, in an interlaced manner, onto the first substrate 210 .
- a multi-layer layout can be realized by having a perforation in the insulating layer to electrically connect different locations of an upper metal wiring layer and a lower metal wiring layer (i.e., the upper and the lower metal wiring layers can be neighboring metal wiring layers or non-neighboring metal wiring layers), so as to increase the layout density.
- Other technical features of the present embodiment are similar to those of the first embodiment, the thirteenth embodiment and the fourteenth embodiment, so relative descriptions are omitted hereinafter.
- FIG. 18 is a diagram illustrating a cross-sectional view of a power module according to a sixteenth embodiment of the present invention.
- the present embodiment differs to the thirteenth embodiment mainly in that the power module of the present embodiment can further comprise a passive component 920 and a circuit board 940 .
- the circuit board 940 is disposed on the first metal layer 312 .
- the driving component 910 and the passive component 920 are disposed on the circuit board 940 . Since a layout density of the circuit board 940 is high, the controlling component, the driving component 910 and the passive component 920 are preferred to be disposed on the circuit board 940 .
- a material of the circuit board 940 can be a heat insulating material, which blocks the heat from flowing to the driving component 910 as the driving component 910 may be damaged by the heat.
- the circuit board 940 can be a printed circuit board (PCB), but the present invention is not limited thereto. Other technical features of the present embodiment are similar to those of the first embodiment and the thirteenth embodiment, so relative descriptions are omitted hereinafter.
- FIG. 19 is a diagram illustrating a cross-sectional view of a power module according to a seventeenth embodiment of the present invention.
- the present embodiment differs to the previous embodiments mainly in that the power device 500 a of the present embodiment is different to the power device 500 in previous embodiments. More specifically, a power electrode and a driving electrode of the power device 500 a are disposed to a top side, which is furthest away from of the first substrate 210 , of the power device 500 . In other words, the driving electrode 510 and the power electrodes 520 and 530 a are disposed on the top side of the power device 500 .
- the driving electrode 510 can be wired to the first metal layer 312 .
- the power electrodes 520 and 530 a can be wired to the conductive structure 410 and the conductive structure 420 respectively.
- a bottom side of the power device 500 a does not require a conductive structure to be implemented.
- the conductive structure can be disposed on the first substrate 210 directly, or can be disposed on the first metal layer directly, so as to save the cost of the conductive structure.
Abstract
A power module is disclosed. The power module includes a first substrate, a first metal layer, at least one conductive structure and at least one power device. The first metal layer is disposed on the first substrate. The first metal layer has a first thickness d1. The first thickness d1 satisfies: 5 μm≦d1≦50 μm. The conductive structure is disposed at a position different to the first metal layer on the first substrate. The conductive structure has a second thickness d2. The second thickness d2 satisfies: d2≧100 μm. The power device is disposed on the first substrate, the first metal layer or the conductive structure. The driving electrode of the power device is electrically connected to the first metal layer. The power electrode of the power device is electrically coupled to the conductive structure.
Description
- This application claims priority to China Application Serial Number 201310435466.X, filed Sep. 23, 2013, which is herein incorporated by reference.
- 1. Technical Field
- Embodiments of the present invention relate to a power module. More particularly, embodiments of the present invention relate to a power module for a power converter.
- 2. Description of Related Art
- A semiconductor power device is an indispensable part in a conventional power converter. Power density of a power device corresponds to an output power of the power module per unit volume. For the same output power, the higher the power density, the smaller the power module, so less space is occupied. Therefore, having a high power density has always been an industrial requirement for power modules. To increase the power density of a power device, an integrated power module (IPM) is developed. The IPM integrates a number of semiconductor devices into a package, so high output power can be achieved with a small volume, ultimately increasing the power density.
- Most of the current IPMs utilize direct bonded cooper (DBC) substrates. During the manufacturing process of such substrate, a high-temperature sintering process is applied to a ceramic tile and a sheet of copper. A copper layer formed by the sintering process can then be etched to form conductive tracks. However the high-temperature sintering process requires high energy consumption and therefore does not meet the trend of energy-saving. Further, the power module has a high requirement for flow capacity, so the copper layer of the DBC substrate generally requires being thicker than 0.1 millimeters (mm). However, as the copper layer gets thicker, the copper layer needs to be eroded deeper for etching. Due to etching's isotropic characteristics, a lateral etching of the copper layer becomes wider as the copper layer is being eroded deeper. Through such operation, widths of the conductive tracks and gaps between the conductive tracks are increased, meaning the widths of the conductive tracks and the gaps between the conductive tracks are constrained to a certain degree. Consequently the layout area of the electrical circuit per unit volume is decreased. On the other hand, in situations where an even higher current carrying capacity is desired, a thicker copper layer, such as one having a thickness of 0.5 mm, is usually required. However, such thickness is difficult to achieve, due to the coefficient of thermal expansion (CTE) of the high-temperature sintering process for DCB substrates. As a result, the output power of the power module per unit volume is reduced, thereby causing the power density of the power module to drop.
- The present invention provides a power module. The power module comprises a first substrate, a first metal layer, at least one conductive structure, at least one power device. The first metal layer is disposed on the first substrate. The first metal layer has a first thickness d1. The first thickness d1 satisfies: 5 μm≦d1≦50 μm. The at least one conductive structure is disposed at a position different to the first metal layer on the first substrate. The conductive structure has a second thickness d2. The second thickness d2 satisfies: d2≧100 μm. The at least one power device is disposed on the first substrate, the first metal layer or the conductive structure. The driving electrode of the power device is electrically coupled to the first metal layer, and at least one power electrode of the power device is electrically coupled to the conductive structure.
- An aspect of the present invention provides a power module. The power module comprises a first substrate, a first metal layer, at least a conductive structure, a driving component and at least a power device. The first metal layer is disposed on the first substrate. The first metal layer has a first thickness d1. The first thickness d1 satisfies: 5 μm≦d1≦50 μm. The conductive structure is disposed at a position different to the first metal layer on the first substrate. The conductive structure has a second thickness d2. The second thickness d2 satisfies: d2≧100 μm. The driving component is disposed on the first substrate or the first metal layer. The at least one power device is disposed on the first substrate, the first metal layer or the conductive structure. The driving electrode of the power device is electrically coupled to the driving component, and the at least one power electrode of the power device is electrically coupled to the conductive structure.
- In summary, a driving electrode of the power device is electrically coupled to the first metal layer or a driving component on the first metal layer. The gap within the first metal layer is formed by isotropic etching, and since the thickness of the first metal layer is merely between 5 μm and 50 μm, a width of the lateral etching is not too large, thereby effectively reducing a size of the gap of the first metal layer. Through such operation, the gap of the first metal layer can be narrower than the gap between wiring routes of a conventional direct bonded cooper (DBC) substrate. As a result the layout density per unit area can be increased, thus increasing the power density.
- It is to be understood that both the foregoing general description and the following detailed description are by examples, and are intended to provide further explanation of the invention as claimed.
- The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention. In the drawings,
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FIG. 1 is a diagram illustrating a cross-sectional view of a power module according to a first embodiment of the present invention; -
FIG. 2 is a circuit diagram illustrating a power module according to a first embodiment of the present invention; -
FIG. 3 is another circuit diagram illustrating a power module according to a first embodiment of the present invention; -
FIG. 4 is a diagram illustrating a cross-sectional view of a power module according to a second embodiment of the present invention; -
FIG. 5 is diagram illustrating a cross-sectional view of a power module according to a third embodiment of the present invention; -
FIG. 6 is a diagram illustrating a cross-sectional view of a power module according to a fourth embodiment of the present invention; -
FIG. 7 is a diagram illustrating a cross-sectional view of a power module according to a fifth embodiment of the present invention; -
FIG. 8 is a diagram illustrating a cross-sectional view of a power module according to a sixth embodiment of the present invention; -
FIG. 9 is a diagram illustrating a cross-sectional view of a power module according to a seventh embodiment of the present invention; -
FIG. 10 is a diagram illustrating a cross-sectional view of a power module according to an eighth embodiment of the present invention; -
FIG. 11 is a diagram illustrating a cross-sectional view of a power module according to a ninth embodiment of the present invention; -
FIG. 12 is a diagram illustrating a cross-sectional view of a power module according to a tenth embodiment of the present invention; -
FIG. 13 is a diagram illustrating a cross-sectional view of a power module according to an eleventh embodiment of the present invention; -
FIG. 14 is a diagram illustrating a cross-sectional view of a power module according to a twelfth embodiment of the present invention; -
FIG. 15 is a diagram illustrating a cross-sectional view of a power module according to a thirteenth embodiment of the present invention; -
FIG. 16 is a diagram illustrating a cross-sectional view of a power module according to a fourteenth embodiment of the present invention; -
FIG. 17 is a diagram illustrating a cross-sectional view of a power module according to a fifteenth embodiment of the present invention; -
FIG. 18 is a diagram illustrating a cross-sectional view of a power module according to a sixteenth embodiment of the present invention; and -
FIG. 19 is a diagram illustrating a cross-sectional view of a power module according to a seventeenth embodiment of the present invention. - Reference will now be made in detail to the present embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.
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FIG. 1 is a diagram illustrating a cross-sectional view of a power module according to a first embodiment of the present invention. As shown inFIG. 1 , the power module comprises a sealingbody 100 and afirst substrate 210. Afirst metal layer 210, asecond metal layer 314,conductive structures power device 500 are disposed on thefirst substrate 210. Thefirst substrate 210 is disposed in the sealingbody 100. The sealingbody 100 covers at least thefirst metal layer 312, theconductive structures conductive structure 420 and thepower device 500 for protection. Theconductive structure 420 has an exposedpart 422. The exposedpart 422 is exposed out of the sealingbody 100, and electrically connects to an external device. The exposedpart 422 can be realized by a lead frame, for instance. Thefirst substrate 210 comprises atop side 212 and abottom side 214 which are relative to each other. Thefirst metal layer 312 is disposed on thetop side 212 of thefirst substrate 210. Thefirst metal layer 312 is thinner than theconductive structures second metal layer 314 is disposed between thefirst substrate 210 and each of theconductive structures conductive structures second metal layer 314 and thefirst metal layer 312 have the same thickness. In another embodiment, the thickness of thesecond metal layer 314 can be different to that of thefirst metal layer 312. Thesecond metal layer 314 can be formed on thefirst substrate 210 via a process (e.g., etching, vapor deposition, sputtering or electroplating, etc.) independently. Thesecond metal layer 314 can also be formed on thefirst substrate 210 via the same process as thefirst metal layer 312. In addition, thesecond metal layer 314 and thefirst metal layer 312 can be formed on thefirst substrate 210 via a process at the same time. Thefirst metal layer 312 is not covered by theconductive structure 410. Thefirst metal layer 312 is merely at a position different to theconductive structure 410 on thefirst substrate 210. In the other embodiment, copper paste and thefirst substrate 210 are sintered to form thefirst metal layer 312, at the same time, the copper and thefirst substrate 210 are sintered to form theconductive structure 410. - Practically, the
first metal layer 312 and theconductive structure 410 are at thetop side 212 of the first substrate, but the vertical projections of thefirst metal layer 312 and theconductive structure 410 on thetop side 212 are not overlapped. The power device comprises a drivingelectrode 510 and a plurality ofpower electrodes electrode 510 and thepower electrode 520 are disposed at a side, which is furthest away from theconductive structure 410, of thepower device 500. Thepower electrode 530 is disposed at a side, which is closest to theconductive structure 410, of thepower device 500. In other words, thepower electrode 530 is disposed on theconductive structure 410 and is electrically connected to theconductive structure 410. The drivingelectrode 510 is electrically connected to thefirst metal layer 312. Thepower electrode 520 is electrically connected to thepower device 500 on theconductive structure 420. The power electrode of thepower device 500 on theconductive structure 420 is electrically connected to theconductive structure 420. - Since the driving
electrode 510 can be wired to thefirst metal layer 312, thepower device 500 can utilize thefirst metal layer 312 for circuit layouts. In the present embodiment, thefirst metal layer 312 is of a first thickness d1. The first thickness d1 satisfies the condition of 5 μm≦d1≦50 μm. In another embodiment, thefirst metal layer 312 comprising agap 316, so the material around thegap 316 can form a routing pattern. In another embodiment, thegap 316 within thefirst metal layer 312 is formed by isotropic etching. Since the thickness of thefirst metal layer 312 is merely between 5 μm and 50 μm, thefirst metal layer 312 is relatively thin, so the lateral etching of thefirst metal layer 312 is not too large, thereby effectively reducing a size of thegap 316 of thefirst metal layer 312. Through such operation, thegap 316 of thefirst metal layer 312 can be narrower than that of a conventional direct bonded cooper (DBC) substrate, and a width of the wiring route of the first metal layer can be narrower than that of the conventional DBC substrate. As a result the layout area per unit volume can be increased, thus increasing the power density. In another embodiment, thefirst metal layer 312 can be formed on thefirst substrate 210 by utilizing processes other than etching. For instance, thefirst metal layer 312 can be formed on thefirst substrate 210 by vapor deposition, sputtering or electroplating, etc. Hence thefirst metal layer 312 is not affected by etching's isotropic characteristics, so thegap 316 and the width of the wiring routes can all be controlled to be even narrower. In addition, since thefirst metal layer 312 does not have to go through the high-temperature sintering process with thefirst substrate 210, the energy consumption of the manufacturing process can be reduced. - In the present embodiment, each of the
conductive structure 410 has a second thickness d2. The second thickness d2 satisfies the condition of d2≧100 μm, so as to meet a flow capacity requirement of the power module. On the other hand, since thegap 316 within thefirst metal layer 312 is directly formed by the process (such as etching, etc.) that produces thefirst metal layer 312, the size of thegap 316 is not affected by the thickness of theconductive structure 410. Therefore, a thickerconductive structure 410 can be utilized to achieve a higher flow capacity, without having to consider the size of thegap 316. - The first thickness d1 corresponds to a one-dimensional length of the
first metal layer 312, measured in a direction of the normal of thetop side 212 of thefirst substrate 210 which is horizontal to thefirst metal layer 312. Similarly, the second thickness d2 corresponds to a one-dimensional length of theconductive structure 410, measured in a direction of the normal of thetop side 212 of thefirst substrate 210 which is horizontal to theconductive structure 410. - In the present embodiment, the
power device 500 can be a three-port device such as a MOSFET or an IGBT, etc., but the present invention is not limited thereto. Taking a MOSFET with 3 pins as an example, as shown inFIG. 2 , the drivingelectrode 510 can be the gate (terminal G), thepower electrode 520 can be the source (terminal S) and thepower electrode 530 can be the drain (terminal D). Thegate 510 and thesource 520 are at a top side, which is further away from theconductive structure 410, of the MOSFET (as illustrated byFIG. 1 ). Thedrain 530 is disposed on theconductive structure 410 and is electrically connected to theconductive structure 410. A circuit that applies a voltage in between the driving electrode 510 (the gate) and the power electrode 520 (the source) is a driving circuit, where a source of the driving circuit is of the same electrode as the power electrode 520 (the source). In the present embodiment, since the drivingelectrode 510 is electrically connected to thefirst metal layer 312, at least a part of the driving circuit can be realized by thefirst metal layer 312. Also, since thegap 316 within thefirst metal layer 312 is narrower, the wiring routes of the driving circuit can be implemented even closer to each other, so as to increase a driving capability. Taking a MOSFET with 4 pins as an example, as shown inFIG. 3 , the MOSFET with 4 pins differs to the MOSFET with 3 pins in that anelectrode 522 is led-out from thesource 520. A circuit that applies a voltage in between the driving electrode 510 (the gate) and theelectrode 522 is the driving circuit. In the present embodiment, since theelectrode 522 is electrically connected to thefirst metal layer 312, at least a part of the driving circuit can be realized by thefirst metal layer 312. Also, since thegap 316 within thefirst metal layer 312 is narrower, the wiring routes of the driving circuit can be implemented to be even closer to each other, so as to increase a driving capability. - As shown in
FIG. 1 , only the drivingelectrode 510 is electrically connected to thefirst metal layer 312 and thepower electrode 520 is electrically connected to the power device on theconductive structure 420. In another embodiment however, theelectrode 522 which is led-out from thepower electrode 520 can also be electrically connected to thefirst metal layer 312. In other words, the drivingelectrode 510 and theelectrode 522 which are led-out from thepower electrode 520 can all be wired to thefirst metal layer 312, and by performing circuit layouts through thefirst metal layer 312, which comprises the gap 316 (i.e., thegap 316 is narrow), the power density can be increased. For instance, if thepower electrode 520 is the source, theelectrode 522 which is led-out from the source can be wired directly to thefirst metal layer 312. - In the present embodiment, the power module can further comprise a plurality of bonding structures, such as bonding layers 610 and 620. The
bonding layer 610 is disposed between thepower device 500 and each of theconductive structures power device 500 on theconductive structures conductive structure 410 to thepower electrode 530 of thepower device 500. Thebonding layer 620 is disposed between thesecond metal layer 314 and each of theconductive structures conductive structures second metal layer 314. The bonding layers 610 and 620 can be a solder, a conductive adhesive, a conductive paste or a sintering paste, etc. Materials of the bonding layers 610 and 620 can be the same or different. For instance, thebonding layer 610 can be a solder and thebonding layer 620 can be a sintering paste. In the present embodiment, thefirst substrate 210 can be a ceramic substrate. -
FIG. 4 is a diagram illustrating a cross-sectional view of a power module according to a second embodiment of the present invention. The present embodiment differs to the first embodiment mainly in that the power module of the present embodiment further comprises a plurality of flatteningstructures 318. The flatteningstructure 318 is disposed on a surface, which is opposite to thefirst substrate 210, of thefirst metal layer 312. The flatteningstructure 318 has a flat upper surface, which is suitable for wirings. For instance, the flatteningstructure 318 can be realized by a coating of platted nickel, silver, nickel gold or platted palladium, etc., on thefirst metal layer 312. Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter. -
FIG. 5 is diagram illustrating a cross-sectional view of a power module according to a third embodiment of the present invention. The present embodiment differs to the first embodiment mainly in that the power module of the present embodiment further comprises anadhesive structure 710. Theadhesive structure 710 is disposed between theconductive structure 410 and thefirst substrate 210, so as to conduct the heat of theconductive structure 410 to thefirst substrate 210. By also referring toFIG. 1 andFIG. 3 together, it can be observed that theadhesive structure 710 has replaced thesecond metal layer 314 and thebonding layer 620 under theconductive structure 410. Since thesecond metal layer 314 is omitted in the present embodiment, the manufacturing cost of thesecond metal layer 314 can be further saved. In the present embodiment, theadhesive structure 710 can be disposed below theconductive structure 410 so as to fill the gap between theconductive structures body 100 and thefirst substrate 210 can be combined more closely by theadhesive structure 710. Theadhesive structure 710 can be a thermal paste or a thermal film, etc., but the present invention is not limited thereto. Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter. -
FIG. 6 is a diagram illustrating a cross-sectional view of a power module according to a fourth embodiment of the present invention. The present embodiment differs to the first embodiment mainly in that the power module of the present embodiment further comprises athird metal layer 320. Thethird metal layer 320 is disposed on thebottom side 214 of thefirst substrate 210, so as to reduce electromagnetic noise and prevent moist infiltration. Thethird metal layer 320 can be a metal conductive layer which is disposed on a surface of the sealingbody 100, so as to reduce electromagnetic noise and prevent moist infiltration. Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter. -
FIG. 7 is a diagram illustrating a cross-sectional view of a power module according to a fifth embodiment of the present invention. The present embodiment differs to the first embodiment mainly in that the power module of the present embodiment further comprises asecond substrate 220. The sealingbody 100 comprises abottom surface 110 and anupper surface 120 which are relative to each other. Thefirst substrate 210 and thesecond substrate 220 are separated from each other. Thefirst substrate 210 is closer to thebottom surface 110 and thesecond substrate 220 is closer to theupper surface 120. In other words, thefirst substrate 210 and thesecond substrate 220 are disposed within the sealingobject 100 in a vertical symmetry, so as to prevent the power module from warpage or deformation. - In the present embodiment, the power module can further comprise a
fourth metal layer 330. Thesecond substrate 220 comprises atop side 222 and abottom side 224 which are relative to each other. Thetop side 222 of thesecond substrate 220 is closer to thefirst substrate 210 than thebottom side 224. Thefourth metal layer 330 is disposed on thetop side 222 of thesecond substrate 220. Through such operation, thefourth metal layer 330 on thesecond substrate 220 can be utilized for circuit layouts, even if thefirst metal layer 312 does not have a sufficient area for circuit layouts. For instance, anelectronic component 730 can be disposed on thefourth metal layer 330. - In the present embodiment, the power module can further comprise a
connector 720. Theconnector 720 is electrically connected to theconductive structure 420 and thefourth metal layer 330, so theelectronic component 730 on thefourth metal layer 330 can be electrically connected to theconductive structure 420. Further, theconnector 720 can also support thesecond substrate 220 and thefirst substrate 210. In another embodiment, theconnector 720 can also be electrically connected to thefirst metal layer 312 and thefourth metal layer 330. Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter. -
FIG. 8 is a diagram illustrating a cross-sectional view of a power module according to a sixth embodiment of the present invention. The present embodiment differs to the fifth embodiment mainly in that the power module of the present embodiment further comprises afifth metal layer 340. Thefifth metal layer 340 is disposed on thebottom side 224 of thesecond substrate 220, so as to reduce electromagnetic noise and prevent moist infiltration. Thefifth metal layer 340 can be a metal conductive layer, which is disposed on the surface of the sealingbody 100, so as to reduce electromagnetic noise and prevent moist infiltration. Other technical features of the present embodiment are similar to those of the fifth embodiment, so relative descriptions are omitted hereinafter. -
FIG. 9 is a diagram illustrating a cross-sectional view of a power module according to a seventh embodiment of the present invention. The present embodiment differs to the first embodiment mainly in that thefirst substrate 210 comprises a plurality of sub-substrates 210 a and 210 b. The sub-substrates 210 a and 210 b are separated from each other. When thefirst substrate 210 is warped due to heat, the longer thefirst substrate 210 is, the higher the warpage height. Since thefirst substrate 210 of the present embodiment is divided to at least twoseparate sub-substrates first substrate 210. Through such operation, when the sub-substrates 210 a and the sub-substrate 210 b are warped due to heat, the corresponding warpage height is lower, so the warpage is reduced to a certain extent. - In the present embodiment, the
first metal layer 312 is disposed on the sub-substrates 210 a and 210 b. Theconductive structure 410 and thepower device 500 can be disposed on the sub-substrate 210 a, and theconductive structure 420 and thepower device 500 can be disposed on the sub-substrate 210 b. Thepower devices 500 can be electrically connected by bonding wires. Other technical features of the present embodiment are similar to those of the fifth embodiment, so relative descriptions are omitted hereinafter. -
FIG. 10 is a diagram illustrating a cross-sectional view of a power module according to an eighth embodiment of the present invention. The present embodiment differs to the first embodiment mainly in that the shapes of theconductive structures conductive structure 410 comprises abody 412 and a lockingstructure 414. The sealingbody 100 is fixed by the lockingstructure 414. More specifically, the lockingstructure 414 is extended out of thebody 412 and is covered by the sealingbody 100. Hence the lockingstructure 414 is fixed within the sealingbody 100. In other words, thebody 412 of theconductive structure 410 is not smooth without fluctuant forms, as the lockingstructure 414 is extended out of thebody 412. Through such operation, a force that fixes the sealingbody 100 and theconductive structure 410 together can be increased, so the sealingbody 100 is less likely to detach from theconductive structure 410. Similarly, theconductive structure 420 also comprises abody 424 and a lockingstructure 426. The lockingstructure 426 is fixed to the sealingbody 100. More specifically, the lockingstructure 426 is extended out of thebody 424 and is fixed within the sealingbody 100, so the sealingbody 100 is less likely to detach from theconductive structure 420. In another embodiment, each of the lockingstructures -
FIG. 11 is a diagram illustrating a cross-sectional view of a power module according to a ninth embodiment of the present invention. The present embodiment differs to the first embodiment mainly in that the power module of the present embodiment further comprises aheat dissipation structure 740. Theconductive structure 410 is disposed on thetop side 212 of thefirst substrate 210. Theheat dissipation structure 740 is disposed on thebottom side 214 of thefirst substrate 210, meaning theheat dissipation structure 740 is disposed below thefirst substrate 210. Through such operation, after the heat of thepower device 500 on theconductive structure 410 is conducted to thefirst substrate 210, theheat dissipation structure 740 can then conduct the heat to an external environment. - In the present embodiment, the power module can further comprise an
adhesive layer 630. Theadhesive layer 630 is disposed between thebottom side 214 of thefirst substrate 210 and theheat dissipation structure 740, so as to fix thefirst substrate 210 to theheat dissipation structure 740. Theadhesive layer 630 can be a thermal paste or a thermal film, etc., so the heat can be conducted to theheat dissipation structure 740 more effectively. Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter. -
FIG. 12 is a diagram illustrating a cross-sectional view of a power module according to a tenth embodiment of the present invention. The present embodiment differs to the ninth embodiment mainly in that the power module of the present embodiment further comprises athird metal layer 320. Thethird metal layer 320 is disposed at thebottom side 214 of thefirst substrate 210. Further, theheat dissipation structure 740 is disposed below thethird metal layer 320. More specifically, thethird metal layer 320 is disposed between thebottom side 214 of thefirst substrate 210 and theadhesive layer 630, so as to conduct the heat from thefirst substrate 210 to theadhesive layer 630. Thethird metal layer 320 can also lower the electromagnetic noise. Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter. -
FIG. 13 is a diagram illustrating a cross-sectional view of a power module according to an eleventh embodiment of the present invention. The present embodiment differs to the first embodiment mainly in that the sealingbody 100 in the first embodiment is replaced by acase 810 and a sealingpaste 820 in the present embodiment. Thecase 810 is disposed on thefirst substrate 210 and thecase 810 has anaccommodating space 812. The sealingpaste 820 is within theaccommodating space 812. The sealingpaste 820 covers at least thefirst metal layer 312, theconductive structures power device 500 for protection. The exposedpart 422 is exposed out of thecase 810. Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter. -
FIG. 14 is a diagram illustrating a cross-sectional view of a power module according to a twelfth embodiment of the present invention. The present embodiment differs to the eleventh embodiment mainly in that the power module of the present embodiment further comprises athird metal layer 320, anadhesive layer 630 and aheat dissipation structure 740. Thethird metal layer 320 is disposed at thebottom side 214 of thefirst substrate 210. Theheat dissipation structure 740 is disposed below thethird metal layer 320. Theadhesive layer 630 is disposed between thethird metal layer 320 and theheat dissipation structure 740. Thecase 810 is disposed on theheat dissipation structure 740. Thefirst substrate 210, thefirst metal layer 312, thesecond metal layer 320, theconductive structures power device 500 are disposed within theaccommodating space 812. Theadhesive paste 820 covers at least thefirst substrate 210, thefirst metal layer 312, theconductive structures power device 500 for protection. The exposedpart 422 is exposed out of thecase 810. According to the above-mentioned structure, the heat generated by thepower device 500 can be conducted to theheat dissipation structure 740 and theheat dissipation structure 740 can then conduct the heat to an external environment. In another embodiment, the power module can further comprise a heat dissipation structure. The heat dissipation structure is disposed below thefirst substrate 210 mentioned above. Thecase 810 is disposed on the heat dissipation structure. Thefirst substrate 210, thefirst metal layer 312, theconductive structures power device 500 are disposed within theaccommodating space 812. Theadhesive paste 820 covers at least thefirst substrate 210, thefirst metal layer 312, theconductive structures power device 500 for protection. The heat generated by thepower device 500 can be conducted to theheat dissipation structure 740, so theheat dissipation structure 740 can then conduct the heat to an external environment. Other technical features of the present embodiment are similar to those of the first embodiment and the eleventh so relative descriptions are omitted hereinafter. -
