US10407594B2 - Chemical mechanical polishing (CMP) composition comprising a polymeric polyamine - Google Patents

Chemical mechanical polishing (CMP) composition comprising a polymeric polyamine Download PDF

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US10407594B2
US10407594B2 US14/004,689 US201214004689A US10407594B2 US 10407594 B2 US10407594 B2 US 10407594B2 US 201214004689 A US201214004689 A US 201214004689A US 10407594 B2 US10407594 B2 US 10407594B2
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composition
cmp
cmp composition
alkyl
particles
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US20140004703A1 (en
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Bastian Marten Noller
Yuzhuo Li
Diana Franz
Kenneth Rushing
Michael Lauter
Daniel Kwo-Hung Shen
Yongqing Lan
Zhenyu Bao
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BASF SE
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BASF SE
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/06—Other polishing compositions
    • C09G1/14—Other polishing compositions based on non-waxy substances
    • C09G1/16—Other polishing compositions based on non-waxy substances on natural or synthetic resins
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing

Definitions

  • This invention essentially relates to a chemical mechanical polishing (CMP) composition and its use in polishing substrates of the semiconductor industry.
  • the CMP composition according to the invention comprises a specific polymeric polyamine or a salt thereof and shows an improved polishing performance.
  • CMP chemical mechanical polishing
  • CMP is employed to planarize metal and/or oxide surfaces.
  • CMP utilizes the interplay of chemical and mechanical action to achieve the planarity of the to-be-polished surfaces.
  • Chemical action is provided by a chemical composition, also referred to as CMP composition or CMP slurry.
  • Mechanical action is usually carried out by a polishing pad which is typically pressed onto the to-be-polished surface and mounted on a moving platen. The movement of the platen is usually linear, rotational or orbital.
  • a rotating wafer holder brings the to-be-polished wafer in contact with a polishing pad.
  • the CMP composition is usually applied between the to-be-polished wafer and the polishing pad.
  • CMP compositions comprising a polymeric polyamine are known and described, for instance, in the following references.
  • U.S. Pat. No. 5,876,490 discloses a CMP composition comprising abrasive particles and a polyelectrolyte having ionic moieties with a charge that differs from that of the abrasive particles.
  • Said polyelectrolyte can be for example poly(vinylamine), poly(ethylenimine), poly(4-vinyl pyridine).
  • U.S. Pat. No. 6,855,267 B2 discloses a CMP slurry comprising an abrasive, a pH controlling agent, choline chloride and polyethylene imine having a molecular structure of [—CH 2 CH 3 N(CH 2 CH 2 NH 2 )—] x [—CH 2 CH 2 NH—] y , where x and y are positive integers.
  • U.S. Pat. No. 7,022,255 B2 discloses a CMP composition comprising an organometallic-modified abrasive and a nitrogen-containing polymer compound such as polyalkyleneimine, which can be polyethyleneimine, modified polyethyleneimines, including but not limited to polyamidopolyethyleneimine, polypropyleneimine, and higher homologs thereof.
  • a nitrogen-containing polymer compound such as polyalkyleneimine, which can be polyethyleneimine, modified polyethyleneimines, including but not limited to polyamidopolyethyleneimine, polypropyleneimine, and higher homologs thereof.
  • U.S. Pat. No. 7,582,564 B2 discloses a CMP composition comprising an acid based electrolyte system, a chelating agent, a corrosion inhibitor, a basic pH adjusting agent and a passivating polymeric material such as polyethyleneimine.
  • U.S. Pat. No. 6,312,486 B1 discloses a CMP composition comprising an abrasive, a pH buffering agent, an ion selected from an ion of Group II elements of the Periodic Table, and a chelating agent selected from the group consisting of polycarboxylic acid and salts thereof; polyamines; polyols; polyethers; polyetherdiols; and polyetherdiamines.
  • KR 10-0855474 B discloses an abrasive, an oxidizing agent, an organic acid, and optionally an insulating layer polishing inhibitor which is selected from the group consisting of polyethyleneimine, polypropyleneimine, polybutyleneimine and their mixtures.
  • One of the objects of the present invention was to provide a CMP composition which shows an improved polishing performance, particularly the combination of high material removal rate (MRR), low hot static etching rates of metal-containing substrate (metal-hSER) and low cold static etching rates of metal-containing substrate (metal-cSER), low hot metal ion static etching rates with regard to metal-containing substrate (metal-hMSER), high ratio of MRR to metal-hSER, high ratio of MRR to metal-cSER, high ratio of MRR to metal-hMSER, and the reduction of erosion and dishing effects.
  • MRR material removal rate
  • metal-hSER metal-containing substrate
  • metal-cSER metal-containing substrate
  • low hot metal ion static etching rates with regard to metal-containing substrate
  • a CMP composition was contemplated which is capable to reduce the friction force during the CMP process.
  • a further object was to provide a CMP composition which is particularly appropriate and adopted for the CMP of copper-containing layers in a multilevel structure.
  • a semiconductor device can be manufactured by a process which comprises the CMP of a substrate in the presence of the CMP composition of the invention.
  • said process comprises the CMP of a metal-containing substrate, that is a substrate comprising metal in the form of elements, alloys, or compounds such as metal nitrides or oxides.
  • Said process comprises more preferably the CMP of a metal layer of said substrate, most preferably the CMP of a copper layer of said substrate, and for example the CMP of a copper layer of a substrate comprising copper and tantalum.
  • the CMP composition of the invention is used for polishing any substrate used in the semiconductor industry. This use is referred to as (U1).
  • the CMP composition of the invention is used for the CMP of a metal-containing substrate, wherein said CMP composition comprises the polymeric polyamine or the salt thereof (B) in a weight concentration (% B) of at least 0.0005 wt. %, and wherein the friction force during the CMP process is reduced by at least 15% compared to reference composition which is identical to said CMP composition but free of (B).
  • % B weight concentration
  • U2 weight concentration
  • said CMP composition is used preferably for polishing a metal-containing substrate, more preferably for polishing a metal layer of a said substrate, most preferably for polishing a copper layer of said substrate, and for example for polishing a copper layer of a substrate comprising copper and tantalum.
  • the friction force is defined as the coefficient of friction (CoF) which is the ratio of the ratio of friction to normal force.
  • CoF coefficient of friction
  • the friction force during the CMP process is reduced preferably by at least 20%, more preferably by at least 25%, most preferably by at least 30%, for example by at least 40% compared to reference composition which is identical to said CMP composition but free of (B).
  • (% B) is the weight concentration of (B) based on the total weight of the corresponding composition. wt. % is percent by weight. With regard to the use (U1) and (U2), (% B) is preferably at least 0.0007 wt. %, more preferably at least 0.001 wt. %, most preferably at least 0.003 wt. %, for example at least 0.01 wt. %. With regard to the use (U1) and (U2), (% B) is preferably not more than 3 wt. %, more preferably not more than 1 wt. %, most preferably not more than 0.3 wt. %, for example not more than 0.1 wt. %.
  • the CMP composition contains inorganic particles, organic particles, or a mixture or composite thereof (A).
  • (A) can be
  • a composite is a composite particle comprising two or more types of particles in such a way that they are mechanically, chemically or in another way bound to each other.
  • An example for a composite is a core-shell particle comprising one type of particle in the outer sphere (shell) and another type of particle in the inner sphere (core).
  • the particles (A) can be contained in varying amounts.
  • the amount of (A) is not more than 10 wt. %, more preferably not more than 4 wt. %, most preferably not more than 2 wt. %, for example not more than 1 wt. %, based on the total weight of the corresponding composition.
  • the amount of (A) is at least 0.005 wt. %, more preferably at least 0.01 wt. %, most preferably at least 0.05 wt. %, for example at least 0.1 wt. %, based on the total weight of the corresponding composition.
  • the particles (A) can be contained in varying particle size distributions.
  • the particle size distributions of the particles (A) can be monomodal or multimodal. In case of multimodal particle size distributions, bimodal is often preferred. In order to have an easily reproducible property profile and easily reproducible conditions during the CMP process of the invention, a monomodal particle size distribution is preferred for (A). It is most preferred for (A) to have a monomodal particle size distribution.
  • the mean particle size of the particles (A) can vary within a wide range.
  • the mean particle size is the d 50 value of the particle size distribution of (A) in the aqueous medium (C) and can be determined using dynamic light scattering techniques. Then, the d 50 values are calculated under the assumption that particles are essentially spherical.
  • the width of the mean particle size distribution is the distance (given in units of the x-axis) between the two intersection points, where the particle size distribution curve crosses the 50% height of the relative particle counts, wherein the height of the maximal particle counts is standardized as 100% height.
  • the mean particle size of the particles (A) is in the range of from 5 to 500 nm, more preferably in the range of from 5 to 250 nm, most preferably in the range of from 50 to 150 nm, and in particular in the range of from 90 to 130 nm, as measured with dynamic light scattering techniques using instruments such as High Performance Particle Sizer (HPPS) from Malvern Instruments, Ltd. or Horiba LB550.
  • HPPS High Performance Particle Sizer
  • the particles (A) can be of various shapes. Thereby, the particles (A) may be of one or essentially only one type of shape. However, it is also possible that the particles (A) have different shapes. For instance, two types of differently shaped particles (A) may be present.
  • (A) can have the shape of cubes, cubes with chamfered edges, octahedrons, icosahedrons, nodules or spheres with or without protrusions or indentations. Preferably, they are spherical with no or only very few protrusions or indentations.
  • particles (A) is not particularly limited.
  • (A) may be of the same chemical nature or a mixture or composite of particles of different chemical nature.
  • particles (A) of the same chemical nature are preferred.
  • (A) can be
  • Particles (A) are preferably inorganic particles. Among them, oxides and carbides of metals or metalloids are preferred. More preferably, particles (A) are alumina, ceria, copper oxide, iron oxide, nickel oxide, manganese oxide, silica, silicon nitride, silicon carbide, tin oxide, titania, titanium carbide, tungsten oxide, yttrium oxide, zirconia, or mixtures or composites thereof. Most preferably, particles (A) are alumina, ceria, silica, titania, zirconia, or mixtures or composites thereof. In particular, (A) are silica. For example, (A) are colloidal silica. Generally, colloidal silica are fine amorphous, nonporous, and typically spherical silica particles.
  • polymer particles are preferred.
  • Polymer particles can be homo- or copolymers.
  • the latter may for example be block-copolymers, or statistical copolymers.
  • the homo- or copolymers may have various structures, for instance linear, branched, comb-like, dendrimeric, entangled or cross-linked.
  • the polymer particles may be obtained according to the anionic, cationic, controlled radical, free radical mechanism and by the process of suspension or emulsion polymerisation.
  • the polymer particles are at least one of the polystyrenes, polyesters, alkyd resins, polyurethanes, polylactones, polycarbonates, poylacrylates, polymethacrylates, polyethers, poly(N-alkylacrylamide)s, poly(methyl vinyl ether)s, or copolymers comprising at least one of vinylaromatic compounds, acrylates, methacrylates, maleic anhydride acrylamides, methacrylamides, acrylic acid, or methacrylic acid as monomeric units, or mixtures or composites thereof.
  • polymer particles with a cross-linked structure are preferred.
  • the CMP composition comprises
  • (B) can be of one type or a mixture of different types of such polyamines or a salt thereof.
  • (B) is one type of such polyamines or a salt thereof.
  • (B) is a polyalkyleneimine or a salt thereof.
  • (B) is a polyethyleneimine, a polypropyleneimine, a polybutyleneimine, or a salt thereof.
  • (B) is a polyethyleneimine, or a salt thereof.
  • (B) can be homopolymers or copolymers.
  • the latter may be alternating, periodic, statistical or block copolymers.
  • (B) can be of any polymer structure, for example a linear polymer, a ring polymer, a cross-linked polymer, a branched polymer, a star polymer, a comb polymer, a brush polymer, a dendronized polymer, or a dendrimer etc.
  • (B) is an essentially linear polymer. More preferably, (B) is a linear polymer.
  • (B) can be contained in varying amounts.
  • the amount of (B) is not more than 4 wt. %, more preferably not more than 1 wt. %, most preferably not more than 0.2 wt. %, for example not more than 0.04 wt. %, based on the total weight of the corresponding composition.
  • the amount of (B) is at least 0.0001 wt. %, more preferably at least 0.0005 wt. %, most preferably at least 0.002 wt. %, for example at least 0.01 wt. %, based on the total weight of the corresponding composition.
  • the polyamine or a salt thereof (B) can have different weight average molecular weights.
  • the weight average molecular weight of (B) is preferably at least 1,000, more preferably at least 5,000, most preferably at least 15,000, for example at least 30,000.
  • the weight average molecular weight of (B) is preferably not more than 600,000, more preferably not more than 250,000, most preferably not more than 120,000, for example not more than 70,000.
  • the weight average molecular weight can be determined by standard gel permeation chromatography (GPC) known to the person skilled in the art.
  • the solubility of (B) in an aqueous medium can vary within a wide range.
  • the solubility of (B) in water at pH 7 at 25° C. under atmospheric pressure is preferably at least 0.1 g/L, more preferably at least 0.5 g/L, most preferably at least 1 g/L, for example at least 4 g/L.
  • Said solubility can be determined by evaporating the solvent and measuring the remaining mass in the saturated solution.
  • these salts preferably comprise cations (M) and such polyamines as anions.
  • Cations (M) can be any cation other than proton (hydrogen cation).
  • cations (M) can be of the same chemical nature or a mixture of cations of different chemical nature.
  • cations (M) of the same chemical nature are preferred.
  • cation (M) is a metal cation, an inorganic or organic ammonium cation, a phosphonium cation, a heterocyclic cation, or a homocyclic cation.
  • cation (M) is a metal cation, an inorganic or organic ammonium cation. Most preferably, cation (M) is an alkali metal cation, an earth alkali metal cation, or an NH 4 + cation. In particular, cation (M) is an alkali metal cation. For example, cation (M) is an Na + cation.
  • a heterocyclic cation is a cationic cyclic compound with two different chemical elements as ring members atoms.
  • a homocyclic cation is a cationic cyclic compound with one chemical element as ring members atoms.
  • An organic ammonium cation is a cationic organic compound containing a positively charged, tetravalent nitrogen atom.
  • An inorganic ammonium cation is a cationic inorganic compound containing a positively charged, tetravalent nitrogen atom.
  • (B) can comprise one or more types of pendant groups (Y).
  • (B) comprises preferably 1 to 4 types, more preferably 1 or 2 types, most preferably 2 types of pendant groups (Y).
  • (B) can comprise pendant groups (Y) in different forms of bonding between (B) and (Y).
  • (B) comprises at least one type of (Y) which is covalently bound to the nitrogen atoms on the backbone of (B). More preferably, all types of (Y) comprised in (B) are covalently bound to the nitrogen atoms on the backbone of (B). Most preferably, (B) comprises two types of (Y) which are covalently bound to the nitrogen atoms on the backbone of (B).
  • the backbone of (B) is defined as the main chain of (B), i.e. that chain of (B), to which all other chains, long or short or both, may be regarded as being pendant.
  • the percentage (% YN) of pendant groups (Y) comprised in (B) which are covalently bound to the nitrogen atoms on the backbone of (B) can vary between 0% and 100%. Said percentage is referred to as (% YN) and is preferably at least 40%, more preferably at least 60%, most preferably at least 70%, for example at least 80%. (% YN) is preferably not more than 99%, more preferably not more than 97%, most preferably not more than 95%, for example not more than 90%.
  • the percentage (% NY) of nitrogen atoms on the backbone of (B) which are substituted with pendant group (Y) can vary between 0% and 100%. Said percentage is referred to as (% NY) and is preferably at least 40%, more preferably at least 60%, most preferably at least 70%, for example at least 80%. (% NY) is preferably not more than 99%, more preferably not more than 97%, most preferably not more than 95%, for example not more than 90%.
  • the percentages (% YN) and (% NY) can be determined using NMR techniques, for example those NMR techniques as described in EP 1 702 015 A1 for determining the degree of branching.
  • (Y) can be of any chemical nature.
  • (Y) is preferably an alkyl, aryl, alkylaryl, or arylalkyl group comprising at least one moiety (Z).
  • (Y) is more preferably an alkyl, most preferably a C 1 to C 15 alkyl, particularly a C 1 to C 5 alkyl, for example a methyl group comprising at least one moiety (Z).
  • (Y) is the pendant group (Y1) comprising one moiety (Z), wherein m is an integer from 1 to 15, more preferably an integer from 1 to 5, most preferably 1.
  • (Y) is an N,N-dialkylaminoalkyl group comprising at least one moiety (Z), preferably an aminoalkyl group which is N,N-disubstituted with an alkyl group comprising comprising at least one moiety (Z), more preferably a C 2 to C 5 aminoalkyl group which is N,N-disubstituted with a C 1 to C 5 alkyl group comprising the moiety (Z), most preferably an aminoethyl group which is N,N-disubstituted with an methyl group comprising the moiety (Z).
  • (Y) is the pendant group (Y2) comprising two moieties (Z), wherein n is an integer from 2 to 15, more preferably an integer from 2 to 5, most preferably 2, and wherein p is an integer from 1 to 15, more preferably an integer from 1 to 5, most preferably 1.
  • (B) is a polyalkyleneimine or a salt thereof comprising pendant group (Y1) and/or (Y2), wherein
  • (B) is a polyethyleneimine or a salt thereof comprising pendant group (Y1) and/or pendant group (Y2), wherein
  • (B) is a salt of a polyethyleneimine comprising pendant group (Y1) and pendant group (Y2), wherein
  • each type of (Y) comprises at least one type of moieties (Z).
  • Each type of (Y) comprises preferably 1 to 4 types, more preferably 1 or 2 types, most preferably 1 type of moieties (Z).
  • each pendant group (Y) comprises at least one moiety (Z).
  • Each pendant group (Y) comprises preferably 1 to 10, more preferably 1 to 4, most preferably 1 or 2 moieties (Z).
  • (Z) is a carboxylate (—COOR 1 ), sulfonate (—SO 3 R 2 ), sulfate (—O—SO 3 R 3 ), phosphonate (—P( ⁇ O)(OR 4 )(OR 5 )), or phosphate (—O—P( ⁇ O)(OR 6 )(OR 7 )), carboxylic acid (—COOH), sulfonic acid (—SO 3 H), sulfuric acid (—O—SO 3 ⁇ ), phosphonic acid (—P( ⁇ O)(OH) 2 ), phosphoric acid (—O—P( ⁇ O)(OH) 2 ) moiety, or their deprotonated forms, wherein
  • R 1 is preferably alkyl, more preferably C 1 to C 20 alkyl, most preferably C 1 to C 6 alkyl.
  • R 2 is preferably alkyl, more preferably C 1 to C 20 alkyl, most preferably C 1 to C 6 alkyl.
  • R 3 is preferably alkyl, more preferably C 1 to C 20 alkyl, most preferably C 1 to C 6 alkyl.
  • R 4 is preferably alkyl, more preferably C 1 to C 20 alkyl, most preferably C 1 to C 6 alkyl.
  • R 5 is preferably alkyl, more preferably C 1 to C 20 alkyl, most preferably C 1 to C 6 alkyl.
  • R 6 is preferably alkyl, more preferably C 1 to C 20 alkyl, most preferably C 1 to C 6 alkyl.
  • R 7 is preferably alkyl, more preferably C 1 to C 20 alkyl, most preferably C 1 to C 6 alkyl.
  • (Z) is a carboxylic acid (—COOH), sulfonic acid (—SO 3 H), sulfuric acid (—O—SO 3 ⁇ ), phosphonic acid (—P( ⁇ O)(OH) 2 ), phosphoric acid (—O—P( ⁇ O)(OH) 2 ) moiety, or their deprotonated forms. More preferably, (Z) is a carboxylic acid (—COOH), sulfonic acid (—SO 3 H) moiety, or their deprotonated forms. Most preferably, (Z) is a carboxylic acid (—COOH) moiety, or its deprotonated form. For example, (Z) is the deprotonated form of a carboxylic acid (—COOH) moiety.
  • the CMP composition contains an aqueous medium (C).
  • (C) can be of one type or a mixture of different types of aqueous media.
  • the aqueous medium (C) can be any medium which contains water.
  • the aqueous medium (C) is a mixture of water and an organic solvent miscible with water (e.g. an alcohol, preferably a C 1 to C 3 alcohol, or an alkylene glycol derivative). More preferably, the aqueous medium (C) is water. Most preferably, aqueous medium (C) is de-ionized water.
  • the amount of (C) is (100-x) % by weight of the CMP composition.
  • the CMP composition of the invention can further optionally contain at least one corrosion inhibitor (D), for example two corrosion inhibitors.
  • Preferred corrosion inhibitors are diazoles, triazoles, tetrazoles and their derivatives, for example benzotriazole or tolyltriazole.
  • Other examples for preferred corrosion inhibitors are acetylene alcohols, or a salt or an adduct of an amine and a carboxylic acid comprising an amide moiety.
  • (D) can be contained in varying amounts.
  • the amount of (D) is not more than 10 wt. %, more preferably not more than 5 wt. %, most preferably not more than 2.5 wt. %, for example not more than 1.5 wt. %, based on the total weight of the corresponding composition.
  • the amount of (D) is at least 0.01 wt. %, more preferably at least 0.1 wt. %, most preferably at least 0.3 wt. %, for example at least 0.8 wt. %, based on the total weight of the corresponding composition.
  • the CMP composition of the invention can further optionally contain at least one oxidizing agent (E), for example one oxidizing agent.
  • the oxidizing agent is a compound which is capable of oxidizing the to-be-polished substrate or one of its layers.
  • (E) is a pertype oxidizer. More preferably, (E) is a peroxide, persulfate, perchlorate, perbromate, periodate, permanganate, or a derivative thereof. Most preferably, (E) is a peroxide or persulfate. Particularly, (E) is a peroxide.
  • (E) is hydrogen peroxide.
  • (E) can be contained in varying amounts.
  • the amount of (E) is not more than 20 wt. %, more preferably not more than 10 wt. %, most preferably not more than 5 wt. %, for example not more than 2 wt. %, based on the total weight of the corresponding composition.
  • the amount of (E) is at least 0.05 wt. %, more preferably at least 0.1 wt. %, most preferably at least 0.5 wt. %, for example at least 1 wt. %, based on the total weight of the corresponding composition.
  • the CMP composition of the invention can further optionally contain at least one complexing agent (F), for example one complexing agent.
  • the complexing agent is a compound which is capable of complexing the ions of the to-be-polished substrate or of one of its layers.
  • (F) is a carboxylic acid having at least two COOH groups, an N-containing carboxylic acid, N-containing sulfonic acid, N-containing sulfuric acid, N-containing phosphonic acid, N-containing phosphoric acid, or a salt thereof. More preferably, (F) is a carboxylic acid having at least two COOH groups, an N-containing carboxylic acid, or a salt thereof. Most preferably, (F) is an amino acid, or a salt thereof.
  • (F) is glycine, serine, alanine, hystidine, or a salt thereof.
  • (F) is ethylenediaminetetraacetic Acid (EDTA), Nitrolotriacetic Acid (NTA), Diethylene Triaminepentaacedic Acid (DTPA), Hydroxyethylethylenediaminetriacetic Acid (HEDTA), Methylglycinediacetic Acid (MGDA) or a derivative thereof.
  • (F) can be contained in varying amounts.
  • the amount of (F) is not more than 20 wt. %, more preferably not more than 10 wt. %, most preferably not more than 5 wt. %, for example not more than 2 wt. %, based on the total weight of the corresponding composition.
  • the amount of (F) is at least 0.05 wt. %, more preferably at least 0.1 wt. %, most preferably at least 0.5 wt. %, for example at least 1 wt. %, based on the total weight of the corresponding composition.
  • the properties of the CMP compositions used or according to the invention respectively may depend on the pH of the corresponding composition.
  • the pH value of the compositions used or according to the invention respectively is in the range of from 3 to 10, more preferably from 4.5 to 7.5, and most preferably from 5.5 to 6.5.
  • the CMP compositions used or according to the invention respectively may also contain, if necessary, various other additives, including but not limited to pH adjusting agents, stabilizers, surfactants etc.
  • Said other additives are for instance those commonly employed in CMP compositions and thus known to the person skilled in the art. Such addition can for example stabilize the dispersion, or improve the polishing performance, or the selectivity between different layers.
  • said additive can be contained in varying amounts.
  • the amount of said additive is not more than 10 wt. %, more preferably not more than 1 wt. %, most preferably not more than 0.1 wt. %, for example not more than 0.01 wt. %, based on the total weight of the corresponding composition.
  • the amount of said additive is at least 0.0001 wt. %, more preferably at least 0.001 wt. %, most preferably at least 0.01 wt. %, for example at least 0.1 wt. %, based on the total weight of the corresponding composition.
  • the CMP composition of the invention comprises:
  • the CMP composition of the invention comprises:
  • the CMP composition of the invention comprises:
  • the CMP composition of the invention comprises:
  • the CMP composition of the invention comprises:
  • the CMP composition of the invention comprises:
  • Processes for preparing CMP compositions are generally known. These processes may be applied to the preparation of the CMP composition of the invention. This can be carried out by dispersing or dissolving the above-described components (A) and (B) in the aqueous medium (C), preferably water, and optionally by adjusting the pH value through adding an acid, a base, a buffer or an pH adjusting agent.
  • the customary and standard mixing processes and mixing apparatuses such as agitated vessels, high shear impellers, ultrasonic mixers, homogenizer nozzles or counterflow mixers, can be used.
  • the CMP composition of the invention is preferably prepared by dispersing the particles (A), dispersing and/or dissolving a polymeric polyamine or a salt thereof (B) in the aqueous medium (C).
  • the polishing process is generally known and can be carried out with the processes and the equipment under the conditions customarily used for the CMP in the fabrication of wafers with integrated circuits. There is no restriction on the equipment with which the polishing process can be carried out.
  • typical equipment for the CMP process consists of a rotating platen which is covered with a polishing pad. Also orbital polishers have been used.
  • the wafer is mounted on a carrier or chuck.
  • the side of the wafer being processed is facing the polishing pad (single side polishing process).
  • a retaining ring secures the wafer in the horizontal position.
  • the larger diameter platen is also generally horizontally positioned and presents a surface parallel to that of the wafer to be polished.
  • the polishing pad on the platen contacts the wafer surface during the planarization process.
  • the wafer is pressed onto the polishing pad.
  • Both the carrier and the platen are usually caused to rotate around their respective shafts extending perpendicular from the carrier and the platen.
  • the rotating carrier shaft may remain fixed in position relative to the rotating platen or may oscillate horizontally relative to the platen.
  • the direction of rotation of the carrier is typically, though not necessarily, the same as that of the platen.
  • the speeds of rotation for the carrier and the platen are generally, though not necessarily, set at different values.
  • the CMP composition of the invention is usually applied onto the polishing pad as a continuous stream or in dropwise fashion. Customarily, the temperature of the platen is set at temperatures of from 10 to 70° C.
  • the load on the wafer can be applied by a flat plate made of steel for example, covered with a soft pad that is often called backing film. If more advanced equipment is being used a flexible membrane that is loaded with air or nitrogen pressure presses the wafer onto the pad. Such a membrane carrier is preferred for low down force processes when a hard polishing pad is used, because the down pressure distribution on the wafer is more uniform compared to that of a carrier with a hard platen design. Carriers with the option to control the pressure distribution on the wafer may also be used according to the invention. They are usually designed with a number of different chambers that can be loaded independently from each other.
  • wafers with integrated circuits comprising a metal layer can be obtained which have an excellent functionality.
  • the CMP composition of the invention can be used in the CMP process as ready-to-use slurry, they have a long shelf-life and show a stable particle size distribution over long time. Thus, they are easy to handle and to store. They show an excellent polishing performance, particularly with regard to material removal rate (MRR), static etch rates (SER), and selectivity.
  • MRR material removal rate
  • SER static etch rates
  • selectivity selectivity
  • the friction force could be minimized, and thus the erosion could be strongly reduced when a substrate comprising a copper layer is polished. Since the amounts of its components are held down to a minimum, the CMP composition according to the invention respectively can be used in a cost-effective way, and can be prepared in a concentrated version (e.g., 10 ⁇ ) which can later be diluted to the proper concentration at the polishing site to reduce distribution costs.
  • a concentrated version e.g. 10 ⁇
  • the pH value is measured with a pH electrode (Schott, blue line, pH 0-14/ ⁇ 5 . . . 100° C./3 mol/L sodium chloride).
  • the metal-hMSER hot metal ion static etching rate with regard to metal-containing substrate
  • Cu-cSER cold static etching rate of a copper layer
  • Cu-hSER hot static etching rate of a copper layer
  • Cu-hCSER hot copper ion static etching rate with regard to a copper layer
  • Cu-hCSER hot copper ion static etching rate with regard to a copper layer
  • the friction force is defined as the coefficient of friction which is the ratio of friction to normal force.
  • Silica particles used as particles (A) are of NexSilTM (Nyacol) type.
  • NexSilTM 85K are potassium-stabilized colloidal silica having a typical particle size of 50 nm and a typical surface area of 55 m 2 /g.
  • Trilon® P which is commercially available from BASF SE. Trilon® P has a molecular weight of 50,000, a degree of substitution of 80% and a negative charge density. Trilon® P is a carboxy-methylated polyethyleneimine which is represented by the below formula:
  • DF 40 N
  • Table speed 150 rpm Platen speed 150 rpm
  • slurry flow 200 ml/min 20 s conditioning, 1 min polishing time, IC1000 pad, diamond conditioner (3M).
  • the pad is conditioned by several sweeps, before a new type of CMP composition is used for CMP.
  • For the determination of removal rates at least 3 wafers are polished and the data obtained from these experiments are averaged.
  • the CMP composition is stirred in the local supply station.
  • the difference of weight can be converted into the difference of film thickness since the density (8.94 g/cm 3 for copper) and the surface area of the polished material are known. Dividing the difference of film thickness by the polishing time provides the values of the material removal rate.
  • Dishing and erosion are determined as follows: Evaluation of recesses on the copper wiring (dishing) or dielectric isolate (erosion) was carried out by means of a copper patterned wafer. Polishing was carried out until copper at the area portion was completed polished and removed, and the height difference between the copper wiring portion and the barrier layer, as well as the height difference between dielectric isolate and the barrier layer on field dielectric, were measured by means of a profiler (Ambios XP2, manufactured by Ambios Technology, Inc., part of KLA Tencole Company) which is a contact type surface measuring apparatus.
  • a profiler Ambios XP2, manufactured by Ambios Technology, Inc., part of KLA Tencole Company
  • Example 1-9 Compositions of the Invention
  • Comparative Examples V1-V6 Comparative Compositions
  • aqueous dispersion containing the components as listed in Table 1 was prepared, furnishing the CMP compositions of the examples 1-9 and the comparative examples V1-V6.
  • the pH was adjusted to 6 with HNO 3 if the pH was too high or KOH if the starting pH was too low.
  • Example 1 Example 1 (B) 0.5 wt. % 0.5 wt. % 0.5 wt. % 0.5 wt. % 0.5 wt. % Corrosion — — — — Tolyltriazole Tolyltriazole inhibitor (D) 0.0033 wt. % 0.013 wt. % Further — — — — — — — — corrosion inhibitor (D) Oxidizing H 2 O 2 H 2 O 2 H 2 O 2 H 2 O 2 H 2 O 2 H 2 O 2 O 2 O 2 O 2 O 2 agent (E) 1 wt. % 1 wt.
  • Example 6 Example 7
  • Example 8 Example 9 Particles (A) NexSil TM 85K NexSil TM 85K NexSil TM 85K NexSil TM 85K NexSil TM 85K NexSil TM 85K 0.1 wt. % 0.1 wt. % 0.1 wt. % 0.1 wt. % 0.1 wt.
  • Example 1 Example 1 (B) 0.05 wt. % 0.1 wt. % 0.5 wt. % 1 wt. % Corrosion 1,2,4-Triazole 1,2,4-Triazole 1,2,4-Triazole 1,2,4-Triazole 1,2,4-Triazole inhibitor (D) 0.2 wt. % 0.2 wt. % 0.2 wt. % 0.2 wt. % 0.2 wt. % 0.2 wt. % 0.2 wt. % 0.2 wt.
  • FIG. 1 shows the reduction of friction force during polishing an 8′′ copper wafer (measured on GnP polisher POLI-500AC):
  • the dashed line in FIG. 1 represents Comparative Example V6.

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