US20080135099A1 - Solution-based fabrication of photovoltaic cell - Google Patents

Solution-based fabrication of photovoltaic cell Download PDF

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US20080135099A1
US20080135099A1 US11/933,407 US93340707A US2008135099A1 US 20080135099 A1 US20080135099 A1 US 20080135099A1 US 93340707 A US93340707 A US 93340707A US 2008135099 A1 US2008135099 A1 US 2008135099A1
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nanoparticles
ink
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oxide
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Dong Yu
Jacqueline Fidanza
Brian M. Sager
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    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
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    • C23C18/125Process of deposition of the inorganic material
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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125Process of deposition of the inorganic material
    • C23C18/1295Process of deposition of the inorganic material with after-treatment of the deposited inorganic material
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    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/032Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • H01L31/0322Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
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    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • H01L31/0749Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
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    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y5/00Nanobiotechnology or nanomedicine, e.g. protein engineering or drug delivery
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • This invention is related to photovoltaic cells and more particularly to fabrication of IB-IIIA-VIA active layers for such cells.
  • the resulting oxide mixture was then subject to reduction in H 2 /N 2 mixture and selenization in an H 2 Se/N 2 mixture at high temperatures between 400 to 500° C.
  • the resulting CIGS solar cells typically have efficiency in the range of 8 to 11%.
  • Another alternative ink-based approach used metallic powder paste to coat on substrates followed by selenization under H 2 Se/N 2 at high temperature to form a CIS (or CIGS cell) solar cell (Kapur, V. K., et. al. Sol. Energy Mater Sol.
  • FIG. 1 is a schematic diagram of a spay co-precipitation apparatus for fabrication of nanoparticles according to an embodiment of the present invention.
  • FIG. 2 is a schematic diagram of a photovoltaic cell according to an embodiment of the present invention.
  • “Elemental” refers to a material in substantially pure form as opposed to combined with other elements as in an alloy or in a chemical compound.
  • Non-oxide refers to a chemical moiety substantially devoid of oxygen.
  • Embodiments of the present invention provide several key features of a liquid ink that impact cell structure and function.
  • the liquid ink includes particles containing elements of groups IB, IIIA and (optionally) VIA, e.g., copper and indium (with or without gallium) and selenium or sulfur.
  • the particles may be between about 0.1 and about 500 nm.
  • the decreased particle size can significantly lower both the melting point and the sintering temperature required (see e.g., C R M Wronski, “ The Size Dependence of the Melting point of Small Particles of Tin ” in the British Journal of Applied Physics vol. 18 No. 12, (December 1967) pp 1731-1737, IOP Publishing, Bristol, UK; L. H.
  • the particle sizes in the ink are typically distributed over a relatively narrow range, e.g. with the majority of particles of a given type being within about 40% of an average particle size for that type.
  • the different types of particles may have different average sizes so that the particles in the ink all melt at about the same temperature.
  • CuInSe 2 powders generated, e.g., by a milling or nebulizing process to create powder precursors have typically contained a mixture of both small and large particles, resulting in a relatively broad size distribution.
  • the presence of such a broad size distribution results in poor film formation.
  • smaller particles tend to melt first while big particles remain unmelted.
  • particles of different sizes can non-uniformly distribute within a film. This heterogeneity leads to defects in film growth, decreases the uniformity and size of crystal grains, and negatively impacts the electronic properties (e.g., resistivity, bandgap, and carrier transport) of the CIGS layer upon incorporation into a photovoltaic device such as a solar cell.
  • an ink for forming an active layer for a photovoltaic cell can be fabricated by forming liquid containing nanoparticles (e.g., elemental metal nanoparticles, non-oxide quantum nanoparticles, or metallic nanoparticles) of about 0.1-nm to about 500-nm diameter containing elements from groups IB, IIIA and VIA.
  • a film of the ink can be spread onto a substrate, and annealed to form a layer of IB-IIIA-VIA material.
  • the nanoparticles may have a narrow size distribution characterized by an average nanoparticle size D.
  • the nanoparticles used to make up the film may have sizes within about 40% of D.
  • the particles in the liquid may include Cu with In or Ga and Se or S in a stoichiometric ratio of approximately CuIn 1-x Ga x (S, Se) 2 , where x is between 0 and 1.
  • Quantum nanoparticles are an important class of nanoparticles that can be used to make inks according to embodiments of the present invention.
  • the electronic and optical properties of metals and semiconductors can change dramatically as the particulates of the materials are reduced to approach the nanometer size range of dimensions. At such size levels, the physical dimensions of the material generally impact the electronic, optical, chemical, and/or physical behavior of the material.
  • the restriction of an electronic wave function to smaller and smaller regions of space within a particle of material (the resonance cavity) is referred to as “quantum confinement”.
  • Quantum dots when the confinement is in three dimensions
  • quantum wires or “quantum rods” when the confinement is in two dimensions
  • quantum wells when the confinement is in one dimension
  • Quantum nanoparticles generally form in a size regime where the average particle diameter is less than about 10 nm. This small size results in new quantum phenomena that can change dramatically relative to a corresponding bulk material in part because quantum effects arise from the confinement of electrons and “holes” in the material (a hole represents the absence of an electron; the hole behaves as though it were a positively charged particle).
  • the small particle size also changes other material properties, such as the electrical and nonlinear optical properties of a material, making them very different from those of the material's bulk form.
  • the optical bandgap of a quantum nanoparticle can often differ significantly from that of the material's bulk form.
  • the increased surface area to volume ratio of quantum nanoparticles renders them more reactive than the material's bulk form, often resulting for example in a dramatic melting point depression.
  • group IB, IIIA, and VIA elements other than Cu, In, Ga, Se, and S may be included in the description of the IB-IIIA-VIA alloys described herein, and that the use of a hyphen (“—” e.g., in Cu—Se or Cu—In—Se) does not indicate a compound, but rather indicates a coexisting mixture of the elements joined by the hyphen.
  • a hyphen e.g., in Cu—Se or Cu—In—Se
  • Group IB elements suitable for use in the method of this invention include copper (Cu), silver (Ag), and gold (Au).
  • the group IB element is copper (Cu).
  • Group IIIA elements suitable for use in the method of this invention include gallium (Ga), indium (In), aluminum (Al), and thallium (Tl).
  • the group IIIA element is gallium (Ga) or indium (In).
  • Group VIA elements of interest include selenium (Se), sulfur (S), and tellurium (Te), and preferably the group VIA element is either Se or S.
  • a nanoparticle-based CIGS ink has great utility for low cost web coating of ink-based photovoltaic cells.
  • Methods to make nanoparticles of the desired materials having the desired narrow particle size distribution include controlling the reaction conditions under which the nanoparticles are made or using size-selective precipitation and other techniques (such as ultrafiltration and membrane emulsification). Nanoparticles in different categories may be incorporated into CIGS inks.
  • these categories include but are not limited to: (1) Ternary nanoparticles such as CuInSe 2 or CuInG nanoparticles; (2) Binary nanoparticles such as CuSe and In 2 Se 3 nanoparticles; (3) Metallic nanoparticles such as Cu and In nanoparticles; (4) A suspension made using one or more liquid metals, such as Ga; (5) A liquid made using one or more organometallic precursors.
  • each of these approaches may be implemented without selenization of the particles, film or IB-IIIA-VIA layer using H 2 Se; (6) Metal halides dissolved in chelating agents; and (7) Metal salts. All of these techniques may be used to form a liquid ink.
  • the use of non-oxide or elemental metal particles avoids having to reduce the particles, film or IB-IIIA-VIA layer with H 2 .
  • ternary, non-oxide quantum nanoparticles for making a IB-IIIA-VIA ink may be fabricated by several different approaches.
  • Non-oxide quantum nanoparticles of CuInSe 2 may be fabricated according to a chemical reaction of the type:
  • IB refers to an element of group IB
  • IIIA refers to an element of group IIIA
  • VIA refers to an element of group VIA
  • Hal refers to a halogen, preferably iodine (I) or chlorine (Cl).
  • IB can be Cu
  • IIIA can be Ga or In
  • VIA can be Se or S.
  • the reaction may be of the form:
  • the size distribution of the particles may be adjusted by controlling the reaction conditions under which the nanoparticles are made.
  • Trioctylphosphine oxide (TOPO) (20 g) may be heated to about 100° C., followed by degassing and flushing with nitrogen.
  • An equimolar solution of InCl 3 (2.20 g, 0.01 mol) and CuCl (1.0 g, 0.01 mol) in Trioctylphosphine (TOP) (15 mL) is injected into the hot TOPO at 100° C.
  • TOP Trioctylphosphine
  • the reaction may proceed for about 30 min to one hour, after which the temperature is increased to 250° C., and then 1.0 M trioctylphospine selenide (TOPSe) (20 mL) is injected into the TOPO solution (a mixture of Se powder (1.66 g) and TOP (20 mL) is stirred at room temperature for 48 h to give a clear solution (1 M) of TOPSe. There may be an initial drop in temperature to 220° C., after which the reaction stabilizes at about 250° C. and proceeds for 24-36 h. The reaction mixture is then cooled to about 60° C., followed by the addition of excess methanol to flocculate the particles. There may be no immediate visible precipitation on the addition of methanol.
  • TOPSe trioctylphospine selenide
  • Nanoparticles in the desired size distribution may be obtained from the precipitate, e.g., by size-selective precipitation or ultrafiltration.
  • TOPO-capped CuInSe 2 nanoparticles may be mixed with water and an optional dispersant in an aqueous liquid to form a CIGS ink.
  • the ratio of nanoparticles to water in weight percentage may be between about 10% and about 60%, e.g. about 40%.
  • TOPO is a relatively large organic molecule, and since it can be difficult to completely remove large molecules like TOPO by simple thermal decomposition, so carbon contamination can be a potential issue in device fabrication.
  • a more preferred embodiment uses a smaller molecule with a lower boiling point, such as pyridine, as a coordinating ligand and solvent.
  • pyridine has been demonstrated to retard nanoparticle growth and narrow the size distribution in the case of CdSe nanoparticles.
  • pyridine loosely caps the nanoparticles and ripens the nanoparticles continuously. This same principle can be applied to CIGS nanoparticles, which may be fabricated according to a reaction of the type:
  • a capping agent can be broadly defined as a compound that binds to metal.
  • General classes of ligands/capping agents include, but are not limited to phosphines, amines, alcohols, thiols, ethers, water, and glycols.
  • the ligand/capping agent can be pyridine, trioctylphosphine oxide (TOPO), trioctylphosphine sulfide, trioctylphosphine selenide, trioctylphosphine (TOP), triphenylphosphine, pyridine, alcohols (methanol, ethanol, propanol, butanol), thiols, ethane thiol, tetrahydrofuran, ethers, ammonia, amines (methyl amine, ethylamine, ethanolamine, ethylenediamine, trioctyl amine), ethylenediaminetetraacetic acid (EDTA), glycols, amines, diketonates, carboxylic acids, and/or acetonitrile.
  • the ligand/capping agent is pyridine.
  • reaction may be of the type:
  • CuCl (or CuI or CuCl 2 ) and InCl 3 (or InI 3 ) with a Cu/In molar ratio ranging from 0.8 to 1.0 may be mixed in alcohol (methanol or ethanol).
  • concentrations for Cu and In ions may range from about 5 to 10 mM.
  • Na 2 Se may also be prepared in alcohol with a concentration double that of the Cu ions.
  • the two alcoholic solutions are then added into a round-bottom reaction flask with pyridine.
  • the precipitated nanoparticles are collected by filtration or centrifugation.
  • the nanoparticles are then washed with organic solvents and redissolved in pyridine.
  • the resulting CuInSe 2 nanoparticles are nanometer in size, with a narrow particle size distribution. Since pyridine is volatile, upon heating the coated film made from this nanoparticle ink has carbon-free nanocrystals, with minimal carbon contamination. Further sintering and annealing at lower temperature yields crystalline grains with uniform phases. (see e.g., B. A. Ridley et. al. Science, 1999, 286, 746).
  • ternary IB-IIIA-VIA nanoparticles may be prepared from single-source precursors.
  • CuInS 2 nanoparticles may be prepared using the precursor (PPh 3 ) 2 CuIn(SEt) 4 .
  • dioctyl phthalate (10 mL) may be heated to about 125° C. under vacuum for about 1 h to dry and degas the solvent. The flask may be back-filled with argon and cooled to room temperature prior to adding the precursor.
  • (PPh 3 ) 2 CuIn(SEt) 4 2.0 g, 2.0 mmol
  • the precursor dissolved to form a transparent yellow solution. Typically, no further change is observed with time at this temperature. At about 150° C., the precursor remains, for the most part, intact.
  • a red powder begins to precipitate within a few minutes.
  • a reaction time of about 2-3 hours may be employed to complete the precipitation and maximize the yield.
  • toluene 40 ml
  • the powder may be consecutively washed with toluene and then methanol to remove any reaction byproducts and unreacted starting material, and then dried under vacuum at about 60-80° C. The washing and centrifugation steps may be carried out in ambient atmosphere. Then the product may be collected and stored in a nitrogen-filled glovebox.
  • a portion of the product (100 mg) may be placed in a flask containing fresh dioctyl phthalate (10 mL), heated to higher temperatures, e.g. 250 to 300° C., and held at that temperature for about 1 hour. At a temperature of about 250° C., a brown/black powder (CuInS 2 ) is obtained. At about 300° C. the resulting powder is black and contains a CuInS 2 nanoparticulate. (See, e.g., S. L. Castro et. al. Chem. Mater. 2003, 15, 3142)
  • CuInSe 2 precursor Approximately the same procedure as outlined above may be followed for a CuInSe 2 precursor.
  • the precursor may be dissolved in the dioctyl phthalate at 138° C.
  • (PPh 3 ) 2 CuIn(SePh) 4 (1.951 g, 1.47 mmol) may be dissolved in about 10 mL of dioctyl phthalate.
  • a red powder (0.523 g) may be collected after about 2 hours of heating at 200 to 300° C. This power contained a CuInS(Se) 2 nanoparticulate.
  • the size distributions of the CuInS 2 or CuIn(Se) 2 nanoparticulates may be adjusted by size-selective precipitation, ultrafiltration and the like.
  • An alternative embodiment to reduce particle size and narrow the particle size distribution utilizes a spray co-precipitation technique.
  • ZnGa 2 O 4 nanocrystals with a mean particle size less than 10 nm have been made using spray co-precipitation.
  • compressed inert gas e.g., nitrogen from gas sources 102 , 103 drives reactants from reactant sources 104 , 106 very quickly through stainless steel pipelines 108 , 110 .
  • the flow rate can be adjusted by a flowmeter from about 5 to about 20 m/s.
  • one of the reactants may include one or more metal salts.
  • metal salts includes metal halides, metal acetates, metal sulfates, metal nitrates, metal alcholates, metal carbonates, metal phenolates and/or organometallics.
  • the reactants may include, a metal halide, such as CuHal/InHal (where Hal refers to I or Cl) and thiourea or selenourea.
  • the reactants mix and react at a T joint 112 of the two pipelines 108 , 110 and then spray into a beaker 114 with solvents (e.g., water or alcohols).
  • the molar ratio of Cu, In and thiourea or selenourea may be adjusted e.g., by controlling the flow of the reactants with valves 116 , 118 , 120 , 122 to form CuInS 2 nanocrystals 124 .
  • the size distributions of the nanocrystals 124 may be adjusted by size-selective precipitation, ultrafiltration and the like.
  • Some of the embodiments described above can be modified to produce binary non-oxide quantum nanoparticles, e.g., IB-VIA or IIIA-VIA or IB-VIA nanoparticles. These may be mixed together in the liquid to provide the desired ratios of IB, IIIA and VIA elements. By way of example there are several different approaches to producing CuSe and In 2 Se 3 .
  • quantum dots with nearly uniform size may be fabricated by solvothermal methods according to a reaction of the type:
  • IB, IIIA, VIA and TOPO have the meanings describe above.
  • IB may be Cu
  • VIA may be Se or S.
  • the quantum dots may be fabricated using a reaction of the type:
  • CuSe Quantum dots and rods of this type have been synthesized in the range of about 5 to about 15 nm using Solvothermal or solution reaction methods (see, e.g., M. A. Malik et. al. “A Novel Route for the Preparation of CuSe and CuInSe 2 Nanoparticles,” in Advanced Materials , Vol 11, No. 17, pp 1441-1444, 1999).
  • CuSe Quantum Dots may be fabricated as follows. Cu(Et 2 CNSe 2 ) 2 (0.5 to 2 g) may be dissolved in tri-n-octylphosphine TOP (10 to 30 mL).
  • This solution is then injected into hot tri-n-octylphosphine oxide TOPO (10 to 20 g) at 250° C. A decrease in temperature of 20-30° C. may be observed.
  • the solution is then allowed to stabilize at about 250° C. and is heated for about 60 min at this temperature.
  • the solution is then cooled to approximately 70° C., and after an excess of methanol was added, a flocculant precipitate forms.
  • the solid may be separated by centrifugation, washed with methanol, and redispersed in toluene.
  • the toluene may then be removed under a vacuum to give pale yellow TOPO-capped CuSe nanoparticles.
  • the particles may be washed three times with methanol and redissolved in toluene. Size-selective precipitation may then be carried out on the particles to obtain a collection of quantum dots of the desired average particle size and size distribution.
  • Pyridine-capped binary nanoparticles e.g., CuSe
  • IB may be Cu
  • Hal may be Cl or I
  • VIA may be Se or S.
  • the ligand/capping agent may be any ligand that is co-processable with the metal salts used.
  • the ligand/capping agent may be pyridine, trioctylphosphine oxide, trioctylphosphine, triphenylphosphine, pyridine, alcohols (methanol, ethanol, propanol, butanol), ethane thiol, tetrahydrofuran, ethers, ammonia, amines (methyl amine, ethylamine, ethylenediamine) and/or acetonitrile.
  • the reaction may be of the type:
  • In 2 Se 3 nanoparticles may be prepared according to a reaction of the type
  • ZnSe nanoparticles with a mean size of 3 nanometers have been prepared using a sonochemical method (see, e.g., J. Zhu et. al. Chem. Mater. 2000, 12, 73).
  • the same sonochemical method can be applied to forming CuSe or In 2 Se 3 or CuInSe 2 nanoparticles for a CIGS-based ink.
  • Cu(Ac) 2 (445 mg) and/or In(Ac) 3 (720 mg) and 240 mg of selenourea may be dissolved in 70 mL of doubly distilled water and sonicated for about 1 hour under an atmosphere of argon, at room temperature.
  • a round-bottom Pyrex glass vessel (total volume 70 mL) may be used for the ultrasound irradiation.
  • the temperature of the mixture rises gradually to about 80° C. during ultrasonic irradiation.
  • the solution may be centrifuged, and the precipitate washed with water and then with absolute ethanol.
  • the nanoparticles for the ink may be prepared from a mixture of metal nanoparticles and a vapor or powder containing either Se or S.
  • Metal nanoparticles have been prepared by a wide variety of techniques including but not limited to laser ablation, nucleation from vapor, exploding wires by electrical current surge, thermal decomposition of organometallic compounds, sonolysis, pulse radiolysis, electrochemical reduction and chemical reduction of the corresponding metal salts, and the like. Reduction of metal salts in the presence of a suitable protecting agent is a commonly used technique. Generally, a reductant, such as borohydride, hydrotriorganoborates, hydrogen or citrate, is added to a solution of the corresponding metal salt.
  • a reductant such as borohydride, hydrotriorganoborates, hydrogen or citrate
  • An easily oxidized solvent may function both as the electron donor and the dispersing medium.
  • Such particles are of particular interest for catalysis, as the metal surface is readily accessible. Alcohols and ethers have been quite extensively used for this purpose.
  • Metal nanoparticles have a tendency to agglomerate, and therefore, it is necessary to protect them using surfactants or polymers, such as cyclodextrin, PVP, PVA, citrate or quaternary ammonium salts.
  • the metal salt is reduced in micelles.
  • a wide variety of ultra-fine colloidal surfactant-micelle protected metal nanoparticles can be successfully synthesized in solution. The size distribution of the metal nanoparticles may be controlled, e.g., by size-selective precipitation, ultrafiltration and the like.
  • Such metal colloids can be prepared in an ink formulation. After being mixed with Se (or S) fine powders, the ink can be coated on substrate and then subject to heat treatment to drive a reaction of the type:
  • IB may be Cu
  • IIIA may be In and/or Ga
  • VIA may be Se or S.
  • the reaction between metal or metal alloy nanoparticles and Se (or S) powder forms CIGS (or CIS) film.
  • the ink may include a homogeneous mixture of metallic particles and powders of group VIA materials.
  • the individual metallic particles are generally uniformly distributed throughout a matrix of, e.g., Se or S powder.
  • Sub-micron-sized metallic particles may be formed by methods involving mechanical commination, e.g., milling, grinding, crushing and the desired size distribution obtained, e.g., by ultrafiltration or size-selective precipitation.
  • nanometer-scale particles may be prepared by a gas condensation method.
  • a metal in the gas condensation method, may be heated to a vapor. The vapor then collects and condenses into particles.
  • Such a technique may produce particles that are nominally spherical, approximately 30-40 nm in diameter and having a very tight size distribution (e.g., ⁇ 5 nm to ⁇ 10 nm). See also “Ultrafine Metal Particles”, C. G. Granqvist and R. A. Buhrman, J., Appl. Phys., 47, 2200, (1976).
  • the metal particles may be prepared by exploding fine metal wires with a surge of electrical current.
  • metal wires 7.5-25 microns in diameter may be exploded in a liquid such as water or alcohol by applying an increasing DC voltage across the wire until it explodes, e.g., at a few tens of volts. The resulting particles remain suspended in the liquid. Copper wires exploded in this fashion can produce particles about 30 to 70 nm in diameter.
  • the metal nanoparticles and group VIA powder may be mixed together with an optional binder to form a green microstructure.
  • the binder serves to hold the metallic particles together, provides lubrication while the particles are mixed, and then or vaporizes completely during the sintering process leaving no trace of the binder in the final metallic product.
  • the binder combusts or vaporizes completely during the sintering process leaving no trace of the binder in the final CI(G)S active layer.
  • Binders useful in conjunction with such embodiments of the invention include, but are not limited to, wax- or oil-based binders such as Acrawax® C® (Glyco), Advawax® 240, 275, 280, 290 (Carstab), Eramid® (Hexcel), Glucolube® VL (Glyco), Hostalub® FA 1 (Amer.
  • wax- or oil-based binders such as Acrawax® C® (Glyco), Advawax® 240, 275, 280, 290 (Carstab), Eramid® (Hexcel), Glucolube® VL (Glyco), Hostalub® FA 1 (Amer.
  • the metal particles may be formed into a paste mixture comprising the elemental metal particles along with a resin, solvent, wetting agent, and flow control agent.
  • pastes can be made by combining elemental metals or other metallic particles with a polymer.
  • a nanopowder of metal particles may be added to polymer matrix materials.
  • suitable polymer matrix materials include poly(methyl methacrylate) (PMMA), poly(vinyl alcohol) (PVA), polycarbonates, polyalkenes, and polyaryls.
  • dispersants, binders, detergents, modifiers, or additives may be included along with the matrix material.
  • modifiers or additives include plastisols, thickeners, or thinners to change the viscosity or change or improve the smoothness of the ink film surface.
  • Additional modifiers or additives include, e.g., acids or bases to change pH of the ink or additives that lower the flash temperature of the ink and retarders or reducers to change the drying time of the ink.
  • Potential sources of such modifiers and additives include Wilflex, Rutland Inks of Pineville, N.C., Chemical Consultants, Inc. of Corona, Calif., Union Inks of Singapore.
  • the molding composition may additionally comprise a fluxing agent.
  • the fluxing agent serves to substantially halt formation of the oxide layer, thereby enhancing the ability of the molding composition to form the green microstructure and aiding in the final sintering process.
  • Examples of common fluxing agents in general use include abietic acid, stearic acid, hydrochloric acid, amine hydrochlorides and amine resins. Either a suitable commercial flux formulation or a specially formulated fluxing agent may be utilized.
  • the nanoparticles can be formed in an atmosphere that lacks oxygen, e.g. a nitrogen-filled glovebox.
  • the liquid ink may be made using one or more liquid metals.
  • an ink may be made starting with a molten mixture of Gallium and/or Indium (commercially available, e.g., from Alfa Aesar of Ward Hill, Mass.). Copper nanoparticles may then be added to the mixture, which may then be used as the ink/paste. Copper nanoparticles are available commercially, e.g., from Materials Modification Inc., of Fairfax, Va.
  • the temperature of the Cu—Ga—In mixture may be adjusted (e.g. cooled) until a solid forms. The solid may be ground at that temperature until small nanoparticles (e.g., less than 5 nm) are present.
  • Selenium may be added to the ink and/or a film formed from the ink by exposure to selenium vapor, e.g., before, during, or after annealing.
  • the liquid ink may be made using one or more organometallic precursors of IB, IIIA and VIA elements.
  • copper precursors include Copper II hexafluoropentanedionate (Gelest SKU#AKC253); Copper II methoxide (Gelest SKU#AKC254); Copper II ethoxide (Gelest SKU#AKC250); and Copper II ethylacetoacetate (Gelest SKU#AKC252), all of which are available from Gelest, Inc. of Morrisville, Pa.
  • indium precursors examples include Indium 2,4-Pentanedionate (Gelest SKU#AKJ370), also called indium acetylacetonate; Indium Methoxyethoxide (Gelest SKU#AKJ365); and Indium methyl(trimethyl)acetylacetate (Gelest SKU#AKJ373), also all available from Gelest.
  • Examples of Gallium precursors Gallium III 2,4-Pentanedionate (Gelest SKU#AKG310); and Gallium III Ethoxide (Gelest SKU#AKG320), also available from Gelest.
  • the precursors may be mixed as liquids to form the ink.
  • the organic components may be burned out of the ink by heating at about 500° C., e.g., after a film of the ink is disposed on a substrate.
  • a sol-gel may be formed from organometallics of e.g., Cu, In, and/or Ga.
  • the sol-gel processing involves the transition of a system from a liquid “sol” (mostly colloidal) into a solid “gel” phase.
  • the starting materials used in the preparation of the “sol” are usually inorganic metal salts or metal organic compounds such as metal alkoxides along with water, alcohol and, optionally, a small amount of acid.
  • the ink may be fabricated by making a pseudo sol out of mixed metal organic precursors, such as alkoxides or diketonates of Copper, indium, gallium in the desired stoichiometric ratio.
  • mixed metal organic precursors such as alkoxides or diketonates of Copper, indium, gallium in the desired stoichiometric ratio.
  • copper(II) ethoxide or Copper(II) ethylacetoacetate may be mixed with gallium (III) ethoxide or gallium (III) pentanedionate and with indium (III) methoxyethoxide or indium(III) 2,4 pentanedionate.
  • a sol may be formed by adding water, an alcohol and, optionally, an acid, to the mixed metal organic precursors.
  • the sol may be coated in a dish (e.g.
  • the powder can then be milled and mixed with dispersant and then coated, and the resultant film can then be reduced by treatment with H 2 and/or N 2 at 400° C., after which 10-50 mbar Se vapor can be introduced to selenize the film.
  • the powder compounds can be first reduced to metals through exposure to H 2 gas, then mechanically milled and/or ground up mixed with dispersant and then coated.
  • a metal halide (MCl or MI, where M is a metal) could be dissolved in any of a number of chelating agents, then (optionally) mixed in water to keep the metals in solution.
  • the solution mixture can then serve as a basis for a precursor paste or ink.
  • Suitable metal halides include chlorides and iodides of the group IB, IIIA and VIA metals.
  • Suitable chelating agents include, but are not limited to, e.g. amines, diamines such as ethylene diamine, polyamines, polyethylene glycol, low molecular weight alcohols, ketones, diketones, carboxylic acids, and mixtures thereof.
  • Metal salts and other metal compounds can also be used as reagents to synthesize metal nanoparticles.
  • suitable metal salts and other metal compounds include but are not limited to metal halogenides, metal nitrates, metal nitrites, metal nitrides, metal sulfates, metal sulfites, metal sulfides, metal alcoholates, metal phosphates, metal phenolates, metal carbonates, metal carboxylates, and blends or mixtures of these salts.
  • metal salts can be synthesized or purchased (e.g., through Sigma-Aldrich of St. Louis, Mo.), formed or purified as nanoparticulates, then each of the nanoparticulates can be intermixed in the proper ration to serve as the basis for an ink for effective CIGS absorber layer function.
  • the nanoparticles are generally mixed with an organic or inorganic solvent to form the ink.
  • the nanoparticles may be mixed with water to form an aqueous suspension that serves as the basis of the ink.
  • Schulz by contrast teaches non-aqueous colloidal suspensions and stresses that every effort should be made to avoid introducing even incidental amounts of water into his colloidal suspensions in order to avoid agglomeration of particles.
  • aqueous suspensions have several advantages over non-aqueous suspensions during ink formation and deposition. First, water is an inexpensive solvent, and it is much easier to scale to high-volume production processes.
  • suitable dispersants include TamolTM and DuramaxTM from Rohm and Haas of Philadelphia, Pa. Further information on TamolTM may be found at http://www.rohmhaas.com/coatings/dispersants.html. Further information about DuramaxTM may be found at http://www.rhcis.com/markets_and products/electronic.html.
  • aqueous suspension refers to the ink at the end of its manufacture.
  • the use of the term “aqueous” does not exclude the possibility that during manufacture, the particles may be dispersed in an organic solvent or some solvent other than water.
  • the particles may be initially made in alcohol or another organic solvent then later precipitated or isolated for resuspension in water to form the ink.
  • the particles may be so small that they form liquids, e.g., the particles may be as small as individual atoms or molecules.
  • the liquid ink may be spread in a thin film over a substrate using solution based coating techniques such as web coating, spray coating, spin coating, doctor blade coating, printing techniques including contact printing, gravure printing, microgravure printing, ink-jet printing, jet deposition, and the like.
  • solution based coating techniques such as web coating, spray coating, spin coating, doctor blade coating, printing techniques including contact printing, gravure printing, microgravure printing, ink-jet printing, jet deposition, and the like.
  • Such a film can be deposited on a flexible substrate, in a roll-to-roll manner using a commercially available web coating system.
  • the film may then be heated to remove the solvent and to sinter the nanoparticles together to form a layer of a IB-IIIA-VIA alloy.
  • the alloy may have the general formula CuIn 1-x Ga x (S, Se) 2 , where x is between 0 and 1.
  • the reduced temperature sintering (e.g., from about 200° C. to about 600° C.) made possible by the small particle size and narrow size distribution facilitates forming CIGS films in a high volume roll-to-roll production environment on thin flexible substrates such as metal foils or metallized plastic films.
  • the film can be wound into a coil and the coil can be heated such that the entire roll is heated at the same time, substantially increasing the scaleability of the heating process through such a high-volume batch process.
  • Some high-volume batch processes for coating the substrate with the ink could potentially coat both sides of a coiled substrate at one time.
  • CBD chemical bath deposition
  • ALD atomic layer deposition
  • two substrates may be attached together “back-to-back” to form a dual substrate having, in effect, two front sides.
  • the dual substrate may then be wound into a coil and coated such that both front surfaces get coated while the back surfaces do not.
  • the substrates are attached in a manner that allows them to be separated from each other after processing.
  • the substrates may be attached with a low-strength adhesive or electrostatic film applied to the back side of one or both substrates.
  • an edge where the two substrates join may be sealed, e.g., with a tape, so that reactants cannot reach the back sides during processing. Processing the substrate in this fashion wastes less of the ink and may increase the area of the substrate that can be coated at one time.
  • the IB-IIIA-VIA alloy layer can be used in the active layer of photovoltaic cell, e.g., of the type shown in FIG. 2 .
  • the solar cell 200 generally includes a substrate or base layer 202 , a base electrode 204 , a IB-IIIA-VIA layer 206 , a window layer 208 , and a transparent electrode 210 .
  • the base layer 202 may be made from a thin flexible material suitable for roll-to-roll processing.
  • the base layer may be made of a metal foil, such as titanium, a polymer such as polyimide or a metallized plastic.
  • the base electrode 204 is made of an electrically conducive material.
  • the base electrode 204 may be a layer of stainless steel or molybdenum, e.g., about 0.5 micron to about 1 micron thick.
  • the IB-IIIA-VIA layer 206 may include material of the general formula CuIn 1-x Ga(S or Se) 2 .
  • the IB-IIIA-VIA layer 206 may be fabricated by depositing a film of a nanoparticle-based ink, paste or slurry, e.g., roughly 4 to 5 microns thick when wet on the base electrode 204 .
  • the film may be annealed by heating to a temperature sufficient to burn off any binders or cap layers on the particles and sinter the particles together.
  • the IB-IIIA-VIA 206 layer may be about 1 micron to about 2 microns thick after annealing.
  • the ink, paste or slurry may be annealed at a temperature compatible with the underlying substrate 202 and electrode 204 .
  • An optional adhesion layer 203 may facilitate bonding of the electrode 204 to the substrate 202 .
  • the film may optionally be exposed to selenium vapor at about 300-500° C. for about 30-45 minutes to ensure the proper stochiometry of Se in the film.
  • the film if deposited on a flexible substrate, can be wound into a coil and the coil can be coated so that the entire roll is exposed at the same time, substantially increasing the scaleability of the Se vapor exposure process through such a high-volume batch process, e.g., as described above.
  • the window layer 208 is typically used to smooth out the “slope” between the bandgaps of the different materials making up the IB-IIIA-VIA layer 206 .
  • the bandgap adjustment layer may include cadmium sulfide (CdS), zinc sulfide (ZnS), or zinc selenide (ZnSe) or some combination of two or more of these. Layers of these materials may be deposited, e.g., by chemical bath deposition, to a thickness of about 50 nm to about 100 nm.
  • the transparent electrode 210 may include a transparent conductive oxide layer 209 , e.g., zinc oxide (ZnO) or aluminum doped zinc oxide (ZnO:Al), which can be deposited using any of a variety of means including but not limited to sputtering, evaporation, CBD, electroplating, CVD, PVD, ALD, and the like. If the substrate is flexible and the deposition technique is ALD or CBD or the like, a coiled/wound flexible substrate can be exposed so that the entire roll is processed at one time, e.g., as described above.
  • the transparent electrode 210 may further include a layer of metal (e.g., Ni, Al or Ag) fingers 211 to reduce the overall sheet resistance.
  • An optional encapsulant layer (not shown) provides environmental resistance, e.g., protection against exposure to water or air.
  • the encapsulant may also absorb UV-light to protect the underlying layers.
  • suitable encapsulant materials include one or more layers of polymers, such as polyethylene terephthalate (PET), ethylene vinyl acetate (EVA), and/or Mylar®.
  • PET polyethylene terephthalate
  • EVA ethylene vinyl acetate
  • Mylar is a registered trademark of E. I. du Pont de Nemours and Company of Wilmington, Del.
  • Inorganic materials, such as glass and plastic foils, metalized plastic foils, and metal foils may also be used for the encapsulant layer.
  • the encapsulant layer may also include nitrides, oxides, oxynitrides or other inorganic materials.
  • the encapsulants may include Tefzel® (DuPont), tefdel, thermoplastics, polyimides, polyamides, nanolaminate composites of plastics and glasses (e.g. barrier films), and combinations of the above.
  • Tefzel® DuPont
  • tefdel thermoplastics
  • polyimides polyimides
  • polyamides polyamides
  • nanolaminate composites of plastics and glasses e.g. barrier films
  • Embodiments of the present invention provide for low-cost, high-volume production of large area photovoltaic devices without having to undergo selenization with hazardous H 2 Se or reduction of oxides in H 2 . Furthermore, embodiments of the present invention are compatible with roll-to-roll manufacturing of photovoltaic cells and modules that can be readily scaled up to high production volumes.

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Abstract

An ink for forming CIGS photovoltaic cell active layers is disclosed along with methods for making the ink, methods for making the active layers and a solar cell made with the active layer. The ink contains a mixture of nanoparticles of elements of groups IB, IIIA and (optionally) VIA. The particles are in a desired particle size range of between about 1 nm and about 500 nm in diameter, where a majority of the mass of the particles comprises particles ranging in size from no more than about 40% above or below an average particle size or, if the average particle size is less than about 5 nanometers, from no more than about 2 nanometers above or below the average particle size. The use of such ink avoids the need to expose the material to an H2Se gas during the construction of a photovoltaic cell and allows more uniform melting during film annealing, more uniform intermixing of nanoparticles, and allows higher quality absorber films to be formed.

Description

    CROSS-REFERENCE TO RELATED APPLICATION
  • This application is a continuation of U.S. patent application Ser. No. 10/782,017 filed Feb. 19, 2004. This application is also related to commonly-assigned co-pending application Ser. No. 10/782,545, titled “HIGH THROUGHPUT SURFACE TREATMENT ON COILED FLEXIBLE SUBSTRATES” (Attorney Docket No. NSL-025) filed Feb. 19, 2004. Both applications are fully incorporated herein by reference for all purposes.
  • FIELD OF THE INVENTION
  • This invention is related to photovoltaic cells and more particularly to fabrication of IB-IIIA-VIA active layers for such cells.
  • BACKGROUND OF THE INVENTION
  • Low-cost production of solar cells on flexible substrates using printing or web coating technologies is promising highly cost-efficient alternative to traditional silicon-based solar cells. Recently, solution-based solar cells fabricated from alloys of copper (Cu) and indium (In) with selenium (Se) or sulfur (S) have been developed. Such CIGS solar cells have been fabricated using a non-vacuum process in which a water-based precursor ink is formulated containing mixed oxides of Cu, In and Ga, which is then coated on rigid or flexible substrates (see U.S. Pat. No. 6,127,202, issued October 2000 to Kapur et. al., and U.S. Pat. No. 6,268,014 issued July 2001 to Eberspacher and Pauls). The resulting oxide mixture was then subject to reduction in H2/N2 mixture and selenization in an H2Se/N2 mixture at high temperatures between 400 to 500° C. The resulting CIGS solar cells typically have efficiency in the range of 8 to 11%. Another alternative ink-based approach used metallic powder paste to coat on substrates followed by selenization under H2Se/N2 at high temperature to form a CIS (or CIGS cell) solar cell (Kapur, V. K., et. al. Sol. Energy Mater Sol. Cells, 60 (2000) 127-134 and Kapur et al, Thin Solid Films, 431-432 (2003) 53-57 and also Kaelin, M., Meyer, T., Kurdesau, F., Rudmann, D., Zogg. H. and A. N. Tiawri. Low Cost Cu(m, Ga)Se2 Absorber Layers from Selenization of Precursor Materials, 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003). Unfortunately, the high temperature reduction and selenization steps used in each of these solar cell fabrication processes are neither cost effective nor easily scaled to high-volume production. Specifically, the H2Se gas used is both highly toxic and flammable. Thus, when H2Se is used at high temperatures, safety, environmental impact, and overall cost are serious concerns in the manufacturing process. Furthermore, the high temperature reduction and selenization steps make it impractical to make CIGS solar cells on inexpensive polymer or metallized polymer substrates that would warp, melt, or otherwise degrade at such high temperatures in the presence of reducing and/or oxidizing agents.
  • Although it is possible to make CIGS-based inks without using oxides, such inks have been produced in the prior art have several drawbacks for high-volume, roll-to-roll processing. For instance, the use of bulk CuInSe2 as a starting material is challenging as bulk CuInSe2 has a melting point around 1000° C. However, since most of the flexible substrates such as Al foils and plastic foils cannot withstand such a high temperature, it is not possible to melt bulk material directly onto a substrate. Even glass will have serious warping problems at this temperature and substrate warping typically leads to inefficient cell performance—so even with deposition onto glass, it is very difficult to create high-performance solar cells by melting bulk material. Moreover, the energy requirements needed for high temperature manufacturing at 1000° C. will incur substantial cost. Consequently, processes occurring at much lower temperatures are preferred. However, annealing at a lower temperature tends to hinder the manner of crystal grain growth that is critical for the proper electronic properties of CIGS solar cell. Certain fluxing agents have been used to reduce the melting point and sintering temperature for CuInSe2 (A. Vervaet et al. in 9th European Communities PV Solar Energy Conference, 1989, 480). Unfortunately, such fluxing agents can introduce unwanted crystalline phases and alter the electronic properties of CIGS, thus lowering the efficiency of a CIGS solar cell.
  • Thus, there is a need in the art, for a non-oxide based precursor ink that overcomes the above disadvantages.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • The teachings of the present invention can be readily understood by considering the following detailed description in conjunction with the accompanying drawings, in which:
  • FIG. 1 is a schematic diagram of a spay co-precipitation apparatus for fabrication of nanoparticles according to an embodiment of the present invention.
  • FIG. 2 is a schematic diagram of a photovoltaic cell according to an embodiment of the present invention.
  • DESCRIPTION OF THE SPECIFIC EMBODIMENTS
  • Although the following detailed description contains many specific details for the purposes of illustration, anyone of ordinary skill in the art will appreciate that many variations and alterations to the following details are within the scope of the invention. Accordingly, the exemplary embodiments of the invention described below are set forth without any loss of generality to, and without imposing limitations upon, the claimed invention.
  • As used herein, the following terms have the following meanings:
  • “Elemental” refers to a material in substantially pure form as opposed to combined with other elements as in an alloy or in a chemical compound.
  • “Non-oxide” refers to a chemical moiety substantially devoid of oxygen.
  • Embodiments of the present invention provide several key features of a liquid ink that impact cell structure and function. The liquid ink includes particles containing elements of groups IB, IIIA and (optionally) VIA, e.g., copper and indium (with or without gallium) and selenium or sulfur. The particles may be between about 0.1 and about 500 nm. The decreased particle size can significantly lower both the melting point and the sintering temperature required (see e.g., C R M Wronski, “The Size Dependence of the Melting point of Small Particles of Tin” in the British Journal of Applied Physics vol. 18 No. 12, (December 1967) pp 1731-1737, IOP Publishing, Bristol, UK; L. H. Allen, “Nanocalorimetry Studies of Materials: Melting Point Depression and Magic Nanostructures” NNUN Abstracts 2002/Materials, Physics, Processes & Characterization, pp 40; Zhang et al., 2000. “Size-dependent melting point depression of nanostructures: Nanocalorimetric measurements.” Phys. Rev. B 62 (15): 548-557; Lisecki et al. 2000. “Annealing Process of Anisotropic Copper Nanocrystals.” 2. Rods. Langmuir 16: 8807-8808). Generally, reduction in the melting point is inversely proportional to the particle radius, i.e., the smaller the nanoparticles, the lower the melting point. Smaller particles also tend to pack closer together and make better contact with each other. Reduction in size from bulk material to particles in about the 500 nm regime can already show significant differences in melting point and other altered physical and chemical properties. With much smaller particle sizes, e.g. in the nanometer size range, the surface area of particles will increase and nanoparticles will be in intimate contact with each other. In addition, in the nanometer size range, the reactivity of the particles and interaction between nanoparticles will be enhanced. This will help particles fuse together much easier thus enhancing the cohesion of the resulting CIGS layer (W. H. Qi, et al. in “China—EU Forum on Nanosized Technology” Beijing, P. R. China. December 2002. pp 86-92). This promotes coalescence between neighboring particles during sintering.
  • The particle sizes in the ink are typically distributed over a relatively narrow range, e.g. with the majority of particles of a given type being within about 40% of an average particle size for that type. Note that for an ink containing particles of different chemical types, e.g., different elemental metals, or different binary combinations, the different types of particles may have different average sizes so that the particles in the ink all melt at about the same temperature. By appropriately adjusting the particle size distribution amongst the particles of different materials in the mixture, it is possible for all the particles to melt at about the same temperature during sintering and yield more uniform crystalline phases. This enhances the electronic properties of the crystals in the resulting CIGS film. By contrast, in the prior art, CuInSe2 powders generated, e.g., by a milling or nebulizing process to create powder precursors have typically contained a mixture of both small and large particles, resulting in a relatively broad size distribution. The presence of such a broad size distribution results in poor film formation. In particular, smaller particles tend to melt first while big particles remain unmelted. Further, particles of different sizes can non-uniformly distribute within a film. This heterogeneity leads to defects in film growth, decreases the uniformity and size of crystal grains, and negatively impacts the electronic properties (e.g., resistivity, bandgap, and carrier transport) of the CIGS layer upon incorporation into a photovoltaic device such as a solar cell. Although the prior art has addressed the advantages of a smaller average particle size in IB-IIIA-VI nanoparticle inks (see e.g., U.S. Pat. No. 6,126,740 to Schulz), the resulting active layers made by annealing such inks have often been of relatively poor quality. The inventors have recognized that the problem is not just the particle size but also the particle size distribution, an issue that Schultz does not address.
  • Therefore, according to embodiments of the present invention, an ink for forming an active layer for a photovoltaic cell can be fabricated by forming liquid containing nanoparticles (e.g., elemental metal nanoparticles, non-oxide quantum nanoparticles, or metallic nanoparticles) of about 0.1-nm to about 500-nm diameter containing elements from groups IB, IIIA and VIA. A film of the ink can be spread onto a substrate, and annealed to form a layer of IB-IIIA-VIA material. The nanoparticles may have a narrow size distribution characterized by an average nanoparticle size D. For example, the nanoparticles used to make up the film may have sizes within about 40% of D. If the average particle size is less than about 5 nm, then the variation can be bigger, e.g., between about 1 nm and about 2 nm. In this case, the resulting range of melting points is still sufficiently small to be considered to have a narrow particle size distribution. By way of example, the particles in the liquid may include Cu with In or Ga and Se or S in a stoichiometric ratio of approximately CuIn1-xGax(S, Se)2, where x is between 0 and 1.
  • Quantum nanoparticles are an important class of nanoparticles that can be used to make inks according to embodiments of the present invention. The electronic and optical properties of metals and semiconductors can change dramatically as the particulates of the materials are reduced to approach the nanometer size range of dimensions. At such size levels, the physical dimensions of the material generally impact the electronic, optical, chemical, and/or physical behavior of the material. The restriction of an electronic wave function to smaller and smaller regions of space within a particle of material (the resonance cavity) is referred to as “quantum confinement”. Metal or semiconductor structures in the nanometer size range, exhibiting the characteristics of quantum confinement, are commonly referred to as “quantum dots” when the confinement is in three dimensions, “quantum wires” or “quantum rods” when the confinement is in two dimensions, and “quantum wells” when the confinement is in one dimension.
  • Quantum nanoparticles generally form in a size regime where the average particle diameter is less than about 10 nm. This small size results in new quantum phenomena that can change dramatically relative to a corresponding bulk material in part because quantum effects arise from the confinement of electrons and “holes” in the material (a hole represents the absence of an electron; the hole behaves as though it were a positively charged particle). The small particle size also changes other material properties, such as the electrical and nonlinear optical properties of a material, making them very different from those of the material's bulk form. For example, the optical bandgap of a quantum nanoparticle can often differ significantly from that of the material's bulk form. Further, the increased surface area to volume ratio of quantum nanoparticles renders them more reactive than the material's bulk form, often resulting for example in a dramatic melting point depression.
  • It should also be understood that group IB, IIIA, and VIA elements other than Cu, In, Ga, Se, and S may be included in the description of the IB-IIIA-VIA alloys described herein, and that the use of a hyphen (“—” e.g., in Cu—Se or Cu—In—Se) does not indicate a compound, but rather indicates a coexisting mixture of the elements joined by the hyphen. Where several elements can be combined with or substituted for each other, such as In and Ga, or Se, and S, in embodiments of the present invention, it is not uncommon in this art to include in a set of parentheses those elements that can be combined or interchanged, such as (m, Ga) or (Se, S). The descriptions in this specification sometimes use this convenience. Finally, also for convenience, the elements are discussed with their commonly accepted chemical symbols. Group IB elements suitable for use in the method of this invention include copper (Cu), silver (Ag), and gold (Au). Preferably the group IB element is copper (Cu). Group IIIA elements suitable for use in the method of this invention include gallium (Ga), indium (In), aluminum (Al), and thallium (Tl). Preferably the group IIIA element is gallium (Ga) or indium (In). Group VIA elements of interest include selenium (Se), sulfur (S), and tellurium (Te), and preferably the group VIA element is either Se or S.
  • A nanoparticle-based CIGS ink has great utility for low cost web coating of ink-based photovoltaic cells. Methods to make nanoparticles of the desired materials having the desired narrow particle size distribution include controlling the reaction conditions under which the nanoparticles are made or using size-selective precipitation and other techniques (such as ultrafiltration and membrane emulsification). Nanoparticles in different categories may be incorporated into CIGS inks. These categories include but are not limited to: (1) Ternary nanoparticles such as CuInSe2 or CuInG nanoparticles; (2) Binary nanoparticles such as CuSe and In2Se3 nanoparticles; (3) Metallic nanoparticles such as Cu and In nanoparticles; (4) A suspension made using one or more liquid metals, such as Ga; (5) A liquid made using one or more organometallic precursors. Significantly, each of these approaches may be implemented without selenization of the particles, film or IB-IIIA-VIA layer using H2Se; (6) Metal halides dissolved in chelating agents; and (7) Metal salts. All of these techniques may be used to form a liquid ink. In addition, the use of non-oxide or elemental metal particles avoids having to reduce the particles, film or IB-IIIA-VIA layer with H2.
  • The following examples illustrate several different ways, among others for creating nanoparticles with a narrow size distribution in the desired size range.
  • 1. Ternary IB-IIIA-VIA Non-Oxide Quantum Nanoparticles (e.g., Cu(m, Ga)Se(S)2)
  • According to one set of embodiments of the present invention, ternary, non-oxide quantum nanoparticles (e.g., quantum dots or quantum rods) for making a IB-IIIA-VIA ink may be fabricated by several different approaches.
  • 1.1 Preparation of Organic Capped CuInSe2 Non-Oxide Ouantum Nanoparticles
  • Non-oxide quantum nanoparticles of CuInSe2 may be fabricated according to a chemical reaction of the type:

  • (IB)(Hal)+(IIIA)(Hal)+TOP(VIA)+TOPO→IB-IIIA-VIA,
  • where IB refers to an element of group IB, IIIA refers to an element of group IIIA, VIA refers to an element of group VIA and Hal refers to a halogen, preferably iodine (I) or chlorine (Cl). By way of example, IB can be Cu, IIIA can be Ga or In and VIA can be Se or S. In a particular example, among others, the reaction may be of the form:

  • CuCl+InCl3+TOPSe+TOPO→CuInSe2
  • The size distribution of the particles may be adjusted by controlling the reaction conditions under which the nanoparticles are made. By way of example, Trioctylphosphine oxide (TOPO) (20 g) may be heated to about 100° C., followed by degassing and flushing with nitrogen. An equimolar solution of InCl3 (2.20 g, 0.01 mol) and CuCl (1.0 g, 0.01 mol) in Trioctylphosphine (TOP) (15 mL) is injected into the hot TOPO at 100° C. The colorless TOPO turned bright yellow after injection, and the temperature drops to 80° C. The reaction may proceed for about 30 min to one hour, after which the temperature is increased to 250° C., and then 1.0 M trioctylphospine selenide (TOPSe) (20 mL) is injected into the TOPO solution (a mixture of Se powder (1.66 g) and TOP (20 mL) is stirred at room temperature for 48 h to give a clear solution (1 M) of TOPSe. There may be an initial drop in temperature to 220° C., after which the reaction stabilizes at about 250° C. and proceeds for 24-36 h. The reaction mixture is then cooled to about 60° C., followed by the addition of excess methanol to flocculate the particles. There may be no immediate visible precipitation on the addition of methanol. A fine precipitate typically appears after stirring overnight. The precipitate may be separated by centrifugation and washed with methanol to remove the excess TOPO and then dissolved in toluene. (See e.g., M. A. Malik et. al. Adv. Mater. 1999, 11(17), 1441). Nanoparticles in the desired size distribution may be obtained from the precipitate, e.g., by size-selective precipitation or ultrafiltration. TOPO-capped CuInSe2 nanoparticles may be mixed with water and an optional dispersant in an aqueous liquid to form a CIGS ink. The ratio of nanoparticles to water in weight percentage may be between about 10% and about 60%, e.g. about 40%. After coating a substrate with a film of the ink, the TOPO may be decomposed when heated at elevated temperature. At the same time, CuInSe2 nanoparticles sinter together to form a polycrystalline film.
  • 1.2 Preparation of CuInSe2 Non-Oxide Quantum Nanoparticles with a Volatile Capping Agent
  • TOPO is a relatively large organic molecule, and since it can be difficult to completely remove large molecules like TOPO by simple thermal decomposition, so carbon contamination can be a potential issue in device fabrication. To overcome this disadvantage, a more preferred embodiment uses a smaller molecule with a lower boiling point, such as pyridine, as a coordinating ligand and solvent. In prior art, pyridine has been demonstrated to retard nanoparticle growth and narrow the size distribution in the case of CdSe nanoparticles. In that prior art, pyridine loosely caps the nanoparticles and ripens the nanoparticles continuously. This same principle can be applied to CIGS nanoparticles, which may be fabricated according to a reaction of the type:

  • (IB)(Hal)+(IIIA)(Hal)+Na2(VIA)+Ligand/Capping Agent→IB-IIIA-VIA,
  • where IB, IIIA, VIA and Hal have the meanings described above. As used herein, a capping agent can be broadly defined as a compound that binds to metal. General classes of ligands/capping agents include, but are not limited to phosphines, amines, alcohols, thiols, ethers, water, and glycols. By way of example, the ligand/capping agent can be pyridine, trioctylphosphine oxide (TOPO), trioctylphosphine sulfide, trioctylphosphine selenide, trioctylphosphine (TOP), triphenylphosphine, pyridine, alcohols (methanol, ethanol, propanol, butanol), thiols, ethane thiol, tetrahydrofuran, ethers, ammonia, amines (methyl amine, ethylamine, ethanolamine, ethylenediamine, trioctyl amine), ethylenediaminetetraacetic acid (EDTA), glycols, amines, diketonates, carboxylic acids, and/or acetonitrile. In a preferred embodiment, the ligand/capping agent is pyridine.
  • By way of example, the reaction may be of the type:

  • CuCl(or CuI or CuCl2)+InCl3(or InI3)+Na2Se+Pyridine→CuInSe2.
  • By way of example, and without limitation, CuCl (or CuI or CuCl2) and InCl3 (or InI3) with a Cu/In molar ratio ranging from 0.8 to 1.0 may be mixed in alcohol (methanol or ethanol). The concentrations for Cu and In ions may range from about 5 to 10 mM. Na2Se may also be prepared in alcohol with a concentration double that of the Cu ions. The two alcoholic solutions are then added into a round-bottom reaction flask with pyridine. The precipitated nanoparticles are collected by filtration or centrifugation. The nanoparticles are then washed with organic solvents and redissolved in pyridine. The resulting CuInSe2 nanoparticles are nanometer in size, with a narrow particle size distribution. Since pyridine is volatile, upon heating the coated film made from this nanoparticle ink has carbon-free nanocrystals, with minimal carbon contamination. Further sintering and annealing at lower temperature yields crystalline grains with uniform phases. (see e.g., B. A. Ridley et. al. Science, 1999, 286, 746).
  • 1.3. Preparation of Non-Oxide Ouantum Nanoparticles From Single-Source Precursors
  • In other embodiments of the present invention, ternary IB-IIIA-VIA nanoparticles may be prepared from single-source precursors. For instance, CuInS2 nanoparticles may be prepared using the precursor (PPh3)2CuIn(SEt)4. By way of example, dioctyl phthalate (10 mL) may be heated to about 125° C. under vacuum for about 1 h to dry and degas the solvent. The flask may be back-filled with argon and cooled to room temperature prior to adding the precursor. (PPh3)2CuIn(SEt)4 (2.0 g, 2.0 mmol) is then added to the reaction flask and heating is resumed. At approximately 150° C. the precursor dissolved to form a transparent yellow solution. Typically, no further change is observed with time at this temperature. At about 150° C., the precursor remains, for the most part, intact.
  • Upon increase of the temperature to about 200° C. a red powder begins to precipitate within a few minutes. A reaction time of about 2-3 hours may be employed to complete the precipitation and maximize the yield. After cooling to room temperature under argon, toluene (40 ml) may be added to the reaction mixture to lower the viscosity of the reaction mixture and the red powder may be isolated by centrifugation. The powder may be consecutively washed with toluene and then methanol to remove any reaction byproducts and unreacted starting material, and then dried under vacuum at about 60-80° C. The washing and centrifugation steps may be carried out in ambient atmosphere. Then the product may be collected and stored in a nitrogen-filled glovebox. A portion of the product (100 mg) may be placed in a flask containing fresh dioctyl phthalate (10 mL), heated to higher temperatures, e.g. 250 to 300° C., and held at that temperature for about 1 hour. At a temperature of about 250° C., a brown/black powder (CuInS2) is obtained. At about 300° C. the resulting powder is black and contains a CuInS2 nanoparticulate. (See, e.g., S. L. Castro et. al. Chem. Mater. 2003, 15, 3142)
  • Approximately the same procedure as outlined above may be followed for a CuInSe2 precursor. The precursor may be dissolved in the dioctyl phthalate at 138° C. For example, (PPh3)2CuIn(SePh)4 (1.951 g, 1.47 mmol) may be dissolved in about 10 mL of dioctyl phthalate. A red powder (0.523 g) may be collected after about 2 hours of heating at 200 to 300° C. This power contained a CuInS(Se)2 nanoparticulate.
  • The size distributions of the CuInS2 or CuIn(Se)2 nanoparticulates may be adjusted by size-selective precipitation, ultrafiltration and the like.
  • 1.4. Preparation of CuInS(Se)2 Nanoparticles using Spray Co-Precipitation
  • An alternative embodiment to reduce particle size and narrow the particle size distribution utilizes a spray co-precipitation technique. In the prior art, ZnGa2O4 nanocrystals with a mean particle size less than 10 nm have been made using spray co-precipitation. In a spraying co-precipitation apparatus 100, as shown in FIG. 1, compressed inert gas, e.g., nitrogen from gas sources 102, 103 drives reactants from reactant sources 104, 106 very quickly through stainless steel pipelines 108, 110. The flow rate can be adjusted by a flowmeter from about 5 to about 20 m/s. In general, one of the reactants may include one or more metal salts. As used herein the term metal salts includes metal halides, metal acetates, metal sulfates, metal nitrates, metal alcholates, metal carbonates, metal phenolates and/or organometallics. In a particular example, the reactants may include, a metal halide, such as CuHal/InHal (where Hal refers to I or Cl) and thiourea or selenourea. The reactants mix and react at a T joint 112 of the two pipelines 108, 110 and then spray into a beaker 114 with solvents (e.g., water or alcohols). The molar ratio of Cu, In and thiourea or selenourea may be adjusted e.g., by controlling the flow of the reactants with valves 116, 118, 120, 122 to form CuInS2 nanocrystals 124. The size distributions of the nanocrystals 124 may be adjusted by size-selective precipitation, ultrafiltration and the like. For further information see Z. Jiao et. al. Sensors 2003, 15, 3142.
  • 2. Production of Binary Nanoparticles
  • Some of the embodiments described above can be modified to produce binary non-oxide quantum nanoparticles, e.g., IB-VIA or IIIA-VIA or IB-VIA nanoparticles. These may be mixed together in the liquid to provide the desired ratios of IB, IIIA and VIA elements. By way of example there are several different approaches to producing CuSe and In2Se3.
  • 2.1. TOPO-Capped CuSe Non-Oxide Quantum Nanoparticles
  • In another embodiment, quantum dots with nearly uniform size may be fabricated by solvothermal methods according to a reaction of the type:

  • (IB)(Et2CN(VIA)2)2+TOPO→IB-VIA,
  • where IB, IIIA, VIA and TOPO have the meanings describe above. By way of example IB may be Cu, and VIA may be Se or S.
  • In a particular example, the quantum dots may be fabricated using a reaction of the type:

  • Cu(Et2CNSe2)2+TOPO→CuSe.
  • Quantum dots and rods of this type have been synthesized in the range of about 5 to about 15 nm using Solvothermal or solution reaction methods (see, e.g., M. A. Malik et. al. “A Novel Route for the Preparation of CuSe and CuInSe2 Nanoparticles,” in Advanced Materials, Vol 11, No. 17, pp 1441-1444, 1999). By way of example, and without limitation, CuSe Quantum Dots may be fabricated as follows. Cu(Et2CNSe2)2 (0.5 to 2 g) may be dissolved in tri-n-octylphosphine TOP (10 to 30 mL). This solution is then injected into hot tri-n-octylphosphine oxide TOPO (10 to 20 g) at 250° C. A decrease in temperature of 20-30° C. may be observed. The solution is then allowed to stabilize at about 250° C. and is heated for about 60 min at this temperature. The solution is then cooled to approximately 70° C., and after an excess of methanol was added, a flocculant precipitate forms. The solid may be separated by centrifugation, washed with methanol, and redispersed in toluene. The toluene may then be removed under a vacuum to give pale yellow TOPO-capped CuSe nanoparticles. The particles may be washed three times with methanol and redissolved in toluene. Size-selective precipitation may then be carried out on the particles to obtain a collection of quantum dots of the desired average particle size and size distribution.
  • 2.2. CuSe Non-Oxide Quantum Nanoparticles Prepared in Volatile Solvent
  • Pyridine-capped binary nanoparticles (e.g., CuSe) may be prepared according to a reaction of the type:

  • (IB)(Hal)+Na2(VIA)+ligand/capping agent→IB-VIA+2Na(Hal)
  • By way of example, IB may be Cu, Hal may be Cl or I, VIA may be Se or S. The ligand/capping agent may be any ligand that is co-processable with the metal salts used. By way of example, the ligand/capping agent may be pyridine, trioctylphosphine oxide, trioctylphosphine, triphenylphosphine, pyridine, alcohols (methanol, ethanol, propanol, butanol), ethane thiol, tetrahydrofuran, ethers, ammonia, amines (methyl amine, ethylamine, ethylenediamine) and/or acetonitrile. In a particular example, the reaction may be of the type:

  • CuCl2+Na2Se+Pyridine→CuSe+2NaI
  • The conditions for this reaction are similar to those described in section 1.2 except that there is no In ion involved in the reaction.
  • 2.3. In2Se3 Non-Oxide Quantum Nanoparticles Prepared in Volatile Solvent
  • In2Se3 nanoparticles may be prepared according to a reaction of the type

  • (IIIA)(Hal)+Na2(VIA)→IIIA-VIA+Na(Hal).
  • Where IIIA, VIA and Hal can be any of the appropriate elements described above. By way of example, the reaction may be of the type

  • 2InI3+3Na2Se→In2Se3+6NaI
  • The conditions for this reaction are similar to those described in section 1.2 except that there is no Cu ion involved in the reaction.
  • 2.4. Sonochemical Synthesis of CuSe In2Se3 or CuInSe2 Non-Oxide Quantum Nanoparticles
  • In the prior art, ZnSe nanoparticles with a mean size of 3 nanometers have been prepared using a sonochemical method (see, e.g., J. Zhu et. al. Chem. Mater. 2000, 12, 73). According to an alternative embodiment of the invention, the same sonochemical method can be applied to forming CuSe or In2Se3 or CuInSe2 nanoparticles for a CIGS-based ink. By way of example, and without limitation, Cu(Ac)2 (445 mg) and/or In(Ac)3 (720 mg) and 240 mg of selenourea may be dissolved in 70 mL of doubly distilled water and sonicated for about 1 hour under an atmosphere of argon, at room temperature. A round-bottom Pyrex glass vessel (total volume 70 mL) may be used for the ultrasound irradiation. The temperature of the mixture rises gradually to about 80° C. during ultrasonic irradiation. After about 1 hour of sonication, the solution may be centrifuged, and the precipitate washed with water and then with absolute ethanol.
  • 3. Elemental Metal Nanoparticles of Cu, In and Cu—In alloy with Se(S) Vapor or Powders
  • In a preferred embodiment, the nanoparticles for the ink may be prepared from a mixture of metal nanoparticles and a vapor or powder containing either Se or S. Metal nanoparticles have been prepared by a wide variety of techniques including but not limited to laser ablation, nucleation from vapor, exploding wires by electrical current surge, thermal decomposition of organometallic compounds, sonolysis, pulse radiolysis, electrochemical reduction and chemical reduction of the corresponding metal salts, and the like. Reduction of metal salts in the presence of a suitable protecting agent is a commonly used technique. Generally, a reductant, such as borohydride, hydrotriorganoborates, hydrogen or citrate, is added to a solution of the corresponding metal salt. An easily oxidized solvent may function both as the electron donor and the dispersing medium. Such particles are of particular interest for catalysis, as the metal surface is readily accessible. Alcohols and ethers have been quite extensively used for this purpose. Metal nanoparticles have a tendency to agglomerate, and therefore, it is necessary to protect them using surfactants or polymers, such as cyclodextrin, PVP, PVA, citrate or quaternary ammonium salts. In another strategy, the metal salt is reduced in micelles. A wide variety of ultra-fine colloidal surfactant-micelle protected metal nanoparticles can be successfully synthesized in solution. The size distribution of the metal nanoparticles may be controlled, e.g., by size-selective precipitation, ultrafiltration and the like.
  • Such metal colloids can be prepared in an ink formulation. After being mixed with Se (or S) fine powders, the ink can be coated on substrate and then subject to heat treatment to drive a reaction of the type:

  • (IB nanoparticle)+(IIIA nanoparticle)+VIA+HEAT→IB-IIIA-VIA
  • By way of example, IB may be Cu, IIIA may be In and/or Ga, and VIA may be Se or S. The reaction between metal or metal alloy nanoparticles and Se (or S) powder forms CIGS (or CIS) film. The ink may include a homogeneous mixture of metallic particles and powders of group VIA materials. The individual metallic particles are generally uniformly distributed throughout a matrix of, e.g., Se or S powder. Sub-micron-sized metallic particles may be formed by methods involving mechanical commination, e.g., milling, grinding, crushing and the desired size distribution obtained, e.g., by ultrafiltration or size-selective precipitation. In addition, nanometer-scale particles may be prepared by a gas condensation method. For example, in the gas condensation method, a metal may be heated to a vapor. The vapor then collects and condenses into particles. Such a technique may produce particles that are nominally spherical, approximately 30-40 nm in diameter and having a very tight size distribution (e.g., ±5 nm to ±10 nm). See also “Ultrafine Metal Particles”, C. G. Granqvist and R. A. Buhrman, J., Appl. Phys., 47, 2200, (1976).
  • In another embodiment, the metal particles may be prepared by exploding fine metal wires with a surge of electrical current. For example, metal wires 7.5-25 microns in diameter may be exploded in a liquid such as water or alcohol by applying an increasing DC voltage across the wire until it explodes, e.g., at a few tens of volts. The resulting particles remain suspended in the liquid. Copper wires exploded in this fashion can produce particles about 30 to 70 nm in diameter.
  • The metal nanoparticles and group VIA powder may be mixed together with an optional binder to form a green microstructure. The binder serves to hold the metallic particles together, provides lubrication while the particles are mixed, and then or vaporizes completely during the sintering process leaving no trace of the binder in the final metallic product. Preferably, the binder combusts or vaporizes completely during the sintering process leaving no trace of the binder in the final CI(G)S active layer. Binders useful in conjunction with such embodiments of the invention include, but are not limited to, wax- or oil-based binders such as Acrawax® C® (Glyco), Advawax® 240, 275, 280, 290 (Carstab), Eramid® (Hexcel), Glucolube® VL (Glyco), Hostalub® FA 1 (Amer. Hoechst), HSTA 1, 3 (Hexcel), Interstab® G-8257, Kantstik® S powder (Specialty Prod.), Kemamide® W-20, W-40, E (Humko Chem.), Nopcowax® 22DS (Synthetic Prod.), Paricin®285, 220 (NL Industries), Ross Wax® 140 (Frank B. Ross), and Slip-Eze®, Slip-Quick®, Vyn-Eze® (Hexcel) and the like; lower alkanols (C1-C6 alkanols, preferably C1-C4 alkanols) such as ethanol, isopropanol, and the like; or traditional dispersant/binder systems used in ceramic possessing, such as polymethacrylate/polyvinyl alcohol/polyethylene glycol systems. In some embodiments, the metal particles may be formed into a paste mixture comprising the elemental metal particles along with a resin, solvent, wetting agent, and flow control agent.
  • In addition, pastes can be made by combining elemental metals or other metallic particles with a polymer. Furthermore, a nanopowder of metal particles may be added to polymer matrix materials. Examples of suitable polymer matrix materials include poly(methyl methacrylate) (PMMA), poly(vinyl alcohol) (PVA), polycarbonates, polyalkenes, and polyaryls. In addition dispersants, binders, detergents, modifiers, or additives may be included along with the matrix material. Examples of modifiers or additives include plastisols, thickeners, or thinners to change the viscosity or change or improve the smoothness of the ink film surface. For example, “Viscosity Buster 10025VB” from Wilflex, at about a 1% concentration typically stabilizes and can improve the flow properties of ink. Additional modifiers or additives include, e.g., acids or bases to change pH of the ink or additives that lower the flash temperature of the ink and retarders or reducers to change the drying time of the ink. Potential sources of such modifiers and additives include Wilflex, Rutland Inks of Pineville, N.C., Chemical Consultants, Inc. of Corona, Calif., Union Inks of Singapore.
  • In the event that the nanoparticles are subject to oxide formation on the surface of the particles, for example, copper particles having a coating of copper oxide, the molding composition may additionally comprise a fluxing agent. The fluxing agent serves to substantially halt formation of the oxide layer, thereby enhancing the ability of the molding composition to form the green microstructure and aiding in the final sintering process. Examples of common fluxing agents in general use include abietic acid, stearic acid, hydrochloric acid, amine hydrochlorides and amine resins. Either a suitable commercial flux formulation or a specially formulated fluxing agent may be utilized. Further, to minimize or eliminate oxide formation on the surface of the nanoparticles, the nanoparticles can be formed in an atmosphere that lacks oxygen, e.g. a nitrogen-filled glovebox.
  • 4. Liquid Metal Based Inks
  • In another embodiment, the liquid ink may be made using one or more liquid metals. For example, an ink may be made starting with a molten mixture of Gallium and/or Indium (commercially available, e.g., from Alfa Aesar of Ward Hill, Mass.). Copper nanoparticles may then be added to the mixture, which may then be used as the ink/paste. Copper nanoparticles are available commercially, e.g., from Materials Modification Inc., of Fairfax, Va. Alternatively, the temperature of the Cu—Ga—In mixture may be adjusted (e.g. cooled) until a solid forms. The solid may be ground at that temperature until small nanoparticles (e.g., less than 5 nm) are present. Selenium may be added to the ink and/or a film formed from the ink by exposure to selenium vapor, e.g., before, during, or after annealing.
  • 5. Organometallic Liquid Inks
  • In yet another embodiment, the liquid ink may be made using one or more organometallic precursors of IB, IIIA and VIA elements. For instance, examples of copper precursors include Copper II hexafluoropentanedionate (Gelest SKU#AKC253); Copper II methoxide (Gelest SKU#AKC254); Copper II ethoxide (Gelest SKU#AKC250); and Copper II ethylacetoacetate (Gelest SKU#AKC252), all of which are available from Gelest, Inc. of Morrisville, Pa. Examples of indium precursors include Indium 2,4-Pentanedionate (Gelest SKU#AKJ370), also called indium acetylacetonate; Indium Methoxyethoxide (Gelest SKU#AKJ365); and Indium methyl(trimethyl)acetylacetate (Gelest SKU#AKJ373), also all available from Gelest. Examples of Gallium precursors: Gallium III 2,4-Pentanedionate (Gelest SKU#AKG310); and Gallium III Ethoxide (Gelest SKU#AKG320), also available from Gelest.
  • The precursors may be mixed as liquids to form the ink. The organic components may be burned out of the ink by heating at about 500° C., e.g., after a film of the ink is disposed on a substrate. Alternatively, a sol-gel may be formed from organometallics of e.g., Cu, In, and/or Ga. In general, the sol-gel processing involves the transition of a system from a liquid “sol” (mostly colloidal) into a solid “gel” phase. The starting materials used in the preparation of the “sol” are usually inorganic metal salts or metal organic compounds such as metal alkoxides along with water, alcohol and, optionally, a small amount of acid. For example, the ink may be fabricated by making a pseudo sol out of mixed metal organic precursors, such as alkoxides or diketonates of Copper, indium, gallium in the desired stoichiometric ratio. By way of example, copper(II) ethoxide or Copper(II) ethylacetoacetate may be mixed with gallium (III) ethoxide or gallium (III) pentanedionate and with indium (III) methoxyethoxide or indium(III) 2,4 pentanedionate. A sol may be formed by adding water, an alcohol and, optionally, an acid, to the mixed metal organic precursors. The sol may be coated in a dish (e.g. drop cast), annealed to remove labile groups, and allow drying to form a powder. Note that this process can be scaled to bulk in high volume. The metallic powder can then be milled and mixed with dispersant and then coated, and the resultant film can then be reduced by treatment with H2 and/or N2 at 400° C., after which 10-50 mbar Se vapor can be introduced to selenize the film. Alternatively, the powder compounds can be first reduced to metals through exposure to H2 gas, then mechanically milled and/or ground up mixed with dispersant and then coated.
  • 6. Metal Halides Dissolved in Chelating Agents
  • In yet another embodiment, a metal halide (MCl or MI, where M is a metal) could be dissolved in any of a number of chelating agents, then (optionally) mixed in water to keep the metals in solution. The solution mixture can then serve as a basis for a precursor paste or ink. Suitable metal halides include chlorides and iodides of the group IB, IIIA and VIA metals. Suitable chelating agents include, but are not limited to, e.g. amines, diamines such as ethylene diamine, polyamines, polyethylene glycol, low molecular weight alcohols, ketones, diketones, carboxylic acids, and mixtures thereof.
  • 7. Metal Salts
  • Metal salts and other metal compounds can also be used as reagents to synthesize metal nanoparticles. Provided that they exhibit proper reactivity, suitable metal salts and other metal compounds include but are not limited to metal halogenides, metal nitrates, metal nitrites, metal nitrides, metal sulfates, metal sulfites, metal sulfides, metal alcoholates, metal phosphates, metal phenolates, metal carbonates, metal carboxylates, and blends or mixtures of these salts. For example, for each element or non-oxide compound from the group IB, IIIA and VIA metals, metal salts can be synthesized or purchased (e.g., through Sigma-Aldrich of St. Louis, Mo.), formed or purified as nanoparticulates, then each of the nanoparticulates can be intermixed in the proper ration to serve as the basis for an ink for effective CIGS absorber layer function.
  • Photovoltaic Devices
  • The nanoparticles are generally mixed with an organic or inorganic solvent to form the ink. In some embodiments of the invention, the nanoparticles may be mixed with water to form an aqueous suspension that serves as the basis of the ink. Schulz, by contrast teaches non-aqueous colloidal suspensions and stresses that every effort should be made to avoid introducing even incidental amounts of water into his colloidal suspensions in order to avoid agglomeration of particles. In fact, aqueous suspensions have several advantages over non-aqueous suspensions during ink formation and deposition. First, water is an inexpensive solvent, and it is much easier to scale to high-volume production processes. In contrast, organic solvents are inherently more expensive and hazardous than water, and waste solvents and other organic byproducts incur costs resulting from waste processing. Second, a wide variety of water-compatible dispersants can easily be added to an aqueous suspension of nanoparticles, which are stabilized by the dispersant, which keeps the nanoparticles separated from each other until the annealing step melts them together. In contrast, if such water-compatible dispersants were added to an organic (non-aqueous) solution, such a mixture may form two phases as a result of organic-inorganic partitioning in the solution. In this case, nanoparticles that were initially stabilized by capping agents may subsequently collapse and form aggregates, leading to non-uniform coatings. Examples of suitable dispersants include Tamol™ and Duramax™ from Rohm and Haas of Philadelphia, Pa. Further information on Tamol™ may be found at http://www.rohmhaas.com/coatings/dispersants.html. Further information about Duramax™ may be found at http://www.rhcis.com/markets_and products/electronic.html.
  • Note that, as used herein, the term “aqueous suspension” refers to the ink at the end of its manufacture. The use of the term “aqueous” does not exclude the possibility that during manufacture, the particles may be dispersed in an organic solvent or some solvent other than water. For example, if the particles are capped with organic ligands and in some of the particle formation chemistries, the particles may be initially made in alcohol or another organic solvent then later precipitated or isolated for resuspension in water to form the ink. Furthermore, in some embodiments of the present invention, the particles may be so small that they form liquids, e.g., the particles may be as small as individual atoms or molecules. The liquid ink (aqueous or otherwise) may be spread in a thin film over a substrate using solution based coating techniques such as web coating, spray coating, spin coating, doctor blade coating, printing techniques including contact printing, gravure printing, microgravure printing, ink-jet printing, jet deposition, and the like. Such a film can be deposited on a flexible substrate, in a roll-to-roll manner using a commercially available web coating system. The film may then be heated to remove the solvent and to sinter the nanoparticles together to form a layer of a IB-IIIA-VIA alloy. The alloy may have the general formula CuIn1-xGax(S, Se)2, where x is between 0 and 1. The reduced temperature sintering (e.g., from about 200° C. to about 600° C.) made possible by the small particle size and narrow size distribution facilitates forming CIGS films in a high volume roll-to-roll production environment on thin flexible substrates such as metal foils or metallized plastic films. To heat and sinter the film, if deposited on a flexible substrate, the film can be wound into a coil and the coil can be heated such that the entire roll is heated at the same time, substantially increasing the scaleability of the heating process through such a high-volume batch process. Examples of processing a coiled substrate are described e.g., in US patent application titled “HIGH THROUGHPUT SURFACE TREATMENT ON COILED FLEXIBLE SUBSTRATES” (Attorney Docket No. NSL-025), which has been incorporated by reference.
  • Some high-volume batch processes for coating the substrate with the ink, e.g., chemical bath deposition (CBD) for liquid-based deposition, and atomic layer deposition (ALD) for gas- and vapor-based deposition, could potentially coat both sides of a coiled substrate at one time. However, it may be desirable to primarily coat only one side, since double-sided coating can result in waste of valuable components of the ink, e.g., indium. To avoid such waste, two substrates may be attached together “back-to-back” to form a dual substrate having, in effect, two front sides. The dual substrate may then be wound into a coil and coated such that both front surfaces get coated while the back surfaces do not. Preferably, the substrates are attached in a manner that allows them to be separated from each other after processing. By way of example the substrates may be attached with a low-strength adhesive or electrostatic film applied to the back side of one or both substrates. Alternatively, an edge where the two substrates join may be sealed, e.g., with a tape, so that reactants cannot reach the back sides during processing. Processing the substrate in this fashion wastes less of the ink and may increase the area of the substrate that can be coated at one time. The IB-IIIA-VIA alloy layer can be used in the active layer of photovoltaic cell, e.g., of the type shown in FIG. 2. The solar cell 200 generally includes a substrate or base layer 202, a base electrode 204, a IB-IIIA-VIA layer 206, a window layer 208, and a transparent electrode 210. The base layer 202 may be made from a thin flexible material suitable for roll-to-roll processing. By way of example, the base layer may be made of a metal foil, such as titanium, a polymer such as polyimide or a metallized plastic. The base electrode 204 is made of an electrically conducive material. By way of example, the base electrode 204 may be a layer of stainless steel or molybdenum, e.g., about 0.5 micron to about 1 micron thick. By way of example, and without limitation, the IB-IIIA-VIA layer 206 may include material of the general formula CuIn1-xGa(S or Se)2. The IB-IIIA-VIA layer 206 may be fabricated by depositing a film of a nanoparticle-based ink, paste or slurry, e.g., roughly 4 to 5 microns thick when wet on the base electrode 204. The film may be annealed by heating to a temperature sufficient to burn off any binders or cap layers on the particles and sinter the particles together. The IB-IIIA-VIA 206 layer may be about 1 micron to about 2 microns thick after annealing. By using nanoparticles of the average size and size distribution described above, the ink, paste or slurry may be annealed at a temperature compatible with the underlying substrate 202 and electrode 204. An optional adhesion layer 203 may facilitate bonding of the electrode 204 to the substrate 202. After annealing, the film may optionally be exposed to selenium vapor at about 300-500° C. for about 30-45 minutes to ensure the proper stochiometry of Se in the film. To carry out such a Se vapor exposure, the film, if deposited on a flexible substrate, can be wound into a coil and the coil can be coated so that the entire roll is exposed at the same time, substantially increasing the scaleability of the Se vapor exposure process through such a high-volume batch process, e.g., as described above. The window layer 208 is typically used to smooth out the “slope” between the bandgaps of the different materials making up the IB-IIIA-VIA layer 206. By way of example, the bandgap adjustment layer may include cadmium sulfide (CdS), zinc sulfide (ZnS), or zinc selenide (ZnSe) or some combination of two or more of these. Layers of these materials may be deposited, e.g., by chemical bath deposition, to a thickness of about 50 nm to about 100 nm.
  • The transparent electrode 210 may include a transparent conductive oxide layer 209, e.g., zinc oxide (ZnO) or aluminum doped zinc oxide (ZnO:Al), which can be deposited using any of a variety of means including but not limited to sputtering, evaporation, CBD, electroplating, CVD, PVD, ALD, and the like. If the substrate is flexible and the deposition technique is ALD or CBD or the like, a coiled/wound flexible substrate can be exposed so that the entire roll is processed at one time, e.g., as described above. The transparent electrode 210 may further include a layer of metal (e.g., Ni, Al or Ag) fingers 211 to reduce the overall sheet resistance.
  • An optional encapsulant layer (not shown) provides environmental resistance, e.g., protection against exposure to water or air. The encapsulant may also absorb UV-light to protect the underlying layers. Examples of suitable encapsulant materials include one or more layers of polymers, such as polyethylene terephthalate (PET), ethylene vinyl acetate (EVA), and/or Mylar®. Mylar is a registered trademark of E. I. du Pont de Nemours and Company of Wilmington, Del. Inorganic materials, such as glass and plastic foils, metalized plastic foils, and metal foils may also be used for the encapsulant layer. The encapsulant layer may also include nitrides, oxides, oxynitrides or other inorganic materials. Alternatively, the encapsulants may include Tefzel® (DuPont), tefdel, thermoplastics, polyimides, polyamides, nanolaminate composites of plastics and glasses (e.g. barrier films), and combinations of the above. For example, a thin layer of (expensive) EVA/polyimide laminated to thick layer of (much less expensive) PET.
  • Embodiments of the present invention provide for low-cost, high-volume production of large area photovoltaic devices without having to undergo selenization with hazardous H2Se or reduction of oxides in H2. Furthermore, embodiments of the present invention are compatible with roll-to-roll manufacturing of photovoltaic cells and modules that can be readily scaled up to high production volumes.
  • While the above is a complete description of the preferred embodiment of the present invention, it is possible to use various alternatives, modifications and equivalents. Therefore, the scope of the present invention should be determined not with reference to the above description but should, instead, be determined with reference to the appended claims, along with their full scope of equivalents. The appended claims are not to be interpreted as including means-plus-function limitations, unless such a limitation is explicitly recited in a given claim using the phrase “means for.”

Claims (21)

1. A method for fabricating a liquid containing intermixed elements of groups IB and IIIA, and optionally VIA, comprising the steps of:
forming nanoparticles containing elements from group IB; and
forming nanoparticles containing elements from group IIIA; and optionally forming non-oxide nanoparticles containing elements from group VIA;
combining the nanoparticles with a liquid to form an ink;
wherein the nanoparticles for the ink may be prepared from a mixture of metal nanoparticles and a vapor or powder containing either Se or S.
2. The method of claim 1 wherein forming non-oxide quantum nanoparticles includes preparing metal nanoparticles containing elements of groups IB, IIIA, VIA or a IB-IIIA-VIA alloy, by laser ablation, nucleation from vapor, exploding wires by electrical current surge, thermal decomposition of organometallic compounds, sonolysis, pulse radiolysis, electrochemical reduction or chemical reduction.
3. The method of claim 1 wherein the ink is formed by mixture with water.
4. The method of claim 1 wherein the ink is formed by mixture with organic solvent.
5. The method of claim 1, further comprising adding a capping agent to the non-oxide nanoparticles.
6. The method of claim 1, further comprising adding a binder to the non-oxide quantum nanoparticles.
7. The method of claim 1, further comprising adding a fluxing agent to the non-oxide quantum nanoparticles.
8. The method of claim 1, further comprising adding one or more surfactants, polymers, dispersants, binders, modifiers, detergents or additives to the non-oxide quantum nanoparticles.
9. The method of claim 1 wherein the group IB element is copper (Cu), the group IIIA element is indium and optionally includes gallium) and the group VIA element is selenium (Se) or sulfur (S) and a stoichiometric ratio of the Cu, In and Se or S in the liquid is approximately CuIn1-xGax(S or Se)2, where x is between 0 and 1.
10. The method of claim 9 wherein a majority of the group IB nanoparticles range in size from no more than about 40% above or below an average nanoparticle size, or, if the average nanoparticle size is less than about 5 nanometers, from no more than about 2 nanometers above or below the average nanoparticle size.
11. The method of claim 9, further comprising adjusting the temperature of the Cu—In—Ga mixture until a solid forms and then grinding the solid to form nanoparticles.
12. The method of claim 1 further comprising the step of capping the nanoparticles with an organic material.
13. The method of claim 12 wherein the organic material is a small molecule with low boiling point.
14. The method of claim 13 wherein the organic material is selected from the group of trioctylphosphine oxide, trioctylphosphine, triphenylphosphine, pyridine, alcohols (methanol, ethanol, propanol, butanol), ethane thiol, tetrahydrofuran, ethers, ammonia, amines (methyl amine, ethylamine, ethylenediamine) and acetonitrile.
15. The method of claims 14 wherein the organic material is pyridine.
16. The method of claim 1 wherein forming a mixture of non-oxide nanoparticles includes selecting particles in the desired particle size range.
17. The method of claim 16, wherein selecting nanoparticles in the desired size range includes adjusting one or more parameters of a reaction that forms the nanoparticles, size-selective precipitation, or ultrafiltration.
18. The method of claims 1 further comprising adding a water-compatible dispersant to the liquid.
19. The method of claims 1 wherein forming the non-oxide nanoparticles includes preparing particles in a non-oxygen atmosphere.
20. The method of claim 1 wherein the size distributions of the CuInS2 or CuIn(Se)2 nanoparticulates may be adjusted by size-selective precipitation, ultrafiltration and the like.
21. A photovoltaic device precursor material comprising:
a liquid ink comprising:
non-oxide metal nanoparticles containing elements from group IB, non-oxide metal nanoparticles from group IIIA; and adding one or more liquid metals containing one or more elements of group IIIA, wherein forming a mixture of non-oxide quantum nanoparticles includes reacting a single-source precursor to form particles of IB-IIIA-VIA material;
a dispersant; and
a solvent.
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Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080135811A1 (en) * 2004-02-19 2008-06-12 Dong Yu Solution-based fabrication of photovoltaic cell
US20110030581A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Polymeric precursors for aigs silver-containing photovoltaics
US20110031444A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Polymeric precursors for cis and cigs photovoltaics
US20110030785A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods and materials for caigas aluminum-containing photovoltaics
US20110030768A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods for photovoltaic absorbers with controlled group 13 stoichiometry
US20110132448A1 (en) * 2010-02-08 2011-06-09 Suniva, Inc. Solar cells and methods of fabrication thereof
US20110146789A1 (en) * 2009-12-17 2011-06-23 Precursor Energetics, Inc. Molecular precursor methods and materials for optoelectronics
WO2011084770A1 (en) * 2009-12-21 2011-07-14 Alion, Inc. Methods for making thin film polycrystalline photovoltaic devices using additional chemical element and products thereof
US20110189813A1 (en) * 2010-01-29 2011-08-04 Jenn Feng New Energy Co., Ltd. Method for fabricating copper/indium/gallium/selenium solar cell by wet process under non-vacuum condition
JP2013082578A (en) * 2011-10-07 2013-05-09 Dowa Electronics Materials Co Ltd Indium selenide particle powder, and method for producing the same
US8828787B2 (en) 2010-09-15 2014-09-09 Precursor Energetics, Inc. Inks with alkali metals for thin film solar cell processes
US8846141B1 (en) 2004-02-19 2014-09-30 Aeris Capital Sustainable Ip Ltd. High-throughput printing of semiconductor precursor layer from microflake particles
US9105797B2 (en) 2012-05-31 2015-08-11 Alliance For Sustainable Energy, Llc Liquid precursor inks for deposition of In—Se, Ga—Se and In—Ga—Se
US9130084B2 (en) 2010-05-21 2015-09-08 Alliance for Substainable Energy, LLC Liquid precursor for deposition of copper selenide and method of preparing the same
US9142408B2 (en) 2010-08-16 2015-09-22 Alliance For Sustainable Energy, Llc Liquid precursor for deposition of indium selenide and method of preparing the same
US20160005608A1 (en) * 2004-09-24 2016-01-07 President & Fellows Of Harvard College Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Semiconductor Substrate
US10229951B2 (en) 2010-04-21 2019-03-12 Sionyx, Llc Photosensitive imaging devices and associated methods
US10244188B2 (en) 2011-07-13 2019-03-26 Sionyx, Llc Biometric imaging devices and associated methods
US10269861B2 (en) 2011-06-09 2019-04-23 Sionyx, Llc Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
US10347682B2 (en) 2013-06-29 2019-07-09 Sionyx, Llc Shallow trench textured regions and associated methods
US10374109B2 (en) 2001-05-25 2019-08-06 President And Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
US10505054B2 (en) 2010-06-18 2019-12-10 Sionyx, Llc High speed photosensitive devices and associated methods

Families Citing this family (184)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7842882B2 (en) * 2004-03-01 2010-11-30 Basol Bulent M Low cost and high throughput deposition methods and apparatus for high density semiconductor film growth
US7291782B2 (en) * 2002-06-22 2007-11-06 Nanosolar, Inc. Optoelectronic device and fabrication method
US7253017B1 (en) 2002-06-22 2007-08-07 Nanosolar, Inc. Molding technique for fabrication of optoelectronic devices
US7594982B1 (en) 2002-06-22 2009-09-29 Nanosolar, Inc. Nanostructured transparent conducting electrode
US7511217B1 (en) 2003-04-19 2009-03-31 Nanosolar, Inc. Inter facial architecture for nanostructured optoelectronic devices
SE0301350D0 (en) * 2003-05-08 2003-05-08 Forskarpatent I Uppsala Ab A thin-film solar cell
US7462774B2 (en) * 2003-05-21 2008-12-09 Nanosolar, Inc. Photovoltaic devices fabricated from insulating nanostructured template
US7605327B2 (en) * 2003-05-21 2009-10-20 Nanosolar, Inc. Photovoltaic devices fabricated from nanostructured template
CN1574214A (en) * 2003-06-03 2005-02-02 国际商业机器公司 Melt-based patterning for electronic devices
US20060060237A1 (en) * 2004-09-18 2006-03-23 Nanosolar, Inc. Formation of solar cells on foil substrates
US8309163B2 (en) 2004-02-19 2012-11-13 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer by use of chalcogen-containing vapor and inter-metallic material
US8623448B2 (en) * 2004-02-19 2014-01-07 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from chalcogenide microflake particles
US7306823B2 (en) * 2004-09-18 2007-12-11 Nanosolar, Inc. Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells
US8329501B1 (en) 2004-02-19 2012-12-11 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from inter-metallic microflake particles
US7604843B1 (en) * 2005-03-16 2009-10-20 Nanosolar, Inc. Metallic dispersion
US8372734B2 (en) * 2004-02-19 2013-02-12 Nanosolar, Inc High-throughput printing of semiconductor precursor layer from chalcogenide nanoflake particles
US8048477B2 (en) * 2004-02-19 2011-11-01 Nanosolar, Inc. Chalcogenide solar cells
US7605328B2 (en) * 2004-02-19 2009-10-20 Nanosolar, Inc. Photovoltaic thin-film cell produced from metallic blend using high-temperature printing
US7115304B2 (en) * 2004-02-19 2006-10-03 Nanosolar, Inc. High throughput surface treatment on coiled flexible substrates
US8642455B2 (en) * 2004-02-19 2014-02-04 Matthew R. Robinson High-throughput printing of semiconductor precursor layer from nanoflake particles
US7227066B1 (en) * 2004-04-21 2007-06-05 Nanosolar, Inc. Polycrystalline optoelectronic devices based on templating technique
WO2006009124A1 (en) * 2004-07-16 2006-01-26 National Institute Of Advanced Industrial Science And Technology Fluorescent material and process for producing the same
US8541048B1 (en) 2004-09-18 2013-09-24 Nanosolar, Inc. Formation of photovoltaic absorber layers on foil substrates
JP2008514006A (en) 2004-09-18 2008-05-01 ナノソーラー インコーポレイテッド Formation of solar cells on foil substrates
US20090032108A1 (en) * 2007-03-30 2009-02-05 Craig Leidholm Formation of photovoltaic absorber layers on foil substrates
US7838868B2 (en) 2005-01-20 2010-11-23 Nanosolar, Inc. Optoelectronic architecture having compound conducting substrate
US7732229B2 (en) 2004-09-18 2010-06-08 Nanosolar, Inc. Formation of solar cells with conductive barrier layers and foil substrates
US8927315B1 (en) 2005-01-20 2015-01-06 Aeris Capital Sustainable Ip Ltd. High-throughput assembly of series interconnected solar cells
JP2007066526A (en) * 2005-08-29 2007-03-15 Hitachi Ltd Semiconductor electrode, dye-sensitized solar cell, and its manufacturing method
EP1956068A4 (en) * 2005-09-02 2010-07-28 Univ Nagoya Nat Univ Corp Semiconductor nanoparticle and method for manufacturing same
KR100850000B1 (en) * 2005-09-06 2008-08-01 주식회사 엘지화학 Process for Preparation of Absorption Layer of Solar Cell
US20070160763A1 (en) 2006-01-12 2007-07-12 Stanbery Billy J Methods of making controlled segregated phase domain structures
US7767904B2 (en) * 2006-01-12 2010-08-03 Heliovolt Corporation Compositions including controlled segregated phase domain structures
US8084685B2 (en) * 2006-01-12 2011-12-27 Heliovolt Corporation Apparatus for making controlled segregated phase domain structures
WO2008009428A1 (en) * 2006-07-20 2008-01-24 Leonhard Kurz Stiftung & Co. Kg Polymer-based solar cell
KR100909179B1 (en) * 2006-07-24 2009-07-22 주식회사 엘지화학 Method for manufacturing a CIS-based solar cell absorption layer
US20080053518A1 (en) * 2006-09-05 2008-03-06 Pen-Hsiu Chang Transparent solar cell system
US9147778B2 (en) * 2006-11-07 2015-09-29 First Solar, Inc. Photovoltaic devices including nitrogen-containing metal contact
EP2944383A3 (en) 2006-11-09 2016-02-10 Alliance for Sustainable Energy, LLC Precursors for formation of copper selenide, indium selenide, copper indium diselenide, and/or copper indium gallium diselenide films
US8057850B2 (en) * 2006-11-09 2011-11-15 Alliance For Sustainable Energy, Llc Formation of copper-indium-selenide and/or copper-indium-gallium-selenide films from indium selenide and copper selenide precursors
US7718707B2 (en) * 2006-12-21 2010-05-18 Innovalight, Inc. Method for preparing nanoparticle thin films
US20090014423A1 (en) * 2007-07-10 2009-01-15 Xuegeng Li Concentric flow-through plasma reactor and methods therefor
RU2331140C1 (en) * 2007-01-09 2008-08-10 Валентин Николаевич Самойлов Heteroelectric photo cell
US20080179762A1 (en) * 2007-01-25 2008-07-31 Au Optronics Corporation Layered structure with laser-induced aggregation silicon nano-dots in a silicon-rich dielectric layer, and applications of the same
WO2008104087A1 (en) * 2007-02-28 2008-09-04 National Research Council Of Canada Chalcopyrite nanoparticles, processes for synthesis thereof and uses thereof
US8563348B2 (en) * 2007-04-18 2013-10-22 Nanoco Technologies Ltd. Fabrication of electrically active films based on multiple layers
KR101497633B1 (en) * 2007-04-18 2015-03-03 나노코 테크놀로지스 리미티드 Fabrication of electrically active films based on multiple layers
US20080264479A1 (en) 2007-04-25 2008-10-30 Nanoco Technologies Limited Hybrid Photovoltaic Cells and Related Methods
US8034317B2 (en) * 2007-06-18 2011-10-11 Heliovolt Corporation Assemblies of anisotropic nanoparticles
WO2008157807A2 (en) 2007-06-20 2008-12-24 Ascent Solar Technologies, Inc. Array of monolithically integrated thin film photovoltaic cells and associated methods
US8071179B2 (en) 2007-06-29 2011-12-06 Stion Corporation Methods for infusing one or more materials into nano-voids if nanoporous or nanostructured materials
US8968438B2 (en) * 2007-07-10 2015-03-03 Innovalight, Inc. Methods and apparatus for the in situ collection of nucleated particles
US8471170B2 (en) * 2007-07-10 2013-06-25 Innovalight, Inc. Methods and apparatus for the production of group IV nanoparticles in a flow-through plasma reactor
US20090053878A1 (en) * 2007-08-21 2009-02-26 Maxim Kelman Method for fabrication of semiconductor thin films using flash lamp processing
TW200915583A (en) 2007-09-17 2009-04-01 Univ Nat Taiwan Science Tech Photoelectric electrodes capable of absorbing solar energy, fabrication methods, and applications thereof
KR101144807B1 (en) 2007-09-18 2012-05-11 엘지전자 주식회사 Ink For Solar Cell And Manufacturing Method Of The Ink, And CIGS Film Solar Cell Using The Ink And Manufacturing Method Therof
US8017183B2 (en) * 2007-09-26 2011-09-13 Eastman Kodak Company Organosiloxane materials for selective area deposition of inorganic materials
DE102007047088A1 (en) 2007-10-01 2009-04-09 Buskühl, Martin, Dr. Photovoltaic module with at least one solar cell
KR101349852B1 (en) * 2007-10-29 2014-01-14 엘지전자 주식회사 Manufacturing method of solar cell thin film using nanoparticle ink and solar cell using the said method
KR101030780B1 (en) * 2007-11-14 2011-04-27 성균관대학교산학협력단 Synthesis of i-iii-vi2 nanoparticles and fabrication of polycrystalline absorber layers
US7998762B1 (en) 2007-11-14 2011-08-16 Stion Corporation Method and system for large scale manufacture of thin film photovoltaic devices using multi-chamber configuration
US8784701B2 (en) * 2007-11-30 2014-07-22 Nanoco Technologies Ltd. Preparation of nanoparticle material
WO2009076322A2 (en) * 2007-12-06 2009-06-18 Craig Leidholm Methods and devices for processing a precursor layer in a group via environment
US8613973B2 (en) * 2007-12-06 2013-12-24 International Business Machines Corporation Photovoltaic device with solution-processed chalcogenide absorber layer
US20090211627A1 (en) * 2008-02-25 2009-08-27 Suniva, Inc. Solar cell having crystalline silicon p-n homojunction and amorphous silicon heterojunctions for surface passivation
US8076175B2 (en) * 2008-02-25 2011-12-13 Suniva, Inc. Method for making solar cell having crystalline silicon P-N homojunction and amorphous silicon heterojunctions for surface passivation
US20090211623A1 (en) * 2008-02-25 2009-08-27 Suniva, Inc. Solar module with solar cell having crystalline silicon p-n homojunction and amorphous silicon heterojunctions for surface passivation
KR100989077B1 (en) * 2008-02-27 2010-10-25 한국과학기술연구원 Fabrication of thin film for solar cells using paste and the thin film fabricated thereby
WO2009111054A1 (en) * 2008-03-05 2009-09-11 Global Solar Energy, Inc. Solution containment during buffer layer deposition
US9252318B2 (en) 2008-03-05 2016-02-02 Hanergy Hi-Tech Power (Hk) Limited Solution containment during buffer layer deposition
JP5738601B2 (en) 2008-03-05 2015-06-24 ハナジー・ハイ−テク・パワー・(エイチケー)・リミテッド Buffer layer deposition for thin film solar cells.
DE212009000032U1 (en) * 2008-03-05 2010-11-04 Global Solar Energy, Inc., Tuscon System for applying a chalcogenide buffer layer to a flexible support
US8277869B2 (en) * 2008-03-05 2012-10-02 Global Solar Energy, Inc. Heating for buffer layer deposition
US8324414B2 (en) 2009-12-23 2012-12-04 Battelle Energy Alliance, Llc Methods of forming single source precursors, methods of forming polymeric single source precursors, and single source precursors and intermediate products formed by such methods
US9371226B2 (en) 2011-02-02 2016-06-21 Battelle Energy Alliance, Llc Methods for forming particles
US8951446B2 (en) 2008-03-13 2015-02-10 Battelle Energy Alliance, Llc Hybrid particles and associated methods
US8003070B2 (en) * 2008-03-13 2011-08-23 Battelle Energy Alliance, Llc Methods for forming particles from single source precursors
WO2009117646A2 (en) * 2008-03-20 2009-09-24 Drexel University Method for the formation of sers substrates
WO2009124034A1 (en) 2008-04-01 2009-10-08 The Government Of The United States Of America, As Represented By The Secretary Of The Air Force Layers durably bonded to surfaces
WO2009137637A2 (en) * 2008-05-09 2009-11-12 Board Of Regents, The University Of Texas System Nanoparticles and methods of making and using
US8642138B2 (en) * 2008-06-11 2014-02-04 Stion Corporation Processing method for cleaning sulfur entities of contact regions
US20100180927A1 (en) * 2008-08-27 2010-07-22 Stion Corporation Affixing method and solar decal device using a thin film photovoltaic and interconnect structures
US8425739B1 (en) 2008-09-30 2013-04-23 Stion Corporation In chamber sodium doping process and system for large scale cigs based thin film photovoltaic materials
US7947524B2 (en) 2008-09-30 2011-05-24 Stion Corporation Humidity control and method for thin film photovoltaic materials
US20110018103A1 (en) * 2008-10-02 2011-01-27 Stion Corporation System and method for transferring substrates in large scale processing of cigs and/or cis devices
US8742531B2 (en) * 2008-12-08 2014-06-03 Arizona Board Of Regents, Acting For And On Behalf Of Arizona State University Electrical devices including dendritic metal electrodes
JP2012515708A (en) 2009-01-21 2012-07-12 パデュー リサーチ ファンデーション Selenization of precursor layers containing CuInS2 nanoparticles
WO2010090740A1 (en) * 2009-02-04 2010-08-12 Heliovolt Corporation Method of forming an indium-containing transparent conductive oxide film, metal targets used in the method and photovoltaic devices utilizing said films
JP5649072B2 (en) * 2009-02-27 2015-01-07 国立大学法人名古屋大学 Semiconductor nanoparticles and production method thereof
TWI495114B (en) * 2009-03-19 2015-08-01 Univ Nat Taiwan Fabrication method for light absorbing layers precursor solution
US20100243043A1 (en) * 2009-03-25 2010-09-30 Chuan-Lung Chuang Light Absorbing Layer Of CIGS Solar Cell And Method For Fabricating The Same
JP5213777B2 (en) * 2009-03-26 2013-06-19 京セラ株式会社 Thin film solar cell manufacturing method
US8418418B2 (en) 2009-04-29 2013-04-16 3Form, Inc. Architectural panels with organic photovoltaic interlayers and methods of forming the same
US8241943B1 (en) 2009-05-08 2012-08-14 Stion Corporation Sodium doping method and system for shaped CIGS/CIS based thin film solar cells
US8067259B2 (en) * 2009-05-12 2011-11-29 Evident Technologies Method of producing high performance photovoltaic and thermoelectric nanostructured bulk and thin films
US8372684B1 (en) 2009-05-14 2013-02-12 Stion Corporation Method and system for selenization in fabricating CIGS/CIS solar cells
US8247243B2 (en) 2009-05-22 2012-08-21 Nanosolar, Inc. Solar cell interconnection
AU2010254119A1 (en) * 2009-05-26 2012-01-12 Purdue Research Foundation Thin films for photovoltaic cells
KR101247369B1 (en) 2009-06-04 2013-03-26 조길수 Photovoltaic fiber, apparatus and method of manufacturing the same
CA2708193A1 (en) * 2009-06-05 2010-12-05 Heliovolt Corporation Process for synthesizing a thin film or composition layer via non-contact pressure containment
US8507786B1 (en) 2009-06-27 2013-08-13 Stion Corporation Manufacturing method for patterning CIGS/CIS solar cells
US8277894B2 (en) * 2009-07-16 2012-10-02 Rohm And Haas Electronic Materials Llc Selenium ink and methods of making and using same
US20110023750A1 (en) * 2009-07-28 2011-02-03 Kuan-Che Wang Ink composition for forming absorbers of thin film cells and producing method thereof
US9023680B2 (en) * 2009-07-30 2015-05-05 Kyocera Corporation Method for producing compound semiconductor, method for manufacturing photoelectric conversion device, and solution for forming semiconductor
US8398772B1 (en) 2009-08-18 2013-03-19 Stion Corporation Method and structure for processing thin film PV cells with improved temperature uniformity
KR101081443B1 (en) 2009-08-21 2011-11-08 재단법인대구경북과학기술원 Fabrication Method of CIGS and CIGS Solar Cell
US20110056541A1 (en) * 2009-09-04 2011-03-10 Martinez Casiano R Cadmium-free thin films for use in solar cells
US8256621B2 (en) * 2009-09-11 2012-09-04 Pro-Pak Industries, Inc. Load tray and method for unitizing a palletized load
US8071875B2 (en) * 2009-09-15 2011-12-06 Xiao-Chang Charles Li Manufacture of thin solar cells based on ink printing technology
US8309179B2 (en) * 2009-09-28 2012-11-13 Rohm And Haas Electronics Materials Llc Selenium/group 1b ink and methods of making and using same
US20110076798A1 (en) * 2009-09-28 2011-03-31 Rohm And Haas Electronic Materials Llc Dichalcogenide ink containing selenium and methods of making and using same
JP4782880B2 (en) * 2009-10-05 2011-09-28 富士フイルム株式会社 Buffer layer and manufacturing method thereof, reaction solution, photoelectric conversion element, and solar cell
US9053938B1 (en) 2009-10-08 2015-06-09 Aeris Capital Sustainable Ip Ltd. High light transmission, low sheet resistance layer for photovoltaic devices
US20110137061A1 (en) * 2009-12-09 2011-06-09 Chi-Jie Wang Nanoink for forming absorber layer of thin film solar cell and method of producing the same
DE102009054973A1 (en) * 2009-12-18 2011-06-22 SULFURCELL Solartechnik GmbH, 12487 Chalcopyrite thin film solar cell with CdS / (Zn (S, O) buffer layer and associated manufacturing process
TWI397189B (en) * 2009-12-24 2013-05-21 Au Optronics Corp Method of forming thin film solar cell and structure thereof
US8859880B2 (en) * 2010-01-22 2014-10-14 Stion Corporation Method and structure for tiling industrial thin-film solar devices
US20120319244A1 (en) * 2010-01-29 2012-12-20 Kyocera Corporation Method for manufacturing semiconductor layer, method for manufacturing photoelectric conversion device, and semiconductor layer forming solution
US8021641B2 (en) * 2010-02-04 2011-09-20 Alliance For Sustainable Energy, Llc Methods of making copper selenium precursor compositions with a targeted copper selenide content and precursor compositions and thin films resulting therefrom
JP2011165837A (en) * 2010-02-09 2011-08-25 Sharp Corp Solar cell string, solar cell module, and solar cell
CN102145385A (en) * 2010-02-10 2011-08-10 昆山正富机械工业有限公司 Method for mixing copper indium gallium selenide slurry without interfacial active agent or solvent
CN102763230B (en) * 2010-02-22 2016-06-01 太阳能光电股份公司 The method and apparatus manufacturing semiconductor layer
US20110215281A1 (en) * 2010-03-03 2011-09-08 Jenn Feng New Energy Co., Ltd Method for preparing cigs inks without surfactant
TWI411121B (en) * 2010-03-11 2013-10-01 Ind Tech Res Inst Method of forming light absorption layer and solar cell structure using the same
US20110240996A1 (en) * 2010-03-17 2011-10-06 National Taiwan University Optoelectronic device and method for producing the same
US9096930B2 (en) 2010-03-29 2015-08-04 Stion Corporation Apparatus for manufacturing thin film photovoltaic devices
US8142521B2 (en) * 2010-03-29 2012-03-27 Stion Corporation Large scale MOCVD system for thin film photovoltaic devices
WO2011121701A1 (en) * 2010-03-29 2011-10-06 京セラ株式会社 Process for manufacture of photoelectric conversion device, and semiconductor-forming solution
US8119506B2 (en) * 2010-05-18 2012-02-21 Rohm And Haas Electronic Materials Llc Group 6a/group 3a ink and methods of making and using same
US8709917B2 (en) 2010-05-18 2014-04-29 Rohm And Haas Electronic Materials Llc Selenium/group 3A ink and methods of making and using same
US8461061B2 (en) 2010-07-23 2013-06-11 Stion Corporation Quartz boat method and apparatus for thin film thermal treatment
US8282995B2 (en) * 2010-09-30 2012-10-09 Rohm And Haas Electronic Materials Llc Selenium/group 1b/group 3a ink and methods of making and using same
US8409906B2 (en) 2010-10-25 2013-04-02 Imra America, Inc. Non-vacuum method for fabrication of a photovoltaic absorber layer
US8748216B2 (en) 2010-10-25 2014-06-10 Imra America, Inc. Non-vacuum method for fabrication of a photovoltaic absorber layer
US20130292800A1 (en) * 2010-12-03 2013-11-07 E I Du Pont De Nemours And Company Processes for preparing copper indium gallium sulfide/selenide films
JPWO2012077243A1 (en) * 2010-12-07 2014-05-19 Dowaホールディングス株式会社 Chalcogen compound powder, chalcogen compound paste and method for producing them
KR101172050B1 (en) 2011-02-11 2012-08-07 재단법인대구경북과학기술원 Method for manufacturing absorber layer of thin film solar cell
US8372485B2 (en) 2011-02-18 2013-02-12 Rohm And Haas Electronic Materials Llc Gallium ink and methods of making and using same
US8343267B2 (en) 2011-02-18 2013-01-01 Rohm And Haas Electronic Materials Llc Gallium formulated ink and methods of making and using same
US8647897B2 (en) 2011-03-21 2014-02-11 The Board Of Trustees Of The Leland Stanford Junior University Air-stable ink for scalable, high-throughput layer deposition
CN102694057B (en) * 2011-03-22 2015-02-18 昆山恒辉新能源有限公司 A CIGS solar battery light absorbing layer preparation method by adopting an antivacuum preset-quantity coating method
US8889471B2 (en) * 2011-05-09 2014-11-18 Sichuan Yinhe Chemical Co., Ltd. Burnthrough formulations
DE102011077853A1 (en) 2011-06-21 2012-12-27 Robert Bosch Gmbh Preparing thin film solar cell of copper, indium, gallium and selenium type, comprises applying coating liquid containing above elements dissolved in compound containing nitrogen/carbon on surface of cell substrate and annealing
KR101193106B1 (en) 2011-07-19 2012-10-19 한국에너지기술연구원 Preparation method for ci(g)s-based compound thin film using cu-se binary nano particle as flux and ci(g)s-based compound thin film prepared by the same
US20130037110A1 (en) * 2011-08-10 2013-02-14 International Business Machines Corporation Particle-Based Precursor Formation Method and Photovoltaic Device Thereof
US9666747B2 (en) * 2011-11-30 2017-05-30 Konica Minolta Laboratory U.S.A., Inc. Method of manufacturing a photovoltaic device
CN102581294B (en) * 2012-03-26 2014-05-07 沈阳化工大学 Method for preparing nano-metallic copper powder
ES2523141T3 (en) 2012-06-14 2014-11-21 Suntricity Cells Corporation Precursor solution to form a thin semiconductor film based on CIS, CIGS or CZTS
WO2014008383A1 (en) * 2012-07-06 2014-01-09 3M Innovative Properties Company Anti-soiling compositions, methods of applying, and application equipment
US9082619B2 (en) 2012-07-09 2015-07-14 International Solar Electric Technology, Inc. Methods and apparatuses for forming semiconductor films
ITFI20120148A1 (en) 2012-07-17 2014-01-18 Alessio Manzini SOLAR WASHING MACHINE WITH ENERGETIC AUTONOMY
WO2014019560A1 (en) * 2012-08-02 2014-02-06 Dynamic Solar Systems Inc. Improved layered solar cell
US8809113B2 (en) * 2012-11-10 2014-08-19 Sharp Laboratories Of America, Inc. Solution-processed metal-selenide semiconductor using selenium nanoparticles
TW201422532A (en) * 2012-12-11 2014-06-16 Ind Tech Res Inst Method of preparing nano metal salt and method of forming absorption layer of solar cell
JP5964742B2 (en) * 2012-12-26 2016-08-03 富士フイルム株式会社 Semiconductor film, semiconductor film manufacturing method, solar cell, light emitting diode, thin film transistor, and electronic device
CN105229801B (en) 2013-02-07 2017-03-15 第一太阳能有限公司 There is in Window layer photovoltaic device and its manufacture method of protective layer
JP6126867B2 (en) * 2013-02-25 2017-05-10 東京応化工業株式会社 Coating apparatus and coating method
US8765518B1 (en) * 2013-03-12 2014-07-01 International Business Machines Corporation Chalcogenide solutions
CN103227243B (en) * 2013-05-06 2015-08-05 王家雄 Prepare the volume to volume production method of copper-indium-galliun-selenium film solar cell
US9105798B2 (en) * 2013-05-14 2015-08-11 Sun Harmonics, Ltd Preparation of CIGS absorber layers using coated semiconductor nanoparticle and nanowire networks
US9196767B2 (en) 2013-07-18 2015-11-24 Nanoco Technologies Ltd. Preparation of copper selenide nanoparticles
KR101638470B1 (en) * 2013-07-19 2016-07-11 주식회사 엘지화학 Ink Composition Comprising Metal Nano Particle for Preparation of Light Absorbing Layer and Manufacturing Method of Solar Cell Thin Film Using the Same
KR101621743B1 (en) * 2013-07-19 2016-05-17 주식회사 엘지화학 Manufacturing Method of CI(G)S Nano Particle for Preparation of Light Absorbing Layer and CI(G)S Nano Particle Manufactured thereof
CN104377252B (en) * 2014-11-24 2017-03-22 中南大学 Flexible copper-based chalcogenide semiconductor thin-film solar cell window layer structure
CN105093568B (en) * 2015-08-10 2018-07-03 京东方科技集团股份有限公司 Display device and device, liquid metal material and prepare mold, method and apparatus
CN105489673A (en) * 2015-12-17 2016-04-13 山东建筑大学 Method for preparing copper-indium sulfide photoelectric thin film by chloride system through two-step method
CN105742389B (en) * 2016-04-13 2017-05-10 电子科技大学 Synthesis method of copper-indium-gallium-sulphur material, thin-film solar cell and preparation method of thin-film solar cell
AU2017268839A1 (en) 2016-05-27 2018-11-29 Laboratoire Francais Du Fractionnement Et Des Biotechnologies Combination of anti-CD20 antibody, P13 kinase-delta selective inhibitor, and BTK inhibitor to treat B-cell proliferative disorders
US20180344171A1 (en) * 2017-06-06 2018-12-06 Myant Inc. Sensor band for multimodal sensing of biometric data
CN107597510B (en) * 2017-09-09 2019-08-23 汕头市华鹰软包装设备总厂有限公司 A kind of solar battery back film coating coating apparatus
US11145466B2 (en) * 2018-03-08 2021-10-12 Alliance For Sustainable Energy, Llc Perovskite-containing devices and methods of making the same
CN109659356B (en) * 2018-12-18 2021-08-27 河南师范大学 Nano device with negative differential resistance and switching action based on copper selenide single layer
US11517963B2 (en) * 2019-09-30 2022-12-06 Shoei Chemical Inc. Method for producing copper-selenide nanoparticles, aggregated bodies of copper-selenide nanoparticles, copper-selenide nanoparticles, and film-coated structure
CN110677984B (en) * 2019-10-07 2021-06-04 浙江大学 Liquid metal-polymer printable ink and preparation and printing methods thereof
CN112342522A (en) * 2020-09-15 2021-02-09 中国科学院上海技术物理研究所 Method for preparing large-area single-layer and multi-layer gallium telluride materials by alternative reactants
CN112538290B (en) * 2020-10-19 2022-02-08 浙江大学 Self-sintering liquid metal ink and preparation method and application thereof
CN112341860A (en) * 2020-10-28 2021-02-09 华中科技大学 Method for rapidly preparing lead selenide PbSe quantum dot ink
CN112505962A (en) * 2020-12-21 2021-03-16 深圳扑浪创新科技有限公司 Display device and preparation method and application thereof
JPWO2022138619A1 (en) * 2020-12-21 2022-06-30
CN113512050B (en) * 2021-04-30 2023-11-24 中国计量大学 Pyridine VOC fluorescent sensing material based on cuprous iodide complex
US11814439B1 (en) 2022-06-01 2023-11-14 Tg Therapeutics, Inc. Anti-CD20 antibody compositions
US11965032B1 (en) 2022-06-01 2024-04-23 Tg Therapeutics, Inc. Anti-CD20 antibody compositions
US11807689B1 (en) 2022-06-01 2023-11-07 Tg Therapeutics, Inc. Anti-CD20 antibody compositions
US11884740B1 (en) 2022-06-01 2024-01-30 Tg Therapeutics, Inc. Anti-CD20 antibody compositions

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6126740A (en) * 1995-09-29 2000-10-03 Midwest Research Institute Solution synthesis of mixed-metal chalcogenide nanoparticles and spray deposition of precursor films
US20050183767A1 (en) * 2004-02-19 2005-08-25 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US6946597B2 (en) * 2002-06-22 2005-09-20 Nanosular, Inc. Photovoltaic devices fabricated by growth from porous template
US7306823B2 (en) * 2004-09-18 2007-12-11 Nanosolar, Inc. Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells
US20080051122A1 (en) * 2005-12-31 2008-02-28 Mobile Candy Dish, Inc. Method and system for transmitting data between a server and a mobile communication device using short message service (sms)

Family Cites Families (137)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3423301A (en) 1964-11-02 1969-01-21 Monsanto Co Electrolytic production of high-purity gallium
US3449705A (en) 1966-04-21 1969-06-10 Ncr Co Photoconductive matrix sheet
US3818324A (en) * 1971-04-19 1974-06-18 Schlumberger Technology Corp Well logging pad having a flexible electrode structure
US3903427A (en) * 1973-12-28 1975-09-02 Hughes Aircraft Co Solar cell connections
US3903428A (en) * 1973-12-28 1975-09-02 Hughes Aircraft Co Solar cell contact design
CA1054556A (en) 1974-10-21 1979-05-15 Cecil L. Crossley Electrowinning of gallium
DE2741954A1 (en) 1977-09-17 1979-03-29 Karl Hertel Solar cell prodn. - by depositing semiconductor pn junctions in anodised aluminium pores during electron beam irradiation
US4191794A (en) 1978-05-11 1980-03-04 Westinghouse Electric Corp. Integrated solar cell array
US4192721A (en) 1979-04-24 1980-03-11 Baranski Andrzej S Method for producing a smooth coherent film of a metal chalconide
US4522663A (en) 1980-09-09 1985-06-11 Sovonics Solar Systems Method for optimizing photoresponsive amorphous alloys and devices
DE3135933A1 (en) 1980-09-26 1982-05-19 Unisearch Ltd., Kensington, New South Wales SOLAR CELL AND METHOD FOR THEIR PRODUCTION
EP0078541B1 (en) 1981-11-04 1991-01-16 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Flexible photovoltaic device
JPS59201471A (en) 1983-04-29 1984-11-15 Semiconductor Energy Lab Co Ltd Photoelectric conversion semiconductor device
US4536607A (en) 1984-03-01 1985-08-20 Wiesmann Harold J Photovoltaic tandem cell
DE3528087C2 (en) 1984-08-06 1995-02-09 Showa Aluminum Corp Substrate for amorphous silicon solar cells
JPS61244004A (en) 1985-04-22 1986-10-30 Takeo Nishikawa Magnetic fluid
US4642140A (en) 1985-04-30 1987-02-10 The United States Of America As Represented By The United States Department Of Energy Process for producing chalcogenide semiconductors
US4677250A (en) 1985-10-30 1987-06-30 Astrosystems, Inc. Fault tolerant thin-film photovoltaic cell
JPS63249379A (en) 1987-04-03 1988-10-17 Showa Alum Corp Manufacture of substrate for thin film solar cell
JPS6464369A (en) 1987-09-04 1989-03-10 Matsushita Electric Ind Co Ltd Manufacture of indium copper selenide
US5045409A (en) 1987-11-27 1991-09-03 Atlantic Richfield Company Process for making thin film solar cell
US5141564A (en) 1988-05-03 1992-08-25 The Boeing Company Mixed ternary heterojunction solar cell
US5013464A (en) 1989-04-28 1991-05-07 Dowa Mining Co., Ltd. Liquid suspension composition containing gallium particles and process for producing the same
US5078804A (en) 1989-06-27 1992-01-07 The Boeing Company I-III-VI2 based solar cell utilizing the structure CuInGaSe2 CdZnS/ZnO
JP2784841B2 (en) 1990-08-09 1998-08-06 キヤノン株式会社 Substrates for solar cells
JPH04266068A (en) 1991-02-20 1992-09-22 Canon Inc Photoelectric conversion element and its manufacture
US5925443A (en) 1991-09-10 1999-07-20 International Business Machines Corporation Copper-based paste containing copper aluminate for microstructural and shrinkage control of copper-filled vias
US5221435A (en) * 1991-09-27 1993-06-22 Nalco Chemical Company Papermaking process
US5286306A (en) 1992-02-07 1994-02-15 Shalini Menezes Thin film photovoltaic cells from I-III-VI-VII compounds
EP0574716B1 (en) 1992-05-19 1996-08-21 Matsushita Electric Industrial Co., Ltd. Method for preparing chalcopyrite-type compound
JP3386127B2 (en) 1992-09-22 2003-03-17 シーメンス アクチエンゲゼルシヤフト How to quickly create chalcopyrite semiconductor on a substrate
JP3064701B2 (en) 1992-10-30 2000-07-12 松下電器産業株式会社 Method for producing chalcopyrite-type compound thin film
US5401573A (en) 1992-11-30 1995-03-28 Mcdonnell Douglas Corporation Protection of thermal control coatings from ultraviolet radiation
JPH06289369A (en) 1993-03-30 1994-10-18 Casio Comput Co Ltd Liquid crystal driving device
US5356839A (en) 1993-04-12 1994-10-18 Midwest Research Institute Enhanced quality thin film Cu(In,Ga)Se2 for semiconductor device applications by vapor-phase recrystallization
US5441897A (en) 1993-04-12 1995-08-15 Midwest Research Institute Method of fabricating high-efficiency Cu(In,Ga)(SeS)2 thin films for solar cells
US5436204A (en) 1993-04-12 1995-07-25 Midwest Research Institute Recrystallization method to selenization of thin-film Cu(In,Ga)Se2 for semiconductor device applications
EP0654831A3 (en) 1993-11-18 1998-01-14 Matsushita Battery Industrial Co Ltd Method of manufacturing solar cell
US5633033A (en) 1994-04-18 1997-05-27 Matsushita Electric Industrial Co., Ltd. Method for manufacturing chalcopyrite film
US5518968A (en) 1994-10-17 1996-05-21 Cooper Industries, Inc. Low-temperature lead-free glaze for alumina ceramics
SE508676C2 (en) 1994-10-21 1998-10-26 Nordic Solar Energy Ab Process for making thin film solar cells
DE4442824C1 (en) 1994-12-01 1996-01-25 Siemens Ag Solar cell having higher degree of activity
ATE203266T1 (en) 1995-01-14 2001-08-15 Jochen Daume HEAT TRANSFER CONCENTRATE, METHOD FOR THE PRODUCTION THEREOF AND ITS USE AND LATENT HEAT STORAGE
EP0743686A3 (en) 1995-05-15 1998-12-02 Matsushita Electric Industrial Co., Ltd Precursor for semiconductor thin films and method for producing semiconductor thin films
US5730852A (en) 1995-09-25 1998-03-24 Davis, Joseph & Negley Preparation of cuxinygazsen (X=0-2, Y=0-2, Z=0-2, N=0-3) precursor films by electrodeposition for fabricating high efficiency solar cells
US5711803A (en) * 1995-09-29 1998-01-27 Midwest Research Institute Preparation of a semiconductor thin film
ATE203781T1 (en) 1996-04-03 2001-08-15 Alusuisse Tech & Man Ag COATING SUBSTRATE
US5905000A (en) 1996-09-03 1999-05-18 Nanomaterials Research Corporation Nanostructured ion conducting solid electrolytes
US5925228A (en) 1997-01-09 1999-07-20 Sandia Corporation Electrophoretically active sol-gel processes to backfill, seal, and/or densify porous, flawed, and/or cracked coatings on electrically conductive material
US6344272B1 (en) 1997-03-12 2002-02-05 Wm. Marsh Rice University Metal nanoshells
US20020132045A1 (en) 2000-09-27 2002-09-19 Halas Nancy J. Method of making nanoshells
US7144627B2 (en) 1997-03-12 2006-12-05 William Marsh Rice University Multi-layer nanoshells comprising a metallic or conducting shell
US5985691A (en) 1997-05-16 1999-11-16 International Solar Electric Technology, Inc. Method of making compound semiconductor films and making related electronic devices
US6121541A (en) 1997-07-28 2000-09-19 Bp Solarex Monolithic multi-junction solar cells with amorphous silicon and CIS and their alloys
US6268014B1 (en) 1997-10-02 2001-07-31 Chris Eberspacher Method for forming solar cell materials from particulars
US5945217A (en) 1997-10-14 1999-08-31 Gore Enterprise Holdings, Inc. Thermally conductive polytrafluoroethylene article
US6107562A (en) 1998-03-24 2000-08-22 Matsushita Electric Industrial Co., Ltd. Semiconductor thin film, method for manufacturing the same, and solar cell using the same
US6127202A (en) 1998-07-02 2000-10-03 International Solar Electronic Technology, Inc. Oxide-based method of making compound semiconductor films and making related electronic devices
US6323417B1 (en) 1998-09-29 2001-11-27 Lockheed Martin Corporation Method of making I-III-VI semiconductor materials for use in photovoltaic cells
US6150022A (en) 1998-12-07 2000-11-21 Flex Products, Inc. Bright metal flake based pigments
US7057732B2 (en) 1999-01-25 2006-06-06 Amnis Corporation Imaging platform for nanoparticle detection applied to SPR biomolecular interaction analysis
US6103459A (en) * 1999-03-09 2000-08-15 Midwest Research Institute Compounds for use as chemical vapor deposition precursors, thermochromic materials light-emitting diodes, and molecular charge-transfer salts and methods of making these compounds
US6245849B1 (en) 1999-06-02 2001-06-12 Sandia Corporation Fabrication of ceramic microstructures from polymer compositions containing ceramic nanoparticles
JP2001044464A (en) 1999-07-28 2001-02-16 Asahi Chem Ind Co Ltd METHOD OF FORMING Ib-IIIb-VIb2 COMPOUND SEMICONDUCTOR LAYER AND MANUFACTURE OF THIN-FILM SOLAR CELL
US6593690B1 (en) 1999-09-03 2003-07-15 3M Innovative Properties Company Large area organic electronic devices having conducting polymer buffer layers and methods of making same
US8497131B2 (en) 1999-10-06 2013-07-30 Becton, Dickinson And Company Surface enhanced spectroscopy-active composite nanoparticles comprising Raman-active reporter molecules
WO2001037324A1 (en) 1999-11-16 2001-05-25 Midwest Research Institute A NOVEL PROCESSING APPROACH TOWARDS THE FORMATION OF THIN-FILM Cu(In,Ga)Se¿2?
US6454886B1 (en) 1999-11-23 2002-09-24 Technanogy, Llc Composition and method for preparing oxidizer matrix containing dispersed metal particles
US20050268962A1 (en) 2000-04-27 2005-12-08 Russell Gaudiana Flexible Photovoltaic cells, systems and methods
US20030192584A1 (en) 2002-01-25 2003-10-16 Konarka Technologies, Inc. Flexible photovoltaic cells and modules formed using foils
US6660381B2 (en) 2000-11-03 2003-12-09 William Marsh Rice University Partial coverage metal nanoshells and method of making same
JP3473601B2 (en) 2000-12-26 2003-12-08 株式会社デンソー Printed circuit board and method of manufacturing the same
FR2820241B1 (en) 2001-01-31 2003-09-19 Saint Gobain TRANSPARENT SUBSTRATE PROVIDED WITH AN ELECTRODE
US7537955B2 (en) 2001-04-16 2009-05-26 Basol Bulent M Low temperature nano particle preparation and deposition for phase-controlled compound film formation
WO2002084708A2 (en) 2001-04-16 2002-10-24 Basol Bulent M Method of forming semiconductor compound film for fabrication of electronic device and film produced by same
US7842882B2 (en) 2004-03-01 2010-11-30 Basol Bulent M Low cost and high throughput deposition methods and apparatus for high density semiconductor film growth
WO2003007386A1 (en) 2001-07-13 2003-01-23 Midwest Research Institute Thin-film solar cell fabricated on a flexible metallic substrate
US6897603B2 (en) 2001-08-24 2005-05-24 Si Diamond Technology, Inc. Catalyst for carbon nanotube growth
TW560102B (en) * 2001-09-12 2003-11-01 Itn Energy Systems Inc Thin-film electrochemical devices on fibrous or ribbon-like substrates and methd for their manufacture and design
US6593213B2 (en) 2001-09-20 2003-07-15 Heliovolt Corporation Synthesis of layers, coatings or films using electrostatic fields
US6736986B2 (en) 2001-09-20 2004-05-18 Heliovolt Corporation Chemical synthesis of layers, coatings or films using surfactants
US6881647B2 (en) 2001-09-20 2005-04-19 Heliovolt Corporation Synthesis of layers, coatings or films using templates
US6500733B1 (en) 2001-09-20 2002-12-31 Heliovolt Corporation Synthesis of layers, coatings or films using precursor layer exerted pressure containment
US6559372B2 (en) 2001-09-20 2003-05-06 Heliovolt Corporation Photovoltaic devices and compositions for use therein
US6787012B2 (en) 2001-09-20 2004-09-07 Helio Volt Corp Apparatus for the synthesis of layers, coatings or films
US7019208B2 (en) * 2001-11-20 2006-03-28 Energy Photovoltaics Method of junction formation for CIGS photovoltaic devices
FR2832328B1 (en) 2001-11-20 2004-10-29 Centre Nat Rech Scient HETEROGENIC CATALYST COMPOSED OF AN AGGREGATE OF METALLIZED NANOPARTICLES
US7022303B2 (en) * 2002-05-13 2006-04-04 Rutgers, The State University Single-crystal-like materials
US20050194038A1 (en) 2002-06-13 2005-09-08 Christoph Brabec Electrodes for optoelectronic components and the use thereof
US6852920B2 (en) * 2002-06-22 2005-02-08 Nanosolar, Inc. Nano-architected/assembled solar electricity cell
US7291782B2 (en) 2002-06-22 2007-11-06 Nanosolar, Inc. Optoelectronic device and fabrication method
US7253017B1 (en) 2002-06-22 2007-08-07 Nanosolar, Inc. Molding technique for fabrication of optoelectronic devices
US8071168B2 (en) 2002-08-26 2011-12-06 Nanoink, Inc. Micrometric direct-write methods for patterning conductive material and applications to flat panel display repair
WO2004032189A2 (en) 2002-09-30 2004-04-15 Miasolé Manufacturing apparatus and method for large-scale production of thin-film solar cells
US6992202B1 (en) * 2002-10-31 2006-01-31 Ohio Aerospace Institute Single-source precursors for ternary chalcopyrite materials, and methods of making and using the same
AU2003287618A1 (en) 2002-11-12 2004-06-03 Nanoink, Inc. Methods and apparatus for ink delivery to nanolithographic probe systems
US7605327B2 (en) 2003-05-21 2009-10-20 Nanosolar, Inc. Photovoltaic devices fabricated from nanostructured template
GB2403724A (en) 2003-07-11 2005-01-12 Qinetiq Ltd Thermal infrared reflective coatings
US20050175836A1 (en) 2003-11-12 2005-08-11 Xmx Corporation Physical color new concepts for color pigments
US20050150789A1 (en) 2003-12-10 2005-07-14 Crane Larry A. Display and storage device
US20070163639A1 (en) 2004-02-19 2007-07-19 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from microflake particles
US7605328B2 (en) 2004-02-19 2009-10-20 Nanosolar, Inc. Photovoltaic thin-film cell produced from metallic blend using high-temperature printing
US7115304B2 (en) 2004-02-19 2006-10-03 Nanosolar, Inc. High throughput surface treatment on coiled flexible substrates
US7700464B2 (en) 2004-02-19 2010-04-20 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from nanoflake particles
US20070169813A1 (en) 2004-02-19 2007-07-26 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from microflake particles
US8623448B2 (en) 2004-02-19 2014-01-07 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from chalcogenide microflake particles
US20070169810A1 (en) 2004-02-19 2007-07-26 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer by use of chalcogen-containing vapor
US20070163642A1 (en) 2004-02-19 2007-07-19 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from inter-metallic microflake articles
US20070169812A1 (en) 2004-02-19 2007-07-26 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer from nanoflake particles
US20070163643A1 (en) 2004-02-19 2007-07-19 Nanosolar, Inc. High-throughput printing of chalcogen layer and the use of an inter-metallic material
US7604843B1 (en) 2005-03-16 2009-10-20 Nanosolar, Inc. Metallic dispersion
US20070163640A1 (en) 2004-02-19 2007-07-19 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer by use of chalcogen-rich chalcogenides
US20070163638A1 (en) 2004-02-19 2007-07-19 Nanosolar, Inc. Photovoltaic devices printed from nanostructured particles
US8048477B2 (en) 2004-02-19 2011-11-01 Nanosolar, Inc. Chalcogenide solar cells
US20070166453A1 (en) 2004-02-19 2007-07-19 Nanosolar, Inc. High-throughput printing of chalcogen layer
US8309163B2 (en) 2004-02-19 2012-11-13 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer by use of chalcogen-containing vapor and inter-metallic material
US20080124831A1 (en) 2004-02-19 2008-05-29 Robinson Matthew R High-throughput printing of semiconductor precursor layer from chalcogenide particles
US20070169809A1 (en) 2004-02-19 2007-07-26 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer by use of low-melting chalcogenides
US20070163383A1 (en) 2004-02-19 2007-07-19 Nanosolar, Inc. High-throughput printing of nanostructured semiconductor precursor layer
US20070169811A1 (en) 2004-02-19 2007-07-26 Nanosolar, Inc. High-throughput printing of semiconductor precursor layer by use of thermal and chemical gradients
EP1749309A2 (en) 2004-03-15 2007-02-07 Bulent M. Basol Technique and apparatus for depositing thin layers of semiconductors for solar cell fabricaton
US7736940B2 (en) 2004-03-15 2010-06-15 Solopower, Inc. Technique and apparatus for depositing layers of semiconductors for solar cell and module fabrication
US20050247340A1 (en) 2004-04-19 2005-11-10 Zeira Eitan C All printed solar cell array
US7227066B1 (en) * 2004-04-21 2007-06-05 Nanosolar, Inc. Polycrystalline optoelectronic devices based on templating technique
DE102004024461A1 (en) 2004-05-14 2005-12-01 Konarka Technologies, Inc., Lowell Device and method for producing an electronic component with at least one active organic layer
US7601331B2 (en) 2004-11-10 2009-10-13 National University Of Singapore NIR-sensitive nanoparticle
US7507495B2 (en) 2004-12-22 2009-03-24 Brookhaven Science Associates, Llc Hydrogen absorption induced metal deposition on palladium and palladium-alloy particles
US7582506B2 (en) 2005-03-15 2009-09-01 Solopower, Inc. Precursor containing copper indium and gallium for selenide (sulfide) compound formation
US7666494B2 (en) 2005-05-04 2010-02-23 3M Innovative Properties Company Microporous article having metallic nanoparticle coating
WO2007011742A2 (en) 2005-07-14 2007-01-25 Konarka Technologies, Inc. Cigs photovoltaic cells
US20070111367A1 (en) 2005-10-19 2007-05-17 Basol Bulent M Method and apparatus for converting precursor layers into photovoltaic absorbers
US20070093006A1 (en) 2005-10-24 2007-04-26 Basol Bulent M Technique For Preparing Precursor Films And Compound Layers For Thin Film Solar Cell Fabrication And Apparatus Corresponding Thereto
US7833821B2 (en) 2005-10-24 2010-11-16 Solopower, Inc. Method and apparatus for thin film solar cell manufacturing
US7713773B2 (en) 2005-11-02 2010-05-11 Solopower, Inc. Contact layers for thin film solar cells employing group IBIIIAVIA compound absorbers
US20070178620A1 (en) 2006-02-02 2007-08-02 Basol Bulent M Method of Forming Copper Indium Gallium Containing Precursors And Semiconductor Compound Layers
US20080280030A1 (en) 2007-01-31 2008-11-13 Van Duren Jeoren K J Solar cell absorber layer formed from metal ion precursors
US20090260670A1 (en) * 2008-04-18 2009-10-22 Xiao-Chang Charles Li Precursor ink for producing IB-IIIA-VIA semiconductors

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6126740A (en) * 1995-09-29 2000-10-03 Midwest Research Institute Solution synthesis of mixed-metal chalcogenide nanoparticles and spray deposition of precursor films
US6946597B2 (en) * 2002-06-22 2005-09-20 Nanosular, Inc. Photovoltaic devices fabricated by growth from porous template
US20050183767A1 (en) * 2004-02-19 2005-08-25 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US20080138501A1 (en) * 2004-02-19 2008-06-12 Dong Yu Solution-based fabrication of photovoltaic cell
US20080142084A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
US20080142083A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
US20080142081A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
US20080142080A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
US7663057B2 (en) * 2004-02-19 2010-02-16 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US7306823B2 (en) * 2004-09-18 2007-12-11 Nanosolar, Inc. Coated nanoparticles and quantum dots for solution-based fabrication of photovoltaic cells
US20080051122A1 (en) * 2005-12-31 2008-02-28 Mobile Candy Dish, Inc. Method and system for transmitting data between a server and a mobile communication device using short message service (sms)

Cited By (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10374109B2 (en) 2001-05-25 2019-08-06 President And Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
US20080142083A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
US20080135811A1 (en) * 2004-02-19 2008-06-12 Dong Yu Solution-based fabrication of photovoltaic cell
US20080138501A1 (en) * 2004-02-19 2008-06-12 Dong Yu Solution-based fabrication of photovoltaic cell
US20080142084A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
US8038909B2 (en) * 2004-02-19 2011-10-18 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US20080142081A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
US20080213467A1 (en) * 2004-02-19 2008-09-04 Dong Yu Solution-based fabrication of photovoltaic cell
US20100267189A1 (en) * 2004-02-19 2010-10-21 Dong Yu Solution-based fabrication of photovoltaic cell
US20080142072A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
US20080142080A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
US8168089B2 (en) * 2004-02-19 2012-05-01 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US8182721B2 (en) * 2004-02-19 2012-05-22 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US8846141B1 (en) 2004-02-19 2014-09-30 Aeris Capital Sustainable Ip Ltd. High-throughput printing of semiconductor precursor layer from microflake particles
US8366973B2 (en) * 2004-02-19 2013-02-05 Nanosolar, Inc Solution-based fabrication of photovoltaic cell
US8206616B2 (en) * 2004-02-19 2012-06-26 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US8182720B2 (en) * 2004-02-19 2012-05-22 Nanosolar, Inc. Solution-based fabrication of photovoltaic cell
US10361083B2 (en) * 2004-09-24 2019-07-23 President And Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
US20160005608A1 (en) * 2004-09-24 2016-01-07 President & Fellows Of Harvard College Femtosecond Laser-Induced Formation Of Submicrometer Spikes On A Semiconductor Substrate
US10741399B2 (en) 2004-09-24 2020-08-11 President And Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
US8067262B2 (en) * 2009-08-04 2011-11-29 Precursor Energetics, Inc. Polymeric precursors for CAIGS silver-containing photovoltaics
US8465679B2 (en) 2009-08-04 2013-06-18 Precursor Energetics, Inc. Methods for CAIGAS aluminum-containing photovoltaics
US20110030797A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods and articles for aigs silver-containing photovoltaics
US20110034605A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Polymeric precursors for caigs silver-containing photovoltaics
US20110030768A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods for photovoltaic absorbers with controlled group 13 stoichiometry
US20110030755A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods for photovoltaic absorbers with controlled group 11 stoichiometry
US20110030799A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods and materials for cis and cigs photovoltaics
US20110030795A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods and articles for cis and cigs photovoltaics
US20110034667A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Processes for polymeric precursors for aigs silver-containing photovoltaics
US20110031453A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Processes for polymeric precursors for caigas aluminum-containing photovoltaics
US20110041918A1 (en) * 2009-08-04 2011-02-24 Precursor Energetics, Inc. Methods and materials for aigs silver-containing photovoltaics
US20110030581A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Polymeric precursors for aigs silver-containing photovoltaics
US8741182B2 (en) 2009-08-04 2014-06-03 Precursor Energetics, Inc. Methods and materials for AIGS silver-containing photovoltaics
US8721930B2 (en) 2009-08-04 2014-05-13 Precursor Energetics, Inc. Polymeric precursors for AIGS silver-containing photovoltaics
US8715775B2 (en) 2009-08-04 2014-05-06 Precursor Energetics, Inc. Precursors and uses for CIS and CIGS photovoltaics
US8617431B2 (en) 2009-08-04 2013-12-31 Precursor Energetics, Inc. Selenolate inks and precursors for photovoltaics
US8591775B2 (en) 2009-08-04 2013-11-26 Precursor Energetics, Inc. Methods and articles for CIS and CIGS photovoltaics
US20110030788A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods for caigas aluminum-containing photovoltaics
US20110031444A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Polymeric precursors for cis and cigs photovoltaics
US20110031445A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Processes for polymeric precursors for caigs silver-containing photovoltaics
US8067626B2 (en) * 2009-08-04 2011-11-29 Precursor Energetics, Inc. Processes for polymeric precursors for CAIGS silver-containing photovoltaics
US20110030798A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods and articles for caigas aluminum-containing photovoltaics
US8158033B2 (en) 2009-08-04 2012-04-17 Precursor Energetics, Inc. Polymeric precursors for CAIGAS aluminum-containing photovoltaics
US20110030784A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods and materials for caigs silver-containing photovoltaics
US8168090B2 (en) 2009-08-04 2012-05-01 Precursor Energetics, Inc. Processes for polymeric precursors for CIS and CIGS photovoltaics
US20110030582A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Polymeric precursors for caigas aluminum-containing photovoltaics
US20110030786A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods for cis and cigs photovoltaics
US20110030787A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods for aigs silver-containing photovoltaics
US20110030796A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods and articles for caigs silver-containing photovoltaics
US8318050B2 (en) 2009-08-04 2012-11-27 Precursor Energetics, Inc. Processes for polymeric precursors for caigas aluminum-containing photovoltaics
US20110034640A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Processes for polymeric precursors for cis and cigs photovoltaics
US20110030800A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods for caigs silver-containing photovoltaics
US8440114B2 (en) 2009-08-04 2013-05-14 Precursor Energetics, Inc. Methods and materials for CAIGAS aluminum-containing photovoltaics
US8449793B2 (en) 2009-08-04 2013-05-28 Precursor Energetics, Inc. Methods and articles for CAIGAS aluminum-containing photovoltaics
US20110030785A1 (en) * 2009-08-04 2011-02-10 Precursor Energetics, Inc. Methods and materials for caigas aluminum-containing photovoltaics
US8497390B2 (en) 2009-08-04 2013-07-30 Precursor Energetics, Inc. Methods and articles for CAIGS silver-containing photovoltaics
US8512603B2 (en) 2009-08-04 2013-08-20 Precursor Energetics, Inc. Polymeric precursors for CIS and CIGS photovoltaics
US8545734B2 (en) 2009-08-04 2013-10-01 Precursor Energetics, Inc. Methods for photovoltaic absorbers with controlled group 13 stoichiometry
US8585932B2 (en) 2009-08-04 2013-11-19 Precursor Energetics, Inc. Methods and articles for AIGS silver-containing photovoltaics
US8585933B2 (en) 2009-08-04 2013-11-19 Precursor Energetics, Inc. Methods for AIGS silver-containing photovoltaics
US8585936B2 (en) 2009-08-04 2013-11-19 Precursor Energetics, Inc. Methods for photovoltaic absorbers with controlled group 11 stoichiometry
US20110146790A1 (en) * 2009-12-17 2011-06-23 Precursor Energetics, Inc. Molecular precursor methods for optoelectronics
US8628696B2 (en) 2009-12-17 2014-01-14 Precursor Energetics, Inc. Molecular precursors for optoelectronics
US20110146764A1 (en) * 2009-12-17 2011-06-23 Precursor Energetics, Inc. Molecular precursor methods and articles for optoelectronics
US8715537B2 (en) 2009-12-17 2014-05-06 Precursor Energetics, Inc. Molecular precursor methods and materials for optoelectronics
US20110146532A1 (en) * 2009-12-17 2011-06-23 Precursor Energetics, Inc. Molecular precursors for optoelectronics
US20110146789A1 (en) * 2009-12-17 2011-06-23 Precursor Energetics, Inc. Molecular precursor methods and materials for optoelectronics
WO2011084770A1 (en) * 2009-12-21 2011-07-14 Alion, Inc. Methods for making thin film polycrystalline photovoltaic devices using additional chemical element and products thereof
US20110189813A1 (en) * 2010-01-29 2011-08-04 Jenn Feng New Energy Co., Ltd. Method for fabricating copper/indium/gallium/selenium solar cell by wet process under non-vacuum condition
US8026124B2 (en) * 2010-01-29 2011-09-27 Jenn Feng New Energy Co., Ltd. Method for fabricating copper/indium/gallium/selenium solar cell by wet process under non-vacuum condition
US20110132448A1 (en) * 2010-02-08 2011-06-09 Suniva, Inc. Solar cells and methods of fabrication thereof
US8241945B2 (en) 2010-02-08 2012-08-14 Suniva, Inc. Solar cells and methods of fabrication thereof
US10229951B2 (en) 2010-04-21 2019-03-12 Sionyx, Llc Photosensitive imaging devices and associated methods
US9130084B2 (en) 2010-05-21 2015-09-08 Alliance for Substainable Energy, LLC Liquid precursor for deposition of copper selenide and method of preparing the same
US10505054B2 (en) 2010-06-18 2019-12-10 Sionyx, Llc High speed photosensitive devices and associated methods
US9142408B2 (en) 2010-08-16 2015-09-22 Alliance For Sustainable Energy, Llc Liquid precursor for deposition of indium selenide and method of preparing the same
US8828782B2 (en) 2010-09-15 2014-09-09 Precursor Energetics, Inc. Annealing processes for photovoltaics
US8883550B2 (en) 2010-09-15 2014-11-11 Precursor Energetics, Inc. Deposition processes for photovoltaic devices
US8828787B2 (en) 2010-09-15 2014-09-09 Precursor Energetics, Inc. Inks with alkali metals for thin film solar cell processes
US10269861B2 (en) 2011-06-09 2019-04-23 Sionyx, Llc Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
US10244188B2 (en) 2011-07-13 2019-03-26 Sionyx, Llc Biometric imaging devices and associated methods
JP2013082578A (en) * 2011-10-07 2013-05-09 Dowa Electronics Materials Co Ltd Indium selenide particle powder, and method for producing the same
US9105797B2 (en) 2012-05-31 2015-08-11 Alliance For Sustainable Energy, Llc Liquid precursor inks for deposition of In—Se, Ga—Se and In—Ga—Se
US10347682B2 (en) 2013-06-29 2019-07-09 Sionyx, Llc Shallow trench textured regions and associated methods
US11069737B2 (en) 2013-06-29 2021-07-20 Sionyx, Llc Shallow trench textured regions and associated methods

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US20080142084A1 (en) 2008-06-19
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US8088309B2 (en) 2012-01-03
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US20080142082A1 (en) 2008-06-19
US7663057B2 (en) 2010-02-16
US8206616B2 (en) 2012-06-26
US8366973B2 (en) 2013-02-05
US8168089B2 (en) 2012-05-01
US20080142081A1 (en) 2008-06-19
US8038909B2 (en) 2011-10-18
US8182720B2 (en) 2012-05-22
US20080142083A1 (en) 2008-06-19
US20080142072A1 (en) 2008-06-19
US20080135812A1 (en) 2008-06-12
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US20080142080A1 (en) 2008-06-19
US20050183767A1 (en) 2005-08-25
US8182721B2 (en) 2012-05-22
US20080213467A1 (en) 2008-09-04

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