US20040089414A1 - Assembly method of substrates and assembly apparatus of substrates - Google Patents

Assembly method of substrates and assembly apparatus of substrates Download PDF

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Publication number
US20040089414A1
US20040089414A1 US10/686,100 US68610003A US2004089414A1 US 20040089414 A1 US20040089414 A1 US 20040089414A1 US 68610003 A US68610003 A US 68610003A US 2004089414 A1 US2004089414 A1 US 2004089414A1
Authority
US
United States
Prior art keywords
substrate
pressure
substrates
leaving
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/686,100
Other languages
English (en)
Inventor
Tsutomu Makino
Shinichi Ogimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Assigned to SHIBAURA MECHATRONICS CORPORATION reassignment SHIBAURA MECHATRONICS CORPORATION SEE RECORDING ON REEL 014870/0776 (PAGES) Assignors: MAKINO, TSUTOMU, OGIMOTO, SHINICHI
Assigned to SHIBAURA MECHATRONICS CORPORATION reassignment SHIBAURA MECHATRONICS CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MAKINO, TSUTOMU, OGIMOTO, SHINICHI
Publication of US20040089414A1 publication Critical patent/US20040089414A1/en
Abandoned legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0007Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality
    • B32B37/003Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality to avoid air inclusion
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1341Filling or closing of cells
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2305/00Condition, form or state of the layers or laminate
    • B32B2305/55Liquid crystals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2309/00Parameters for the laminating or treatment process; Apparatus details
    • B32B2309/60In a particular environment
    • B32B2309/68Vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/20Displays, e.g. liquid crystal displays, plasma displays
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1341Filling or closing of cells
    • G02F1/13415Drop filling process

Definitions

  • the first substrate 3 and second substrate 4 are left to stand under a predetermined reduced pressure atmosphere for the predetermined time by the first pressure reduction leaving device 15 and second pressure reduction leaving device 23 , before bonded to each other by the bonding device 21 .
  • the pressure of the chamber 25 A is reduced to the predetermined pressure before the first and second substrates 3 , 4 are bonded to each other in the chamber 25 A of the bonding device 21 , and the substrates 3 , 4 are left to stand under the reduced pressure atmosphere for the predetermined time.

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
US10/686,100 2002-10-15 2003-10-14 Assembly method of substrates and assembly apparatus of substrates Abandoned US20040089414A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2002-300536 2002-10-15
JP2002300536 2002-10-15
JP2003-175023 2003-06-19
JP2003175023A JP4373136B2 (ja) 2002-10-15 2003-06-19 基板の組立て方法及び基板の組立て装置

Publications (1)

Publication Number Publication Date
US20040089414A1 true US20040089414A1 (en) 2004-05-13

Family

ID=32232629

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/686,100 Abandoned US20040089414A1 (en) 2002-10-15 2003-10-14 Assembly method of substrates and assembly apparatus of substrates

Country Status (4)

Country Link
US (1) US20040089414A1 (ko)
JP (1) JP4373136B2 (ko)
KR (1) KR20040034447A (ko)
TW (1) TW200420949A (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070199650A1 (en) * 2006-02-24 2007-08-30 Yu-Cheng Lo Assembly method for display panel
US20130319597A1 (en) * 2009-10-08 2013-12-05 Sang-Young Park Substrate bonding apparatus and substrate bonding method
US9186696B2 (en) 2009-09-08 2015-11-17 Tokyo Ohka Kogyo Co., Ltd. Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate
US10401662B2 (en) * 2012-10-12 2019-09-03 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and touch panel

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4760457B2 (ja) * 2006-03-13 2011-08-31 株式会社日立プラントテクノロジー 基板貼り合せ装置
JP4713517B2 (ja) * 2007-02-20 2011-06-29 芝浦メカトロニクス株式会社 貼り合わせ基板の製造装置及び製造方法
JP5719546B2 (ja) * 2009-09-08 2015-05-20 東京応化工業株式会社 塗布装置及び塗布方法
KR101247900B1 (ko) * 2010-02-23 2013-03-26 가부시키가이샤 히타치플랜트테크놀로지 액정 기판 접합 시스템
WO2012102228A1 (ja) * 2011-01-28 2012-08-02 シャープ株式会社 液晶パネルの製造方法
JP6220592B2 (ja) 2013-07-30 2017-10-25 株式会社ジャパンディスプレイ 液晶表示素子及びその製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070199650A1 (en) * 2006-02-24 2007-08-30 Yu-Cheng Lo Assembly method for display panel
US7485203B2 (en) * 2006-02-24 2009-02-03 Chunghwa Picture Tubes, Ltd. Assembly method for display panel
US9186696B2 (en) 2009-09-08 2015-11-17 Tokyo Ohka Kogyo Co., Ltd. Coating apparatus including a chamber, sensor, removal unit and control device for application of liquid to a substrate
US20130319597A1 (en) * 2009-10-08 2013-12-05 Sang-Young Park Substrate bonding apparatus and substrate bonding method
US10401662B2 (en) * 2012-10-12 2019-09-03 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and touch panel

Also Published As

Publication number Publication date
KR20040034447A (ko) 2004-04-28
JP2004188407A (ja) 2004-07-08
TW200420949A (en) 2004-10-16
JP4373136B2 (ja) 2009-11-25

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Legal Events

Date Code Title Description
AS Assignment

Owner name: SHIBAURA MECHATRONICS CORPORATION, JAPAN

Free format text: ;ASSIGNORS:MAKINO, TSUTOMU;OGIMOTO, SHINICHI;REEL/FRAME:014831/0189

Effective date: 20031002

Owner name: SHIBAURA MECHATRONICS CORPORATION, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:MAKINO, TSUTOMU;OGIMOTO, SHINICHI;REEL/FRAME:014870/0776

Effective date: 20031002

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION