TWM642348U - Platform moving device - Google Patents

Abstract

This creation relates to a stage moving device, including: a base; a stage for carrying a substrate, which is rotatably arranged on the base with a center line as an axis; and at least one actuating mechanism, which is arranged on the base , comprising at least one resisting member, the at least one resisting member can reciprocate relative to the stage and push against one of the outer peripheral surfaces of the stage to drive the stage to rotate, one of the at least one resisting member resists the central axis eccentric to the centerline.

Description

Stage moving device

The invention is related to mobile devices, in particular to a carrier mobile device.

In semiconductor processing or inspection operations, a movable stage is often used to carry a workpiece so as to move or rotate the workpiece to achieve automatic and precise alignment.

However, most of the known carriers are driven by screw, ratchet or rotating shaft to rotate. The structure is complex and requires a large configuration space, which leads to problems such as difficult equipment assembly, high production cost and large volume. There is an urgent need for improvement. Shortcomings.

Therefore, it is necessary to provide a novel and progressive carrier moving device to solve the above problems.

The main purpose of this creation is to provide a stage moving device, which has a simple structure and is conducive to thinning.

To achieve the above object, the invention provides a stage moving device, comprising: a base; a stage for carrying a substrate, rotatably arranged on the base with a center line as an axis; and at least one actuating mechanism, Located on the base, including at least one resisting piece, the at least one pushing piece can reciprocate relative to the platform and push against one of the outer peripheral surfaces of the platform to drive the platform to rotate, the at least one pushing piece A thrust central axis is eccentric to the central line.

The following examples are only used to illustrate the possible implementation of this creation, but it is not intended to limit the scope of protection of this creation, and it will be described first.

Please refer to FIGS. 1 to 7 , which show a preferred embodiment of the present invention. The stage moving device 1 of the present invention includes a base 10 , a stage 20 and at least one actuating mechanism 30 .

The platform 20 is used to carry a substrate 2 and is rotatably arranged on the base 10 with a center line C as an axis; A resisting member 31 can reciprocate relative to the carrier 20 and push against an outer peripheral surface of the carrier 20 to drive the carrier 20 to rotate. One of the at least one resisting member 31 is eccentric to the central axis A of the resisting center Line C. Thus, the at least one actuating mechanism 30 is located radially outside the stage 20 , which is simple in structure and helps to reduce the thickness of the stage moving device 1 .

In this embodiment, the stage 20 defines at least one radially extending line R that is vertical and passes through the centerline C, and each of the thrusting central axes A is parallel to one of the radially extending lines R, as shown in FIG. 6 , In order to resist the rotation of the stage 20 . Each of the resisting members 31 is at least partially cylindrical, and each of the resisting central axes A passes through a center of a circle of the resisting member 31; wherein a distance D between the resisting central axis A and a radially extending line R is relatively small. Preferably, it is not less than 0.3 mm and not more than 2 mm (more preferably, it is not less than 0.4 mm and not more than 1 mm), which can effectively actuate the stage 20 and avoid poor precision caused by excessive thrust. Each of the actuating mechanisms 30 is a linear motor and includes two resisting members 31 stacked along a thickness direction of the stage 20, and the two resisting members 31 of each of the actuating mechanisms 30 move synchronously to have Better thrust stability, simple structure, easy maintenance and no conversion mechanism. In other embodiments, each of the thrusting central axes can also be oblique to the radial extension line, and can be configured according to requirements; each of the thrusting pieces can also be non-cylindrical, and each of the thrusting central axes is a The center of thrust of the thrust piece.

Preferably, the number of the at least one actuating mechanism 30 is plural. Viewing from each actuating mechanism 30 toward the center line C, one of the pushing central axes is located on the right side of the radially extending line R, and the other of the actuating mechanisms The thrust central axis is located on the left side of the radially extending line R, so that the stage 20 can be controlled to rotate in different directions according to requirements, and the operation is convenient. Furthermore, the base 10 includes a rectangular accommodation portion 11, the stage 20 is disposed at a middle portion of the accommodation portion 11, and each of the actuating mechanisms 30 is disposed at a corner of the accommodation portion 11. , the configuration is compact and conducive to reducing the size of the device.

