TWM647715U - Clamp-type transfer molding equipment - Google Patents

Abstract

The invention discloses a clamping type transfer molding equipment, which includes a roller fixing device and a clamp spaced apart from the roller fixing device. The roller fixing device is used to fix a metal roller, and the surface of the metal roller is covered with a base plate, and the clamp can be used to detachably clamp the corresponding two sides of the base plate so that the base plate is firmly placed on the metal roller. The base plate is square, and the side length of the base plate is between 1.0 meters and 1.5 meters, while the length of the metal roller is between 1.6 meters and 1.8 meters.

Description

Clamp-on transfer molding equipment

The invention relates to a transfer molding device, in particular to a clamping transfer molding device.

When the existing transfer substrate is subjected to photolithography exposure, if a staggered photolithography pattern is to be formed, the transfer substrate is usually turned and then exposed again. For example, the transfer substrate will be exposed along an X-axis direction first, and then exposed along a Y-axis direction perpendicular to the X-axis to form a staggered exposure pattern.

However, since the existing transfer substrate still needs to be positioned again after turning, there is often a problem of poor subsequent exposure yield caused by positioning errors. Therefore, how to overcome the above-mentioned defects through structural design improvements has become one of the important issues to be solved in this project.

The embodiment of this invention provides a clamp-type transfer molding device to address the shortcomings of the existing technology, which can effectively improve the possible defects of the existing transfer substrate.

This creative embodiment discloses a clamping transfer molding equipment, which includes: a roller fixing device used to fix a metal roller, and the surface of the metal roller is covered with a substrate, and the metal roller is a chromium metal Roller; wherein, the base plate is square, and the side length of the base plate is between 1.0 meters and 1.5 meters, and the length of the metal roller is between 1.6 meters and 1.8 meters; and a clamp is arranged at intervals. On the roller fixing device, the clamp can be used to detachably clamp the corresponding two sides of the base plate, so that the base plate is stably placed on the metal roller.

One of the beneficial effects of this invention is that the clamp-type transfer molding equipment provided by this invention can be arranged on the roller fixing device at intervals through "the clamps, and the clamps can be used to The technical solution is to detachably clamp the corresponding two sides of the substrate so that the substrate is firmly placed on the metal roller, so as to reduce the problem of poor subsequent exposure yield caused by positioning errors.

In order to further understand the characteristics and technical content of this creation, please refer to the following detailed description and diagrams about this creation. However, the diagrams provided are only for reference and illustration and are not used to limit this creation.

The following is a specific embodiment to illustrate the implementation of the "clip-type transfer molding equipment" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this description can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. In addition, the accompanying drawings of this creation are only simple illustrations and are not depictions based on actual size, as stated in advance. In addition, if it is pointed out below that please refer to a specific diagram or as shown in a specific diagram, it is only used to emphasize the subsequent description. Most of the relevant content mentioned appears in the specific diagram, but does not Reference in this subsequent description is limited to the specific drawings described. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of protection of the present invention.

It should be understood that although terms such as “first”, “second” and “third” may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another component or one signal from another signal. In addition, the term "or" used in this article shall include any one or combination of more of the associated listed items depending on the actual situation.

Please refer to Figures 1 to 3, which are embodiments of the present invention. It should be noted that the drawings corresponding to this embodiment and the related quantities and shapes mentioned in this embodiment are only used for specific explanation. The implementation method of this creation is to facilitate understanding of the content of this creation, but is not used to limit the scope of protection of this creation.

As shown in Figure 1, this creative embodiment provides a clamping transfer molding equipment 100, which includes: a roller fixing device 1, a clamp 2, a photoresist spraying device 3, a moving device 4, and a soft bake Device 5, a photolithography device 6 and a dust-free chamber 7, but the invention is not limited to this. For example, in other embodiments not shown in the present invention, the clamping transfer molding equipment 100 may not include the soft baking device 5 and the dust-free cavity 7 .

For the convenience of explanation and understanding, the roller fixing device 1, the clamp 2, the photoresist spraying device 3, the moving device 4, the soft baking device 5, and the photolithography device 6 will be described in order. And the specific structure of the dust-free chamber 7, and the relative position and operating relationship between the above-mentioned devices will be explained in a timely manner.

