US20080279753A1 - Method and Apparatus for Growth of High Quality Carbon Single-Walled Nanotubes - Google Patents
Method and Apparatus for Growth of High Quality Carbon Single-Walled Nanotubes Download PDFInfo
- Publication number
- US20080279753A1 US20080279753A1 US11/669,124 US66912407A US2008279753A1 US 20080279753 A1 US20080279753 A1 US 20080279753A1 US 66912407 A US66912407 A US 66912407A US 2008279753 A1 US2008279753 A1 US 2008279753A1
- Authority
- US
- United States
- Prior art keywords
- catalyst
- carbon
- metal
- nanotubes
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000034 method Methods 0.000 title claims abstract description 70
- 239000002109 single walled nanotube Substances 0.000 title claims abstract description 58
- 239000003054 catalyst Substances 0.000 claims abstract description 144
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 74
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 52
- 239000002245 particle Substances 0.000 claims abstract description 37
- 230000008569 process Effects 0.000 claims abstract description 23
- 238000006243 chemical reaction Methods 0.000 claims abstract description 22
- 239000007833 carbon precursor Substances 0.000 claims abstract description 15
- 230000005496 eutectics Effects 0.000 claims abstract description 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 48
- 239000007789 gas Substances 0.000 claims description 43
- 239000002071 nanotube Substances 0.000 claims description 36
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 33
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 20
- 239000001257 hydrogen Substances 0.000 claims description 18
- 229910052739 hydrogen Inorganic materials 0.000 claims description 18
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 16
- 238000005229 chemical vapour deposition Methods 0.000 claims description 13
- 229910052742 iron Inorganic materials 0.000 claims description 12
- 230000008018 melting Effects 0.000 claims description 12
- 238000002844 melting Methods 0.000 claims description 12
- 229910052750 molybdenum Inorganic materials 0.000 claims description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 10
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 10
- 239000011261 inert gas Substances 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 229910020489 SiO3 Inorganic materials 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims description 4
- 150000002431 hydrogen Chemical class 0.000 claims description 3
- 239000010457 zeolite Substances 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- 229910052593 corundum Inorganic materials 0.000 claims 4
- 229910001845 yogo sapphire Inorganic materials 0.000 claims 4
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 229910021536 Zeolite Inorganic materials 0.000 claims 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 abstract description 58
- 239000002184 metal Substances 0.000 abstract description 58
- 239000000203 mixture Substances 0.000 abstract description 33
- 239000000463 material Substances 0.000 abstract description 11
- 239000002105 nanoparticle Substances 0.000 abstract description 7
- 230000002194 synthesizing effect Effects 0.000 abstract 1
- 239000002082 metal nanoparticle Substances 0.000 description 48
- 230000015572 biosynthetic process Effects 0.000 description 39
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 35
- 239000002904 solvent Substances 0.000 description 28
- 238000003786 synthesis reaction Methods 0.000 description 28
- 150000003839 salts Chemical class 0.000 description 24
- 230000000694 effects Effects 0.000 description 18
- 239000002041 carbon nanotube Substances 0.000 description 16
- 229910021393 carbon nanotube Inorganic materials 0.000 description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 15
- 238000005755 formation reaction Methods 0.000 description 13
- 229930195733 hydrocarbon Natural products 0.000 description 12
- 150000002430 hydrocarbons Chemical group 0.000 description 12
- 238000009826 distribution Methods 0.000 description 11
- 239000000243 solution Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000005979 thermal decomposition reaction Methods 0.000 description 10
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 9
- 239000004215 Carbon black (E152) Substances 0.000 description 9
- 125000004432 carbon atom Chemical group C* 0.000 description 9
- 239000006185 dispersion Substances 0.000 description 9
- 229910052759 nickel Inorganic materials 0.000 description 9
- 229910052804 chromium Inorganic materials 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 229910052721 tungsten Inorganic materials 0.000 description 8
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 7
- 229910002091 carbon monoxide Inorganic materials 0.000 description 7
- 238000000354 decomposition reaction Methods 0.000 description 7
- 230000002349 favourable effect Effects 0.000 description 7
- 239000002048 multi walled nanotube Substances 0.000 description 7
- 239000012071 phase Substances 0.000 description 7
- 229910052723 transition metal Inorganic materials 0.000 description 7
- 150000003624 transition metals Chemical class 0.000 description 7
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 238000010891 electric arc Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 229910052747 lanthanoid Inorganic materials 0.000 description 6
- 150000002602 lanthanoids Chemical class 0.000 description 6
- 239000011148 porous material Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 229910017052 cobalt Inorganic materials 0.000 description 5
- 239000010941 cobalt Substances 0.000 description 5
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 239000000395 magnesium oxide Substances 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 4
- 238000001237 Raman spectrum Methods 0.000 description 4
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000013459 approach Methods 0.000 description 4
- 238000009835 boiling Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 238000004627 transmission electron microscopy Methods 0.000 description 4
- 229910017116 Fe—Mo Inorganic materials 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000001069 Raman spectroscopy Methods 0.000 description 3
- MQRWBMAEBQOWAF-UHFFFAOYSA-N acetic acid;nickel Chemical compound [Ni].CC(O)=O.CC(O)=O MQRWBMAEBQOWAF-UHFFFAOYSA-N 0.000 description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 238000003421 catalytic decomposition reaction Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- PVFSDGKDKFSOTB-UHFFFAOYSA-K iron(3+);triacetate Chemical compound [Fe+3].CC([O-])=O.CC([O-])=O.CC([O-])=O PVFSDGKDKFSOTB-UHFFFAOYSA-K 0.000 description 3
- 239000007791 liquid phase Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 3
- -1 nickel/cobalt Chemical class 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000003917 TEM image Methods 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 2
- 239000004964 aerogel Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-OUBTZVSYSA-N carbane Chemical compound [13CH4] VNWKTOKETHGBQD-OUBTZVSYSA-N 0.000 description 2
- 239000002717 carbon nanostructure Substances 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- KTWOOEGAPBSYNW-UHFFFAOYSA-N ferrocene Chemical compound [Fe+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 KTWOOEGAPBSYNW-UHFFFAOYSA-N 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- TXCOQXKFOPSCPZ-UHFFFAOYSA-J molybdenum(4+);tetraacetate Chemical compound [Mo+4].CC([O-])=O.CC([O-])=O.CC([O-])=O.CC([O-])=O TXCOQXKFOPSCPZ-UHFFFAOYSA-J 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 229940078494 nickel acetate Drugs 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- YJVFFLUZDVXJQI-UHFFFAOYSA-L palladium(ii) acetate Chemical compound [Pd+2].CC([O-])=O.CC([O-])=O YJVFFLUZDVXJQI-UHFFFAOYSA-L 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229930192474 thiophene Natural products 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910020515 Co—W Inorganic materials 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical class S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 241001125671 Eretmochelys imbricata Species 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910017147 Fe(CO)5 Inorganic materials 0.000 description 1
- MBMLMWLHJBBADN-UHFFFAOYSA-N Ferrous sulfide Chemical compound [Fe]=S MBMLMWLHJBBADN-UHFFFAOYSA-N 0.000 description 1
- 229910017112 Fe—C Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- 229910003296 Ni-Mo Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910002839 Pt-Mo Inorganic materials 0.000 description 1
- 238000003841 Raman measurement Methods 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000002134 carbon nanofiber Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000005119 centrifugation Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- HHFAWKCIHAUFRX-UHFFFAOYSA-N ethoxide Chemical compound CC[O-] HHFAWKCIHAUFRX-UHFFFAOYSA-N 0.000 description 1
- 125000000219 ethylidene group Chemical group [H]C(=[*])C([H])([H])[H] 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000008240 homogeneous mixture Substances 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(III) nitrate Inorganic materials [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000003863 metallic catalyst Substances 0.000 description 1
- NBTOZLQBSIZIKS-UHFFFAOYSA-N methoxide Chemical compound [O-]C NBTOZLQBSIZIKS-UHFFFAOYSA-N 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- DDTIGTPWGISMKL-UHFFFAOYSA-N molybdenum nickel Chemical compound [Ni].[Mo] DDTIGTPWGISMKL-UHFFFAOYSA-N 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- VLTRZXGMWDSKGL-UHFFFAOYSA-M perchlorate Inorganic materials [O-]Cl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-M 0.000 description 1
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 229910052704 radon Inorganic materials 0.000 description 1
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000011877 solvent mixture Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 150000003464 sulfur compounds Chemical class 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052713 technetium Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/02—Single-walled nanotubes
Definitions
- the present invention relates to methods for the preparation (synthesis) of carbon single-walled nanotubes using chemical vapor deposition method.
- Carbon nanotubes are hexagonal networks of carbon atoms forming seamless tubes with each end capped with half of a fullerene molecule. They were first reported in 1991 by Sumio Tijima who produced multi-layer concentric tubes or multi-walled carbon nanotubes by evaporating carbon in an arc discharge. They reported carbon nanotubes having up to seven walls. In 1993, Iijima's group and an IBM team headed by Donald Bethune independently discovered that a single-wall nanotube could be made by vaporizing carbon together with a transition metal such as iron or cobalt in an arc generator (see Iijima et al Nature 363:603 (1993); Bethune et al, Nature 363: 605 23085-12560 (1993) and U.S. Pat. No. 5,424,054). The original syntheses produced low yields of non-uniform nanotubes mixed with large amounts of soot and metal particles.
- Multi-walled carbon nanotubes can be produced on a commercial scale by catalytic hydrocarbon cracking while single-walled carbon nanotubes are still produced on a gram scale.
- single-walled carbon nanotubes are preferred over multi-walled carbon nanotubes because they have unique mechanical and electronic properties. Defects are less likely to occur in single-walled carbon nanotubes because multi-walled carbon nanotubes can survive occasional defects by forming bridges between unsaturated carbon valances, while single-walled carbon nanotubes have no neighboring walls to compensate for defects. Defect-free single-walled nanotubes are expected to have remarkable mechanical, electronic and magnetic properties that could be tunable by varying the diameter, number of concentric shells, and chirality of the tube.
- Single-walled carbon nanotubes have been produced by simultaneously evaporating carbon and a small percentage of Group VIII transition metal from the anode of the arc discharge apparatus (Saito et al. Chem. Phys. Lett. 236: 419 (1995)). Further, the use of mixtures of transition metals has been shown to increase the yield of single-walled carbon nanotubes in the arc discharge apparatus. However, the yield of nanotubes is still low, the nanotubes can exhibit significant variations in structure and size (properties) between individual tubes in the mixture, and the nanotubes can be difficult to separate from the other reaction products.
- a carbon anode loaded with catalyst material (typically a combination of metals such as nickel/cobalt, nickel/cobalt/iron, or nickel and transition element such as yttrium) is consumed in arc plasma.
- the catalyst and the carbon are vaporized and the single-walled carbon nanotubes are grown by the condensation of carbon onto the condensed liquid catalyst.
- Sulfur compounds such as iron sulfide, sulfur or hydrogen sulfides are typically used as catalyst promoter to maximize the yield of the product.
- a typical laser ablation process for producing single-walled carbon nanotubes is disclosed by Andreas Thess et al. (1996).
- Metal catalyst particle such as nickel-cobalt alloy is mixed with graphite powder at a predetermined percentage, and the mixture is pressed to obtain a pellet.
- a laser beam is radiated to the pellet.
- the laser beam evaporates the carbon and the nickel-cobalt alloy, and the carbon vapor is condensed in the presence of the metal catalyst.
- Single-wall carbon nanotubes with different diameters are found in the condensation.
- the addition of a second laser to their process which give a pulse 50 nanoseconds after the pulse of the first laser favored the (10,10) chirality (a chain of 10 hexagons around the circumference of the nanotube).
- the product consisted of fibers approximately 10 to 20 nm in diameter and many micrometers long comprising randomly oriented single-wall nanotubes, each nanotube having a diameter of about 1.38 nm.
- the diameters of the single-walled carbon nanotubes vary from 0.7 nm to 3 nm.
- the synthesized single-walled carbon nanotubes are roughly aligned in bundles and woven together similarly to those obtained from laser vaporization or electric arc method.
- metal catalysts comprising iron and at least one element chosen from Group V (V, Nb and Ta), VI (Cr, Mo and W), VII (Mn, Tc and Re) or the lanthanides has also been proposed (U.S. Pat. No. 5,707,916).
- the catalyst is embedded in porous material or supported on a substrate, placed at a fixed position of a furnace, and heated in a flow of hydrocarbon precursor gas.
- Cassell et al. (1999) J. Phys. Chem. B 103: 6484-6492 studied the effect of different catalysts and supports on the synthesis of bulk quantities of single-walled carbon nanotubes using methane as the carbon source in chemical vapor deposition.
- the catalyst and the hydrocarbon precursor gas are fed into a furnace using the gas phase, followed by the catalytic reaction in a gas phase.
- the catalyst is usually in the form of a metalorganic.
- HiPCO high-pressure CO reaction
- CO carbon monoxide
- Fe(CO) 5 metalorganic iron pentacarbonyl
- 72: 3282 employ benzene and the metalorganic ferrocene (Fe(C 5 H 5 ) 2 ) delivered using a hydrogen gas to synthesize single-walled carbon nanotubes.
- the disadvantage of this approach is that it is difficult to control particles sizes of the metal catalyst.
- the decomposition of the organometallic provides disordered carbon (not desired) the metal catalyst having variable particle size that results in nanotubes having a wide distribution of diameters and low yields.
- the catalyst is introduced as a liquid pulse into the reactor.
- Ci et al. (2000) Carbon 38: 1933-1937 dissolve ferrocene in 100 mL of benzene along with a small amount of thiophene.
- the solution is injected into a vertical reactor in a hydrogen atmosphere.
- the technique requires that the temperature of bottom wall of the reactor had to be kept at between 205-230° C. to obtain straight carbon nanotubes.
- colloidal solution of cobalt:molybdenum (1:1) nanoparticles is prepared and injected into a vertically arranged furnace, along with 1% thiophene and toluene as the carbon source. Bundles of single-walled carbon nanotubes are synthesized.
- One of the disadvantages of this approach is the very low yield of the nanotubes produced.
- U.S. Pat. No. 6,764,874 to Zhang et al. discloses a method of preparing nanotubes by melting aluminum to form an alumina support and melting a thin nickel film to form nickel nanoparticles on the alumina support. The catalyst is then used in a reaction chamber at less than 850° C.
- U.S. Pat. No. 6,401,526, and U.S. Patent Application Publication No. 2002/00178846, both to Dai et al. disclose a method of forming nanotubes for atomic force microscopy. A portion of the support structure is coated with a liquid phase precursor material that contains a metal-containing salt and a long-chain molecular compound dissolved in a solvent. The carbon nanotubes are made at a temperature of 850° C.
- the diameter of the SWNTs produced is proportional to the size of the catalyst particle.
- One solution to the synthesis of uniform diameter nanotubes is to use a template, such as molecular sieves, that have a pore structure which is used to control the distribution of catalyst size and thereby the size of the SWNTs formed.
- a template such as molecular sieves
- the diameter of SWNT can be changed by changing the pore size of the template.
- the present invention provides methods and processes for growing single-wall carbon nanotubes.
- a carbon precursor gas and metal catalysts on supports are heated to a reaction temperature near the eutectic point (liquid phase) of the metal-carbon phase. Further, the reaction temperature is below the melting point of the metal catalysts.
- the methods involve contacting a carbon precursor gas with a catalyst on a support at a temperature near the eutectic point of the catalyst-carbon phase wherein SWNT are formed.
- the carbon precursor gas can be methane that can additionally contain other gases such as argon and hydrogen.
- the catalyst can be a V metal, a Group VI metal, a Group VII metal, a Group VIII metal, a lanthanide, or a transition metal or combinations thereof.
- the catalyst preferably has a particle size between about 1 nm to about 50 nm.
- the catalyst can be supported on a powdered oxide, such as Al 2 O 3 , SiO 3 , MgO and the like, herein the catalyst and the support are in a ratio of about 1:1 to about 1:50.
- the SWNTs are produced by employing a reaction temperature that is about 5° C. to about 150° C. above the eutectic point.
- the invention provides a carbon nanotube structure produced by the process of contacting a carbon precursor gas with a catalyst on a support at a temperature between the melting point of the catalyst and the eutectic point of the catalyst and carbon.
- the carbon precursor gas can be methane that can additionally contain other gases such as argon and hydrogen.
- the catalyst can be a V metal, a Group VI metal, a Group VII metal, a Group VIII metal, a lanthanide, or a transition metal or combinations thereof.
- the catalyst preferably has a particle size between about 1 nm to about 15 nm.
- the catalyst can be supported on a powdered oxide, such as Al 2 O 3 , SiO 3 , MgO and the like, wherein the catalyst and the support are in a ratio of about 1:1 to about 1:50.
- FIG. 1 A) Evolution of hydrogen concentration during carbon SWNTs growth on Fe:Al 2 O 3 (1:15 molar ratio) catalyst. Insets: sequential introduction of C 12 and C 13 isotopes, for 3 min and 17 min (a1); 7 min and 13 min (a2) and 13 min and 7 min (a3), respectively.
- FIG. 2 Raman radial breathing and tangential modes for carbon SWNTs synthesized on Fe and Fe:Mo catalysts by using sequential introduction of C 12 and C 13 isotopes.
- FIG. 3 A) Hydrogen concentration evolution at 820° C. for Al 2 O 3 ; Fe:Al 2 O 3 (1:15 molar ratio); Mo:Al 2 O 3 (0.21:15, molar ratio) and Fe:Mo:Al 2 O 3 (1:0.21:15 molar ratio) samples.
- FIG. 4 Hydrogen concentration evolution dependence on reactor temperature for Al 2 O 3 support material, for Mo:Al 2 O 3 ; Fe:Al 2 O 3 and Fe:Mo:Al 2 O 3 catalysts, respectively.
- single-walled carbon nanotube or “one-dimensional carbon nanotube” are used interchangeable and refer to cylindrically shaped thin sheet of carbon atoms having a wall consisting essentially of a single layer of carbon atoms, and arranged in a hexagonal crystalline structure with a graphitic type of bonding.
- multi-walled carbon nanotube refers to a nanotube composed of more than one concentric tubes.
- metalorganic or “organometallic” are used interchangeably and refer to co-ordination compounds of organic compounds and a metal, a transition metal or metal halide.
- utectic point refers to the lowest possible temperature of solidification for an alloy, and can be lower than that of any other alloy composed of the same constituents in different proportions.
- the catalyst composition may be any catalyst composition known to those of skill in the art that is routinely used in chemical vapor deposition processes.
- the function of the catalyst in the carbon nanotube growth process is to decompose the carbon precursors and aid the deposition of ordered carbon.
- the method, processes, and apparatuses of the present invention preferably use metal nanoparticles as the metallic catalyst.
- the metal or combination of metals selected as the catalyst can be processed to obtain the desired particle size and diameter distribution.
- the metal nanoparticles can then be separated by being supported on a material suitable for use as a support during synthesis of carbon nanotubes using the metal growth catalysts described below. As known in the art, the support can be used to separate the catalyst particles from each other thereby providing the catalyst materials with greater surface area in the catalyst composition.
- Such support materials include powders of crystalline silicon, polysilicon, silicon nitride, tungsten, magnesium, aluminum and their oxides, preferably aluminum oxide, silicon oxide, magnesium oxide, or titanium dioxide, or combination thereof, optionally modified by addition elements, are used as support powders.
- Silica, alumina and other materials known in the art may be used as the support, preferably alumina is used as the support.
- the metal catalyst can be selected from a Group V metal, such as V or Nb, and mixtures thereof, a Group VI metal including Cr, W, or Mo, and mixtures thereof, VII metal, such as, Mn, or Re, Group VIII metal including Co, Ni, Ru, Rh, Pd, Os, Ir, Pt, and mixtures thereof, or the lanthanides, such as Ce, Eu, Er, or Yb and mixtures thereof, or transition metals such as Cu, Ag, Au, Zn, Cd, Sc, Y, or La and mixtures thereof.
- a Group V metal such as V or Nb, and mixtures thereof
- a Group VI metal including Cr, W, or Mo and mixtures thereof
- VII metal such as, Mn, or Re
- Group VIII metal including Co, Ni, Ru, Rh, Pd, Os, Ir, Pt, and mixtures thereof
- the lanthanides such as Ce, Eu, Er, or Yb and mixtures thereof
- transition metals such as Cu, Ag, Au, Zn
- catalysts such as bimetallic catalysts
- the metal catalyst is iron, cobalt, nickel, molybdenum, or a mixture thereof, such as Fe-Mo, Co-Mo and Ni-Fe-Mo.
- the metal, bimetal, or combination of metals can be used to prepare metal nanoparticles having defined particle size and diameter distribution.
- the metal nanoparticles can be prepared using the literature procedure described in described in Harutyunyan et al., NanoLetters 2, 525 (2002).
- the catalyst nanoparticles can be prepared by thermal decomposition of the corresponding metal salt added to a passivating salt, and the temperature of the solvent adjusted to provide the metal nanoparticles, as described in the co-pending and co-owned U.S. patent application Ser. No. 10/304,316, or by any other method known in the art.
- the particle size and diameter of the metal nanoparticles can be controlled by using the appropriate concentration of metal in the passivating solvent and by controlling the length of time the reaction is allowed to proceed at the thermal decomposition temperature.
- Metal nanoparticles having particle size of about 0.01 nm to about 20 nm, more preferably about 0.1 nm to about 3 nm and most preferably about 0.3 nm to 2 nm can be prepared.
- the metal nanoparticles can thus have a particle size of 0.1, 1, 2, 3, 4, 5, 6, 7, 8, 9, or 10 nm, and up to about 20 nm.
- the metal nanoparticles can have a range of particle sizes.
- the metal nanoparticles can have particle sizes in the range of about 3 nm and about 7 nm in size, about 5 nm and about 10 nm in size, or about 8 nm and about 16 nm in size.
- the metal nanoparticles can optionally have a diameter distribution of about 0.5 nm to about 20 nm, preferably about 1 nm to about 15 nm, more preferably about 1 nm to about 5 nm.
- the metal nanoparticles can have a diameter distribution of about 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, or 15 nm.
- the metal salt can be any salt of the metal, and can be selected such that the melting point of the metal salt is lower than the boiling point of the passivating solvent.
- the metal salt contains the metal ion and a counter ion, where the counter ion can be nitrate, nitride, perchlorate, sulfate, sulfide, acetate, halide, oxide, such as methoxide or ethoxide, acetylacetonate, and the like.
- the metal salt can be iron acetate (FeAc 2 ), nickel acetate (NiAc 2 ), palladium acetate (PdAc 2 ), molybdenum acetate (MoAc 3 ), and the like, and combinations thereof.
- the melting point of the metal salt is preferably about 5° C. to 50° C. lower than the boiling point, more preferably about 5° C. to about 20° C. lower than the boiling point of the passivating solvent.
- the metal salt can be dissolved in a passivating solvent to give a solution, a suspension, or a dispersion.
- the solvent is preferably an organic solvent, and can be one in which the chosen metal salt is relatively soluble and stable, and where the solvent has a high enough vapor pressure that it can be easily evaporated under experimental conditions.
- the solvent can be an ether, such as a glycol ether, 2-(2-butoxyethoxy)ethanol, H(OCH 2 CH 2 ) 2 —O—(CH 2 ) 3 CH 3 , which will be referred to below using the common name diethylene glycol mono-n-butyl ether, and the like.
- the relative amounts of metal salt and passivating solvent are factors in controlling the size of nanoparticles produced.
- a wide range of molar ratios here referring to total moles of metal salt per mole of passivating solvent, can be used for forming the metal nanoparticles.
- Typical molar ratios of metal salt to passivating solvent include ratios as low as about 0.0222 (1:45), or as high as about 2.0 (2:1), or any ratio in between.
- about 5.75 ⁇ 10 ⁇ 5 to about 1.73 ⁇ 10 ⁇ 3 moles (10-300 mg) of FeAc 2 can be dissolved in about 3 ⁇ 10 ⁇ 4 to about 3 ⁇ 10 ⁇ 3 moles (50-500 ml) of diethylene glycol mono-n-butyl ether.
- more than one metal salt can be added to the reaction vessel in order to form metal nanoparticles composed of two or more metals, where the counter ion can be the same or can be different.
- the relative amounts of each metal salt used can be a factor in controlling the composition of the resulting metal nanoparticles.
- the molar ratio of the first metal salt to the second metal salt can be about 1:10 to about 10:1, preferably about 2:1 to about 1:2, or more preferably about 1.5:1 to about 1:1.5, or any ratio in between.
- the molar ratio of iron acetate to nickel acetate can be 1:2, 1:1.5, 1.5:1, or 1:1.
- Those skilled in the art will recognize that other combinations of metal salts and other molar ratios of a first metal salt relative to a second metal salt may be used in order to synthesize metal nanoparticles with various compositions.
- the passivating solvent and the metal salt reaction solution can be mixed to give a homogeneous solution, suspension, or dispersion.
- the reaction solution can be mixed using standard laboratory stirrers, mixtures, sonicators, and the like, optionally with heating.
- the homogenous mixture thus obtained can be subjected to thermal decomposition in order to form the metal nanoparticles.
- the thermal decomposition reaction is started by heating the contents of the reaction vessel to a temperature above the melting point of at least one metal salt in the reaction vessel.
- Any suitable heat source may be used including standard laboratory heaters, such as a heating mantle, a hot plate, or a Bunsen burner, and the heating can be under reflux.
- the length of the thermal decomposition can be selected such that the desired size of the metal nanoparticles can be obtained. Typical reaction times can be from about 10 minutes to about 120 minutes, or any integer in between.
- the thermal decomposition reaction is stopped at the desired time by reducing the temperature of the contents of the reaction vessel to a temperature below the melting point of the metal salt.
- the size and distribution of metal nanoparticles produced can be verified by any suitable method.
- One method of verification is transmission electron microscopy (TEM).
- TEM transmission electron microscopy
- a suitable model is the Phillips CM300 FEG TEM that is commercially available from FEI Company of Hillsboro, OR.
- TEM micrographs of the metal nanoparticles 1 or more drops of the metal nanoparticle/passivating solvent solution are placed on a carbon membrane grid or other grid suitable for obtaining TEM micrographs.
- the TEM apparatus is then used to obtain micrographs of the nanoparticles that can be used to determine the distribution of nanoparticle sizes created.
- the metal nanoparticles such as those formed by thermal decomposition described in detail above, can then be supported on solid supports.
- the solid support can be silica, alumina, MCM-41, MgO, ZrO 2 , aluminum-stabilized magnesium oxide, zeolites, or other oxidic supports known in the art, and combinations thereof.
- Al 2 O 3 —SiO 2 hybrid support could be used.
- the support is aluminum oxide (Al 2 O 3 ) or silica (SiO 2 ).
- the oxide used as solid support can be powdered thereby providing small particle sizes and large surface areas.
- the powdered oxide can preferably have a particle size between about 0.01 ⁇ m to about 100 ⁇ m, more preferably about 0.1 ⁇ m to about 10 ⁇ m, even more preferably about 0.5 ⁇ m to about 5 ⁇ m, and most preferably about 1 ⁇ m to about 2 ⁇ m.
- the powdered oxide can have a surface area of about 50 to about 1000 m 2 /g, more preferably a surface area of about 200 to about 800 m 2 /g.
- the powdered oxide can be freshly prepared or commercially available.
- the metal nanoparticles are supported on solid supports via secondary dispersion and extraction.
- Secondary dispersion begins by introducing particles of a powdered oxide, such as aluminum oxide (Al 2 O 3 ) or silica (SiO 2 ), into the reaction vessel after the thermal decomposition reaction.
- a powdered oxide such as aluminum oxide (Al 2 O 3 ) or silica (SiO 2 )
- Al 2 O 3 powder with 1-2 ⁇ m particle size and having a surface area of 300-500 m 2 /g is commercially available from Alfa Aesar of Ward Hill, MA, or Degussa, NJ.
- Powdered oxide can be added to achieve a desired weight ratio between the powdered oxide and the initial amount of metal used to form the metal nanoparticles.
- the weight ratio can be between about 10:1 and about 15:1.
- 100 mg of iron acetate is used as the starting material, then about 320 to 480 mg of powdered oxide can be introduced into the solution.
- the mixture of powdered oxide and the metal nanoparticle/passivating solvent mixture can be mixed to form a homogenous solution, suspension or dispersion.
- the homogenous solution, suspension or dispersion can be formed using sonicator, a standard laboratory stirrer, a mechanical mixer, or any other suitable method, optionally with heating.
- the mixture of metal nanoparticles, powdered oxide, and passivating solvent can be first sonicated at roughly 80° C. for 2 hours, and then sonicated and mixed with a laboratory stirrer at 80° C. for 30 minutes to provide a homogenous solution.
- the dispersed metal nanoparticles and powdered oxide can be extracted from the passivating solvent.
- the extraction can be by filtration, centrifugation, removal of the solvents under reduced pressure, removal of the solvents under atmospheric pressure, and the like.
- extraction includes heating the homogenized mixture to a temperature where the passivating solvent has a significant vapor pressure. This temperature can be maintained until the passivating solvent evaporates, leaving behind the metal nanoparticles deposited in the pores of the Al 2 O 3 .
- the homogenous dispersion can be heated to 231° C., the boiling point of the passivating solvent, under an N 2 flow.
- the temperature and N 2 flow are maintained until the passivating solvent is completely evaporated.
- the powdered oxide and metal nanoparticles are left behind on the walls of the reaction vessel as a film or residue.
- the film will typically be black.
- the metal nanoparticle and powdered oxide film can be removed from the reaction vessel and ground to create a fine powder, thereby increasing the available surface area of the mixture.
- the mixture can be ground with a mortar and pestle, by a commercially available mechanical grinder, or by any other methods of increasing the surface area of the mixture will be apparent to those of skill in the art.
- the powdered oxide serves two functions during the extraction process.
- the powdered oxides are porous and have high surface area. Therefore, the metal nanoparticles will settle in the pores of the powdered oxide during secondary dispersion. Settling in the pores of the powdered oxide physically separates the metal nanoparticles from each other, thereby preventing agglomeration of the metal nanoparticles during extraction. This effect is complemented by the amount of powdered oxide used.
- the weight ratio of metal nanoparticles to powdered oxide can be between about 1:10 and 1:15, such as, for example, 1:11, 1:12, 2:25, 3:37, 1:13, 1:14, and the like.
- the relatively larger amount of powdered oxide in effect serves to further separate or ‘dilute’ the metal nanoparticles as the passivating solvent is removed. The process thus provides metal nanoparticles of defined particle size.
- the catalyst thus prepared can be stored for later use.
- the metal nanoparticles can be previously prepared, isolated from the passivating solvent, and purified, and then added to a powdered oxide in a suitable volume of the same or different passivating solvent.
- the metal nanoparticles and powdered oxide can be homogenously dispersed, extracted from the passivating solvent, and processed to increase the effective surface area as described above.
- Other methods for preparing the metal nanoparticle and powdered oxide mixture will be apparent to those skilled in the art.
- the metal nanoparticles thus formed can be used as a growth catalyst for synthesis of carbon nanotubes, nanofibers, and other one-dimensional carbon nanostructures by a chemical vapor deposition (CVD) process.
- CVD chemical vapor deposition
- the carbon nanotubes can be synthesized using carbon precursors, such as carbon containing gases.
- carbon precursors such as carbon containing gases.
- any carbon containing gas that does not pyrolize at temperatures up to 800° C. to 1000° C. can be used.
- suitable carbon-containing gases include carbon monoxide, aliphatic hydrocarbons, both saturated and unsaturated, such as methane, ethane, propane, butane, pentane, hexane, ethylene, acetylene and propylene; oxygenated hydrocarbons such as acetone, and methanol; aromatic hydrocarbons such as benzene, toluene, and naphthalene; and mixtures of the above, for example carbon monoxide and methane.
- acetylene promotes formation of multi-walled carbon nanotubes
- CO and methane are preferred feed gases for formation of single-walled carbon nanotubes.
- the carbon-containing gas may optionally be mixed with a diluent gas such as hydrogen, helium, argon, neon, krypton and xenon or a mixture thereof.
- the methods and processes of the invention provide for the synthesis of SWNTs with a narrow distribution of diameters.
- the narrow distribution of carbon nanotube diameters is obtained by activating small diameter catalyst particles preferentially during synthesis by selecting the lowest eutectic point as the reaction temperature.
- the metal nanoparticles supported on powdered oxides can be contacted with the carbon source at the reaction temperatures according to the literature methods described in Harutyunyan et al., NanoLetters 2, 525 (2002).
- the metal nanoparticles supported on the oxide powder can be aerosolized and introduced into the reactor maintained at the reaction temperature.
- the carbon precursor gas is introduced into the reactor.
- the flow of reactants within the reactor can be controlled such that the deposition of the carbon products on the walls of the reactor is reduced.
- the carbon nanotubes thus produced can be collected and separated.
- the metal nanoparticles supported on the oxide powder can be aerosolized by any of the art known methods.
- the supported metal nanoparticles are aerosolized using an inert gas, such as helium, neon, argon, krypton, xenon, or radon.
- an inert gas such as helium, neon, argon, krypton, xenon, or radon.
- argon is used.
- argon, or any other gas is forced through a particle injector, and into the reactor.
- the particle injector can be any vessel that is capable of containing the supported metal nanoparticles and that has a means of agitating the supported metal nanoparticles.
- the catalyst deposited on a powdered porous oxide substrate can be placed in a beaker that has a mechanical stirrer attached to it.
- the supported metal nanoparticles can be stirred or mixed in order to assist the entrainment of the catalyst in the transporter gas, such as argon.
- the growth technique enhanced by an attached mass spectrometer for in-situ parametrical studies, enables us to elucidate the evolution of catalyst activity during carbon single walled nanotubes (SWNTs) growth and in this manner reveal the catalyst features and their relationship with the growth conditions. Any changes of catalyst features due to the composition modification, diameter variation or interaction with support material we were detected by monitoring catalyst activity. By variation of synthesis temperature, duration and carbon feedstock, type of transport gas and pressure we exposed their relationship with catalyst activity and in this manner with catalyst features and thereby reveal the optimum condition for growth of high quality carbon SWNTs.
- SWNTs carbon single walled nanotubes
- FIGS. 1A and B shows that the increases of catalyst activity coincidences with liquefaction process of catalyst, while the liquid-solid phase transition initiates deactivation of catalyst.
- mass spectrometer attached into the CVD technique may offer opportunities for parametrical studies of catalyst features during carbon SWNTs growth, by in-situ evolution of catalyst activity.
- By monitoring hydrogen concentration occurred because of hydrocarbon decomposition it is possible to reveal the a) catalyst lifetime for nanotube growth; b) to find the appropriate support material for given catalyst composition and diameter; c) establish the optimal catalyst composition and size for growth of carbon nanotube; d) establish the optimal synthesis temperature which leads growth of high quality carbon nanotube by excluding of formation of amorphous carbon; e) establish the carbon feedstock rate for growth of high quality carbon SWNTs; f) establish the appropriate pressure of gases inside the reactor favorable for carbon SWNTs growth; g) establish the composition of transport gases, including the oxidizers and reducers.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Composite Materials (AREA)
- Manufacturing & Machinery (AREA)
- Carbon And Carbon Compounds (AREA)
- Catalysts (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/669,124 US20080279753A1 (en) | 2006-01-30 | 2007-01-30 | Method and Apparatus for Growth of High Quality Carbon Single-Walled Nanotubes |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US76381306P | 2006-01-30 | 2006-01-30 | |
| US11/669,124 US20080279753A1 (en) | 2006-01-30 | 2007-01-30 | Method and Apparatus for Growth of High Quality Carbon Single-Walled Nanotubes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US20080279753A1 true US20080279753A1 (en) | 2008-11-13 |
Family
ID=38997607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US11/669,124 Abandoned US20080279753A1 (en) | 2006-01-30 | 2007-01-30 | Method and Apparatus for Growth of High Quality Carbon Single-Walled Nanotubes |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20080279753A1 (https=) |
| JP (1) | JP5550833B2 (https=) |
| WO (1) | WO2008016388A2 (https=) |
Cited By (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090274609A1 (en) * | 2008-05-01 | 2009-11-05 | Honda Motor Co., Ltd. | Synthesis Of High Quality Carbon Single-Walled Nanotubes |
| US8158217B2 (en) | 2007-01-03 | 2012-04-17 | Applied Nanostructured Solutions, Llc | CNT-infused fiber and method therefor |
| US8163263B2 (en) | 2006-01-30 | 2012-04-24 | Honda Motor Co., Ltd. | Catalyst for the growth of carbon single-walled nanotubes |
| US8168291B2 (en) | 2009-11-23 | 2012-05-01 | Applied Nanostructured Solutions, Llc | Ceramic composite materials containing carbon nanotube-infused fiber materials and methods for production thereof |
| US8325079B2 (en) | 2009-04-24 | 2012-12-04 | Applied Nanostructured Solutions, Llc | CNT-based signature control material |
| US8545963B2 (en) | 2009-12-14 | 2013-10-01 | Applied Nanostructured Solutions, Llc | Flame-resistant composite materials and articles containing carbon nanotube-infused fiber materials |
| US8580342B2 (en) | 2009-02-27 | 2013-11-12 | Applied Nanostructured Solutions, Llc | Low temperature CNT growth using gas-preheat method |
| US8585934B2 (en) | 2009-02-17 | 2013-11-19 | Applied Nanostructured Solutions, Llc | Composites comprising carbon nanotubes on fiber |
| US8591858B2 (en) | 2008-05-01 | 2013-11-26 | Honda Motor Co., Ltd. | Effect of hydrocarbon and transport gas feedstock on efficiency and quality of grown single-walled nanotubes |
| US8601965B2 (en) | 2009-11-23 | 2013-12-10 | Applied Nanostructured Solutions, Llc | CNT-tailored composite sea-based structures |
| US8664573B2 (en) | 2009-04-27 | 2014-03-04 | Applied Nanostructured Solutions, Llc | CNT-based resistive heating for deicing composite structures |
