US20070273989A1 - Substrate Comprising A Fabry-Perot Filter And Method For Application Of The Filter To The Substrate - Google Patents

Substrate Comprising A Fabry-Perot Filter And Method For Application Of The Filter To The Substrate Download PDF

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Publication number
US20070273989A1
US20070273989A1 US10/591,156 US59115604A US2007273989A1 US 20070273989 A1 US20070273989 A1 US 20070273989A1 US 59115604 A US59115604 A US 59115604A US 2007273989 A1 US2007273989 A1 US 2007273989A1
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US
United States
Prior art keywords
substrate
base material
intermediate layer
metal
reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/591,156
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English (en)
Inventor
Gerd Hoffmann
Rainer Ludwig
Hans-Georg Lotz
Gerhard Steiniger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials GmbH and Co KG
Original Assignee
Applied Materials GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials GmbH and Co KG filed Critical Applied Materials GmbH and Co KG
Assigned to APPLIED MATERIALS GMBH & CO. KG reassignment APPLIED MATERIALS GMBH & CO. KG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HOFFMANN, GERD, STEINIGER, GERHARD, LUDWIG, RAINER, LOTZ, HANS-GEORG
Publication of US20070273989A1 publication Critical patent/US20070273989A1/en
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
    • G02B5/0875—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising two or more metallic layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters

Definitions

  • the invention relates to a substrate with a Fabry-Perot filter comprised of at least three layers applied thereon, a first and a second reflecting layer of the filter with their mutually facing reflecting surfaces spaced apart from one another by a gap of thickness d and enclosing a light-transmitting intermediate layer disposed in the gap.
  • Fabry-Perot filters also referred to as Fabry-Perot layers, of this type are, for example, vapor-deposited onto decorative web sheeting.
  • the layer system of the filter is comprised of a metallically reflecting base layer onto which a transparent intermediate SiO layer having a layer thickness between 50 and 2000 nm is applied.
  • the completing layer of the system is formed by a partially light-transmitting reflecting layer of a metal having a thickness between 0.2 and 60 nm. While it is possible to realize interesting color compositions with such layers, with the currently employed techniques they can however only be realized with high production expenditures.
  • the invention consequently addresses the problem of producing a Fabry-Perot filter as the coating of a substrate showing similar color effects as the coatings known up to now, the filter being such that it can be realized with conventional production facilities.
  • the invention furthermore is based upon the problem of demonstrating a method with which such a coating can be applied onto the substrate in a facility with only one vaporization station.
  • the reflecting layers are comprised of the same base material and the intermediate layer is comprised of a chemical compound of this base material with a further material.
  • the base material conventionally involves a metal and the further material oxygen which, via appropriate inlet lines, can be conducted into the evacuated vaporization chamber.
  • the systems and procedures required for this purpose are known.
  • a so-called reactive coating is developed, since the oxygen to some extent combines chemically with the metal atoms or metal ions or molecules in the metal vaporization cloud and, to some extent, is deposited with it on the substrate and only here forms a compound with the metal.
  • the reactions do not run to completion, such that coatings are intentionally developed, which do not absolutely exhibit a stoichiometric distribution of the participating reaction partners.
  • Aluminum can be processed especially simply as the base material, such that the intermediate layer is comprised of an aluminum oxide with the structural formula Al 2 O 3 .
  • nitrogen can also be utilized such that as the intermediate layer a metal-nitrogen compound, or, for example, aluminum nitride, is formed, if the metal is aluminum.
  • the filter material should overall not be transmissible to light. This is attained thereby that the first reflecting layer adjoining the substrate is opaque to light and the outer, second reflecting layer is partially transmissible to light. This is attained through the appropriate thickness of the particular layers. Values to be considered for this purpose are between 50 and 200 nm for the first reflecting layer and for the second reflecting layer between 1 to 20 nm, the intermediate layer having a thickness between 50 to 2000 nm depending on the desired property of the filter.
  • the invention provides a method for the application of a filter comprising the following steps:
  • a vacuum coating facility with only a single vaporization device is capable of carrying out the coating in one evacuation cycle.
  • the facility only needs to be evacuated once. Only after the Fabry-Perot filter comprised of three layers has been completely structured, is the coating facility opened again and the coated substrate removed.
  • the material supply device is comprised of a gas connection with an injection tube with which the gas is conducted into the proximity of the vaporization cloud.
  • the coating facility includes a cooled coating cylinder on which the web is unwound and in the process is coated by the vaporization device disposed beneath the vaporization coating cylinder.
  • the vacuum chamber furthermore includes two stock rolls, the web initially being wound from the first stock roll and wound onto the second stock roll. The two rolls exchange their function for the application of the intermediate layer.
  • the roll wound up in the first pass is unwound again, such that the first roll is filled again.
  • the second reflection layer is applied, with the web being wound from the first roll again and wound onto the second roll.
  • FIG. 1 a typical structure of a Fabry-Perot filter on a substrate
  • FIG. 2 a diagram with the reflection properties of the filter relating to different wavelengths and also as a function of the thickness d of the intermediate layer,
  • FIG. 3 a schematic representation of a vacuum coating facility.
  • FIG. 1 It depicts in cross section. a Fabry-Perot filter 1 on a substrate 2 .
  • the filter 1 is comprised of three layers, namely a first reflection layer 4 of aluminum, an intermediate layer 5 applied thereon of thickness d comprised of aluminum oxide Al 2 O 3 , as well as a second reflection layer 6 applied thereon also comprised of aluminum.
  • the first reflection layer 4 is markedly thicker than the second reflection layer 6 .
  • the first reflection layer 4 is therefore opaque to light while the second outer layer 6 is partially transmissible to light.
  • the two spectra 10 , 11 are each based on a filter in which the first reflecting layer 4 has a thickness of 100 nm and the second reflecting layer 6 a thickness of 10 nm.
  • the thickness of the intermediate layer is 200 nm, such that wavelengths in the range of 530 nm are strongly absorbed, i.e. are not reflected.
  • the other spectrum 11 results which has a reflection minimum for wavelengths around 430 nm.
  • a layer according to the one spectrum 10 consequently has reduced reflection in the green range, such that a marked purple-colored reflection results.
  • For the other spectrum 11 a yellowish-green color reflection results.
  • the coating is applied onto a web by means of a coating facility, as is depicted schematically in FIG. 3 .
  • the facility 20 is comprised of a two-part vacuum chamber 21 with a lower and an upper vacuum chamber 22 , 22 ′, with a vaporization device 23 disposed in the lower chamber 22 .
  • This device may be, for example, a crucible containing the material to be vaporized, which is vaporized in the crucible by means of electron guns not further shown here.
  • the vapor 24 impinges onto a web 25 unwound via a cooled coating cylinder 26 located in an opening in a partitioning wall 27 between the two vacuum chambers 22 , 22 ′.
  • chamber 22 is additionally located an injection tube 28 through which a gas, for example oxygen, can be conducted into the vaporization cloud 24 via an outer connection 29 .
  • chamber 22 ′ are located a first stock roll 30 and a second stock roll 31 .
  • first stock roll 30 is unwound and the web wound onto the second stock roll 31 .
  • material for example aluminum
  • vaporizing in the crucible is applied onto the web.
  • the layer thickness is therein primarily determined by the transport rate of the web.
  • second pass the winding process is reversed.
  • Web 25 is wound from the second stock roll 31 and transferred back again onto the first stock roll 30 .
  • oxygen is introduced via the injection tube 28 into the vaporization cloud 24 .
  • Onto the vaporization cloud 24 a microwave field can additionally be superimposed.
  • the oxygen combines with the vaporized metal atoms and together with them is deposited on the first reflection layer 4 as the intermediate layer 5 .
  • the chemical combination to form aluminum oxide occurs to some extent only after both materials have been deposited as a layer. This process is also denoted as reactive coating.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)
  • Physical Vapour Deposition (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
US10/591,156 2004-03-01 2004-03-01 Substrate Comprising A Fabry-Perot Filter And Method For Application Of The Filter To The Substrate Abandoned US20070273989A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/DE2004/000392 WO2005085780A1 (fr) 2004-03-01 2004-03-01 Substrat pourvu d'un filtre fabry-perot et procede pour appliquer ce filtre sur ledit substrat

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2004/000392 A-371-Of-International WO2005085780A1 (fr) 2004-03-01 2004-03-01 Substrat pourvu d'un filtre fabry-perot et procede pour appliquer ce filtre sur ledit substrat

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/964,311 Division US8323734B2 (en) 2004-03-01 2010-12-09 Method for the application of a filter on a web

Publications (1)

Publication Number Publication Date
US20070273989A1 true US20070273989A1 (en) 2007-11-29

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US10/591,156 Abandoned US20070273989A1 (en) 2004-03-01 2004-03-01 Substrate Comprising A Fabry-Perot Filter And Method For Application Of The Filter To The Substrate
US12/964,311 Active 2024-08-06 US8323734B2 (en) 2004-03-01 2010-12-09 Method for the application of a filter on a web

Family Applications After (1)

Application Number Title Priority Date Filing Date
US12/964,311 Active 2024-08-06 US8323734B2 (en) 2004-03-01 2010-12-09 Method for the application of a filter on a web

Country Status (8)

Country Link
US (2) US20070273989A1 (fr)
EP (1) EP1660848B1 (fr)
JP (1) JP2007527553A (fr)
CN (1) CN1942744A (fr)
AT (1) ATE508348T1 (fr)
DE (2) DE112004002818D2 (fr)
TW (1) TWI250553B (fr)
WO (1) WO2005085780A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130273329A1 (en) * 2012-03-19 2013-10-17 Patrick Goegebeur Multi-step process for fully coloured construction elements

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2067063A1 (fr) * 2006-09-22 2009-06-10 Alcan Technology & Management Ltd. Substrats munis de caractéristiques de sécurité et procédé pour leur fabrication
CN102798917B (zh) 2011-05-25 2015-02-25 苏州大学 一种彩色图像制作方法及使用该方法制作的彩色滤光片

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2590906A (en) * 1946-11-22 1952-04-01 Farrand Optical Co Inc Reflection interference filter
US3011383A (en) * 1957-04-30 1961-12-05 Carpenter L E Co Decorative optical material
US5182670A (en) * 1991-08-30 1993-01-26 Apa Optics, Inc. Narrow band algan filter
US5363398A (en) * 1993-09-30 1994-11-08 At&T Bell Laboratories Absorption resonant rare earth-doped micro-cavities
US6034813A (en) * 1998-08-24 2000-03-07 Southwall Technologies, Inc. Wavelength selective applied films with glare control
US6165598A (en) * 1998-08-14 2000-12-26 Libbey-Owens-Ford Co. Color suppressed anti-reflective glass
US6200431B1 (en) * 1997-02-19 2001-03-13 Canon Kabushiki Kaisha Reactive sputtering apparatus and process for forming thin film using same
US6234166B1 (en) * 1999-06-30 2001-05-22 Acktar Ltd. Absorber-reflector for solar heating
US6451184B1 (en) * 1997-02-19 2002-09-17 Canon Kabushiki Kaisha Thin film forming apparatus and process for forming thin film using same
US20020197459A1 (en) * 1999-09-16 2002-12-26 Marc Maurer Transparent substrate provided with a heat-reflective multilayer stack
US6777085B1 (en) * 2002-04-19 2004-08-17 Optical Coating Laboratory, Inc. Article and method of preparing pigments using multiple deposition sources

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US4526132A (en) * 1982-11-24 1985-07-02 Konishiroku Photo Industry Co., Ltd. Evaporator
US5218472A (en) * 1989-03-22 1993-06-08 Alcan International Limited Optical interference structures incorporating porous films
RU2054639C1 (ru) 1992-12-24 1996-02-20 Кожеватов Илья Емельянович Оптический фильтр фабри - перо
JPH10313566A (ja) 1997-05-12 1998-11-24 Jii M C:Kk リニアモータ
DE19834734C2 (de) 1998-07-31 2002-07-18 Fraunhofer Ges Forschung Bauteil mit einer Effektoberfläche und Verfahren zu dessen Herstellung
DE19845268C1 (de) * 1998-10-01 2000-01-05 Fraunhofer Ges Forschung Verfahren zum Bedampfen bandförmiger Substrate mit einer transparenten Barriereschicht aus Aluminiumoxid
IN266855B (fr) * 2002-12-26 2015-06-09 Toppan Printing Co Ltd

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2590906A (en) * 1946-11-22 1952-04-01 Farrand Optical Co Inc Reflection interference filter
US3011383A (en) * 1957-04-30 1961-12-05 Carpenter L E Co Decorative optical material
US5182670A (en) * 1991-08-30 1993-01-26 Apa Optics, Inc. Narrow band algan filter
US5363398A (en) * 1993-09-30 1994-11-08 At&T Bell Laboratories Absorption resonant rare earth-doped micro-cavities
US6200431B1 (en) * 1997-02-19 2001-03-13 Canon Kabushiki Kaisha Reactive sputtering apparatus and process for forming thin film using same
US6451184B1 (en) * 1997-02-19 2002-09-17 Canon Kabushiki Kaisha Thin film forming apparatus and process for forming thin film using same
US6165598A (en) * 1998-08-14 2000-12-26 Libbey-Owens-Ford Co. Color suppressed anti-reflective glass
US6034813A (en) * 1998-08-24 2000-03-07 Southwall Technologies, Inc. Wavelength selective applied films with glare control
US6234166B1 (en) * 1999-06-30 2001-05-22 Acktar Ltd. Absorber-reflector for solar heating
US20020197459A1 (en) * 1999-09-16 2002-12-26 Marc Maurer Transparent substrate provided with a heat-reflective multilayer stack
US6777085B1 (en) * 2002-04-19 2004-08-17 Optical Coating Laboratory, Inc. Article and method of preparing pigments using multiple deposition sources

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130273329A1 (en) * 2012-03-19 2013-10-17 Patrick Goegebeur Multi-step process for fully coloured construction elements
US9545647B2 (en) * 2012-03-19 2017-01-17 Deceuninck Nv Multi-step process for fully coloured construction elements

Also Published As

Publication number Publication date
TWI250553B (en) 2006-03-01
EP1660848B1 (fr) 2011-05-04
DE112004002818D2 (de) 2006-12-14
US8323734B2 (en) 2012-12-04
CN1942744A (zh) 2007-04-04
JP2007527553A (ja) 2007-09-27
EP1660848A1 (fr) 2006-05-31
WO2005085780A1 (fr) 2005-09-15
ATE508348T1 (de) 2011-05-15
US20110081485A1 (en) 2011-04-07
TW200531138A (en) 2005-09-16
DE502004012473D1 (de) 2011-06-16

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