US20080156679A1 - Environmental isolation system for flat panel displays - Google Patents

Environmental isolation system for flat panel displays Download PDF

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Publication number
US20080156679A1
US20080156679A1 US11/953,020 US95302007A US2008156679A1 US 20080156679 A1 US20080156679 A1 US 20080156679A1 US 95302007 A US95302007 A US 95302007A US 2008156679 A1 US2008156679 A1 US 2008156679A1
Authority
US
United States
Prior art keywords
container
door
flat panel
flexible door
rigid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/953,020
Other languages
English (en)
Inventor
Anthony C. Bonora
Michel Pharand
Richard Gould
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Muratec Automation Co Ltd
Original Assignee
Bonora Anthony C
Michel Pharand
Richard Gould
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bonora Anthony C, Michel Pharand, Richard Gould filed Critical Bonora Anthony C
Priority to US11/953,020 priority Critical patent/US20080156679A1/en
Priority to TW096146988A priority patent/TW200842089A/zh
Priority to JP2009540521A priority patent/JP2010512292A/ja
Priority to KR1020097012601A priority patent/KR20090086257A/ko
Priority to PCT/US2007/087034 priority patent/WO2008070876A2/fr
Publication of US20080156679A1 publication Critical patent/US20080156679A1/en
Assigned to MURATEC AUTOMATION CO., LTD. reassignment MURATEC AUTOMATION CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ASYST TECHNOLOGIES, INC.
Assigned to MURATEC AUTOMATION CO., LTD. reassignment MURATEC AUTOMATION CO., LTD. ADDENDUM TO ASSIGNMENT Assignors: ASYST TECHNOLOGIES, INC.
Abandoned legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2069—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere
    • B65D81/2076—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere in an at least partially rigid container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67363—Closed carriers specially adapted for containing substrates other than wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2585/00—Containers, packaging elements or packages specially adapted for particular articles or materials
    • B65D2585/68—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form
    • B65D2585/6802—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form specific machines, engines or vehicles
    • B65D2585/6835—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form specific machines, engines or vehicles audio-visual devices
    • B65D2585/6837—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form specific machines, engines or vehicles audio-visual devices tv or computers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
US11/953,020 2006-12-08 2007-12-08 Environmental isolation system for flat panel displays Abandoned US20080156679A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US11/953,020 US20080156679A1 (en) 2006-12-08 2007-12-08 Environmental isolation system for flat panel displays
TW096146988A TW200842089A (en) 2006-12-08 2007-12-10 Environmental isolation system for flat panel displays
JP2009540521A JP2010512292A (ja) 2006-12-08 2007-12-10 フラットパネルディスプレイのための環境隔絶システム
KR1020097012601A KR20090086257A (ko) 2006-12-08 2007-12-10 평판 디스플레이용 환경 격리 시스템
PCT/US2007/087034 WO2008070876A2 (fr) 2006-12-08 2007-12-10 Système d'isolation vis-à-vis de l'environnement pour afficheurs à écran plat

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US87389206P 2006-12-08 2006-12-08
US90697207P 2007-03-14 2007-03-14
US11/953,020 US20080156679A1 (en) 2006-12-08 2007-12-08 Environmental isolation system for flat panel displays

Publications (1)

Publication Number Publication Date
US20080156679A1 true US20080156679A1 (en) 2008-07-03

Family

ID=39493116

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/953,020 Abandoned US20080156679A1 (en) 2006-12-08 2007-12-08 Environmental isolation system for flat panel displays

Country Status (5)

Country Link
US (1) US20080156679A1 (fr)
JP (1) JP2010512292A (fr)
KR (1) KR20090086257A (fr)
TW (1) TW200842089A (fr)
WO (1) WO2008070876A2 (fr)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090016862A1 (en) * 2007-07-12 2009-01-15 Gould Richard H Method and apparatus for providing flat panel display environmental isolation
US20090072688A1 (en) * 2007-09-14 2009-03-19 National Taiwan University Of Science & Technology Receiving device
US20100236718A1 (en) * 2009-03-17 2010-09-23 Tokyo Electron Limited Substrate processing apparatus
JP2014236164A (ja) * 2013-06-04 2014-12-15 シンフォニアテクノロジー株式会社 ロードポート装置
US20150030416A1 (en) * 2012-04-16 2015-01-29 Rorze Corporation Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit
US20150136849A1 (en) * 2012-05-25 2015-05-21 Checkpoint Systems, Inc. Device and method for writing a plurality of transponders
US20150329278A1 (en) * 2013-05-06 2015-11-19 Shenzhen China Star Optoelectronics Technology Co. Ltd. Glass panel packaging box and de-packaging method thereof
US20160368653A1 (en) * 2015-06-22 2016-12-22 Cornerstone Automation Systems, Llc Secure tote for order fulfillment and method of operation thereof
US20170170038A1 (en) * 2015-12-14 2017-06-15 Solarcity Corporation Micro-environment container for photovoltaic cells
US20200035531A1 (en) * 2018-07-27 2020-01-30 Nanometrics Incorporated Foup purge shield
US11171026B2 (en) * 2017-11-14 2021-11-09 Taiwan Semiconductor Manufacturing Co., Ltd. Systems, devices, and methods for using a real time environment sensor in a FOUP
EP4092722A1 (fr) * 2021-05-21 2022-11-23 Semsysco GmbH Système de manutention pour récupérer un substrat

