US20070232008A1 - Semiconductor device and hetero-junction bipolar transistor - Google Patents
Semiconductor device and hetero-junction bipolar transistor Download PDFInfo
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- US20070232008A1 US20070232008A1 US11/798,216 US79821607A US2007232008A1 US 20070232008 A1 US20070232008 A1 US 20070232008A1 US 79821607 A US79821607 A US 79821607A US 2007232008 A1 US2007232008 A1 US 2007232008A1
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- 239000004065 semiconductor Substances 0.000 title claims description 463
- 230000010287 polarization Effects 0.000 claims abstract description 157
- 230000002269 spontaneous effect Effects 0.000 claims abstract description 77
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 50
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 25
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 18
- 229910002601 GaN Inorganic materials 0.000 claims description 81
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 75
- 230000005684 electric field Effects 0.000 claims description 69
- 238000000034 method Methods 0.000 claims description 37
- 101100301987 Rattus norvegicus Rida gene Proteins 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 23
- 239000012535 impurity Substances 0.000 claims description 22
- 150000004767 nitrides Chemical class 0.000 claims description 20
- 230000007423 decrease Effects 0.000 claims description 15
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims description 14
- 230000003993 interaction Effects 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 1
- 229910002704 AlGaN Inorganic materials 0.000 abstract 1
- 239000000969 carrier Substances 0.000 description 55
- 238000002347 injection Methods 0.000 description 18
- 239000007924 injection Substances 0.000 description 18
- 230000004888 barrier function Effects 0.000 description 17
- 239000002772 conduction electron Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 10
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 7
- 238000001312 dry etching Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 229910052594 sapphire Inorganic materials 0.000 description 5
- 239000010980 sapphire Substances 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 4
- 238000001451 molecular beam epitaxy Methods 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 101150043784 Reg3b gene Proteins 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/6631—Bipolar junction transistors [BJT] with an active layer made of a group 13/15 material
- H01L29/66318—Heterojunction transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
- H01L29/737—Hetero-junction transistors
- H01L29/7371—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Definitions
- the present invention relates to a semiconductor device and a hetero-junction bipolar transistor in which an n-type first semiconductor layer, a p-type second semiconductor layer and an n-type third semiconductor layer are in contact with one another in this order, and more particularly relates to measures for improving high-frequency characteristics.
- nitride semiconductor has been well known.
- the known nitride semiconductor is a semiconductor which has a wide band gap and a high breakdown electric field and therefore its high output operation has been expected.
- semiconductor devices using this nitride semiconductor high electron mobility transistors (HEMTs) and hetero-junction bipolar transistors (HBTs) have been proposed.
- HEMTs high electron mobility transistors
- HBTs hetero-junction bipolar transistors
- a GaN buffer layer 3 a subcollector layer 7 , a collector layer 6 , an InGaN buffer layer 15 , a base layer 5 and an emitter layer 4 are stacked on a sapphire substrate 1 in this order.
- the subcollector layer 7 and the collector layer 6 are formed of n-type gallium nitride (GaN)
- the base layer 5 is formed of p-type indium gallium nitride (InGaN)
- the emitter layer 4 is formed of n-type GaN.
- each of the layers is formed by metal organic chemical vapor deposition (MOCVD).
- MOCVD metal organic chemical vapor deposition
- electrodes 8 are formed on respective upper surfaces of the subcollector layer 7 , the base layer 5 and the emitter layer 4 , respectively.
- the base layer 5 is formed of a ternary system, i.e., InGaN, so that a spontaneous polarization is generated in the base layer 5 .
- a ternary system i.e., InGaN
- strains to be generated in the base layer 5 are suppressed.
- FIG. 1 In the HBT, as shown in FIG.
- the composition ratio of the base layer 5 is gradually changed in the film thickness direction.
- a fabrication method becomes complicated but also it is difficult, in view of crystallinity, to fabricate a quality HBT.
- the present invention has been devised in view of the above-described points and it is therefore an object of the present invention to improve high-frequency characteristics and reduce the resistance of a p-type semiconductor layer, while avoiding having a fabrication method complicated.
- the present invention is directed to the generating a polarization so that an electric field is generated in the direction in which carriers are accelerated in a p-type semiconductor layer.
- a first aspect of the present invention is assumed to be a semiconductor device including: an n-type first semiconductor layer formed so that electrons are externally injected into the first semiconductor layer; a p-type second semiconductor layer formed so that electrons injected into the first semiconductor layer are injected into the second semiconductor layer; and an n-type third semiconductor layer formed so that electrons having passed through the second semiconductor layer flow into the third semiconductor layer, the first, second and third semiconductor layers being in contact with one another in this order.
- Spontaneous polarizations Psp 1 , Psp 2 and Psp 3 are generated in the first, second and third semiconductor layers, respectively, and the second semiconductor layer is formed so as to have a configuration in which an internal electric field is generated so that an energy of electrons decreases in the direction from the first semiconductor layer to the third semiconductor layer due to an electric charge Q 12 generated at an interface with the first semiconductor layer by an interaction of the spontaneous polarizations Psp 1 and Psp 2 and an electric charge Q 23 generated at an interface with the third semiconductor layer by an interaction of the spontaneous polarizations Psp 2 and Psp 3 .
- the internal electric field due to the electric charge Q 12 and the electric charge Q 23 is generated so that the energy of electrons as carriers decreases along a moving direction. Therefore, the electrons are accelerated by the internal electric field in the direction from the first semiconductor layer to the third semiconductor layer. Therefore, the transit time of electrons injected from the first semiconductor layer and traveling in the second semiconductor layer toward the third semiconductor layer can be reduced, so that high-frequency characteristics can be improved.
- the semiconductor device is applied to an HBT, holes are stored in the vicinity of the base electrode due to the internal electric field. Accordingly, a base resistance can be reduced.
- the internal electric field is generated by actions of the spontaneous polarizations Psp 1 , Psp 2 and Psp 3 generated in the semiconductor layers, respectively. Therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a semiconductor device from becoming complicated and also to stably obtain a quality semiconductor device.
- a second aspect of the present invention is assumed to be a semiconductor device including: an n-type first semiconductor layer formed so that electrons are externally injected into the first semiconductor layer; a p-type second semiconductor layer formed so that electrons injected into the first semiconductor layer are injected into the second semiconductor layer; and an n-type third semiconductor layer formed so that electrons having passed through the second semiconductor layer flow into the third semiconductor layer, the first, second and third semiconductor layers being in contact with one another in this order.
- Piezo polarizations Ppz 1 , Ppz 2 and Ppz 3 are generated in the first, second and third semiconductor layers, respectively, and the second semiconductor layer is formed so as to have a configuration in which an internal electric field is generated so that an energy of electrons decreases in the direction from the first semiconductor layer to the third semiconductor layer due to an electric charge Q 12 generated at an interface with the first semiconductor layer by an interaction of the piezo polarizations Ppz 1 and Ppz 2 and an electric charge Q 23 generated at an interface with the third semiconductor layer by an interaction of the piezo polarizations Ppz 2 and Ppz 3 .
- the internal electric field due to the electric charge Q 12 and the electric charge Q 23 is generated so that the energy of electrons as carriers decreases along a moving direction. Accordingly, a transit time of electrons injected from the first semiconductor layer and traveling in the second semiconductor layer toward the third semiconductor layer can be reduced, so that high-frequency characteristics can be improved.
- the semiconductor device is applied to an HBT, holes are stored in the vicinity of the base electrode due to the internal electric field. Therefore, a base resistance can be reduced.
- the internal electric field is generated by actions of the piezo polarizations Ppz 1 , Ppz 2 and Ppz 3 generated in the semiconductor layers, respectively.
- a third aspect of the present invention is assumed to be a semiconductor device including: an n-type first semiconductor layer formed so that electrons are externally injected into the first semiconductor layer; a p-type second semiconductor layer formed so that electrons injected into the first semiconductor layer are injected into the second semiconductor layer; and an n-type third semiconductor layer formed so that electrons having passed through the second semiconductor layer flow into the third semiconductor layer, the first, second and third semiconductor layers being in contact with one another in this order.
- a spontaneous polarization Psp 1 and a piezo polarization Ppz 1 are generated in the first semiconductor layer
- a spontaneous polarization Psp 2 and a piezo polarization Ppz 2 are generated in the second semiconductor layer
- a spontaneous polarization Psp 3 and a piezo polarization Ppz 3 are generated in the third semiconductor layer
- respective polarities of the spontaneous polarizations are the same as respective polarities of the piezo polarizations, respectively
- the second semiconductor layer is formed so as to have a configuration in which an internal electric field is generated so that an energy of electrons decreases in the direction from the first semiconductor layer to the third semiconductor layer due to an electric charge Q 12 generated at an interface with the first semiconductor layer by an interaction of the spontaneous polarization Psp 1 , the piezo polarization Ppz 1 , the spontaneous polarization Psp 2 and the piezo polarization Ppz 2 and an electric charge Q 23 generated at an interface with the third semiconductor layer by an interaction of
- the respective polarities of the spontaneous polarizations Psp 1 , Psp 2 and Psp 3 are the same as the respective polarities of the piezo polarizations Ppz 1 , Ppz 2 and Ppz 3 , respectively.
- the spontaneous polarizations Psp 1 , Psp 2 and Psp 3 and the piezo polarizations Ppz 1 , Ppz 2 and Ppz 3 do not cancel to each other, so that the very large electric charge Q 12 is generated at the interface of the first semiconductor layer and the second semiconductor layer and the very large electric charge Q 23 is generated at the interface of the second semiconductor layer and the third semiconductor layer.
- each of the first and third semiconductor layers is formed of aluminum gallium nitride (AlGaN), and the second semiconductor layer is formed of gallium nitride (GaN).
- the respective polarities of the spontaneous polarizations Psp 1 , Psp 2 and Psp 3 are the same as the respective polarities of the piezo polarizations Ppz 1 , Ppz 2 and Ppz 3 , respectively.
- the spontaneous polarizations Psp 1 , Psp 2 and Psp 3 and the piezo polarizations Ppz 1 , Ppz 2 and Ppz 3 do not cancel to each other, so that the very large electric charge Q 12 is generated at the interface of the first semiconductor layer and the second semiconductor layer and the very large electric charge Q 23 is generated at the interface of the second semiconductor layer and the third semiconductor layer.
- the electric charges Q 12 and Q 23 With the electric charges Q 12 and Q 23 , a very large internal electric field is generated in the second semiconductor layer, so that the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced. Furthermore, the first semiconductor layer and the second semiconductor layer form a hetero-junction, so that the efficiency of injection into the second semiconductor layer can be improved.
- the first semiconductor layer has a higher aluminum composition ratio than that of the third semiconductor layer.
- a barrier at the interface of the first semiconductor layer and the second semiconductor layer is higher than that at the interface of the second semiconductor layer and the third semiconductor layer. Accordingly, when electrons injected from the first semiconductor layer pass through the second semiconductor layer to reach the third semiconductor layer, the electrons have enough energy to go over the barrier at the interface of the second semiconductor layer and the third semiconductor layer. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- the first semiconductor layer is formed of AlGaN
- each of the second and third semiconductor layers is formed of GaN.
- the respective polarities of the spontaneous polarizations Psp 1 , Psp 2 and Psp 3 are the same as the respective polarities of the piezo polarizations Ppz 1 , Ppz 2 and Ppz 3 .
- the spontaneous polarizations Psp 1 , Psp 2 and Psp 3 and the piezo polarizations Ppz 1 , Ppz 2 and Ppz 3 do not cancel to each other, so that the sufficiently large electric charge Q 12 is generated at the interface of the first semiconductor layer and the second semiconductor layer and the sufficiently large electric charge Q 23 is generated at the interface of the second semiconductor layer and the third semiconductor layer.
- a fourth aspect of the present invention is assumed to be a semiconductor device including: an n-type first semiconductor layer formed so that electrons are externally injected into the first semiconductor layer; a p-type second semiconductor layer formed so that electrons injected into the first semiconductor layer are injected into the second semiconductor layer; and an n-type third semiconductor layer formed so that electrons having passed through the second semiconductor layer flow into the third semiconductor layer, the first, second and third semiconductor layers being in contact with one another in this order.
- the second semiconductor layer is formed of gallium nitride, the first semiconductor layer is in contact with a nitrogen polarity surface of the second semiconductor layer, and the third semiconductor layer is in contact with a gallium polarity surface of the second semiconductor layer.
- the second semiconductor layer is in contact with the first semiconductor layer at its nitrogen polarity surface while being in contact with the third semiconductor layer at its gallium polarity surface.
- the interface with the first semiconductor layer becomes a negative polarity and the interface with the third semiconductor layer becomes a positive polarity.
- an internal electric field is generated in the second semiconductor layer so that electrons as carries are accelerated in the direction from the first semiconductor layer to the third semiconductor layer.
- the transit time of electrons traveling in the second semiconductor layer toward the third semiconductor layer can be reduced. Therefore, high-frequency characteristics can be improved.
- each of the first and third semiconductor layers is formed of AlGaN.
- the respective polarities of the spontaneous polarizations generated in the semiconductor layers are the same as the respective polarities of the piezo polarizations generated in the semiconductor layers, respectively.
- the spontaneous polarizations and the piezo polarizations do not cancel to each other, so that a very large electric charge is generated at the interface of the first semiconductor layer and the second semiconductor layer and a very large electric charge is generated at the interface of the second semiconductor layer and the third semiconductor layer.
- With the electric charges a very large internal electric field is generated in the second semiconductor layer, so that the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced.
- the first semiconductor layer and the second semiconductor layer form a hetero-junction, so that the efficiency of injection into the second semiconductor layer can be improved.
- the first semiconductor layer has a higher aluminum composition ratio than that of the third semiconductor layer.
- a barrier at the interface of the first semiconductor layer and the second semiconductor layer is higher than that at the interface of the second semiconductor layer and the third semiconductor layer. Accordingly, when electrons injected from the first semiconductor layer pass through the second semiconductor layer to reach the third semiconductor layer, the electrons have enough energy to go over the barrier at the interface of the second semiconductor layer and the third semiconductor layer. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- the first semiconductor layer is formed of AlGaN
- the third semiconductor layer is formed of GaN.
- the respective polarities of the spontaneous polarizations generated in the semiconductor layers are the same as the respective polarities of the piezo polarizations generated in the semiconductor layers, respectively.
- the spontaneous polarizations and the piezo polarizations do not cancel to each other, so that a sufficiently large electric charge is generated at the interface of the first semiconductor layer and the second semiconductor layer and a sufficiently large electric charge is generated at the interface of the second semiconductor layer and the third semiconductor layer.
- a sufficiently large internal electric field is generated in the second semiconductor layer, so that the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced.
- a barrier is not generated at the interface of the second semiconductor layer and the third semiconductor layer. Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- the semiconductor device may have a configuration in which the first, second and third semiconductor layers are stacked in this order from a substrate side.
- At least one of the first and third semiconductor layers of aluminum gallium nitride is doped with an impurity at a concentration of 1 ⁇ 10 18 to 1 ⁇ 10 19 cm ⁇ 3 .
- At least one of the first semiconductor layer and the third semiconductor layer is formed of a heavily doped layer containing an impurity at a high concentration, so that a layer formed of AlGaN becomes a low potential portion and thus carriers can pass through this portion. Accordingly, if the first semiconductor layer is formed of a heavily doped layer, carriers can be efficiently injected into the second semiconductor layer from the first semiconductor layer. On the other hand, if the third semiconductor layer is formed of a heavily doped layer, carriers having passed through the second semiconductor layer can be efficiently taken out from the third semiconductor layer.
- a heavily doped layer formed by ⁇ doping is provided in at least one of the first and third semiconductor layers formed of AlGaN.
- a low potential portion is formed in a layer formed of AlGaN, so that carriers can pass through the portion.
- carriers can be efficiently injected into the second semiconductor layer from the first semiconductor layer or carriers having passed through the second semiconductor layer can be made to efficiently flow into the third semiconductor layer.
- the heavily doped layer is formed by ⁇ doping, so that the heavily doped layer is formed in part of the first semiconductor layer and/or the third semiconductor layer.
- an electrode in the first semiconductor layer, is in contact with a surface of the first semiconductor layer located on an opposite side to the second semiconductor layer, and the heavily doped layer is provided in the first semiconductor layer so as to be located at a distance of 20 nm or less from the surface with which the electrode is in contact.
- the heavily doped layer is provided in the first semiconductor layer so as to be located at a distance of 20 nm or less from the surface with which the electrode is in contact.
- injection of electrons from the electrode can be efficiently performed. Accordingly, the efficiency of carrier injection can be improved. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- the heavily doped layer is provided in the third semiconductor layer so as to be located at a distance of 20 nm or less from the interface with the second semiconductor layer.
- the heavily doped layer is provided in the third semiconductor layer so as to be located at a distance of 20 nm or less from the interface of the second semiconductor layer and the third semiconductor layer.
- electrons in the second semiconductor layer efficiently flow into the third semiconductor layer. Accordingly, the efficiency of carrier injection can be improved. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- a thin layer portion is formed, with an interface with the first semiconductor layer left, so as to have a smaller thickness than that of other part, and in the thin layer portion, an electrode for taking out electrons in the second semiconductor layer is in contact with the thin layer portion.
- the interface of the first semiconductor layer of AlGaN and the thin layer portion of the second semiconductor layer of GaN is a hetero-junction interface and the first semiconductor layer and the thin layer portion have different bands.
- an internal electric field is generated to extend from the third semiconductor layer to the first semiconductor layer. Accordingly, electrons are accelerated in the direction from the first semiconductor layer to the third semiconductor layer due to the internal electrode. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- holes are stored in the vicinity of the interface with the first semiconductor layer due to the internal electric field in the second semiconductor layer, so that holes are stored in the vicinity of the electrode in contact with the thin layer portion of the second semiconductor layer. Therefore, a resistance of the second semiconductor layer can be reduced.
- a contact layer of n-type GaN is in contact with a surface of the first semiconductor layer located in an opposite side to the second semiconductor layer, and the first semiconductor layer and the electrode for injecting electrons into the first semiconductor layer form an ohmic contact with the contact layer interposed therebetween.
- the contract layer of GaN is in contact with the first semiconductor layer of AlGaN and the electrode is in contact with the contact layer.
- the interface of the first semiconductor layer and the contact layer is a hetero-junction interface.
- conduction electrons two-dimensional conduction electron gas
- the conduction electrons can be used for forming an ohmic contact with the electrode and then a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved.
- a contact layer of n-type gallium nitride in contact with a surface of the first semiconductor layer located on an opposite side to the second semiconductor layer, a thin layer portion is formed, with an interface with the contact layer left, so as to have a smaller thickness than that of other part, and an electrode for injecting electrons is in contact with the thin layer portion.
- the interface of the first semiconductor layer of AlGaN and the contact layer of GaN is a hetero-junction interface.
- conduction electrons are stored in the contact layer side of the interface of the first semiconductor layer and the contact layer. Accordingly, the conduction electrons can be used for forming an ohmic contact with the electrode and a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved.
- the first semiconductor layer is formed as an emitter layer
- the second semiconductor layer is formed as a base layer
- the third semiconductor layer is formed as a collector layer.
- a fifth aspect of the present invention is assumed to be a hetero-junction bipolar transistor including: an emitter layer formed of n-type semiconductor; a base layer formed of p-type semiconductor; and a collector layer formed of n-type semiconductor, the emitter, base and collector layers being in contact with one another in this order.
- the base layer is formed of GaN
- the emitter layer is in contact with a nitrogen polarity surface of the base layer
- the collector layer is in contact with a gallium polarity surface of the base layer.
- the base layer is in contact with the emitter layer at its nitrogen polarity surface while being in contact with the collector layer at its gallium polarity surface.
- the interface with the emitter layer becomes a negative polarity and the interface with the collector layer becomes a positive polarity.
- an internal electric field is generated in the base layer so that electrons as carries are accelerated in the direction from the first semiconductor layer to the third semiconductor layer.
- the transit time of electrons injected from the emitter layer and traveling in the base layer toward the collector layer can be reduced. Therefore, high-frequency characteristics can be improved.
- holes are stored in the vicinity of the base electrode due to the internal electric field.
- a base resistance can be reduced. Furthermore, the internal electric field is generated by actions of the spontaneous polarizations. Therefore, there is no need to change the composition ratio of the base layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the base layer. As a result, it is possible to prevent a method for fabricating a HBT from becoming complicated and also to stably obtain an HBT.
- each of the emitter layer and the collector layer is formed of AlGaN.
- the respective polarities of the spontaneous polarizations generated in the emitter layer, the base layer, and the collector layer are the same as the respective polarities of the piezo polarizations generated in the emitter, base and collector layers.
- the spontaneous polarizations and the piezo polarizations do not cancel to each other, so that a very large electric charge is generated at the interface of the emitter layer and the base layer and a very large electric charge is generated at the interface of the base layer and the collector layer.
- With the electric charges a very large internal electric field is generated in the base layer, so that the transit time of electrons in the base layer can be efficiently and reliably reduced.
- the emitter layer and the base layer form a hetero-junction, so that the efficiency of electron injection can be improved.
- the emitter layer is formed of AlGaN
- the collector layer is formed of GaN.
- the respective polarities of the spontaneous polarizations generated in the emitter layer, the base layer, and the collector layer are the same as the respective polarities of the piezo polarizations generated in the emitter, base and collector layers.
- the spontaneous polarizations and the piezo polarizations do not cancel to each other, so that a sufficiently large electric charge is generated at the interface of the emitter layer and the base layer and a sufficiently large electric charge is generated at the interface of the base layer and the collector layer.
- a sufficiently large internal electric field is generated in the base layer, so that the transit time of electrons in the base layer can be efficiently and reliably reduced.
- a barrier is not generated at the interface of the base layer and the collector layer. Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- the internal electric field to be generated due to the respective spontaneous polarization in the semiconductor layers is generated so that the energy of electrons as carriers decreases in the direction from the first semiconductor layer to the third semiconductor layer.
- the transit time of electrons injected from the first semiconductor layer and traveling in the second semiconductor layer toward the third semiconductor layer can be reduced, so that high-frequency characteristics can be improved.
- the respective spontaneous polarizations generated in the semiconductor layers are utilized and, therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a semiconductor device from becoming complicated and also to stably obtain a quality semiconductor device.
- the internal electric field to be generated due to the respective piezo polarization in the semiconductor layers is generated so that the energy of electrons as carriers decreases in the direction from the first semiconductor layer to the third semiconductor layer.
- the transit time of electrons injected from the first semiconductor layer and traveling in the second semiconductor layer toward the third semiconductor layer can be reduced, so that high-frequency characteristics can be improved.
- the respective piezo polarizations generated in the semiconductor layers are utilized and, therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a semiconductor device from becoming complicated and also to stably obtain a quality semiconductor device.
- the respective polarities of spontaneous polarizations generated in the semiconductor layers are the same as the respective polarities of piezo polarizations generated in the semiconductor layer, respectively, so that the spontaneous polarizations and the piezo polarizations do not cancel to each other and a very large electric charge is generated at each interface.
- the transit time of electrons traveling in the second semiconductor layer toward the third semiconductor layer can be efficiently and reliably reduced, so that high-frequency characteristics can be improved.
- the spontaneous polarizations and piezo polarizations generated in the semiconductor layers are utilized and, therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a semiconductor device from becoming complicated and also to stably obtain a quality semiconductor device.
- each of the first semiconductor layer and the third semiconductor layer is formed of AlGaN and the second semiconductor layer is formed of GaN.
- the interface of the first semiconductor layer and the second semiconductor layer is a hetero-junction, so that the efficiency of injection into the second semiconductor layer can be improved.
- the first semiconductor layer has a higher aluminum composition ratio than that of the third semiconductor layer.
- carriers can easily go over a barrier generated at the interface of the second semiconductor layer and the third semiconductor layer. Therefore, the transit time of electrons can be reduced, so that high-frequency characteristics can be improved.
- the first embodiment is formed of AlGaN and each of the second semiconductor layer and the third semiconductor layer is formed of GaN, so that a sufficiently large electric charge can be generated at each interface and due to an internal electric fields generated by the electric charge, the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced. Moreover, a barrier is not generated at the interface of the second semiconductor layer and the third semiconductor layer. Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- the first semiconductor layer is in contact with a nitrogen polarity surface of the second semiconductor layer of GaN and also the third semiconductor layer is in contact with a gallium polarity surface of the second semiconductor layer.
- an internal electric field can be generated so that electrons as carriers are accelerated in the direction from the first semiconductor layer to the third semiconductor layer due to the spontaneous polarizations. Therefore, the transit time of electrons can be reduced, so that high-frequency characteristics can be improved.
- each of the first semiconductor layer and the third semiconductor layer is formed of AlGaN and the second semiconductor layer is formed of GaN.
- the interface of the first semiconductor layer and the second semiconductor layer is a hetero-junction, so that the efficiency of injection into the second semiconductor layer can be improved.
- the first semiconductor layer has a higher aluminum composition ratio than that of the third semiconductor layer.
- carriers can easily go over a barrier generated at the interface of the second semiconductor layer and the third semiconductor layer. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- the first semiconductor layer is formed of AlGaN and each of the second semiconductor layer and the third semiconductor layer is formed of GaN.
- At least one of the first semiconductor layer and the third semiconductor layer is doped with an impurity at a high concentration.
- the potentials of the semiconductor layers can be reduced. Therefore, carriers can be efficiently injected into the second semiconductor layer from the first semiconductor layer or carriers having passed through the second semiconductor layer can be efficiently taken out from the third semiconductor layer.
- a heavily doped layer formed by ⁇ doping is provided in at least one of the first semiconductor layer and the third semiconductor layer, so that distortion generated at the interface of AlGaN and GaN is not eased and a low potential portion can be formed in at least one of the first semiconductor layer and the third semiconductor layer. Accordingly, the intensity of an internal electric field generated in the second semiconductor layer is not reduced, so that the efficiency of carrier injection can be improved. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- the heavily doped layer is provided in the first semiconductor layer so as to be located at a distance of 20 nm or less from a surface opposite side to the second semiconductor layer.
- the heavily doped layer is provided in the third semiconductor layer so as to be located at a distance of 20 nm or less from the interface with the second semiconductor layer.
- a thin layer portion is formed so that the interface with the first semiconductor layer is left in the second semiconductor layer and an electrode for taking out electrons in the second semiconductor layer is in contact with the thin layer portion.
- the contact layer of n-type GaN is in contact with the first semiconductor layer and the first semiconductor layer and the electrode for injecting electrons into the first semiconductor layer form an ohmic contact with the contact layer interposed therebetween, so that conduction electrons are stored in the contact layer side of the interface of the first semiconductor layer and the contact layer.
- conduction electrons can be used for forming an ohmic contact with the electrode and a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved.
- the contact layer of n-type GaN is in contact with the first semiconductor layer, a thin layer portion is formed so that the interface with the contact layer is left, and the electrode is in contact with the thin layer portion.
- conduction electrons are stored in the contact layer side of the interface of the thin layer portion of the first semiconductor layer and the contact layer. Therefore, the conduction electrons can be used for forming an ohmic contact with the electrode and a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved.
- a base layer of an HBT is formed of GaN and the base layer is in contact with an emitter layer at its nitrogen polarity surface while being in contact with the collector layer at its gallium polarity surface.
- an internal electric field can be generated in the base layer so that electrons as carriers are accelerated in the direction from the emitter layer to the collector layer. Therefore, the transit time of electrons can be reduced, so that high-frequency characteristics can be improved.
- holes can be stored in the vicinity of the base electrode, so that a base resistance can be reduced.
- each of the emitter layer and the collector layer is formed of AlGaN.
- a very large electric charge is generated at the interface of the emitter layer and the base layer and a very large internal electric field can be generated in the base layer.
- the transit time of electrons in the base layer can be efficiently and reliably reduced.
- the interface of the emitter layer and the base layer is a hetero-junction, so that the efficiency of injection into the base layer can be improved.
- the emitter layer is formed of AlGaN and the collector layer is formed of GaN.
- the emitter layer is formed of AlGaN and the collector layer is formed of GaN.
- FIG. 1 shows cross-sectional views illustrating the entire structure of an HBT according to EMBODIMENT 1 of the present invention.
- FIG. 2 is a view illustrating polarizations and electric fields generated in the HBT of EMBODIMENT 1 of the present invention.
- FIG. 3 is a band diagram for the HBT of EMBODIMENT 1 of the present invention.
- FIG. 4 shows cross-sectional views corresponding to FIG. 1 and illustrating an HBT according to EMBODIMENT 2 of the present invention.
- FIG. 5 shows cross-sectional views corresponding to those of FIG. 1 and illustrating an HBT according to EMBODIMENT 3 of the present invention.
- FIG. 6 shows cross-sectional views corresponding to those of FIG. 1 and illustrating an HBT according to EMBODIMENT 4 of the present invention.
- FIG. 7 shows cross-sectional views corresponding to those of FIG. 1 and illustrating an HBT according to EMBODIMENT 5 of the present invention.
- FIG. 8 shows cross-sectional views corresponding to those of FIG. 1 and illustrating an HBT according to EMBODIMENT 6 of the present invention.
- FIG. 9 shows cross-sectional views corresponding to those of FIG. 1 and illustrating a known HBT.
- FIG. 10 shows a band diagram corresponding to that of FIG. 3 and illustrating a known HBT.
- a Semiconductor Device is formed as a hetero-junction bipolar transistor (HBT) in which an emitter layer 4 as a first semiconductor layer, a base layer 5 as a second semiconductor layer, and a collector layer 6 as a third semiconductor layer are formed over a sapphire substrate 1 .
- HBT hetero-junction bipolar transistor
- Each of the layers is formed by metal organic chemical deposition (MOCVD).
- an AlN buffer layer 2 of aluminum nitride (AlN) is formed on the sapphire substrate 1 .
- the AlN buffer layer 2 is formed so as to have a thickness of 20 nm.
- a GaN buffer layer 3 of gallium nitride (GaN) is formed on the AlN buffer layer 2 .
- the GaN buffer layer 3 is formed so as to have a thickness of 15 nm.
- the GaN buffer layer 3 is formed by MOCVD and thus a surface (upper surface) thereof at a time when the GaN buffer layer is formed is a gallium polarity surface in which gallium is located at the outermost side.
- an interface (lower surface) of the GaN buffer layer 3 with the AlN buffer layer 2 is a nitrogen polarity surface in which nitrogen is located in the outermost side.
- the emitter layer 4 is formed on the GaN buffer layer 3 .
- the emitter layer 4 is formed of n-type aluminum gallium nitride (AlGaN) so as to have a thickness of 30 nm.
- Silicon (Si) is added as an impurity to AlGaN at a medium concentration (5 ⁇ 10 17 cm ⁇ 3 ) so that the aluminum composition rate of the emitter layer 4 is 25%.
- the base layer 5 is formed on the emitter layer 4 so as to have a thickness of 70 nm.
- the base layer 5 is formed of p-type GaN. That is, the junction of the emitter base layer 4 and the base layer 5 is a hetero-junction in which the base layer 5 has a narrow gap with respect to the emitter layer 4 .
- Magnesium (Mg) is added as an impurity to GaN which forms the base layer 5 at a high concentration (4 ⁇ 10 19 cm ⁇ 3 ). The concentration of the impurity is constant in the film thickness direction and thus the base layer 5 has a constant band gap in the film thickness direction.
- the collector layer 6 is formed on the base layer 5 so as to have a thickness of 500 nm.
- the collector layer 6 is formed of n-type AlGaN. That is, the junction of the base layer 5 and the collector layer 6 is a hetero-junction in which the base layer 5 has a narrow gap with respect to the collector layer 6 .
- Si is added as an impurity to AlGaN of the collector layer 6 at a medium concentration (2 ⁇ 10 17 cm ⁇ 3 ) and the aluminum composition of the collector layer 6 is 10%. That is, in EMBODIMENT 1, the aluminum composition of the emitter layer 4 is higher than that of the collector layer 6 .
- a subcollector layer 7 of n-type GaN is formed on the collector layer 6 .
- the subcollector layer 7 is formed so as to have a thickness of 500 nm.
- Si is added as an impurity to GaN forming the subcollector layer 7 at a high concentration (1 ⁇ 10 19 cm ⁇ 3 ).
- electrodes 8 are provided, respectively.
- An electrode 8 in contact with the emitter layer 4 forms an emitter electrode and is configured so that electrons are externally injected into the electrode.
- an electrode 8 in contact with the base layer 5 forms a base electrode and is so configured to take out part of electrons injected into the emitter layer 4 from the base layer 5 .
- an electrode 8 in contact with the subcollector layer 7 forms a collector electrode and is so configured to take out electrons which have passed through the base layer 5 .
- FIG. 1 ( a ) An AlN buffer layer 2 , a GaN buffer layer 3 , an emitter layer 4 , a base layer 5 , a collector layer 6 and a sub-collect layer 7 are formed on a sapphire substrate 1 in this order.
- each of the layers is formed by MOCVD.
- FIG. 1 ( b ) with an Si oxide film as a mask, the subcollector layer 7 and the collector layer 6 are etched in this order by dry etching using chloride gas, thereby forming a collector mesa and having the base layer 5 exposed.
- the base layer 5 is etched by dry etching using chloride gas, thereby having the emitter layer 4 exposed. Then, as shown in FIG. 1 ( d ), an electrode 8 is formed on each of the subcollector layer 7 , the base layer 5 and the emitter layer 4 .
- the HBT of EMBODIMENT 1 can be formed.
- the emitter layer 4 is made of AlGaN, as has been described above, and formed on a gallium polarity surface of the GaN buffer layer 3 .
- the emitter layer 4 has a lower surface of a nitrogen polarity surface and an upper surface of an aluminum gallium polarity surface, and a spontaneous polarization Psp 1 is generated.
- a piezo polarization Ppz 1 due to crystal strains is generated.
- the piezo polarization Ppz 1 is generated to have the same polarity as that of the spontaneous polarization Psp 1 . With the spontaneous polarization Psp 1 and the piezo polarization Ppz 1 generated, the emitter layer 4 has a lower surface of a negative polarity surface and an upper layer of a positive surface.
- the base layer 5 is formed on the aluminum gallium polarity surface of the emitter layer 4 .
- a lower surface of the base layer 5 is a nitrogen polarity surface and an upper surface thereof is a gallium polarity surface and a spontaneous polarization Psp 2 is generated.
- a piezo polarization Ppz 2 due to crystal strains is generated. Since the base layer 5 is formed of GaN, the piezo polarization Ppz 2 is generated to have the same polarity as that of the spontaneous polarization Psp 2 . With the spontaneous polarization Psp 2 and the piezo polarization Ppz 2 generated, the base layer 5 has a lower surface of a negative polarity surface and an upper layer of a positive surface.
- the collector layer 6 is formed on the gallium polarity surface of the base layer 5 .
- a lower surface of the collector layer 6 is a nitrogen polarity surface and an upper surface thereof is an aluminum gallium polarity surface and a spontaneous polarization Psp 3 is generated.
- a piezo polarization Ppz 3 due to crystal strains is generated. Since the collector layer 6 is formed of AlGaN, the piezo polarization Ppz 3 is generated to have the same polarity as that of the spontaneous polarization Psp 3 . With the spontaneous polarization Psp 3 and the piezo polarization Ppz 3 generated, the collector layer 6 has a lower surface of a negative polarity surface and an upper layer of a positive polarity surface.
- Polarities of the spontaneous polarizations Psp 1 and Psp 2 are the same as polarities of the piezo polarizations Ppz 1 and Ppz 2 , respectively. Therefore, a very large electric charge Q 12 is generated at the interface of the emitter layer 4 and the base layer 5 .
- polarities of the spontaneous polarizations Psp 2 and Psp 3 are the same as polarities of the piezo polarizations Ppz 2 and Ppz 3 , respectively. Therefore, a very large electric charge Q 23 is generated at the interface of the base layer 5 and the collector layer 6 .
- an internal electric field is generated in the base layer 5 so that electrons are accelerated from the emitter layer 4 to the collector layer 6 .
- the base layer has a band structure in which the band gap is constant in the film thickness direction and the energy of electrons decreases in the direction from the emitter 4 to the collector 6 at an end of a conduction band 11 and an end of a valence band 12 .
- the polarities of the spontaneous polarizations Psp 1 , Psp 2 and Psp 3 are the same as the polarities of the piezo polarizations Ppz 1 , Ppz 2 and Ppz 3 , respectively, so that the spontaneous polarizations Psp 1 , Psp 2 and Psp 3 and the piezo polarizations Ppz 1 , Ppz 2 and Ppz 3 do not cancel to each other, and the very large electric charge Q 12 is generated at the interface of the emitter layer 4 and the base layer 5 while the very large electric charge Q 23 is generated at the interface of the base layer 5 and the collector layer 6 .
- the internal electric field is generated due to actions of the spontaneous polarizations Pap 1 , Psp 2 and Psp 3 generated in the semiconductor layers 4 , 5 and 6 , respectively, and of the piezo polarization Ppz 1 , Ppz 2 and Ppz 3 generated in the semiconductor layers 4 , 5 and 6 , respectively. Therefore, there is no need to change the composition ratio of the base layer 5 in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the base layer 5 . As a result, it is possible to prevent a method for fabricating a HBT from becoming complicated and also to stably obtain a quality HBT.
- the junction of the emitter layer 4 and the base layer 5 is a hetero-junction, so that the efficiency of electron injection can be improved.
- the emitter layer 4 is formed so as to have a higher aluminum composition ratio than that of the collector layer 6 .
- a barrier at the interface of the base layer 5 and the collector layer 6 is lower than a barrier at the interface of the emitter layer 4 and the base layer 5 . Accordingly, when electrons injected from the emitter layer 4 pass through the base layer 5 to reach the collector layer 6 , the electrons have enough energy to go over the barrier at the interface of the base layer 5 and the collector layer 6 . Therefore, also in this point of view, according to EMBODIMENT 1, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- the base layer 5 is in contact with the emitter layer 4 at its nitrogen polarity surface while being in contact with the collector layer 6 at its gallium polarity surface.
- an internal electric field can be generated in the base layer 5 so that electrons as carries are accelerated in the direction from the emitter layer 4 to the collector layer 6 .
- EMBODIMENT 1 a configuration in which at least one of the emitter layer 4 and the collector layer 6 is doped with an impurity at a concentration of 1 ⁇ 10 18 to 1 ⁇ 10 19 cm ⁇ 3 may be used. That is, according to EMBODIMENT 1, in an collector-up structure in which the collector layer 6 , the base layer 5 and the emitter layer 4 are stacked in this order from the substrate 1 , carriers are hardly injected into the base layer 5 from the emitter layer 4 and also carriers hardly flow into the collector layer 6 from the base layer 5 .
- the emitter layer 4 and the collector layer 6 are formed of a heavily doped layer containing an impurity at a high concentration, a layer formed of AlGaN becomes a low potential portion and thus carriers can pass through this portion.
- the emitter layer 4 is formed of a heavily doped layer containing an impurity at a high concentration, carriers can be efficiently injected into the base layer 5 from the emitter layer 4 .
- the collector layer 6 is formed of a heavily doped layer containing an impurity at a high concentration, carriers in the base layer 5 can be made to efficiently flow into the collector layer 6 . Therefore, in the collector-up structure, it is very effective to form each of the emitter layer 4 and the collector layer 6 of a heavily doped layer.
- the collector layer 6 may be formed of GaN.
- the junction of the emitter layer 4 and the base layer 5 is a hetero-junction.
- polarities of spontaneous polarizations are the same as polarities of piezo polarizations, respectively, and thus sufficiently large electric charges are generated in each interface.
- a sufficiently large internal electric field is generated in the base layer 5 , so that a transit time of electrons in the base layer 5 can be efficiently and reliably reduced.
- a barrier is not generated at the interface of the base layer 5 and the collector layer 6 . Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- FIG. 4 illustrates EMBODIMENT 2 of the present invention.
- each member also described in EMBODIMENT 1 is identified by the same reference numeral and the detailed description thereof will be omitted.
- EMBODIMENT 1 a so-called collector-up structure in which the configuration in which the emitter layer 4 , the base layer 5 and the collector layer 6 are stacked in this order from the substrate 1 side is formed.
- EMBODIMENT 2 an emitter-up structure in which the collector layer 6 , the base layer 5 and the emitter layer 4 are stacked in this order from the substrate 1 side is formed.
- Each of the layers is formed by molecular beam epitaxy (MEB).
- the GaN buffer layer 3 is formed by MBE.
- a surface (upper surface) of the GaN buffer layer 3 at a time when the GaN buffer layer 3 is formed is a nitrogen polarity surface in which nitrogen is located at the outermost side.
- an interface (lower surface) of the GaN buffer layer 3 with the AlN buffer layer 2 is a nitrogen polarity surface in which gallium is located in the outermost side.
- the subcollector layer 7 of n-type GaN is formed so as to have a thickness of 500 nm. Si is added as an impurity to GaN forming the subcollector layer 7 at a high concentration (1 ⁇ 10 19 cm ⁇ 3 ).
- the collector layer 6 is formed on the subcollector layer 7 so as to have a thickness of 500 nm.
- the collector layer 6 is formed of n-type AlGaN.
- Si is added as an impurity to AlGaN of the collector layer 6 at a medium concentration (2 ⁇ 10 17 cm ⁇ 1 ) and the aluminum composition ratio of the collector layer 6 is 10%.
- the base layer 5 is formed on the collector layer 6 so as to have a thickness of 70 nm.
- the base layer 5 is formed of p-type GaN. Mg is added as an impurity to GaN forming the base layer 5 at a high concentration (4 ⁇ 10 19 cm ⁇ 3 ). The impurity concentration is constant in the film thickness direction and thus the base layer 5 has a constant band gap in the film thickness direction.
- the emitter layer 4 is formed on the base layer 5 .
- the emitter layer 4 is formed of n-type AlGaN so as to have a thickness of 30 nm.
- Si is added as an impurity to AlGaN at a medium concentration (5 ⁇ 10 17 cm ⁇ 3 ) and the aluminum composition ratio of the emitter layer 4 is 25%.
- FIG. 4 ( a ) An AlN buffer layer 2 , a GaN buffer layer 3 , a subcollector layer 7 , a collector layer 6 , a base layer 5 and an emitter layer 4 are formed in this order on a sapphire substrate 1 .
- each of the layers is formed by MBE.
- the emitter layer 4 is etched by dry etching using chloride gas, thereby forming an emitter mesa and having the base layer 5 exposed.
- FIG. 4 ( b ) With an Si oxide film as a mask, the emitter layer 4 is etched by dry etching using chloride gas, thereby forming an emitter mesa and having the base layer 5 exposed.
- the base layer 5 and the collector layer 6 are etched by dry etching using chloride gas, thereby having the subcollector layer 7 exposed. Then, as shown in FIG. 4 ( d ), an electrode 8 is formed on each of the emitter layer 4 , the base layer 5 and the subcollector layer 7 .
- the HBT of EMBODIMENT 2 can be formed.
- the subcollector layer 7 is formed on a nitrogen polarity surface of the GaN buffer layer 3 .
- the subcollector layer 7 has a lower surface of a gallium polarity surface and an upper layer of a nitrogen polarity surface.
- the collector layer 6 has a lower layer of an aluminum gallium polarity surface and an upper surface of a nitrogen polarity surface and a spontaneous polarization Psp 3 is generated.
- a piezo polarization Ppz 3 due to crystal strains is generated to have the same polarity as that of the spontaneous polarization Psp 3 . With the spontaneous polarization Psp 3 and the piezo polarization Ppz 3 generated, the collector layer 6 has a lower surface of a positive polarity surface and an upper layer of a negative surface.
- the base layer 5 is formed on the nitrogen polarity surface of the collector layer 6 .
- the base layer 5 has a lower surface of a gallium polarity surface and an upper layer of a nitrogen polarity surface and a spontaneous polarization Psp 2 is generated.
- a piezo polarization Ppz 2 due to crystal strains is generated to have the same polarity as that of the spontaneous polarization Psp 2 .
- the base layer 5 has a lower surface of a positive polarity surface and an upper layer of a negative surface.
- the emitter layer 4 is formed on a nitrogen polarity surface of the base layer 5 .
- the emitter layer 4 has a lower surface of an aluminum gallium polarity surface and an upper layer of a nitrogen polarity surface and a spontaneous polarization Psp 1 is generated.
- a piezo polarization Ppz 1 due to crystal strains is generated to have the same polarity as that of the spontaneous polarization Psp 1 .
- the emitter layer 4 has a lower surface of a positive polarity surface and an upper layer of a negative surface.
- the polarities of the spontaneous polarizations Psp 2 and Psp 3 are the same as the polarities of the piezo polarizations Ppz 2 and Ppz 3 , respectively, so that a very large electric charge Q 32 is generated at the interface of the base layer 5 and the collector layer 6 .
- the polarities of the spontaneous polarizations Psp 1 and Psp 2 are the same as the polarities of the piezo polarizations Ppz 1 and Ppz 2 , respectively, so that a very large electric charge Q 12 is generated at the interface of the emitter layer 4 and the base layer 5 .
- the base layer 5 has a band structure in which the band gap is constant in the film thickness direction and the energy of electrons decreases in the direction from the emitter 4 to the collector 6 at each of an end of a conduction band and an end of a valence band.
- EMBODIMENT 2 in the base layer 5 , an internal electric field is generated in the direction in which electrons as carriers are accelerated, so that electrons injected from the emitter layer 4 are accelerated by the internal electric field in the direction from the emitter layer 4 to the collector layer 6 . Accordingly, the transit time of electrons traveling in the base layer 5 toward the collector layer can be efficiently and reliably reduced. Therefore, high-frequency characteristics can be improved. Then, in the HBT, holes are stored in part of the base layer 5 located around the interface with the emitter layer 4 , i.e., in the vicinity of the base electrode 8 , due to the internal electric field, so that a base resistance can be reduced.
- the base layer 5 is in contact with the emitter layer 4 at its nitrogen polarity surface while being in contact with the collector layer 6 at its gallium polarity surface.
- an internal electric field can be generated in the base layer 5 so that electrons as carries are accelerated in the direction from the emitter layer 4 to the collector layer 6 . Therefore, high-frequency characteristics can be improved.
- EMBODIMENT 2 a configuration in which at least one of the emitter layer 4 and the collector layer 6 is doped with an impurity at a (high) concentration of 1 ⁇ 10 18 to 1 ⁇ 10 19 cm ⁇ 3 may be used.
- the emitter layer 4 is formed of a heavily doped layer containing an impurity at a high concentration, carriers can be efficiently injected into the base layer 5 from the emitter layer 4 .
- the collector layer 6 is formed of a heavily doped layer containing an impurity at a high concentration, carriers in the base layer 5 can be made to efficiently flow into the collector layer 6 .
- the collector layer 6 may be formed of GaN.
- the polarities of the spontaneous polarizations are the same as the polarities of the piezo polarizations, so that a sufficiently large electric charge is generated in each interface.
- a sufficiently large internal electric field is generated in the base layer 5 , so that the transit time of electrons in the base layer 5 can be efficiently and reliably reduced.
- a barrier is not generated at the interface of the base layer 5 and the collector layer 6 . Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- FIG. 5 illustrates EMBODIMENT 3 of the present invention.
- each member also described in EMBODIMENT 1 is identified by the same reference numeral and therefore the detailed description thereof will be omitted.
- EMBODIMENT 3 a collector-up structure is formed and a heavily doped layer 9 is provided in the collector layer 6 .
- the heavily doped layer 9 is formed by ⁇ doping. That is, only monosilane (SiH4) is introduced into a furnace when the collector layer 6 has been formed to have a thickness of 20 nm or less, and more preferably a thickness of 10 nm or less, i.e., for example, a thickness of 3 nm, thereby forming the heavily doped layer 9 doped with Si at a high concentration (5 ⁇ 10 12 cm ⁇ 2 ). Thereafter, the collector layer 6 is formed again so that the thickness the collector layer 6 becomes 500 nm. Thus, in the collector layer 6 , the heavily doped layer 9 doped with an impurity at a high concentration is provided only in part of the collector layer 6 in the film thickness direction. A method for forming other part is the same as that of EMBODIMENT 1.
- a low potential portion is formed in the collector layer 6 of AlGaN, so that carriers can pass through the part and carriers which have passed through the base layer 5 can be made to efficiently flow into the collector layer 6 .
- the heavily doped layer 9 is formed by ⁇ doping, so that the heavily doped layer 9 is formed in part of the collector layer.
- a distortion generated at the interface of AlGaN and GaN is not eased and the low potential portion can be formed in the collector layer 6 .
- the intensity of an internal electric field generated in the base layer 5 is not reduced. Accordingly, the efficiency of carrier injection can be improved and thus the transit time of carriers can be reduced. Therefore, high-frequency characteristics can be improved.
- the heavily doped layer 9 is provided in the collector layer 6 so as to be located at a distance of 20 nm or less from the interface with the base layer 5 .
- injection of electrons into the collector layer 6 from the base layer 5 can be efficiently performed. Accordingly, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- the heavily doped layer 9 is formed in the collector layer 6 .
- a heavily doped layer may be formed in the emitter layer 4 or a heavily doped layer may be formed in each of the emitter layer 4 and the collector layer 6 .
- the heavily doped layer is preferably provided in the emitter layer so as to be located at a distance of 20 nm or less, and more preferably 10 nm or less, from the interface with the base layer 5 .
- the same emitter-up structure as that of EMBODIMENT 2 may be formed and also a heavily doped layer may be formed in the emitter layer 4 .
- the electrode 8 is formed on a surface (upper surface) of the emitter layer 4 located in the opposite side to the interface with the base layer 5 . Therefore, it is preferable to form a heavily doped layer in the emitter layer 4 so as to be located at a distance of 20 nm or less, and more preferably 10 nm or less, from the upper surface of the base layer 5 .
- a structure in which a heavily doped layer is provided in the collector layer 6 in the emitter-up structure may be formed.
- a heavily doped layer is preferably formed in the collector layer 6 so as to be located at a distance of 20 nm or less, and more preferably 10 nm or less, from the interface with the base layer 5 .
- electron injection into the collector layer 6 from the base layer 5 can be efficiently performed.
- FIG. 6 illustrates EMBODIMENT 4 of the present invention.
- each member also described in EMBODIMENT 1 is identified by the same reference numeral and therefore the detailed description thereof will be omitted.
- the semiconductor layers 4 , 5 and 6 are stacked to form a collector-up structure. Each of the layers is formed by MOCVD.
- a thin layer portion 19 is formed in the base layer 5 so as to have a smaller thickness than that of other part of the base layer 5 .
- the thin layer portion 19 is formed, as shown in FIG. 6 ( c ), by performing etching so as to leave a 10 nm thickness of the base layer 5 when the base layer 5 is etched by dry etching.
- the base electrode 8 is formed on an upper surface of the thin layer portion 19 .
- a method for forming other part is the same as that of EMBODIMENT 1.
- the interface of the emitter layer 4 and the thin layer portion 19 of the base layer 5 is a hetero-junction interface and the emitter layer 4 and the thin layer portion 19 have different bands.
- an internal electric field is generated in the direction from the collector layer 6 to the emitter layer 4 . Accordingly, electrons are accelerated in the direction from the emitter layer 4 and the collector layer 6 due to the internal electric field.
- the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- holes are stored in part of the base layer located in the vicinity of the interface with the emitter layer 4 due to the internal electric field, so that holes are stored in the vicinity of the base electrode 8 in contact with the base layer 5 .
- a resistance in the base layer 5 can be reduced.
- FIG. 7 illustrates EMBODIMENT 5 of the present invention.
- each member also described in EMBODIMENT 4 is identified by the same reference numeral and therefore the detailed description thereof will be omitted.
- an emitter contact layer 10 of n-type AlGaN is formed on the GaN buffer layer 3 and the emitter layer 4 of AlGaN is formed on the emitter contact layer 10 .
- the emitter contact layer 10 is formed of n-type GaN to have a thickness of 30 nm and Si is added to GaN at a high concentration (5 ⁇ 10 19 cm ⁇ 3 ).
- the emitter layer 4 part of the emitter layer 4 is shaved so that the emitter contact layer 10 is exposed therethrough. Then, the emitter electrode 8 is directly in contact with the emitter contact layer 10 . That is, as shown in FIG. 7 ( c ), the emitter contact layer 10 is made to be exposed when the base layer 5 and the emitter layer 4 are etched by dry etching. The emitter electrode 8 is formed on an upper surface of the emitter contact layer 10 .
- the emitter layer 4 and the emitter electrode 8 for injecting electrons into the emitter layer 4 form an ohmic contact with the emitter contact layer 10 of n-type GaN interposed therebetween.
- a method for forming other part is the same as that of each of EMBODIMENT 1 and EMBODIMENT 4.
- the emitter contact layer 10 of GaN is in contact with the emitter layer 4 of AlGaN and the emitter electrode 8 is in contact with the emitter contact layer 10 . Since GaN has a smaller band gap than that of AlGaN, an ohmic contact can be easily formed, so that a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved.
- FIG. 8 illustrates EMBODIMENT 6 of the present invention.
- each member also described in EMBODIMENT 1 is identified by the same reference numeral and therefore the detailed description thereof will be omitted.
- the emitter contact layer 10 of n-type GaN is provided on the GaN buffer layer 3 and the emitter layer 4 of AlGaN is formed on the emitter contact layer 10 .
- the emitter contact layer 10 is formed of n-type GaN to have a thickness of 30 nm and Si is added to GaN at a high concentration (5 ⁇ 10 19 cm ⁇ 3 ).
- a thin layer portion 18 is formed so as to have a smaller thickness than that of other part of the emitter layer 4 .
- the thin layer portion 18 is formed, as shown in FIG. 8 ( c ), by performing etching so as to leave a thickness of 10 nm of the emitter layer 4 when the emitter layer 4 is etched by dry etching.
- the interface with the emitter contact layer 10 is left in the thin layer portion 18 .
- the base electrode 8 is formed on an upper surface of the thin layer portion 18 .
- a method for forming other part is the same as that of EMBODIMENT 1.
- the interface of the emitter layer 4 of AlGaN and the emitter contact layer 10 of GaN is a hetero-junction interface, and because of differences in polarity characteristics between AlGaN and GaN, conduction electrons (two-dimensional conduction electron gas) are stored in the emitter contact layer 10 side at the interface of the thin layer portion of the emitter layer 4 and the emitter contact layer 10 .
- the conduction electrons can be used for forming an ohmic contact with the emitter electrode 8 and a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved.
- EMBODIMENT 6 in the base layer 5 , an internal electric field is also generated in the direction in which electrons are accelerated. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
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Abstract
In an npn-type HBT, each of an emitter layer and a collector layer is formed of AlGaN and a base layer is formed of GaN. The emitter layer is in contact with a nitrogen polarity surface of the base layer and the collector layer is in contact with a gallium polarity surface of the base layer. An electric charge is generated at each interface due to a spontaneous polarization and a piezo polarization generated in each of the layers. Because of the electric charge, an internal field is generated so as to accelerate electrons in the base layer.
Description
- This application claims priority under 35 U.S.C. §119(a) on Japanese Patent Application No. 2003-309586 filed on Sep. 2, 2003, the entire contents of which are hereby incorporated by reference.
- 1. Technical Field to which the Invention Belongs
- The present invention relates to a semiconductor device and a hetero-junction bipolar transistor in which an n-type first semiconductor layer, a p-type second semiconductor layer and an n-type third semiconductor layer are in contact with one another in this order, and more particularly relates to measures for improving high-frequency characteristics.
- 2. Prior Art
- Conventionally, nitride semiconductor has been well known. The known nitride semiconductor is a semiconductor which has a wide band gap and a high breakdown electric field and therefore its high output operation has been expected. As semiconductor devices using this nitride semiconductor, high electron mobility transistors (HEMTs) and hetero-junction bipolar transistors (HBTs) have been proposed. As an HBT of this kind, in Japanese Laid-Open Publication No. 2002-305204, an npn-type device including a p-type layer of nitride semiconductor is disclosed. In an HBT disclosed in Japanese Laid-Open Publication No. 2002-305204, as shown in
FIG. 9 , aGaN buffer layer 3, asubcollector layer 7, acollector layer 6, an InGaNbuffer layer 15, abase layer 5 and anemitter layer 4 are stacked on asapphire substrate 1 in this order. Of the layers, thesubcollector layer 7 and thecollector layer 6 are formed of n-type gallium nitride (GaN), thebase layer 5 is formed of p-type indium gallium nitride (InGaN), and theemitter layer 4 is formed of n-type GaN. In the HBT, each of the layers is formed by metal organic chemical vapor deposition (MOCVD). Then,electrodes 8 are formed on respective upper surfaces of thesubcollector layer 7, thebase layer 5 and theemitter layer 4, respectively. - By the way, in the known HBT disclosed in Japanese Laid-Open Publication No. 2002-305204, the
base layer 5 is formed of a ternary system, i.e., InGaN, so that a spontaneous polarization is generated in thebase layer 5. Moreover, with theGaN buffer layer 3 and the InGaNbuffer layer 15 provided, strains to be generated in thebase layer 5 are suppressed. However, it is not possible to completely inhibit the generation of strains and therefore a piezo polarization is generated. In the HBT, as shown inFIG. 10 , since each of the layers are formed by MOCVD, an internal electric field is generated in thebase layer 5 so that aselectrons 13 move from theemitter layer 4 to thecollector layer 6, the energy of theelectrons 13 is increased. Thus, in thebase layer 5, the internal electric field is generated in the direction in which the movement of theelectrons 13 as carriers are hindered and the base transit time of theelectrons 13 is increased, so that high-frequency characteristics are deteriorated. Moreover, due to the internal electric field,holes 14, i.e., majority carriers existing in thebase layer 5 move away from anelectrode 8 and are concentrated in a lower portion (the collector side) of thebase layer 5, so that the problem of increase in base resistance is caused. - Furthermore, in the HBT disclosed in Japanese Laid-Open Publication No. 2002-305204, the composition ratio of the
base layer 5 is gradually changed in the film thickness direction. Thus, not only a fabrication method becomes complicated but also it is difficult, in view of crystallinity, to fabricate a quality HBT. - The present invention has been devised in view of the above-described points and it is therefore an object of the present invention to improve high-frequency characteristics and reduce the resistance of a p-type semiconductor layer, while avoiding having a fabrication method complicated.
- The present invention is directed to the generating a polarization so that an electric field is generated in the direction in which carriers are accelerated in a p-type semiconductor layer.
- Specifically, a first aspect of the present invention is assumed to be a semiconductor device including: an n-type first semiconductor layer formed so that electrons are externally injected into the first semiconductor layer; a p-type second semiconductor layer formed so that electrons injected into the first semiconductor layer are injected into the second semiconductor layer; and an n-type third semiconductor layer formed so that electrons having passed through the second semiconductor layer flow into the third semiconductor layer, the first, second and third semiconductor layers being in contact with one another in this order. Spontaneous polarizations Psp1, Psp2 and Psp3 are generated in the first, second and third semiconductor layers, respectively, and the second semiconductor layer is formed so as to have a configuration in which an internal electric field is generated so that an energy of electrons decreases in the direction from the first semiconductor layer to the third semiconductor layer due to an electric charge Q12 generated at an interface with the first semiconductor layer by an interaction of the spontaneous polarizations Psp1 and Psp2 and an electric charge Q23 generated at an interface with the third semiconductor layer by an interaction of the spontaneous polarizations Psp2 and Psp3.
- In this structure, in the p-type second semiconductor layer, the internal electric field due to the electric charge Q12 and the electric charge Q23 is generated so that the energy of electrons as carriers decreases along a moving direction. Therefore, the electrons are accelerated by the internal electric field in the direction from the first semiconductor layer to the third semiconductor layer. Therefore, the transit time of electrons injected from the first semiconductor layer and traveling in the second semiconductor layer toward the third semiconductor layer can be reduced, so that high-frequency characteristics can be improved. When the semiconductor device is applied to an HBT, holes are stored in the vicinity of the base electrode due to the internal electric field. Accordingly, a base resistance can be reduced. Furthermore, the internal electric field is generated by actions of the spontaneous polarizations Psp1, Psp2 and Psp3 generated in the semiconductor layers, respectively. Therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a semiconductor device from becoming complicated and also to stably obtain a quality semiconductor device.
- Moreover, a second aspect of the present invention is assumed to be a semiconductor device including: an n-type first semiconductor layer formed so that electrons are externally injected into the first semiconductor layer; a p-type second semiconductor layer formed so that electrons injected into the first semiconductor layer are injected into the second semiconductor layer; and an n-type third semiconductor layer formed so that electrons having passed through the second semiconductor layer flow into the third semiconductor layer, the first, second and third semiconductor layers being in contact with one another in this order. Piezo polarizations Ppz1, Ppz2 and Ppz3 are generated in the first, second and third semiconductor layers, respectively, and the second semiconductor layer is formed so as to have a configuration in which an internal electric field is generated so that an energy of electrons decreases in the direction from the first semiconductor layer to the third semiconductor layer due to an electric charge Q12 generated at an interface with the first semiconductor layer by an interaction of the piezo polarizations Ppz1 and Ppz2 and an electric charge Q23 generated at an interface with the third semiconductor layer by an interaction of the piezo polarizations Ppz2 and Ppz3.
- In this structure, in the p-type second semiconductor layer, the internal electric field due to the electric charge Q12 and the electric charge Q23 is generated so that the energy of electrons as carriers decreases along a moving direction. Accordingly, a transit time of electrons injected from the first semiconductor layer and traveling in the second semiconductor layer toward the third semiconductor layer can be reduced, so that high-frequency characteristics can be improved. When the semiconductor device is applied to an HBT, holes are stored in the vicinity of the base electrode due to the internal electric field. Therefore, a base resistance can be reduced. Furthermore, the internal electric field is generated by actions of the piezo polarizations Ppz1, Ppz2 and Ppz3 generated in the semiconductor layers, respectively. Therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a semiconductor device from becoming complicated and also to stably obtain a quality semiconductor device.
- Moreover, a third aspect of the present invention is assumed to be a semiconductor device including: an n-type first semiconductor layer formed so that electrons are externally injected into the first semiconductor layer; a p-type second semiconductor layer formed so that electrons injected into the first semiconductor layer are injected into the second semiconductor layer; and an n-type third semiconductor layer formed so that electrons having passed through the second semiconductor layer flow into the third semiconductor layer, the first, second and third semiconductor layers being in contact with one another in this order. A spontaneous polarization Psp1 and a piezo polarization Ppz1 are generated in the first semiconductor layer, a spontaneous polarization Psp2 and a piezo polarization Ppz2 are generated in the second semiconductor layer, a spontaneous polarization Psp3 and a piezo polarization Ppz3 are generated in the third semiconductor layer, respective polarities of the spontaneous polarizations are the same as respective polarities of the piezo polarizations, respectively, and the second semiconductor layer is formed so as to have a configuration in which an internal electric field is generated so that an energy of electrons decreases in the direction from the first semiconductor layer to the third semiconductor layer due to an electric charge Q12 generated at an interface with the first semiconductor layer by an interaction of the spontaneous polarization Psp1, the piezo polarization Ppz1, the spontaneous polarization Psp2 and the piezo polarization Ppz2 and an electric charge Q23 generated at an interface with the third semiconductor layer by an interaction of the spontaneous polarization Psp2, the piezo polarization Ppz2, the spontaneous polarization Psp3 and the piezo polarization Ppz3.
- In this structure, the respective polarities of the spontaneous polarizations Psp1, Psp2 and Psp3 are the same as the respective polarities of the piezo polarizations Ppz1, Ppz2 and Ppz3, respectively. Thus, the spontaneous polarizations Psp1, Psp2 and Psp3 and the piezo polarizations Ppz1, Ppz2 and Ppz3 do not cancel to each other, so that the very large electric charge Q12 is generated at the interface of the first semiconductor layer and the second semiconductor layer and the very large electric charge Q23 is generated at the interface of the second semiconductor layer and the third semiconductor layer. With the electric charges Q12 and Q23, an internal electric field is generated in the p-type second semiconductor layer, so that the energy of electrons as carriers decreases in a moving direction. Accordingly, electrons injected from the first semiconductor layer are accelerated by the internal electric field in the direction from the first semiconductor layer to the third semiconductor layer and thus the transit time of electrons traveling in the second semiconductor layer toward the third semiconductor layer can be efficiently and reliably reduced. Therefore, high-frequency characteristics can be improved. When the semiconductor device is applied to an HBT, holes are stored in the vicinity of the base electrode due to the internal electric field. Therefore, a base resistance can be reduced.
- Moreover, the internal electric field is generated by actions of the spontaneous polarizations Psp1, Psp2 and Psp3 and the piezo polarizations Ppz1, Ppz2 and Ppz3 generated in the semiconductor layers, respectively. Therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a HBT from becoming complicated and also to stably obtain a quality semiconductor device. Moreover, in one embodiment of the semiconductor device, each of the first and third semiconductor layers is formed of aluminum gallium nitride (AlGaN), and the second semiconductor layer is formed of gallium nitride (GaN).
- In this structure, the respective polarities of the spontaneous polarizations Psp1, Psp2 and Psp3 are the same as the respective polarities of the piezo polarizations Ppz1, Ppz2 and Ppz3, respectively. Thus, the spontaneous polarizations Psp1, Psp2 and Psp3 and the piezo polarizations Ppz1, Ppz2 and Ppz3 do not cancel to each other, so that the very large electric charge Q12 is generated at the interface of the first semiconductor layer and the second semiconductor layer and the very large electric charge Q23 is generated at the interface of the second semiconductor layer and the third semiconductor layer. With the electric charges Q12 and Q23, a very large internal electric field is generated in the second semiconductor layer, so that the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced. Furthermore, the first semiconductor layer and the second semiconductor layer form a hetero-junction, so that the efficiency of injection into the second semiconductor layer can be improved.
- Moreover, it is preferable that the first semiconductor layer has a higher aluminum composition ratio than that of the third semiconductor layer.
- In this structure, a barrier at the interface of the first semiconductor layer and the second semiconductor layer is higher than that at the interface of the second semiconductor layer and the third semiconductor layer. Accordingly, when electrons injected from the first semiconductor layer pass through the second semiconductor layer to reach the third semiconductor layer, the electrons have enough energy to go over the barrier at the interface of the second semiconductor layer and the third semiconductor layer. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- Moreover, in one embodiment of the semiconductor device, the first semiconductor layer is formed of AlGaN, and each of the second and third semiconductor layers is formed of GaN.
- In this structure, the respective polarities of the spontaneous polarizations Psp1, Psp2 and Psp3 are the same as the respective polarities of the piezo polarizations Ppz1, Ppz2 and Ppz3. Thus, the spontaneous polarizations Psp1, Psp2 and Psp3 and the piezo polarizations Ppz1, Ppz2 and Ppz3 do not cancel to each other, so that the sufficiently large electric charge Q12 is generated at the interface of the first semiconductor layer and the second semiconductor layer and the sufficiently large electric charge Q23 is generated at the interface of the second semiconductor layer and the third semiconductor layer. With the electric charges Q12 and Q23, a sufficiently large internal electric field is generated in the second semiconductor layer, so that the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced. Furthermore, a barrier is not generated at the interface of the second semiconductor layer and the third semiconductor layer. Also in this point, a transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- Moreover, a fourth aspect of the present invention is assumed to be a semiconductor device including: an n-type first semiconductor layer formed so that electrons are externally injected into the first semiconductor layer; a p-type second semiconductor layer formed so that electrons injected into the first semiconductor layer are injected into the second semiconductor layer; and an n-type third semiconductor layer formed so that electrons having passed through the second semiconductor layer flow into the third semiconductor layer, the first, second and third semiconductor layers being in contact with one another in this order. The second semiconductor layer is formed of gallium nitride, the first semiconductor layer is in contact with a nitrogen polarity surface of the second semiconductor layer, and the third semiconductor layer is in contact with a gallium polarity surface of the second semiconductor layer.
- In this structure, the second semiconductor layer is in contact with the first semiconductor layer at its nitrogen polarity surface while being in contact with the third semiconductor layer at its gallium polarity surface. Thus, in the second semiconductor layer, due to the spontaneous polarization, the interface with the first semiconductor layer becomes a negative polarity and the interface with the third semiconductor layer becomes a positive polarity. With the electric charges generated at the interfaces, an internal electric field is generated in the second semiconductor layer so that electrons as carries are accelerated in the direction from the first semiconductor layer to the third semiconductor layer. As a result, the transit time of electrons traveling in the second semiconductor layer toward the third semiconductor layer can be reduced. Therefore, high-frequency characteristics can be improved. When the semiconductor device is applied to an HBT, holes are stored in the vicinity of the base electrode due to the internal electric field. Therefore, a base resistance can be reduced. Furthermore, the internal electric field is generated by actions of the spontaneous polarizations. Therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a semiconductor device from becoming complicated and also to stably obtain a quality semiconductor device.
- Moreover, in one embodiment of the semiconductor device, each of the first and third semiconductor layers is formed of AlGaN.
- In this structure, the respective polarities of the spontaneous polarizations generated in the semiconductor layers are the same as the respective polarities of the piezo polarizations generated in the semiconductor layers, respectively. Thus, the spontaneous polarizations and the piezo polarizations do not cancel to each other, so that a very large electric charge is generated at the interface of the first semiconductor layer and the second semiconductor layer and a very large electric charge is generated at the interface of the second semiconductor layer and the third semiconductor layer. With the electric charges, a very large internal electric field is generated in the second semiconductor layer, so that the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced. Furthermore, the first semiconductor layer and the second semiconductor layer form a hetero-junction, so that the efficiency of injection into the second semiconductor layer can be improved.
- Moreover, in the semiconductor device, it is preferable that the first semiconductor layer has a higher aluminum composition ratio than that of the third semiconductor layer.
- In this structure, a barrier at the interface of the first semiconductor layer and the second semiconductor layer is higher than that at the interface of the second semiconductor layer and the third semiconductor layer. Accordingly, when electrons injected from the first semiconductor layer pass through the second semiconductor layer to reach the third semiconductor layer, the electrons have enough energy to go over the barrier at the interface of the second semiconductor layer and the third semiconductor layer. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- Moreover, in one embodiment of the semiconductor device, the first semiconductor layer is formed of AlGaN, and the third semiconductor layer is formed of GaN.
- In this structure, the respective polarities of the spontaneous polarizations generated in the semiconductor layers are the same as the respective polarities of the piezo polarizations generated in the semiconductor layers, respectively. Thus, the spontaneous polarizations and the piezo polarizations do not cancel to each other, so that a sufficiently large electric charge is generated at the interface of the first semiconductor layer and the second semiconductor layer and a sufficiently large electric charge is generated at the interface of the second semiconductor layer and the third semiconductor layer. With the electric charges, a sufficiently large internal electric field is generated in the second semiconductor layer, so that the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced. Furthermore, a barrier is not generated at the interface of the second semiconductor layer and the third semiconductor layer. Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- Moreover, the semiconductor device may have a configuration in which the first, second and third semiconductor layers are stacked in this order from a substrate side.
- Moreover, in one embodiment of the semiconductor device, at least one of the first and third semiconductor layers of aluminum gallium nitride is doped with an impurity at a concentration of 1×1018 to 1×1019 cm−3.
- In this structure, at least one of the first semiconductor layer and the third semiconductor layer is formed of a heavily doped layer containing an impurity at a high concentration, so that a layer formed of AlGaN becomes a low potential portion and thus carriers can pass through this portion. Accordingly, if the first semiconductor layer is formed of a heavily doped layer, carriers can be efficiently injected into the second semiconductor layer from the first semiconductor layer. On the other hand, if the third semiconductor layer is formed of a heavily doped layer, carriers having passed through the second semiconductor layer can be efficiently taken out from the third semiconductor layer. Specifically, in the structure in which the first semiconductor layer, the second semiconductor layer and the third semiconductor layer are stacked in this order from a substrate side, carriers are hardly injected into the second semiconductor layer from the first semiconductor layer and also carriers hardly flow into the third semiconductor layer from the second semiconductor layer. Therefore, it is very effective to form each of the first semiconductor layer and the third semiconductor layer as a heavily doped layer.
- Moreover, in one embodiment of the semiconductor layer, a heavily doped layer formed by δ doping is provided in at least one of the first and third semiconductor layers formed of AlGaN.
- In this structure, a low potential portion is formed in a layer formed of AlGaN, so that carriers can pass through the portion. Thus, carriers can be efficiently injected into the second semiconductor layer from the first semiconductor layer or carriers having passed through the second semiconductor layer can be made to efficiently flow into the third semiconductor layer. Moreover, the heavily doped layer is formed by δ doping, so that the heavily doped layer is formed in part of the first semiconductor layer and/or the third semiconductor layer. As a result, distortion generated at the interface of AlGaN and GaN is not eased and a low potential portion can be formed in at least one of the first semiconductor layer and the third semiconductor layer. Accordingly, an internal electric field generated in the second semiconductor layer is not reduced, so that the efficiency of carrier injection can be improved. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- Moreover, in one embodiment of the semiconductor device, in the first semiconductor layer, an electrode is in contact with a surface of the first semiconductor layer located on an opposite side to the second semiconductor layer, and the heavily doped layer is provided in the first semiconductor layer so as to be located at a distance of 20 nm or less from the surface with which the electrode is in contact.
- In this structure, the heavily doped layer is provided in the first semiconductor layer so as to be located at a distance of 20 nm or less from the surface with which the electrode is in contact. Thus, injection of electrons from the electrode can be efficiently performed. Accordingly, the efficiency of carrier injection can be improved. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- Moreover, in one embodiment of the semiconductor device, the heavily doped layer is provided in the third semiconductor layer so as to be located at a distance of 20 nm or less from the interface with the second semiconductor layer.
- In this structure, the heavily doped layer is provided in the third semiconductor layer so as to be located at a distance of 20 nm or less from the interface of the second semiconductor layer and the third semiconductor layer. Thus, electrons in the second semiconductor layer efficiently flow into the third semiconductor layer. Accordingly, the efficiency of carrier injection can be improved. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- Moreover, in one embodiment of the semiconductor device, in the second semiconductor layer, a thin layer portion is formed, with an interface with the first semiconductor layer left, so as to have a smaller thickness than that of other part, and in the thin layer portion, an electrode for taking out electrons in the second semiconductor layer is in contact with the thin layer portion.
- In this structure, the interface of the first semiconductor layer of AlGaN and the thin layer portion of the second semiconductor layer of GaN is a hetero-junction interface and the first semiconductor layer and the thin layer portion have different bands. Moreover, in the second semiconductor layer, an internal electric field is generated to extend from the third semiconductor layer to the first semiconductor layer. Accordingly, electrons are accelerated in the direction from the first semiconductor layer to the third semiconductor layer due to the internal electrode. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. Moreover, holes are stored in the vicinity of the interface with the first semiconductor layer due to the internal electric field in the second semiconductor layer, so that holes are stored in the vicinity of the electrode in contact with the thin layer portion of the second semiconductor layer. Therefore, a resistance of the second semiconductor layer can be reduced.
- Moreover, in one embodiment of the semiconductor device, in the first semiconductor layer, a contact layer of n-type GaN is in contact with a surface of the first semiconductor layer located in an opposite side to the second semiconductor layer, and the first semiconductor layer and the electrode for injecting electrons into the first semiconductor layer form an ohmic contact with the contact layer interposed therebetween.
- In this structure, the contract layer of GaN is in contact with the first semiconductor layer of AlGaN and the electrode is in contact with the contact layer. The interface of the first semiconductor layer and the contact layer is a hetero-junction interface. Moreover, because of a difference in polarity characteristics between AlGaN and GaN, conduction electrons (two-dimensional conduction electron gas) are stored in the contact layer side of the interface of the first semiconductor layer and the contact layer. Accordingly, the conduction electrons can be used for forming an ohmic contact with the electrode and then a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved.
- Moreover, in one embodiment of the semiconductor layer, in the first semiconductor layer, while a contact layer of n-type gallium nitride is in contact with a surface of the first semiconductor layer located on an opposite side to the second semiconductor layer, a thin layer portion is formed, with an interface with the contact layer left, so as to have a smaller thickness than that of other part, and an electrode for injecting electrons is in contact with the thin layer portion.
- In this structure, the interface of the first semiconductor layer of AlGaN and the contact layer of GaN is a hetero-junction interface. Moreover, because of a difference in polarity characteristics between AlGaN and GaN, conduction electrons are stored in the contact layer side of the interface of the first semiconductor layer and the contact layer. Accordingly, the conduction electrons can be used for forming an ohmic contact with the electrode and a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved.
- Moreover, in one embodiment of the semiconductor device, the first semiconductor layer is formed as an emitter layer, the second semiconductor layer is formed as a base layer, and the third semiconductor layer is formed as a collector layer.
- Moreover, a fifth aspect of the present invention is assumed to be a hetero-junction bipolar transistor including: an emitter layer formed of n-type semiconductor; a base layer formed of p-type semiconductor; and a collector layer formed of n-type semiconductor, the emitter, base and collector layers being in contact with one another in this order. The base layer is formed of GaN, the emitter layer is in contact with a nitrogen polarity surface of the base layer, and the collector layer is in contact with a gallium polarity surface of the base layer.
- In this structure, the base layer is in contact with the emitter layer at its nitrogen polarity surface while being in contact with the collector layer at its gallium polarity surface. Thus, in the base layer, due to the spontaneous polarization, the interface with the emitter layer becomes a negative polarity and the interface with the collector layer becomes a positive polarity. With electric charges generated at the interfaces, an internal electric field is generated in the base layer so that electrons as carries are accelerated in the direction from the first semiconductor layer to the third semiconductor layer. As a result, the transit time of electrons injected from the emitter layer and traveling in the base layer toward the collector layer can be reduced. Therefore, high-frequency characteristics can be improved. Moreover, holes are stored in the vicinity of the base electrode due to the internal electric field. Thus, a base resistance can be reduced. Furthermore, the internal electric field is generated by actions of the spontaneous polarizations. Therefore, there is no need to change the composition ratio of the base layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the base layer. As a result, it is possible to prevent a method for fabricating a HBT from becoming complicated and also to stably obtain an HBT.
- Moreover, in one embodiment of the HBT, each of the emitter layer and the collector layer is formed of AlGaN.
- In this structure, the respective polarities of the spontaneous polarizations generated in the emitter layer, the base layer, and the collector layer are the same as the respective polarities of the piezo polarizations generated in the emitter, base and collector layers. Thus, the spontaneous polarizations and the piezo polarizations do not cancel to each other, so that a very large electric charge is generated at the interface of the emitter layer and the base layer and a very large electric charge is generated at the interface of the base layer and the collector layer. With the electric charges, a very large internal electric field is generated in the base layer, so that the transit time of electrons in the base layer can be efficiently and reliably reduced. Furthermore, the emitter layer and the base layer form a hetero-junction, so that the efficiency of electron injection can be improved.
- Moreover, in one embodiment of the HBT, the emitter layer is formed of AlGaN, and the collector layer is formed of GaN.
- In this structure, the respective polarities of the spontaneous polarizations generated in the emitter layer, the base layer, and the collector layer are the same as the respective polarities of the piezo polarizations generated in the emitter, base and collector layers. Thus, the spontaneous polarizations and the piezo polarizations do not cancel to each other, so that a sufficiently large electric charge is generated at the interface of the emitter layer and the base layer and a sufficiently large electric charge is generated at the interface of the base layer and the collector layer. With the electric charges, a sufficiently large internal electric field is generated in the base layer, so that the transit time of electrons in the base layer can be efficiently and reliably reduced. Furthermore, a barrier is not generated at the interface of the base layer and the collector layer. Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
- According to the invention of
claim 1, in the second semiconductor layer, the internal electric field to be generated due to the respective spontaneous polarization in the semiconductor layers is generated so that the energy of electrons as carriers decreases in the direction from the first semiconductor layer to the third semiconductor layer. Thus, the transit time of electrons injected from the first semiconductor layer and traveling in the second semiconductor layer toward the third semiconductor layer can be reduced, so that high-frequency characteristics can be improved. Moreover, the respective spontaneous polarizations generated in the semiconductor layers are utilized and, therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a semiconductor device from becoming complicated and also to stably obtain a quality semiconductor device. - According to the invention of
claim 2, in the second semiconductor layer, the internal electric field to be generated due to the respective piezo polarization in the semiconductor layers is generated so that the energy of electrons as carriers decreases in the direction from the first semiconductor layer to the third semiconductor layer. Thus, the transit time of electrons injected from the first semiconductor layer and traveling in the second semiconductor layer toward the third semiconductor layer can be reduced, so that high-frequency characteristics can be improved. Moreover, the respective piezo polarizations generated in the semiconductor layers are utilized and, therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a semiconductor device from becoming complicated and also to stably obtain a quality semiconductor device. - According to the invention of
claim 3, the respective polarities of spontaneous polarizations generated in the semiconductor layers are the same as the respective polarities of piezo polarizations generated in the semiconductor layer, respectively, so that the spontaneous polarizations and the piezo polarizations do not cancel to each other and a very large electric charge is generated at each interface. Thus, the transit time of electrons traveling in the second semiconductor layer toward the third semiconductor layer can be efficiently and reliably reduced, so that high-frequency characteristics can be improved. Moreover, the spontaneous polarizations and piezo polarizations generated in the semiconductor layers are utilized and, therefore, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction for the purpose of changing the band structure to reduce a resistance in the second semiconductor layer. As a result, it is possible to prevent a method for fabricating a semiconductor device from becoming complicated and also to stably obtain a quality semiconductor device. - According to the invention of
claim 4, each of the first semiconductor layer and the third semiconductor layer is formed of AlGaN and the second semiconductor layer is formed of GaN. Thus, a very large electric charge can be generated at the interface of each semiconductor layer and due to an internal electric field generated by the electric charge, the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced. Moreover, the interface of the first semiconductor layer and the second semiconductor layer is a hetero-junction, so that the efficiency of injection into the second semiconductor layer can be improved. - According to the invention of
claim 5, the first semiconductor layer has a higher aluminum composition ratio than that of the third semiconductor layer. Thus, carriers can easily go over a barrier generated at the interface of the second semiconductor layer and the third semiconductor layer. Therefore, the transit time of electrons can be reduced, so that high-frequency characteristics can be improved. - According to the invention of
claim 6, the first embodiment is formed of AlGaN and each of the second semiconductor layer and the third semiconductor layer is formed of GaN, so that a sufficiently large electric charge can be generated at each interface and due to an internal electric fields generated by the electric charge, the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced. Moreover, a barrier is not generated at the interface of the second semiconductor layer and the third semiconductor layer. Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. - According to the invention of
claim 7, the first semiconductor layer is in contact with a nitrogen polarity surface of the second semiconductor layer of GaN and also the third semiconductor layer is in contact with a gallium polarity surface of the second semiconductor layer. Thus, in the second semiconductor layer, an internal electric field can be generated so that electrons as carriers are accelerated in the direction from the first semiconductor layer to the third semiconductor layer due to the spontaneous polarizations. Therefore, the transit time of electrons can be reduced, so that high-frequency characteristics can be improved. Moreover, there is no need to change the composition ratio of the second semiconductor layer in the film thickness direction, so that it is possible to prevent a method for fabricating a HBT from becoming complicated and also to stably obtain a quality semiconductor device. - According to the invention of
claim 8, each of the first semiconductor layer and the third semiconductor layer is formed of AlGaN and the second semiconductor layer is formed of GaN. Thus, a very large electric charge can be generated at each interface and due to an internal electric field generated by the electric charge, the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced. Moreover, the interface of the first semiconductor layer and the second semiconductor layer is a hetero-junction, so that the efficiency of injection into the second semiconductor layer can be improved. - According to the invention of
claim 9, the first semiconductor layer has a higher aluminum composition ratio than that of the third semiconductor layer. Thus, carriers can easily go over a barrier generated at the interface of the second semiconductor layer and the third semiconductor layer. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. - According to the invention of
claim 10, the first semiconductor layer is formed of AlGaN and each of the second semiconductor layer and the third semiconductor layer is formed of GaN. Thus, a sufficiently large electric charge can be generated at each interface and due to an internal electric field generated by the electric charge, the transit time of electrons in the second semiconductor layer can be efficiently and reliably reduced. Moreover, a barrier is not generated at the interface of the second semiconductor layer and the third semiconductor layer. Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. - According to the invention of
claim 12, at least one of the first semiconductor layer and the third semiconductor layer is doped with an impurity at a high concentration. Thus, the potentials of the semiconductor layers can be reduced. Therefore, carriers can be efficiently injected into the second semiconductor layer from the first semiconductor layer or carriers having passed through the second semiconductor layer can be efficiently taken out from the third semiconductor layer. - According to the invention of
claim 13, a heavily doped layer formed by δ doping is provided in at least one of the first semiconductor layer and the third semiconductor layer, so that distortion generated at the interface of AlGaN and GaN is not eased and a low potential portion can be formed in at least one of the first semiconductor layer and the third semiconductor layer. Accordingly, the intensity of an internal electric field generated in the second semiconductor layer is not reduced, so that the efficiency of carrier injection can be improved. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. - According to the invention of
claim 14, the heavily doped layer is provided in the first semiconductor layer so as to be located at a distance of 20 nm or less from a surface opposite side to the second semiconductor layer. Thus, the efficiency of carrier injection from the electrode provided on a surface thereof can be improved. Accordingly, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. - According to the invention of
claim 15, the heavily doped layer is provided in the third semiconductor layer so as to be located at a distance of 20 nm or less from the interface with the second semiconductor layer. Thus, the efficiency of making electrons in the second semiconductor layer flow into the third semiconductor layer can be improved. Accordingly, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. - According to the invention of claim 16, a thin layer portion is formed so that the interface with the first semiconductor layer is left in the second semiconductor layer and an electrode for taking out electrons in the second semiconductor layer is in contact with the thin layer portion. Thus, due to the internal electric field generated in the second semiconductor layer, holes are stored in the vicinity of the interface with the first semiconductor layer in the thin layer portion. As a result, holes are stored in the vicinity of the electrode in contact with the thin layer portion of the second semiconductor layer, so that a resistance in the second semiconductor layer can be reduced.
- According to the invention of claim 17, the contact layer of n-type GaN is in contact with the first semiconductor layer and the first semiconductor layer and the electrode for injecting electrons into the first semiconductor layer form an ohmic contact with the contact layer interposed therebetween, so that conduction electrons are stored in the contact layer side of the interface of the first semiconductor layer and the contact layer. Thus, conduction electrons can be used for forming an ohmic contact with the electrode and a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved.
- According to the invention of
claim 18, the contact layer of n-type GaN is in contact with the first semiconductor layer, a thin layer portion is formed so that the interface with the contact layer is left, and the electrode is in contact with the thin layer portion. Thus, conduction electrons are stored in the contact layer side of the interface of the thin layer portion of the first semiconductor layer and the contact layer. Therefore, the conduction electrons can be used for forming an ohmic contact with the electrode and a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved. - According to the invention of claim 20, a base layer of an HBT is formed of GaN and the base layer is in contact with an emitter layer at its nitrogen polarity surface while being in contact with the collector layer at its gallium polarity surface. Thus, an internal electric field can be generated in the base layer so that electrons as carriers are accelerated in the direction from the emitter layer to the collector layer. Therefore, the transit time of electrons can be reduced, so that high-frequency characteristics can be improved. Moreover, due to the internal electric field, holes can be stored in the vicinity of the base electrode, so that a base resistance can be reduced. Furthermore, there is no need to change the composition ratio of the base layer in the film thickness direction. As a result, it is possible to prevent a fabrication method from becoming complicated and also to stably obtain a quality HBT.
- According to the invention of
claim 21, each of the emitter layer and the collector layer is formed of AlGaN. Thus, a very large electric charge is generated at the interface of the emitter layer and the base layer and a very large internal electric field can be generated in the base layer. As a result, the transit time of electrons in the base layer can be efficiently and reliably reduced. Furthermore, the interface of the emitter layer and the base layer is a hetero-junction, so that the efficiency of injection into the base layer can be improved. - According to the invention of claim 22, the emitter layer is formed of AlGaN and the collector layer is formed of GaN. Thus, a sufficiently large electric charge is generated at each interface and a sufficiently large internal electric field can be formed in the base layer. As a result, the transit time of electrons in the base layer can be efficiently and reliably reduced. Furthermore, in the present invention, a barrier is not generated at the interface of the base layer and the collector layer. Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved.
-
FIG. 1 shows cross-sectional views illustrating the entire structure of an HBT according toEMBODIMENT 1 of the present invention. -
FIG. 2 is a view illustrating polarizations and electric fields generated in the HBT ofEMBODIMENT 1 of the present invention. -
FIG. 3 is a band diagram for the HBT ofEMBODIMENT 1 of the present invention. -
FIG. 4 shows cross-sectional views corresponding toFIG. 1 and illustrating an HBT according toEMBODIMENT 2 of the present invention. -
FIG. 5 shows cross-sectional views corresponding to those ofFIG. 1 and illustrating an HBT according toEMBODIMENT 3 of the present invention. -
FIG. 6 shows cross-sectional views corresponding to those ofFIG. 1 and illustrating an HBT according toEMBODIMENT 4 of the present invention. -
FIG. 7 shows cross-sectional views corresponding to those ofFIG. 1 and illustrating an HBT according toEMBODIMENT 5 of the present invention. -
FIG. 8 shows cross-sectional views corresponding to those ofFIG. 1 and illustrating an HBT according toEMBODIMENT 6 of the present invention. -
FIG. 9 shows cross-sectional views corresponding to those ofFIG. 1 and illustrating a known HBT. -
FIG. 10 shows a band diagram corresponding to that ofFIG. 3 and illustrating a known HBT. - Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
- As Shown in
FIG. 1 , a Semiconductor Device According toEmbodiment 1 is formed as a hetero-junction bipolar transistor (HBT) in which anemitter layer 4 as a first semiconductor layer, abase layer 5 as a second semiconductor layer, and acollector layer 6 as a third semiconductor layer are formed over asapphire substrate 1. Each of the layers is formed by metal organic chemical deposition (MOCVD). - On the
sapphire substrate 1, anAlN buffer layer 2 of aluminum nitride (AlN) is formed. TheAlN buffer layer 2 is formed so as to have a thickness of 20 nm. On theAlN buffer layer 2, aGaN buffer layer 3 of gallium nitride (GaN) is formed. TheGaN buffer layer 3 is formed so as to have a thickness of 15 nm. TheGaN buffer layer 3 is formed by MOCVD and thus a surface (upper surface) thereof at a time when the GaN buffer layer is formed is a gallium polarity surface in which gallium is located at the outermost side. Moreover, an interface (lower surface) of theGaN buffer layer 3 with theAlN buffer layer 2 is a nitrogen polarity surface in which nitrogen is located in the outermost side. - The
emitter layer 4 is formed on theGaN buffer layer 3. Theemitter layer 4 is formed of n-type aluminum gallium nitride (AlGaN) so as to have a thickness of 30 nm. Silicon (Si) is added as an impurity to AlGaN at a medium concentration (5×1017 cm−3) so that the aluminum composition rate of theemitter layer 4 is 25%. - The
base layer 5 is formed on theemitter layer 4 so as to have a thickness of 70 nm. Thebase layer 5 is formed of p-type GaN. That is, the junction of theemitter base layer 4 and thebase layer 5 is a hetero-junction in which thebase layer 5 has a narrow gap with respect to theemitter layer 4. Magnesium (Mg) is added as an impurity to GaN which forms thebase layer 5 at a high concentration (4×1019 cm−3). The concentration of the impurity is constant in the film thickness direction and thus thebase layer 5 has a constant band gap in the film thickness direction. - The
collector layer 6 is formed on thebase layer 5 so as to have a thickness of 500 nm. Thecollector layer 6 is formed of n-type AlGaN. That is, the junction of thebase layer 5 and thecollector layer 6 is a hetero-junction in which thebase layer 5 has a narrow gap with respect to thecollector layer 6. Si is added as an impurity to AlGaN of thecollector layer 6 at a medium concentration (2×1017 cm−3) and the aluminum composition of thecollector layer 6 is 10%. That is, inEMBODIMENT 1, the aluminum composition of theemitter layer 4 is higher than that of thecollector layer 6. - On the
collector layer 6, asubcollector layer 7 of n-type GaN is formed. Thesubcollector layer 7 is formed so as to have a thickness of 500 nm. Si is added as an impurity to GaN forming thesubcollector layer 7 at a high concentration (1×1019 cm−3). - On respective upper surfaces of the
emitter layer 4, thebase layer 5 and thesubcollector layer 7,electrodes 8 are provided, respectively. Anelectrode 8 in contact with theemitter layer 4 forms an emitter electrode and is configured so that electrons are externally injected into the electrode. Moreover, anelectrode 8 in contact with thebase layer 5 forms a base electrode and is so configured to take out part of electrons injected into theemitter layer 4 from thebase layer 5. Moreover, anelectrode 8 in contact with thesubcollector layer 7 forms a collector electrode and is so configured to take out electrons which have passed through thebase layer 5. - A method for fabricating an HBT according to
EMBODIMENT 1 will be described. As shown inFIG. 1 (a), anAlN buffer layer 2, aGaN buffer layer 3, anemitter layer 4, abase layer 5, acollector layer 6 and asub-collect layer 7 are formed on asapphire substrate 1 in this order. In this case, each of the layers is formed by MOCVD. Then, as shown inFIG. 1 (b), with an Si oxide film as a mask, thesubcollector layer 7 and thecollector layer 6 are etched in this order by dry etching using chloride gas, thereby forming a collector mesa and having thebase layer 5 exposed. Next, as shown inFIG. 1 (c), with the Si oxide film as a mask, thebase layer 5 is etched by dry etching using chloride gas, thereby having theemitter layer 4 exposed. Then, as shown inFIG. 1 (d), anelectrode 8 is formed on each of thesubcollector layer 7, thebase layer 5 and theemitter layer 4. Thus, the HBT ofEMBODIMENT 1 can be formed. - Polarizations generated in the
emitter layer 4, thebase layer 5 and thecollector layer 6 will be described with reference toFIG. 2 . Theemitter layer 4 is made of AlGaN, as has been described above, and formed on a gallium polarity surface of theGaN buffer layer 3. Thus, theemitter layer 4 has a lower surface of a nitrogen polarity surface and an upper surface of an aluminum gallium polarity surface, and a spontaneous polarization Psp1 is generated. Moreover, in theemitter layer 4, a piezo polarization Ppz1 due to crystal strains is generated. In AlGaN, the piezo polarization Ppz1 is generated to have the same polarity as that of the spontaneous polarization Psp1. With the spontaneous polarization Psp1 and the piezo polarization Ppz1 generated, theemitter layer 4 has a lower surface of a negative polarity surface and an upper layer of a positive surface. - The
base layer 5 is formed on the aluminum gallium polarity surface of theemitter layer 4. Thus, a lower surface of thebase layer 5 is a nitrogen polarity surface and an upper surface thereof is a gallium polarity surface and a spontaneous polarization Psp2 is generated. Moreover, in thebase layer 5, a piezo polarization Ppz2 due to crystal strains is generated. Since thebase layer 5 is formed of GaN, the piezo polarization Ppz2 is generated to have the same polarity as that of the spontaneous polarization Psp2. With the spontaneous polarization Psp2 and the piezo polarization Ppz2 generated, thebase layer 5 has a lower surface of a negative polarity surface and an upper layer of a positive surface. - The
collector layer 6 is formed on the gallium polarity surface of thebase layer 5. Thus, a lower surface of thecollector layer 6 is a nitrogen polarity surface and an upper surface thereof is an aluminum gallium polarity surface and a spontaneous polarization Psp3 is generated. Moreover, in thecollector layer 6, a piezo polarization Ppz3 due to crystal strains is generated. Since thecollector layer 6 is formed of AlGaN, the piezo polarization Ppz3 is generated to have the same polarity as that of the spontaneous polarization Psp3. With the spontaneous polarization Psp3 and the piezo polarization Ppz3 generated, thecollector layer 6 has a lower surface of a negative polarity surface and an upper layer of a positive polarity surface. - Polarities of the spontaneous polarizations Psp1 and Psp2 are the same as polarities of the piezo polarizations Ppz1 and Ppz2, respectively. Therefore, a very large electric charge Q12 is generated at the interface of the
emitter layer 4 and thebase layer 5. Moreover, polarities of the spontaneous polarizations Psp2 and Psp3 are the same as polarities of the piezo polarizations Ppz2 and Ppz3, respectively. Therefore, a very large electric charge Q23 is generated at the interface of thebase layer 5 and thecollector layer 6. Thus, an internal electric field is generated in thebase layer 5 so that electrons are accelerated from theemitter layer 4 to thecollector layer 6. - Accordingly, in the HBT of
EMBODIMENT 1, as shown inFIG. 3 , the base layer has a band structure in which the band gap is constant in the film thickness direction and the energy of electrons decreases in the direction from theemitter 4 to thecollector 6 at an end of aconduction band 11 and an end of avalence band 12. - As has been described, in the HBT of this embodiment, the polarities of the spontaneous polarizations Psp1, Psp2 and Psp3 are the same as the polarities of the piezo polarizations Ppz1, Ppz2 and Ppz3, respectively, so that the spontaneous polarizations Psp1, Psp2 and Psp3 and the piezo polarizations Ppz1, Ppz2 and Ppz3 do not cancel to each other, and the very large electric charge Q12 is generated at the interface of the
emitter layer 4 and thebase layer 5 while the very large electric charge Q23 is generated at the interface of thebase layer 5 and thecollector layer 6. Then, with the electric charges Q12 and Q23, in the p-type base layer 5, an internal electric field is generated so that the energy of electrons decreases in the direction from the emitter layer to the collector layer. Accordingly, electrons injected from theemitter layer 4 are accelerated due to the internal electric field from theemitter layer 4 to thecollector layer 6 and thus the transit time of electrons traveling in thebase layer 5 toward the collector layer can be efficiently and reliably reduced. Therefore, high-frequency characteristics can be improved. - Moreover, the internal electric field is generated due to actions of the spontaneous polarizations Pap1, Psp2 and Psp3 generated in the semiconductor layers 4, 5 and 6, respectively, and of the piezo polarization Ppz1, Ppz2 and Ppz3 generated in the semiconductor layers 4, 5 and 6, respectively. Therefore, there is no need to change the composition ratio of the
base layer 5 in the film thickness direction for the purpose of changing the band structure to reduce a resistance in thebase layer 5. As a result, it is possible to prevent a method for fabricating a HBT from becoming complicated and also to stably obtain a quality HBT. - Moreover, in
EMBODIMENT 1, the junction of theemitter layer 4 and thebase layer 5 is a hetero-junction, so that the efficiency of electron injection can be improved. - Moreover, in
EMBODIMENT 1, theemitter layer 4 is formed so as to have a higher aluminum composition ratio than that of thecollector layer 6. Thus, a barrier at the interface of thebase layer 5 and thecollector layer 6 is lower than a barrier at the interface of theemitter layer 4 and thebase layer 5. Accordingly, when electrons injected from theemitter layer 4 pass through thebase layer 5 to reach thecollector layer 6, the electrons have enough energy to go over the barrier at the interface of thebase layer 5 and thecollector layer 6. Therefore, also in this point of view, according toEMBODIMENT 1, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. - Moreover, in
EMBODIMENT 1, thebase layer 5 is in contact with theemitter layer 4 at its nitrogen polarity surface while being in contact with thecollector layer 6 at its gallium polarity surface. Thus, an internal electric field can be generated in thebase layer 5 so that electrons as carries are accelerated in the direction from theemitter layer 4 to thecollector layer 6. - Note that for
EMBODIMENT 1, a configuration in which at least one of theemitter layer 4 and thecollector layer 6 is doped with an impurity at a concentration of 1×1018 to 1×1019 cm−3 may be used. That is, according toEMBODIMENT 1, in an collector-up structure in which thecollector layer 6, thebase layer 5 and theemitter layer 4 are stacked in this order from thesubstrate 1, carriers are hardly injected into thebase layer 5 from theemitter layer 4 and also carriers hardly flow into thecollector layer 6 from thebase layer 5. However, if at least one of theemitter layer 4 and thecollector layer 6 is formed of a heavily doped layer containing an impurity at a high concentration, a layer formed of AlGaN becomes a low potential portion and thus carriers can pass through this portion. As a result, if theemitter layer 4 is formed of a heavily doped layer containing an impurity at a high concentration, carriers can be efficiently injected into thebase layer 5 from theemitter layer 4. On the other hand, if thecollector layer 6 is formed of a heavily doped layer containing an impurity at a high concentration, carriers in thebase layer 5 can be made to efficiently flow into thecollector layer 6. Therefore, in the collector-up structure, it is very effective to form each of theemitter layer 4 and thecollector layer 6 of a heavily doped layer. - Moreover, unlike
EMBODIMENT 1, thecollector layer 6 may be formed of GaN. In that case, only the junction of theemitter layer 4 and thebase layer 5 is a hetero-junction. Also in this case, polarities of spontaneous polarizations are the same as polarities of piezo polarizations, respectively, and thus sufficiently large electric charges are generated in each interface. With the electric charge at each interface, a sufficiently large internal electric field is generated in thebase layer 5, so that a transit time of electrons in thebase layer 5 can be efficiently and reliably reduced. Furthermore, a barrier is not generated at the interface of thebase layer 5 and thecollector layer 6. Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. -
FIG. 4 illustratesEMBODIMENT 2 of the present invention. In this embodiment, each member also described inEMBODIMENT 1 is identified by the same reference numeral and the detailed description thereof will be omitted. InEMBODIMENT 1, a so-called collector-up structure in which the configuration in which theemitter layer 4, thebase layer 5 and thecollector layer 6 are stacked in this order from thesubstrate 1 side is formed. In contrast, inEMBODIMENT 2, an emitter-up structure in which thecollector layer 6, thebase layer 5 and theemitter layer 4 are stacked in this order from thesubstrate 1 side is formed. Each of the layers is formed by molecular beam epitaxy (MEB). - The
GaN buffer layer 3 is formed by MBE. Thus, a surface (upper surface) of theGaN buffer layer 3 at a time when theGaN buffer layer 3 is formed is a nitrogen polarity surface in which nitrogen is located at the outermost side. Moreover, an interface (lower surface) of theGaN buffer layer 3 with theAlN buffer layer 2 is a nitrogen polarity surface in which gallium is located in the outermost side. On theGaN buffer layer 3, thesubcollector layer 7 of n-type GaN is formed so as to have a thickness of 500 nm. Si is added as an impurity to GaN forming thesubcollector layer 7 at a high concentration (1×1019 cm−3). - The
collector layer 6 is formed on thesubcollector layer 7 so as to have a thickness of 500 nm. Thecollector layer 6 is formed of n-type AlGaN. Si is added as an impurity to AlGaN of thecollector layer 6 at a medium concentration (2×1017 cm−1) and the aluminum composition ratio of thecollector layer 6 is 10%. - The
base layer 5 is formed on thecollector layer 6 so as to have a thickness of 70 nm. Thebase layer 5 is formed of p-type GaN. Mg is added as an impurity to GaN forming thebase layer 5 at a high concentration (4×1019 cm−3). The impurity concentration is constant in the film thickness direction and thus thebase layer 5 has a constant band gap in the film thickness direction. - The
emitter layer 4 is formed on thebase layer 5. Theemitter layer 4 is formed of n-type AlGaN so as to have a thickness of 30 nm. Si is added as an impurity to AlGaN at a medium concentration (5×1017 cm−3) and the aluminum composition ratio of theemitter layer 4 is 25%. - A method for fabricating an HBT of
EMBODIMENT 2 will be described. As shown inFIG. 4 (a), anAlN buffer layer 2, aGaN buffer layer 3, asubcollector layer 7, acollector layer 6, abase layer 5 and anemitter layer 4 are formed in this order on asapphire substrate 1. In this case, each of the layers is formed by MBE. Then, as shown inFIG. 4 (b), with an Si oxide film as a mask, theemitter layer 4 is etched by dry etching using chloride gas, thereby forming an emitter mesa and having thebase layer 5 exposed. Next, as shown inFIG. 4 (c), with the Si oxide film as a mask, thebase layer 5 and thecollector layer 6 are etched by dry etching using chloride gas, thereby having thesubcollector layer 7 exposed. Then, as shown inFIG. 4 (d), anelectrode 8 is formed on each of theemitter layer 4, thebase layer 5 and thesubcollector layer 7. Thus, the HBT ofEMBODIMENT 2 can be formed. - In the HBT of
EMBODIMENT 2, thesubcollector layer 7 is formed on a nitrogen polarity surface of theGaN buffer layer 3. Thus, thesubcollector layer 7 has a lower surface of a gallium polarity surface and an upper layer of a nitrogen polarity surface. Moreover, thecollector layer 6 has a lower layer of an aluminum gallium polarity surface and an upper surface of a nitrogen polarity surface and a spontaneous polarization Psp3 is generated. Moreover, in thecollector layer 6, a piezo polarization Ppz3 due to crystal strains is generated to have the same polarity as that of the spontaneous polarization Psp3. With the spontaneous polarization Psp3 and the piezo polarization Ppz3 generated, thecollector layer 6 has a lower surface of a positive polarity surface and an upper layer of a negative surface. - The
base layer 5 is formed on the nitrogen polarity surface of thecollector layer 6. Thus, thebase layer 5 has a lower surface of a gallium polarity surface and an upper layer of a nitrogen polarity surface and a spontaneous polarization Psp2 is generated. Moreover, in thebase layer 5, a piezo polarization Ppz2 due to crystal strains is generated to have the same polarity as that of the spontaneous polarization Psp2. With the spontaneous polarization Psp2 and the piezo polarization Ppz2 generated, thebase layer 5 has a lower surface of a positive polarity surface and an upper layer of a negative surface. - The
emitter layer 4 is formed on a nitrogen polarity surface of thebase layer 5. Thus, theemitter layer 4 has a lower surface of an aluminum gallium polarity surface and an upper layer of a nitrogen polarity surface and a spontaneous polarization Psp1 is generated. Moreover, in theemitter layer 4, a piezo polarization Ppz1 due to crystal strains is generated to have the same polarity as that of the spontaneous polarization Psp1. With the spontaneous polarization Psp1 and the piezo polarization Ppz1 generated, theemitter layer 4 has a lower surface of a positive polarity surface and an upper layer of a negative surface. - The polarities of the spontaneous polarizations Psp2 and Psp3 are the same as the polarities of the piezo polarizations Ppz2 and Ppz3, respectively, so that a very large electric charge Q32 is generated at the interface of the
base layer 5 and thecollector layer 6. Moreover, the polarities of the spontaneous polarizations Psp1 and Psp2 are the same as the polarities of the piezo polarizations Ppz1 and Ppz2, respectively, so that a very large electric charge Q12 is generated at the interface of theemitter layer 4 and thebase layer 5. Thus, an internal electric field is generated in thebase layer 5 so that electrons are accelerated in the direction from theemitter layer 4 to thecollector layer 6. As has been described, in the HBT ofEMBODIMENT 2, thebase layer 5 has a band structure in which the band gap is constant in the film thickness direction and the energy of electrons decreases in the direction from theemitter 4 to thecollector 6 at each of an end of a conduction band and an end of a valence band. - Therefore, according to
EMBODIMENT 2, in thebase layer 5, an internal electric field is generated in the direction in which electrons as carriers are accelerated, so that electrons injected from theemitter layer 4 are accelerated by the internal electric field in the direction from theemitter layer 4 to thecollector layer 6. Accordingly, the transit time of electrons traveling in thebase layer 5 toward the collector layer can be efficiently and reliably reduced. Therefore, high-frequency characteristics can be improved. Then, in the HBT, holes are stored in part of thebase layer 5 located around the interface with theemitter layer 4, i.e., in the vicinity of thebase electrode 8, due to the internal electric field, so that a base resistance can be reduced. - Moreover, in
EMBODIMENT 2, thebase layer 5 is in contact with theemitter layer 4 at its nitrogen polarity surface while being in contact with thecollector layer 6 at its gallium polarity surface. Thus, an internal electric field can be generated in thebase layer 5 so that electrons as carries are accelerated in the direction from theemitter layer 4 to thecollector layer 6. Therefore, high-frequency characteristics can be improved. - Note that for
EMBODIMENT 2, a configuration in which at least one of theemitter layer 4 and thecollector layer 6 is doped with an impurity at a (high) concentration of 1×1018 to 1×1019 cm−3 may be used. In that case, if theemitter layer 4 is formed of a heavily doped layer containing an impurity at a high concentration, carriers can be efficiently injected into thebase layer 5 from theemitter layer 4. On the other hand, if thecollector layer 6 is formed of a heavily doped layer containing an impurity at a high concentration, carriers in thebase layer 5 can be made to efficiently flow into thecollector layer 6. - Moreover, unlike
EMBODIMENT 2, thecollector layer 6 may be formed of GaN. In that case, only the junction of theemitter layer 4 and thebase layer 5 is a hetero-junction. However, in this case, the polarities of the spontaneous polarizations are the same as the polarities of the piezo polarizations, so that a sufficiently large electric charge is generated in each interface. With the electric charge in each interface, a sufficiently large internal electric field is generated in thebase layer 5, so that the transit time of electrons in thebase layer 5 can be efficiently and reliably reduced. Furthermore, a barrier is not generated at the interface of thebase layer 5 and thecollector layer 6. Also in this point, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. - The structure, operation and effect of other part are the same as those in
EMBODIMENT 1. -
FIG. 5 illustratesEMBODIMENT 3 of the present invention. In this embodiment, each member also described inEMBODIMENT 1 is identified by the same reference numeral and therefore the detailed description thereof will be omitted. InEMBODIMENT 3, a collector-up structure is formed and a heavily dopedlayer 9 is provided in thecollector layer 6. - The heavily doped
layer 9 is formed by δ doping. That is, only monosilane (SiH4) is introduced into a furnace when thecollector layer 6 has been formed to have a thickness of 20 nm or less, and more preferably a thickness of 10 nm or less, i.e., for example, a thickness of 3 nm, thereby forming the heavily dopedlayer 9 doped with Si at a high concentration (5×1012 cm−2). Thereafter, thecollector layer 6 is formed again so that the thickness thecollector layer 6 becomes 500 nm. Thus, in thecollector layer 6, the heavily dopedlayer 9 doped with an impurity at a high concentration is provided only in part of thecollector layer 6 in the film thickness direction. A method for forming other part is the same as that ofEMBODIMENT 1. - Thus, in
EMBODIMENT 3, a low potential portion is formed in thecollector layer 6 of AlGaN, so that carriers can pass through the part and carriers which have passed through thebase layer 5 can be made to efficiently flow into thecollector layer 6. Moreover, the heavily dopedlayer 9 is formed by δ doping, so that the heavily dopedlayer 9 is formed in part of the collector layer. As a result, a distortion generated at the interface of AlGaN and GaN is not eased and the low potential portion can be formed in thecollector layer 6. Thus, even with the heavily dopedlayer 9 provided, the intensity of an internal electric field generated in thebase layer 5 is not reduced. Accordingly, the efficiency of carrier injection can be improved and thus the transit time of carriers can be reduced. Therefore, high-frequency characteristics can be improved. - Moreover, in
EMBODIMENT 3, the heavily dopedlayer 9 is provided in thecollector layer 6 so as to be located at a distance of 20 nm or less from the interface with thebase layer 5. Thus, injection of electrons into thecollector layer 6 from thebase layer 5 can be efficiently performed. Accordingly, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. - Note that in
EMBODIMENT 3, the heavily dopedlayer 9 is formed in thecollector layer 6. Instead of this, a heavily doped layer may be formed in theemitter layer 4 or a heavily doped layer may be formed in each of theemitter layer 4 and thecollector layer 6. In a structure in which a heavily doped layer is formed in theemitter layer 4, the heavily doped layer is preferably provided in the emitter layer so as to be located at a distance of 20 nm or less, and more preferably 10 nm or less, from the interface with thebase layer 5. Thus, electron injection into theemitter layer 4 from theelectrode 8 provided on the upper surface of theemitter layer 4 can be efficiently performed. On the other hand, the same emitter-up structure as that ofEMBODIMENT 2 may be formed and also a heavily doped layer may be formed in theemitter layer 4. In that case, theelectrode 8 is formed on a surface (upper surface) of theemitter layer 4 located in the opposite side to the interface with thebase layer 5. Therefore, it is preferable to form a heavily doped layer in theemitter layer 4 so as to be located at a distance of 20 nm or less, and more preferably 10 nm or less, from the upper surface of thebase layer 5. Thus, electron injection into theemitter layer 4 from theelectrode 8 can be efficiently performed. Moreover, a structure in which a heavily doped layer is provided in thecollector layer 6 in the emitter-up structure may be formed. In that case, a heavily doped layer is preferably formed in thecollector layer 6 so as to be located at a distance of 20 nm or less, and more preferably 10 nm or less, from the interface with thebase layer 5. Thus, electron injection into thecollector layer 6 from thebase layer 5 can be efficiently performed. - The structure, operation and effect of other part are the same as those in
EMBODIMENT 1. -
FIG. 6 illustratesEMBODIMENT 4 of the present invention. In this embodiment, each member also described inEMBODIMENT 1 is identified by the same reference numeral and therefore the detailed description thereof will be omitted. InEMBODIMENT 4, the semiconductor layers 4, 5 and 6 are stacked to form a collector-up structure. Each of the layers is formed by MOCVD. - In
EMBODIMENT 4, athin layer portion 19 is formed in thebase layer 5 so as to have a smaller thickness than that of other part of thebase layer 5. Thethin layer portion 19 is formed, as shown inFIG. 6 (c), by performing etching so as to leave a 10 nm thickness of thebase layer 5 when thebase layer 5 is etched by dry etching. Thus, in thebase layer 5 of GaN, the interface with theemitter layer 4 of AlGaN is left in thethin layer portion 19. Then, thebase electrode 8 is formed on an upper surface of thethin layer portion 19. A method for forming other part is the same as that ofEMBODIMENT 1. - Therefore, in
EMBODIMENT 4, the interface of theemitter layer 4 and thethin layer portion 19 of thebase layer 5 is a hetero-junction interface and theemitter layer 4 and thethin layer portion 19 have different bands. Moreover, in thebase layer 5, an internal electric field is generated in the direction from thecollector layer 6 to theemitter layer 4. Accordingly, electrons are accelerated in the direction from theemitter layer 4 and thecollector layer 6 due to the internal electric field. Thus, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. Moreover, holes are stored in part of the base layer located in the vicinity of the interface with theemitter layer 4 due to the internal electric field, so that holes are stored in the vicinity of thebase electrode 8 in contact with thebase layer 5. Thus, a resistance in thebase layer 5 can be reduced. - The structure, operation and effect of other part are the same as those in
EMBODIMENT 1. -
FIG. 7 illustratesEMBODIMENT 5 of the present invention. In this EMBODIMENT, each member also described inEMBODIMENT 4 is identified by the same reference numeral and therefore the detailed description thereof will be omitted. InEMBODIMENT 5, anemitter contact layer 10 of n-type AlGaN is formed on theGaN buffer layer 3 and theemitter layer 4 of AlGaN is formed on theemitter contact layer 10. Theemitter contact layer 10 is formed of n-type GaN to have a thickness of 30 nm and Si is added to GaN at a high concentration (5×1019 cm−3). - In the
emitter layer 4, part of theemitter layer 4 is shaved so that theemitter contact layer 10 is exposed therethrough. Then, theemitter electrode 8 is directly in contact with theemitter contact layer 10. That is, as shown inFIG. 7 (c), theemitter contact layer 10 is made to be exposed when thebase layer 5 and theemitter layer 4 are etched by dry etching. Theemitter electrode 8 is formed on an upper surface of theemitter contact layer 10. Thus, theemitter layer 4 and theemitter electrode 8 for injecting electrons into theemitter layer 4 form an ohmic contact with theemitter contact layer 10 of n-type GaN interposed therebetween. A method for forming other part is the same as that of each ofEMBODIMENT 1 andEMBODIMENT 4. - Therefore, in
EMBODIMENT 5, theemitter contact layer 10 of GaN is in contact with theemitter layer 4 of AlGaN and theemitter electrode 8 is in contact with theemitter contact layer 10. Since GaN has a smaller band gap than that of AlGaN, an ohmic contact can be easily formed, so that a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved. - The structure, operation and effect of other part are the same as those in
EMBODIMENT 1. -
FIG. 8 illustratesEMBODIMENT 6 of the present invention. In this embodiment, each member also described inEMBODIMENT 1 is identified by the same reference numeral and therefore the detailed description thereof will be omitted. InEMBODIMENT 6, theemitter contact layer 10 of n-type GaN is provided on theGaN buffer layer 3 and theemitter layer 4 of AlGaN is formed on theemitter contact layer 10. - The
emitter contact layer 10 is formed of n-type GaN to have a thickness of 30 nm and Si is added to GaN at a high concentration (5×1019 cm−3). - In the
emitter layer 4, athin layer portion 18 is formed so as to have a smaller thickness than that of other part of theemitter layer 4. Thethin layer portion 18 is formed, as shown inFIG. 8 (c), by performing etching so as to leave a thickness of 10 nm of theemitter layer 4 when theemitter layer 4 is etched by dry etching. Thus, in theemitter layer 4, the interface with theemitter contact layer 10 is left in thethin layer portion 18. Then, thebase electrode 8 is formed on an upper surface of thethin layer portion 18. A method for forming other part is the same as that ofEMBODIMENT 1. - Therefore, in
EMBODIMENT 6, the interface of theemitter layer 4 of AlGaN and theemitter contact layer 10 of GaN is a hetero-junction interface, and because of differences in polarity characteristics between AlGaN and GaN, conduction electrons (two-dimensional conduction electron gas) are stored in theemitter contact layer 10 side at the interface of the thin layer portion of theemitter layer 4 and theemitter contact layer 10. Thus, the conduction electrons can be used for forming an ohmic contact with theemitter electrode 8 and a low resistance ohmic contact can be formed. Therefore, high-frequency characteristics can be improved. - Moreover, according to
EMBODIMENT 6, in thebase layer 5, an internal electric field is also generated in the direction in which electrons are accelerated. Therefore, the transit time of carriers can be reduced, so that high-frequency characteristics can be improved. - The structure, operation and effect of other part are the same as those in
EMBODIMENT 1.
Claims (19)
1-22. (canceled)
23. A method for forming a hetero-junction bipolar transistor, the hetero-junction bipolar transistor being formed with:
an n-type first semiconductor layer formed so that electrons are externally injected into the first semiconductor layer;
a p-type second semiconductor layer formed so that electrons injected into the first semiconductor layer are injected into the second semiconductor layer; and
an n-type third semiconductor layer formed so that electrons having passed through the second semiconductor layer flow into the third semiconductor layer, the first, second and third semiconductor layers being in contact with one another in this order,
wherein polarizations P1, P2 and P3 are generated in the first, second and third semiconductor layers, respectively,
wherein the second semiconductor layer is formed so as to have a configuration in which an internal electric field is generated so that an energy of electrons decreases in the direction from the first semiconductor layer to the third semiconductor layer due to an electric charge Q12 generated at an interface with the first semiconductor layer by an interaction of the polarizations P1 and P2 and an electric charge Q23 generated at an interface with the third semiconductor layer by an interaction of the polarizations P2 and P3,
wherein the first semiconductor layer is formed as an emitter layer made of nitride semiconductor,
wherein the second semiconductor layer is formed as a base layer made of nitride semiconductor, and
wherein the third semiconductor layer is formed as a collector layer made of nitride semiconductor.
24. The method of forming a hetero-junction bipolar transistor of claim 23 ,
wherein the polarizations P1, P2 and P3 are spontaneous polarizations Psp1, Psp2 and Psp3, respectively, and
wherein the second semiconductor layer is formed so as to have a configuration in which an internal electric field is generated so that an energy of electrons decreases in the direction from the first semiconductor layer to the third semiconductor layer due to an electric charge Q12 generated at an interface with the first semiconductor layer by an interaction of the spontaneous polarizations Psp1 and Psp2 and an electric charge Q23 generated at an interface with the third semiconductor layer by an interaction of the spontaneous polarizations Psp2 and Psp3.
25. The method of forming a hetero-junction bipolar transistor of claim 23 ,
wherein the polarizations P1, P2 and P3 are piezo polarizations Ppz1, Ppz2, and Ppz3, respectively, and
wherein the second semiconductor layer is formed so as to have a configuration in which an internal electric field is generated so that an energy of electrons decreases in the direction from the first semiconductor layer to the third semiconductor layer due to an electric charge Q12 generated at an interface with the first semiconductor layer by an interaction of the piezo polarizations Ppz1 and Ppz2 and an electric charge Q23 generated at an interface with the third semiconductor layer by an interaction of the piezo polarizations Ppz2 and Ppz3.
26. The method of forming a heterojunction bipolar transistor of claim 23 ,
wherein the polarization P1 is a spontaneous polarization Psp1 and a piezo polarization Ppz1,
wherein the polarization P2 is a spontaneous polarization Psp2 and a piezo polarization Ppz2,
wherein the polarization P3 is a spontaneous polarization Psp3 and a piezo polarization Ppz3,
wherein respective polarities of the spontaneous polarizations are the same as respective polarities of the piezo polarizations, respectively, and
wherein the second semiconductor layer is formed so as to have a configuration in which an internal electric field is generated so that an energy of electrons decreases in the direction from the first semiconductor layer to the third semiconductor layer due to an electric charge Q12 generated at an interface with the first semiconductor layer by an interaction of the spontaneous polarization Psp1, the piezo polarization Ppz1, the spontaneous polarization Psp2 and the piezo polarization Ppz2 and an electric charge Q23 generated at an interface with the third semiconductor layer by an interaction of the spontaneous polarization Psp2, the piezo polarization Ppz2, the spontaneous polarization Psp3 and the piezo polarization Ppz3.
27. The method of forming a hetero-junction bipolar transistor of claim 23 ,
wherein each of the first and third semiconductor layers is formed of aluminum gallium nitride, and
wherein the second semiconductor layer is formed of gallium nitride.
28. The method of forming a hetero-junction bipolar transistor of claim 27 ,
wherein the first semiconductor layer has a higher aluminum composition ratio than that of the third semiconductor layer.
29. The method of forming a hetero-junction bipolar transistor of claim 23 ,
wherein the first semiconductor layer is formed of aluminum gallium nitride, and
wherein each of the second and third semiconductor layers is formed of gallium nitride.
30. The method of forming a hetero-junction bipolar transistor of claim 27 ,
wherein an impurity is doped in at least one of the first and third semiconductor layers formed of aluminum gallium nitride at a concentration of 1×1018 to 1×1019 cm−3.
31. The method of forming a hetero-junction bipolar transistor of claim 27 ,
wherein a heavily doped layer formed by doping is provided in at least one of the first and third semiconductor layers formed of aluminum gallium nitride.
32. The method of forming a hetero-junction bipolar transistor of claim 31 ,
wherein an electrode is formed to come in contact with a surface of the first nitride semiconductor layer, and
wherein the heavily doped layer is provided in the first nitride semiconductor layer so as to be located at a distance of 20 nm or less from the surface with which the electrode is in contact.
33. The method of forming a hetero-junction bipolar transistor of claim 31 ,
wherein the heavily doped layer is provided in the third semiconductor layer so as to be located at a distance of 20 nm or less from the interface with the second semiconductor layer.
34. The method of forming a hetero-junction bipolar transistor of claim 27 ,
wherein in the second nitride semiconductor layer, a thin layer portion is formed, with an interface with the first nitride semiconductor layer left, so as to have a smaller thickness than that of the other part, and
wherein in the thin layer portion, an electrode for taking out electrons in the second nitride semiconductor layer is formed to come in contact with the thin layer portion.
35. The method of forming a heterojunction bipolar transistor of claim 27 ,
wherein in the first nitride semiconductor layer, a contact layer of n-type gallium nitride is formed to come in contact with a surface of the first nitride semiconductor layer located in an opposite side to the second nitride semiconductor layer, and
wherein the first nitride semiconductor layer and the electrode for injecting electrons into the first nitride semiconductor layer form an ohmic contact with the contact layer interposed therebetween.
36. The method of forming a hetero-junction bipolar transistor of claim 24 ,
wherein a contact layer is formed on the first nitride semiconductor layer,
wherein in the first nitride semiconductor layer, a thin layer portion is formed, with an interface with the contact layer left, so as to have a smaller thickness than that of the other part, and
wherein an electrode for injecting electrons into the first nitride semiconductor layer is formed on the thin layer portion.
37. The method of forming a hetero-junction bipolar transistor of claim 23 ,
wherein the base layer is formed of gallium nitride,
wherein the emitter layer is in contact with a nitrogen polarity surface of the base layer, and
wherein the collector layer is in contact with a gallium polarity surface of the base layer.
38. The method of forming a hetero-junction bipolar transistor of claim 37 ,
wherein each of the emitter layer and the collector layer is formed of aluminum gallium nitride.
39. The method of forming a hetero-junction bipolar transistor of claim 37 ,
wherein the emitter layer is formed of aluminum gallium nitride, and
wherein the collector layer is formed of gallium nitride.
40. The method of forming a hetero-junction bipolar transistor of claim 23 , wherein the first, second and third semiconductor layers are formed to come in contact with one another in this order by MOCVD.
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JP2003309586A JP2005079417A (en) | 2003-09-02 | 2003-09-02 | Semiconductor device and heterojunction bipolar transistor |
US10/927,525 US7230285B2 (en) | 2003-09-02 | 2004-08-27 | Semiconductor device and hetero-junction bipolar transistor |
US11/798,216 US20070232008A1 (en) | 2003-09-02 | 2007-05-11 | Semiconductor device and hetero-junction bipolar transistor |
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Cited By (2)
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CN104900689A (en) * | 2015-06-08 | 2015-09-09 | 中国科学院半导体研究所 | GaN-based HBT epitaxial structure for reducing electrical resistivity at base region and growing method |
WO2021109075A1 (en) * | 2019-12-05 | 2021-06-10 | 苏州晶湛半导体有限公司 | Semiconductor structure and manufacturing method therefor |
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TWI293811B (en) * | 2005-11-22 | 2008-02-21 | Univ Nat Central | Gan heterojunction bipolar transistor with a p-type strained ingan layer and method of fabrication therefore |
US9755018B2 (en) | 2011-12-12 | 2017-09-05 | Cree, Inc. | Bipolar junction transistor structure for reduced current crowding |
RU2517788C1 (en) * | 2012-12-25 | 2014-05-27 | Федеральное Государственное Унитарное Предприятие "Научно-Производственное Предприятие "Пульсар" | Bipolar shf transistor |
JP6447166B2 (en) | 2015-01-22 | 2019-01-09 | 富士通株式会社 | Compound semiconductor device and manufacturing method thereof |
JP6202409B2 (en) | 2016-02-04 | 2017-09-27 | 株式会社パウデック | Heterojunction bipolar transistors and electrical equipment |
WO2020240725A1 (en) * | 2019-05-29 | 2020-12-03 | 日本電信電話株式会社 | Heterojunction bipolar transistor, and method for producing same |
CN113113294B (en) * | 2021-04-07 | 2022-06-07 | 厦门市三安集成电路有限公司 | Composite substrate, preparation method thereof and preparation method of radio frequency integrated chip |
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US5641975A (en) * | 1995-11-09 | 1997-06-24 | Northrop Grumman Corporation | Aluminum gallium nitride based heterojunction bipolar transistor |
US20020195619A1 (en) * | 2001-06-07 | 2002-12-26 | Nippon Telegraph And Telephone Corporation | Nitride semiconductor stack and its semiconductor device |
US6858509B2 (en) * | 1999-12-23 | 2005-02-22 | Thales | Bipolar transistor with upper heterojunction collector and method for making same |
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JP3816347B2 (en) | 2001-04-05 | 2006-08-30 | 日本電信電話株式会社 | Heterojunction bipolar transistor |
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- 2004-08-27 US US10/927,525 patent/US7230285B2/en active Active
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US5641975A (en) * | 1995-11-09 | 1997-06-24 | Northrop Grumman Corporation | Aluminum gallium nitride based heterojunction bipolar transistor |
US6858509B2 (en) * | 1999-12-23 | 2005-02-22 | Thales | Bipolar transistor with upper heterojunction collector and method for making same |
US20020195619A1 (en) * | 2001-06-07 | 2002-12-26 | Nippon Telegraph And Telephone Corporation | Nitride semiconductor stack and its semiconductor device |
Cited By (4)
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CN104900689A (en) * | 2015-06-08 | 2015-09-09 | 中国科学院半导体研究所 | GaN-based HBT epitaxial structure for reducing electrical resistivity at base region and growing method |
WO2021109075A1 (en) * | 2019-12-05 | 2021-06-10 | 苏州晶湛半导体有限公司 | Semiconductor structure and manufacturing method therefor |
US20220262933A1 (en) * | 2019-12-05 | 2022-08-18 | Enkris Semiconductor, Inc. | Semiconductor structures and manufacturing methods thereof |
TWI797513B (en) * | 2019-12-05 | 2023-04-01 | 大陸商蘇州晶湛半導體有限公司 | Semiconductor structure and manufacturing method thereof |
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US7230285B2 (en) | 2007-06-12 |
JP2005079417A (en) | 2005-03-24 |
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