US20020186032A1 - Burn-in apparatus and semiconductor wafer - Google Patents
Burn-in apparatus and semiconductor wafer Download PDFInfo
- Publication number
- US20020186032A1 US20020186032A1 US10/212,786 US21278602A US2002186032A1 US 20020186032 A1 US20020186032 A1 US 20020186032A1 US 21278602 A US21278602 A US 21278602A US 2002186032 A1 US2002186032 A1 US 2002186032A1
- Authority
- US
- United States
- Prior art keywords
- semiconductor devices
- semiconductor
- wires
- wafer
- pathways
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2862—Chambers or ovens; Tanks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2868—Complete testing stations; systems; procedures; software aspects
- G01R31/287—Procedures; Software aspects
Definitions
- the present invention relates to a semiconductor wafer on which semiconductor devices to be screened are formed.
- the present invention relates to a burn-in apparatus for screening semiconductor devices formed on a semiconductor wafer.
- the present invention relates, more particularly to a burn-in apparatus and a semiconductor wafer which enables screening many semiconductor devices at once without connection failures on wires.
- FIG. 7 is a diagram for explaining the screening process disclosed in Unexamined Japanese Patent Application KOKAI Publication No. H10-284556.
- a semiconductor wafer 122 on which semiconductor devices are formed is mounted on a stage 121 in a burn-in apparatus, as a first step.
- a contact sheet 123 is placed on the wafer 122
- a base unit 124 is placed on the contact sheet 123 .
- One major surface of the contact sheet 123 facing the wafer 122 has terminals which has a pattern same as that of terminals on the semiconductor devices.
- the other side of the contact sheet 123 has terminals which has a pattern same as that of terminals formed on a surface of the base unit 124 which facing the contact sheet 123 .
- the present invention has been made in consideration of the above. It is an object of the present invention to provide a burn-in apparatus and a semiconductor wafer for screening semiconductor devices efficiently. It is another object of the present invention to provide a burn-in apparatus and a semiconductor wafer for screening semiconductor devices successfully. A further object of the present invention to provide a burn-in apparatus and a semiconductor wafer for screening multiple semiconductor devices simultaneously without connection failures on wires prepared for the screening.
- Each of the interconnection members may comprise;
- the plurality of the electrodes may be arranged so as to contact both ends of the pathways which are formed among lines of the matrix formed semiconductor devices on the semiconductor wafer.
- the plurality of the electrodes may be grouped by ends of the pathways being connected to, and the electrodes in the same group may be connected to each other by wires while one of the electrodes in the group is connected to the signal generator.
- a semiconductor wafer according to a second aspect of the present invention is a semiconductor wafer comprises:
- a device zone which is prepared for forming thereon semiconductor devices, and a peripheral zone which is prepared around the device zone;
- a plurality of wires which are formed across the device and peripheral zones in order to supply signals for screening respectively to the plurality of the semiconductor devices, wherein the wires are straight while being parallel to each other in the device zone.
- the wires may extend straightly from the device zone to the peripheral zone.
- the wires may be formed so that intervals among the ends of the wires on the peripheral zone are wider than intervals among the wires on the device zone.
- FIG. 1 is a diagram showing a state where semiconductor devices on a semiconductor wafer according to a first embodiment are being screened;
- FIG. 2 is a diagram showing a state where the semiconductor wafer according to the first embodiment is held by a wafer holder;
- FIG. 3A is a diagram showing the structure of the semiconductor wafer according to the first embodiment
- FIG. 3B is a diagram showing connection between the semiconductor devices on the semiconductor wafer shown in FIG. 3A and a burn-in controller;
- FIG. 4A is a plan view showing the structure of the wafer holder
- FIG. 4B is a cross sectional view along a B-B′ line in FIG. 4A
- FIG. 4C is a diagram showing connection between an electrode chip of the wafer holder and on-board pathways on the semiconductor wafer;
- FIG. 5 is a diagram showing the structure of a semiconductor wafer according to a second embodiment
- FIG. 6A is a diagram showing the structure of a conventional semiconductor wafer
- FIG. 6B is a diagram showing a state where semiconductor devices on the semiconductor wafer shown in FIG. 6A are being screened
- FIG. 7 is a diagram showing the structure of a conventional burn-in apparatus.
- FIG. 1 shows a state where semiconductor devices on the semiconductor wafer according to the first embodiment are being screened in a burn-in apparatus.
- the burn-in apparatus comprises an isothermal chamber 11 , wafer holders 12 , a slot array 13 , a controller 14 , and bridge lines 15 .
- the slot array 13 is prepared in the chamber 11 to hold a plurality of wafer holders 12 holding the wafers 16 .
- the controller 14 generates a source voltage, a control signal, and the like necessary for screening, and supplies them to the semiconductor devices on the wafers 16 via the bridge lines 15 .
- the controller 14 also controls the temperature in the isothermal chamber 11 and the burn-in apparatus in accordance with a given program or the like.
- the bridge lines 15 electrically interconnect the controller 14 and wafer holders 12 .
- the source voltage, control signal or the like for the screening are supplied to the wafers 16 in the isothermal chamber 11 from the controller 14 .
- FIG. 2 shows a state where the semiconductor wafer 16 is held by the wafer holder 12 .
- semiconductor devices 21 , on-board pathways 22 , and burn-in controllers 23 are formed on the wafer 16 .
- a plurality of the semiconductor devices 21 are formed on an inner zone of the wafer 16 (hereinafter, referred to as a device zone) in matrix form.
- the formed semiconductor devices 21 will be screened by the burn-in apparatus.
- Each of the on-board pathways 22 has several (for example, four) wires as a unit. (Note that only three wires of four are shown in FIG. 3A.)
- the on-board pathways 22 are arranged among lines of the semiconductor devices 21 unit by unit, and the arranged pathways 22 are straight. That is, the pathways 22 are formed in simple wiring patterns. This means that the on-board pathways 22 can be formed by a simple method such as a reduction projection step and repeat exposure.
- the on-board pathways 22 straightly extend to edge of the wafer 16 , that is, extend to joint portions which will be connected to the wafer holder 12 .
- appropriate gauge and intervals are given to the wires.
- the wires are shielded on the device zone while the wire ends at the wafer edge are exposed for contact.
- the burn-in controllers 23 are formed on the wafer 16 so as to be adjacent to the semiconductor devices 21 respectively. Each of the burn-in controllers 23 supplies a source voltage, a control signal, and the like from the controller 14 , to its corresponding semiconductor device 21 .
- FIG. 3B shows the structure of connection between the semiconductor device 21 and the burn-in controller 32 .
- a unit of the on-board pathways 22 runs through lined burn-in controllers 23 .
- Each wire unit contains lines such as a power line 31 , a ground (GND) line 32 , a signal line 33 , and a gate line 34 .
- Each semiconductor device 21 has pads 38 , 40 and 42 , and switching transistors (hereinafter referred to as switching Tr) 37 , 39 and 41 .
- the switching Tr 37 , 39 and 41 interconnect the pads 38 , 40 and 42 with the power line 31 , the GND line 32 , and the signal line 33 respectively.
- the pads 38 , 40 , and 42 work as terminals of a circuit (not shown) of the semiconductor device 21 . Those terminals will be used in practical use.
- the power line 31 is connected to one source/drain of the switching Tr 37 via a diode 35 and a resistance 36 , while the other source/drain is connected to the pad 38 .
- This pair of the diode 35 and resistance 36 functions as an anti-overcurrent device. That is, if the semiconductor device 21 is broken during the screening, the corresponding anti-overcurrent device prevents an overcurrent from being applied to other semiconductor devices 21 .
- the GND line 32 is connected to one source/drain of the switching Tr 39 .
- the other source/drain of the switching Tr 39 is connected to the pad 40 .
- the signal line 33 is connected to one source/drain of the switching Tr 41 .
- the other source/drain of the switching Tr 41 is connected to the pad 42 .
- Gates of the switching Tr 37 , 39 and 41 are connected to the gate line 34 via a fuse 43 , while being connected to the substrate of the semiconductor device 21 via diodes 44 , 45 and 46 respectively. Purpose of the diodes 44 , 45 and 46 is to maintain a gate potential in a predetermined range during the practical use. The potential of the substrate is restricted, for example, so as to be lower than threshold voltages of the switching Tr 37 , 39 and 41 .
- the wafer holder 12 comprises a stage board 51 , a chuck 52 , a vacuum outlet 53 , an interconnection ring 54 , electrode chips 55 , common pathways 56 , a pressure board 57 , and fixer clasps 58 .
- the stage board 51 comprises the chuck 52 and the vacuum outlet 53 which are prepared for fixing the wafer 16 on the stage board 51 . That is, a vacuum pump (not shown) or the like vacuums out the air in the chuck 52 through the vacuum outlet 53 , thus the wafer 16 is stuck to the stage board 51 .
- the interconnection ring 54 comprises the electrode chips 55 and the common pathways 56 .
- the interconnection ring 54 is placed on the stage board 51 after the wafer 16 is stuck on the stage board 51 .
- the electrode chips 55 are arranged at inner side of the interconnection ring 54 so as to contact ends of the on-board pathways 22 on the wafer 16 . That is, positions of the electrode chips 55 when the wafer 16 is mounted on the wafer holder 12 substantially coincide with positions of ends of the on-board pathways 22 .
- the electrode chips 55 are classified into two groups by the ends of the on-board pathways 22 being connected to, and the electrode chips 55 in the same group are connected to each other by the common pathways 56 . Further, one of the electrode chips 55 in the group is connected to the bridge line 15 .
- each of the electrode chips 55 has contact electrodes 59 , as shown in FIG. 4C, which contact the wires in the unit of the on-board pathways 22 . That is, the contact electrodes 59 are arranged at intervals which coincide with intervals of the wires.
- Each of the contact electrodes 59 is connected to the bridge line 15 or the common pathways 56 . Accordingly, electric connection between the on-board pathways 22 and the bridge lines 15 will be established when the interconnection ring 54 is pressed upon the stage board 51 .
- the pressure board 57 is placed on the interconnection ring 54 .
- the fixer clasps 58 tighten the pressure board 57 so that the pressure board 57 and the stage board 51 press the interconnection ring 54 , thus the contact electrodes 59 contact the on-board pathways 22 completely.
- the semiconductor wafers 16 are mounted on the wafer holders 12 as described above, common terminals (pads) which have been employed in the conventional techniques are unnecessary. Moreover, complete connection between the bridge lines 15 and the on-board pathways 22 is established. Those features prevent connection failures caused by thermal expansion during the screening process from appearing, thus, successful screening is realized. Further, the above structures of the wafers 16 with the wafer holders 12 allow the isothermal chamber 11 to contain stacked multiple wafers 16 as shown in FIG. 1. This feature realizes screening the mass of semiconductor devices 21 simultaneously in a small space.
- pre-test for find out short circuit and the like of the semiconductor devices 21 is carried out, by which semiconductor devices 21 having failures unsuitable for screening are eliminated. More precisely, the fuses 43 of such the unsuitable devices 21 are cut by laser beam or the like, thus they will not be screened.
- the semiconductor wafers 16 are mounted on the wafer holders 12 .
- the wafers 16 are placed on the stage boards 51 of the wafer holders 12 ; and sets of the stage board 51 and the pressure boards 57 are tightened by the fixer clasps 58 .
- the electrode chips 55 contact the on-board pathways 22 , and this contact electrically interconnects the bridge lines 15 and the semiconductor devices 21 on the wafer 16 .
- the plurality of the wafer holders 12 on each of which the wafer 16 is fixed are attached to the slot array 13 .
- the bunch of wafers 16 and wafer holders 12 are loaded into the isothermal chamber 11 through the gateway 17 .
- the controller 14 After the loading, the controller 14 starts to elevate the temperature in the isothermal chamber 11 in accordance with a given program and the like, in response to an instruction given by an operator of the apparatus or the like.
- the controller 14 activates the switching Tr 37 , 39 and 41 by providing the gate lines 34 with control signals having a predetermined level.
