CN105489673A - Method for preparing copper-indium sulfide photoelectric thin film by chloride system through two-step method - Google Patents

Method for preparing copper-indium sulfide photoelectric thin film by chloride system through two-step method Download PDF

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CN105489673A
CN105489673A CN201510943184.XA CN201510943184A CN105489673A CN 105489673 A CN105489673 A CN 105489673A CN 201510943184 A CN201510943184 A CN 201510943184A CN 105489673 A CN105489673 A CN 105489673A
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film
thin film
parts
precursor thin
hydrazine hydrate
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刘科高
李静
刘慧�
徐勇
石磊
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Shandong Jianzhu University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/032Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • H01L31/0322Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention discloses a method for preparing a copper-indium sulfide photoelectric thin film by a chloride system through a two-step method, and belongs to the preparation technical field of a thin film for a solar cell. The preparation method comprises the following steps of cleaning a stannic oxide conductive glass substrate; putting C6H5Na3O7.2H2O, CuCl2.2H2O, InCl3, and Na2S2O3.5H2O into distilled water; obtaining a precursor thin film by adopting an electrodeposition method on the conductive glass substrate; naturally drying, and putting into a tube furnace added with hydrazine hydrate to enable the precursor thin film product not to be in contact with hydrazine hydrate, wherein hydrazine hydrate is added with sublimed sulfur powder; heating in the sealed tube furnace to enable the precursor thin film to be vulcanized, and finally taking out the sample and drying the sample to obtain the copper-indium sulfide photoelectric thin film. The preparation method does not require a high vacuum condition, and is low in instrument equipment requirement, low in production cost, high in production efficiency and easy to operate; the obtained copper-indium sulfide photoelectric thin film is relatively high in continuity and uniformity; the main phase adopts a CuInS2 phase, so that the low-cost and large-scale industrial production can be realized.

Description

A kind of chloride system two-step method prepares the method for copper indium sulphur optoelectronic film
Technical field
The invention belongs to optoelectronic film preparing technical field used for solar batteries, particularly relate to a kind of method that chloride system two-step method prepares copper indium sulphur optoelectronic film.
Background technology
Along with society and expanding economy; the pollution that energy scarcity and consuming energy bring has become the outstanding problem in domestic social development; coal, oil etc. are non-renewable resources, therefore develop clean reproducible energy to protection of the environment, ensure sustainable economic development and construct harmonious society have important meaning.Photovoltaic generation have safe and reliable, noiseless, pollution-free, restriction less, the advantage such as failure rate is low, easy maintenance, can utilize the regenerative resource of this clean, safety of solar energy and environmental protection, therefore the research and development of solar cell comes into one's own day by day in recent decades.
Copper indium sulfenyl thin-film solar cells can think one of the most promising hull cell at present, this is because its absorbed layer material C uInS 2there is a series of advantage: (1) CuInS 2it is direct gap semiconductor.(2) at room temperature CuInS 2energy gap be 1.50eV, be the best energy gap required in solar cell, this respect is better than CuInSe 2(1.04eV).(3) CuInS 2not containing any toxic component.(4) CuInS 2the absorption coefficient of light is very large, and conversion efficiency is high, stable performance, and film thickness is little, about 2 μm, and the price of sulphur is lower.(5) at CuInS 2adulterate in basis other element, as made Ga or Al part replace In atom, replacing S, be namely prepared into Cu (In by Se part 1-xga x) Se 2, Cu (In 1-xga x) (Se 2-ys y), Cu (In 1-xal x) (Se 2-xs x), its crystal structure remains chalcopyrite.Change the atomic ratio of wherein Ga/ (Ga+In) etc., its energy gap can be made to change between 1.04 ~ 1.72eV, comprise bandgap range 1.4 ~ 1.6eV that high efficiency absorbs sunlight.(6) capability of resistance to radiation is strong, does not have photo attenuation effect, thus long service life.(7) lattice structure of P type CIGS material can be mated with common N-type window material (as CdS, ZnO) with electron affinity.
Current CuInS 2preparation method mainly contain solvent-thermal method, spray pyrolysis method, electrochemical deposition method, chemical deposition, chemical vapour deposition (CVD), molecular beam epitaxy, reactive sputtering, vacuum vapor deposition method, sputtered alloy layers after cure method etc.Wherein, evaporation and sputtering method Technical comparing maturation, photoelectric conversion efficiency is high, has realized industrialization operation.But these two kinds of methods all need vacuum equipment, and preparation cost is higher, and can not the solar energy film of depositing large-area, raw-material utilance is lower.Electro-deposition cost is low, easily realizes large-area film deposition, also there are some problems simultaneously, and such as Cu, In, S tri-kinds of element potential value differences are comparatively large, are difficult to realize codeposition, and find at preparation CuInS 2time film quality poor, hole is many, element sulphur film more difficult to get access, and chemical composition is difficult to the problems such as control, be difficult to directly obtain pure phase.Therefore suitable electrodeposition technology is selected to prepare the pure phase CuInS of uniform compact 2film becomes the important topic with novelty.
Method is the same as previously described, and other method also has different defects.Related to the present invention also has as Publication about Document:
[1]S.Lugo,I.López,Y.Pe?a,M.Calixto,T.Hernández,S.Messina,D.Avellaneda,CharacterizationofCuInS 2thinfilmspreparedbychemicalbathdepositionandtheirimplementationinasolarcell,ThinSolidFilms569(2014)76–80.
Essentially describe and prepare In respectively with chemical deposition 2s 3with CuS film, after-baking obtains CuInS 2film, and its performance is characterized.
[2]ZhaominHao,YongCui,GangWang,ColloidalsynthesisofwurtziteCuInS 2nanocrystalsandtheirphotovoltaicapplication,MaterialsLetters146(2015)77–80.
Essentially describe and prepare buergerite CuInS by colloid synthetic method 2nanocrystal, is studied its crystal structure and photoelectric properties.
[3]S.MostafaHosseinpour-Mashkani,MasoudSalavati-Niasari,FatemehMohandes,K.Venkateswara-Rao,CuInS 2nanoparticles:Microwave-assistedsynthesis,characterization,andphotovoltaicmeasurements,MaterialsScienceinSemiconductorProcessing16(2013)390–402.
Main description microwave assisting method prepares CuInS 2the research of nano particle and photoelectric properties thereof.
[4]S.M.Hosseinpour-Mashkani,M.Salavati-Niasari,F.Mohandes,CuInS 2nanostructures:Synthesis,characterization,formationmechanismandsolarcellapplications,JournalofIndustrialandEngineeringChemistry20(2014)3800–3807.
Main description microwave assisting method prepares chalcopyrite CuInS 2nano particle, and performance characterization and formation mechanism study have been carried out to it.
[5]XiaofengWu,YaohanHuang,QiqiBai,QingfeiFan,GuangliLi,XimeiFan,ChaoliangZhang,HongLiu,InvestigationofCuInS 2thinfilmsdepositedonFTObyone-potsolvothermalsynthesis,MaterialsScienceinSemiconductorProcessing37(2015)250–258.
Essentially describe the CuInS that solvent-thermal process legal system is standby 2the performance of film.
[6]A.Shanmugavel,K.Srinivasan,K.R.Murali,Pulseelectrodepositedcopperindiumsulphoselenidefilmsandtheirproperties,MaterialsScienceinSemiconductorProcessing16(2013)1665–1671.
Essentially describe pulse electrodeposition legal system for CuIn (S, Se) 2film, and stuctures and properties difference when have studied different sulfur content.
[7]HsiangChen,Yih-MinYeh,ChuanHaoLiao,JianZhiChen,Chau-leWang,RemovalofCuSphasesfromelectrodepositedCuInS 2films,CeramicsInternational40(2014)67–72.
Essentially describe the CuInS adopting two-step thermal processing removal electro-deposition to prepare 2cuS phase in film has also carried out pattern and constituent analysis.
[8]M.A.MajeedKhan,SushilKumar,MohamadS.AlSalhi,SynthesisandcharacteristicsofspraydepositedCuInS 2nanocrystalsthinfilmsforphotovoltaicapplications,MaterialsResearchBulletin48(2013)4277–4282.
Main description sputtering method prepares CuInS 2film also characterizes with FESEM, FETEM, HRTEM, AFM, XRD etc.
[9]D.Abdelkader,N.Khemiri,M.Kanzari,TheeffectofannealingonthephysicalpropertiesofthermallyevaporatedCuIn 2n+1S 3n+2thinfilms(n=0,1,2and3),MaterialsScienceinSemiconductorProcessing16(2013)1997–2004.
Essentially describe the CuIn that annealing process is prepared thermal evaporation 2n+1s 3n+2the impact of (n=0,1,2and3) film performance.
[10] Ma Jianping, Gao Yang, Cu-In initialization layer after cure legal system is for CuInS 2film, solar energy journal 0254-0096 (2013) 06-1010-05.
Main description adopts pulsed magnetron sputtering legal system to obtain CuInS for the after cure of Cu-In metal preformed layer 2film.
Summary of the invention
The present invention is in order to solve existing preparation CuInS 2film Problems existing, has invented a kind of method that chloride system two-step method prepares copper indium sulphur optoelectronic film.
The present invention adopts electro-deposition after cure legal system for copper-indium-sulfur film, adopts tin dioxide conductive glass to be substrate, with CuCl 22H 2o, InCl 3, Na 2s 2o 35H 2o is raw material, with C 6h 5na 3o 72H 2o is complexing agent, take distilled water as solvent, by fixed molar ratio preparation electric depositing solution, transistor potentiostat is first adopted to prepare precursor thin-film under certain potentials and time, take hydrazine hydrate as reducing agent, in hydrazine hydrate, add sublimed sulfur powder ensure sulphur atmosphere, heat in airtight tube type stove, make precursor thin-film sulfuration and obtain target product.
Concrete preparation method of the present invention comprises the step of following order:
A. carrying out the cleaning of tin dioxide conductive glass substrate, is that volume ratio acetone put into by the glass of 20mm × 20mm by size: the solution of distilled water=5:1, Ultrasonic Cleaning 30min; Again substrate is put into ethanol, Ultrasonic Cleaning 30min; In distilled water, glass substrate is used sonic oscillation 30min again; Being emitted in glass dish by glass substrate obtained above sends in baking oven, dries for masking at 100 DEG C.
B. by C 6h 5na 3o 72H 2o, CuCl 22H 2o, InCl 3, Na 2s 2o 35H 2o puts into distilled water, obtains uniform and stable electric depositing solution.Specifically, can by 1.0 ~ 2.0 parts of C 6h 5na 3o 72H 2o, 4.5 ~ 9.0 parts of CuCl 22H 2o, 6.0 ~ 12.0 parts of InCl 3, 65.0 ~ 130.0 parts of Na 2s 2o 35H 2o puts into the distilled water of 2700.0 ~ 5400.0 parts, makes the substance dissolves in solution.
C. electric depositing solution described in step b is poured in three electrode assemblies, take saturated calomel electrode as reference electrode, platinum electrode is auxiliary electrode, tin dioxide conductive glass is Electrode, adopt transistor potentiostat normal temperature deposit film under sedimentation potential is-1.0V, sedimentation time is 30min, and natural drying obtains precursor thin-film sample.
D. be placed on support by step c gained precursor thin-film sample, in hydrazine hydrate, add sublimed sulfur powder, precursor thin-film sample does not contact with hydrazine hydrate, and precursor thin-film and hydrazine hydrate are put into tube furnace.It is 40.0 ~ 50.0 parts that hydrazine hydrate is put into, and sublimed sulfur powder is 1.0 ~ 2.0 parts.By between diamond heating to 250 ~ 400 DEG C, temperature retention time 3 ~ 9h, then cool to room temperature takes out.
E., by steps d gains, after making its normal temperature natural drying, copper indium sulphur optoelectronic film is namely obtained.
The present invention does not need high vacuum condition, and require low to instrument and equipment, production cost is low, and production efficiency is high, is easy to operation.Gained copper indium sulphur optoelectronic film has good continuity and uniformity, and principal phase is CuInS 2phase, can realize low cost large-scale industrial production.
Embodiment
Embodiment 1
A. the cleaning of tin dioxide conductive glass substrate: carry out cleaning glass substrate as previously mentioned, substrate size is 20mm × 20mm.
B. by 1.0 parts of C 6h 5na 3o 72H 2o, 4.5 parts of CuCl 22H 2o, 6.0 parts of InCl 3, 65.0 parts of Na 2s 2o 35H 2o puts into the distilled water of 2700.0 parts, makes the substance dissolves in solution.
C. above-mentioned electric depositing solution is poured in three electrode assemblies, take saturated calomel electrode as reference electrode, platinum electrode is auxiliary electrode, tin dioxide conductive glass is Electrode, adopt transistor potentiostat normal temperature deposit film under sedimentation potential is-1.0V, sedimentation time is 30min, and natural drying obtains precursor thin-film sample.
D. be placed on support by precursor thin-film sample, add sublimed sulfur powder in hydrazine hydrate, precursor thin-film sample does not contact with hydrazine hydrate, and precursor thin-film and hydrazine hydrate are put into tube furnace.It is 40.0 parts that hydrazine hydrate is put into, and sublimed sulfur powder is 1.0 parts.By diamond heating to 350 DEG C, temperature retention time 6h, then cool to room temperature takes out.
E. by steps d gains, carry out normal temperature natural drying, obtain copper indium sulphur optoelectronic film.

Claims (4)

1. chloride system two-step method prepares a method for copper indium sulphur optoelectronic film, comprises the step of following order:
A. the cleaning of tin dioxide conductive glass substrate;
B. by 1.0 ~ 2.0 parts of C 6h 5na 3o 72H 2o, 4.5 ~ 9.0 parts of CuCl 22H 2o, 6.0 ~ 12.0 parts of InCl 3, 65.0 ~ 130.0 parts of Na 2s 2o 35H 2o puts into the distilled water of 2700.0 ~ 5400.0 parts, makes the substance dissolves in solution;
C. adopt electrodeposition process to be deposited on electro-conductive glass sheet by solution described in step b and obtain precursor thin-film, natural drying, obtain precursor thin-film sample;
D. be placed on support by step c gained precursor thin-film sample, in hydrazine hydrate, add sublimed sulfur powder, precursor thin-film sample does not contact with hydrazine hydrate, and precursor thin-film and hydrazine hydrate are put into tube furnace; By between diamond heating to 250 ~ 400 DEG C, temperature retention time 3 ~ 9h, then cool to room temperature takes out;
E. by steps d gains, carry out natural drying, obtain copper indium sulphur optoelectronic film.
2. a kind of chloride system two-step method as claimed in claim 1 prepares the method for copper indium sulphur optoelectronic film, it is characterized in that, clean described in step a, is be 20mm × 20mm by electro-conductive glass substrate size, put into volume ratio acetone: the solution of distilled water=5:1, Ultrasonic Cleaning 30min; Again substrate is put into ethanol, Ultrasonic Cleaning 30min; In distilled water, glass substrate is used sonic oscillation 30min again; Being emitted in glass dish by glass substrate obtained above sends in baking oven, dries for masking at 100 DEG C.
3. a kind of chloride system two-step method as claimed in claim 1 prepares the method for copper indium sulphur optoelectronic film, it is characterized in that, described in step c, being added by solution in three electrode assemblies, take saturated calomel electrode as reference electrode, and platinum electrode is auxiliary electrode, tin dioxide conductive glass is Electrode, adopt transistor potentiostat normal temperature deposit film under sedimentation potential is-1.0V, sedimentation time is 30min, and natural drying obtains precursor thin-film sample.
4. a kind of chloride system two-step method as claimed in claim 1 prepares the method for copper indium sulphur optoelectronic film, it is characterized in that, puts into 40.0 ~ 50.0 parts of hydrazine hydrates, 1.0 ~ 2.0 parts of sublimed sulfur powder in tube furnace described in steps d.
CN201510943184.XA 2015-12-17 2015-12-17 Method for preparing copper-indium sulfide photoelectric thin film by chloride system through two-step method Pending CN105489673A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108807561A (en) * 2018-07-01 2018-11-13 山东建筑大学 A method of preparing copper and iron sulphur optoelectronic film with chloride
CN108807560A (en) * 2018-07-01 2018-11-13 山东建筑大学 A method of it is assisted preparing copper and iron sulphur optoelectronic film with sulphur powder

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080142072A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
CN102034898A (en) * 2010-10-20 2011-04-27 山东建筑大学 Preparation method of Cu-In-S photoelectric film material for solar cells

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080142072A1 (en) * 2004-02-19 2008-06-19 Dong Yu Solution-based fabrication of photovoltaic cell
CN102034898A (en) * 2010-10-20 2011-04-27 山东建筑大学 Preparation method of Cu-In-S photoelectric film material for solar cells

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
石璐丹: "电沉积制备硫族电池薄膜及其性能研究", 《中国优秀硕士学位论文全文数据库》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108807561A (en) * 2018-07-01 2018-11-13 山东建筑大学 A method of preparing copper and iron sulphur optoelectronic film with chloride
CN108807560A (en) * 2018-07-01 2018-11-13 山东建筑大学 A method of it is assisted preparing copper and iron sulphur optoelectronic film with sulphur powder

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