As shown in Figure 1, the roller fixing device 1 is used to fix a metal roller 200 covered with a base plate 300, and the roller fixing device 1 includes a rotating mechanism 11 and a clamping device installed on the rotating mechanism 11. Institutions12. Wherein, the rotating mechanism 11 can be used to be installed on the metal roller 200, and the clamping mechanism 12 is used to clamp the metal roller 200, and the metal roller is a chromium metal roller. Furthermore, when the rotating mechanism 11 operates, the rotating mechanism 11 will rotate the clamping mechanism 12 so that the metal roller 200 is rotated by the clamping mechanism 12 .

Furthermore, the clamping mechanism 12 includes a circular elastic collet (not shown), and the clamping mechanism 12 is driven by hydraulic pressure, so that the circular elastic collet can clamp all The metal roller 200 is described, but the invention is not limited thereto. For example, the circular elastic collet can also be a lathe chuck or other clamps, and the clamping mechanism 12 can also be driven by air pressure or manually, so that the circular elastic collet can clamp all the objects. The metal roller 200 is described.

It should be noted that the rotating mechanism 11 further includes a speed controller (not shown), which can be used to rotate the metal roller 200 at a speed between 2900 rpm and 4500 rpm. The spin-drying speed rotates, but this creation is not limited to this. For example, in other embodiments not shown in the present invention, the speed controller can also be used to make the metal roller 200 operate at a wetting speed ranging from 1 revolution per minute (RPM) to 25 revolutions per minute. Turn.

It should be supplemented that in this embodiment, the substrate 300 is mainly made of polyethylene terephthalate (PET), and the substrate 300 is square, and the substrate 300 is The side length is between 1.0 meters and 1.5 meters, but this creation is not limited to this. For example, in other embodiments of the present invention, the substrate 300 can also be made of any resin with transparent characteristics. In addition, in this embodiment, the length of the metal roller 200 is between 1.6 meters and 1.8 meters, and the metal roller 200 is preferably a chromium metal roller.

The roller fixing device 1 has been introduced so far, and the clamp 2 will be introduced below. As shown in FIGS. 1 to 3 , the clamps 2 are arranged at intervals on the roller fixing device 1 , and the clamps 2 can be used to detachably clamp the corresponding two sides of the base plate 300 so that the The base plate 300 is firmly mounted on the metal roller 200 .

Furthermore, in this embodiment, the clamp 2 is in the shape of a long strip, and the length of the clamp 2 is slightly longer than the side length of the substrate 300 , and the length of the clamp 2 is shorter than the length of the metal roller 200 . length. In addition, in other embodiments not shown in the present invention, the clamp 2 can also be replaced by double-sided tape or ordinary tape, but the present invention is not limited thereto.

The fixture 2 has been introduced to this point, and the photoresist spraying device 3 will be introduced below. As shown in Figure 1, the photoresist spraying device 3 is disposed at intervals on the roller fixing device 1, and the photoresist spraying device 3 can be used to spray a photoresist liquid on the substrate 300 (not shown in the figure) A photoresist layer is formed accordingly (not shown). In this embodiment, the photoresist liquid is formed of a positive photoresist, and the photoresist liquid is mainly made of phenol-formaldehyde resin, but the invention is not limited thereto. For example, the photoresist liquid can also be made of positive photoresist materials such as epoxy resin.

Specifically, the photoresist spraying device 3 includes a photoresist groove 31 and a nozzle 32 that are spaced apart from the roller fixing device 1, and the nozzle 32 is connected to the photoresist groove 31, and the The nozzle 32 can be used to spray the photoresist liquid. The photoresist liquid is stored in the photoresist groove 31 , and the nozzle 32 can extract the photoresist liquid from the photoresist groove 31 and spray the photoresist liquid on the coating. The substrate 300 is on the metal roller 200.

It should be noted that in this embodiment, the nozzle 32 is a piezoelectric nozzle, but the invention is not limited thereto. For example, in other embodiments, the nozzle 32 may also be a continuous nozzle. In more detail, compared with the existing coating nozzle, when the nozzle 32 is a piezoelectric nozzle, the shape of the photoresist liquid when forming droplets is more regular, and when the photoresist liquid is sprayed, the shape of the droplets is more regular. can be disposed on the substrate 300 more accurately.

In addition, when the nozzle 32 is a piezoelectric nozzle, the photoresist liquid does not need to be heated, so the photoresist liquid is not prone to chemical changes, and since the temperature of the photoresist liquid continues to remain in a stable state, Even after the photoresist liquid is spray-printed continuously for a long time, the viscosity and surface tension of the photoresist liquid remain relatively stable, thereby ensuring uniformity when the photoresist liquid is coated on the substrate 300 promote.

When the nozzle 32 is a continuous nozzle, the speed at which the photoresist liquid forms droplets increases, thereby increasing the spraying speed of the nozzle 32 . It should be noted that when the nozzle 32 is a piezoelectric nozzle or a continuous nozzle, the nozzle 32 is also a solvent-type nozzle. Otherwise, the nozzle 32 will be easily corroded and its service life will be reduced.

Specifically, when the photoresist spraying device 3 sprays the photoresist liquid on the substrate 300 covered with the metal roller 200, the metal roller 200 is clamped by the roller fixing device 1 and Rotate so that the substrate 300 is evenly sprayed with the photoresist liquid, and then the photoresist layer disposed on the substrate 300 is formed.

The photoresist spraying device 3 has been introduced so far, and the moving device 4 will be introduced below. As shown in FIG. 1 , the moving device 4 is arranged at intervals on the roller fixing device 1 , and is connected and can be used to move the nozzle 32 . When the nozzle 32 sprays the substrate 300 covered with the metal roller 200, the moving device 4 can be used to move the nozzle 32 relative to the metal roller 200, thereby causing The substrate 300 can be coated uniformly.

The mobile device 4 has been introduced to this point, and the soft baking device 5 will be introduced below. As shown in Figure 1, the soft baking device 5 is arranged at intervals on the roller fixing device 1. The soft baking device 5 includes a plurality of soft baking lamps 51, and each of the soft baking lamps 51 is an infrared lamp. , a near-infrared lamp, or a xenon lamp, and each of the soft baking lamps 51 of the soft baking device 5 is preferably a near-infrared lamp in this embodiment. The soft baking device 5 can be used to bake the photoresist layer and reduce the solvent content of the photoresist layer. In more detail, the soft baking device 5 can be used to volatilize the solvent and excess moisture of the photoresist layer from the photoresist layer, and reduce the content of the solvent in the photoresist layer. At least reduce it to about 5%.

The soft baking device 5 has been introduced so far, and the photolithography device 6 will be introduced below. As shown in FIG. 1 , the photolithography device 6 is spaced apart from the soft baking device 5 , and the photolithography device 6 includes a plurality of photolithography light sources 61 and a plurality of photolithography light sources 61 spaced apart from each other. A photomask (not shown in the figure), and the photolithography device 6 can be used to irradiate part of the photoresist layer on the substrate 300, thereby correspondingly forming a patterned photoresist layer (not shown in the figure). Among them, the plurality of photolithography light sources 61 include a plurality of light-emitting diodes (not shown), which are used to emit ultraviolet light with a wavelength of 248 nanometers to 365 nanometers, and the patterned photoresist layer is formed with multiple photolithography pattern.

Furthermore, the ultraviolet light emitted by the plurality of photolithography light sources 61 of the photolithography device 6 can pass through the photomask and correspondingly form a patterned light, and the patterned light irradiates part of the photoresist. When layering, the metal roller 200 is clamped and rotated by the roller fixing device 1, so that part of the photoresist layer is uniformly illuminated by the patterned light source, and then the pattern is formed correspondingly on the photoresist layer. photoresist layer.

It should be noted that when the substrate 300 is irradiated by multiple photolithography light sources 61, the clamp 2 will be removed, and then the substrate 300 will be turned 90 degrees and then installed on the substrate 300 with the clamp 2 again. The metal roller 200 is irradiated by the plurality of photolithography light sources 61 again, thereby forming the patterned photoresist layer with interlaced photolithography patterns.

The photolithography apparatus 6 has been introduced to this point, and the dust-free chamber 7 will be introduced below. As shown in Figure 1, the roller fixing device 1, the clamp 2, the photoresist spraying device 3, the moving device 4, the soft baking device 5 and the photolithography device 6 are arranged on the wireless In the dust-free chamber 7, the grade of the dust-free chamber 7 is US Federal Standard Class 1 to US Federal Standard Class 500 in this embodiment. The dust-free chamber 7 is used to prevent the substrate 300 from being adhered by pollution sources in the environment.

[Beneficial effects of the embodiment]

One of the beneficial effects of this invention is that the clamp-type transfer molding equipment 100 provided by this invention can be arranged at intervals on the roller fixing device 1 through "the clamp 2, and the clamp 2 A technical solution that can be used to detachably clamp the corresponding two sides of the substrate 300 so that the substrate 300 is firmly placed on the metal roller 200" to reduce poor subsequent exposure yields caused by positioning errors. problem.

The contents disclosed above are only preferred and feasible embodiments of this invention, and do not limit the scope of the patent application for this invention. Therefore, all equivalent technical changes made by using the description and drawings of this invention are included in the application for this invention. within the scope of the patent.

100: Clamp-type transfer molding equipment 1:Roller fixing device 11:Rotating mechanism 12: Clamping mechanism 2: Fixture 3: Photoresist spraying device 31: Photoresist groove 32:Nozzle 4:Mobile device 5: Soft baking device 51:Soft baking lamp 6: Lithography device 61: Lithography light source 7: Dust-free chamber 200:Metal roller 300:Substrate

Figure 1 is a three-dimensional schematic diagram of a clamping transfer molding device according to an embodiment of this invention.

Figure 2 is a three-dimensional schematic diagram of a clamp clamping a substrate according to an embodiment of this invention.

Figure 3 is an exploded schematic diagram of the clamp, metal roller and substrate according to the embodiment of the present invention.

100: Clamp-type transfer molding equipment

1:Roller fixing device

11:Rotating mechanism

12: Clamping mechanism

2: Fixture

3: Photoresist spraying device

31: Photoresist groove

32:Nozzle

4:Mobile device

5: Soft baking device

51:Soft baking lamp

6: Lithography device

61: Lithography light source

7: Dust-free chamber

200:Metal roller

300:Substrate

Claims (10)

A clamping type transfer molding equipment, which includes: A roller fixing device used to fix a metal roller, and the surface of the metal roller is covered with a base plate; wherein the base plate is square, and the side length of the base plate is between 1.0 meters and 1.5 meters, and the The length of the metal roller is between 1.6 meters and 1.8 meters, and the metal roller is a chromium metal roller; and A clamp is provided at intervals on the roller fixing device, and the clamp can be used to detachably clamp the corresponding two sides of the base plate so that the base plate is stably placed on the metal roller. The clamp-type transfer molding equipment according to claim 1, wherein the clamp-type transfer molding equipment further includes a dust-free cavity, and the roller fixing device and the clamp are disposed in the In a dust-free chamber. The clamp-type transfer molding equipment according to claim 1, wherein the clamp-type transfer molding equipment further includes a photoresist spraying device arranged at intervals on the roller fixing device, and the photoresist spraying device is spaced apart from the roller fixing device, and the photoresist spraying device is The spray resist coating device can be used to spray a photoresist liquid on the substrate. The clamp-type transfer molding equipment of claim 3, wherein the photoresist spraying device includes a photoresist groove and a nozzle connected to the photoresist groove, and the photoresist groove can be used to The photoresist liquid is accommodated, and the nozzle can be used to draw the photoresist liquid from the photoresist tank and spray it on the substrate. The clamp-type transfer molding equipment according to claim 4, wherein the clamp-type transfer molding equipment further includes a moving device connected to and capable of moving the nozzle. The clamp-type transfer molding equipment according to claim 1, wherein the clamp-type transfer molding equipment further includes a soft baking device, which is spaced apart from the roller fixing device, and the soft baking device The device includes a plurality of soft baking lamps, and each of the soft baking lamps is an infrared lamp, a near-infrared lamp, or a xenon lamp. The clamp-type transfer molding equipment according to claim 6, wherein the clamp-type transfer molding equipment further includes a photolithography device, which is spaced apart from the soft baking device, and the photolithography device The device includes a plurality of photolithography light sources, and the photolithography device can be used to illuminate the substrate with a photolithography light. The clamping type transfer molding equipment according to claim 1, wherein the roller fixing device further includes a rotating mechanism installed on the metal roller, and the rotating mechanism is used to make the metal roller mediate Rotate at a drying speed of 2900 rpm to 4500 rpm. The clamping type transfer molding equipment according to claim 1, wherein the roller fixing device further includes a rotating mechanism installed on the metal roller, and the rotating mechanism is used to make the metal roller mediate Rotate at a soaking speed of 1 rpm to 25 rpm. The clamp-type transfer molding equipment according to claim 8, wherein the roller fixing device includes a clamping mechanism, the clamping mechanism is installed on the rotating mechanism, and the clamping mechanism is used to clamp Hold the metal roller; wherein, when the rotating mechanism operates, the rotating mechanism will rotate the clamping mechanism, so that the metal roller is rotated by the clamping mechanism.

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