The carrier moving device 1 further includes a bearing 40, the bearing 40 includes an inner ring 41 and an outer ring 42 that can rotate relative to the inner ring 41, the inner ring 41 abuts against the carrier 20, The outer ring 42 abuts against the base 10 . The stage 20 includes a main body 21 and a ceramic ring 22 set on the main body 21. Each of the pushing members 31 can radially push the ceramic ring 22, which has good wear resistance and can be insulated to avoid testing or production. Unexpected disturbances in the process. In detail, the stage 20 further includes a first pressure plate 23 detachably connected to the body 21, the inner ring 41 is sandwiched between the body 21 and the first pressure plate 23; a second pressure plate 12 can Detachably connected to the base 10, the outer ring 42 is interposed between the second pressure plate 12 and the base 10; the first pressure plate 23 and the second pressure plate 12 respectively extend in a ring shape, which is convenient for assembly and maintenance And can rotate relatively smoothly.

The stage moving device 1 further includes a sensing unit 50, the sensing unit 50 includes a test piece 51 and a sensor 52 arranged on the base 10, the test piece 51 radially protrudes from the On the outer peripheral surface of the stage 20 , the sensor 52 can sense the relative position of the DUT 51 , for example, the rotational position of the stage 20 can be obtained by means of infrared light sensing or the like. In this embodiment, the body 21 further includes a ring flange 211 , and the tested component 51 is a blocking piece protruding from the ring flange 211 , which has a simple structure and is easy to configure.

Preferably, the stage moving device 1 further includes an optical ruler module 60, the optical ruler module 60 includes an optical ruler 61 and a read head 62 arranged on the base 10, the optical ruler 61 is arranged on the On the outer peripheral surface of the stage 20 , the read head 62 corresponds to the optical ruler 61 for feedback of the rotational position of the stage 20 , so as to control the rotational position of the stage 20 quickly and accurately. In this embodiment, the optical scale 61 is disposed on the outer peripheral surface of the ring flange 211 , and the reading head 62 is located between two adjacent actuating mechanisms 30 .

In this embodiment, the stage 20 includes a hollow portion 24 and a light-transmitting plate 25 disposed on the hollow portion 24, and a plurality of adsorption holes 26 are distributed at intervals on the outer periphery of the hollow portion 24 for adsorbing the substrate 2 , can be applied to equipment related to the detection of photoelectric properties of wafers. The stage moving device 1 further includes an X-axis displacement module 70 and a Y-axis displacement module 80 stacked on top of each other, and the base 10 is arranged in the X-axis displacement module 70 and the Y-axis displacement module 80. First, it is convenient for precise movement and positioning. In other embodiments, the stage may not be provided with the hollow portion and the light-transmitting plate, so as to be suitable for equipment with different operation requirements.

1: Carrier moving device 2: Substrate 10: base 11:Accommodating part 12: Second platen 20: Carrier 21: Ontology 211: ring flange 22: ceramic ring body 23: The first platen 24: hollow part 25: Translucent panel 26: Adsorption hole 30: Actuating mechanism 31: push piece 40: Bearing 41: inner ring 42: Outer ring 50: Sensing unit 51: DUT 52: Sensor 60:Optical scale module 61: Optical ruler 62: Read head 70: X-axis displacement module 80: Y-axis displacement module A: Resist central axis C: Centerline D: Spacing R: radial extension line

Fig. 1 is a perspective view of a preferred embodiment of the invention. Fig. 2 is a partial sectional view of a preferred embodiment of the invention. Fig. 3 is a partial exploded view of a preferred embodiment of the invention. FIG. 4 is a partially enlarged view of FIG. 3 . Fig. 5 is a top view of a preferred embodiment of the invention. FIG. 6 is a partially enlarged view of FIG. 5 . Fig. 7 is a partial side view of a preferred embodiment of the invention.

1: Carrier moving device

2: Substrate

70: X-axis displacement module

80: Y-axis displacement module

Claims (10)

A carrier mobile device, comprising: a base; a stage for carrying a substrate, and is rotatably arranged on the base with a center line as an axis; and At least one actuating mechanism is arranged on the base, including at least one resisting member. The at least one resisting member can reciprocate relative to the stage and push against an outer peripheral surface of the stage to drive the stage to rotate. A resisting central axis of one of the resisting members is eccentric to the central line. The carrier moving device as described in Claim 1 further includes a bearing, wherein the bearing includes an inner ring and an outer ring that can rotate relative to the inner ring, the inner ring abuts against the carrier, The outer ring abuts against the base. The carrier moving device as described in Claim 1, wherein the carrier includes a hollow part and a light-transmitting plate disposed in the hollow part, and a plurality of adsorption holes are distributed on the outer periphery of the hollow part at intervals for adsorbing the substrate . The stage moving device as described in claim 1 further includes a sensing unit, wherein the sensing unit includes a test piece and a sensor arranged on the base, and the test piece radially protrudes from the On the outer peripheral surface of the stage, the sensor can sense the relative position of the tested object. The carrier moving device as described in claim 1 further includes an optical ruler module, wherein the optical ruler module includes an optical ruler and a reading head arranged on the base, and the optical ruler is arranged on the carrier On the outer peripheral surface, the read head corresponds to the optical scale for feeding back the rotational position of the stage. The stage moving device as claimed in claim 1, wherein each of the actuating mechanisms is a linear motor and includes two resisting members stacked along a thickness direction of the stage. The carrier moving device as described in any one of claims 1 to 6, wherein the at least one actuating mechanism is plural in number, and the carrier defines at least one radially extending line that is vertical and passes through the center line; from each of the actuating mechanisms As viewed from the centerline of the mechanism, one of the resisting central axes is located on the right side of a radially extending line, and the other resisting central axis is located on the left side of a radially extending line. The carrier moving device according to any one of claims 1 to 6, wherein the carrier defines at least one radially extending line perpendicular to and passing through the center line, and each of the pushing central axes is parallel to a radially extending line . The stage moving device as claimed in claim 8, wherein the distance between one of the thrusting central axes and one of the radial extension lines is not less than 0.3 mm and not greater than 2 mm. The carrier moving device as described in claim 5 further includes a bearing, wherein the bearing includes an inner ring and an outer ring that can rotate relative to the inner ring, the inner ring abuts against the carrier, The outer ring is in contact with the base; the platform includes a hollow part and a light-transmitting plate arranged in the hollow part, and a plurality of adsorption holes are distributed on the outer periphery of the hollow part at intervals for adsorbing the substrate; The stage includes a body and a ceramic ring set on the body, and each of the push pieces can radially push the ceramic ring; the stage also includes a first pressure plate detachably connected to the body, the The inner ring is sandwiched between the body and the first pressure plate; a second pressure plate is detachably connected to the base, and the outer ring is sandwiched between the second pressure plate and the base; the first The pressure plate and the second pressure plate extend in a ring shape respectively; the stage moving device further includes a sensing unit, the sensing unit includes a test piece and a sensor arranged on the base, and the test piece radially The sensor is protruded on the outer peripheral surface of the stage, and the sensor can sense the relative position of the measured object; the body further includes a ring flange, the optical scale is arranged on the outer peripheral surface of the ring flange, and the measured The member is a blocking piece protruding from the flange of the ring; each of the actuating mechanisms is a linear motor and includes two resisting members stacked along a thickness direction of the stage; the number of at least one actuating mechanism is plural, the stage defines at least one radially extending line perpendicular to the centerline; viewed from each of the actuating mechanisms toward the centerline, one of the pushing central axes is located on the right side of the radially extending line, The other said thrust central axis is located on the left side of one of said radial extension lines; each of said thrust central axes is parallel to one of said radial extension lines; the distance between one of said thrust central axes and one of said radial extension lines is not less than 0.3 millimeters and not greater than 2 millimeters; the base includes a rectangular accommodation part, the stage is set at a middle part of the accommodation part, and each of the actuating mechanisms is arranged at a corner of the accommodation part; And the stage moving device further includes an X-axis displacement module and a Y-axis displacement module stacked on top of each other, and the base is arranged on one of the X-axis displacement module and the Y-axis displacement module.

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