US10935453B2 - Leak detection with oxygen - Google Patents

Leak detection with oxygen Download PDF

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Publication number
US10935453B2
US10935453B2 US15/776,299 US201615776299A US10935453B2 US 10935453 B2 US10935453 B2 US 10935453B2 US 201615776299 A US201615776299 A US 201615776299A US 10935453 B2 US10935453 B2 US 10935453B2
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oxygen
test
test chamber
gas
test object
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US20180328810A1 (en
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Daniel Wetzig
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Inficon GmbH Deutschland
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Inficon GmbH Deutschland
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F17/00—Methods or apparatus for determining the capacity of containers or cavities, or the volume of solid bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3236—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers
    • G01M3/3263—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers using a differential pressure detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell

Definitions

  • the disclosure relates to a method and a device for the detection of a leak in a test object contained in a test chamber.
  • the filling gas in the object which is present for operational reasons, is used for analysis, such as e.g. a cooling medium in the heat exchanger of a refrigerator or an air condition system.
  • the object to be tested is filled with a test gas, e.g. the test gas helium.
  • a test gas e.g. the test gas helium.
  • the partial pressure of the test gas is measured in the vacuum system and serves as the measure for the leakage rate.
  • the test object is located in a closed measuring chamber volume and the temporal development of the increase in the partial pressure of the test gas in the measuring chamber serves as the measure for the leakage rate.
  • a carrier gas flows around the test object.
  • the gas flowing past the test object carries gas escaping from the test object to the measuring site, where a corresponding test gas sensor measures the test gas concentration in the carrier gas.
  • the difference between the test gas concentration in the carrier gas with and without a test object serves as the measure for the leakage rate.
  • the costs for a system that allows the use of the test gas helium are or seem to be too high.
  • the availability of helium and its costs are not stable. It is desirable to be able to use alternative test gases.
  • test gas When choosing a suitable test gas for tightness tests, it has to be taken into consideration how high and stable the partial pressure is in the test environment. Actually, oxygen is less suited as a test gas, since it exists in a proportion of about 21% in the atmosphere.
  • a method is known from WO 2001/044775 A1, in which oxygen partial pressure is measured to localize a leak in a test object.
  • the test object is evacuated and sprayed with an oxygen-free gas from outside using a spray gun. The oxygen partial pressure is measured in the vacuum of the test object.
  • the test object is filled with an oxygen-free gas and subjected to an overpressure relative to the outer atmospheric pressure. Escaping gas is sucked in using a sniffer probe and is supplied to a vacuum chamber which holds an oxygen sensor.
  • the test object is filled with an oxygen-containing gas and is introduced into a test chamber which is then evacuated. The oxygen partial pressure is measured in the vacuum of the test object.
  • the proportion of oxygen is measured in vacuum. It has been shown that vacuum conditions at the oxygen sensor cause significant signal drift and that the measuring signal is difficult to evaluate.
  • the test object is filled, as exclusively as possible, with an oxygen-free gas, such as e.g. nitrogen or argon, whereas the environment of the test object within the test chamber contains air.
  • an oxygen-free gas such as e.g. nitrogen or argon
  • the pressure in the test object and in the test chamber is adjusted such that the pressure in the test object is higher than the pressure in the test chamber in the area outside the test object.
  • the oxygen-free gas escapes from the test object and reduces the oxygen concentration in the atmosphere surrounding the test object. The decrease in oxygen concentration serves as a measure for the leakage rate.
  • the oxygen concentration is measured using an oxygen sensor, e.g. in form of a lambda probe.
  • the measuring may be performed according to the accumulation method or the carrier gas method.
  • the oxygen partial pressure or the partial pressure of oxygen-containing gases, such as CO2 at the lambda probe is sufficiently high and is not measured under vacuum conditions.
  • Sufficiently high pressure is understood as an oxygen partial pressure of about 10 mbar or higher, corresponding to an atmospheric pressure of about 50 mbar or higher.
  • the measuring signal of a lambda probe is particularly informative, whereas, under vacuum conditions at a pressure p ⁇ 10mbar, the signal is not useful.
  • the lambda probe may be arranged e.g. downstream of a pump evacuating the test chamber or of a compressor. A sniffer probe or a spray gun is not used.
  • test object is filled with an oxygen-containing gas. Only in case of a sufficient evacuation of the test chamber is a measurement of the oxygen partial pressure informative, since oxygen may reach the test chamber only in case of a leak in the test object. If, alternatively, the test chamber is flooded with an oxygen-free gas, while the test object is filled with an oxygen-containing gas, as also described in WO 2001/044775 A1, a lot more oxygen-free gas is required than in the method of the present disclosure.
  • the test object In case of a CO 2 atmosphere in the test object environment inside the test chamber, the test object is filled with an oxygen proportion (e.g. air) and the increase in oxygen in the test object environment is measured.
  • an oxygen proportion e.g. air
  • test object filling the test object with an oxygen-free gas, while the test chamber contains air, has the advantage, in combination with the measuring of the oxygen concentration at atmospheric pressure, that the test chamber does not have to be evacuated completely. Rather, a slight depression relative to atmospheric pressure or even atmospheric pressure in the test chamber will be sufficient.
  • the pressure difference to the oxygen-free gas in the test object merely has to be sufficiently great. To this end, the test object has to be pressurized to a sufficient overpressure.
  • the temporal development of a possible increase in the oxygen partial pressure in the air of the test chamber is measured and serves as a measure for the leakage rate.
  • the difference between the oxygen concentration in the carrier gas air both with and without a test object serves as the measure for the leakage rate.
  • another oxygen sensor may be arranged upstream of the test object in the gas flow path to the test chamber.
  • a constant oxygen concentration develops which is a reduced concentration depending on the leakage.
  • the oxygen proportion in the air upstream of the test object or prior to the admixture of the oxygen-free leakage gas must be maintained stable. This may be realized via a buffer or equalization volume with an additional throttle as a low pass.
  • the decrease in oxygen concentration is measured over time.
  • the total pressure of the gas in the test chamber and/or at the oxygen sensor is stabilized, so as to enhance the detection limit.
  • the quantity of gas in the test chamber volume is to be kept small. This may be achieved by lowering the total pressure in the test chamber volume or by reducing the net volume (test chamber inner volume minus the test object outer volume).
  • the disclosure has the advantage that no expensive test gases have to be used.
  • Oxygen-free process gases such as e.g. argon or nitrogen, are well available and cheap.
  • the costs for an oxygen sensor are low, in particular in case of a lambda probe available as a mass product from the automobile industry.
  • the measuring accuracy is enhanced relative to the pressure drop method or relative to the pressure increase method.
  • the effort related to vacuum technology is low compared to a helium vacuum test.
  • FIG. 1 is a schematic illustration of the first embodiment
  • FIG. 2 is a schematic illustration of the second embodiment.
  • the test object 12 is filled completely with an oxygen-free test gas, so that no oxygen is contained in the test object. Thereafter or before, the test object is placed in a hermetically sealable test chamber 14 .
  • the test chamber 14 contains air.
  • test chamber is gas-conductively connected to a carrier gas pump 16 or, alternatively, to a compressor.
  • test chamber 14 is gas-conductively connected to an oxygen sensor 18 in the form of a lambda probe.
  • the oxygen sensor 18 and the carrier gas pump 16 are in communication through a gas path in which a throttle 22 is provided.
  • the embodiment in FIG. 1 is an arrangement for measurement according to the carrier gas method.
  • Air is supplied to the test chamber 14 as a carrier gas via the carrier gas inlet 24 and a first has path 26 connecting the carrier gas inlet 24 and the test chamber 14 .
  • a further oxygen sensor 28 in particular in the form of a lambda probe, can be provided in the gas path, so as to determine the oxygen offset, i.e. the oxygen proportion contained in the air without test gas being added thereto from the test object 12 .
  • the gas path 26 further includes another flow throttle 30 and a flow sensor 32 .
  • the side of the test chamber 14 opposite the gas path 26 is connected to an outlet gas path 34 which includes the carrier gas pump 16 , the throttle 22 , the oxygen sensor 18 , the buffer volume 20 and a third throttle 36 and leads to the gas outlet 38 .
  • the air is guided from the inlet 24 through the test chamber 14 along the surface of the test object 12 and is supplied to the oxygen sensor 18 .
  • oxygen-free gas escapes from the test object 12 and mixes with the air of the carrier gas, whereby the oxygen proportion in the air is reduced. This oxygen proportion is measured with the lambda probe (oxygen sensor 18 ).
  • the second embodiment illustrated in FIG. 2 is provided for measurement according to the accumulation method.
  • a gas path 40 connects two opposite sides of the test chamber 14 .
  • the gas path 40 includes the carrier gas pump 16 , the throttle 22 , the buffer volume 20 , a total pressure sensor 44 , the oxy-gen sensor 18 (lambda probe) and a further throttle between the oxygen sen-sor 18 and the test chamber 14 .
  • the two throttles 42 and 22 are arranged on opposite sides of the oxygen sensor 18 .
  • the total pressure sensor 44 may be a differential total pressure sensor that measures the differential pressure with respect to the atmospheric ambient pressure.
  • the pressure in the test chamber 14 is reduced in the area outside the test object 12 such that the oxygen-free gas in the test object 12 flows from a possible leak of the test object into the test chamber 14 .
  • the oxygen sensor 18 is used to continuously measure the oxygen partial pressure of the air in the test chamber 14 . Specifically, the change in the oxygen partial pressure is measured over time, wherein a decrease of the oxygen concentration indicates a leak in the test object 12 and serves as a measure for the leakage rate.
  • the total pressure sensor 44 serves to enable the determination of the oxygen concentration from the oxygen partial pressure signal of the lambda probe and the measured total pressure.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Examining Or Testing Airtightness (AREA)
US15/776,299 2015-11-16 2016-11-11 Leak detection with oxygen Active 2037-06-23 US10935453B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015222554.2A DE102015222554A1 (de) 2015-11-16 2015-11-16 Lecksuche mit Sauerstoff
DE102015222554.2 2015-11-16
PCT/EP2016/077414 WO2017084974A1 (de) 2015-11-16 2016-11-11 Lecksuche mit sauerstoff

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US20180328810A1 US20180328810A1 (en) 2018-11-15
US10935453B2 true US10935453B2 (en) 2021-03-02

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US (1) US10935453B2 (enExample)
EP (1) EP3377870B1 (enExample)
JP (1) JP6878425B2 (enExample)
KR (1) KR102733784B1 (enExample)
CN (1) CN108369152A (enExample)
BR (1) BR112018009435B1 (enExample)
DE (1) DE102015222554A1 (enExample)
WO (1) WO2017084974A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210231517A1 (en) * 2018-05-07 2021-07-29 Inficon Gmbh Sniffing Leak Detector with Switching Valve and Buffer Chamber

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3068781A1 (fr) 2017-07-06 2019-01-11 Ateq Procede de detection de fuite d'une piece creuse et installation pour la mise en œuvre d'un tel procede
FR3073623B1 (fr) 2017-11-16 2019-11-08 Ateq Installation et procede de detection et de localisation de fuite dans un circuit de transport d'un fluide, notamment d'un aeronef
WO2020047349A1 (en) 2018-08-31 2020-03-05 Ateq Corporation Battery leak test device and methods
FR3092171B1 (fr) 2019-01-29 2021-04-30 Ateq Système de détection de fuite par gaz traceur et utilisation correspondante.
FR3106661B1 (fr) 2020-01-28 2022-01-21 Ateq Dispositif de détection de fuites
DE102020119600A1 (de) * 2020-07-24 2022-01-27 Inficon Gmbh Vakuumlecksuchsystem, Gassteuereinheit und Verfahren zur Gaslecksuche

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170660A (en) 1987-10-28 1992-12-15 Martin Lehmann Process and apparatus for volume-testing a hollow body
JPH1183790A (ja) 1997-05-07 1999-03-26 Bayerische Motoren Werke Ag 内燃機関の排気ガス管における酸素センサーの電気的な加熱装置の機能性の検査のための方法
WO2001044775A1 (de) 1999-12-14 2001-06-21 Inficon Gmbh Verfahren zur lecksuche und lecklokalisierung sowie zur durchführung dieser verfahren geeignete vorrichtungen
US20040040372A1 (en) * 2002-08-30 2004-03-04 George Plester Method for determining the permeation of gases into or out of plastic packages and for determination of shelf-life with respect to gas permeation
DE10240295A1 (de) 2002-08-31 2004-04-01 Applied Films Gmbh & Co. Kg Verfahren und Vorrichtung für die Bestimmung der Gasdurchlässigkeit eines Behälters
WO2006032591A1 (de) 2004-09-22 2006-03-30 Inficon Gmbh Leckprüfverfahren und leckprüfvorrichtung mit partialdrucksensor
JP2011179975A (ja) 2010-03-01 2011-09-15 Ts:Kk 漏れ検査装置及び漏れ検査方法
US20130025349A1 (en) * 2011-07-29 2013-01-31 Solomon George M Leak detection apparatus and method
WO2014016308A1 (fr) 2012-07-23 2014-01-30 Adixen Vacuum Products Procede et installation de detection pour le controle d'etancheite de produits scelles
WO2014038192A1 (ja) 2012-09-04 2014-03-13 アトナープ株式会社 リーク検査を行うシステムおよび方法
JP2015040836A (ja) 2013-08-23 2015-03-02 株式会社フクダ 水素リークテスト方法及び装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1664563A (zh) * 2004-12-31 2005-09-07 合肥东能光电科技有限公司 一种六氟化硫(sf6)气体检测方法
DE102007057944A1 (de) * 2007-12-01 2009-06-04 Inficon Gmbh Verfahren und Vorrichtung zur Dichtheitsprüfung
CN101476966B (zh) * 2009-01-23 2011-12-14 黄若 涡轮增压器漏气测量装置及方法
CN201594030U (zh) * 2009-11-06 2010-09-29 卧龙电气集团股份有限公司 无氧干燥窑内氧含量检测装置

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170660A (en) 1987-10-28 1992-12-15 Martin Lehmann Process and apparatus for volume-testing a hollow body
JPH1183790A (ja) 1997-05-07 1999-03-26 Bayerische Motoren Werke Ag 内燃機関の排気ガス管における酸素センサーの電気的な加熱装置の機能性の検査のための方法
US5929328A (en) 1997-05-07 1999-07-27 Bayerische Mortoren Werke Aktiengesellschaft Method for checking the function of the electrical heater of a lambda probe in the exhaust line of an internal combustion engine
US7156976B2 (en) 1999-12-14 2007-01-02 Inficon Gmbh Method for detecting and localizing leaks and suitable device for carrying out the method
US20030047465A1 (en) 1999-12-14 2003-03-13 Inficon Gmbh Method for detecting and localising leaks and suitable devices for carrying out said method
WO2001044775A1 (de) 1999-12-14 2001-06-21 Inficon Gmbh Verfahren zur lecksuche und lecklokalisierung sowie zur durchführung dieser verfahren geeignete vorrichtungen
US20040040372A1 (en) * 2002-08-30 2004-03-04 George Plester Method for determining the permeation of gases into or out of plastic packages and for determination of shelf-life with respect to gas permeation
DE10240295A1 (de) 2002-08-31 2004-04-01 Applied Films Gmbh & Co. Kg Verfahren und Vorrichtung für die Bestimmung der Gasdurchlässigkeit eines Behälters
WO2006032591A1 (de) 2004-09-22 2006-03-30 Inficon Gmbh Leckprüfverfahren und leckprüfvorrichtung mit partialdrucksensor
US20090100909A1 (en) 2004-09-22 2009-04-23 Inficon Gmbh Leak testing method and leak testing device
JP2011179975A (ja) 2010-03-01 2011-09-15 Ts:Kk 漏れ検査装置及び漏れ検査方法
US20130025349A1 (en) * 2011-07-29 2013-01-31 Solomon George M Leak detection apparatus and method
WO2014016308A1 (fr) 2012-07-23 2014-01-30 Adixen Vacuum Products Procede et installation de detection pour le controle d'etancheite de produits scelles
US20150211955A1 (en) * 2012-07-23 2015-07-30 Adixen Vacuum Products Detection method and facility for checking sealed products for leaks
WO2014038192A1 (ja) 2012-09-04 2014-03-13 アトナープ株式会社 リーク検査を行うシステムおよび方法
US20150226629A1 (en) 2012-09-04 2015-08-13 Atonarp Inc. System and method for leak inspection
JP2015040836A (ja) 2013-08-23 2015-03-02 株式会社フクダ 水素リークテスト方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210231517A1 (en) * 2018-05-07 2021-07-29 Inficon Gmbh Sniffing Leak Detector with Switching Valve and Buffer Chamber
US11852562B2 (en) * 2018-05-07 2023-12-26 Inficon Gmbh Sniffing leak detector with switching valve and buffer chamber

Also Published As

Publication number Publication date
KR102733784B1 (ko) 2024-11-22
DE102015222554A1 (de) 2017-05-18
US20180328810A1 (en) 2018-11-15
JP2018533741A (ja) 2018-11-15
CN108369152A (zh) 2018-08-03
EP3377870A1 (de) 2018-09-26
JP6878425B2 (ja) 2021-05-26
WO2017084974A1 (de) 2017-05-26
BR112018009435A2 (pt) 2018-12-04
BR112018009435B1 (pt) 2022-11-29
KR20180082524A (ko) 2018-07-18
EP3377870B1 (de) 2021-03-17

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