FIG. 15 is a diagram illustrating a cross-sectional view of a power module according to a thirteenth embodiment of the present invention. The present embodiment differs to the first embodiment mainly in that the power module of the present embodiment can further comprise adriving component 910. Thedriving component 910 is disposed on thefirst metal layer 312. The drivingelectrode 510 of thepower device 500 is electrically connected to an output electrode of thedriving component 910. Thedriving component 910 can be a driving chip, which drives thepower device 500 through the drivingelectrode 510. In other words, in the present embodiment, the drivingelectrode 510 of thepower device 500 can be wired directly to thedriving component 910. Although only onedriving component 910 is illustrated inFIG. 15 , a number of thedriving component 910 is not limited to one. There can be a plurality of drivingcomponents 910 and the present invention is not limited thereto. One driving component can correspond to onepower device 500, or to a plurality ofpower device 500. In another embodiment, when a lower surface of thedriving component 910 is not electrically led-out, thedriving component 910 can be disposed directly on thefirst substrate 210. An electrode on an upper surface of thedriving component 910 can be electrically connected to thefirst metal layer 312 via methods such as conjunction wirings, etc., and the drivingelectrode 510 of thepower device 500 can be wired directly to thefirst metal layer 312. Through such operation, a driving circuit can be formed. In another embodiment, the drivingelectrode 510 of thepower device 500 and thedriving component 910 can be electrically connected by wiring to thefirst metal layer 312 respectively. In another embodiment, thedriving component 910 can also be replaced by a controlling component. The controlling component can be a controller chip, which controls thepower device 500 via the drivingelectrode 510. The controlling component can be disposed on thefirst metal layer 312 or on thefirst substrate 210. An output electrode of the controlling component can be electrically connected to the drivingelectrode 510 of thepower device 500, so as to control thepower device 500. Other technical features of the present embodiment are similar to those of the first embodiment, so relative descriptions are omitted hereinafter. -
FIG. 16 is a diagram illustrating a cross-sectional view of a power module according to a fourteenth embodiment of the present invention. The present embodiment differs to the thirteenth embodiment mainly in that the power module of the present embodiment can further comprise apassive component 920. Thepassive component 920 is disposed on thefirst substrate 210. More specifically, thepassive component 920 is disposed on thefirst metal layer 312 and is electrically connected to thedriving component 910. Thepassive component 920 can be a capacitor, a resistor, a diode or an inductor, etc., but the present invention is not limited thereto. Although only onepassive component 920 is illustrated inFIG. 16 , a number of thepassive component 920 is not limited to one. There can be a plurality ofpassive components 920 and the present invention is not limited thereto. Other technical features of the present embodiment are similar to those of the first embodiment and the thirteenth embodiment, so relative descriptions are omitted hereinafter. -
FIG. 17 is a diagram illustrating a cross-sectional view of a power module according to a fifteenth embodiment of the present invention. The present embodiment differs to the fourteenth embodiment mainly in that thepassive component 930 can be formed by applying/printing a material of thepassive component 930 directly to thefirst substrate 210 and the respective electrically led-out part of thepassive component 930 can be formed directly via thefirst metal layer 312. For instance, a resistive material can be printed on thefirst substrate 210 to form a resistor, where two electrodes of the resistor can be formed by covering the resistive material directly on thefirst metal layer 312. More specifically, a material of thefirst metal layer 312 is firstly printed and the resistive material is then printed to a desired location. Two ends of the resistive material cover corresponding positions of thefirst metal layer 312. Thefirst metal layer 312 and the resistor can then be formed by sintering. Thefirst metal layer 312 can also be formed first before printing the resistive material to a desired location to form a resister. In another embodiment, the resistive material can also be printed on thefirst metal layer 312 to form a resistor. In yet another embodiment, the resistive material can be printed on both of thefirst substrate 210 and thefirst metal layer 312 to form a resistor. Similarly, a sandwich-like structure of a metal layer/a high di-electric material layer/a metal layer can be printed onto thefirst metal layer 312 in an interlaced manner, so as to form a capacitor. Similarly, a sandwich-like structure of a high permeability material/a metal/a high permeability material can be printed onto thefirst metal layer 312 in an interlaced manner, so as to form an inductor (such method can also be utilized to form a hollow inductor or a semi-hollow inductor). Similarly, a sandwich-like structure of a metal layer/a high di-electric material layer/a metal layer can be printed onto thefirst substrate 210 in an interlaced manner, so as to form a capacitor. Similarly, a sandwich-like structure of a high permeability material/a metal/a high permeability material can be printed onto thefirst substrate 210 in an interlaced manner, so as to form an inductor. In another embodiment, a sandwich-like structure of a metal layer/a high di-electric material layer/a metal layer can be printed onto thefirst substrate 210 and thefirst metal layer 312 in an interlaced manner, so as to form a capacitor. In yet another embodiment, a sandwich-like structure of a high permeability material/a metal/a high permeability material metal layer can be printed, in an interlaced manner, onto thefirst substrate 210 and thefirst metal layer 312 to form an inductor. - In another embodiment, a plurality of metal layout layers (the metal layout layers can be designed to become different circuit patterns according to practical needs) and a plurality of insulating layers can be formed on the
first substrate 210 through a printing process, meaning the metal layout layers and the insulating layers are printed, in an interlaced manner, onto thefirst substrate 210. A multi-layer layout can be realized by having a perforation in the insulating layer to electrically connect different locations of an upper metal wiring layer and a lower metal wiring layer (i.e., the upper and the lower metal wiring layers can be neighboring metal wiring layers or non-neighboring metal wiring layers), so as to increase the layout density. Other technical features of the present embodiment are similar to those of the first embodiment, the thirteenth embodiment and the fourteenth embodiment, so relative descriptions are omitted hereinafter. -
FIG. 18 is a diagram illustrating a cross-sectional view of a power module according to a sixteenth embodiment of the present invention. The present embodiment differs to the thirteenth embodiment mainly in that the power module of the present embodiment can further comprise apassive component 920 and acircuit board 940. Thecircuit board 940 is disposed on thefirst metal layer 312. Thedriving component 910 and thepassive component 920 are disposed on thecircuit board 940. Since a layout density of thecircuit board 940 is high, the controlling component, thedriving component 910 and thepassive component 920 are preferred to be disposed on thecircuit board 940. Further, a material of thecircuit board 940 can be a heat insulating material, which blocks the heat from flowing to thedriving component 910 as thedriving component 910 may be damaged by the heat. Thecircuit board 940 can be a printed circuit board (PCB), but the present invention is not limited thereto. Other technical features of the present embodiment are similar to those of the first embodiment and the thirteenth embodiment, so relative descriptions are omitted hereinafter. -
FIG. 19 is a diagram illustrating a cross-sectional view of a power module according to a seventeenth embodiment of the present invention. The present embodiment differs to the previous embodiments mainly in that thepower device 500 a of the present embodiment is different to thepower device 500 in previous embodiments. More specifically, a power electrode and a driving electrode of thepower device 500 a are disposed to a top side, which is furthest away from of thefirst substrate 210, of thepower device 500. In other words, the drivingelectrode 510 and thepower electrodes power device 500. The drivingelectrode 510 can be wired to thefirst metal layer 312. Thepower electrodes conductive structure 410 and theconductive structure 420 respectively. In another embodiment, since thepower electrode 530 a is disposed at the top side of thepower device 500 a, a bottom side of thepower device 500 a does not require a conductive structure to be implemented. Rather, the conductive structure can be disposed on thefirst substrate 210 directly, or can be disposed on the first metal layer directly, so as to save the cost of the conductive structure. - Although the present invention has been described in considerable detail with reference to certain embodiments thereof, other embodiments are possible. Therefore, the spirit and scope of the appended claims should not be limited to the description of the embodiments contained herein.
- It will be apparent to those skilled in the art that various modifications and variations can be made to the structure of the present invention without departing from the scope or spirit of the invention. In view of the foregoing, it is intended that the present invention cover modifications and variations of this invention provided they fall within the scope of the following claims and their equivalents.
Claims (30)
1. A power module, comprising:
a first substrate;
a first metal layer, disposed on the first substrate, the first metal layer having a first thickness d1, wherein the first thickness d1 satisfies: 5 μm≦d1≦50 μm;
at least one conductive structure, disposed at a position different to the first metal layer on the first substrate, the conductive structure having a second thickness d2, wherein the second thickness d2 satisfies: d2≧100 μm; and
at least one power device, disposed on the first substrate, the first metal layer or the conductive structure, wherein a driving electrode of the power device is electrically coupled to the first metal layer, and at least one power electrode of the power device is electrically coupled to the conductive structure.
2. The power module of claim 1 , further comprising:
a plurality of flattening structures, disposed on a surface, which is opposite to the first substrate, of the first metal layer.
3. The power module of claim 1 , further comprising:
a bonding structure, disposed between the power device and the conductive structure.
4. The power module of claim 1 , further comprising:
at least one adhesive structure, disposed between the conductive structure and the first substrate.
5. The power module of claim 3 , wherein the bonding structure is a solder, a conductive adhesive, a conductive paste or a sintering paste.
6. The power module of claim 1 , further comprising:
a second metal layer, disposed between the first substrate and the conductive structure, wherein the second metal layer has the same to thickness as the first metal layer.
7. The power module of claim 1 , further comprising:
at least one controlling component or a driving component, disposed on the first metal layer or on the first substrate, wherein an output electrode of the controlling component or the driving component is electrically coupled to the driving electrode of the power device.
8. The power module of claim 7 , further comprising:
a passive component, disposed on the first substrate and/or the first metal layer.
9. The power module of claim 8 , wherein the passive component is a capacitor, a resistor, a diode or an inductor.
10. The power module of claim 8 , wherein the passive component is formed by printing a paste of the passive component to the first substrate and/or the first metal layer.
11. The power module of claim 8 , further comprising:
at least one circuit board, disposed on the first metal layer, wherein the controlling component, the driving component or the passive component is disposed on the circuit board.
12. The power module of claim 1 , further comprising:
a sealing body, covering at least the first metal layer, a part of the conductive structure and the power device, wherein the conductive structure comprises a locking structure, and the sealing body is fixed by the locking structure.
13. The power module of claim 12 , wherein the locking structure is a notch, a protrusion or a cavity.
14. The power module of claim 1 , further comprising:
a third metal layer, wherein the first substrate comprises a top side and a bottom side which are relative to each other, the first metal layer is disposed on the top side of the first substrate and the third metal layer is disposed on the bottom side of the first substrate.
15. The power module of claim 14 , further comprising:
a heat dissipation structure, disposed below the third metal layer.
16. The power module of claim 1 , further comprising:
a heat dissipation structure, disposed below the first substrate.
17. The power module of claim 1 , further comprising:
a sealing body, covering at least the first metal layer, a part of the conductive structure and the power device, wherein the sealed body comprises an upper surface and a bottom surface which are relative to each other.
18. The power module of claim 17 , further comprising:
a second substrate, wherein the first substrate is separated from the second substrate, the first substrate is closer to the bottom surface and the second substrate is closer to the upper surface.
19. The power module of claim 18 , further comprising:
a fourth metal layer, wherein the second substrate comprises a front side and a bottom side which are relative to each other, the front side of the second substrate is closer to the first substrate than the bottom side of the second substrate, and the fourth metal layer is disposed on the front side of the second substrate.
20. The power module of claim 19 , further comprising:
a connector, electrically connected to one of the first metal layer and the conductive structure and the fourth metal layer.
21. The power module of claim 18 , further comprising:
a fifth metal layer, wherein the second substrate comprises a front side and a bottom side which are relative to each other, the front side of the second metal layer is closer to the first substrate than the bottom side of the second substrate, and the fifth metal layer is disposed on the bottom side of the second substrate.
22. The power module of claim 17 , further comprising:
a metal conductive layer, disposed on a surface of the sealing body.
23. The power module of claim 1 , wherein the first substrate comprises a plurality of sub-substrates, and the plurality of sub-substrates are separated from each other.
24. The power module of claim 1 , further comprising:
a case, comprising an accommodating space; and
a sealing paste, disposed within the accommodating space, wherein the sealing paste covers at least the first metal layer, a part of the conductive structure, and the power device.
25. The power module of claim 24 , further comprising:
a heat dissipation structure, disposed below the first substrate and the first substrate is disposed within the accommodating space.
26. The power module of claim 25 , further comprising:
a third metal layer, disposed between the first substrate and the heat dissipation structure, wherein the third metal layer is disposed within the accommodating space.
27. The power module of claim 1 , further comprising:
a plurality of metal layout layers and a plurality of insulating layers, printed on the first substrate in an interlaced manner, wherein the plurality of metal layout layers are electrically connected to each other.
28. A power module, comprising:
a first substrate;
a first metal layer, disposed on the first substrate, the first metal layer having a first thickness d1, wherein the first thickness d1 satisfies: 5 μm≦d1≦50 μm;
at least one conductive structure, disposed at a position different to the first metal layer on the first substrate, the conductive structure having a second thickness d2, wherein the second thickness d2 satisfies: d2≧100 μm;
a driving component, disposed on the first substrate or the first metal layer; and
at least one power device, disposed on the first substrate, the first metal layer or the conductive structure, wherein a driving electrode of the power device is electrically coupled to the driving component, and at least one power electrode of the power device is electrically coupled to the conductive structure.
29. The power module of claim 28 , further comprising:
a circuit board, disposed on the first metal layer, and the driving component is disposed on the circuit board.
30. The power module of claim 29 , further comprising:
at least one passive component, disposed on the first substrate, the first metal layer or the circuit board, wherein the passive component is electrically connected to the driving component.
Priority Applications (1)
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US15/671,132 US10381286B2 (en) | 2013-09-23 | 2017-08-07 | Power module |
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CN201310435466.XA CN104465603A (en) | 2013-09-23 | 2013-09-23 | Power module |
CN201310435466.X | 2013-09-23 |
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US15/671,132 Continuation US10381286B2 (en) | 2013-09-23 | 2017-08-07 | Power module |
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US15/671,132 Active US10381286B2 (en) | 2013-09-23 | 2017-08-07 | Power module |
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US15/671,132 Active US10381286B2 (en) | 2013-09-23 | 2017-08-07 | Power module |
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CN (1) | CN104465603A (en) |
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US20190103402A1 (en) * | 2017-10-02 | 2019-04-04 | Toyota Jidosha Kabushiki Kaisha | Semiconductor device |
US20190393111A1 (en) * | 2018-06-25 | 2019-12-26 | Actron Technology Corporation | Power device package structure |
WO2019244372A1 (en) * | 2018-06-20 | 2019-12-26 | ローム株式会社 | Semiconductor device |
US20220310473A1 (en) * | 2017-10-06 | 2022-09-29 | Industrial Technology Research Institute | Chip package |
EP4273928A1 (en) * | 2022-05-02 | 2023-11-08 | Infineon Technologies AG | A semiconductor package comprising power and logic on a single ceramic plate |
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JP6790372B2 (en) * | 2016-02-05 | 2020-11-25 | 富士電機株式会社 | Semiconductor device |
TWI599285B (en) * | 2016-07-01 | 2017-09-11 | 先豐通訊股份有限公司 | Circuit board structure with chip embedded therein and power module |
CN111769081B (en) * | 2020-05-28 | 2022-04-29 | 佛山市国星光电股份有限公司 | Integrated module and power device |
CN113571507A (en) * | 2021-03-16 | 2021-10-29 | 广东汇芯半导体有限公司 | Intelligent power module and manufacturing method thereof |
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Also Published As
Publication number | Publication date |
---|---|
US20170358516A1 (en) | 2017-12-14 |
US10381286B2 (en) | 2019-08-13 |
TWI555174B (en) | 2016-10-21 |
TW201513301A (en) | 2015-04-01 |
CN104465603A (en) | 2015-03-25 |
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