US20110135506A1 - Multi-stage vacuum pump - Google Patents

Multi-stage vacuum pump Download PDF

Info

Publication number
US20110135506A1
US20110135506A1 US12/994,245 US99424509A US2011135506A1 US 20110135506 A1 US20110135506 A1 US 20110135506A1 US 99424509 A US99424509 A US 99424509A US 2011135506 A1 US2011135506 A1 US 2011135506A1
Authority
US
United States
Prior art keywords
vacuum pump
rotor
shaft
stage vacuum
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/994,245
Other languages
English (en)
Inventor
Markus Henry
Peter Klingner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Assigned to OERLIKON LEYBOLD VACUUM GMBH reassignment OERLIKON LEYBOLD VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HENRY, MARKUS, KLINGNER, PETER
Publication of US20110135506A1 publication Critical patent/US20110135506A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings

Definitions

  • the invention relates to a multi-stage vacuum pump.
  • Multi-stage vacuum pumps are configured e.g. as multi-inlet vacuum pumps having at least two inlets and one outlet. Said inlets are connected to different vacuum stages of the multi-inlet pump, wherein a different vacuum is generated at each inlet. Normally, in such an arrangement, the highest vacuum is generated by the inlet connected to the first stage of the multi-inlet pump, the second highest vacuum is generated by the inlet connected to the second stage, and so forth.
  • Such vacuum pumps with a plurality of vacuum stages comprise, within a housing, a shaft which is driven by an electric motor, the latter being normally arranged around said shaft.
  • the shaft comprises a shaft extension.
  • the rotor element is arranged on said projecting shaft extension and accordingly is supported in a cantilevered manner. Since all of the forces acting on the rotor will be transmitted to the shaft at the cantilevered end of the shaft, the bearings are subjected to high stresses.
  • the electric motor is not arranged between the two bearings but externally of the bearing.
  • the rotor is arranged on the cantilevered extension of the shaft and thus again has the disadvantages of a cantilevered bearing arrangement. This will cause an unfavorable position of the center of gravity and, as a result, high stresses acting on the bearing.
  • the rotor is divided into at least two rotor elements.
  • the two rotor elements are arranged separately from each other, and particularly are connected to the shaft separately from each other.
  • one or also a plurality of stages can be provided per rotor element.
  • an inner bearing element usually a rolling bearing such as a ball bearing, between the two rotor elements.
  • one of the two rotor elements, particularly the rotor element forming or including the high vacuum stage is arranged externally of the inner bearing element.
  • the rotor element is thus arranged on a shaft extension which is projecting relative to the inner bearing element. Since, however, in contrast to the state of the art, it is not the whole rotor but only one of at least two rotor elements that is arranged on the cantilevered end of the shaft, the forces and moments introduced into the shaft at the cantilevered end thereof will be considerably smaller.
  • the second rotor element can be arranged e.g. between an inner bearing element and an outer bearing element and particularly be fixedly connected to the shaft.
  • the inner bearing element is preferably not arranged in the region of the high vacuum but instead is arranged within the outer rotor element comprising the high vacuum stage, the bearing will not be subjected to the extremely low pressures which prevail in the region of the high vacuum.
  • This offers the inventive advantage that especially grease-lubricated bearings such as e.g. ball bearings can be used.
  • the provision of a ball bearing has the advantage that ball bearings have a distinctly smaller constructional size.
  • the provision of a preferably grease-lubricated ball bearing in this region advantageously obviates the need for an additional emergency bearing. In magnetic bearings, such an emergency bearing would be positively required because, otherwise, no emergency running properties would be guaranteed in case of failure of the magnetic bearing.
  • the inner bearing element is fixed via a holding element.
  • Said holding element is formed with at least one throughflow opening.
  • the holding element is preferably connected to the pump housing.
  • the holding element comprises a plurality of throughflow openings and particularly has a star-shaped configuration.
  • the individual throughflow openings are with preference configured as partial ring segments. Since, when viewed in the conveying direction, the inner bearing element is arranged within the rotor element comprising the high vacuum stage, the medium will flow through the throughflow openings only when exiting from the high vacuum stage and respectively when entering the next stage. The conductance losses caused by the holding element will thus be distinctly lower than in case of an arrangement wherein such a holding element is provided in the region of the high vacuum stage, i.e. in the gas-entrance region of the high vacuum stage.
  • At least two rotor elements are provided, wherein both the inner bearing element and the holding element are arranged between these two rotor elements.
  • the inner bearing element is—along the axial direction—at least partially arranged within a rotor element.
  • this rotor element is the rotor element comprising the high vacuum stage.
  • the inner bearing element is also herein arranged between two rotor elements, particularly between the two fastening regions of the rotor elements to the shaft. Due to the resultant, at least partial covering of the inner bearing element by a part of the rotor element in the axial direction, the cantilevered shaft extension can be made shorter. This will further improve the bearing mechanics.
  • an outer bearing element is arranged in such a manner that, between the two bearing elements, a rotor element is arranged, the latter particularly being fixedly connected to the shaft.
  • the outer bearing element is preferably arranged outside of the rotor element forming the lowest stage.
  • the drive unit is arranged between the outer bearing element and the rotor element forming the lowest vacuum stage. This has the advantage of allowing for a very large bearing spacing between the two bearing elements, resulting in improved bearing mechanics.
  • the outer bearing element is arranged between two rotor elements. These will preferably be the two rotor elements forming the lowest vacuum stages, while, optionally, a given rotor element can also form a plurality of vacuum stages.
  • the outer bearing element is fixed by a holding element.
  • Said holding element is preferably provided with through openings and is designed corresponding to the holding element of the inner bearing element.
  • the inner bearing element is preferably designed as a rolling bearing. It is, however, also possible to provide a magnetic bearing, particularly a permanent magnetic bearing, while optionally also a retainer bearing can be provided.
  • the multi-stage vacuum pump of the invention is a vacuum pump of the multi-inlet type.
  • This pump is provided, apart from the main inlet, with at least one additional inlet.
  • each of said additional inlets is arranged between two adjacent vacuum pumps.
  • a pressure of 1 ⁇ 10 ⁇ 5 mbar to 1 ⁇ 10 ⁇ 9 mbar can be generated on the high vacuum side.
  • a pressure of 1 ⁇ 10 ⁇ 2 mbar to 1 ⁇ 10 ⁇ 5 mbar can be reached.
  • a second intermediate inlet is provided, a pressure of 1 ⁇ 10 ⁇ 2 mbar to 5 ⁇ 10 ⁇ 1 mbar can be reached thereat.
  • FIG. 1 is a cross-sectional schematic diagram of a first embodiment comprising two rotor elements
  • FIG. 2 is a cross-sectional schematic diagram of a first embodiment comprising three rotor elements
  • FIG. 3 is a schematic plan view of a holding element.
  • a shaft 12 is arranged in a pump housing 10 .
  • Said shaft 12 carries the rotor elements 14 , 16 which according to the invention are separated or detached from each other.
  • Said rotor elements are fixedly connected to shaft 12 .
  • rotor element 14 forms a first vacuum stage 18 in which the highest vacuum is generated.
  • the gas which is to be conveyed is suctioned via a first inlet opening 20 .
  • the first vacuum stage is a vacuum stage formed by a turbomolecular pump.
  • a stator 22 connected to housing 10 cooperates with said rotor 14 .
  • the second rotor element 16 in the illustrated embodiment is arranged to form two vacuum stages 24 , 26 .
  • the second vacuum stage 24 is formed by a turbomolecular pump while, also herein, a stator 28 is connected to housing 10 .
  • the third stage 26 is a Holweck stage wherein the helical extension 30 is arranged in engagement with a corresponding helical recess.
  • the second vacuum stage 24 will suction the medium through an inlet opening 34
  • the third vacuum stage 26 will suction the medium through an inlet opening 36 .
  • the suctioned medium will be conveyed by from all three stages 18 , 24 , 26 to the discharge opening 38 .
  • an electric motor 40 for driving said shaft 12 is located in the region of the third stage. As provided according to a preferred embodiment, said electric motor 40 is arranged to surround shaft 12 . In the axial direction, said Holweck stage preferably surrounds the electric motor 40 .
  • Support of shaft 12 is realized by an inner bearing element 42 and an outer bearing element 44 .
  • Said inner bearing element 42 is arranged between the two rotor elements 14 , 16 .
  • an inner bearing ring is e.g. pressed onto shaft 12 .
  • An outer bearing ring is fixed via a holding element 46 .
  • Said holding element 46 shown in plan view in FIG. 3 , comprises a plurality of through openings 48 formed as partial ring segments and particularly arranged in a regular configuration, for passage therethrough of the medium conveyed by the first stage 18 .
  • outer bearing element 44 is arranged outside the lowest, i.e. third stage 26 .
  • bearing element 44 preferably is designed as a rolling bearing.
  • rotor element 14 comprises a recess 52 having a substantially circular cross section.
  • rotor elements 14 , 66 , 68 are provided on the shaft 64 .
  • all rotor elements 14 , 66 , 68 are shown as rotor elements of molecular pumps while, of course, the rotor elements can also be of a different type. Further, also in this embodiment, single rotor elements can form a plurality of stages.
  • the inner bearing element 42 is arranged between two rotor elements 14 , 66 and again is fixed or connected to the housing by a holding element 46 ( FIG. 3 ).
  • the drive motor 40 is arranged between the two rotor elements 14 , 66 .
  • the second, i.e. outer bearing element 44 is arranged between the two rotor elements 66 , 68 ( FIG. 2 ) and, in the illustrated embodiment, is fixed via a holding element 46 .
  • the arrows 54 , 62 , 56 and 68 correspond to inlet openings and outlet openings, respectively.
  • Arrow 60 corresponds to the discharge opening.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
US12/994,245 2008-05-23 2009-05-05 Multi-stage vacuum pump Abandoned US20110135506A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008024764.2 2008-05-23
DE102008024764A DE102008024764A1 (de) 2008-05-23 2008-05-23 Mehrstufige Vakuumpumpe
PCT/EP2009/055397 WO2009141222A1 (de) 2008-05-23 2009-05-05 Mehrstufige vakuumpumpe

Publications (1)

Publication Number Publication Date
US20110135506A1 true US20110135506A1 (en) 2011-06-09

Family

ID=40873510

Family Applications (1)

Application Number Title Priority Date Filing Date
US12/994,245 Abandoned US20110135506A1 (en) 2008-05-23 2009-05-05 Multi-stage vacuum pump

Country Status (5)

Country Link
US (1) US20110135506A1 (enrdf_load_stackoverflow)
EP (1) EP2288812A1 (enrdf_load_stackoverflow)
JP (1) JP5560263B2 (enrdf_load_stackoverflow)
DE (1) DE102008024764A1 (enrdf_load_stackoverflow)
WO (1) WO2009141222A1 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140154503A1 (en) * 2011-06-24 2014-06-05 Michael Froitzheim Vacuum pump components without conversion layers
US20140369809A1 (en) * 2012-01-21 2014-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolecular pump
US8992162B2 (en) 2009-03-19 2015-03-31 Oerlikon Leybold Vacuum Gmbh Multi-inlet vacuum pump
US20220224198A1 (en) * 2019-09-30 2022-07-14 Daikin Industries, Ltd. Turbo compressor
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013114290A1 (de) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014101257A1 (de) * 2014-02-03 2015-08-06 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3001039B1 (de) * 2015-09-11 2019-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
US5618187A (en) * 1994-11-17 1997-04-08 The Whitaker Corporation Board mount bus bar contact
US6106223A (en) * 1997-11-27 2000-08-22 The Boc Group Plc Multistage vacuum pump with interstage inlet
US6371735B1 (en) * 1999-09-16 2002-04-16 The Boc Group Plc Vacuum pumps
US6435811B1 (en) * 1998-05-14 2002-08-20 Leybold Vakuum Gmbh Friction vacuum pump with a stator and a rotor
US20030118461A1 (en) * 2000-01-26 2003-06-26 Josef Hodapp Radial turbo-blower
US6672827B2 (en) * 2000-10-31 2004-01-06 Seiko Instruments Inc. Vacuum pump
US20050025640A1 (en) * 2003-07-10 2005-02-03 Shinichi Sekiguchi Vacuum pump and semiconductor manufacturing apparatus
US20050047904A1 (en) * 2003-08-29 2005-03-03 Alcatel Vacuum pump
US20060018772A1 (en) * 2004-07-20 2006-01-26 Fausto Casaro Rotary vacuum pump, structure and method for the balancing thereof
US20060140795A1 (en) * 2002-12-17 2006-06-29 Schofield Nigel P Vacuum pumping arrangement
US20070258836A1 (en) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vacuum pump
US20080138202A1 (en) * 2006-08-09 2008-06-12 Martin Eilers Arrangement for supporting a shaft of a vacuum pump and a vacuum pump with such an arrangement

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6463698A (en) * 1987-09-02 1989-03-09 Hitachi Ltd Turbo vacuum pump
JPH02136595A (ja) * 1988-11-16 1990-05-25 Anelva Corp 真空ポンプ
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
DE10211134C1 (de) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolekularpumpe mit koaxial zentralem Durchgang
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP2005240690A (ja) * 2004-02-26 2005-09-08 Kashiyama Kogyo Kk 真空ポンプ
DE202005019644U1 (de) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
US5618187A (en) * 1994-11-17 1997-04-08 The Whitaker Corporation Board mount bus bar contact
US6106223A (en) * 1997-11-27 2000-08-22 The Boc Group Plc Multistage vacuum pump with interstage inlet
US6435811B1 (en) * 1998-05-14 2002-08-20 Leybold Vakuum Gmbh Friction vacuum pump with a stator and a rotor
US6371735B1 (en) * 1999-09-16 2002-04-16 The Boc Group Plc Vacuum pumps
US20030118461A1 (en) * 2000-01-26 2003-06-26 Josef Hodapp Radial turbo-blower
US6672827B2 (en) * 2000-10-31 2004-01-06 Seiko Instruments Inc. Vacuum pump
US20060140795A1 (en) * 2002-12-17 2006-06-29 Schofield Nigel P Vacuum pumping arrangement
US20050025640A1 (en) * 2003-07-10 2005-02-03 Shinichi Sekiguchi Vacuum pump and semiconductor manufacturing apparatus
US20050047904A1 (en) * 2003-08-29 2005-03-03 Alcatel Vacuum pump
US20060018772A1 (en) * 2004-07-20 2006-01-26 Fausto Casaro Rotary vacuum pump, structure and method for the balancing thereof
US20070258836A1 (en) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vacuum pump
US20080138202A1 (en) * 2006-08-09 2008-06-12 Martin Eilers Arrangement for supporting a shaft of a vacuum pump and a vacuum pump with such an arrangement

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8992162B2 (en) 2009-03-19 2015-03-31 Oerlikon Leybold Vacuum Gmbh Multi-inlet vacuum pump
US20140154503A1 (en) * 2011-06-24 2014-06-05 Michael Froitzheim Vacuum pump components without conversion layers
US20140369809A1 (en) * 2012-01-21 2014-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolecular pump
US20220224198A1 (en) * 2019-09-30 2022-07-14 Daikin Industries, Ltd. Turbo compressor
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Also Published As

Publication number Publication date
DE102008024764A1 (de) 2009-11-26
JP5560263B2 (ja) 2014-07-23
EP2288812A1 (de) 2011-03-02
WO2009141222A1 (de) 2009-11-26
JP2011521161A (ja) 2011-07-21

Similar Documents

Publication Publication Date Title
US20110135506A1 (en) Multi-stage vacuum pump
US8235678B2 (en) Multi-stage vacuum pumping arrangement
JP5378432B2 (ja) ポンピング装置
US8106354B2 (en) Mass spectrometer arrangement
JP5637919B2 (ja) 複合真空ポンプ
JP4173637B2 (ja) ステータとロータを備えた摩擦真空ポンプ
US20130028757A1 (en) Vacuum pumping system
US6409477B1 (en) Vacuum pump
US20110123328A1 (en) Vacuum pump
KR20160005679A (ko) 고정 원판 및 진공 펌프
US9964121B2 (en) Vacuum pump
US8926266B2 (en) Multi-inlet vacuum pump
US20070081889A1 (en) Multi-stage friction vacuum pump
US20080166247A1 (en) Single-Shaft Vacuum Positive Displacement Pump
US20020136643A1 (en) Gas friction pump
US20120087776A1 (en) Multi-inlet vacuum pump
US6524060B2 (en) Gas friction pump
US20050013710A1 (en) Turbomolecular pump
US20100187415A1 (en) Turbomolecular pump
US20100021324A1 (en) Vacuum pump
US6464451B1 (en) Vacuum pump
GB2360066A (en) Vacuum pump

Legal Events

Date Code Title Description
AS Assignment

Owner name: OERLIKON LEYBOLD VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HENRY, MARKUS;KLINGNER, PETER;REEL/FRAME:025397/0148

Effective date: 20101104

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO PAY ISSUE FEE