US20100323173A1 - Fabrication of conducting open nanoshells - Google Patents

Fabrication of conducting open nanoshells Download PDF

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Publication number
US20100323173A1
US20100323173A1 US12/812,021 US81202109A US2010323173A1 US 20100323173 A1 US20100323173 A1 US 20100323173A1 US 81202109 A US81202109 A US 81202109A US 2010323173 A1 US2010323173 A1 US 2010323173A1
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substrate
open
nanoshells
layer
nanoparticles
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Willem Jozef Katharina Van Roy
Jian Ye
Pol Van Dorpe
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Katholieke Universiteit Leuven
Interuniversitair Microelektronica Centrum vzw IMEC
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Interuniversitair Microelektronica Centrum vzw IMEC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05—Metallic powder characterised by the size or surface area of the particles
    • B22F1/054—Nanosized particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05—Metallic powder characterised by the size or surface area of the particles
    • B22F1/054—Nanosized particles
    • B22F1/0549—Hollow particles, including tubes and shells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/18—Non-metallic particles coated with metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/953—Detector using nanostructure
    • Y10S977/957—Of chemical property or presence
    • Y10S977/958—Of biomolecule property
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24893—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including particulate material
    • Y10T428/24909—Free metal or mineral containing

Definitions

  • the invention relates to the field of nanoparticles, in particular nanoparticles for use in sensor, drug delivery or imaging applications.
  • Gold (Au) nanoshells are nanoparticles usually composed of a dielectric core, typically silica, coated with an ultrathin Au layer. These nanoparticles show interesting optical and chemical properties for the applications of surface-enhanced Raman spectroscopy (SERS) sensor, surface plasmon resonance (SPR) sensor, drug delivery, biomedical imaging and cancer therapeutics among others.
  • SERS surface-enhanced Raman spectroscopy
  • SPR surface plasmon resonance
  • Reducing symmetry of Au nanoshells geometry shows interesting properties. It is possible to excite different plasmon modes in these particles when compared to standard particles. These particles show angle dependent plasmon resonance. This unique property may lead to a new class of optically active nanoparticles that can be manipulated by applied static or frequency dependent electric, magnetic, or optical fields. The particles enhance the electric field intensity coming out of the particles when compared to fully covered particles, i.e. particles whose symmetry has not been reduced.
  • reduced-symmetrical nanoshells such as nano half-shells, nanocups, nanomoons and nanoeggs for SERS applications.
  • Reduced-symmetrical nanoshells have been prepared before in various ways including electron-beam evaporation (EBE) and electroless plating.
  • EBE electron-beam evaporation
  • electroless plating By these methods, the reduced-symmetrical structures of nanoshells, such as nanoaperture or nanotip, are usually oriented randomly or with their aperture downward, which obviously limits the molecular binding to the electric field enhanced regions in SERS applications.
  • the Raman enhancement factors differ from place to place on a substrate because of the random orientation of reduced-symmetrical structures.
  • U.S. Pat. No. 6,660,381 describes a method for the fabrication of composite particles containing metal shell layers, i.e. a partial metal coverage. This fabrication method does not allow good control of the orientation and the geometry of the open-nanoshells.
  • WO2006135393 shows a method and a system for optimized surface enhanced Raman scattering comprising a support with on top nanoparticles having a shell surrounding a core.
  • the local electromagnetic field around complete shells is lower when compared to the local electromagnetic field around the open-nanoshells.
  • WO2002059226 describes the fabrication of metal nanoshells having partial coverage of a substrate.
  • JP2006198641 describes an ion-beam processing method for forming nano-order convex portions.
  • Lu et al. (Nano Lett. 5 (1), 2005, p 119-124) present the fabrication of Au moon structures for the enhancement of a local electrical field at the edge area. This fabrication method does not allow good control of the orientation of the open-nanoshells.
  • the present invention is more versatile providing much smaller cores and a better control of the apertures.
  • the present invention relates to a substrate covered with open nanoshells also called open shell nanoparticles or nanoshell particles with reduced symmetry (i.e. less symmetrical than spherical nanoparticles), said open shell nanoparticles comprising a dielectric core and a conducting layer partially surrounding said dielectric core, the uncovered part of the dielectric core being located at a side essentially opposite to the side of the substrate (i.e. at a side essentially opposite to the side of the substrate adjacent to said open shell nanoparticles).
  • the uncovered part of the dielectric core may be at a side essentially opposite to the substrate, the edge of the conducting material being in a “cutting plane” making an angle between 0° and 45° with the plane of the substrate.
  • the uncovered part of the dielectric core may be between 45% and 5% of the total surface area of the dielectric core.
  • said dielectric core may be a material comprising air or SiO 2 and wherein said conducting layer comprises at least one material selected from the group consisting of Au, Ag, and Al.
  • said conducting layer comprises at least one material selected from the group consisting of Au, Ag, and Al.
  • a functionalisation layer for immobilising said open shell nanoparticles may be further present on said substrate.
  • the substrate may be covered with at least one layer of open shell nanoparticles in an optimal packing resulting in up to 90% of the surface area being covered in the case of nanoparticles of identical size if viewed perpendicularly to a planar substrate.
  • the present invention relates to a method for fabricating open nanoshells or open shell nanoparticles or nanoparticles with reduced symmetry said method comprising the steps of
  • removing part of said conducting layer may be obtained by a directional etching technique.
  • said directional etching technique may be ion milling.
