US20010002593A1 - Method and apparatus for cleaning the edge of a thin disc - Google Patents
Method and apparatus for cleaning the edge of a thin disc Download PDFInfo
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- US20010002593A1 US20010002593A1 US09/738,797 US73879700A US2001002593A1 US 20010002593 A1 US20010002593 A1 US 20010002593A1 US 73879700 A US73879700 A US 73879700A US 2001002593 A1 US2001002593 A1 US 2001002593A1
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- edge
- thin disc
- cleaning
- major surface
- sonic nozzle
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Definitions
- the present invention relates generally to apparatuses and methods for cleaning thin discs, such as semiconductor wafers, compact discs, glass substrates and the like. More particularly, the invention relates to cleaning the edges of a thin disc.
- a thin disc such as a semiconductor wafer
- an elongated billet of semiconductor material is cut into very thin slices, about 3 ⁇ 4 mm in thickness.
- the slices or wafers of semiconductor material are then lapped and polished by a process that applies an abrasive slurry to the semiconductor wafer's surfaces.
- a similar polishing step is performed to planarize dielectric or metal films during subsequent device processing on the semiconductor wafer.
- slurry residue After polishing, be it during wafer or device processing, slurry residue conventionally is cleaned from wafer surfaces via submersion in a tank of sonically energized cleaning fluid, via spraying with sonically energized cleaning or rinsing fluid, or via a scrubbing device which employs polyvinyl acetate (PVA) brushes, brushes made from other porous or sponge-like material, or brushes made from nylon bristles or similar materials.
- PVA polyvinyl acetate
- a conventional PVA brush scrubber disclosed in U.S. Pat. No. 5,675,856 is shown in the side elevational view of FIG. 1.
- the conventional scrubber 11 shown in FIG. 1, comprises a pair of PVA brushes 13 a, 13 b. Each brush comprises a plurality of raised nodules 15 across the surface thereof, and a plurality of valleys 17 located among the nodules 15 .
- the scrubber 11 also comprises a platform 19 for supporting a wafer W and a mechanism (not shown) for rotating the pair of PVA brushes 13 a, 13 b.
- the platform 19 comprises a plurality of spinning mechanisms 19 a - c for spinning the wafer W.
- a fluid supply mechanism F such as a plurality of spray nozzles, supplies fluid to both major surfaces of the wafer, flushing dislodged particles and cleaning residue from the major surface of the wafer and rinsing brushes.
- the pair of PVA brushes 13 a, 13 b are positioned to extend beyond the edge of the wafer W, so as to facilitate cleaning the wafer's edges.
- slurry induced defects still occur, and are caused by slurry residue remaining along the edges of the wafer despite cleaning with apparatuses such as that described above.
- subsequent processing has been found to redistribute slurry residue from the wafer edges to the front of the wafer, causing defects. The same is believed to be true of all major surface cleaners, and scrubbers.
- FIG. 2 is a side elevational view of an exemplary sonic nozzle cleaning device 23 that includes a sonic nozzle 25 having an input port 25 a, an output port 25 b, and a vibrator 27 coupled to a generator 29 that drives the vibrator 27 .
- a cleaning solution e.g., deionized water or another similar cleaning solution such as NH 4 OH, KOH, TMAH, HF, citric acid or a surfactant
- pressure e.g. 15 p.s.i.
- the cleaning solution travels through the nozzle 25 , passes under the vibrator 27 and travels through the output port 25 b.
- the major surface of an object to be cleaned e.g., a major surface 31 a of a semiconductor wafer 31 ).
- the vibrator 27 vibrates at a sonic rate (e.g., ultrasonic at a frequency in the hundreds of kHz or megasonic at a frequency in the thousands of kHz) set by the generator 29 .
- a sonic rate e.g., ultrasonic at a frequency in the hundreds of kHz or megasonic at a frequency in the thousands of kHz
- the longitudinal pressure waves 33 travel to, strike and impart energy to the major surface 31 a of the semiconductor wafer 31 approximately every 0.1 to 10 microseconds, depending on the particular frequency of the generator 29 , thereby removing slurry residue and other particles from the major surface 31 a of the wafer 31 .
- the entire major surface 31 a of the wafer 31 is cleaned by scanning the nozzle 25 across the wafer 31 while rotating the wafer 31 with a rotating mechanism 34 . Slurry residue and other particles on the edges of the wafer 31 , however, are not effectively cleaned by the jets of cleaning solution employed by this type of cleaning apparatus.
- FIG. 3 A number of devices have been developed to improve wafer edge cleaning.
- This mechanism employs a separate edge brush 21 , which is driven by a separate motor (not shown), that causes the edge brush 21 to rotate.
- the edge brush 21 fits over the edge of the wafer W as shown in FIG. 3, providing more effective wafer edge cleaning.
- the edge brush 21 addresses the need to clean slurry residue from wafer edges, it does so at the expense of increased scrubber complexity and cost, and the requirement of frequent edge brush replacement because of excessive mechanical wear.
- the field of wafer cleaning requires a method and apparatus which effectively cleans both the major surfaces and the edge surfaces of a semiconductor wafer, and that does so without increased cost and complexity.
- the semiconductor processing field needs an effective edge cleaner that satisfies the ever-present demand for reduced cost per unit wafer processed.
- the present invention addresses the need for an effective edge cleaner by providing a dedicated sonic nozzle specifically positioned to clean the edge surface of a thin disc such as a semiconductor wafer.
- a sonic nozzle e.g., ultrasonic, megasonic, etc.
- a jet of liquid e.g., de-ionized water, NH 4 OH, KOH, TMAH, HF, citric acid or a surfactant
- a jet of liquid e.g., de-ionized water, NH 4 OH, KOH, TMAH, HF, citric acid or a surfactant
- the sonic nozzle preferably is radially spaced from the edge of the thin disc and the liquid jet preferably is directed approximately 30° to 150° from a tangent to the edge of the thin disc and approximately 135° to 225° from a major surface of the thin disc (see FIGS. 4 A-C). In this position the liquid jet impacts the edge of the thin disc, and any beveled portions thereof, with the greatest energy. Moreover the time the thin disc's edge is exposed to sonic energy (i.e., the edge cleaning duty cycle) is significantly increased, providing superior edge cleaning.
- the invention's edge nozzle may replace the fluid supply mechanisms conventionally required to rinse particles from a thin disc's major surfaces, and/or to prevent thin discs such as semiconductor wafers from drying during cleaning (as drying may leave undesirable streaks and/or particles on wafer surfaces).
- the present invention cleans thin disc edges with minimal additional parts and with minimal additional cleaning fluid.
- the inventive edge nozzle lasts longer than mechanical edge scrubbers, thereby reducing or eliminating replacement and maintenance costs.
- the thin disc is scanned relative to the inventive edge nozzle. That is, either the thin disc is rotated while the inventive edge nozzle remains stationary, the inventive edge nozzle is scanned around the edge of the thin disc as the thin disc remains stationary, or a combination thereof.
- the inventive edge nozzle is dedicated to edge cleaning, the nozzle may be radially spaced from the thin disc being cleaned, and therefore may be positioned so as not to obstruct or to be obstructed by a conventional major surface cleaner simultaneously employed therewith.
- the inventive edge nozzle thereby facilitates simultaneous use of a conventional major surface cleaner such as a brush scrubber, spin rinser (i.e., a non-scrubbing-based major surface cleaner that employs de-ionized water only), spin cleaner (i.e., a non-scrubbing-based major surface cleaner that employs a cleaning liquid such as de-ionized water and a surfactant) and even megasonic tank cleaners which clean wafers by rotating a wafer which is partially submerged in a tank of megasonically energized cleaning fluid.
- a conventional major surface cleaner such as a brush scrubber, spin rinser (i.e., a non-scrubbing-based major surface cleaner that employs de-ionized water only), spin cleaner (i.e., a non-scrubbing-based major surface cleaner that employs a cleaning liquid such as de-ionized water and a surfactant) and even megasonic tank cleaners which clean wafers by rotating a wafer which is partially submerged in
- FIG. 1 is a schematic side elevational view of a conventional wafer scrubbing device, as previously described;
- FIG. 2 is a schematic side elevational view of a conventional sonic nozzle cleaning device, as previously described;
- FIG. 3 is a schematic side elevational view of a conventional wafer scrubbing device which employs a conventional edge cleaner, as previously described;
- FIG. 4A is a schematic side elevational view of the inventive edge nozzle during wafer edge cleaning
- FIGS. 4B and 4C are a top and a side elevational view, respectively, of the inventive edge nozzle positioned relative to a wafer;
- FIG. 5 is a schematic side elevational view of the inventive edge nozzle during simultaneous wafer edge and wafer major surface cleaning
- FIG. 6 is a side elevational view of the spin cleaner of FIG. 3 employing the inventive edge nozzle.
- FIG. 7 is a side elevational view of a megasonic tank cleaner employing the inventive edge nozzle.
- FIG. 4A is a side elevational view of an inventive thin disc edge cleaner 33 .
- the edge cleaner 33 comprises an inventive edge nozzle 35 radially spaced from an edge of a thin disc to be cleaned (e.g., an edge E (FIG. 4C) of a wafer W), and a plurality of rotating wheels 37 a - c that support the wafer W via grooves such as groove 41 shown in the wheel 37 c.
- Each groove 41 has a sidewall angle (e.g., of 45°) so that only the very edge of the wafer W contacts the rotating wheels 37 a - c.
- the sonic edge nozzle 35 is radially spaced a distance x from the wafer W and emits a liquid jet 45 at an angle ⁇ from a tangent 43 to the wafer W, and at an angle ⁇ from either major surface W 1 or W 2 of the wafer W whereby the liquid jet 45 strikes the edge E of the wafer W (rather than either major surface W 1 or W 2 ).
- FIGS. 4B and 4C are top and side views, respectively, of the edge nozzle 35 positioned relative to the wafer W. Specifically, FIGS.
- FIG. 4B and 4C show the distance x as measured from the edge E of the wafer W, the angle ⁇ as measured from the tangent 43 to the wafer W and the angle ⁇ as measured from the major surface W 1 of the wafer W. Also shown in FIG. 4C are a first bevel B 1 and a second bevel B 2 on the edge E of the wafer W.
- the angle ⁇ preferably is selected such that the center of the liquid jet 45 , the portion of the jet that has the highest sonic power density, strikes the center of the edge E.
- the angle ⁇ may be selected to enhance cleaning of either beveled surface B 1 or B 2 .
- the distance x preferably is selected to allow edge cleaning via the inventive edge nozzle 35 simultaneously with the cleaning of major surface W 1 and/or major surface W 2 via a conventional brush scrubber, spin rinser, spin cleaner or any other similar cleaning mechanism which leaves the edge region of the wafer exposed so that spray from the inventive edge nozzle 35 may contact the wafer's edge, as described below.
- a cleaning solution such as deionized water, NH 4 OH, KOH, TMAH, HF, citric acid, a surfactant, etc.
- a cleaning solution such as deionized water, NH 4 OH, KOH, TMAH, HF, citric acid, a surfactant, etc.
- the cleaning solution travels under a vibrator (not shown) and leaves the nozzle 35 , forming the liquid jet 45 . Thereafter, because of the positioning of the inventive edge nozzle 35 , the liquid jet 45 strikes the edge E of the wafer W.
- the vibrator (not shown) of the inventive edge nozzle 35 vibrates at a sonic rate, preferably megasonic, so as to induce longitudinal pressure waves in the liquid jet 45 .
- the longitudinal pressure waves travel to, strike and impart energy to the edge E of the wafer W approximately every 0.1 to 1 microseconds, depending on the particular frequency at which the vibrator vibrates.
- the longitudinal pressure waves also strike, impart energy to, and thereby remove slurry residue and other particles from the edge E of the wafer W. Because the liquid jet 45 is directed at the edge E of the wafer W, it effectively removes slurry residue and other particles from the edge E of the wafer W.
- the edge nozzle 35 is preferably positioned such that the distance x is in the range of 1 to 50 mm, ⁇ is in the range of 30° to 150°, or, more preferably 45° to 135°, and ⁇ is in the range of 135° to 225°, or, more preferably 150° to 210°, or, more preferably 170° to 190°. Most preferably ⁇ is 45° and ⁇ is 180°, and the distance x is selected to optimize transmitted power from the liquid jet 45 to the wafer edge E based on the specific sonic frequency and flow rate of the liquid jet 45 , as will be apparent to those of ordinary skill in the art. For conventional sonic frequencies and flow rates a distance x in the range of 7 to 20 mm is preferred.
- the wafer W is rotated by the rotating wheels 37 a - c. Any conventional rotating mechanisms such as an electric motor may be used to rotate the wheels 37 a - c. After one complete rotation of the wafer W, the entire circumference of the wafer W is cleaned.
- the nozzle 35 alternatively, may be scanned about the wafer W as the wafer W is either rotated or held stationary.
- the liquid jet 45 emitted by the inventive edge nozzle 35 may be used to prevent the wafer W from drying, particularly when the nozzle 35 is positioned along the elevated region of a vertically oriented wafer, as shown in FIG. 7.
- FIG. 5 is a side perspective view of a scrubbing device 47 that employs the inventive edge cleaning device 33 of FIG. 4A, and is useful in describing the advantages provided by the present invention.
- the inventive scrubbing device 47 comprises a platform 49 for supporting a wafer W to be cleaned.
- a first brush 51 a and a second brush 51 b are operatively coupled to the platform 49 so as to contact both the major surfaces W 1 and W 2 of the wafer W, respectively.
- a conventional spinning mechanism such as a motor, represented generally by reference number 53 , is operatively coupled to the first and second brushes 51 a, 51 b so as to selectively spin the first and second brushes 51 a, 51 b as described below.
- a rotating mechanism is operatively coupled to the platform 49 so as to rotate the wafer W positioned thereon.
- the platform 49 comprises a plurality of rotating wheels 55 a - c, similar to the rotating wheels 37 a - c of FIG. 4A, for both supporting and rotating the wafer W.
- each rotating wheel 55 a - c has a central notch or groove 57 , having a sidewall angle (e.g., of 45°) such that only the very edge of the wafer W contacts the rotating wheels 55 a - c.
- the notches thus prevent damage to the front or back wafer surfaces which may otherwise occur.
- the first and second brushes 51 a, 51 b are initially in an open position (not shown), a sufficient distance from each other so as to allow a wafer to be inserted therebetween. Thereafter, the wafer W to be cleaned is positioned between the first and second brushes 51 a, 51 b and the brushes assume a closed position (FIG. 5), sufficiently close to each other so as to both hold the wafer W in place therebetween and to exert a force on the wafer surfaces sufficient to achieve effective cleaning.
- Mechanisms (not shown) for moving the brushes 51 a, 51 b between the open and closed positions are well known in the art and are therefore not further described herein.
- the spinning mechanism 53 is engaged and the first and second brushes 51 a, 51 b begin to spin.
- the brushes 51 a, 51 b spin in opposite directions, as indicated by arrows S 1 and S 2 in FIG. 5, applying forces to the wafer W in a first direction (e.g., downward) while the wafer W rotates either clockwise or counterclockwise. This drives the wafer into the rotating wheels 55 a - c, so that the wafer W remains captured thereby.
- the inventive edge nozzle 35 sprays the liquid jet 45 at the edge E of the wafer W, effectively cleaning slurry residue from the edge E, as previously described with reference to FIG. 4A.
- the inventive edge nozzle 35 preferably is radially spaced from the surface of the wafer W, the inventive nozzle may be used with any conventional surface cleaner, without obstructing the major surface cleaner's access to the wafer's major surfaces and without being obstructed from the wafer's edge surface by the major surface cleaning mechanism.
- slurry residue and other particles are removed from a wafer's edge more economically and more reliably than previous methods, reducing the cost per wafer unit processed.
- FIG. 6 shows the inventive edge nozzle 35 employed with the conventional spin cleaner of FIG. 2
- FIG. 7 shows the inventive edge nozzle 35 employed with a megasonic tank cleaner such as that disclosed in U.S. patent Ser. No. 09/191,060 (AMAT No. 2431/CMP/RKK) titled IMPROVED MEGASONIC CLEANER, filed on even date herewith, the disclosure of which is incorporated herein by this reference.
- the nozzle 25 is shown cleaning the major surface 31 a of the wafer 31 .
- the nozzle 25 is scanned across the major surface 31 a as the wafer 31 is rotated via the rotating mechanism 34 .
- the edge nozzle 35 preferably is positioned a distance x from the wafer 31 so that the liquid jet 45 strikes the edge E of the wafer 31 within the angle ranges previously described. Accordingly, as the wafer 31 is rotated by the rotating mechanism 34 , the inventive edge nozzle 35 cleans slurry residue and other particles from the edge E of the wafer 31 simultaneous with the cleaning of the major surface 31 a via the nozzle 25 .
- the inventive edge cleaning method therefore, takes advantage of the wafer rotation already required to clean the major surface 31 a of the wafer 31 , eliminating the need for additional rotating mechanisms.
- an inventive edge cleaner 63 that comprises in pertinent part, a tank 65 for partially submerging the wafer W in a cleaning solution 65 a, wafer support and rotating mechanisms 67 a, 67 b, sonic transducers 69 a, 69 b, an overflow weir 71 , a pump 73 and a filter 75 .
- the inventive edge nozzle 35 is operatively coupled to the wafer support and rotating mechanisms 67 a, 67 b so as to spray the liquid jet 45 at the unsubmerged edge of the wafer W as the wafer W is rotated.
- the sonic transducers 69 a, 69 b direct sonic energy in the form of longitudinal pressure waves toward the majors surfaces W 1 , W 2 of the wafer.
- the longitudinal pressure waves strike the surfaces W 1 , W 2 and remove slurry residue and other particles from the major surfaces W 1 and W 2 .
- the removed slurry residue and particles flow into the overflow weir 71 and are filtered from the cleaning solution by the filter 75 .
- the wafer W is rotated by the wafer support and rotating mechanisms 67 a, 67 b to clean the entire area of each major surface W 1 , W 2 . Simultaneous with the cleaning of the surfaces W 1 , W 2 , the nozzle 35 cleans the edge of the wafer W.
- the major surfaces W 1 , W 2 are cleaned using less cleaning fluid as the wafer W is only partially submerged, and as the inventive edge nozzle provides the fluid necessary to prevent drying of the wafer W, to clean the wafer's edge, and to add liquid to the tank 65 such that particles on the surface of the liquid are flushed into the overflow weir 71 .
- the inventive edge nozzle preferably is radially spaced from the wafer's edge and is positioned such that the liquid jet is directed approximately parallel to the plane of the wafer
- the invention includes other less preferred positions in which the liquid jet is not directed parallel to the plane of the wafer (e.g., perpendicular to the plane of the wafer, etc.) and/or in which the inventive edge nozzle overlaps a major surface of the wafer.
- the invention includes any nozzle that functions primarily to clean the edge of a thin disc (i.e., a dedicated edge nozzle), and includes any cleaning method that maintains a sonic nozzle positioned so that sonicated liquid output thereby is directed to strike an edge of the thin disc as the thin disc edge is scanned relative to the nozzle.
- a plurality of edge nozzles may be employed for edge cleaning, and one or more edge nozzles may provide sufficient force to rotate the thin disc during edge cleaning, thus eliminating the cost and complexity associated with motorized disc and/or nozzle rotation.
- mechanisms other than those shown in the figures exist for cleaning a thin disc's major surfaces and many such mechanisms may be advantageously employed with the present invention to achieve simultaneous cleaning of both the edges and the major surfaces of a thin disc.
- the specific major surface cleaners shown and described are merely those preferred for use with the present invention.
- a substrate or a wafer includes, but is not limited to a semiconductor wafer with or without material layers thereon, whether patterned or unpatterned.
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Abstract
An inventive edge cleaning device is provided for cleaning the edge a thin disc such as a semiconductor wafer. The inventive edge cleaning device has a sonic nozzle positioned so as to direct a liquid jet at the edge surface of the thin disc. Preferably the sonic nozzle is radially spaced from the thin disc's edge so that scrubbing, spin rinsing or spin cleaning may be simultaneously performed on the major surfaces of the thin disc as the thin disc edge is cleaned by the sonic nozzle. The liquid jet may include deionized water, NH4OH, KOH, TMAH, HF, citric acid, a surfactant, or other similar cleaning solutions, and the nozzle may remain stationary as the thin disc rotates or the nozzle may scan the circumference of the thin disc to clean the entire edge of the thin disc.
Description
- This application is a divisional of U.S. patent application Ser. No. 09/191,061, filed Nov. 11, 1998, which is incorporated herein in its entirety by reference.
- The present invention relates generally to apparatuses and methods for cleaning thin discs, such as semiconductor wafers, compact discs, glass substrates and the like. More particularly, the invention relates to cleaning the edges of a thin disc.
- To manufacture a thin disc such as a semiconductor wafer, an elongated billet of semiconductor material is cut into very thin slices, about ¾ mm in thickness. The slices or wafers of semiconductor material are then lapped and polished by a process that applies an abrasive slurry to the semiconductor wafer's surfaces. A similar polishing step is performed to planarize dielectric or metal films during subsequent device processing on the semiconductor wafer.
- After polishing, be it during wafer or device processing, slurry residue conventionally is cleaned from wafer surfaces via submersion in a tank of sonically energized cleaning fluid, via spraying with sonically energized cleaning or rinsing fluid, or via a scrubbing device which employs polyvinyl acetate (PVA) brushes, brushes made from other porous or sponge-like material, or brushes made from nylon bristles or similar materials. Although these conventional cleaning devices remove a substantial portion of the slurry residue which adheres to wafer edges, slurry particles nonetheless remain and produce defects during subsequent processing.
- A conventional PVA brush scrubber disclosed in U.S. Pat. No. 5,675,856 is shown in the side elevational view of FIG. 1. The conventional scrubber11, shown in FIG. 1, comprises a pair of
PVA brushes nodules 15 across the surface thereof, and a plurality ofvalleys 17 located among thenodules 15. The scrubber 11 also comprises aplatform 19 for supporting a wafer W and a mechanism (not shown) for rotating the pair ofPVA brushes platform 19 comprises a plurality ofspinning mechanisms 19 a-c for spinning the wafer W. During scrubbing a fluid supply mechanism F, such as a plurality of spray nozzles, supplies fluid to both major surfaces of the wafer, flushing dislodged particles and cleaning residue from the major surface of the wafer and rinsing brushes. - Preferably, the pair of
PVA brushes - For instance, another conventional technique for cleaning slurry residue and other particles from the surfaces of a semiconductor wafer employs sonic nozzles that direct jets of liquid toward a major surface of a semiconductor wafer. FIG. 2 is a side elevational view of an exemplary sonic
nozzle cleaning device 23 that includes asonic nozzle 25 having aninput port 25 a, anoutput port 25 b, and avibrator 27 coupled to agenerator 29 that drives thevibrator 27. - In operation, a cleaning solution (e.g., deionized water or another similar cleaning solution such as NH4OH, KOH, TMAH, HF, citric acid or a surfactant) is supplied under pressure (e.g., 15 p.s.i.) to the
input port 25 a of thenozzle 25. The cleaning solution travels through thenozzle 25, passes under thevibrator 27 and travels through theoutput port 25 b. As the cleaning solution leaves theoutput port 25 b it strikes the major surface of an object to be cleaned (e.g., amajor surface 31 a of a semiconductor wafer 31). - The
vibrator 27 vibrates at a sonic rate (e.g., ultrasonic at a frequency in the hundreds of kHz or megasonic at a frequency in the thousands of kHz) set by thegenerator 29. As the cleaning solution travels under thevibrator 27, thevibrator 27 induceslongitudinal pressure waves 33 in the cleaning solution. Thelongitudinal pressure waves 33 travel to, strike and impart energy to themajor surface 31 a of the semiconductor wafer 31 approximately every 0.1 to 10 microseconds, depending on the particular frequency of thegenerator 29, thereby removing slurry residue and other particles from themajor surface 31 a of thewafer 31. The entiremajor surface 31 a of thewafer 31 is cleaned by scanning thenozzle 25 across thewafer 31 while rotating thewafer 31 with arotating mechanism 34. Slurry residue and other particles on the edges of thewafer 31, however, are not effectively cleaned by the jets of cleaning solution employed by this type of cleaning apparatus. - A number of devices have been developed to improve wafer edge cleaning. One such device is shown in the side elevational view of FIG. 3. This mechanism employs a
separate edge brush 21, which is driven by a separate motor (not shown), that causes theedge brush 21 to rotate. Theedge brush 21 fits over the edge of the wafer W as shown in FIG. 3, providing more effective wafer edge cleaning. Although theedge brush 21 addresses the need to clean slurry residue from wafer edges, it does so at the expense of increased scrubber complexity and cost, and the requirement of frequent edge brush replacement because of excessive mechanical wear. - Accordingly the field of wafer cleaning requires a method and apparatus which effectively cleans both the major surfaces and the edge surfaces of a semiconductor wafer, and that does so without increased cost and complexity. In short, the semiconductor processing field needs an effective edge cleaner that satisfies the ever-present demand for reduced cost per unit wafer processed.
- The present invention addresses the need for an effective edge cleaner by providing a dedicated sonic nozzle specifically positioned to clean the edge surface of a thin disc such as a semiconductor wafer. A sonic nozzle (e.g., ultrasonic, megasonic, etc.) that produces a jet of liquid (e.g., de-ionized water, NH4OH, KOH, TMAH, HF, citric acid or a surfactant) is positioned so that the liquid jet strikes an edge of the thin disc to be cleaned (i.e., an edge nozzle). The sonic nozzle preferably is radially spaced from the edge of the thin disc and the liquid jet preferably is directed approximately 30° to 150° from a tangent to the edge of the thin disc and approximately 135° to 225° from a major surface of the thin disc (see FIGS. 4A-C). In this position the liquid jet impacts the edge of the thin disc, and any beveled portions thereof, with the greatest energy. Moreover the time the thin disc's edge is exposed to sonic energy (i.e., the edge cleaning duty cycle) is significantly increased, providing superior edge cleaning. When employed with a conventional major surface cleaner, rinser or scrubber (i.e., a major surface cleaning mechanism) the invention's edge nozzle may replace the fluid supply mechanisms conventionally required to rinse particles from a thin disc's major surfaces, and/or to prevent thin discs such as semiconductor wafers from drying during cleaning (as drying may leave undesirable streaks and/or particles on wafer surfaces). Thus, in its preferred embodiment, the present invention cleans thin disc edges with minimal additional parts and with minimal additional cleaning fluid. Moreover, the inventive edge nozzle lasts longer than mechanical edge scrubbers, thereby reducing or eliminating replacement and maintenance costs.
- To clean the entire circumference of the thin disc, the thin disc is scanned relative to the inventive edge nozzle. That is, either the thin disc is rotated while the inventive edge nozzle remains stationary, the inventive edge nozzle is scanned around the edge of the thin disc as the thin disc remains stationary, or a combination thereof.
- Because the inventive edge nozzle is dedicated to edge cleaning, the nozzle may be radially spaced from the thin disc being cleaned, and therefore may be positioned so as not to obstruct or to be obstructed by a conventional major surface cleaner simultaneously employed therewith. The inventive edge nozzle thereby facilitates simultaneous use of a conventional major surface cleaner such as a brush scrubber, spin rinser (i.e., a non-scrubbing-based major surface cleaner that employs de-ionized water only), spin cleaner (i.e., a non-scrubbing-based major surface cleaner that employs a cleaning liquid such as de-ionized water and a surfactant) and even megasonic tank cleaners which clean wafers by rotating a wafer which is partially submerged in a tank of megasonically energized cleaning fluid. However, the inventive edge nozzle also may be used to clean the edge of the thin disc before or after the major surface of the thin disc has been cleaned.
- Other objects, features and advantages of the present invention will become more fully apparent from the following detailed description of the preferred embodiments, the appended claims and the accompanying drawings.
- FIG. 1 is a schematic side elevational view of a conventional wafer scrubbing device, as previously described;
- FIG. 2 is a schematic side elevational view of a conventional sonic nozzle cleaning device, as previously described;
- FIG. 3 is a schematic side elevational view of a conventional wafer scrubbing device which employs a conventional edge cleaner, as previously described;
- FIG. 4A is a schematic side elevational view of the inventive edge nozzle during wafer edge cleaning;
- FIGS. 4B and 4C are a top and a side elevational view, respectively, of the inventive edge nozzle positioned relative to a wafer;
- FIG. 5 is a schematic side elevational view of the inventive edge nozzle during simultaneous wafer edge and wafer major surface cleaning;
- FIG. 6 is a side elevational view of the spin cleaner of FIG. 3 employing the inventive edge nozzle; and
- FIG. 7 is a side elevational view of a megasonic tank cleaner employing the inventive edge nozzle.
- FIG. 4A is a side elevational view of an inventive thin
disc edge cleaner 33. Theedge cleaner 33 comprises aninventive edge nozzle 35 radially spaced from an edge of a thin disc to be cleaned (e.g., an edge E (FIG. 4C) of a wafer W), and a plurality of rotating wheels 37 a-c that support the wafer W via grooves such asgroove 41 shown in the wheel 37 c. Eachgroove 41 has a sidewall angle (e.g., of 45°) so that only the very edge of the wafer W contacts the rotating wheels 37 a-c. - The
sonic edge nozzle 35 is radially spaced a distance x from the wafer W and emits aliquid jet 45 at an angle θ from a tangent 43 to the wafer W, and at an angle α from either major surface W1 or W2 of the wafer W whereby theliquid jet 45 strikes the edge E of the wafer W (rather than either major surface W1 or W2). FIGS. 4B and 4C are top and side views, respectively, of theedge nozzle 35 positioned relative to the wafer W. Specifically, FIGS. 4B and 4C show the distance x as measured from the edge E of the wafer W, the angle θ as measured from the tangent 43 to the wafer W and the angle α as measured from the major surface W1 of the wafer W. Also shown in FIG. 4C are a first bevel B1 and a second bevel B2 on the edge E of the wafer W. - With reference to FIG. 4C, to maximize edge cleaning and to ensure that the
liquid jet 45 cleans both beveled surfaces B1 and B2 of the wafer W, the angle α preferably is selected such that the center of theliquid jet 45, the portion of the jet that has the highest sonic power density, strikes the center of the edge E. However, the angle α may be selected to enhance cleaning of either beveled surface B1 or B2. Additionally, the distance x preferably is selected to allow edge cleaning via theinventive edge nozzle 35 simultaneously with the cleaning of major surface W1 and/or major surface W2 via a conventional brush scrubber, spin rinser, spin cleaner or any other similar cleaning mechanism which leaves the edge region of the wafer exposed so that spray from theinventive edge nozzle 35 may contact the wafer's edge, as described below. - In operation, a cleaning solution such as deionized water, NH4OH, KOH, TMAH, HF, citric acid, a surfactant, etc., is supplied under pressure to the
inventive edge nozzle 35. As the cleaning solution travels through thenozzle 35, the cleaning solution travels under a vibrator (not shown) and leaves thenozzle 35, forming theliquid jet 45. Thereafter, because of the positioning of theinventive edge nozzle 35, theliquid jet 45 strikes the edge E of the wafer W. - As previously described, the vibrator (not shown) of the
inventive edge nozzle 35 vibrates at a sonic rate, preferably megasonic, so as to induce longitudinal pressure waves in theliquid jet 45. The longitudinal pressure waves travel to, strike and impart energy to the edge E of the wafer W approximately every 0.1 to 1 microseconds, depending on the particular frequency at which the vibrator vibrates. The longitudinal pressure waves also strike, impart energy to, and thereby remove slurry residue and other particles from the edge E of the wafer W. Because theliquid jet 45 is directed at the edge E of the wafer W, it effectively removes slurry residue and other particles from the edge E of the wafer W. To maximize the cleaning power of theinventive edge nozzle 35, theedge nozzle 35 is preferably positioned such that the distance x is in the range of 1 to 50 mm, θ is in the range of 30° to 150°, or, more preferably 45° to 135°, and α is in the range of 135° to 225°, or, more preferably 150° to 210°, or, more preferably 170° to 190°. Most preferably θ is 45° and α is 180°, and the distance x is selected to optimize transmitted power from theliquid jet 45 to the wafer edge E based on the specific sonic frequency and flow rate of theliquid jet 45, as will be apparent to those of ordinary skill in the art. For conventional sonic frequencies and flow rates a distance x in the range of 7 to 20 mm is preferred. - As the
liquid jet 45 strikes the edge E of the wafer W, the wafer W is rotated by the rotating wheels 37 a-c. Any conventional rotating mechanisms such as an electric motor may be used to rotate the wheels 37 a-c. After one complete rotation of the wafer W, the entire circumference of the wafer W is cleaned. Thenozzle 35, alternatively, may be scanned about the wafer W as the wafer W is either rotated or held stationary. Theliquid jet 45 emitted by theinventive edge nozzle 35 may be used to prevent the wafer W from drying, particularly when thenozzle 35 is positioned along the elevated region of a vertically oriented wafer, as shown in FIG. 7. - FIG. 5 is a side perspective view of a
scrubbing device 47 that employs the inventiveedge cleaning device 33 of FIG. 4A, and is useful in describing the advantages provided by the present invention. As shown in FIG. 5, theinventive scrubbing device 47 comprises aplatform 49 for supporting a wafer W to be cleaned. Afirst brush 51 a and asecond brush 51 b are operatively coupled to theplatform 49 so as to contact both the major surfaces W1 and W2 of the wafer W, respectively. - A conventional spinning mechanism such as a motor, represented generally by
reference number 53, is operatively coupled to the first andsecond brushes second brushes platform 49 so as to rotate the wafer W positioned thereon. Preferably, as shown in FIG. 5, theplatform 49 comprises a plurality of rotating wheels 55 a-c, similar to the rotating wheels 37 a-c of FIG. 4A, for both supporting and rotating the wafer W. Specifically, each rotating wheel 55 a-c has a central notch orgroove 57, having a sidewall angle (e.g., of 45°) such that only the very edge of the wafer W contacts the rotating wheels 55 a-c. The notches thus prevent damage to the front or back wafer surfaces which may otherwise occur. - In operation, the first and
second brushes second brushes brushes - Once the
brushes spinning mechanism 53 is engaged and the first andsecond brushes brushes - The
nodules second brushes second brushes inventive edge nozzle 35 sprays theliquid jet 45 at the edge E of the wafer W, effectively cleaning slurry residue from the edge E, as previously described with reference to FIG. 4A. - While the pair of
brushes brushes liquid jet 45 contacts each point along the circumference of the wafer W. Because the inventive edge nozzle is dedicated to cleaning the edge E of the wafer W, the edge E and the major surfaces W1 and W2 are simultaneously cleaned without requiring any additional time compared to the time required to clean only the major surfaces W1 and W2. - Positioning the
inventive edge nozzle 35 so as to direct theliquid jet 45 at the edge E of wafer W allows the edge E of wafer W to be cleaned more effectively and more economically than with conventional edge brushes which require both additional motors to scrub the wafer's edge, and additional fluids both to rinse particles from the edge brush and to provide the necessary chemistry for cleaning. Further, unlike a brush type edge cleaner, the inventive nozzle will not readily wear, and will not require frequent replacement. - Because the
inventive edge nozzle 35 preferably is radially spaced from the surface of the wafer W, the inventive nozzle may be used with any conventional surface cleaner, without obstructing the major surface cleaner's access to the wafer's major surfaces and without being obstructed from the wafer's edge surface by the major surface cleaning mechanism. In each embodiment of the invention, slurry residue and other particles are removed from a wafer's edge more economically and more reliably than previous methods, reducing the cost per wafer unit processed. FIG. 6 shows theinventive edge nozzle 35 employed with the conventional spin cleaner of FIG. 2, and FIG. 7 shows theinventive edge nozzle 35 employed with a megasonic tank cleaner such as that disclosed in U.S. patent Ser. No. 09/191,060 (AMAT No. 2431/CMP/RKK) titled IMPROVED MEGASONIC CLEANER, filed on even date herewith, the disclosure of which is incorporated herein by this reference. - With reference to FIG. 6, the
nozzle 25 is shown cleaning themajor surface 31 a of thewafer 31. As previously described, to clean the entiremajor surface 31 a, thenozzle 25 is scanned across themajor surface 31 a as thewafer 31 is rotated via the rotatingmechanism 34. To affect edge cleaning in accordance with the present invention, theedge nozzle 35 preferably is positioned a distance x from thewafer 31 so that theliquid jet 45 strikes the edge E of thewafer 31 within the angle ranges previously described. Accordingly, as thewafer 31 is rotated by the rotatingmechanism 34, theinventive edge nozzle 35 cleans slurry residue and other particles from the edge E of thewafer 31 simultaneous with the cleaning of themajor surface 31 a via thenozzle 25. The inventive edge cleaning method, therefore, takes advantage of the wafer rotation already required to clean themajor surface 31 a of thewafer 31, eliminating the need for additional rotating mechanisms. - With reference to FIG. 7, an
inventive edge cleaner 63 is shown that comprises in pertinent part, atank 65 for partially submerging the wafer W in acleaning solution 65 a, wafer support androtating mechanisms sonic transducers overflow weir 71, apump 73 and afilter 75. Theinventive edge nozzle 35 is operatively coupled to the wafer support androtating mechanisms liquid jet 45 at the unsubmerged edge of the wafer W as the wafer W is rotated. In operation, thesonic transducers overflow weir 71 and are filtered from the cleaning solution by thefilter 75. The wafer W is rotated by the wafer support androtating mechanisms nozzle 35 cleans the edge of the wafer W. In this configuration the major surfaces W1, W2 are cleaned using less cleaning fluid as the wafer W is only partially submerged, and as the inventive edge nozzle provides the fluid necessary to prevent drying of the wafer W, to clean the wafer's edge, and to add liquid to thetank 65 such that particles on the surface of the liquid are flushed into theoverflow weir 71. - The foregoing description discloses only the preferred embodiments of the invention, modifications of the above disclosed apparatus and method which fall within the scope of the invention will be readily apparent to those of ordinary skill in the art. For instance, although the inventive edge nozzle preferably is radially spaced from the wafer's edge and is positioned such that the liquid jet is directed approximately parallel to the plane of the wafer, the invention includes other less preferred positions in which the liquid jet is not directed parallel to the plane of the wafer (e.g., perpendicular to the plane of the wafer, etc.) and/or in which the inventive edge nozzle overlaps a major surface of the wafer. The invention includes any nozzle that functions primarily to clean the edge of a thin disc (i.e., a dedicated edge nozzle), and includes any cleaning method that maintains a sonic nozzle positioned so that sonicated liquid output thereby is directed to strike an edge of the thin disc as the thin disc edge is scanned relative to the nozzle.
- A plurality of edge nozzles (e.g., an additional edge nozzle36) may be employed for edge cleaning, and one or more edge nozzles may provide sufficient force to rotate the thin disc during edge cleaning, thus eliminating the cost and complexity associated with motorized disc and/or nozzle rotation. Further, mechanisms other than those shown in the figures exist for cleaning a thin disc's major surfaces and many such mechanisms may be advantageously employed with the present invention to achieve simultaneous cleaning of both the edges and the major surfaces of a thin disc. The specific major surface cleaners shown and described are merely those preferred for use with the present invention. Further, as used herein, a substrate or a wafer includes, but is not limited to a semiconductor wafer with or without material layers thereon, whether patterned or unpatterned.
- Accordingly, while the present invention has been disclosed in connection with the preferred embodiments thereof, it should be understood that other embodiments may fall within the spirit and scope of the invention, as defined by the following claims.
Claims (16)
1. A method adapted to clean an edge of a thin disc comprising:
providing a thin disc having an edge and a first major surface;
providing a first sonic nozzle that produces a jet of sonicated liquid;
positioning the first sonic nozzle so that the first sonic nozzle is radially spaced from the edge of the thin disk, and so that the jet of sonicated liquid strikes the edge of the thin disc at an angle approximately between 30° and 150° from a tangent to the edge of the thin disc and approximately between 135° and 225° from the first major surface of the thin disc; and
scanning the thin disc edge relative to the first sonic nozzle while maintaining the positioning of the first sonic nozzle so that the jet of sonicated liquid strikes the edge of the thin disc, thereby cleaning the edge of the thin disc with the jet of sonicated liquid from the first sonic nozzle.
2. The method of wherein providing a thin disc having an edge and a first major surface comprises providing a semiconductor wafer having an edge and a first major surface.
claim 1
3. The method of wherein providing a first sonic nozzle that produces a jet of sonicated liquid comprises providing a first megasonic nozzle that produces a jet of sonicated liquid.
claim 1
4. The method of wherein providing a first sonic nozzle that produces a jet of sonicated liquid comprises providing a first sonic nozzle that produces a jet of sonicated liquid selected from the group consisting of de-ionized water, NH4OH, KOH, TMAH, HF, citric acid and a surfactant.
claim 1
5. The method of wherein positioning the first sonic nozzle so that the jet of sonicated liquid strikes the edge of the thin disc comprises positioning the first sonic nozzle so that the jet of sonicated liquid strikes the edge of the thin disc at an angle approximately between 45° and 135° from a tangent to the edge of the thin disc and approximately between 150° and 210° from the first major surface of the thin disc.
claim 1
6. The method of wherein positioning the first sonic nozzle so that the jet of sonicated liquid strikes the edge of the thin disc comprises positioning the first sonic nozzle so that the jet of sonicated liquid strikes the edge of the thin disc at an angle approximately between 45° and 135° from a tangent to the edge of the thin disc and approximately between 170° and 190° from the first major surface of the thin disc.
claim 5
7. The method of wherein positioning the first sonic nozzle so that the jet of sonicated liquid strikes the edge of the thin disc comprises positioning the first sonic nozzle so that the jet of sonicated liquid strikes the thin disc at an angle of approximately 45° from a tangent to the edge of the thin disc and approximately 180° from the first major surface of the thin disc.
claim 6
8. The method of wherein positioning the first sonic nozzle so that the jet of sonicated liquid strikes the edge of the thin disc comprises positioning the first sonic nozzle a radial distance of approximately 1 mm to 50 mm from the edge of the thin disc.
claim 1
9. The method of wherein positioning the first sonic nozzle so that the jet of sonicated liquid strikes the edge of the thin disc comprises positioning the first sonic nozzle a radial distance of approximately 7 mm to 20 mm from the edge of the thin disc.
claim 8
10. The method of wherein scanning the thin disc edge relative to the first sonic nozzle comprises rotating the thin disc.
claim 1
11. The method of further comprising cleaning the first major surface of the thin disc via brush scrubbing while cleaning the edge of the thin disc.
claim 1
12. The method of further comprising cleaning the first major surface of the thin disc via a major surface cleaning mechanism while cleaning the edge of the thin disc.
claim 1
13. The method of wherein cleaning the first major surface of the thin disc via brush scrubbing while cleaning the edge of the thin disc comprises cleaning the first major surface and a second major surface of the thin disc via brush scrubbing while cleaning the edge of the thin disc.
claim 11
14. The method of wherein cleaning the first major surface of the thin disc via a major surface cleaning mechanism while cleaning the edge of the thin disc comprises cleaning the first major surface and a second major surface of the thin disc via a major surface cleaning mechanism while cleaning the edge of the thin disc.
claim 12
15. The method of further comprising:
claim 1
providing a second sonic nozzle that produces a jet of sonicated liquid; and
positioning the second sonic nozzle so that the second sonic nozzle is radially spaced from the edge of the thin disk, and so that the jet of sonicated liquid strikes the edge of the thin disc at an angle approximately between 30° and 150° from a tangent to the edge of the thin disc and approximately between 135° and 225° from the first major surface of the thin disc.
16. A method adapted to clean an edge of a thin disc comprising:
providing a thin disc having an edge and a major surface;
providing a sonic nozzle that produces a jet of sonicated liquid;
positioning the sonic nozzle so that the sonic nozzle is radially spaced from the edge of the thin disk, and so that the jet of sonicated liquid strikes the edge of the thin disc at an angle approximately between 30° and 150° from a tangent to the edge of the thin disc and approximately between 135° and 225° from the major surface of the thin disc;
scanning the thin disc edge relative to the sonic nozzle while maintaining the positioning of the sonic nozzle so that the jet of sonicated liquid strikes the edge of the thin disc, thereby cleaning the edge of the thin disc with the jet of sonicated liquid from the sonic nozzle;
providing a cleaning mechanism; and
cleaning the major surface of the thin disc via the cleaning mechanism.
Priority Applications (1)
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US09/738,797 US6345630B2 (en) | 1998-11-11 | 2000-12-15 | Method and apparatus for cleaning the edge of a thin disc |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US09/191,061 US6202658B1 (en) | 1998-11-11 | 1998-11-11 | Method and apparatus for cleaning the edge of a thin disc |
US09/738,797 US6345630B2 (en) | 1998-11-11 | 2000-12-15 | Method and apparatus for cleaning the edge of a thin disc |
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US09/191,061 Division US6202658B1 (en) | 1998-11-11 | 1998-11-11 | Method and apparatus for cleaning the edge of a thin disc |
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US20010002593A1 true US20010002593A1 (en) | 2001-06-07 |
US6345630B2 US6345630B2 (en) | 2002-02-12 |
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US09/738,797 Expired - Fee Related US6345630B2 (en) | 1998-11-11 | 2000-12-15 | Method and apparatus for cleaning the edge of a thin disc |
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US09/191,061 Expired - Fee Related US6202658B1 (en) | 1998-11-11 | 1998-11-11 | Method and apparatus for cleaning the edge of a thin disc |
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1998
- 1998-11-11 US US09/191,061 patent/US6202658B1/en not_active Expired - Fee Related
-
1999
- 1999-10-21 TW TW088118255A patent/TW444241B/en not_active IP Right Cessation
- 1999-11-03 WO PCT/US1999/025988 patent/WO2000028579A2/en active Application Filing
-
2000
- 2000-12-15 US US09/738,797 patent/US6345630B2/en not_active Expired - Fee Related
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US20180277401A1 (en) * | 2017-03-27 | 2018-09-27 | Ebara Corporation | Substrate processing method and apparatus |
US10811284B2 (en) * | 2017-03-27 | 2020-10-20 | Ebara Corporation | Substrate processing method and apparatus |
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Also Published As
Publication number | Publication date |
---|---|
US6202658B1 (en) | 2001-03-20 |
WO2000028579A2 (en) | 2000-05-18 |
WO2000028579A3 (en) | 2000-08-10 |
WO2000028579A9 (en) | 2000-11-02 |
TW444241B (en) | 2001-07-01 |
US6345630B2 (en) | 2002-02-12 |
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