| US8665581B2 (en) | 2010-03-02 | 2014-03-04 | Applied Nanostructured Solutions, Llc | Spiral wound electrical devices containing carbon nanotube-infused electrode materials and methods and apparatuses for production thereof |
| US8679444B2 (en) | 2009-04-17 | 2014-03-25 | Seerstone Llc | Method for producing solid carbon by reducing carbon oxides |
| US8780526B2 (en) | 2010-06-15 | 2014-07-15 | Applied Nanostructured Solutions, Llc | Electrical devices containing carbon nanotube-infused fibers and methods for production thereof |
| US8787001B2 (en) | 2010-03-02 | 2014-07-22 | Applied Nanostructured Solutions, Llc | Electrical devices containing carbon nanotube-infused fibers and methods for production thereof |
| US8784937B2 (en) | 2010-09-14 | 2014-07-22 | Applied Nanostructured Solutions, Llc | Glass substrates having carbon nanotubes grown thereon and methods for production thereof |
| US8815341B2 (en) | 2010-09-22 | 2014-08-26 | Applied Nanostructured Solutions, Llc | Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof |
| US8951632B2 (en) | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused carbon fiber materials and process therefor |
| US8951631B2 (en) | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused metal fiber materials and process therefor |
| US8969225B2 (en) | 2009-08-03 | 2015-03-03 | Applied Nano Structured Soultions, LLC | Incorporation of nanoparticles in composite fibers |
| US8999453B2 (en) | 2010-02-02 | 2015-04-07 | Applied Nanostructured Solutions, Llc | Carbon nanotube-infused fiber materials containing parallel-aligned carbon nanotubes, methods for production thereof, and composite materials derived therefrom |
| US9005755B2 (en) | 2007-01-03 | 2015-04-14 | Applied Nanostructured Solutions, Llc | CNS-infused carbon nanomaterials and process therefor |
| US9017854B2 (en) | 2010-08-30 | 2015-04-28 | Applied Nanostructured Solutions, Llc | Structural energy storage assemblies and methods for production thereof |
| US9085464B2 (en) | 2012-03-07 | 2015-07-21 | Applied Nanostructured Solutions, Llc | Resistance measurement system and method of using the same |
| US9090472B2 (en) | 2012-04-16 | 2015-07-28 | Seerstone Llc | Methods for producing solid carbon by reducing carbon dioxide |
| US9111658B2 (en) | 2009-04-24 | 2015-08-18 | Applied Nanostructured Solutions, Llc | CNS-shielded wires |
| US9167736B2 (en) | 2010-01-15 | 2015-10-20 | Applied Nanostructured Solutions, Llc | CNT-infused fiber as a self shielding wire for enhanced power transmission line |
| US9163354B2 (en) | 2010-01-15 | 2015-10-20 | Applied Nanostructured Solutions, Llc | CNT-infused fiber as a self shielding wire for enhanced power transmission line |
| US9221685B2 (en) | 2012-04-16 | 2015-12-29 | Seerstone Llc | Methods of capturing and sequestering carbon |
| EP2943963A4 (en) * | 2013-01-09 | 2016-07-06 | Hanwha Chemical Corp | METHOD FOR MANUFACTURING CONDUCTIVE FILM |
| US9475699B2 (en) | 2012-04-16 | 2016-10-25 | Seerstone Llc. | Methods for treating an offgas containing carbon oxides |
| US9586823B2 (en) | 2013-03-15 | 2017-03-07 | Seerstone Llc | Systems for producing solid carbon by reducing carbon oxides |
| US9598286B2 (en) | 2012-07-13 | 2017-03-21 | Seerstone Llc | Methods and systems for forming ammonia and solid carbon products |
| US9604848B2 (en) | 2012-07-12 | 2017-03-28 | Seerstone Llc | Solid carbon products comprising carbon nanotubes and methods of forming same |
| US9650251B2 (en) | 2012-11-29 | 2017-05-16 | Seerstone Llc | Reactors and methods for producing solid carbon materials |
| US9731970B2 (en) | 2012-04-16 | 2017-08-15 | Seerstone Llc | Methods and systems for thermal energy recovery from production of solid carbon materials by reducing carbon oxides |
| US9779845B2 (en) | 2012-07-18 | 2017-10-03 | Seerstone Llc | Primary voltaic sources including nanofiber Schottky barrier arrays and methods of forming same |
| US9783421B2 (en) | 2013-03-15 | 2017-10-10 | Seerstone Llc | Carbon oxide reduction with intermetallic and carbide catalysts |
| US9783416B2 (en) | 2013-03-15 | 2017-10-10 | Seerstone Llc | Methods of producing hydrogen and solid carbon |
| US9796591B2 (en) | 2012-04-16 | 2017-10-24 | Seerstone Llc | Methods for reducing carbon oxides with non ferrous catalysts and forming solid carbon products |
| US9896341B2 (en) | 2012-04-23 | 2018-02-20 | Seerstone Llc | Methods of forming carbon nanotubes having a bimodal size distribution |
| US10086349B2 (en) | 2013-03-15 | 2018-10-02 | Seerstone Llc | Reactors, systems, and methods for forming solid products |
| US10115844B2 (en) | 2013-03-15 | 2018-10-30 | Seerstone Llc | Electrodes comprising nanostructured carbon |
| US20180334407A1 (en) * | 2017-05-17 | 2018-11-22 | Eden Innovations Llc | Methods And Systems For Making Nanocarbon Particle Admixtures And Concrete |
| US10138128B2 (en) | 2009-03-03 | 2018-11-27 | Applied Nanostructured Solutions, Llc | System and method for surface treatment and barrier coating of fibers for in situ CNT growth |
| WO2019055998A1 (en) * | 2017-09-18 | 2019-03-21 | West Virginia University | CATALYSTS AND PROCESSES FOR MULTI-WAFER CARBON NANOTUBES WITH TUNABLE BASIC GROWTH |
| US10815124B2 (en) | 2012-07-12 | 2020-10-27 | Seerstone Llc | Solid carbon products comprising carbon nanotubes and methods of forming same |
| CN112707385A (zh) * | 2021-01-15 | 2021-04-27 | 北海惠科光电技术有限公司 | 碳纳米管的制备方法 |
| CN113164931A (zh) * | 2018-10-23 | 2021-07-23 | 卡本科技有限公司 | 半导体纳米管的富集合成 |
| US11752459B2 (en) | 2016-07-28 | 2023-09-12 | Seerstone Llc | Solid carbon products comprising compressed carbon nanotubes in a container and methods of forming same |
| US11999654B2 (en) | 2019-08-22 | 2024-06-04 | Eden Innovations Ltd. | Method for making concrete admixtures containing carbon nanoparticles |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009155466A2 (en) * | 2008-06-19 | 2009-12-23 | Honda Motor Co. Ltd. | Low temperature single-wall carbon nanotube synthesis |
| WO2010014650A2 (en) * | 2008-07-29 | 2010-02-04 | Honda Motor Co., Ltd. | Preferential growth of single-walled carbon nanotubes with metallic conductivity |
| TWI491555B (zh) * | 2010-04-01 | 2015-07-11 | Hon Hai Prec Ind Co Ltd | 一維奈米結構、其製備方法及一維奈米結構作標記的方法 |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5424054A (en) * | 1993-05-21 | 1995-06-13 | International Business Machines Corporation | Carbon fibers and method for their production |
| US6401526B1 (en) * | 1999-12-10 | 2002-06-11 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotubes and methods of fabrication thereof using a liquid phase catalyst precursor |
| US20030207326A1 (en) * | 2002-05-01 | 2003-11-06 | Xing Su | Methods and device for biomolecule characterization |
| US20040005269A1 (en) * | 2002-06-06 | 2004-01-08 | Houjin Huang | Method for selectively producing carbon nanostructures |
| US20040040834A1 (en) * | 2002-03-04 | 2004-03-04 | Smalley Richard E. | Method for separating single-wall carbon nanotubes and compositions thereof |
| US6730284B2 (en) * | 2000-06-16 | 2004-05-04 | Honda Giken Kogyo Kabushiki Kaisha | Method for producing carbonaceous articles |
| US20040099208A1 (en) * | 2002-11-22 | 2004-05-27 | Kang Sung Gu | Method for forming carbon nanotubes |
| US6764874B1 (en) * | 2003-01-30 | 2004-07-20 | Motorola, Inc. | Method for chemical vapor deposition of single walled carbon nanotubes |
| US20050123467A1 (en) * | 2003-12-03 | 2005-06-09 | Avetik Harutyunyan | Systems and methods for production of carbon nanostructures |
| US20060025515A1 (en) * | 2004-07-27 | 2006-02-02 | Mainstream Engineering Corp. | Nanotube composites and methods for producing |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6333016B1 (en) * | 1999-06-02 | 2001-12-25 | The Board Of Regents Of The University Of Oklahoma | Method of producing carbon nanotubes |
| US7338648B2 (en) * | 2001-12-28 | 2008-03-04 | The Penn State Research Foundation | Method for low temperature synthesis of single wall carbon nanotubes |
| KR20060133974A (ko) * | 2003-10-16 | 2006-12-27 | 더 유니버시티 오브 아크론 | 탄소 나노섬유 기판 상의 탄소 나노튜브 |
| JP2007523822A (ja) * | 2004-01-15 | 2007-08-23 | ナノコンプ テクノロジーズ インコーポレイテッド | 伸長した長さのナノ構造の合成のためのシステム及び方法 |
| JP4457227B2 (ja) * | 2004-06-11 | 2010-04-28 | 独立行政法人物質・材料研究機構 | 炭素被覆形強磁性金属球形粒子及びその製造方法 |
| JP3935479B2 (ja) * | 2004-06-23 | 2007-06-20 | キヤノン株式会社 | カーボンファイバーの製造方法及びそれを使用した電子放出素子の製造方法、電子デバイスの製造方法、画像表示装置の製造方法および、該画像表示装置を用いた情報表示再生装置 |
| US7871591B2 (en) * | 2005-01-11 | 2011-01-18 | Honda Motor Co., Ltd. | Methods for growing long carbon single-walled nanotubes |
-
2007
- 2007-01-30 JP JP2008552497A patent/JP5550833B2/ja not_active Expired - Fee Related
- 2007-01-30 US US11/669,124 patent/US20080279753A1/en not_active Abandoned
- 2007-01-30 WO PCT/US2007/002513 patent/WO2008016388A2/en not_active Ceased
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5424054A (en) * | 1993-05-21 | 1995-06-13 | International Business Machines Corporation | Carbon fibers and method for their production |
| US6401526B1 (en) * | 1999-12-10 | 2002-06-11 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotubes and methods of fabrication thereof using a liquid phase catalyst precursor |
| US6730284B2 (en) * | 2000-06-16 | 2004-05-04 | Honda Giken Kogyo Kabushiki Kaisha | Method for producing carbonaceous articles |
| US20040040834A1 (en) * | 2002-03-04 | 2004-03-04 | Smalley Richard E. | Method for separating single-wall carbon nanotubes and compositions thereof |
| US20030207326A1 (en) * | 2002-05-01 | 2003-11-06 | Xing Su | Methods and device for biomolecule characterization |
| US20040005269A1 (en) * | 2002-06-06 | 2004-01-08 | Houjin Huang | Method for selectively producing carbon nanostructures |
| US20040099208A1 (en) * | 2002-11-22 | 2004-05-27 | Kang Sung Gu | Method for forming carbon nanotubes |
| US6764874B1 (en) * | 2003-01-30 | 2004-07-20 | Motorola, Inc. | Method for chemical vapor deposition of single walled carbon nanotubes |
| US20050123467A1 (en) * | 2003-12-03 | 2005-06-09 | Avetik Harutyunyan | Systems and methods for production of carbon nanostructures |
| US20060025515A1 (en) * | 2004-07-27 | 2006-02-02 | Mainstream Engineering Corp. | Nanotube composites and methods for producing |
Cited By (69)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8163263B2 (en) | 2006-01-30 | 2012-04-24 | Honda Motor Co., Ltd. | Catalyst for the growth of carbon single-walled nanotubes |
| US8951632B2 (en) | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused carbon fiber materials and process therefor |
| US8158217B2 (en) | 2007-01-03 | 2012-04-17 | Applied Nanostructured Solutions, Llc | CNT-infused fiber and method therefor |
| US9573812B2 (en) | 2007-01-03 | 2017-02-21 | Applied Nanostructured Solutions, Llc | CNT-infused metal fiber materials and process therefor |
| US9574300B2 (en) | 2007-01-03 | 2017-02-21 | Applied Nanostructured Solutions, Llc | CNT-infused carbon fiber materials and process therefor |
| US9005755B2 (en) | 2007-01-03 | 2015-04-14 | Applied Nanostructured Solutions, Llc | CNS-infused carbon nanomaterials and process therefor |
| US8951631B2 (en) | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused metal fiber materials and process therefor |
| US20090274609A1 (en) * | 2008-05-01 | 2009-11-05 | Honda Motor Co., Ltd. | Synthesis Of High Quality Carbon Single-Walled Nanotubes |
| US10850984B2 (en) | 2008-05-01 | 2020-12-01 | Honda Motor Co., Ltd. | Synthesis of high quality carbon single-walled nanotubes |
| US8591858B2 (en) | 2008-05-01 | 2013-11-26 | Honda Motor Co., Ltd. | Effect of hydrocarbon and transport gas feedstock on efficiency and quality of grown single-walled nanotubes |
| US9174847B2 (en) * | 2008-05-01 | 2015-11-03 | Honda Motor Co., Ltd. | Synthesis of high quality carbon single-walled nanotubes |
| US8585934B2 (en) | 2009-02-17 | 2013-11-19 | Applied Nanostructured Solutions, Llc | Composites comprising carbon nanotubes on fiber |
| US8580342B2 (en) | 2009-02-27 | 2013-11-12 | Applied Nanostructured Solutions, Llc | Low temperature CNT growth using gas-preheat method |
| US10138128B2 (en) | 2009-03-03 | 2018-11-27 | Applied Nanostructured Solutions, Llc | System and method for surface treatment and barrier coating of fibers for in situ CNT growth |
| US10500582B2 (en) | 2009-04-17 | 2019-12-10 | Seerstone Llc | Compositions of matter including solid carbon formed by reducing carbon oxides |
| US8679444B2 (en) | 2009-04-17 | 2014-03-25 | Seerstone Llc | Method for producing solid carbon by reducing carbon oxides |
| US9556031B2 (en) | 2009-04-17 | 2017-01-31 | Seerstone Llc | Method for producing solid carbon by reducing carbon oxides |
| US9241433B2 (en) | 2009-04-24 | 2016-01-19 | Applied Nanostructured Solutions, Llc | CNT-infused EMI shielding composite and coating |
| US9111658B2 (en) | 2009-04-24 | 2015-08-18 | Applied Nanostructured Solutions, Llc | CNS-shielded wires |
| US8325079B2 (en) | 2009-04-24 | 2012-12-04 | Applied Nanostructured Solutions, Llc | CNT-based signature control material |
| US8664573B2 (en) | 2009-04-27 | 2014-03-04 | Applied Nanostructured Solutions, Llc | CNT-based resistive heating for deicing composite structures |
| US8969225B2 (en) | 2009-08-03 | 2015-03-03 | Applied Nano Structured Soultions, LLC | Incorporation of nanoparticles in composite fibers |
| US8662449B2 (en) | 2009-11-23 | 2014-03-04 | Applied Nanostructured Solutions, Llc | CNT-tailored composite air-based structures |
| US8601965B2 (en) | 2009-11-23 | 2013-12-10 | Applied Nanostructured Solutions, Llc | CNT-tailored composite sea-based structures |
| US8168291B2 (en) | 2009-11-23 | 2012-05-01 | Applied Nanostructured Solutions, Llc | Ceramic composite materials containing carbon nanotube-infused fiber materials and methods for production thereof |
| US8545963B2 (en) | 2009-12-14 | 2013-10-01 | Applied Nanostructured Solutions, Llc | Flame-resistant composite materials and articles containing carbon nanotube-infused fiber materials |
| US9167736B2 (en) | 2010-01-15 | 2015-10-20 | Applied Nanostructured Solutions, Llc | CNT-infused fiber as a self shielding wire for enhanced power transmission line |
| US9163354B2 (en) | 2010-01-15 | 2015-10-20 | Applied Nanostructured Solutions, Llc | CNT-infused fiber as a self shielding wire for enhanced power transmission line |
| US8999453B2 (en) | 2010-02-02 | 2015-04-07 | Applied Nanostructured Solutions, Llc | Carbon nanotube-infused fiber materials containing parallel-aligned carbon nanotubes, methods for production thereof, and composite materials derived therefrom |
| US8787001B2 (en) | 2010-03-02 | 2014-07-22 | Applied Nanostructured Solutions, Llc | Electrical devices containing carbon nanotube-infused fibers and methods for production thereof |
| US8665581B2 (en) | 2010-03-02 | 2014-03-04 | Applied Nanostructured Solutions, Llc | Spiral wound electrical devices containing carbon nanotube-infused electrode materials and methods and apparatuses for production thereof |
| US8780526B2 (en) | 2010-06-15 | 2014-07-15 | Applied Nanostructured Solutions, Llc | Electrical devices containing carbon nanotube-infused fibers and methods for production thereof |
| US9017854B2 (en) | 2010-08-30 | 2015-04-28 | Applied Nanostructured Solutions, Llc | Structural energy storage assemblies and methods for production thereof |
| US9907174B2 (en) | 2010-08-30 | 2018-02-27 | Applied Nanostructured Solutions, Llc | Structural energy storage assemblies and methods for production thereof |
| US8784937B2 (en) | 2010-09-14 | 2014-07-22 | Applied Nanostructured Solutions, Llc | Glass substrates having carbon nanotubes grown thereon and methods for production thereof |
| US8815341B2 (en) | 2010-09-22 | 2014-08-26 | Applied Nanostructured Solutions, Llc | Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof |
| US9085464B2 (en) | 2012-03-07 | 2015-07-21 | Applied Nanostructured Solutions, Llc | Resistance measurement system and method of using the same |
| US10106416B2 (en) | 2012-04-16 | 2018-10-23 | Seerstone Llc | Methods for treating an offgas containing carbon oxides |
| US9637382B2 (en) | 2012-04-16 | 2017-05-02 | Seerstone Llc | Methods for producing solid carbon by reducing carbon dioxide |
| US9731970B2 (en) | 2012-04-16 | 2017-08-15 | Seerstone Llc | Methods and systems for thermal energy recovery from production of solid carbon materials by reducing carbon oxides |
| US9475699B2 (en) | 2012-04-16 | 2016-10-25 | Seerstone Llc. | Methods for treating an offgas containing carbon oxides |
| US9221685B2 (en) | 2012-04-16 | 2015-12-29 | Seerstone Llc | Methods of capturing and sequestering carbon |
| US9090472B2 (en) | 2012-04-16 | 2015-07-28 | Seerstone Llc | Methods for producing solid carbon by reducing carbon dioxide |
| US9796591B2 (en) | 2012-04-16 | 2017-10-24 | Seerstone Llc | Methods for reducing carbon oxides with non ferrous catalysts and forming solid carbon products |
| US9896341B2 (en) | 2012-04-23 | 2018-02-20 | Seerstone Llc | Methods of forming carbon nanotubes having a bimodal size distribution |
| US10815124B2 (en) | 2012-07-12 | 2020-10-27 | Seerstone Llc | Solid carbon products comprising carbon nanotubes and methods of forming same |
| US9604848B2 (en) | 2012-07-12 | 2017-03-28 | Seerstone Llc | Solid carbon products comprising carbon nanotubes and methods of forming same |
| US9598286B2 (en) | 2012-07-13 | 2017-03-21 | Seerstone Llc | Methods and systems for forming ammonia and solid carbon products |
| US10358346B2 (en) | 2012-07-13 | 2019-07-23 | Seerstone Llc | Methods and systems for forming ammonia and solid carbon products |
| US9779845B2 (en) | 2012-07-18 | 2017-10-03 | Seerstone Llc | Primary voltaic sources including nanofiber Schottky barrier arrays and methods of forming same |
| US9650251B2 (en) | 2012-11-29 | 2017-05-16 | Seerstone Llc | Reactors and methods for producing solid carbon materials |
| US9993791B2 (en) | 2012-11-29 | 2018-06-12 | Seerstone Llc | Reactors and methods for producing solid carbon materials |
| EP2943963A4 (en) * | 2013-01-09 | 2016-07-06 | Hanwha Chemical Corp | METHOD FOR MANUFACTURING CONDUCTIVE FILM |
| US9783416B2 (en) | 2013-03-15 | 2017-10-10 | Seerstone Llc | Methods of producing hydrogen and solid carbon |
| US9586823B2 (en) | 2013-03-15 | 2017-03-07 | Seerstone Llc | Systems for producing solid carbon by reducing carbon oxides |
| US10115844B2 (en) | 2013-03-15 | 2018-10-30 | Seerstone Llc | Electrodes comprising nanostructured carbon |
| US10322832B2 (en) | 2013-03-15 | 2019-06-18 | Seerstone, Llc | Systems for producing solid carbon by reducing carbon oxides |
| US9783421B2 (en) | 2013-03-15 | 2017-10-10 | Seerstone Llc | Carbon oxide reduction with intermetallic and carbide catalysts |
| US10086349B2 (en) | 2013-03-15 | 2018-10-02 | Seerstone Llc | Reactors, systems, and methods for forming solid products |
| US11752459B2 (en) | 2016-07-28 | 2023-09-12 | Seerstone Llc | Solid carbon products comprising compressed carbon nanotubes in a container and methods of forming same |
| US11951428B2 (en) | 2016-07-28 | 2024-04-09 | Seerstone, Llc | Solid carbon products comprising compressed carbon nanotubes in a container and methods of forming same |
| US10584072B2 (en) * | 2017-05-17 | 2020-03-10 | Eden Innovations Ltd. | Methods and systems for making nanocarbon particle admixtures and concrete |
| US20180334407A1 (en) * | 2017-05-17 | 2018-11-22 | Eden Innovations Llc | Methods And Systems For Making Nanocarbon Particle Admixtures And Concrete |
| US11124458B2 (en) | 2017-05-17 | 2021-09-21 | Eden Innovations Ltd. | Nanocarbon particle admixtures for concrete |
| WO2019055998A1 (en) * | 2017-09-18 | 2019-03-21 | West Virginia University | CATALYSTS AND PROCESSES FOR MULTI-WAFER CARBON NANOTUBES WITH TUNABLE BASIC GROWTH |
| US11040876B2 (en) | 2017-09-18 | 2021-06-22 | West Virginia University | Catalysts and processes for tunable base-grown multiwalled carbon nanotubes |
| CN113164931A (zh) * | 2018-10-23 | 2021-07-23 | 卡本科技有限公司 | 半导体纳米管的富集合成 |
| US11999654B2 (en) | 2019-08-22 | 2024-06-04 | Eden Innovations Ltd. | Method for making concrete admixtures containing carbon nanoparticles |
| CN112707385A (zh) * | 2021-01-15 | 2021-04-27 | 北海惠科光电技术有限公司 | 碳纳米管的制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009528969A (ja) | 2009-08-13 |
| JP5550833B2 (ja) | 2014-07-16 |
| WO2008016388A2 (en) | 2008-02-07 |
| WO2008016388A3 (en) | 2008-04-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20080279753A1 (en) | Method and Apparatus for Growth of High Quality Carbon Single-Walled Nanotubes | |
| US8163263B2 (en) | Catalyst for the growth of carbon single-walled nanotubes | |
| US10384943B2 (en) | Synthesis of small and narrow diameter distributed carbon single walled nanotubes | |
| US7871591B2 (en) | Methods for growing long carbon single-walled nanotubes | |
| US7485600B2 (en) | Catalyst for synthesis of carbon single-walled nanotubes | |
| JP6538115B2 (ja) | 高品質なカーボン単層ナノチューブの合成 | |
| Ando et al. | Growing carbon nanotubes | |
| US7901654B2 (en) | Synthesis of small diameter single-walled carbon nanotubes | |
| Ni et al. | Decomposition of metal carbides as an elementary step of carbon nanotube synthesis | |
| JP2001512087A (ja) | 非担持金属触媒と一重ナノチューブを用いた一重ナノチューブの製法 | |
| KR20080113269A (ko) | 균일한 단일 벽 탄소 나노튜브의 제조방법 | |
| Shukrullah et al. | Synthesis of MWCNT Forests with Alumina‐Supported Fe2O3 Catalyst by Using a Floating Catalyst Chemical Vapor Deposition Technique | |
| Lee et al. | Synthesis of carbon nanotubes and carbon nanofilaments over palladium supported catalysts | |
| US20070116629A1 (en) | Methods for synthesis of high quality carbon single-walled nanotubes | |
| Toussi et al. | Effect of synthesis condition on the growth of SWCNTs via catalytic chemical vapour deposition | |
| JP3952479B2 (ja) | カーボンナノチューブの製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AS | Assignment |
Owner name: HONDA MOTOR CO., LTD., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:HARUTYUNYAN, AVETIK R.;REEL/FRAME:019189/0982 Effective date: 20070312 |
|
| STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |