US20020124575A1 - Gas delivery at high flow rates - Google Patents

Gas delivery at high flow rates Download PDF

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Publication number
US20020124575A1
US20020124575A1 US09/755,590 US75559001A US2002124575A1 US 20020124575 A1 US20020124575 A1 US 20020124575A1 US 75559001 A US75559001 A US 75559001A US 2002124575 A1 US2002124575 A1 US 2002124575A1
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United States
Prior art keywords
storage vessel
gas
heating means
compressed gas
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
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US09/755,590
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English (en)
Inventor
Atul Pant
Melvyn Richardson
Mike Leshner
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Individual
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Individual
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Application filed by Individual filed Critical Individual
Priority to US09/755,590 priority Critical patent/US20020124575A1/en
Priority to AU2001297824A priority patent/AU2001297824A1/en
Priority to CA002433901A priority patent/CA2433901A1/en
Priority to PCT/US2001/051618 priority patent/WO2002095797A2/en
Priority to JP2002592163A priority patent/JP2004527712A/ja
Priority to EP11173062A priority patent/EP2375122A3/de
Priority to CNB018229700A priority patent/CN1330902C/zh
Priority to KR1020037009036A priority patent/KR100796841B1/ko
Priority to EP01273948.8A priority patent/EP1354165B1/de
Priority to TW091100031A priority patent/TW535196B/zh
Priority to US10/217,672 priority patent/US6581412B2/en
Publication of US20020124575A1 publication Critical patent/US20020124575A1/en
Abandoned legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/026—Special adaptations of indicating, measuring, or monitoring equipment having the temperature as the parameter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/05—Ultrapure fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/04—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by other properties of handled fluid before transfer
    • F17C2223/042—Localisation of the removal point
    • F17C2223/043—Localisation of the removal point in the gas
    • F17C2223/045—Localisation of the removal point in the gas with a dip tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0367—Localisation of heat exchange
    • F17C2227/0369—Localisation of heat exchange in or on a vessel
    • F17C2227/0376—Localisation of heat exchange in or on a vessel in wall contact
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0367—Localisation of heat exchange
    • F17C2227/0369—Localisation of heat exchange in or on a vessel
    • F17C2227/0376—Localisation of heat exchange in or on a vessel in wall contact
    • F17C2227/0383—Localisation of heat exchange in or on a vessel in wall contact outside the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0367—Localisation of heat exchange
    • F17C2227/0369—Localisation of heat exchange in or on a vessel
    • F17C2227/0376—Localisation of heat exchange in or on a vessel in wall contact
    • F17C2227/0383—Localisation of heat exchange in or on a vessel in wall contact outside the vessel
    • F17C2227/0386—Localisation of heat exchange in or on a vessel in wall contact outside the vessel with a jacket
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/03—Control means
    • F17C2250/032—Control means using computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0439—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0626—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0631—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/02—Improving properties related to fluid or fluid transfer
    • F17C2260/025—Reducing transfer time
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage

Definitions

  • This invention is related to the delivery of gases at high flow rates, and more specifically, this invention is related to a method and system for delivering high purity semiconductor gases at high flow rates.
  • U.S. Pat. No. 6,122,931 discloses a system that transports liquefied gas from a storage vessel to a distillation column and uses the distillate to deliver ultra-high purity vapor to the point of use. Additional processing steps are involved using liquefied gas.
  • FIG. 1 provides a schematic representation of heat transfer across the vessel walls in this invention
  • FIG. 2 provides a typical boiling curve for a liquid
  • Using hot water bath can significantly reduce external heat transfer resistance as shown in Table 1.
  • the resistance to heat transfer will depend on the contact between the jacket and the vessel.
  • the presence of air gaps between the jacket and the vessel will reduce heat transfer since air acts as an insulator.
  • a higher heating jacket temperature can compensate for a poor contact between the heater and the vessel. Placing a thermally conductive fluid between the heater and the vessel can also enhance the heat transfer.
  • the maximum heat flux that can be transferred to liquid ammonia during nucleate boiling is 1.5 ⁇ 10 3 kWm ⁇ 2 .
  • This heat flux corresponds to the point of maximum between the nucleate and vapor film boiling regime on the boiling curve shown in FIG. 2.
  • the maximum heat flux is calculated using a correlation taken from “Heat and Mass Transfer”, Chapter 5, Perry's Chemical Engineers Handbook, 7 th Ed., McGraw-Hill, 1999. Using the heat transfer correlation for nucleate boiling, it can be further shown that the temperature difference between the vessel wall (Tw in ) and the bulk liquid (T L ) at this point of maximum heat flux is ⁇ 20° C. for ammonia.
  • a pressure set point is entered in the universal controller.
  • the heaters are turned off when the pressure set point is reached and turned back on when pressure falls below the set point. The pressure will fall due to vapor withdrawal.
  • a heater temperature set point is entered into each process controller to put an upper limit to the heater temperature.
  • An over temperature condition sends a signal to the universal controller through the control box, which shuts the heaters off.
  • the heater process controllers will provide a signal to the universal controller in the event of heater burn out or failure, which will initiate an alarm, shut off power to the heaters and initiate an auto switchover to the standby unit.
  • Molecular sieve bed or other separation unit operation like distillation at the exit may be used to reduce impurities like moisture in the vapor phase, thus, delivering ultra high purity gas to the point of use.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
US09/755,590 2001-01-05 2001-01-05 Gas delivery at high flow rates Abandoned US20020124575A1 (en)

Priority Applications (11)

Application Number Priority Date Filing Date Title
US09/755,590 US20020124575A1 (en) 2001-01-05 2001-01-05 Gas delivery at high flow rates
AU2001297824A AU2001297824A1 (en) 2001-01-05 2001-12-19 Gas delivery at high flow rates
CA002433901A CA2433901A1 (en) 2001-01-05 2001-12-19 Gas delivery at high flow rates
PCT/US2001/051618 WO2002095797A2 (en) 2001-01-05 2001-12-19 Gas delivery at high flow rates
JP2002592163A JP2004527712A (ja) 2001-01-05 2001-12-19 高流量でのガス送出
EP11173062A EP2375122A3 (de) 2001-01-05 2001-12-19 Gaszuführung mit hohen Durchflussraten
CNB018229700A CN1330902C (zh) 2001-01-05 2001-12-19 高流率的气体输送
KR1020037009036A KR100796841B1 (ko) 2001-01-05 2001-12-19 높은 유속으로 기체를 수송하는 방법
EP01273948.8A EP1354165B1 (de) 2001-01-05 2001-12-19 Gasablieferung mit hohen strömungsgeschwindigkeiten
TW091100031A TW535196B (en) 2001-01-05 2002-01-03 Gas delivery at high flow rates
US10/217,672 US6581412B2 (en) 2001-01-05 2002-08-13 Gas delivery at high flow rates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/755,590 US20020124575A1 (en) 2001-01-05 2001-01-05 Gas delivery at high flow rates

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/217,672 Continuation US6581412B2 (en) 2001-01-05 2002-08-13 Gas delivery at high flow rates

Publications (1)

Publication Number Publication Date
US20020124575A1 true US20020124575A1 (en) 2002-09-12

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ID=25039787

Family Applications (2)

Application Number Title Priority Date Filing Date
US09/755,590 Abandoned US20020124575A1 (en) 2001-01-05 2001-01-05 Gas delivery at high flow rates
US10/217,672 Expired - Lifetime US6581412B2 (en) 2001-01-05 2002-08-13 Gas delivery at high flow rates

Family Applications After (1)

Application Number Title Priority Date Filing Date
US10/217,672 Expired - Lifetime US6581412B2 (en) 2001-01-05 2002-08-13 Gas delivery at high flow rates

Country Status (9)

Country Link
US (2) US20020124575A1 (de)
EP (2) EP2375122A3 (de)
JP (1) JP2004527712A (de)
KR (1) KR100796841B1 (de)
CN (1) CN1330902C (de)
AU (1) AU2001297824A1 (de)
CA (1) CA2433901A1 (de)
TW (1) TW535196B (de)
WO (1) WO2002095797A2 (de)

Cited By (19)

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EP1298381A2 (de) * 2001-09-28 2003-04-02 Air Products And Chemicals, Inc. Transportierbare Anlage zur Abgabe von hochreinen Gasen mit hohem Durchfluss
FR2897413A1 (fr) * 2006-02-16 2007-08-17 Air Liquide Recipient de conditionnement d'acetylene a dispositif de rechauffage externe
US20070214805A1 (en) * 2006-03-15 2007-09-20 Macmillan Adrian Armstrong Onboard Regasification of LNG Using Ambient Air
US20070214804A1 (en) * 2006-03-15 2007-09-20 Robert John Hannan Onboard Regasification of LNG
US20070214806A1 (en) * 2006-03-15 2007-09-20 Solomon Aladja Faka Continuous Regasification of LNG Using Ambient Air
US20080282709A1 (en) * 2007-05-17 2008-11-20 Nec Electronics Corporation Liquified gas supply system and method thereof
US20090193780A1 (en) * 2006-09-11 2009-08-06 Woodside Energy Limited Power Generation System for a Marine Vessel
FR2927146A1 (fr) * 2008-02-06 2009-08-07 Air Liquide Systeme de chauffage de stockages des gaz liquefies sous pression
WO2009158203A1 (en) * 2008-06-27 2009-12-30 Praxair Technology, Inc. Enhanced energy delivery mechanism for bulk specialty gas supply systems
KR100937155B1 (ko) 2009-03-12 2010-01-15 우주쎄미텍 주식회사 액화가스 공급장치 가열히터
US20110030391A1 (en) * 2009-08-06 2011-02-10 Woodside Energy Limited Mechanical Defrosting During Continuous Regasification of a Cryogenic Fluid Using Ambient Air
WO2011115002A1 (ja) * 2010-03-15 2011-09-22 昭和電工株式会社 液化ガスの供給方法
WO2011159887A1 (en) * 2010-06-16 2011-12-22 Algas-Sdi International Llc Heater for liquefied petroleum gas storage tank
US20160327309A1 (en) * 2015-05-07 2016-11-10 Qmax Catalytic, Llc Internal tank heating coil
US10018305B2 (en) 2013-01-25 2018-07-10 Algas-Sdi International Llc Heater with replaceable cartridge
US10539361B2 (en) 2012-08-22 2020-01-21 Woodside Energy Technologies Pty Ltd. Modular LNG production facility
US20200208783A1 (en) * 2017-06-15 2020-07-02 Versum Materials Us, Llc Gas supply system
US11427907B2 (en) * 2016-07-20 2022-08-30 Showa Denko K.K. Gas supply apparatus and gas supply method
CN116182937A (zh) * 2022-12-14 2023-05-30 中国科学院空间应用工程与技术中心 一种用于研究空间池沸腾现象的实验装置

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US7287980B2 (en) * 2005-06-30 2007-10-30 Air Liquide Electronics U.S. Lp Ton unit heating saddle
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WO2002095797A2 (en) 2002-11-28
AU2001297824A1 (en) 2002-12-03
CA2433901A1 (en) 2002-11-28
EP2375122A2 (de) 2011-10-12
KR20030091956A (ko) 2003-12-03
CN1620575A (zh) 2005-05-25
CN1330902C (zh) 2007-08-08
WO2002095797A3 (en) 2003-08-28
EP1354165B1 (de) 2016-09-21
TW535196B (en) 2003-06-01

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