  • the method may further comprise functionalisation of said substrate prior to depositing said nanoshells on said substrate.
  • the method may further comprise removing said dielectric core from said open nanoshells.
  • the method may further comprise removing said open nanoshells from said substrate, for example by redispersing in solution.
  • the present invention relates to a substrate obtainable by a method according to the second aspect.
  • the present invention relates to the use of a substrate according to the first or fourth aspect in an imaging application, with an optical spectroscopy technique such as SERS-based biomolecule detection being preferred.
  • FIG. 1 shows a fabrication method for making open-nanoshells (e.g. Au open nanoshells) suspensions and monolayer structures according to embodiments of the present invention.
  • the dimension of open-nanoshell particle is shown in the figure.
  • r is the diameter of the core
  • R is the diameter of total particle
  • H is the height of non-removed shell of the open-nanoshell.
  • FIG. 2 is a scheme of the simulation system used in finite difference time domain (FDTD) calculations.
  • FIG. 3 shows finite difference time domain (FDTD) simulations of optical extinction spectra and near-field distribution pictures of nanoshells and open-nanoshells according to embodiments of the present invention.
  • FDTD finite difference time domain
  • FIG. 4 normalized simulated optical extinction spectra (A) and experimental optical extinction spectra (B) for an aqueous suspension of Au nanoshells and Au open-nanoshells according to embodiments of the present invention.
  • FIG. 5 shows optical extinction spectra of open-nanoshells, according to embodiments of the present invention, made by ion milling for different times nanoshells deposited on quartz in air by drop-casting.
  • Scale bars correspond to 100 nm.
  • FIG. 7 shows the line-profile of an AFM image (1 ⁇ m ⁇ 1 ⁇ m) of Au open-nanoshells on a Si substrate according to embodiments of the present invention.
  • FIG. 10 shows normalized theoretical (top) and experimental (bottom) optical extinction spectra of Au nanoshells (a, c) and open-nanoshells (b, d) monolayer structures in air according to embodiments of the present invention.
  • B Theoretical extinction peaks of Au nanoshells and open-nanoshells with different ratios of particle radius and shell thickness in air.
  • C Local electric field intensity (log
  • FIG. 11 is a diagrammatic illustration of various embodiments of the present invention.
  • FIG. 12 illustrates a method for obtaining a substrate according to an embodiment of the present invention.
  • nanoshell or “nanoshell particle” relates to a nanoparticle with a dielectric core (e.g. SiO2, polystyrene, . . . ) and complete conducting layer (e.g. a metal such as, Au, Ag, Al, . . . , or a semiconductor such as Si, GaAs, . . . ) around the core.
  • a dielectric core e.g. SiO2, polystyrene, . . .
  • complete conducting layer e.g. a metal such as, Au, Ag, Al, . . . , or a semiconductor such as Si, GaAs, . . .
  • nanoshell particle with reduced symmetry or “open nanoshell”, or “open shell nanoparticle” relates to a nanoparticle with a dielectric core and non-complete or partial conducting layer around the core.
  • nanostructure relates to a substrate supported ring or toroidal-shaped nanostructure.
  • aperture relates to an aperture made in a open-nanoshell.
  • nanotip relates to any sharp asperity at the edge of a nanoaperture.
  • the term “functionalisation molecule” relates to molecules able to attach to both, the substrate surface and the nanoshell particles.
  • the present invention relates to a substrate having a layer thereon, said layer comprising or consisting of nanoparticles, said nanoparticles comprising an open conductive shell.
  • the nanoparticles may be monodisperse providing greater reproducibility, or have a broad size distribution providing wider resonances.
  • the material of the substrate is not a limiting feature of the present invention and can comprise dielectric, semi-conducting or conducting materials. Examples of dielectric materials suitable for the substrate comprise but are not limited to glass, quartz, mica, Si 3 N 4 , Al 2 O 3 and polymers among others.
  • Examples of semi-conducting materials suitable for the substrate comprise but are not limited to Si, Ge, GaAs, group IV semi-conducting materials, group III-V semi-conducting materials, group II-VI semi-conducting materials and chalcopyrite among others.
  • Examples of conductive materials suitable for the substrate comprise but are not limited to metals (such as Au, Ag and Cu among others) or doped semi-conductors such as ITO (e.g. on glass).
  • Functionalised materials i.e. materials having a surface bearing a layer of functionalisation molecules able to attach to both, the substrate surface and the nanoparticles
  • functionalized Si or other materials are also suitable.
  • the substrate may be a planar substrate, a curved substrate or any other surface shape.
  • the substrate comprises a planar surface.
  • the layer consist of the open shell nanoparticles.
  • the open shell nanoparticles are not embedded.
  • a matrix linking the open shell nanoparticles together is present, the layer comprising nanoparticles and a matrix.
  • the matrix can be any material able to act as a binder between the nanoparticles.
  • the matrix is a polymer matrix any polymer with binding properties to being suitable, although translucent or transparent polymers are preferred.
  • the layer comprises open shell nanoparticles and functionalisation molecules at the interface with the substrate surface. Examples of adhesion (i.e.
  • functionalisation molecules comprise but are not limited to organosilanes, preferably organosilanes comprising a thiol or dithio function such as 3-mercaptopropyl-trimethoxysilane (MPTMS) or 3-mercapto-propyl-triethoxysilane (MPTES), among others.
  • the functionalisation molecule may form a functionalisation layer on the substrate and may immobilize the nanoparticles on said substrate.
  • nanoshells can be immobilized on the substrate by using chemical functionalization such as a mercaptosilane functionalization, for example on a mercaptosilane functionalised ITO-coated glass or Si slide.
  • the layer of open nanoshells can consist in nanoshells or comprise nanoshells. If it consists in nanoshells, the thickness of the layer is preferably equivalent to the dimension of the nanoshells, i.e. the layer is preferably a monolayer. If the layer comprises both nanoshells and a matrix within which the nanoshells are embedded, the thickness of the layer is also preferably equivalent to the dimension of the nanoshells and preferably smaller than twice this dimension so that a monolayer is formed.
  • Open-nanoshells for example Au open nanoshells, can be loosely packed or densely packed to form a monolayer with coverage on the substrate between 10% and 30%, or between 30% and 60% or between 60% and 80%, in the best case more than 80% and at most 90%.
  • the coverage can be tuned from 10% to 80% or more (and up to 90%) by the concentration of nanoshells suspension.
  • Part of the free space present between open-nanoshells is due to spatial limit (i.e. due to the spherical geometry of the particles theoretically limiting the coverage to
  • multilayers of open shell nanoparticles on a substrate are provided.
  • Such multilayers can, for example, be built up layer by layer and may provide field confinement effects and optical field enhancement.
  • the open shell nanoparticles comprise a conductive open shell, i.e. a conductive shell comprising an opening. They can have any shapes such as spheroidal or cuboidal. Preferably, they are substantially spherical.
  • the conducting layer i.e. the shell
  • the conducting layer can be made of a metallic material (such as gold (Au), silver (Ag), nickel (Ni), titanium (Ti), aluminum (Al), copper (Cu) or platinum (Pt) amongst others), a semi-metallic material, or a (preferably doped) semiconducting material (such as Si or GaAs amongst others) or any other conducting material used in the field.
  • the core and the shell are made of different materials and the core is a dielectric and the shell a conductive material.
  • Preferred conductive materials are metals and doped semi-conductors. More preferably, the conductive material is a metal wherein gold, silver and aluminium are most preferred.
  • the conducting layer can be made of a single conducting material or can comprise different conducting materials, for example selected from the list above.
  • the conductive open shell comprises at least on material selected from the group consisting of Au, Ag and Al. Most preferably, the shell is made of gold. Shells of various thickness are suitable.
  • the thickness of the conducting layer or nanoshell layer can be from 5 nm to 100 nm, from 7 nm to 50 nm or from 10 nm to 30 nm, or from 10 nm to 100 nm.
  • the part of the core that is not covered with conducting material i.e. the uncovered part
  • the part of the core that is not covered with conducting material can be varied between 70% and 1% if a movable ion source is used in the etching process, with between 60% and 5% being preferred, between 50% and 5% being particularly preferred, between 45% and 5% being especially preferred, between 40% and 5% being particularly especially preferred, between 30% and 5% being even more preferred, between 20% and 5% being still more preferred, between 20% and 10% of the total surface area of the core being yet still more preferred.
  • the part of the shell removed during directional removal or etching can be varied between 70% and 1% if a movable ion source is used in the etching process, with between 60% and 5%, being preferred, between 50% and 5% being particularly preferred, between 45% and 5% being especially preferred, between 40% and 5% being particularly especially preferred, between 30% and 5% being even more preferred, between 20% and 5% being still more preferred, and between 20% and 10% of the total original surface area of the shell being yet still more preferred.
  • the surface area of the shell removed during the directional etching step is from 5 to 45% of the surface area of the shell.
  • the open nanoshells may or may not have a dielectric core.
  • the core is preferably made of a dielectric material and can comprise e.g. silicon dioxide (SiO 2 ) (e.g. the core particles used to make the nanoparticles can be silicon dioxide colloids), polymers such as polystyrene, magnetic materials such as Fe 2 O 3 , or other magnetic oxides.
  • the core particles can be made of one material or can comprise several materials that can for instance be selected from the list above. When the core comprises more than one material, it is possible that it comprises both, conductive and dielectric materials if the outer surface of the core is dielectric. For instance, the core could be made of a conductive kernel coated with a dielectric coating.
  • the core comprises (or consists of) SiO 2 , silica having the additional advantage of being etchable.
  • the shape of the core is preferably the same as the shape of the shell. Nanoshells of various core sizes are suitable.
  • the open nanoshells comprise a dielectric core partially surrounded by a conductive open shell.
  • the open nanoshells are oriented on the substrate in such a way that a majority, preferably 90% or more, most preferably substantially all of the open nanoshells have their opening directed away from the substrate (i.e. their opening do not touch the substrate, i.e. their opening is away from the substrate).
  • this arrow would not point to the substrate and would preferably point away from the substrate.
  • this arrow would make an angle of from 0 and 90° with the substrate, preferably 45 to 90°.
  • said nanoparticles have the center of their shell open part at the half (or side) of the nanoparticles opposite to the half (or side) of said nanoparticle adjacent to said substrate.
  • the substrate comprises a planar surface on which the layer comprising nanoparticles is layered.
  • the use of directional etching techniques permits to obtain open nanoparticles wherein the edges of the conductive open shell are approximately in a plane. Preferably this plane is making an angle between 45° and 90° with the plane of the substrate planar surface. Angles less than 90° provide a tilting effect with resulting improvement in turbulence during the wetting process with improved wetting as a result.
  • the opening of the open nanoshell is obtainable by etching said shell with a directional etching source (i.e. a non-isotropic flux of etching agent) making an angle of from 45 to 90° with the substrate planar surface.
  • a directional etching source i.e. a non-isotropic flux of etching agent
  • the part of the core that is not covered with conducting material is at a side essentially opposite to the substrate.
  • the orientation of the open part of the nanoshells with respect to the substrate may change.
  • the angle between a plane (“cutting plane”) comprising the edge of the conducting material and the plane of the substrate can be between 0° and 90°, between 0° and 60°, between 1° and 60°, between 0° and 50°, between 2° and 50°, between 0° and 45°, between 3° and 45°, between 0° and 40°, between 4° and 40°, between 0° and 30°, between 5° and 30°, between 0° and 20°, between 5° and 10°.
  • FIG. 11 shows three substrates according to embodiments of the present invention.
  • an open nanoshell ( 2 ) is represented laying on a substrate ( 1 ).
  • the open nanoshell comprises a conductive open shell ( 3 ) and a dielectric core ( 5 ).
  • the angle between a plane (“cutting plane”) ( 6 ) comprising the edge of the conducting material ( 3 ) and the plane of the substrate ( 1 ) is 0°.
  • the substrate represented in the centre of FIG. 11 has a conductive open nanoshell ( 2 , 3 ) laying thereon. This open nanoshell does not comprise a core (i.e. it is hollow).
  • the plane ( 6 ) comprising the edge of the conducting material ( 3 ) makes an angle comprised between 0 and 45° with the substrate.
  • the substrate represented on the right side of FIG. 11 has an open nanoshell ( 2 , 3 ) thereon represented laying on a substrate ( 1 ).
  • the open nanoshell comprises a conductive open shell ( 3 ) and no dielectric core ( 5 ).
  • the opening ( 4 ) of the open nanoshell is facing away from the substrate and the angle between the plane (“cutting plane”) ( 6 ) comprising the edge of the conducting material ( 3 ) and the plane of the substrate ( 1 ) is 0°.
  • Substrates according to embodiments of the present invention with their open nanoshells layer (preferably monolayer) structures offer a stable and high density arrangement of open nanoshells on a substrate for various sensing application such as for instance surface-enhanced Raman scattering (SERS)-based biomolecules detection.
  • SERS surface-enhanced Raman scattering
  • embodiments of the present invention provide substrates topped with a layer of densely packed conductive open nanoshells which is stable, i.e. well attached to the substrate (when a chemical functionalisation is present between the conductive open nanoshells and the substrate).
  • nanoshells with a small core size ( ⁇ 100 nm) and a thin shell thickness ( ⁇ 10 nm) having a relatively small particle size and having an optical response in near-infrared (NIR) region are advantageously used in several applications, such as the biomedical imaging and thermotherapy for certain tumours.
  • the present invention relates to a method for fabricating a substrate according to the first aspect of the present invention.
  • the present invention relates to a method for fabricating a monolayer structure comprising conductive open nanoshells (such as e.g. gold nanoshells) on a substrate.
  • nanoparticles comprising a dielectric core and a conductive shell can first be prepared.
  • a conductive layer can be deposited thereon.
  • Deposition of the conducting layer can for example be done by seeding followed by electroless plating, or polymerization, or other chemical techniques.
  • the surface roughness of the shells is mainly determined by the deposition technique used (e.g. the seeding and electroless plating process) to put the conducting layer on the core. That way, dielectric nanoparticles covered with a conducting layer can be prepared.
  • Dimensions of open-nanoshells can be controlled by tuning core sizes and shell thicknesses in a broad range. The size of the core particles (i.e.
  • the core size can be from 50 nm to 2000 nm, from 60 nm to 1500 nm, or from 80 nm to 1000 nm and preferably from 80 nm to 400 nm.
  • the thickness of the conducting layer i.e. the nanoshell layer
  • this method may comprise the steps of providing a layer as described in the first aspect on a substrate. Before deposition, the substrate can be treated, for example by cleaning with deionised water, piranha solution, UV ozone treatment, ultrasonication or any other method known in the art.
  • the substrate prior to provide said layer on said substrate, may be chemically functionalised. Functionalisation can for instance be performed by applying an organosilane layer on the substrate surface. Deposition of the nanoshell layer can be done by drop-casting of nanoshells suspension, spin coating of nanoshells suspension, immersing functionalized substrate into nanoshells suspension, creating ordered monolayers, self-assembly, or other techniques well known to the person skilled in the art.
  • the layer comprises or consists of nanoshell particles.
  • Providing the layer on the substrate result in the forming of a layer of nanoshell particles on the substrate.
  • the nanoshell particles of the provided layer comprise a dielectric core and a conductive shell.
  • the method according to the second aspect of the present invention comprises the step of depositing a layer on a substrate, said layer comprising nanoparticles, thereby forming a layer of nanoparticles on said substrate wherein said nanoparticles comprise a dielectric core and a conductive shell.
  • part of the conductive shell not in contact with the substrate surface, is removed.
  • part of the conductive shell is removed at the side of said nanoparticles opposite to the side of the nanoparticles adjacent to the substrate, thereby forming nanoparticles comprising a conductive open shell.
  • the step of removing part of the conductive shell may be performed via a directional removing (e.g.
  • directional etching technique such as e.g. ion milling.
  • Directional removing e.g. etching
  • etching is advantageous as this allows removing (e.g. etching) the material at a place away from the substrate (e.g. only at the top side of the particles) thereby creating a layer of open nanoshells on the substrate, whereby at least 50% of the open nanoshells, preferably at least 90% of the open nanoshells, most preferably substantially all open nanoshells have substantially the same orientation.
  • most or all open-nanoshells are “facing up” with the open part at the side opposite to the substrate. That way, open nanoshells layer (e.g. a monolayer thereof) structures can be obtained on the substrate.
  • the etching rate is material dependent, and depends on the etching technique, the system that is used and the operating conditions of the system.
  • the method may be based on an ion-milling process for fabricating the open nanoshells and the monolayer structures comprising them.
  • ion-milling process for fabricating the open nanoshells and the monolayer structures comprising them.
  • resists techniques or directional techniques such as mechanical abrasion e.g. scrubbing can also be used partly to remove the shell.
  • An ion milling process will result afterwards in open-nanoshells layer (e.g. monolayer) structures on the substrate.
  • Its intrinsic working principle makes ion milling a very directional etching method.
  • tuning the ion milling time the amount of material removed from the nanoshells can be varied, thereby tuning the geometry of the open-nanoshell.
  • Another advantage of ion milling is its excellent repeatability (i.e. reproducibility).
  • ion milling is a facile, fast and clean technology to fabricate open-nanoshells.
  • the ion milling time depends on the parameters used in the ion milling process (such as but not limits to gasses, ionisation efficiency and accelerating voltage).
  • the base pressure in the processing chamber can vary between 1.0 ⁇ 10 ⁇ 7 mTorr and 1.0 ⁇ 10 ⁇ 10 mTorr, or between 1.0 ⁇ 10 ⁇ 8 mTorr and 1.0 ⁇ 10 ⁇ 9 mTor, or even better below 8.0 ⁇ 10 ⁇ 8 mTorr.
  • the flow rate can vary between 0.5 sccm (Standard Cubic Centimeters per Minute) and 10 sccm, or between 1 and 5 sccm, for example 2.4 sccm for Xe.
  • the gas is ionized by a filament under a large voltage, thereby creating ions.
  • the voltage can be from 50V to 3000V, or from 100V to 1000V, or from 200V to 500V, typically 375 V.
  • a large electric field then accelerates the ions towards a grid under a large negative bias.
  • the bias voltage or accelerating voltage can vary between 50V and 3000V, or between 100V and 1000V, or between 200V and 500V, typically 400V.
  • the ion beam is neutralized by a cloud of electrons, generated by a plasma, for example Ar plasma, Xe plasma, or other.
  • a plasma for example Ar plasma, Xe plasma, or other.
  • the flow rate of the gas used for creating the plasma can vary between 0.5 sccm and 10 sccm, or between 1 and 5 sccm, for example 2 sccm in the case of Ar.
  • nanotip and nanoaperture structures can be fabricated on the open-nanoshells surface.
  • the etch rate is material dependent, and depends on the etching technique, the system that is used and the operating conditions of the system. So the etching time, for example the ion milling time, can be different for different shell materials.
  • the etch rate for example in case of ion milling, can vary between 2 nm/min and 40 nm/min, typically between 10 nm/min and 35 nm/min.
  • the etch time for example the ion milling time, can be tuned such as to remove a certain amount of material.
  • the etch time, for example ion milling time can be from 1 s to 200 s, or from 10 to 100 s or from 20 to 60 seconds.
  • the part of the core that is not covered with conducting material i.e. the uncovered part
  • the part of the core that is not covered with conducting material can be varied between 70% and 1%, between 60% and 5%, between 50% and 5%, between 45% and 5%, between 40% and 5%, between 30% and 5%, between 20% and 5%, between 20% and 10% of the total surface of the core.
  • ion milling instead of ion milling, other techniques such as chemically assisted ion beam etching (CAIBE), reactive ion etching (RIE), or others with similar directional etching behaviour, can be used. That way an etch chemistry can be chosen that etches the conducting material much faster than the conducting core, such that the conducting material can be etched highly selectively with respect to the dielectic core, thereby etching the conducting material while leaving the core unetched.
  • An alternative directional removing technique suitable when the layer of nanoparticles is embedded in a matrix is to mechanically remove (e.g.
  • FIG. 12 a substrate ( 1 ) having a layer ( 14 ), said layer comprising nanoshells ( 13 ) embedded in a matrix, is represented.
  • the bottom of FIG. 12 shows the same substrate after that an upper layer of the layer ( 14 ) has been removed creating open nanoshells and making metallic spots or rings ( 15 ) apparent at the surface ( 14 ).
  • the method may further comprise a step of removing the dielectric core from the open shell nanoparticles.
  • the chemistry used for removing the core should preferably be chosen such that it can selectively remove the core without affecting much the conducting shell.
  • the chemistry used for removing the core should only remove the core and leave the open conducting shell intact.
  • removing the silica core can be done by using aqueous HF for suspensions or vapor-phase HF for Au open-nanoshells monolayer structures. This keeps the Au open-nanoshells intact.
  • Methods according to embodiments of the present invention allow good control of the reduced-symmetrical geometry of the nanoparticles and allows monolayer structures to be realised with upward-oriented aperture on a substrate with good control and reproducibility.
  • these particles with the features of nanoaperture optionally comprising nanotip structures can be good substrates for optical spectroscopy techniques such as surface-enhanced Raman scattering (SERS)-based molecule detection, or surface-enhanced resonance Raman scattering (SERRS), surface-enhanced coherent anti-Stokes Raman scattering (SECARS), surface-enhanced infrared absorption (SEIRA), surface-enhanced fluorescence, surface-enhanced hyper-Raman scattering (SEHRS).
  • SERS surface-enhanced Raman scattering
  • SERRS surface-enhanced resonance Raman scattering
  • SECARS surface-enhanced coherent anti-Stokes Raman scattering
  • SEIRA surface-enhanced infrared absorption
  • SEHRS surface-enhanced fluorescence
  • SEHRS surface-enhanced hyper-Raman scattering
  • methods according to embodiment of the present invention using controlled material removal such as ion milling allow the open-nanoshells to have a feature of the open-structure (i.e. the aperture) uniformly upward-oriented on the substrate, implying an improved control of reduced-symmetrical structure's orientation.
  • An advantage of most of these directional etching techniques, for example ion milling, is the reproducibility of the ion milling process.
  • Ion milling technology allows the open-nanoshell geometry and upward orientation to be controlled.
  • the open-nanoshells monolayer structures, being stable and dense structures, with nanoaperture and nanotip geometry, and having an upward orientation are good substrates for SERS-based biomolecules detection.
  • a benefit of the good control and reproducibility of these directional etching techniques, for example milling technology, is the fact that open-nanoshells with non-removed shell with different heights can be fabricated by tuning the amount of time under etching or ion milling.
  • the height of the non-removed shell of the open-nanoshells, not taking the core into consideration, can be controlled by varying the directional removing time.
  • This offers the capability to control the reduced-symmetrical geometry of open nanoshells (e.g. Au open-nanoshells). That way, different SPR wavelengths can be selected by making open-nanoshells with different heights of non-removed shell, H i.e.
  • the height, H, of the non-removed shell of the open-nanoshells is a parameter for controlling their optical properties.
  • a method for producing open nanoshells involving the steps of the method of the second aspect of the present invention.
  • a last step of the method may consist in removing the open nanoshells from the substrate e.g. by dissolving away the optionally used functional layer or other means by which the open nanoshells adhere to the substrate, thereby obtaining unattached open nanoshells.
  • the removal step involved the use of a liquid such as water or solvent to remove any optional functional layer or other adhesive means, the free nanoshells so obtained may be dispersed or suspended in said liquid. In that case, the open-structure of the particles will be randomly orientated.
  • the relatively small size and near-infrared (NIR) optical properties result in open-nanoshells suspensions suitable for the biomedical imaging and thermotherapy.
  • the present invention provides a method of fabricating Au (gold) open-nanoshells suspensions.
  • the present invention also provides for the use of open nanoshells removed from the substrate in the treatment of medical conditions by thermotherapy, in biomedical imaging and as SPR biosensors.
  • FIG. 1 shows a method of fabrication of open-nanoshells according to an embodiment of the present invention.
  • nanoshells ( 13 ) comprising a core ( 5 ) and a shell ( 3 ) can be prepared.
  • the dimensions of open-nanoshell particle are shown in FIG. 1 : “r” is the diameter of the core ( 5 ), “R” is the diameter of total particle (and also the diameter of the shell ( 3 )), “H” is the height of non-removed part of the open-nanoshell ( 3 ).
  • dielectric core particles ( 5 ) are selected.
  • a conducting layer ( 3 ) can be deposited ( 7 ) leading to the formation of nanoshells ( 13 ).
  • nanoshells ( 13 ) are deposited (e.g. directly without the pre-deposition of a chemical functionalisation layer ( 12 ) on the substrate ( 1 ) (path ( 8 )) or after deposition of a chemical functionalisation layer ( 12 ) (path ( 9 )) (e.g. from a suspension) onto a substrate ( 1 ).
  • the substrate ( 1 ) can be functionalised with e.g. a monolayer of organic adhesion molecules ( 12 ) in order to immobilize the particles ( 13 ).
  • directional etching ( 10 ) of the conducting layer ( 3 ) of the nanoshells ( 13 ), for example by ion milling, can be done on the nanoshells ( 13 ) deposited on the substrate ( 1 ). Since the electric field enhanced regions are mostly located on the surface or the sharp edge of nanoaperture or nanotip structures, the cores ( 5 ) of the open-nanoshells can be preserved.
  • the particles can be redispersed ( 11 ) (e.g. ultrasonically) in a liquid medium, for example in water.
  • Au nanoshells with various core sizes and shell thicknesses were prepared by seeding and electroless plating from silica colloids.
  • Au nanoshells were synthesized according to a modified method of Oldenburg et al [J. Chem. Phys. Lett. 1998, 288, 243-247].
  • Monodisperse silica nanoparticles were synthesized by the hydrolysis of tetraethyl orthosilicate (TEOS) in basic solution via the Stöber process and functionalized with (3-aminopropyl)triethoxysilane (APTES) in ethanol during 12 hours.
  • TEOS tetraethyl orthosilicate
  • APTES (3-aminopropyl)triethoxysilane
  • Au open-nanoshells monolayer structures were fabricated by immobilizing Au nanoshells on a 3-mercaptopropyl-trimethoxysilane (MPTMS) functionalized ITO glass or Si substrate to improve the stability and coverage on the substrate. Scanning electron microscopy (SEM) showed that most of Au open-nanoshells were densely packed to form a monolayer with more than 80% coverage on the substrate.
  • MTMS 3-mercaptopropyl-trimethoxysilane
  • ITO-coated glasses or Si substrates Prior to their use, ITO-coated glasses or Si substrates were cleaned by a piranha solution (1:3 (v/v) mixture of 30% by weight aqueous H 2 O 2 and concentrated (98.6 wt %) H 2 SO 4 ), rinsed well with deionized water and dried in a stream of N 2 .
  • Au open-nanoshells suspensions were typically prepared by drop-casting aqueous suspensions of Au nanoshells on an ITO-coated glass or Si substrate.
  • Au open-nanoshells suspensions and open-nanoshell monolayer structures were fabricated by using an in-house made ion miller system, using an energetic ion beam of Xe ions to bombard the sample surface thereby etching away sample material. Therefore, Au nanoshells on ITO glass or Si substrate were placed into the ion miller system.
  • Different ion milling times were used with the following parameters: 375 V beam voltage, 400 V accelerator voltage, 2.4 sccm Xe flow rate, 2 sccm Ar flow rate and below 8.0 ⁇ 10 ⁇ 8 mTorr base pressure in the processing chamber.
  • a small amount of Xe gas (2.4 sccm Xe flow rate) is introduces into the chamber which becomes ionized by a filament under a large voltage (375 V beam voltage).
  • a large electric field (400 V) then accelerates the Xe ions towards a grid under a large negative bias (400 V accelerator voltage).
  • the ion beam Before hitting the sample, the ion beam is neutralized by a cloud of electrons generated by Ar plasma (2 sccm Ar flow rate and below 8.0 ⁇ 10 ⁇ 8 mTorr base pressure).
  • Ar plasma 2 sccm Ar flow rate and below 8.0 ⁇ 10 ⁇ 8 mTorr base pressure.
  • the etch rate is material dependent (e.g. 35 nm/min in case of Au).
  • An advantage is the fact that it is a very directional etching method.
  • the milling depth is controlled by the amount of time the sample is being bombarded by the atoms.
  • open-nanoshells with different non-removed shell heights were fabricated by varying the amount of time under ion milling.
  • the ion milling time was varied between 20 and 60 seconds with the parameters described above. This offers the capability to control the reduced-symmetrical geometry of Au open-nanoshells.
  • Au open-nanoshells were released from the slide into an aqueous suspension by ultrasonication.
  • TEM and AFM measurements confirm the nanoaperture and nanotip structures on the Au open-nanoshells obtained ( FIGS. 6 and 7 ) allowing local electric field enhancement.
  • the dimensions of open-nanoshell particle are shown in FIG.
  • FIGS. 6 A and C have shown Au nanoshells with complete shells with different dimensions (core size and shell thickness).
  • FIGS. 6 B and D have shown Au open-nanoshells with incomplete shells with different dimensions (core size and shell thickness) and different orientations.
  • SEM images of Au nanoshells deposited on an ITO-coated glass by drop-casting were taken using a Philips XL30 FEG instrument operated at an accelerating voltage of 5 kV. SEM images have shown that Au open-nanoshells with different dimensions and configurations can be prepared. Dimensions of open-nanoshells can be controlled by tuning core sizes and shell thicknesses in a broad range. The core size varied between 80 and 1000 nm and shell thickness can vary between 10 and 30 nm. In the top and side views, nanotip and nanoaperture structures were clearly observed on the open-nanoshells surface. The surface roughness of the shells was determined by the applied electroless plating procedure. All open-nanoshells were “facing up” with respect to the open-structures (i.e. the shell opening is facing away from the substrate).
  • the dimensions of open-nanoshell particle are shown in FIG. 1 : “r” is the diameter of the core, “R” is the diameter of total particle, and “H” is the height of the non-removed shell of the open-nanoshell.
  • FIG. 9 (B, C) shows the open-nanoshells monolayer structures when a mercaptosilane functionalization is used. We observe the improvement of the stability and coverage of the monolayer structure on the substrate.
  • a drop of the aqueous Au open-nanoshells suspension was cast onto a Si substrate and then dried at room temperature for atomic force microscopy (AFM) scanning.
  • AFM images were acquired in the tapping mode on a Dimension 3000/Nanoscope IV, VEECO, under ambient conditions with the scan rate between 0.4 and 0.5 Hz.
  • Si cantilevers with a spring constant between 40 and 45 N/m were used at resonance frequencies between 250 and 350 kHz.
  • the free amplitude peak is adjusted ⁇ 1 V. All images post-processing are performed using flatten order 1.
  • FIG. 7 shows the rough surface of Au layer in open-nanoshell structure and furthermore confirms the nanoaperture and the nanotip structures on the Au open-nanoshells, which allows local electro-magnetic field enhancement.
  • the line-profile In FIG. 7 of an AFM image (1 ⁇ m ⁇ 1 ⁇ m) of Au open-nanoshells on a Si substrate shows the surface morphology of the open Au nanoshells more clearly.
  • Simulations of optical extinction spectra and near-field distribution pictures were obtained based on the finite difference time domain (FDTD) simulations or FDTD method using the program FDTD Solutions (version 5.1) purchased from Lumerical Solutions, Inc., (Vancouver, Canada).
  • the simulations were performed with the parallel FDTD option on a HP ProLiant DL145 G3 Server with 2 Dual-Core AMD Opteron 2000 processors at 2.8 GHz and 8 GB of RAM.
  • the FDTD method is based on the numerical solution of the Maxwell's equations and can be used to obtain an adequate picture of the electromagnetic near-field distribution around the structures with arbitrary shapes.
  • the simulating system consists of a Au nanoshell or open-nanoshell.
  • FIG. 2 shows a schematic representation of the simulating system used in FDTD calculations.
  • the Au nanoshell or open-nanoshell was placed in air.
  • the direction of the electric field E was perpendicular to k and parallel to the X direction.
  • the wavelength of incident light was varied from 400 nm to 1700 nm and the amplitude was set as 1.
  • a perfect matched layer (PML) was used as radiation boundary condition.
  • the simulation region is 800 ⁇ 800 ⁇ 800 nm 3 with a grid size of 3 nm.
  • the whole simulation region was assumed in air.
  • the dimensions (r/R/H) of the Au nanoshell and open-nanoshell were set as 115/130/260 nm and 115/130/195 nm, respectively.
  • the dispersion model for Au derived from the experimental data provided by P. B. Johnson and R. W. Christy [Phys. Rev. B 1972, 6, 4370-4379] were used.
  • the total complex-valued permittivity of the Au ⁇ ( ⁇ ) is modelled by the combination of a Drude and a Lorentz model, and hence results from the sum of three different material modes ⁇ REAL ( ⁇ ), ⁇ L ( ⁇ ) and ⁇ P ( ⁇ ).
  • ⁇ L ( ⁇ ) is the equation based on a Lorentz model
  • ⁇ L ⁇ ( ⁇ ) ⁇ LORENTZ ⁇ ⁇ 0 2 ⁇ 0 2 - 2 ⁇ ⁇ ⁇ ⁇ ⁇ 0 ⁇ ⁇ - ⁇ 2
  • ⁇ P ⁇ ( ⁇ ) ⁇ P 2 ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ v C + ⁇ 2
  • FIG. 3 A full 3-dimensional FDTD calculation was executed in the simulation.
  • the shown field is normalized with respect to the incident field amplitude.
  • FIG. 10A showed the local electric field intensity distribution around Au open-nanoshell in a plane vertically through the central axis.
  • the local electric field was essentially similar to that of Au nanoshell in a same size around outer shell regions, but was substantially enhanced at the upper edge of the open-nanoshell with a maximum enhancement factor of ⁇ 19 with respect to the incident light field.
  • the field distribution in a plane horizontally along the height of the non-removed shell of an open-nanoshell ( FIG. 10B ) showed that the uniform enhancement was maintained through the whole region of the edge surface.
  • the highest field regions were located at the inner and outer wall edges with a maximum enhancement factor of ⁇ 23, where a plasmon resonance mode was similar to the case of nanoaperture structures with a strong electromagnetic coupling between the inner and outer wall edges, indicating a buildup of charge at two edges which supports the field enhancement uniformly on the edge surface.
  • the local electric field enhancement around Au open-nanoshells was improved 4 times ( FIG. 3 ), which points to Au open-nanoshells as a very promising substrate for SERS-based biomolecules detection
  • FIG. 10A compares the simulated extinction spectra (top) and the measured spectra (bottom) for two different nanoshell sizes.
  • the simulated and measured spectra show a fair agreement; the remaining discrepancies are most likely attributable to the polydispersed size and inherent rough shell surface of Au open-nanoshells.
  • the spectra furthermore indicate an interesting trend: removing the top of the nanoshell results in a pronounced red-shift of the plasmon resonance. This is corroborated by FIG.
  • FIG. 10B which shows the theoretical dependence of the extinction peak on the ratio between the core size and the shell thickness, for both open and closed nanoshells.
  • the red-shift of the resonance is consistent and becomes more pronounced as this ratio increases.
  • the resonance still has a dipolar character but is dominated by the local charge-build-up at the edges of the open-nanoshell, as indicated in FIG. 10C , which shows the electric field profile of the nanostructure at resonance conditions.
  • This charge build-up is accompanied by a strong enhancement of the local electric field, as compared to the local enhancement of closed nanoshells.
  • SERS surface enhanced Raman scattering
  • Optical extinction spectra of ITO glass with monolayer structures of Au nanoshells or open-nanoshells were measured. All experimental optical extinction spectra were measured using a Shimadzu UV-1601PC spectrophotometer with a slit width of 2 nm and a data interval of 0.5 nm. An ITO glass with monolayer structures of Au nanoshells or open-nanoshells was orientated perpendicularly to the incident light during the measurement in air. The aqueous suspension of Au nanoshells and Au open-nanoshells were measured in the cuvettes (Eppendorf UVette).
  • FIG. 4 shows normalized simulated optical extinction spectra (A) and experimental optical extinction spectra (B) for an aqueous suspension of (a, c) Au nanoshells and (b, d) Au open-nanoshells. All simulated extinction spectra were calculated from FDTD calculations. All particles dimensional parameters are shown in the insets of (A).
  • Au open-nanoshells are advantageous as their features of optical response in near-infrared (NIR) region as well as their particle size remaining relatively small lead to suitable applications, such as the biomedical imaging and thermotherapy for certain tumour with a size requirement.
  • NIR near-infrared

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JP6423137B2 (ja) * 2013-04-30 2018-11-14 学校法人 東洋大学 表面増強分光用基板の製造方法
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