US20060138504A1 - Nonvolatile ferroelectric memory device - Google Patents

Nonvolatile ferroelectric memory device Download PDF

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US20060138504A1
US20060138504A1 US11/115,131 US11513105A US2006138504A1 US 20060138504 A1 US20060138504 A1 US 20060138504A1 US 11513105 A US11513105 A US 11513105A US 2006138504 A1 US2006138504 A1 US 2006138504A1
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word line
layer
channel
memory device
floating
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US11/115,131
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Hee Kang
Jin Ahn
Jae Lee
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SK Hynix Inc
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Hynix Semiconductor Inc
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Priority claimed from KR1020040115418A external-priority patent/KR100636925B1/en
Priority claimed from KR1020040115419A external-priority patent/KR100636926B1/en
Application filed by Hynix Semiconductor Inc filed Critical Hynix Semiconductor Inc
Assigned to HYNIX SEMICONDUCTOR INC. reassignment HYNIX SEMICONDUCTOR INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AHN, JIN HONG, KANG, HEE BOK, LEE, JAE JIN
Publication of US20060138504A1 publication Critical patent/US20060138504A1/en
Priority to US11/717,145 priority Critical patent/US7728369B2/en
Priority to US11/717,081 priority patent/US7741668B2/en
Priority to US12/820,092 priority patent/US8035146B2/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/6684—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a ferroelectric gate insulator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/78391—Field effect transistors with field effect produced by an insulated gate the gate comprising a layer which is used for its ferroelectric properties
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7841—Field effect transistors with field effect produced by an insulated gate with floating body, e.g. programmable transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B51/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B51/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory transistors
    • H10B51/30—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory transistors characterised by the memory core region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors

Definitions

  • the present invention generally relates to a nonvolatile ferroelectric memory device, and more specifically, to a technology of controlling read/write operations of a nonvolatile ferroelectric memory cell using a channel resistance of a memory cell which is differentiated by polarity states of a ferroelectric material in a nano scale memory device.
  • the FeRAM having structures similar to the DRAM includes the capacitors made of a ferroelectric substance, so that it utilizes the characteristic of a high residual polarization of the ferroelectric substance in which data is not deleted even after an electric field is eliminated.
  • a unit cell of a conventional nonvolatile FeRAM device comprises a switching element and a nonvolatile ferroelectric capacitor.
  • the switching element performs a switching operation depending on a state of a word line to connect a nonvolatile ferroelectric capacitor to a sub bit line.
  • the nonvolatile ferroelectric capacitor is connected between and a plate line and one terminal of the switching element.
  • the switching element of the conventional FeRAM is a NMOS transistor whose switching operation is controlled by a gate control signal.
  • FIG. 1 is a cross-sectional diagram illustrating a conventional nonvolatile ferroelectric memory device.
  • a conventional 1-T (One-Transistor) FET (Field Effect Transistor) cell comprises a N-type drain region 2 and a N-type source region 3 which are formed on a P-type region substrate 1 .
  • a ferroelectric layer 4 is formed on a channel region, and a word line 5 is formed on the ferroelectric layer 4 .
  • the above-described conventional nonvolatile FeRAM device reads and writes data by using a channel resistance of the memory cell which is differentiated depending on polarization states of the ferroelectric layer 4 . That is, when the polarity of the ferroelectric layer 4 induces positive charges to the channel, the memory cell becomes at a high resistance state to be turned off. On the contrary, when the polarity of the ferroelectric layer 4 induces negative charges to the channel, the memory cell becomes at a low resistance state to be turned on.
  • a floating channel layer comprising a N-type drain region, a P-type channel region and N-type source region between a word line and a bottom word line, thereby improving a data maintaining characteristic.
  • a nonvolatile ferroelectric memory device comprises an insulating layer formed on a bottom word line, a floating channel layer, a ferroelectric layer formed on the channel region of the floating channel layer, and a word line formed on the ferroelectric layer.
  • the floating channel layer comprises a P-type channel region formed on the insulating layer and kept at a floating state, a N-type drain region and a N-type source region which are connected to both sides of the channel region.
  • different channel resistance is induced to the channel region depending on polarity states of the ferroelectric layer, so that data are read and written.
  • a nonvolatile ferroelectric memory device comprising a unit cell array which includes a plurality of bottom word lines, a plurality of insulating layers, a floating channel layer, a plurality of ferroelectric layers, a plurality of word lines.
  • the plurality of insulating layers are formed on the plurality of bottom word lines, respectively.
  • the floating channel layer comprises a plurality of P-type channel regions located on the plurality of insulating layers and a plurality of N-type drain and source regions which are alternately connected in series to the plurality of P-type regions.
  • the plurality of ferroelectric layers are formed respectively on the plurality of P-type channel regions of the floating channel layer.
  • the plurality of word lines are formed on the plurality of ferroelectric layers, respectively.
  • the unit cell array reads and writes a plurality of data by inducing different channel resistance to the plurality of P-type channel regions depending on polarity states of the plurality of ferroelectric layers.
  • a nonvolatile ferroelectric memory device comprising a unit cell array which includes a bottom word line, a plurality of insulating layers, a floating channel layer, a plurality of ferroelectric layers, and a plurality of word lines.
  • the plurality of insulating layers are formed on the bottom word line, respectively.
  • the floating channel layer comprises a plurality of P-type channel regions located on the plurality of insulating layers and a plurality of N-type drain and source regions which are alternately connected in series to the plurality of P-type channel regions.
  • the plurality of ferroelectric layers are formed respectively on the plurality of P-type channel regions of the floating channel layer.
  • the plurality of word lines are formed on the plurality of ferroelectric layers, respectively.
  • the unit cell array reads and writes a plurality of data by inducing different channel resistance to the plurality of P-type channel regions depending on polarity states of the plurality of ferroelectric layers.
  • a nonvolatile ferroelectric memory device comprises a bottom word line, a floating channel layer formed on the bottom word line and kept at a floating state, a ferroelectric layer, and a word line formed on the ferroelectric layer in parallel with the bottom word line.
  • the ferroelectric layer where data are stored is formed on the floating channel layer.
  • a write operation is performed on data corresponding to the ferroelectric layer depending on a state of a voltage level applied to the bottom word line and the word line
  • a read operation is performed on data by inducing different channel resistance to the floating channel layer depending on polarity states of charges stored in the ferroelectric layer.
  • a nonvolatile ferroelectric memory device comprises a plurality of memory cells, a first switching element, and a second switching element. Switching operations of the plurality of memory cells are selectively controlled respectively depending on voltages applied to a plurality of word lines and a plurality of bottom word lines, floating channel layers are connected serially in the plurality of memory cells.
  • the first switching element selectively connects the plurality of memory cells to a bit line in response to a first selecting signal.
  • the second switching element selectively connects the plurality of memory cells to a sensing line in response to a second selecting signal.
  • each of the plurality of memory cells comprises an insulating layer formed on the bottom word line, the floating channel layer, a ferroelectric layer formed on the channel region of the floating channel layer, and a word line formed on the ferroelectric layer.
  • the floating channel layer comprises a P-type channel region formed on the insulating layer and kept at a floating state, a N-type drain region and a N-type source region which are connected to both sides of the channel region.
  • a nonvolatile ferroelectric memory device comprises a plurality of bit lines arranged in a row direction, a plurality of sensing lines arranged perpendicular to the plurality of bit lines, a plurality of memory cells arranged in row and column directions where the plurality of bit lines and the plurality of sensing lines are crossed, and a plurality of sense amplifiers connected one by one to the plurality of bit lines.
  • each of the plurality of memory cells comprises an insulating layer formed on a bottom word line, the floating channel layer comprising a P-type channel region formed on the floating layer and kept at a floating state, a N-type drain region and a N-type source region which are connected to both sides of the channel region, a ferroelectric layer formed on the channel region of the floating channel layer, and a word line formed on the ferroelectric layer.
  • FIG. 1 is a cross-sectional diagram illustrating a conventional nonvolatile ferroelectric memory device
  • FIGS. 2 a to 2 c are diagrams illustrating a cross section of a cell and its symbol of a nonvolatile ferroelectric memory device according to an embodiment of the present invention
  • FIGS. 3 a and 3 b are diagrams illustrating write and read operations on high data of the nonvolatile ferroelectric memory device according to an embodiment of the present invention
  • FIGS. 4 a and 4 b are diagrams illustrating write and read operation on low data of the nonvolatile ferroelectric memory device according to an embodiment of the present invention
  • FIG. 5 is a layout cross-sectional diagram illustrating the nonvolatile ferroelectric memory device according to an embodiment of the present invention
  • FIGS. 6 a and 6 b are cross sectional diagrams illustrating the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIG. 7 is a cross-sectional diagram illustrating a nonvolatile ferroelectric memory device having a multiple layer structure according to an embodiment of the present invention.
  • FIG. 8 is a diagram illustrating a nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIGS. 9 a and 9 b are cross-sectional diagrams illustrating the nonvolatile ferroelectric memory device of FIG. 8 ;
  • FIG. 10 is a cross-sectional diagram illustrating a nonvolatile ferroelectric memory device having a multiple layer structure of FIG. 8 ;
  • FIG. 11 is a diagram illustrating a unit array of the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIG. 12 is a diagram illustrating a nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIG. 13 is a diagram illustrating a write operation of the nonvolatile ferroelectric memory according to an embodiment of the present invention.
  • FIG. 14 is a timing diagram illustrating a write operation of high data in the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIG. 15 is a timing diagram illustrating a write operation of low data and high data maintenance in the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIG. 16 is a timing diagram illustrating a sensing operation of cell data in the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIGS. 2 a to 2 c are diagrams illustrating a cross section of a cell and its symbol of a nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIG. 2 a is a cross-sectional diagram illustrating a unit cell in a direction in parallel with a word line.
  • a bottom word line 10 formed in the bottom layer of the unit cell is arranged in parallel with a word line 17 formed in the top layer of the unit cell.
  • the bottom word line 10 and the word line 17 are selectively driven by the same row address decoder (not shown).
  • An oxide layer 11 is formed on the bottom word line 10
  • a floating channel layer 15 comprising a P-type channel region 12 is formed on the oxide layer 11 .
  • a ferroelectric layer 16 is formed on the floating channel layer 15 , and the word line 17 is formed on the ferroelectric layer 16 .
  • FIG. 2 b is a cross-sectional diagram illustrating a unit cell in a direction perpendicular to the word line.
  • the oxide layer 11 is formed on the bottom word line 10 .
  • the floating channel layer 15 is formed on the insulating layer 11 .
  • a drain region 13 and a source region 14 are formed with a N-type, and the channel region 12 is formed with a P-type in the floating channel layer 15 , which becomes at a floating state.
  • the ferroelectric layer 16 is formed on the P-type channel region 12 of the floating channel layer 15 , and the word line 17 is formed on the ferroelectric layer 16 .
  • the nonvolatile ferroelectric memory device reads and writes data by using a channel resistance of the floating channel layer 15 which is differentiated by polarization states of the ferroelectric layer 16 . That is, when the polarity of the ferroelectric layer 16 induces positive charges to the channel region 12 , the memory cell becomes at a high resistance state, so that the channel is turned off. On the contrary, when the polarity of the ferroelectric layer 16 induces negative charges to the channel region 12 , the memory cell becomes at a low resistance state, so that the channel is turned on.
  • FIGS. 3 a and 3 b are diagrams illustrating write and read operations on high data of the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • a voltage is applied between the ferroelectric layer 16 and the P-type channel region 12 of the floating channel layer 15 by voltage division of a capacitor between the ferroelectric layer 16 and the oxide layer 11 .
  • the ground voltage ⁇ GND> is applied to the bottom word line 10 and the word line 17 .
  • the positive charges are induced to the channel region 12 , and the drain region 13 and the source region 14 are at the ground state, the channel region 12 is kept off.
  • the data “ 1 ” stored in the memory cell is read.
  • the drain region 13 and the source region 14 small current flows because the channel region 12 is turned off.
  • FIGS. 4 a and 4 b are diagrams illustrating write and read operation on low data of the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • the channel region 12 since negative charges are induced to the channel region 12 , and the drain region 13 and the source region 14 are at the ground state, the channel region 12 is kept on. As a result, the channel region 12 is turned on, so that a ground voltage flows.
  • a high voltage is formed between the ground voltage formed in the channel region 12 and the positive voltage ⁇ +V> applied from the word line 17 . Then, negative charges are induced to the channel region 12 depending on the polarity of the ferroelectric layer 16 , so that the memory cell becomes at a low resistance state. As a result, the data “ 0 ” is written in the memory cell at the write mode.
  • the positive voltage ⁇ +V> is applied to the drain region 13 and the source region 14 .
  • the positive voltage ⁇ +V> is applied to the bottom word line 10 and the word line 17 .
  • the channel region 12 is turned off. As a result, the ground voltage cannot flow in the channel region 12 .
  • the ground voltage ⁇ GND> is applied to the bottom word line 10 and the word line 17 .
  • the channel region 12 is turned on even when a low voltage difference is applied between the drain region 13 and the source region 14 , a large amount of current can flow.
  • the data “ 0 ” stored in the memory cell is read at the read mode.
  • the data maintaining characteristic of the cell can be improved because the word line 17 and the bottom word line 10 are controlled at the ground level so that a voltage stress is not applied to the ferroelectric layer 16 .
  • FIG. 5 is a layout cross-sectional diagram illustrating the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • a plurality of word lines WL are arranged in parallel with a plurality of bottom word lines BWL in a column direction.
  • a plurality of bit lines BL are arranged perpendicular to the plurality of word lines WL.
  • a plurality of unit cells C are located where the plurality of word lines WL, the plurality of bottom word lines BWL and the plurality of bit lines BL are crossed.
  • FIGS. 6 a and 6 b are cross sectional diagrams illustrating the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIG. 6 a is a diagram illustrating a cross section of the cell array in a direction (A) in parallel with the word line WL of FIG. 5 .
  • a plurality of oxide layers 11 are formed on the bottom word line 10 , and a plurality of P-type channel regions 12 are formed on the plurality of oxide layers 11 .
  • a plurality of ferroelectric layers 16 are formed on the plurality of channel regions 12 , and the word line 17 is formed in parallel with the bottom word line 10 on the plurality of ferroelectric layers 16 .
  • a plurality of cells are connected between one word line WL_ 1 and one bottom word line BWL_ 1 .
  • FIG. 6 b is a diagram illustrating a cross section of the cell array in a direction (B) perpendicular to the word line WL of FIG. 5 .
  • the oxide layer 11 is formed on each bottom word line BWL_ 1 , BWL_ 2 and BWL_ 3 .
  • the floating channel layer 15 comprising the N-type drain region 13 , the P-type channel region 12 and the N-type source region 14 connected serially is formed on the oxide layer 11 .
  • the N-type drain region 13 can be used as a source region in the adjacent cell, and the N-type source region 14 can be used as a drain region in the adjacent cell. That is, the N-type region is used in common as a drain region and a source region in the adjacent cell.
  • the ferroelectric layer 16 is formed on each channel region 12 of the floating channel layer 15 , and the word lines WL_ 1 , WL_ 2 and WL_ 3 are formed on the ferroelectric layer 16 .
  • FIG. 7 is a cross-sectional diagram illustrating a nonvolatile ferroelectric memory device having a multiple layer structure according to an embodiment of the present invention.
  • the unit cell array shown in FIG. 6 b is deposited as a multiple layer structure. Each unit cell array is separated by the oxide layer 18 .
  • FIG. 8 is a diagram illustrating a nonvolatile ferroelectric memory device according to another embodiment of the present invention.
  • the bottom word line 10 is used in common in a predetermined cell array.
  • a plurality of word lines WL are arranged in a column direction, and a plurality of bit lines BL are arranged in a row direction.
  • a plurality of unit cells C are located where the plurality of word lines WL and the plurality of BL are crossed.
  • FIGS. 9 a and 9 b are cross-sectional diagrams illustrating the nonvolatile ferroelectric memory device of FIG. 8 .
  • FIG. 9 a is a diagram illustrating a cross section of a cell array in a direction (C) in parallel with the word line WL of FIG. 8 .
  • a plurality of oxide layers 11 are formed on the bottom word line 10
  • a plurality of P-type channel regions 12 are formed on the plurality of insulating layers 11
  • a plurality of ferroelectric layers 16 are formed on the plurality of channel regions 12
  • the word line 17 is formed in parallel with the bottom word line 10 on the plurality of ferroelectric layers 16 .
  • a plurality of cells are connected between one word line WL_ 1 and one bottom word line BWL_ 1 .
  • FIG. 9 b is a diagram illustrating a cross section of a cell array in a direction (D) perpendicular to the word line WL of FIG. 8 .
  • the oxide layer 11 is formed on the bottom word lines BWL_ 1 , BWL_ 2 and BWL_ 3 connected in common.
  • the floating channel layer 15 comprising the N-type drain region 13 , the P-type channel region 12 and the N-type source region 14 is formed on the oxide layer 11 .
  • the ferroelectric layer 16 is formed on each channel region 12 of the floating channel layer 15 , and the word lines WL_ 1 , WL_ 2 and WL_ 3 are formed on the ferroelectric layer 16 .
  • FIG. 10 is a cross-sectional diagram illustrating a nonvolatile ferroelectric memory device having a multiple layer structure of FIG. 8 .
  • the unit cell array shown in FIG. 9 b is deposited as a multiple layer structure. Each unit cell array is separated by the oxide layer 18 .
  • FIG. 11 is a diagram illustrating a unit array of the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • the unit array of FIG. 11 comprises switching elements N 1 , N 2 and a plurality of memory cells Q 1 ⁇ Qm.
  • the switching element N 1 which is connected between the bit line BL and the memory cell Q 1 , has a gate to receive a selecting signal SEL_ 1 .
  • the switching element N 2 which is connected between a sensing line S/L and the memory cell Qm, has a gate to receive a selecting signal SEL_ 2 .
  • the plurality of memory cells Q 1 ⁇ Qm which are connected serially between the switching elements N 1 and N 2 , selectively perform a switching operation by word lines WL_ 1 ⁇ WL_m and bottom word lines BWL_ 1 ⁇ BWL_m.
  • the detailed structure of each memory cell Q 1 ⁇ Qm is shown in FIG. 2 b .
  • a source of the memory cell Q 1 is connected to the switching element N 1
  • a drain of the memory cell Qm is connected to the switching element N 2 .
  • FIG. 12 is a diagram illustrating a nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • a plurality of unit cell arrays 20 ⁇ 23 are arranged where a plurality of bit lines BL_ 1 ⁇ BL_n and a plurality of sensing lines S/L_ 1 ⁇ S/L_n are crossed in row and column directions.
  • the structure of each unit cell array 20 ⁇ 23 is shown in FIG. 5 .
  • the plurality of bit lines BL_ 1 ⁇ BL_n are connected one by one to a plurality of sense amplifiers 30 .
  • FIG. 13 is a diagram illustrating a write operation of the nonvolatile ferroelectric memory according to an embodiment of the present invention.
  • a write operation cycle can be divided into two sub operation regions. That is, the data “ 1 ” is written in the first sub operation region, and the data “ 0 ” is written in the second sub operation region.
  • a high voltage is applied to the bit line BL in a predetermined period when the data “ 1 ” is required to be preserved. As a result, a value of the data “ 1 ” written in the first sub operation region can be preserved in the memory cell.
  • FIG. 14 is a timing diagram illustrating a write operation of high data in the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • a period t 0 is defined as a precharge period of the memory cell.
  • a plurality of word lines WL 1 ⁇ WL _m and a plurality of bottom word lines BWL_ 1 ⁇ BWL_m are maintained at a low level. Then, the bit line BL_ 1 and the sensing line S/L_ 1 are maintained at a low state.
  • a negative voltage VNEG is applied to the word line WL_ 1 connected to the selected memory cell Q 1 .
  • the bottom word line BWL_ 1 transits to ‘high’.
  • a high voltage is applied to the ferroelectric layer 16 by voltage division of the word line WL_ 1 and the bottom word line BWL_ 1 , so that the data “ 1 ” is written.
  • a period t 5 the word line WL_ 1 and the bottom word line BWL_ 1 are transited to the ground state, again.
  • a period t 6 the rest of the bottom word lines BWL_ 2 ⁇ BWL_m are transited to the ground state, so that the write operation is completed.
  • the selecting signals SEL_ 1 and SEL_ 2 transit to ‘low’, the switching elements N 1 and N 2 are turned off.
  • FIG. 15 is a timing diagram illustrating the write operation of the data “ 0 ” and the maintenance operation of the data “ 1 ” in the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • a period t 0 is defined as a precharge period of the memory cell.
  • the selecting signal SEL_ 2 , the plurality of word lines WL_ 1 ⁇ WL_m and the plurality of bottom word lines BWL_ 1 ⁇ BWL_m are maintainted at the low state.
  • the bit line BL_ 1 and the sensing line S/L_ 1 are maintained at the low state.
  • bit line BL_ 1 is continuously maintained at the ground voltage state.
  • bit line BL_ 1 transits to ‘high’ when the data “ 1 ” stored in the memory cell Q 1 is required to be maintained.
  • the word line WL_ 1 transits to ‘high’.
  • electrons are accumulated in the P-type channel region 12 of the memory cell Q 1 by the word line WL_ 1 .
  • the positive voltage is applied to the word line WL_ 1 , and a threshold voltage difference is generated.
  • the polarity is formed so that channel electrons may be induced to the ferroelectric layer 16 .
  • the data “ 0 ” is written in the memory cell Q 1 .
  • a period t 5 the word line WL_ 1 is transited to the ground state.
  • a period t 6 all of the bottom word lines BWL_ 1 ⁇ BWL_m and the bit line BL_ 1 are transited to the ground state, so the write operation is completed.
  • a period t 7 when the selecting signal SEL_ 1 transits to ‘low’, the switching element N 1 is turned off.
  • FIG. 16 is a timing diagram illustrating a sensing operation of cell data in the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • a period t 0 is defined as a precharge period of the memory cell.
  • the plurality of word lines WL_ 1 ⁇ WL_m and the plurality of bottom word lines BWL_ 1 ⁇ BWL_m are maintained at the low state.
  • the sense amplifier 30 , the bit line BL_ 1 and the sensing line S/L_ 1 are maintained at the low state.
  • the plurality of word lines WL_ 1 ⁇ WL_m are maintained all at the ground state.
  • the flowing of current between the bit line BL_ 1 and the sensing line S/L is determined depending on the polarity state formed in the memory cell Q 1 .
  • a period t 4 when the operation of the sense amplifier 30 is stopped, the bit line BL_ 1 transits to ‘low’, so that the sensing operation is completed.
  • the plurality of bottom word lines BWL_ 2 ⁇ BWL_m transit to ‘low’.
  • the selecting signals SEL_ 1 and SEL_ 2 when the selecting signals SEL_ 1 and SEL_ 2 transit to ‘low’, the switching elements N 1 and N 2 are turned off.
  • the floating channel 15 comprising the N-type drain region 13 , the P-type channel region 12 and the N-type source region 14 is exemplified here, the present invention is not limited but the floating channel layer 15 can comprise a P-type drain region, a P-type channel region and a P-type source region.
  • data of a cell are not destroyed at a read mode by using a NDRO (Non Destructive Read Out).
  • NDRO Non Destructive Read Out
  • reliability of the cell can be improved at a low voltage of a nano scale ferroelectric cell and a read operation speed can be also improved.
  • a plurality of ferroelectric unit cell arrays are deposited to improve integrated capacity of the cell, thereby reducing the whole size of the cell.

Abstract

A nonvolatile ferroelectric memory device is provided so as to control read/write operations of a nonvolatile memory cell using a channel resistance of the memory cell which is differentiated by polarity states of a ferroelectric material. In the memory device, an insulating layer is formed on a bottom word line, and a floating channel layer comprising a N-type drain region, a P-type channel region and a N-type source region is formed on the insulating layer. Then, a ferroelectric layer is formed on the floating channel layer, and a word line is formed on the ferroelectric layer. As a result, the resistance state induced to the channel region is controlled depending on the polarity of the ferroelectric layer, thereby regulating the read/write operations of the memory cell array.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention
  • The present invention generally relates to a nonvolatile ferroelectric memory device, and more specifically, to a technology of controlling read/write operations of a nonvolatile ferroelectric memory cell using a channel resistance of a memory cell which is differentiated by polarity states of a ferroelectric material in a nano scale memory device.
  • 2. Description of the Related Art
  • Generally, a ferroelectric random access memory (hereinafter, referred to as ‘FeRAM’) has attracted considerable attention as next generation memory device because it has a data processing speed as fast as a Dynamic Random Access Memory (hereinafter, referred to as ‘DRAM’) and conserves data even after the power is turned off.
  • The FeRAM having structures similar to the DRAM includes the capacitors made of a ferroelectric substance, so that it utilizes the characteristic of a high residual polarization of the ferroelectric substance in which data is not deleted even after an electric field is eliminated.
  • The technical contents on the above FeRAM are disclosed in the Korean Patent Application No. 2001-57275 by the same inventor of the present invention. Therefore, the basic structure and the operation on the FeRAM are not described herein.
  • A unit cell of a conventional nonvolatile FeRAM device comprises a switching element and a nonvolatile ferroelectric capacitor. The switching element performs a switching operation depending on a state of a word line to connect a nonvolatile ferroelectric capacitor to a sub bit line. The nonvolatile ferroelectric capacitor is connected between and a plate line and one terminal of the switching element.
  • Here, the switching element of the conventional FeRAM is a NMOS transistor whose switching operation is controlled by a gate control signal.
  • FIG. 1 is a cross-sectional diagram illustrating a conventional nonvolatile ferroelectric memory device.
  • A conventional 1-T (One-Transistor) FET (Field Effect Transistor) cell comprises a N-type drain region 2 and a N-type source region 3 which are formed on a P-type region substrate 1. A ferroelectric layer 4 is formed on a channel region, and a word line 5 is formed on the ferroelectric layer 4.
  • The above-described conventional nonvolatile FeRAM device reads and writes data by using a channel resistance of the memory cell which is differentiated depending on polarization states of the ferroelectric layer 4. That is, when the polarity of the ferroelectric layer 4 induces positive charges to the channel, the memory cell becomes at a high resistance state to be turned off. On the contrary, when the polarity of the ferroelectric layer 4 induces negative charges to the channel, the memory cell becomes at a low resistance state to be turned on.
  • However, in the conventional nonvolatile FeRAM device, when the cell size becomes smaller, a data maintaining characteristic is degraded, so that it is difficult to perform the normal operation of the cell. That is, a voltage is applied to an adjacent cell at read/write modes to destroy data of unselected cells, so that interface noise is generated between the cells and it is difficult to perform a random access operation.
    • SUMMARY OF THE INVENTION
  • Accordingly, it is an object of the present invention to form a floating channel layer comprising a N-type drain region, a P-type channel region and N-type source region between a word line and a bottom word line, thereby improving a data maintaining characteristic.
  • It is another object of the present invention to provide the above-described memory cell so as to control read/write operations of a memory cell array, thereby improving reliability of the cell and reducing the whole size of the cell at the same time.
  • In an embodiment, a nonvolatile ferroelectric memory device comprises an insulating layer formed on a bottom word line, a floating channel layer, a ferroelectric layer formed on the channel region of the floating channel layer, and a word line formed on the ferroelectric layer. The floating channel layer comprises a P-type channel region formed on the insulating layer and kept at a floating state, a N-type drain region and a N-type source region which are connected to both sides of the channel region. Here, different channel resistance is induced to the channel region depending on polarity states of the ferroelectric layer, so that data are read and written.
  • In another embodiment, a nonvolatile ferroelectric memory device comprising a unit cell array which includes a plurality of bottom word lines, a plurality of insulating layers, a floating channel layer, a plurality of ferroelectric layers, a plurality of word lines. The plurality of insulating layers are formed on the plurality of bottom word lines, respectively. The floating channel layer comprises a plurality of P-type channel regions located on the plurality of insulating layers and a plurality of N-type drain and source regions which are alternately connected in series to the plurality of P-type regions. The plurality of ferroelectric layers are formed respectively on the plurality of P-type channel regions of the floating channel layer. The plurality of word lines are formed on the plurality of ferroelectric layers, respectively. Here, the unit cell array reads and writes a plurality of data by inducing different channel resistance to the plurality of P-type channel regions depending on polarity states of the plurality of ferroelectric layers.
  • In still another embodiment, a nonvolatile ferroelectric memory device comprising a unit cell array which includes a bottom word line, a plurality of insulating layers, a floating channel layer, a plurality of ferroelectric layers, and a plurality of word lines. The plurality of insulating layers are formed on the bottom word line, respectively. The floating channel layer comprises a plurality of P-type channel regions located on the plurality of insulating layers and a plurality of N-type drain and source regions which are alternately connected in series to the plurality of P-type channel regions. The plurality of ferroelectric layers are formed respectively on the plurality of P-type channel regions of the floating channel layer. The plurality of word lines are formed on the plurality of ferroelectric layers, respectively. Here, the unit cell array reads and writes a plurality of data by inducing different channel resistance to the plurality of P-type channel regions depending on polarity states of the plurality of ferroelectric layers.
  • In still another embodiment, a nonvolatile ferroelectric memory device comprises a bottom word line, a floating channel layer formed on the bottom word line and kept at a floating state, a ferroelectric layer, and a word line formed on the ferroelectric layer in parallel with the bottom word line. The ferroelectric layer where data are stored is formed on the floating channel layer. Here a write operation is performed on data corresponding to the ferroelectric layer depending on a state of a voltage level applied to the bottom word line and the word line, and a read operation is performed on data by inducing different channel resistance to the floating channel layer depending on polarity states of charges stored in the ferroelectric layer.
  • In still another embodiment, a nonvolatile ferroelectric memory device comprises a plurality of memory cells, a first switching element, and a second switching element. Switching operations of the plurality of memory cells are selectively controlled respectively depending on voltages applied to a plurality of word lines and a plurality of bottom word lines, floating channel layers are connected serially in the plurality of memory cells. The first switching element selectively connects the plurality of memory cells to a bit line in response to a first selecting signal. The second switching element selectively connects the plurality of memory cells to a sensing line in response to a second selecting signal. Here, each of the plurality of memory cells comprises an insulating layer formed on the bottom word line, the floating channel layer, a ferroelectric layer formed on the channel region of the floating channel layer, and a word line formed on the ferroelectric layer. The floating channel layer comprises a P-type channel region formed on the insulating layer and kept at a floating state, a N-type drain region and a N-type source region which are connected to both sides of the channel region.
  • In still another embodiment, a nonvolatile ferroelectric memory device comprises a plurality of bit lines arranged in a row direction, a plurality of sensing lines arranged perpendicular to the plurality of bit lines, a plurality of memory cells arranged in row and column directions where the plurality of bit lines and the plurality of sensing lines are crossed, and a plurality of sense amplifiers connected one by one to the plurality of bit lines. Here, each of the plurality of memory cells comprises an insulating layer formed on a bottom word line, the floating channel layer comprising a P-type channel region formed on the floating layer and kept at a floating state, a N-type drain region and a N-type source region which are connected to both sides of the channel region, a ferroelectric layer formed on the channel region of the floating channel layer, and a word line formed on the ferroelectric layer.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • Other aspects and advantages of the present invention will become apparent upon reading the following detailed description and upon reference to the drawings in which:
  • FIG. 1 is a cross-sectional diagram illustrating a conventional nonvolatile ferroelectric memory device;
  • FIGS. 2 a to 2 c are diagrams illustrating a cross section of a cell and its symbol of a nonvolatile ferroelectric memory device according to an embodiment of the present invention;
  • FIGS. 3 a and 3 b are diagrams illustrating write and read operations on high data of the nonvolatile ferroelectric memory device according to an embodiment of the present invention;
  • FIGS. 4 a and 4 b are diagrams illustrating write and read operation on low data of the nonvolatile ferroelectric memory device according to an embodiment of the present invention;
  • FIG. 5 is a layout cross-sectional diagram illustrating the nonvolatile ferroelectric memory device according to an embodiment of the present invention;
  • FIGS. 6 a and 6 b are cross sectional diagrams illustrating the nonvolatile ferroelectric memory device according to an embodiment of the present invention;
  • FIG. 7 is a cross-sectional diagram illustrating a nonvolatile ferroelectric memory device having a multiple layer structure according to an embodiment of the present invention;
  • FIG. 8 is a diagram illustrating a nonvolatile ferroelectric memory device according to an embodiment of the present invention;
  • FIGS. 9 a and 9 b are cross-sectional diagrams illustrating the nonvolatile ferroelectric memory device of FIG. 8;
  • FIG. 10 is a cross-sectional diagram illustrating a nonvolatile ferroelectric memory device having a multiple layer structure of FIG. 8;
  • FIG. 11 is a diagram illustrating a unit array of the nonvolatile ferroelectric memory device according to an embodiment of the present invention;
  • FIG. 12 is a diagram illustrating a nonvolatile ferroelectric memory device according to an embodiment of the present invention;
  • FIG. 13 is a diagram illustrating a write operation of the nonvolatile ferroelectric memory according to an embodiment of the present invention;
  • FIG. 14 is a timing diagram illustrating a write operation of high data in the nonvolatile ferroelectric memory device according to an embodiment of the present invention;
  • FIG. 15 is a timing diagram illustrating a write operation of low data and high data maintenance in the nonvolatile ferroelectric memory device according to an embodiment of the present invention; and
  • FIG. 16 is a timing diagram illustrating a sensing operation of cell data in the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
    • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • The present invention will be described in detail with reference to the accompanying drawings.
  • FIGS. 2 a to 2 c are diagrams illustrating a cross section of a cell and its symbol of a nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIG. 2 a is a cross-sectional diagram illustrating a unit cell in a direction in parallel with a word line.
  • A bottom word line 10 formed in the bottom layer of the unit cell is arranged in parallel with a word line 17 formed in the top layer of the unit cell. Here, the bottom word line 10 and the word line 17 are selectively driven by the same row address decoder (not shown). An oxide layer 11 is formed on the bottom word line 10, and a floating channel layer 15 comprising a P-type channel region 12 is formed on the oxide layer 11.
  • A ferroelectric layer 16 is formed on the floating channel layer 15, and the word line 17 is formed on the ferroelectric layer 16.
  • FIG. 2 b is a cross-sectional diagram illustrating a unit cell in a direction perpendicular to the word line.
  • The oxide layer 11 is formed on the bottom word line 10. The floating channel layer 15 is formed on the insulating layer 11. Here, a drain region 13 and a source region 14 are formed with a N-type, and the channel region 12 is formed with a P-type in the floating channel layer 15, which becomes at a floating state.
  • For a semiconductor of the floating channel layer 15, materials such as a carbon nano tube, silicon and Ge (Germanium) can be used. The ferroelectric layer 16 is formed on the P-type channel region 12 of the floating channel layer 15, and the word line 17 is formed on the ferroelectric layer 16.
  • As a result, the nonvolatile ferroelectric memory device according to an embodiment of the present invention reads and writes data by using a channel resistance of the floating channel layer 15 which is differentiated by polarization states of the ferroelectric layer 16. That is, when the polarity of the ferroelectric layer 16 induces positive charges to the channel region 12, the memory cell becomes at a high resistance state, so that the channel is turned off. On the contrary, when the polarity of the ferroelectric layer 16 induces negative charges to the channel region 12, the memory cell becomes at a low resistance state, so that the channel is turned on.
  • The above-described unit memory cell according to the embodiment of the present invention is represented by a symbol shown in FIG. 2 c.
  • FIGS. 3 a and 3 b are diagrams illustrating write and read operations on high data of the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • Referring to FIG. 3 a, when data “1” is written, a positive voltage <+V> is applied to the bottom word line 10, and a negative voltage <−V> is applied to the word line 17. Here, the drain region 13 and the source region 14 are become at a ground voltage <GND> state.
  • In this case, a voltage is applied between the ferroelectric layer 16 and the P-type channel region 12 of the floating channel layer 15 by voltage division of a capacitor between the ferroelectric layer 16 and the oxide layer 11.
  • Then, positive charges are induced to the channel region 12 depending on the polarity of the ferroelectric layer 16, so that the memory cell becomes at the high resistance state. Here, since the positive charges are induced to the channel region 12, and the drain region 13 and the source region 14 are at the ground state, the channel region 12 is kept off. As a result, the data “1” is written in all memory cells at the write mode.
  • Referring to FIG. 3 b, when the data “1” is read, the ground voltage <GND> is applied to the bottom word line 10 and the word line 17. Here, since the positive charges are induced to the channel region 12, and the drain region 13 and the source region 14 are at the ground state, the channel region 12 is kept off.
  • As a result, at the read mode, the data “1” stored in the memory cell is read. Here, when a low voltage difference is applied to the drain region 13 and the source region 14, small current flows because the channel region 12 is turned off.
  • FIGS. 4 a and 4 b are diagrams illustrating write and read operation on low data of the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • Referring to FIG. 4 a, when data “0” is written, a positive voltage <+V> is applied to the bottom word line 10 and the word line 17. Here, the drain region 13 and the source region 14 are become at a ground voltage <GND> state.
  • In this case, since negative charges are induced to the channel region 12, and the drain region 13 and the source region 14 are at the ground state, the channel region 12 is kept on. As a result, the channel region 12 is turned on, so that a ground voltage flows.
  • A high voltage is formed between the ground voltage formed in the channel region 12 and the positive voltage <+V> applied from the word line 17. Then, negative charges are induced to the channel region 12 depending on the polarity of the ferroelectric layer 16, so that the memory cell becomes at a low resistance state. As a result, the data “0” is written in the memory cell at the write mode.
  • Meanwhile, while the data “1” is stored, the positive voltage <+V> is applied to the drain region 13 and the source region 14. When the positive voltage <+V> is applied to the bottom word line 10 and the word line 17, the channel region 12 is turned off. As a result, the ground voltage cannot flow in the channel region 12.
  • In this case, a voltage difference is not generated between the positive voltage of the channel region 12 at the floating state and the positive voltage <+V> of the word line 17. Thus, the polarity change of the ferroelectric layer 16 is not generated but the previous polarity state can be maintained. As a result, the data “0” is written in the cell selected after the data “1” is written.
  • Referring to FIG. 4 b, when the data “0” is read, the ground voltage <GND> is applied to the bottom word line 10 and the word line 17. Here, since the channel region 12 is turned on even when a low voltage difference is applied between the drain region 13 and the source region 14, a large amount of current can flow. As a result, the data “0” stored in the memory cell is read at the read mode.
  • Therefore, at the read mode, the data maintaining characteristic of the cell can be improved because the word line 17 and the bottom word line 10 are controlled at the ground level so that a voltage stress is not applied to the ferroelectric layer 16.
  • FIG. 5 is a layout cross-sectional diagram illustrating the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • In the embodiment, a plurality of word lines WL are arranged in parallel with a plurality of bottom word lines BWL in a column direction. A plurality of bit lines BL are arranged perpendicular to the plurality of word lines WL. Also, a plurality of unit cells C are located where the plurality of word lines WL, the plurality of bottom word lines BWL and the plurality of bit lines BL are crossed.
  • FIGS. 6 a and 6 b are cross sectional diagrams illustrating the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • FIG. 6 a is a diagram illustrating a cross section of the cell array in a direction (A) in parallel with the word line WL of FIG. 5.
  • In the cell array according to the embodiment of the present invention, a plurality of oxide layers 11 are formed on the bottom word line 10, and a plurality of P-type channel regions 12 are formed on the plurality of oxide layers 11. A plurality of ferroelectric layers 16 are formed on the plurality of channel regions 12, and the word line 17 is formed in parallel with the bottom word line 10 on the plurality of ferroelectric layers 16. As a result, a plurality of cells are connected between one word line WL_1 and one bottom word line BWL_1.
  • FIG. 6 b is a diagram illustrating a cross section of the cell array in a direction (B) perpendicular to the word line WL of FIG. 5.
  • In the cell array according to the embodiment of the present invention, the oxide layer 11 is formed on each bottom word line BWL_1, BWL_2 and BWL_3. The floating channel layer 15 comprising the N-type drain region 13, the P-type channel region 12 and the N-type source region 14 connected serially is formed on the oxide layer 11.
  • Here, the N-type drain region 13 can be used as a source region in the adjacent cell, and the N-type source region 14 can be used as a drain region in the adjacent cell. That is, the N-type region is used in common as a drain region and a source region in the adjacent cell.
  • The ferroelectric layer 16 is formed on each channel region 12 of the floating channel layer 15, and the word lines WL_1, WL_2 and WL_3 are formed on the ferroelectric layer 16.
  • FIG. 7 is a cross-sectional diagram illustrating a nonvolatile ferroelectric memory device having a multiple layer structure according to an embodiment of the present invention.
  • Referring to FIG. 7, the unit cell array shown in FIG. 6 b is deposited as a multiple layer structure. Each unit cell array is separated by the oxide layer 18.
  • FIG. 8 is a diagram illustrating a nonvolatile ferroelectric memory device according to another embodiment of the present invention.
  • In another embodiment, the bottom word line 10 is used in common in a predetermined cell array. A plurality of word lines WL are arranged in a column direction, and a plurality of bit lines BL are arranged in a row direction. A plurality of unit cells C are located where the plurality of word lines WL and the plurality of BL are crossed.
  • FIGS. 9 a and 9 b are cross-sectional diagrams illustrating the nonvolatile ferroelectric memory device of FIG. 8.
  • FIG. 9 a is a diagram illustrating a cross section of a cell array in a direction (C) in parallel with the word line WL of FIG. 8.
  • In the cell array according to the embodiment of the present invention, a plurality of oxide layers 11 are formed on the bottom word line 10, and a plurality of P-type channel regions 12 are formed on the plurality of insulating layers 11. A plurality of ferroelectric layers 16 are formed on the plurality of channel regions 12, and the word line 17 is formed in parallel with the bottom word line 10 on the plurality of ferroelectric layers 16. Thus, a plurality of cells are connected between one word line WL_1 and one bottom word line BWL_1.
  • FIG. 9 b is a diagram illustrating a cross section of a cell array in a direction (D) perpendicular to the word line WL of FIG. 8.
  • In the cell array according to the embodiment of the present invention, the oxide layer 11 is formed on the bottom word lines BWL_1, BWL_2 and BWL_3 connected in common. The floating channel layer 15 comprising the N-type drain region 13, the P-type channel region 12 and the N-type source region 14 is formed on the oxide layer 11. The ferroelectric layer 16 is formed on each channel region 12 of the floating channel layer 15, and the word lines WL_1, WL_2 and WL_3 are formed on the ferroelectric layer 16.
  • FIG. 10 is a cross-sectional diagram illustrating a nonvolatile ferroelectric memory device having a multiple layer structure of FIG. 8.
  • Referring to FIG. 10, the unit cell array shown in FIG. 9 b is deposited as a multiple layer structure. Each unit cell array is separated by the oxide layer 18.
  • FIG. 11 is a diagram illustrating a unit array of the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • In the embodiment, the unit array of FIG. 11 comprises switching elements N1, N2 and a plurality of memory cells Q1˜Qm. Here, the switching element N1, which is connected between the bit line BL and the memory cell Q1, has a gate to receive a selecting signal SEL_1. The switching element N2, which is connected between a sensing line S/L and the memory cell Qm, has a gate to receive a selecting signal SEL_2.
  • The plurality of memory cells Q1˜Qm, which are connected serially between the switching elements N1 and N2, selectively perform a switching operation by word lines WL_1˜WL_m and bottom word lines BWL_1˜BWL_m. The detailed structure of each memory cell Q1˜Qm is shown in FIG. 2 b. Thus, a source of the memory cell Q1 is connected to the switching element N1, and a drain of the memory cell Qm is connected to the switching element N2.
  • FIG. 12 is a diagram illustrating a nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • In the embodiment, a plurality of unit cell arrays 20˜23 are arranged where a plurality of bit lines BL_1˜BL_n and a plurality of sensing lines S/L_1˜S/L_n are crossed in row and column directions. The structure of each unit cell array 20˜23 is shown in FIG. 5. The plurality of bit lines BL_1˜BL_n are connected one by one to a plurality of sense amplifiers 30.
  • FIG. 13 is a diagram illustrating a write operation of the nonvolatile ferroelectric memory according to an embodiment of the present invention.
  • In the embodiment, a write operation cycle can be divided into two sub operation regions. That is, the data “1” is written in the first sub operation region, and the data “0” is written in the second sub operation region.
  • A high voltage is applied to the bit line BL in a predetermined period when the data “1” is required to be preserved. As a result, a value of the data “1” written in the first sub operation region can be preserved in the memory cell.
  • FIG. 14 is a timing diagram illustrating a write operation of high data in the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • First, suppose that the memory cell Q1 shown in FIG. 5 is selected when the data “1” is written. A period t0 is defined as a precharge period of the memory cell.
  • In a period t1, when the selecting signals SEL_1 and SEL_2 transit to ‘high’, the switching elements N1 and N2 are turned on. As a result, the bit line BL is connected to a source of the memory cell Q1, and the sensing line S/L is connected to a drain of the memory cell Qm.
  • Here, a plurality of word lines WL1˜WL_m and a plurality of bottom word lines BWL_1˜BWL_m are maintained at a low level. Then, the bit line BL_1 and the sensing line S/L_1 are maintained at a low state.
  • In a period t2, the rest of the bottom word lines BWL_2_BWL—m except the bottom word line BWL_1 connected to the selected memory cell Q1 transit to ‘high’. As a result, the ground voltage <GND> is applied to a drain and a source of the memory cell Q1.
  • Next, in a period t3, a negative voltage VNEG is applied to the word line WL_1 connected to the selected memory cell Q1. In a period t4, the bottom word line BWL_1 transits to ‘high’. As shown in FIG. 3 a, a high voltage is applied to the ferroelectric layer 16 by voltage division of the word line WL_1 and the bottom word line BWL_1, so that the data “1” is written.
  • In a period t5, the word line WL_1 and the bottom word line BWL_1 are transited to the ground state, again. In a period t6, the rest of the bottom word lines BWL_2˜BWL_m are transited to the ground state, so that the write operation is completed. Thereafter, in a period t7, when the selecting signals SEL_1 and SEL_2 transit to ‘low’, the switching elements N1 and N2 are turned off.
  • FIG. 15 is a timing diagram illustrating the write operation of the data “0” and the maintenance operation of the data “1” in the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • First, suppose that the memory cell Q1 shown in FIG. 5 is selected when the data “0” is written. A period t0 is defined as a precharge period of the memory cell.
  • In a period t1, when the selecting signal SEL_1 transits to ‘high’, the switching element N1 is turned on. As a result, the bit line BL is connected to the source of the memory cell Q1.
  • Here, the selecting signal SEL_2, the plurality of word lines WL_1˜WL_m and the plurality of bottom word lines BWL_1˜BWL_m are maintainted at the low state. The bit line BL_1 and the sensing line S/L_1 are maintained at the low state.
  • Thereafter, in a period t2, all bottom word lines BWL_1˜BWL_m transit to ‘high’. As a result, all of the memory cells Q1˜Qm are connected to the bit line BL through the bottom word lines BWL_1˜BWL_m, so that data applied to the bit line BL can be transmitted to all of the cells Q1˜Qm.
  • In a period t3, when the data to be written in the memory cell Q1 is “0”, the bit line BL_1 is continuously maintained at the ground voltage state. On the other hand, the bit line BL_1 transits to ‘high’ when the data “1” stored in the memory cell Q1 is required to be maintained.
  • In a period t4, the word line WL_1 transits to ‘high’. As shown in FIG. 4 a, electrons are accumulated in the P-type channel region 12 of the memory cell Q1 by the word line WL_1. Then, the positive voltage is applied to the word line WL_1, and a threshold voltage difference is generated. Thus, the polarity is formed so that channel electrons may be induced to the ferroelectric layer 16. As a result, the data “0” is written in the memory cell Q1.
  • When the data “1” stored in the memory cell Q1 is required to be maintained, a high voltage is applied to the bit line BL_1, so that a voltage of the bit line BL_1 is applied to the memory cell Q1. As a result, since the electrons are prevented from being formed in the channel region 12, the data “1” can be preserved.
  • Thereafter, in a period t5, the word line WL_1 is transited to the ground state. In a period t6, all of the bottom word lines BWL_1˜BWL_m and the bit line BL_1 are transited to the ground state, so the write operation is completed. In a period t7, when the selecting signal SEL_1 transits to ‘low’, the switching element N1 is turned off.
  • FIG. 16 is a timing diagram illustrating a sensing operation of cell data in the nonvolatile ferroelectric memory device according to an embodiment of the present invention.
  • First, suppose that the memory cell Q1 shown in FIG. 5 is selected when the data is sensed. A period t0 is defined as a precharge period of the memory cell.
  • In a period t1, when the selecting signals SEL_1 and SEL_2 transit to ‘high’, the switching elements N1 and N2 are turned on. As a result, the bit line BL is connected to the source of the memory cell Q1, and the sensing line S/L is connected to the drain of the memory cell Qm.
  • Here, the plurality of word lines WL_1˜WL_m and the plurality of bottom word lines BWL_1˜BWL_m are maintained at the low state. The sense amplifier 30, the bit line BL_1 and the sensing line S/L_1 are maintained at the low state.
  • Thereafter, in a period t2, the rest of the bottom word lines BWL_2˜BWL_m except the bottom word line BWL_1 connected to the selected memory cell Q1 transits to ‘high’ As a result, the rest memory cells Q2_Qm except the selected memory cell Q1 are connected to the sensing line S/L_1.
  • Here, the plurality of word lines WL_1˜WL_m are maintained all at the ground state. Thus, the flowing of current between the bit line BL_1 and the sensing line S/L is determined depending on the polarity state formed in the memory cell Q1.
  • In a period t3, when the sense amplifier 30 is operated so that a sensing voltage is applied to the bit line BL_1, the flowing of current of the bit line BL_1 is determined depending on the state of the memory cell Q1.
  • As shown in FIG. 3 b, when current is not applied to the bit line BL_1, it is understood that the data “1” is stored in the memory cell Q1. On the other hand, as shown in FIG. 4 b, when a current over a predetermined value is applied to the bit line BL_1, it is understood that the data “0” is stored in the memory cell Q1.
  • In a period t4, when the operation of the sense amplifier 30 is stopped, the bit line BL_1 transits to ‘low’, so that the sensing operation is completed. In a period t5, the plurality of bottom word lines BWL_2˜BWL_m transit to ‘low’. In a period t6, when the selecting signals SEL_1 and SEL_2 transit to ‘low’, the switching elements N1 and N2 are turned off.
  • Although the floating channel 15 comprising the N-type drain region 13, the P-type channel region 12 and the N-type source region 14 is exemplified here, the present invention is not limited but the floating channel layer 15 can comprise a P-type drain region, a P-type channel region and a P-type source region.
  • As described above, in an embodiment of the present invention, data of a cell are not destroyed at a read mode by using a NDRO (Non Destructive Read Out). As a result, reliability of the cell can be improved at a low voltage of a nano scale ferroelectric cell and a read operation speed can be also improved. Additionally, a plurality of ferroelectric unit cell arrays are deposited to improve integrated capacity of the cell, thereby reducing the whole size of the cell.
  • While the invention is susceptible to various modifications and alternative forms, specific embodiments have been shown by way of example in the drawings and described in detail herein. However, it should be understood that the invention is not limited to the particular forms disclosed. Rather, the invention covers all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined in the appended claims.

Claims (22)

1. A nonvolatile ferroelectric memory device, comprising:
an insulating layer formed on a bottom word line;
a floating channel layer comprising a P-type channel region formed on the insulating layer and kept at a floating state, a N-type drain region and a N-type source region which are connected to both sides of the channel region;
a ferroelectric layer formed on the channel region of the floating channel layer; and
a word line formed on the ferroelectric layer,
wherein different channel resistance is induced to the channel region depending on polarity states of the ferroelectric layer, so that data are read and written.
2. The nonvolatile ferroelectric memory device according to claim 1, wherein the floating channel layer is formed of at least one of carbon nano tube, silicon and germanium.
3. The nonvolatile ferroelectric memory device according to claim 1, wherein a channel of the floating channel layer is turned off when positive charges are induced to the channel region depending on the polarity of the ferroelectric layer to cause a high resistance state, and turned on when negative charges are induced to the channel region depending on the polarity of the ferroelectric layer to cause a low resistance state.
4. The nonvolatile ferroelectric memory device according to claim 1, wherein the floating channel layer writes high data when positive charges are induced to the channel region while a positive voltage is applied to the bottom word line, a negative voltage is applied to the word line and a ground voltage is applied to the drain region and the source region, and
the floating channel layer reads high data when the ground voltage is applied to the bottom word line and the word line so that the channel of the floating channel layer is turned off.
5. The nonvolatile ferroelectric memory device according to claim 1, wherein the floating channel layer writes low data when a positive voltage is applied to the bottom word line and the word line and a ground voltage is applied to the drain region and the source region so that negative charges are induced to the channel region, and
the floating channel layer reads low data when the ground voltage is applied to the bottom word line and the word line so that the channel of the floating channel layer is turned on.
6. A nonvolatile ferroelectric memory device comprising a unit cell array which includes:
a plurality of bottom word lines;
a plurality of insulating layers formed on the plurality of bottom word lines, respectively;
a floating channel layer comprising a plurality of P-type channel regions located on the plurality of insulating layers and a plurality of N-type drain and source regions which are alternately connected in series to the plurality of P-type regions;
a plurality of ferroelectric layers formed respectively on the plurality of P-type channel regions of the floating channel layer; and
a plurality of word lines formed on the plurality of ferroelectric layers, respectively,
wherein the unit cell array reads and writes a plurality of data by inducing different channel resistance to the plurality of P-type channel regions depending on polarity states of the plurality of ferroelectric layers.
7. The nonvolatile ferroelectric memory device according to claim 6, wherein the unit cell array includes a plurality of layers and each of the plurality of layers is separated by an insulating layer.
8. A nonvolatile ferroelectric memory device comprising a unit cell array which includes:
a bottom word line;
a plurality of insulating layers formed on the bottom word line, respectively;
a floating channel layer comprising a plurality of P-type channel regions located on the plurality of insulating layers and a plurality of N-type drain and source regions which are alternately connected in series to the plurality of P-type channel regions;
a plurality of ferroelectric layers formed respectively on the plurality of P-type channel regions of the floating channel layer; and
a plurality of word lines formed on the plurality of ferroelectric layers, respectively;
wherein the unit cell array reads and writes a plurality of data by inducing different channel resistance to the plurality of P-type channel regions depending on polarity states of the plurality of ferroelectric layers.
9. The nonvolatile ferroelectric memory device according to claim 8, wherein the unit cell array includes a plurality of layers and each of the plurality of layers is separated by an insulating layer.
10. A nonvolatile ferroelectric memory device comprising:
a bottom word line;
a floating channel layer formed on the bottom word line and kept at a floating state;
a ferroelectric layer, formed on the floating channel layer, where data are stored; and
a word line formed on the ferroelectric layer in parallel with the bottom word line,
wherein a write operation is performed on data corresponding to the ferroelectric layer depending on a state of a voltage level applied to the bottom word line and the word line, and a read operation is performed on data by inducing different channel resistance to the floating channel layer depending on polarity states of charges stored in the ferroelectric layer.
11. The nonvolatile ferroelectric memory device according to claim 10, wherein the floating channel layer comprise a P-type channel region, a N-type drain region and a N-type source region which are connected to both sides of the P-type channel region.
12. The nonvolatile ferroelectric memory device according to claim 10, wherein the floating channel layer comprises a P-type channel region, and a P-type drain region and a P-type source region which are connected to both sides of the P-type channel region.
13. A nonvolatile ferroelectric memory device comprising:
a plurality of memory cells whose switching operations are selectively controlled respectively depending on voltages applied to a plurality of word lines and a plurality of bottom word lines and where floating channel layers are connected serially;
a first switching element for selectively connecting the plurality of memory cells to a bit line in response to a first selecting signal;
a second switching element for selectively connecting the plurality of memory cells to a sensing line in response to a second selecting signal,
wherein each of the plurality of memory cells comprises:
an insulating layer formed on the bottom word line;
the floating channel layer comprising a P-type channel region formed on the insulating layer and kept at a floating state, a N-type drain region and a N-type source region which are connected to both sides of the channel region;
a ferroelectric layer formed on the channel region of the floating channel layer; and
a word line formed on the ferroelectric layer.
14. The nonvolatile ferroelectric memory device according to claim 13, wherein the first switching element and the second switching element are kept on when high data are written in the plurality of memory cells, the first switching element is turned on and the second switching element is turned off when low data are written in the plurality of memory cells.
15. The nonvolatile ferroelectric memory device according to claim 13, wherein one selected from the plurality of memory cells writes high data when a positive voltage is applied to the bottom word line, a negative voltage is applied to the word line and a ground voltage is applied to the bit line and the sensing line, and
one selected from the plurality of memory cells writes low data when a positive voltage is applied to the bottom word line and the word line and a ground voltage is applied to the bit line and the sensing line.
16. The nonvolatile ferroelectric memory device according to claim 15, wherein a plurality of word lines connected to ones unselected from the plurality of memory cells are kept at a low state and a plurality of bottom word lines are kept at a high state.
17. The nonvolatile ferroelectric memory device according to claim 13, wherein one selected from the plurality of memory cells reads high data when a ground voltage is applied to the bottom word line and the word line and the channel of the floating channel layer is turned off, and
one selected from the plurality of memory cells reads low data when a ground voltage is applied to the bottom word line and the word line and the channel of the floating channel layer is turned on.
18. A nonvolatile ferroelectric memory device comprising:
a plurality of bit lines arranged in a row direction;
a plurality of sensing lines arranged perpendicular to the plurality of bit lines;
a plurality of memory cells arranged in row and column directions where the plurality of bit lines and the plurality of sensing lines are crossed; and
a plurality of sense amplifiers connected one by one to the plurality of bit lines,
wherein each of the plurality of memory cells comprises:
an insulating layer formed on a bottom word line;
the floating channel layer comprising a P-type channel region formed on the floating layer and kept at a floating state, a N-type drain region and a N-type source region which are connected to both sides of the channel region;
a ferroelectric layer formed on the channel region of the floating channel layer; and
a word line formed on the ferroelectric layer.
19. The nonvolatile ferroelectric memory device according to claim 18, wherein each of the plurality of memory cells further comprises:
a first switching element for selectively connecting the plurality of memory cells to a bit line in response to a first selecting signal; and
a second switching element for selectively connecting the plurality of memory cells to a sensing line in response to a second selecting signal.
20. The nonvolatile ferroelectric memory device according to claim 19, wherein the first switching element and the second switching element are kept on when high data are written in the plurality of memory cells, the first switching element is turned on and the second switching element is turned off when low data are written in the plurality of memory cells.
21. The nonvolatile ferroelectric memory device according to claim 20, wherein one selected from the plurality of memory cells writes high data when a positive voltage is applied to the bottom word line, a negative voltage is applied to the word line and a ground voltage is applied to the bit line and the sensing line, and
one selected from the plurality of memory cells writes low data when a positive voltage is applied to the bottom word line and the word line and a ground voltage is applied to the bit line and the sensing line.
22. The nonvolatile ferroelectric memory device according to claim 19, wherein a ground voltage is applied to the bottom word line and the word line when the first switching element and the second switching element are turned on at the read mode of the plurality of memory cells.
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US7741668B2 (en) 2010-06-22
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