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5386137B2 (ja) * 2008-10-06 2014-01-15 株式会社日立ハイテクノロジーズ 試料測定装置
JP5279576B2 (ja) * 2009-03-27 2013-09-04 大日本スクリーン製造株式会社 基板処理装置
JP5773158B2 (ja) * 2011-11-10 2015-09-02 株式会社Ihi 薄板状ワーク保管装置
WO2014103808A1 (fr) * 2012-12-24 2014-07-03 淀川ヒューテック株式会社 Boîte destinée à accueillir un corps en forme de plaque
CN105637669B (zh) * 2014-01-21 2017-11-03 科迪华公司 用于电子装置封装的设备和技术

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US4815515A (en) * 1987-05-27 1989-03-28 Lee Song L Structure of window shade
US5249616A (en) * 1992-09-30 1993-10-05 Chou Yen Double-layer window with shade roller unit for regulating the light
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US6276744B1 (en) * 2000-06-21 2001-08-21 Technical Products Group, Inc. Roll-type door opener
US6284020B1 (en) * 1997-12-02 2001-09-04 Kabushiki Kaisha Toshiba Method of maintaining cleanliness of substrates and box for accommodating substrates
US6540467B1 (en) * 2001-06-18 2003-04-01 Lsi Logic Corporation Apparatus and method of semiconductor wafer protection
US6723151B2 (en) * 2001-09-27 2004-04-20 Ebara Corporation Gas removal method and gas removal filter
US6724476B1 (en) * 2002-10-01 2004-04-20 Advanced Micro Devices, Inc. Low defect metrology approach on clean track using integrated metrology
US6829130B2 (en) * 2000-11-15 2004-12-07 Ebara Corporation Power supply apparatus for supplying electric power to substrate carrier container
US7111895B2 (en) * 2004-12-02 2006-09-26 Patriot Lift Co., Llc Apparatus for pneumatic operation of transport container sliding door
US7481260B2 (en) * 2004-01-09 2009-01-27 Hagen Holding Aps Tightening device for blinds

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JP4389318B2 (ja) * 2000-01-25 2009-12-24 大成建設株式会社 ドラフトチャンバ
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US556394A (en) * 1896-03-17 Curtain-cabinet
US4770680A (en) * 1986-05-19 1988-09-13 Fujitsu Limited Wafer carrier for a semiconductor device fabrication, having means for sending clean air stream to the wafers stored therein
US4815515A (en) * 1987-05-27 1989-03-28 Lee Song L Structure of window shade
US5467266A (en) * 1991-09-03 1995-11-14 Lutron Electronics Co., Inc. Motor-operated window cover
US5255970A (en) * 1992-05-26 1993-10-26 Theosabrata Yos S Storage cabinet
US5249616A (en) * 1992-09-30 1993-10-05 Chou Yen Double-layer window with shade roller unit for regulating the light
US5547009A (en) * 1993-09-29 1996-08-20 Etablissments Bubendorff (Societe Anonyme) Driving and tensioning device for a flexible protective member such as a strip, curtain or skirt
US5423422A (en) * 1994-03-14 1995-06-13 Empak, Inc. Flat panel display container
US6284020B1 (en) * 1997-12-02 2001-09-04 Kabushiki Kaisha Toshiba Method of maintaining cleanliness of substrates and box for accommodating substrates
US6276744B1 (en) * 2000-06-21 2001-08-21 Technical Products Group, Inc. Roll-type door opener
US6829130B2 (en) * 2000-11-15 2004-12-07 Ebara Corporation Power supply apparatus for supplying electric power to substrate carrier container
US6540467B1 (en) * 2001-06-18 2003-04-01 Lsi Logic Corporation Apparatus and method of semiconductor wafer protection
US6723151B2 (en) * 2001-09-27 2004-04-20 Ebara Corporation Gas removal method and gas removal filter
US6724476B1 (en) * 2002-10-01 2004-04-20 Advanced Micro Devices, Inc. Low defect metrology approach on clean track using integrated metrology
US7481260B2 (en) * 2004-01-09 2009-01-27 Hagen Holding Aps Tightening device for blinds
US7111895B2 (en) * 2004-12-02 2006-09-26 Patriot Lift Co., Llc Apparatus for pneumatic operation of transport container sliding door

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090016862A1 (en) * 2007-07-12 2009-01-15 Gould Richard H Method and apparatus for providing flat panel display environmental isolation
US20090072688A1 (en) * 2007-09-14 2009-03-19 National Taiwan University Of Science & Technology Receiving device
US20100236718A1 (en) * 2009-03-17 2010-09-23 Tokyo Electron Limited Substrate processing apparatus
US9330950B2 (en) * 2009-03-17 2016-05-03 Tokyo Electron Limited Substrate processing apparatus
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WO2008070876A2 (fr) 2008-06-12
TW200842089A (en) 2008-11-01
WO2008070876A9 (fr) 2008-08-21
KR20090086257A (ko) 2009-08-11
JP2010512292A (ja) 2010-04-22

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