- the controller 14 also provides the semiconductor devices 21 with source voltages via the power lines 31 in order to drive the semiconductor devices 21 . And then, the controller 14 provides the semiconductor devices 21 with test pattern signals via the signal lines 33 , thus, the semiconductor devices 21 are screened.
- the bunch of the wafer holders 12 is unloaded from the isothermal chamber 11 through the gateway 17 .
- following bunches of the semiconductor devices 21 are subjected to the screening one after another.
- the semiconductor devices 21 which passed the screening are diced to be products.
- a semiconductor wafer according to the second embodiment is similar to the semiconductor wafer 16 described in the first embodiment.
- This embodiment features the structure of wafer edge which differs from the wafer 16 of the first embodiment. More precisely, intervals among the ends of the on-board pathways 22 at the edge of the wafer 16 of this embodiment are wider than intervals among them in the device zone of the wafer 16 (inner zone where the semiconductor devices are formed) as shown in FIG. 5. In other words, the ends of the wires of the on-board pathways 22 are scattered at the wafer edge.
- the arrangement of the electrode chips 55 of the wafer holder 12 will be modified as the structure of the wafer 16 is modified. That is, the electrode chips 55 are arranged on the interconnection ring 54 so as to contact the wires of the on-board pathways 22 respectively. In this case, the electrode chips 55 are grouped by ends of the on-board pathways 22 being connected to, and the electrode chips 55 in the same group are connected to each other by the common pathway 56 . For example, the electrode chips 55 being connected to one ends of the power lines 31 are connected to each other via one common pathway 56 ; and the electrode chips 55 being connected to one ends the signal lines 33 are connected to each other via another common pathway 56 . In the same manner, the electrode chips 55 being connected to the other ends of the on-board pathways 22 are connected to each other via their corresponding common pathway 56 .
- each of the electrode chips 55 does not require its own minute contact elements (contact electrodes 59 in the first embodiment) to be respectively connected to the wires of the on-board pathways 22 .
- precise mounting of the wafer 16 on the wafer holder 12 can be done without any difficulties in processing and adjusting.
- the wafer holders 12 described in the above embodiments may employ other structures which enable the electrode chips 55 to contact the on-board pathways 22 .
- the wafer holder 12 may have fixer clamps instead of the pressure board 57 , which bind the stage board 51 and the interconnection ring 54 .
- the wafer holder 12 may have clothespin-like clips which pinches the wafer 16 to hold it.
- one side of contact surface of the clip has the electrode chips 55 .
- the clip has dual function of holding and connecting. That is, the clip can connect the electrode chips 55 to the on-board pathways 22 completely while holding the wafer 16 .
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
A semiconductor wafer has a device zone and a peripheral edge zone. Semiconductor devices to be screened are formed in a matrix form on the device zone of the semiconductor wafer. A plurality of wires connected to the semiconductor devices are formed on the device and peripheral edge zones. In the device zone, the wires are formed among lines of the semiconductor devices. A burn-in apparatus comprises a holder, a thermal controller, a signal generator, and interconnection members. The holder holds a plurality of the semiconductor wafers in order to install them in a room. The thermal controller controls temperature in the room to heat the semiconductor wafers up to a predetermined temperature. The signal generator generates a test pattern signal for screening the semiconductor devices. Each of the interconnection members has a plurality of electrodes formed so as to contact the ends of the wires, and presses the electrodes into the wires to establish complete connection between the electrodes and the wires.
Description
- 1. Field of the Invention
- The present invention relates to a semiconductor wafer on which semiconductor devices to be screened are formed. The present invention relates to a burn-in apparatus for screening semiconductor devices formed on a semiconductor wafer. The present invention relates, more particularly to a burn-in apparatus and a semiconductor wafer which enables screening many semiconductor devices at once without connection failures on wires.
- 2. Description of the Related Art
- Burn-in screening has been known as a technique for eliminating semiconductor devices having potential failures. The screening is usually performed under elevated temperatures, and the devices being screened have been electrically stressed for a predetermined time period. Thus screened device tends to induce accelerated failures which may appear early in the device's lifetime.
- Conventional screening has been applied to devices which are cut from the wafer and mounted into packages. Usually, the devices are placed in the packages and then the packages go into sockets on the burn-in boards. And then, the boards are placed in the burn-in apparatus for screening.
- Recently, demands for screening unpackaged devices have been developing because the unpackaged devices have been widely used. However, it is difficult to individually screen devices which have been cut away from the wafer. Therefore, demands for wafer level burn-in have been developing.
- Such the wafer level burn-in techniques are disclosed in Unexamined Japanese Patent Application KOKAI Publications Nos. S63-124443, H5-121502, H6-5677, and H10-284556. The disclosures of the above applications are incorporated herein by reference in their entirety.
- In each of the techniques disclosed in the above applications, common conductive X-axis and Y-axis pathways for screening are formed among a plurality of devices formed on a wafer, and common terminals connected to the common pathways are formed at wafer edges. More precisely,
common pathways 111 are formed among semiconductor devices, andcommon terminals 112 are formed at wafer edge, as shown in FIG. 6A. During the screening process, the wafer is stuck to astage 113 in the burn-in apparatus as shown in FIG. 6B. And then, aprobe 114 contacts thecommon terminals 112, as described in Unexamined Japanese Patent Application KOKAI Publication No. H5-121502. Then, voltages, test pattern signals, and the like necessary for screening are supplied to the semiconductor devices from apower source 115 and apulse generator 116 via theprobe 114, thecommon terminals 112 and thecommon pathways 111. Thus, the semiconductor devices on the wafer are screened. - FIG. 7 is a diagram for explaining the screening process disclosed in Unexamined Japanese Patent Application KOKAI Publication No. H10-284556. A semiconductor wafer122 on which semiconductor devices are formed is mounted on a
stage 121 in a burn-in apparatus, as a first step. Then, a contact sheet 123 is placed on thewafer 122, and abase unit 124 is placed on the contact sheet 123. One major surface of the contact sheet 123 facing thewafer 122 has terminals which has a pattern same as that of terminals on the semiconductor devices. The other side of the contact sheet 123 has terminals which has a pattern same as that of terminals formed on a surface of thebase unit 124 which facing the contact sheet 123. During the screening process, amechanical jig 125 is pressed upon the burn-in apparatus, thus, the contact sheet 123 and thebase unit 124 are pressed upon thewafer 122. This contact establishes electrical connection between the terminals on thebase unit 124 and the terminals on the semiconductor devices while sandwiching the contact sheet 123 therebetween. Asignal generator 126 generates a test pattern signal, and supply it to the semiconductor devices via thebase unit 124 being connected to thesignal generator 126 and via the contact sheet 123. Thus, the semiconductor devices are screened. - According to the techniques disclosed in the above mentioned Unexamined Japanese Patent Application KOKAI Publications Nos. S63-124443, H5-121502, and H6-5677, the x-axis and y-axis
common pathways 111 are formed among the semiconductor devices. Because such wiring formation is very complex, the formation process is also complex. Moreover, the above-described techniques require many steps before carrying out the screening such as formation of thecommon terminal 112 and the like. Therefore, it takes a long time before carrying out the screening. Such the extra steps also raise the manufacturing cost. - According to the technique disclosed in Unexamined Japanese Patent Application KOKAI Publication No. H5-121502, voltages and signals necessary for the screening are supplied to the semiconductor devices via the
probe 114 which contacts thecommon terminals 112 on the wafer. Elevated temperature in the burn-in apparatus may expands theprobe 114 itself, and then theprove 114 may fail to precise contact with thecommon terminals 112. That is, the technique disclosed in the above application has a problem which causes unsuccessful screening. Moreover, thestage 113 can hold only one wafer. Therefore, screening efficiency is poor, especially in a case where the wafer must be placed in a chamber under a constant temperature for a long time. - In the case of Unexamined Japanese Patent Application KOKAI Publication No. H10-284556, the
base unit 124 and the contract sheet 123 are pressed upon thesemiconductor wafer 122 by themechanical jig 125. This structure permits the burn-in apparatus to place only one wafer therein for each screening. This technique also has poor efficiency. - The present invention has been made in consideration of the above. It is an object of the present invention to provide a burn-in apparatus and a semiconductor wafer for screening semiconductor devices efficiently. It is another object of the present invention to provide a burn-in apparatus and a semiconductor wafer for screening semiconductor devices successfully. A further object of the present invention to provide a burn-in apparatus and a semiconductor wafer for screening multiple semiconductor devices simultaneously without connection failures on wires prepared for the screening.
- To achieve the above objects, a burn-in apparatus according to a first aspect of the present invention is a burn-in apparatus comprises:
- a holder which holds a plurality of semiconductor wafers each having an inner zone prepared for arranging thereon a plurality of semiconductor devices to be screened, and a peripheral edge zone around the inner zone, in order to install the plurality of the semiconductor wafers in a room;
- a thermal controller which controls temperature of the room so as to heat the plurality of the semiconductor wafers up to a predetermined temperature;
- a signal generator which generates a test pattern signal for screening the semiconductor devices on the plurality of the semiconductor wafers which have been heated up to the predetermined temperature; and
- interconnection members which electrically interconnect the signal generator and each of the semiconductor devices, in order to provide the semiconductor devices respectively with the signals generated by the signal generator.
- This invention realizes screening the semiconductor devices formed on the plurality of semiconductor wafers installed in the room. In other words, it realize efficient screening wherein many semiconductor devices are screened.
- The holder may hold the semiconductor wafers each having a plurality of pathways which are formed across the inner and peripheral edge zones for supplying the test pattern signals to the semiconductor devices; and
- each of the interconnection members may have a plurality of electrodes being connected to the signal generator, and presses the electrodes so as to contact the pathways.
- Each of the interconnection members may comprise;
- a first board on which the semiconductor wafer is vacuum fixed; and
- a second board which collaborates with the first plate to provide the electrodes with pressure for making contact with the pathways.
- The plurality of the electrodes may be arranged so as to contact both ends of the pathways which are formed among lines of the matrix formed semiconductor devices on the semiconductor wafer.
- The plurality of the electrodes may be grouped by ends of the pathways being connected to, and the electrodes in the same group may be connected to each other by wires while one of the electrodes in the group is connected to the signal generator.
- A semiconductor wafer according to a second aspect of the present invention is a semiconductor wafer comprises:
- a device zone which is prepared for forming thereon semiconductor devices, and a peripheral zone which is prepared around the device zone;
- a plurality of semiconductor devices which are formed on the device zone to be subjected to screening; and
- a plurality of wires which are formed across the device and peripheral zones in order to supply signals for screening respectively to the plurality of the semiconductor devices, wherein the wires are straight while being parallel to each other in the device zone.
- The wires may extend straightly from the device zone to the peripheral zone.
- The wires may be formed so that intervals among the ends of the wires on the peripheral zone are wider than intervals among the wires on the device zone.
- These objects and other objects and advantages of the present invention will become more apparent upon reading of the following detailed description and the accompanying drawings in which:
- FIG. 1 is a diagram showing a state where semiconductor devices on a semiconductor wafer according to a first embodiment are being screened;
- FIG. 2 is a diagram showing a state where the semiconductor wafer according to the first embodiment is held by a wafer holder;
- FIG. 3A is a diagram showing the structure of the semiconductor wafer according to the first embodiment, and FIG. 3B is a diagram showing connection between the semiconductor devices on the semiconductor wafer shown in FIG. 3A and a burn-in controller;
- FIG. 4A is a plan view showing the structure of the wafer holder, FIG. 4B is a cross sectional view along a B-B′ line in FIG. 4A, and FIG. 4C is a diagram showing connection between an electrode chip of the wafer holder and on-board pathways on the semiconductor wafer;
- FIG. 5 is a diagram showing the structure of a semiconductor wafer according to a second embodiment;
- FIG. 6A is a diagram showing the structure of a conventional semiconductor wafer, and FIG. 6B is a diagram showing a state where semiconductor devices on the semiconductor wafer shown in FIG. 6A are being screened; and
- FIG. 7 is a diagram showing the structure of a conventional burn-in apparatus.
- A semiconductor wafer according to a first embodiment of the present invention will now be described with reference to accompanying drawings.
- FIG. 1 shows a state where semiconductor devices on the semiconductor wafer according to the first embodiment are being screened in a burn-in apparatus.
- As shown in FIG. 1, the burn-in apparatus comprises an
isothermal chamber 11,wafer holders 12, aslot array 13, acontroller 14, and bridge lines 15. - The
isothermal chamber 11 has agateway 17 through whichsemiconductor wafers 16, on which semiconductor devices to be screened are formed, are installed in theisothermal chamber 11, and is equipped with a heater (not shown) or the like which heats the installedsemiconductor wafers 16 up to a predetermined temperature and maintains it. - The
wafer holders 12 hold thesemiconductor wafers 16, and electrically interconnect the semiconductor devices on thewafers 16 and the bridge lines 15. The structure of thewafer holders 12 will be described later. - The
slot array 13 is prepared in thechamber 11 to hold a plurality ofwafer holders 12 holding thewafers 16. - The
controller 14 generates a source voltage, a control signal, and the like necessary for screening, and supplies them to the semiconductor devices on thewafers 16 via the bridge lines 15. Thecontroller 14 also controls the temperature in theisothermal chamber 11 and the burn-in apparatus in accordance with a given program or the like. - The bridge lines15 electrically interconnect the
controller 14 andwafer holders 12. Thus, the source voltage, control signal or the like for the screening are supplied to thewafers 16 in theisothermal chamber 11 from thecontroller 14. - The structures of the
wafer holder 12 and thesemiconductor wafer 16 will now be described. - FIG. 2 shows a state where the
semiconductor wafer 16 is held by thewafer holder 12. - As shown in FIG. 3A,
semiconductor devices 21, on-board pathways 22, and burn-incontrollers 23 are formed on thewafer 16. - A plurality of the
semiconductor devices 21 are formed on an inner zone of the wafer 16 (hereinafter, referred to as a device zone) in matrix form. The formedsemiconductor devices 21 will be screened by the burn-in apparatus. - Each of the on-
board pathways 22 has several (for example, four) wires as a unit. (Note that only three wires of four are shown in FIG. 3A.) The on-board pathways 22 are arranged among lines of thesemiconductor devices 21 unit by unit, and the arrangedpathways 22 are straight. That is, thepathways 22 are formed in simple wiring patterns. This means that the on-board pathways 22 can be formed by a simple method such as a reduction projection step and repeat exposure. For the sake of connection to thebridge lines 15 via the wafer holder 12 (the structure thereof will be described later), the on-board pathways 22 straightly extend to edge of thewafer 16, that is, extend to joint portions which will be connected to thewafer holder 12. To avoid wire break and short circuit of the on-board pathways 22, appropriate gauge and intervals are given to the wires. For the same purpose, the wires are shielded on the device zone while the wire ends at the wafer edge are exposed for contact. - The burn-in
controllers 23 are formed on thewafer 16 so as to be adjacent to thesemiconductor devices 21 respectively. Each of the burn-incontrollers 23 supplies a source voltage, a control signal, and the like from thecontroller 14, to itscorresponding semiconductor device 21. - FIG. 3B shows the structure of connection between the
semiconductor device 21 and the burn-incontroller 32. - As shown in FIG. 3B, a unit of the on-
board pathways 22 runs through lined burn-incontrollers 23. Each wire unit contains lines such as apower line 31, a ground (GND)line 32, a signal line 33, and agate line 34. Eachsemiconductor device 21 haspads - The switching
Tr pads power line 31, theGND line 32, and the signal line 33 respectively. Thepads semiconductor device 21. Those terminals will be used in practical use. - As shown in FIG. 3B, the
power line 31 is connected to one source/drain of the switchingTr 37 via adiode 35 and aresistance 36, while the other source/drain is connected to thepad 38. This pair of thediode 35 andresistance 36 functions as an anti-overcurrent device. That is, if thesemiconductor device 21 is broken during the screening, the corresponding anti-overcurrent device prevents an overcurrent from being applied toother semiconductor devices 21. - The
GND line 32 is connected to one source/drain of the switchingTr 39. The other source/drain of the switchingTr 39 is connected to thepad 40. - The signal line33 is connected to one source/drain of the switching
Tr 41. The other source/drain of the switchingTr 41 is connected to thepad 42. - Gates of the switching
Tr gate line 34 via a fuse 43, while being connected to the substrate of thesemiconductor device 21 viadiodes diodes Tr - The structure of the
wafer holder 12 will now be described. - FIGS. 4A, 4B and4C are diagrams showing the structure of the
wafer holder 12. FIG. 4A is a plan view showing thewafer holder 12, and FIG. 4B is a cross sectional view along a line B-B′ in FIG. 4A. FIG. 4C shows the structure of connection between thewafer holder 12 and the on-board pathways 22 on thewafer 16. - As shown in FIGS. 4A and 4B, the
wafer holder 12 comprises astage board 51, a chuck 52, avacuum outlet 53, aninterconnection ring 54, electrode chips 55,common pathways 56, apressure board 57, and fixer clasps 58. - The
stage board 51 comprises the chuck 52 and thevacuum outlet 53 which are prepared for fixing thewafer 16 on thestage board 51. That is, a vacuum pump (not shown) or the like vacuums out the air in the chuck 52 through thevacuum outlet 53, thus thewafer 16 is stuck to thestage board 51. - The
interconnection ring 54 comprises the electrode chips 55 and thecommon pathways 56. Theinterconnection ring 54 is placed on thestage board 51 after thewafer 16 is stuck on thestage board 51. The electrode chips 55 are arranged at inner side of theinterconnection ring 54 so as to contact ends of the on-board pathways 22 on thewafer 16. That is, positions of the electrode chips 55 when thewafer 16 is mounted on thewafer holder 12 substantially coincide with positions of ends of the on-board pathways 22. As shown in FIG. 4A, the electrode chips 55 are classified into two groups by the ends of the on-board pathways 22 being connected to, and the electrode chips 55 in the same group are connected to each other by thecommon pathways 56. Further, one of the electrode chips 55 in the group is connected to thebridge line 15. - The electrode chips55 are pressed upon the on-
board pathways 22 as theinterconnection ring 54 is pressed upon thestage board 51. More precisely, each of the electrode chips 55 hascontact electrodes 59, as shown in FIG. 4C, which contact the wires in the unit of the on-board pathways 22. That is, thecontact electrodes 59 are arranged at intervals which coincide with intervals of the wires. Each of thecontact electrodes 59 is connected to thebridge line 15 or thecommon pathways 56. Accordingly, electric connection between the on-board pathways 22 and thebridge lines 15 will be established when theinterconnection ring 54 is pressed upon thestage board 51. This structure realizes successful screening, because the connection between the on-board pathways 22 and the electrode chips 55 is established at the ends of the on-board pathways 22, thus, it is easy to see connection status. The number of wires in a unit of thecommon pathways 56 and a unit of the bridge lines 15 is the same as that of the wires in the unit of the on-board pathways 22. - The
pressure board 57 is placed on theinterconnection ring 54. The fixer clasps 58 tighten thepressure board 57 so that thepressure board 57 and thestage board 51 press theinterconnection ring 54, thus thecontact electrodes 59 contact the on-board pathways 22 completely. - Since the
semiconductor wafers 16 are mounted on thewafer holders 12 as described above, common terminals (pads) which have been employed in the conventional techniques are unnecessary. Moreover, complete connection between thebridge lines 15 and the on-board pathways 22 is established. Those features prevent connection failures caused by thermal expansion during the screening process from appearing, thus, successful screening is realized. Further, the above structures of thewafers 16 with thewafer holders 12 allow theisothermal chamber 11 to contain stackedmultiple wafers 16 as shown in FIG. 1. This feature realizes screening the mass ofsemiconductor devices 21 simultaneously in a small space. - Steps of screening the
semiconductor devices 21 on thesemiconductor wafers 16 by the above described burn-in apparatus will now be described. - First, pre-test for find out short circuit and the like of the
semiconductor devices 21 is carried out, by whichsemiconductor devices 21 having failures unsuitable for screening are eliminated. More precisely, the fuses 43 of such theunsuitable devices 21 are cut by laser beam or the like, thus they will not be screened. - And then, the
semiconductor wafers 16 are mounted on thewafer holders 12. In this step: thewafers 16 are placed on thestage boards 51 of thewafer holders 12; and sets of thestage board 51 and thepressure boards 57 are tightened by the fixer clasps 58. Thus, the electrode chips 55 contact the on-board pathways 22, and this contact electrically interconnects thebridge lines 15 and thesemiconductor devices 21 on thewafer 16. - The plurality of the
wafer holders 12 on each of which thewafer 16 is fixed are attached to theslot array 13. The bunch ofwafers 16 andwafer holders 12 are loaded into theisothermal chamber 11 through thegateway 17. - After the loading, the
controller 14 starts to elevate the temperature in theisothermal chamber 11 in accordance with a given program and the like, in response to an instruction given by an operator of the apparatus or the like. - When the temperature in the
isothermal chamber 11 reaches a predetermined level, thecontroller 14 activates the switchingTr controller 14 also provides thesemiconductor devices 21 with source voltages via thepower lines 31 in order to drive thesemiconductor devices 21. And then, thecontroller 14 provides thesemiconductor devices 21 with test pattern signals via the signal lines 33, thus, thesemiconductor devices 21 are screened. - After the screening, the bunch of the
wafer holders 12 is unloaded from theisothermal chamber 11 through thegateway 17. In the same manner, following bunches of thesemiconductor devices 21 are subjected to the screening one after another. Finally, thesemiconductor devices 21 which passed the screening are diced to be products. - As described above, the present invention prevents contact failures caused by thermal expansion, because the electrode chips55 of the
wafer holder 12 completely contact the on-board pathways 22 of thesemiconductor wafer 16. This feature realizes successful screening for thesemiconductor devices 21. Since the realized screening is so secure, only thesemiconductor devices 21 actually having rich reliability will pass the screening. Moreover, the present invention reduces the steps of the screening, because preparation of common terminals (pads) on thewafers 16 is unnecessary. Such the elimination is realized by the complete connection between the electrode chips 55 and the on-board pathways 22 featured in the present invention. - Furthermore, multiple stacked
semiconductor wafers 16 can be screened simultaneously, because the on-board pathways 22 are electrically connected to thebridge lines 15 via the electrode chips 55. That is, the present invention has an advantage over the conventional techniques because it realizes screening simultaneously the mass ofsemiconductor devices 21 in a small space. - A semiconductor wafer according to a second embodiment of the present invention will now be described with reference to accompanying drawings.
- A semiconductor wafer according to the second embodiment is similar to the
semiconductor wafer 16 described in the first embodiment. This embodiment features the structure of wafer edge which differs from thewafer 16 of the first embodiment. More precisely, intervals among the ends of the on-board pathways 22 at the edge of thewafer 16 of this embodiment are wider than intervals among them in the device zone of the wafer 16 (inner zone where the semiconductor devices are formed) as shown in FIG. 5. In other words, the ends of the wires of the on-board pathways 22 are scattered at the wafer edge. - The arrangement of the electrode chips55 of the
wafer holder 12 will be modified as the structure of thewafer 16 is modified. That is, the electrode chips 55 are arranged on theinterconnection ring 54 so as to contact the wires of the on-board pathways 22 respectively. In this case, the electrode chips 55 are grouped by ends of the on-board pathways 22 being connected to, and the electrode chips 55 in the same group are connected to each other by thecommon pathway 56. For example, the electrode chips 55 being connected to one ends of thepower lines 31 are connected to each other via onecommon pathway 56; and the electrode chips 55 being connected to one ends the signal lines 33 are connected to each other via anothercommon pathway 56. In the same manner, the electrode chips 55 being connected to the other ends of the on-board pathways 22 are connected to each other via their correspondingcommon pathway 56. - Other structures of the
wafer 16, and the structure of the burn-in apparatus are substantially the same as those described in the first embodiment. The steps of screening thesemiconductor devices 21 described in the first embodiment are also employed in this embodiment. - Aforementioned wide intervals among the ends of the on-
board pathways 22 at the wafer edge are helpful to form the electrode chips 55 so that the electrode chips 55 themselves coincide with the positions of the ends of the on-board pathways 22. In other words, each of the electrode chips 55 does not require its own minute contact elements (contact electrodes 59 in the first embodiment) to be respectively connected to the wires of the on-board pathways 22. As a result, precise mounting of thewafer 16 on thewafer holder 12 can be done without any difficulties in processing and adjusting. - The
wafer holders 12 described in the above embodiments may employ other structures which enable the electrode chips 55 to contact the on-board pathways 22. For example, thewafer holder 12 may have fixer clamps instead of thepressure board 57, which bind thestage board 51 and theinterconnection ring 54. Or, thewafer holder 12 may have clothespin-like clips which pinches thewafer 16 to hold it. In this case, one side of contact surface of the clip has the electrode chips 55. The clip has dual function of holding and connecting. That is, the clip can connect the electrode chips 55 to the on-board pathways 22 completely while holding thewafer 16. - Various embodiments and changes may be made thereunto without departing from the broad spirit and scope of the invention. The above-described embodiments are intended to illustrate the present invention, not to limit the scope of the present invention. The scope of the present invention is shown by the attached claims rather than the embodiments. Various modifications made within the meaning of an equivalent of the claims of the invention and within the claims are to be regarded to be in the scope of the present invention.
- This application is based on Japanese Patent Application No. H11-068250 filed on Mar. 15, 1999 and including specification, claims, drawings and summary. The disclosure of the above Japanese Patent Application is incorporated herein by reference in its entirety.
Claims (8)
1. A burn-in apparatus comprising:
a holder which holds plurality of semiconductor wafers each having an inner zone prepared for arranging thereon a plurality of semiconductor devices to be screened, and a peripheral edge zone around said inner zone, in order to install the plurality of semiconductor wafers in a room;
a thermal controller which controls temperature of the room so as to heat the plurality of said semiconductor wafers up to a predetermined temperature;
a signal generator which generates a test pattern signal for screening said semiconductor devices on the plurality of said semiconductor wafers which have been heated up to the predetermined temperature; and
interconnection members which electrically interconnects said signal generator and each of said semiconductor devices, in order to provide said semiconductor devices respectively with the signals generated by said signal generator.
2. The burn-in apparatus according to claim 1 , wherein said holder holds said semiconductor wafers each having a plurality of pathways which are formed across said inner and peripheral edge zones for supplying the test pattern signal to said semiconductor devices; and
each of said interconnection members has a plurality of electrodes being connected to said signal generator, and presses said electrodes so that said electrodes contact said pathways.
3. The burn-in apparatus according to claim 2 , wherein each of said interconnection members comprises;
a first board on which said semiconductor wafer is vacuum fixed; and
a second board which collaborates with said first board to provide said electrodes with pressure for making contact with said pathways.
4. The burn-in apparatus according to claim 3 , wherein the plurality of said electrodes are arranged so as to contact both ends of said pathways which are formed among lines of said matrix formed semiconductor devices on said semiconductor wafer.
5. The burn-in apparatus according to claim 4 , wherein the plurality of said electrodes are grouped by ends of said pathways being connected to, and said electrodes in the same group are connected to each other by wires while one of said electrodes in the group is connected to said signal generator.
6. A semiconductor wafer comprising:
a device zone which is prepared for forming semiconductor devices thereon, and a peripheral zone which is prepared around said device zone;
a plurality of semiconductor devices which are formed on said device zone to be subjected to screening; and
a plurality of wires which are formed across said device and peripheral zones in order to supply signals for screening respectively to the plurality of said semiconductor devices, wherein said wires are straight while being parallel to each other in said device zone.
7. The semiconductor wafer according to claim 6 , wherein said wires extend straightly from said device zone to said peripheral zone.
8. The semiconductor wafer according to claim 6 , wherein said wires are formed so that intervals among ends of the wires on said peripheral zone are wider than intervals among said wires on said device zone.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/212,786 US20020186032A1 (en) | 1999-03-15 | 2002-08-07 | Burn-in apparatus and semiconductor wafer |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11-068250 | 1999-03-15 | ||
JP11068250A JP2000269278A (en) | 1999-03-15 | 1999-03-15 | Burn-in device and semiconductor wafer |
US09/525,766 US6459285B1 (en) | 1999-03-15 | 2000-03-14 | Burn-in apparatus for screening plurality of semiconductor devices |
US10/212,786 US20020186032A1 (en) | 1999-03-15 | 2002-08-07 | Burn-in apparatus and semiconductor wafer |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/525,766 Division US6459285B1 (en) | 1999-03-15 | 2000-03-14 | Burn-in apparatus for screening plurality of semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
US20020186032A1 true US20020186032A1 (en) | 2002-12-12 |
Family
ID=13368337
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/525,766 Expired - Lifetime US6459285B1 (en) | 1999-03-15 | 2000-03-14 | Burn-in apparatus for screening plurality of semiconductor devices |
US10/212,786 Abandoned US20020186032A1 (en) | 1999-03-15 | 2002-08-07 | Burn-in apparatus and semiconductor wafer |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/525,766 Expired - Lifetime US6459285B1 (en) | 1999-03-15 | 2000-03-14 | Burn-in apparatus for screening plurality of semiconductor devices |
Country Status (2)
Country | Link |
---|---|
US (2) | US6459285B1 (en) |
JP (1) | JP2000269278A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8519733B2 (en) | 2010-07-15 | 2013-08-27 | Mitsubishi Electric Corporation | Method of measuring characteristics of a semiconductor element and method of manufacturing a semiconductor device |
US10101382B2 (en) * | 2016-12-30 | 2018-10-16 | Texas Instruments Incorporated | Systems and methods for dynamic Rdson measurement |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4173306B2 (en) * | 2001-11-30 | 2008-10-29 | 東京エレクトロン株式会社 | Reliability evaluation test apparatus, reliability evaluation test system, and reliability evaluation test method |
JP4001555B2 (en) * | 2003-02-04 | 2007-10-31 | 沖電気工業株式会社 | Wafer handling checker |
US7372287B2 (en) * | 2004-03-12 | 2008-05-13 | Advantest Corporation | Semiconductor device testing apparatus and device interface board |
KR100636502B1 (en) * | 2005-08-31 | 2006-10-18 | 삼성에스디아이 주식회사 | Organic electro luminescence display for performing sheet unit test and testing method using the same |
WO2009107741A1 (en) | 2008-02-28 | 2009-09-03 | 日本電気株式会社 | Semiconductor inspection apparatus, semiconductor wafer positioning method, and semiconductor wafer inspection method |
DE112021007216T5 (en) * | 2021-03-08 | 2024-01-11 | Kioxia Corporation | wafer and probe |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5327074A (en) * | 1990-12-19 | 1994-07-05 | Sharp Kabushiki Kaisha | Integrated circuit device |
US6411116B1 (en) * | 1994-08-31 | 2002-06-25 | Motorola, Inc. | Method for testing a product integrated circuit wafer using a stimulus integrated circuit wafer |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63124443A (en) | 1986-11-13 | 1988-05-27 | Mitsubishi Electric Corp | Semiconductor device |
US4968931A (en) * | 1989-11-03 | 1990-11-06 | Motorola, Inc. | Apparatus and method for burning in integrated circuit wafers |
JPH05121502A (en) | 1991-10-25 | 1993-05-18 | Matsushita Electron Corp | Semiconductor substrate device and method for inspecting semiconductor device |
JPH065677A (en) | 1992-06-18 | 1994-01-14 | Nec Corp | Semiconductor device |
US5399505A (en) * | 1993-07-23 | 1995-03-21 | Motorola, Inc. | Method and apparatus for performing wafer level testing of integrated circuit dice |
US5898186A (en) * | 1996-09-13 | 1999-04-27 | Micron Technology, Inc. | Reduced terminal testing system |
US5766979A (en) | 1996-11-08 | 1998-06-16 | W. L. Gore & Associates, Inc. | Wafer level contact sheet and method of assembly |
-
1999
- 1999-03-15 JP JP11068250A patent/JP2000269278A/en active Pending
-
2000
- 2000-03-14 US US09/525,766 patent/US6459285B1/en not_active Expired - Lifetime
-
2002
- 2002-08-07 US US10/212,786 patent/US20020186032A1/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5327074A (en) * | 1990-12-19 | 1994-07-05 | Sharp Kabushiki Kaisha | Integrated circuit device |
US6411116B1 (en) * | 1994-08-31 | 2002-06-25 | Motorola, Inc. | Method for testing a product integrated circuit wafer using a stimulus integrated circuit wafer |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8519733B2 (en) | 2010-07-15 | 2013-08-27 | Mitsubishi Electric Corporation | Method of measuring characteristics of a semiconductor element and method of manufacturing a semiconductor device |
DE102011077778B4 (en) * | 2010-07-15 | 2017-08-10 | Mitsubishi Electric Corp. | A method of measuring the characteristics of a semiconductor element and a method of manufacturing a semiconductor device |
US10101382B2 (en) * | 2016-12-30 | 2018-10-16 | Texas Instruments Incorporated | Systems and methods for dynamic Rdson measurement |
US10571511B2 (en) | 2016-12-30 | 2020-02-25 | Texas Instruments Incorporated | Systems and methods for dynamic Rdson measurement |
Also Published As
Publication number | Publication date |
---|---|
US6459285B1 (en) | 2002-10-01 |
JP2000269278A (en) | 2000-09-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5798652A (en) | Method of batch testing surface mount devices using a substrate edge connector | |
US5923181A (en) | Methods and apparatus for burn-in stressing and simultaneous testing of semiconductor device chips in a multichip module | |
JP2837829B2 (en) | Inspection method for semiconductor device | |
US5605844A (en) | Inspecting method for semiconductor devices | |
US5990692A (en) | Testing apparatus for non-packaged semiconductor chip | |
KR100354599B1 (en) | Structures for wafer level test and burn-in | |
US7659738B2 (en) | Test sockets having peltier elements, test equipment including the same and methods of testing semiconductor packages using the same | |
KR100294396B1 (en) | Semiconductor wafer inspection method with improved probe pin contact | |
US6383825B1 (en) | Method and system for testing semiconductor dice, semiconductor packages and semiconductor wafers | |
JP2812627B2 (en) | Tape carrier, semiconductor device test method and apparatus | |
JPH0389528A (en) | Burn-in test for wafer level of integrated circuit | |
JPH07221146A (en) | Nondestructive interconnected system for semiconductor device | |
US6459285B1 (en) | Burn-in apparatus for screening plurality of semiconductor devices | |
US5696404A (en) | Semiconductor wafers with device protection means and with interconnect lines on scribing lines | |
EP0414378B1 (en) | An adapter for integrated circuit elements and a method using the adapter for testing assembled elements | |
JP3443947B2 (en) | Burn-in dedicated wafer and burn-in method using the same | |
JP2545648B2 (en) | Prober | |
US6885203B1 (en) | Wafer level burn-in using light as the stimulating signal | |
JPH04262551A (en) | Wafer testing method and semiconductor device tested thereby | |
JP3208095B2 (en) | Inspection equipment for semiconductor devices | |
KR20030094790A (en) | Test tool of electrical die sorting apparatus for manufacturing semiconductor device | |
JPH03171749A (en) | Probe card and semiconductor testing device | |
JPS62221126A (en) | Testing method for semiconductor device | |
WO1982001803A1 (en) | Multiple terminal two conductor layer burn-in tape | |
JP3674052B2 (en) | IC wafer and burn-in method using the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: NEC ELECTRONICS CORPORATION, JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:NEC CORPORATION;REEL/FRAME:013758/0595 Effective date: 20030110 |
|
AS | Assignment |
Owner name: ELPIDA MEMORY, INC., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:NEC CORPORATION;NEC ELECTRONICS CORPORATION;REEL/FRAME:014980/0577 Effective date: 20040426 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |