TWM641115U - Inner rib defect detection device for front-opening substrate transfer box - Google Patents

Abstract

The present invention provides a detection device for internal rib flaws of a front-opening substrate transfer box, which includes a plurality of measuring elements arranged at intervals on a suspension arm to form a suspended detection area, and a dual-axis is driven by a control unit. The driver is used to drive the cantilever arm to be implanted into the multi-layer slot of a box body of the substrate transfer box, and drive the plurality of sensing elements to detect the multiple slots between the slots of each layer following a circular movement path. A plurality of levels of the inner rib, the control unit compares each level with a profile standard value of the inner rib to obtain a defect detection result, so as to facilitate detection of boxes with inner rib defects.

Description

Inner rib defect detection device for front-opening substrate transfer box

The present invention relates to a front-opening transfer box for accommodating substrates, in particular to a defect detection technology for the alignment of inner ribs of the transfer box, in particular to an inner rib defect detection device of a front-opening substrate transfer box.

Front Opening Unified Pod (FOUP for short) is composed of an opening of a box body combined with a front cover capable of opening and closing the opening. The FOUP can be widely used in the semiconductor manufacturing process, and is used for accommodating and carrying semiconductor wafers for a series of process occasions to ensure the high-precision process yield of semiconductor wafers; in addition, the FOUP has also been It is gradually extended to accommodate and carry general substrates (or carrier boards) to ensure the process yield of the substrates. The so-called substrate may include circuit substrates such as Embedded Multi-chip Interconnect Bridge (EMIB) or circuit substrates using ABF as a build-up material. The area of these high-end circuit substrates is relatively larger than that of traditional PCBs. And it is presented in a rectangular typesetting mode, so that the hardness of the high-end circuit carrier board is relatively softer than that of the traditional PCB; of course, with the diversity of customization at the demand side, the substrate can also include large-area PCBs or other board-shaped object.

Since the area of the substrate is relatively larger than that of the semiconductor wafer, there is a difference in the inner rib structure between the substrate transfer box and the semiconductor wafer transfer box; The groove (slot) must be formed with several internal ribs on the inner wall of the box to form the internal rib structure. The internal rib structure, in addition to the side ribs formed by layers on the inner walls of the box body, also includes suspended support ribs formed by layered protrusions from the center of the bottom wall of the box body, so that the edges on both sides The ribs can be used as guide ribs for accommodating substrates on the double bottom side of each layer of slots, and are stably supported on the bottom of the center of the substrate by means of suspended support ribs; among them, the side ribs on both sides and the suspended support ribs in the middle are positioned In the slots of each layer, they are spaced and corresponded to each other in the manner of equal layer heights; however, since the area of the semiconductor wafer is not large, the suspension in the middle is not required in the semiconductor wafer transfer box. The existence of shaped support ribs; it can be seen that the inner rib structure of the substrate transfer box is relatively more complex than the inner rib structure of the semiconductor wafer transfer box.

On the other hand, since there are usually environmental factors such as temperature and humidity in the manufacturing process of the substrate and the semiconductor wafer, when the transfer box is used to carry the substrate or semiconductor wafer for process processing, the box will inevitably suffer The impact of process temperature and humidity, especially after a period of durable use, the side ribs and the suspension-shaped support ribs in the box are more likely to be deformed, especially the probability of deformation of the suspension-shaped support ribs is relatively low. It is known that once the side ribs or the suspension support ribs are deformed, the space of the slots of each layer will be affected, making it difficult for the substrate to be inserted into the slots of each layer, or the substrate is stuck in the slot and difficult to be inserted into the slot. phenomenon of removal. Therefore, after the substrate transfer box has been used in the substrate production line for a period of time, it is necessary to check the alignment of the side ribs and the suspension support ribs in the box with or without deviation or deformation; however, the defect detection , so far, still rely on manual methods.

In view of this, the present invention aims to provide a defect detection technology that is conducive to automatic implementation for the box body of the front-opening substrate transfer box, especially the overall structure of the multiple inner ribs of the box body.

A preferred embodiment of the present invention is to provide a front-opening type substrate transfer box internal rib flaw detection device for detecting a box body of the substrate transfer box, the box body has an opening opened along a Y-axis , and the opening of the box body has a plurality of layered slots extending along a Y axis and distributed along a Z axis at intervals. A plurality of inner ribs are formed at intervals, and the plurality of inner ribs include two-sided side ribs protruding oppositely along an X-axis and an overhang that is located between the side ribs on both sides and protrudes along the Y-axis shaped support rib; the defect detection device includes a suspension arm, a plurality of sensing elements and a control unit; the suspension arm is configured on a biaxial driver, and the biaxial driver can drive the suspension arm to perform the Y-axis and the bidirectional movement of the Z axis; a plurality of the sensing elements are arranged on the suspension arm at intervals along the X axis and the Y axis to form a suspended detection surface on the suspension arm domain; the control unit is built with a profile standard value of a plurality of inner ribs, and is electrically connected between the biaxial driver and a plurality of sensing elements; the control unit can drive the biaxial driver so that The cantilever arm is implanted in the slots of each layer, so that the plurality of sensing elements on the detection area can detect a level of each of the plurality of side ribs and the suspension support rib layer by layer, The control unit compares each of the levels and the profile standard value to obtain A defect detection result; wherein, the contour standard value includes the multiple side ribs of the slots of each layer and the standard position of the suspension support rib located in the X-axis, the Y-axis and the Z-axis, the detection The area performs a distance-measuring movement of a plurality of side ribs and at least one of the suspension support ribs layer by layer along the Y axis, and the detection area also performs a layer-by-layer movement along the Z axis, Wherein in the process of the ranging movement and the layer-changing movement, the plurality of sensing elements are excluded from contacting the plurality of inner ribs, and the level includes the level of the plurality of side ribs, the suspension The position of the shaped support rib and the position between the side rib and the suspended support rib.

In a further implementation, the inner rib defect detection device also includes a machine platform configured with the biaxial drive, the machine platform is also provided with a fixed surface for placing the box, and the control unit is configured on the machine on stage. Wherein, the biaxial driver includes: a pair of slide rails fixed on the machine table along the Y axis, a slide table connected to the pair of slide rails to perform the Y axis movement, and a drive A sliding seat that is connected to the sliding table to perform the Z-axis movement, and the suspension arm is mounted on the sliding seat along the Y-axis and then configured on the biaxial drive to drive the suspension The plurality of sensing elements on the arm perform the ranging movement and the layer-changing movement synchronously.

In a further implementation, the plurality of sensing elements include a pair of side rib ranging elements and a pair of supporting rib illuminating elements arranged at intervals along the X-axis. Wherein, the suspension arm has two arm portions spaced apart from each other along the X-axis, and a plurality of sensing elements are dispersedly arranged on the two arm portions to form the detection area; the slots of each layer The X-axis area is divided into two grooves located on both sides of each of the cantilevered support ribs, and each of the side rib distance measuring elements and each of the support rib irradiation elements are arranged at intervals on each of the arms for implantation Said ranging movement is performed within each of the slot portions. According to this, the following content can be further implemented: the distance measurement movement is that the detection area moves continuously along the Y axis or a stepwise movement of multiple fixed points to drive the pair of side ribs to measure distance The element can project and receive a distance-measuring light on each of the side ribs in the X-axis, so as to detect the position of each of the side ribs.

Each of the side ribs protrudes along the Z-axis to form at least one mound, and the distance-measuring movement is a continuous movement of the detection area along the Y-axis or a step-by-step movement of multiple fixed points, Driving the pair of side rib distance measuring elements to project and receive a distance measuring light in the X-axis to detect the position of at least one of the side ribs and the hills. Further, the side rib measurement The distance elements are respectively equipped with a three-axis beam on the X-axis, and each of the three beams can reflect the distance-measuring light projected and recovered by the pair of side-rib distance-measuring elements on the X-axis to become the Z-axis At least one of each of the side ribs and each of the hills receives the projection of the Z-axis distance measuring light to detect the respective positions.

Each of the side ribs extends along the Y axis or is formed at intervals, and the distance measurement movement is that the detection area moves continuously along the Y axis or in a stepwise movement of multiple fixed points to drive the pair The side rib distance-measuring element can project and receive a distance-measuring light toward each of the side ribs toward the X-axis during the distance-measuring movement, so as to detect the alignment of each of the side ribs.

The pair of supporting rib illuminating elements can mutually project a contrasting light on the X-axis, and each of the suspended supporting ribs receives the projection of the contrasting light to detect the position.

Each of the suspended supporting ribs forms an arc protrusion along the Z axis, and the pair of supporting rib illuminating elements can project a contrasting light to each other in the X axis to detect each of the side ribs, each of the hills at least one of the divisions.

The alignment between the side rib and the suspended support rib, the alignment of each side rib is detected by the pair of side rib distance measuring elements and the alignment of each of the support ribs is detected by the pair of support rib illuminating elements Afterwards, they are compared with each other via the control unit.

In addition, in a further implementation, an end wall is formed on the end side of each of the end ribs, and the plurality of sensing elements also include a pair of end wall sensors arranged along the X-axis to detect the end wall. Distance elements, each of the end wall distance measuring elements is arranged on each of the arm parts and each of the side rib distance measuring elements, the detection area is composed of the pair of side rib distance measuring elements, the pair of supporting rib irradiation elements and the opposite end The wall ranging elements are formed at intervals from each other.

In a further implementation, the detection area allows a light projection potential difference of each of the sensing elements in the Z-axis.

In a further implementation, the slots of each layer are divided into two grooves located on both sides of each of the suspension support ribs in the X-axis area, and each of the end wall distance measuring elements is arranged on each of the arms, and and each of the side rib ranging elements and each of the supporting rib illuminating elements are spaced apart from each other, and are used for implanting in each of the grooves to perform the distance measuring movement.

According to the above content, the present invention can be applied to an automatic production line that uses a front-opening substrate transfer box to carry and transfer substrates for processing, and to perform automatic detection of inner rib defects on multiple inner ribs of the box body, so as to facilitate the detection of existing defects. There is a box with offset or deformed inner ribs, which avoids the problem that the substrate is difficult to insert into the slots of each layer, or the substrate is stuck in the slot and difficult to be taken out.

In addition, the suspended detection area provided by the new model, as well as the various circular movement paths that can be performed by the detection area, are helpful to adapt to the complex internal rib structure of the box body of the front-opening substrate transfer box, avoiding the detection During the movement detection process, the surface area collides with or touches multiple inner ribs or the inner walls around the accommodation compartment, and has the effect of increasing the detection rate.

For this reason, the detailed content related to the implementation of the present invention will be further explained below with accompanying drawings.

10: box body

11: opening

12: Storage compartment

13: inner rib

13a: side rib

13a': massif

13a": end wall

13b: suspended support rib

13b': arc convex part

20: Substrate

21: slot

21a, 21b: Groove

30:Machine

31: Mesa

32: positioning column

40: Cantilever arm

41,42: arm

43: support part

50: Sensing element

51: Rib ranging element

52:Support Rib Irradiation Element

53: three 稜鏡

54: End wall ranging element

60: Dual shaft drive

61: slide rail

62: sliding table

63: sliding seat

A,B,C,D,E,F: punctuation

L:Waveform moving path

L1: ranging movement

L2: layer-changing movement

M, N: Serpentine moving path

M1, N1: ranging movement

M2, N3: layer-changing movement

N2: reset move

Q: Detection area

T1, T2: Interstitial space

S1 to S4: steps

δ : light projection difference

Fig. 1 is a three-dimensional schematic diagram of the box body of the front-opening substrate transfer box to be tested, illustrating that the box has internal ribs for constructing multi-layer slots for accommodating substrates.

FIG. 2 is a schematic top view of the inner rib shown in FIG. 1 , illustrating that the inner rib constructs a detection area in the Y-axis.

FIG. 3 is a schematic front view of the inner rib shown in FIG. 2 , illustrating that the detection area is allowed to generate a light projection height difference in the Z-axis.

Fig. 4 is a perspective view of the configuration of the new defect detection device.

FIG. 5 is a schematic front view of FIG. 4 , illustrating that the box body of the front-loading substrate transfer box can be placed in the defect detection device for defect detection of inner ribs.

FIG. 6 is a three-dimensional enlarged schematic view of the side rib ranging element shown in FIG. 4 equipped with a three-panel to detect the position of the mound or the side rib.

FIG. 7 is a schematic enlarged plan view of the side rib ranging element shown in FIG. 4 equipped with a three-panel to detect the position of the mound or the side rib.

FIG. 8 is a schematic enlarged plan view of the level of the suspended support rib detected by the support rib illuminating element shown in FIG. 4 .

FIG. 9 is a schematic enlarged plan view of the detection of the alignment of the side rib by the side rib ranging element shown in FIG. 4 .

FIG. 10 is a program block diagram of the novel defect detection method.

FIG. 11 is an explanatory diagram of FIG. 2 , illustrating that the present invention can preset a plurality of marking points to be detected for the inner rib.

FIG. 12 is a schematic diagram of a circular moving path of the detection area shown in FIG. 2 executing a waveform moving path.

FIG. 13 is a schematic diagram of a circular moving path in which the detection area shown in FIG. 2 executes a serpentine moving path.

FIG. 14 is a schematic diagram of a circular moving path in which the detection area shown in FIG. 2 executes another serpentine moving path.

First, please refer to FIG. 1, which discloses a box body 10 of a front-opening substrate transfer box (i.e. FOUP). For the convenience of description, an X-axis, a Y-axis and a Z-axis have been marked in FIG. 1, so According to the three-dimensional Cartesian coordinate system, it can be seen that the directions indicated by the positive and negative quadrants of the respective X, Y or Z axes should be included. The box body has an opening 11 that can be covered by a front cover (not shown), and the box body 10 also has an accommodating compartment 12 communicating with the opening 11, and the accommodating compartment 12 can provide a plurality of substrates 20 (or carrier plate) is implanted from the opening 11 along the Y axis and accommodated in the accommodation compartment 12 in a layered manner, so that one transfer box can accommodate and carry a plurality of substrates 20 for necessary process processing.

Further, please refer to FIG. 1 to FIG. 3 together. It can be seen from FIG. 1 that a plurality of inner ribs 13 are formed on the inner wall around the accommodation chamber 12 of the box body 10 to construct a structure extending along the Y axis and along the A plurality of slots 21 (slots) arranged at intervals in the Z axis. Fig. 2 and Fig. 3 respectively disclose the state of the side ribs 13a and the suspension support ribs 13b distributed in the slots 21 of each layer shown in Fig. 1; In addition, two side ribs 13a protruding oppositely along the X-axis, and a suspended support rib 13b located between the side ribs 13a on both sides and protruding along the Y-axis are formed at intervals. Accordingly, each of the side ribs 13a and each of the suspended support ribs 13b can protrude into the accommodating compartment 12 in a bifurcated form, and then constitute a plurality of the inner ribs 13 in the box body 10; wherein 2 and 3, it can be seen more clearly that the side ribs 13a and the suspension support ribs 13b in the slots 21 of each layer are distributed at intervals and correspond to each other, so that each of the substrates 20 can be accommodated in each of the slots within 21, By means of the side ribs 13a on both sides supporting the end edges of the substrate 20 on both sides, and by virtue of the suspended support ribs 13b supporting the center of the bottom surface of the substrate 20, it is possible to prevent the multiple substrates 20 shown in FIG. The phenomenon of collapse or mutual interference occurs in the slot 21.

Then, referring to Fig. 2 and Fig. 3, it can be seen that the side ribs 13a and the suspension support ribs 13b in the slots 21 of each layer are distributed and arranged together in the plane constructed by the XY axis (as shown in Fig. 2 ), the new type A detection area Q is defined according to the plane of the XY axis, and the detection area Q is allowed to have a projection in the Z axis based on the thickness (or height) of the side rib 13a and the suspension support rib 13b itself. Light position difference δ (as shown in Figure 3).

As shown in Figure 2 and Figure 3, it is also disclosed that in a further implementation, each of the side ribs 13a can protrude along the Z-axis to form at least one mound 13a', and each of the suspended support ribs 13b can also form an arc convex portion 13b' along the Z-axis to reduce the contact area of the inner rib when supporting the substrate.

In addition, the side ribs 13a and the hanging support ribs 13b in the above-mentioned box body 10 can also be applied with the ribs called ribs in the box body of the material box shown in the TWI762273 patent according to customized requirements. (similar to the above-mentioned side rib 13a) and the form of the support rod (similar to the above-mentioned suspension support rib 13b); especially, the ribs (similar to the above-mentioned side rib 13a) in the TWI762273 patent are made along the In addition, the ribs (similar to the above-mentioned side ribs 13a) in the TWI762273 patent can also be presented in the form of ribs, or the above-mentioned mounds 13a' can be formed on the ribs and side ribs Or on the ribs, all belong to the inner rib shape of the box body 10 that can accept the new type of defect detection described later.

This new model provides a defect detection device for the inner rib 13 of the above-mentioned box body 10, which is used to detect whether the predetermined position (or called alignment) of the side rib 13a and the suspended support rib 13b is correct; The inner rib 13 of the body 10 is regarded as the object to be detected in the present invention.

Next, please refer to FIG. 4 , which discloses that the defect detection device of the present invention can be presented in the form of a machine platform 30, and a suspension arm 40 is configured on the platform 30, and multiple The sensing element 50, and a known control unit (not shown) can be configured in the machine 30 to control the operation process of the suspension arm 40 and the sensing element 50 on the machine.

In addition, the machine table 30 can also be planned to be arranged along the X-Y axis to provide a table 31 for placing the box body 10. The table 31 is scattered with a plurality of positioning boxes that can embed the box body 10. Column 32; according to this, as shown in Figure 5, it is revealed that the box 10 to be inspected can be placed on the table 31 by a mechanical arm, transport equipment or manually, and multiple positioning holes have been opened at the bottom of the box 10 (not shown in the figure) provide the corresponding embedding of the positioning column 32, so that the box body 10 can be stably placed on the table 31 to stop, wherein when the box body 10 is placed, its opening 11 must be along the The Y-axis is open toward the disposition position of the suspension arm 40 , so that the suspension arm 40 can be implanted into the accommodation chamber 12 of the box body 10 through the opening 11 during operation.

As shown in Figures 4 and 5, the suspension arm 40 can be presented in an H-shaped plane on the X-Y axis, so that the suspension arm 40 has two arm portions 41 spaced apart from each other along the X-axis, 42, and a support portion 43 connected between the two arms, the detection area Q is arranged in the area surrounded by the support portion 43 and the two arms 41, 42, and the detection area Q is in the suspension The holding arm 40 can present a suspended form. In addition, the machine 30 is configured with a dual-axis driver 60 , so that the suspension arm 40 can be configured on the dual-axis driver 60 . The double-axis drive 60 includes a pair of slide rails 61 fixed on the machine table 30 along the X-axis, a slide table 62 connected to the pair of slide rails 61 to move in the Y-axis direction, and a drive A sliding seat 63 that is connected to the sliding table 62 to perform the Z-axis movement; one end of the suspension arm 40 can be placed on the sliding seat 63 of the biaxial drive 60 along the Y-axis, and suspended The other end of the holding arm 40 can be suspended in the space above the machine table 30 along the Y-axis; according to this configuration, the suspension arm 40 can perform the movement in the Y-axis by means of the slide table 62, and The Z-axis movement can be performed by means of the sliding seat 63, so that the suspension arm 40 can be driven by the biaxial driver 60, implanted in the box body 10 and perform biaxial movement along the Y-Z axis for The detection area Q is driven to perform a ranging movement in the Y-axis layer by layer and a layer-changing movement in the Z-axis layer by layer (details will be described later). In this implementation, the transmission connection between the slide rail 61 of the biaxial drive 60 and the slide table 62 in the Y-axis direction, or/and the transmission connection between the slide table 62 and the slide seat 63 in the Z-axis direction can be Powered by a general servo motor and equipped with an optical scale in the Z-axis, or Y and Z-axis, it can achieve high absolute accuracy in transmission and detection of moving distances; The cantilever arm 40 performs the third axial movement in the X-axis, but additionally implements a one-way movement or a two-way reciprocating movement in the X-axis, which belongs to the technical category of the present invention and can be easily transformed and applied, and To Chen Ming.

Furthermore, in the implementation shown in FIG. 4, a plurality of sensing elements 50 can be installed on the two arm portions 41, 42 of the suspension arm 40 at intervals along the X-Y axis; in other words, the A plurality of sensing elements 50 distributed in the X-Y axis are also arranged in the suspended detection area Q. The plurality of sensing elements 50 include a pair of side rib ranging elements 51 and a pair of supporting rib illuminating elements 52 arranged at intervals along the X-axis. Wherein: please refer to FIG. 11 first, it can be seen that the slots 21 of each layer shown in FIG. 1 are divided and formed in the X-axis direction with two grooves 21a, 21b located on both sides of each of the suspension-shaped support ribs 13b, and each of the opposite sides The rib ranging element 51 and each of the supporting rib illuminating elements 52 are disposed on each of the arm portions 41 , 42 at a distance from each other, and are used for implanting into each of the groove portions 21 a , 21 b to perform the distance measuring movement.

As shown in FIG. 6 , each rib distance measuring element 51 is a sensor capable of projecting laser light to an object and receiving the light reflected by the object to detect and obtain the distance of the object in this embodiment. As an example, in FIG. 4, the bilateral side rib distance measuring elements 51, which are separately arranged on both sides of the suspension arm 40 and measure externally, can project and receive light on each of the side ribs 13a in the X-axis. The ranging light of the laser is used to detect the level of each side rib 13a; wherein, since the detection surface area Q allows the projection position difference δ shown in FIG. 3 in the Z axis, each of the side ribs The distance-measuring element 51 can project and receive the distance-measuring light in the light projection position difference δ . In other words, the distance-measuring light projected by each side rib distance-measuring element 51 can cover both sides of the slots 21 of each layer in the Z-axis. The position of the actual height (or thickness) of each of the side ribs 13a and each of the mounds 13a', so as to detect at least one of each of the side ribs 13a and each of the mounds 13a' on both sides of each layer slot 21 One, and the control unit calculates and compares whether the positions of the side ribs 13a and the hills 13a' are skewed or deformed, so as to determine the distance between the side ribs 13a on both sides of each slot 21 Whether or/and whether the mounds 13a' are located on the same plane (ie co-planar).

Furthermore, please refer to Fig. 6 and Fig. 7, the adjacent side of each side rib ranging element 51 is disclosed, and the distance measuring light that can reflect the X axis can also be mounted on the X axis to become the A triangular beam 53 for the distance measuring light in the Z-axis, and make the triangular beam 53 located above each of the side ribs 13a or each of the mounds 13a' along the Z-axis, the triangular rib The mirror 53 has the feature of an oblique mirror surface, so that the oblique mirror surface of the triangular mirror 53 can, for example, be at a reflection angle of 90 degrees, and the laser light (indicated by a dotted arrow) projected by the side rib distance measuring element 51 It is reflected towards the Z axis so as to project onto each of the mounds 13a', and it is confirmed that each of the mounds 13a' distributed along the Y axis in the slots 21 of each layer is located on the Z axis. Whether the height is consistent, to judge whether it is skewed or deformed; in the same way, the combination of each side rib distance measuring element 51 and the three ribs 53 can also be projected in points on each side rib 13a in each layer slot 21 Whether the height in the Z axis is consistent, to judge whether there is any skew or deformation (that is, to check whether the level is up to standard), and explain it.

Also as shown in FIG. 8 , it is disclosed that the pair of supporting rib illuminating elements 52 can project a contrasting light (that is, laser light) on the object in the X-axis in this embodiment to detect whether the object is real. The position sensor is taken as an example to illustrate that the suspension support ribs 13b in the slots 21 of each layer can receive the projection of the contrasting light to detect whether it is skewed or deformed (that is, to detect whether its level is up to standard). Furthermore, the contrasting light irradiated by the pair of supporting rib illuminating elements 52 can maintain a projection height difference δ in the Z-axis, so the range where the contrasting light can be projected includes the overhangs in the slots 21 of each layer. Whether the position of the actual height (or thickness) of at least one of the supporting rib 13b and the arc-protruding portion 13b ′ is skewed or deformed (ie, check whether its level is up to standard).

In addition, as shown in FIG. 6, it can be seen that the plurality of sensing elements 50 may also include a pair of end wall ranging elements 54 arranged along the X-axis. The pair of end wall ranging elements 54 may also be capable of projecting mines The sensor that emits light and detects the distance of the object is used to detect the actual distance between the end walls 13a" of the end sides of each side rib 13a as shown in Figure 9, or the actual distance between the inner walls of both sides of the accommodation compartment 12. distance, and then determine whether the end walls 13a" of each side rib 13a or the double-sided inner walls of the accommodation compartment 12 are skewed or deformed (that is, whether the level is up to standard).

The control unit is built with a profile standard value of the plurality of inner ribs 13 of the box body 10, and is electrically connected between the biaxial drive 60 and the plurality of sensing elements 50, so that the control unit can Issue the driving command to drive the biaxial driver 60 to drive the suspension arm 40 to be implanted in the slot 21 of each layer, and the plurality of sensing elements 50 on the detection area Q can be synchronously The distance measurement movement is performed layer by layer along the Y axis, and the distance measurement movement can be carried out in a stepwise movement mode or a continuous movement mode of multiple fixed points to detect the side rib 13a, the mound 13a', the end wall 13a", the suspension support rib 13b, and the arc convex portion 13b' are located at multiple positions in the Y-axis; The measuring element 50 can also perform the layer-changing movement synchronously along the Z-axis layer by layer, so as to be sequenced between multiple distance-measuring movements, and then detect a plurality of all the ribs 13 in each layer. said level, the control unit compares each level with the profile standard value to obtain a defect detection result. Wherein, the contour standard value includes a plurality of the side ribs 13a, the mounds 13a', the end walls 13a", the suspension support ribs 13b, and the arc convex parts 13b' each located in the X-axis , the standard positions of the Y-axis and the Z-axis, and a plurality of sensing elements 50; moreover, in the process of the distance-measuring movement and the layer-changing movement, the plurality of sensing elements exclude contact with a plurality of the inner ribs.

In addition, the control unit can detect the position of the bilateral side ribs 13a in the slots 21 of each layer through the pair of side rib distance-measuring elements 51 and detect the position of each of the mid-mounted suspension elements through the pair of supporting rib irradiation elements 52. The alignment of the shaped support rib 13b is then compared with the profile standard value, so as to know the alignment between the bilateral side ribs 13a and the central suspension shaped support rib 13b.

The present invention also provides a method for detecting inner rib defects of a front-opening substrate transfer box, which is used to more specifically disclose and detect the details of the inner rib 13 of the above-mentioned box body 10 . Please refer to FIG. 10 , which discloses a program block diagram of the flaw detection method, including performing the following steps S1 to S4 in sequence:

Step S1: Construct the standard value of the outline of the rib in the box

This step takes the structure of the box body 10 shown in Figure 1 as an example. The standard profile of the box body 10 must be built in the control unit in advance. The standard profile refers to a plurality of internal ribs 13 The plurality of side ribs 13 a and the plurality of suspension support ribs 13 b of the multi-layered slot 21 are distributed in the contour feature of the accommodation compartment 12 . Wherein, when at least one of the end wall 13a" of the accommodation compartment 12, the side ribs 13a with the mound 13a', and each of the suspended support ribs 13b with the arc convex part 13b' must be selected as For the part of defect detection, the contour standard value should also include the contour characteristics of at least one of the end wall 13a", the mound portion 13a', and the arc convex portion 13b'. In other words, a plurality of computer digital images or values of the standard coordinates of the inner rib 13 located in the X-axis, Y-axis and Z-axis can be provided by the box design end or measured by itself as the inner rib 13. profile standard and is built into the control unit. Alternatively, a box body standard jig that has been measured and calibrated by the three-dimensional axial direction is provided by the box body design end, and the following steps S2 to S3 are performed first to construct the inner rib 13 of the box body standard jig in advance. The computer digital images or values of the standard coordinates in the X-axis, Y-axis and Z-axis are used as the standard value of the outline of the inner rib 13, and are built into the control unit.

Please continue to refer to Figure 11, illustrating that the present invention can also preset a plurality of punctuation points A, B, C, D, E, and F to be detected for the contour standard value of the rib in the box in the control unit, Figure 11 discloses that the punctuation points A, B, C, D, E, and F are set up on a plurality of mounds 13a' arranged in the X-Y plane; wherein, the punctuation points A and B are collinear in the X-axis, and the punctuation points C and D The positions are collinear in the X axis, the punctuation points E and F are collinear in the X axis, the punctuation points A, C, and E are collinear in the Y axis, and the punctuation points B, D, and F are collinear in the Y axis. Accordingly, the punctuation points A, B, C, D, E, and F can be used as a plurality of sensing elements 50 (details will be described later) when the detection area Q performs the Y-axis distance measurement movement. Can determine the target to start the detection. The preset positions of the above punctuation points are not limited thereto, in other words, each of the end walls 13a", each of the side ribs 13a, each of the hills 13a', each of the suspended support ribs 13b, and each of the arc protrusions 13b ' can be used as the position of the punctuation in the present invention.

In addition, the control unit can also pre-set a specific error range that allows the plurality of inner ribs 13 to be detected to deviate from the standard value of the profile in the X-axis, Y-axis and Z-axis according to customized requirements. The image or value of the specific error range can use the positions of the above-mentioned punctuation points A, B, C, D, E, and F as reference points on the coordinates. When the control unit detects that the deviation (or deformation) of any one of the punctuation points (such as punctuation point B) falls within the error range, it is determined that the plurality of inner ribs 13 of the box body 10 are not correct. When there is a skew or deformation defect, the box body 10 is to be classified as a good product; when the control unit detects that the deviation of any one of the punctuation points (such as punctuation point B) does not fall outside the error range, it is determined that the box body 10 is not within the error range. Among the plurality of internal ribs 13 of the body 10, at least one internal rib has a defect of distortion or deformation, and the box body 10 is classified as a defective product.

Step S2: Deploy the suspended detection area

In this step, multiple sensing elements 50 disclosed in FIG. 4 and FIG. 5 can be used to construct the detection area Q shown in FIG. 2 and FIG. Radiation, infrared light or other photosensors that can release light and receive or recognize whether the light is blocked by objects or the distance of objects; it can be known from the implementation details of the aforementioned defect detection device that multiple sensing The element 50 particularly includes the pair of side rib ranging elements 51 and the pair of supporting rib illuminating elements 52, so that a plurality of the sensing elements 50 can be arranged in the form of mutual interval distribution to form the detection area Q, and the detection surface Domain Q is suspended in space via the cantilever arm 40 .

Step S3: Drive the detection area to detect the level of the inner rib

In this step, the dual-axis driver 60 disclosed in FIG. 4 and FIG. 5 can be used, and the drive command is issued to the dual-axis driver 60 through the control unit that has built-in the contour standard value, It is used to drive the cantilever arm 40 to be implanted into the accommodation chamber 12 of the box body 10, so that the detection area Q can move in the Y-Z direction in the accommodation chamber 12 in a biaxial direction, and the biaxial movement In particular, it includes the aforementioned Y-axis distance-measuring movement layer by layer and the Z-axis layer-changing movement layer by layer, so as to detect multiple internal ribs as shown in Figures 6 to 9 The distance-measuring movement and the layer-changing movement of each punctuation point on 13, as well as the process of projecting and receiving the distance-measuring light and projecting the contrasting light, so that a plurality of inner ribs 13 can be obtained the quasi-position.

Further, taking the punctuation points A, B, C, D, E, and F disclosed in FIG. 11 as an example, the pair of side rib distance-measuring elements 51 shown in FIGS. 6 and 7 are illustrated. When performing ranging movement along the Y axis, the positions of multiple mounds 13a' at points A, B, points C, D, and points E, F can be sequentially and synchronously detected, or/and sequentially Synchronously detect the positions of multiple mounds 13a' at points E, F, points C, D, and points A, B, wherein the ranging movement includes using points A, B, C, D , E, and F as fixed points for projecting and receiving light in a step-by-step manner, or using the punctuation points A, B, C, D, E, and F as targets for projecting and receiving light in dynamic scanning (that is, the In addition, the distance measurement movement can also ignore the existence of the punctuation point, and directly carry out the dynamic projection scanning of continuous movement layer by layer according to the contour standard value of the internal rib 13, so as to facilitate step by step A layer takes the level of a plurality of said mounds 13a'. When the ranging movement is carried out in a continuous moving manner, it can be distinguished that the moving speed when the inner rib 13 or its target point is detected is relatively slower than the distance measurement when the inner rib 13 or its target point is not detected Movement speed, so as to improve the speed of ranging movement while ensuring the detection accuracy.

On the other hand, as can be seen from FIG. 11 , in addition to the side rib distance measuring element 51 and the supporting rib illuminating element 52 respectively disposed on the two arm portions 41 and 42, the end wall distance measuring element 54 is also disposed. In order to be implanted into each of the grooves 21a, 21b together with the side rib ranging element 51 and the supporting rib illuminating element 52 (ie synchronously) to perform the distance measuring movement.

In the process of performing the above-mentioned ranging movement, no matter whether the punctuation exists or whether it is set up on each side rib 13a or its mound 13a', it can be seen from FIG. 11 that each of the sides shown in FIG. The rib ranging element 51 will follow the detection area Q to step or move continuously along the Y axis, and then detect the position of each side rib 13a synchronously; The illuminating element 52 will follow the detection area Q to step or move continuously along the Y axis, and then detect each of the The position of the suspended supporting rib 13b, each of the side ribs 13a or/and each of the arc convex portions 13b'. Similarly, it can be seen from FIG. 11 that each of the end wall distance measuring elements 54 shown in FIG. 9 will also follow the detection area Q to step or move continuously along the Y axis, and then synchronously detect each of the end walls 13a" or accommodated The position of the bilateral inner walls of the cabin 12. In addition, the position between each of the side ribs 13a and each of the suspension support ribs 13b is detected by the pair of side rib distance measuring elements 51. After the position of each of the suspension support ribs 13b is detected by the pair of support rib illuminating elements 52, each of the side ribs 13a and each of the suspension support ribs 13b is calculated and compared with each other through the control unit Whether or not the level between falls within the specified error range is used to determine whether the level between each of the side ribs 13a and each of the suspended support ribs 13b is skewed or deformed.

It is also explained here that, among the plurality of sensing elements 50 of the present invention, each of the side rib ranging elements 51 and each of the supporting rib illuminating elements 52 are indispensable components, and each of the triangular ribs The mirror 53 and each of the end wall distance measuring elements 54 are elements that can be additionally mounted according to measurement requirements. In addition, each of the side rib distance measuring elements 51 and each of the side rib distance measuring elements 51 are made of laser, infrared light or other light sensors that can emit light and receive or recognize whether the light is shielded by objects or whether the objects are far away. The supporting rib illuminating element 52 and each of the end wall ranging elements 54 can respectively generate an analog or digital level signal after detecting the level of the inner rib 13 and transmit it to the control unit for storage, In order to continue the comparison process of step S4 described later.

Furthermore, when each of the side rib ranging elements 51 and each of the supporting rib illuminating elements 52 on the detection area Q, or each of the side rib ranging elements 51, each of the supporting rib illuminating elements 52 and each of the end wall measuring elements After the distance element 54 performs a distance measurement movement of one layer, the biaxial driver 60 shown in FIG. 4 will drive the suspension arm 40, so that the detection area Q moves upward or downward along the Z axis to perform a height adjustment of a layer of slot 21. , so as to continue to carry out the ranging movement of another layer of slots 21 (details will be described later).

Please continue to refer to Fig. 12 to Fig. 14 , which sequentially reveal the schematic diagrams of three kinds of circular movements that can be implemented by the detection area Q; wherein: Fig. 12 discloses that the plurality of side ribs 13a in the box body 10 are respectively The Y-axis presents a form of interval distribution (that is, non-extending distribution), so that between the multiple side ribs 13a on the Y-axis of each single layer, and the Y-axis of each single layer is closest to the storage compartment Between the side rib 13a of the bottom wall 12a of 12 and the bottom wall 12a, a gap space T1 is formed respectively. Faced with such a layout of inner ribs, The detection area Q can be made to execute a waveform movement path L along the plane of the Y-Z axis in the accommodation compartment 12; the waveform movement path L is connected in series by the ranging movement L1 along the Y axis The circular movement path formed by the layer-changing movement L2 in the axial direction (the dotted line in Figure 12 indicates the movement path, and the solid arrow indicates the movement direction); wherein, when the detection area Q is performing layer-changing along the Z-axis When moving L2 in the same way, the clearance space T1 can allow the side rib distance measuring elements 51 and the triangular frame 53 on each side to move smoothly along the Z axis without colliding with or touching the side rib 13a or the bottom wall. 12a.

Figure 13 discloses that a plurality of mounds 13a' are arranged at intervals on each of the side ribs 13a in the box body 10, and the side ribs 13a on both sides of each layer are extended along the Y-axis (that is, not spaced). form, so that there is no gap space between each side unilateral rib 13a on the Y axis of each single layer, and there is no gap space between the end of each side unilateral rib 13a and the bottom wall 12a of the accommodation compartment 12, Or even if there is a clearance space, it is very small, and it is not enough to provide the side rib distance measuring element 51 and the three ribs 53 on one side to move smoothly along the Z-axis. Facing the layout of such internal ribs, the detection area Q can be made to execute another serpentine movement path M along the Y-Z axial plane in the accommodation compartment 12, and the serpentine movement path M is in the slots of each layer. In the space of 21, reciprocate (or call back and forth) each time to perform the distance-measuring movement M1 along the Y axis, and then connect the layer-changing movement M2 in series to form a circular movement path (the dotted line in Figure 13 represents the movement path, the solid arrow indicates the forward moving direction, and the hollow arrow indicates the backward reset moving direction), so that each layer-changing movement M2 can be performed outside the opening 11 of the accommodation compartment 12. The process of reciprocating (or back and forth) ranging movement M1 along the Y axis shown in Figure 13 can be regarded as that the reciprocating (or back and forth) ranging movement M1 is performed along a collinear path along the Y axis, and There is no layer-changing movement M2 in the Y-axis in the accommodation compartment 12 . According to this, it is possible to prevent each of the side rib distance measuring elements 51 and the tripod 53 from moving smoothly along the Z axis without colliding with or contacting the side rib 13 a or the bottom wall 12 a.

Figure 14 discloses that the inner rib of the box body 10 is composed of a plurality of double-sided mounds 13a' arranged in layers (wherein the aforementioned side ribs 13a do not exist), and the multiple mounds 13a' on one side of each layer are formed in The Y-axis presents a form of interval distribution, so that there is a gap space T2 between each single-side mound 13a' in the Y-axis of each single layer, and each side rib distance-measuring element 51, Sanyan 53 moves smoothly along the Z axis. Facing the layout of such internal ribs, the detection area Q can be made to execute another serpentine movement path N along the Y-Z axial plane in the accommodation compartment 12, and the serpentine movement path N is After the ranging movement N1 along the Y-axis is performed once in the space of the slots 21 of each layer, a return movement N2 is performed along the Y-axis, and then the layer-changing movement N3 is performed in series in the Z-axis And the loop movement path constructed interactively (the dotted line in Fig. 14 represents the movement path, the solid arrow represents the forward movement direction, and the hollow arrow represents the backward return movement direction). Wherein, each return movement N2 includes when the distance measurement movement N1 of each layer reaches the hill 13a' which can detect the position closest to the bottom wall 12a of the accommodation compartment, and then uses the gap space T2 to move along the Y axis. The collinear path is partially reset between two adjacent mounds 13a', so that the subsequent layer-changing movement N3 can be performed along the Z-axis between the two adjacent mounds 13a'; The distance-measuring movement N1 includes that after the layer-changing movement N3 is completed along the Z-axis between the two adjacent mounds 13a', the subsequent partial movement along the Y-axis to the closest to the bottom wall 12a is carried out. The process of the position of the mound 13a'; moreover, each reset movement N2 also includes the process of resetting and moving from the position of the mound 13a' closest to the bottom wall 12a in each layer to the outside of the opening 11 along the Y axis, so as to facilitate the subsequent The layer-changing movement N3 performed outside the opening 11. In this way, it can be avoided that each of the side rib ranging elements 51 and the triangular frame 53 can smoothly perform the layer-changing movement N3 along the Z-axis in the accommodation compartment 12, without collision or contact the mound 13a' or the bottom wall 12a.

In the above, compared with the side rib distance measuring elements 51 and the three side ribs 53 of each side, the position of each end wall distance measuring element 54 shown in FIG. 11 in the X-Z axis is relatively farther away from each side rib 13a, each of the mounds 13a' and each of the end walls 13a". Therefore, when the detection area Q is executing the above-mentioned waveform moving path L or the above-mentioned two kinds of serpentine moving paths M, N, each of the end walls is measured The distance elements 54 will not collide with or touch each of the side ribs 13a, each of the hills 13a' and each of the end walls 13a". Similarly, since the pair of supporting rib illuminating elements 52 in the X-Z axial direction are located on both sides of the suspended supporting rib 13b, when the detection area Q is executing the above-mentioned waveform moving path L or performing the above-mentioned two When the serpentine moving paths M and N are used, the pair of supporting rib illuminating elements 52 will not collide with or contact each of the suspended supporting ribs 13b.

It must be noted that the serpentine moving path M shown in FIG. 13 and the serpentine moving path N shown in FIG. 14 can be respectively implemented in a plurality of side ribs 13a shown in FIG. 12 distributed at intervals in the Y-axis. When the box body 10 is inspected, the inner ribs 13 can also be prevented from being bumped or contacted. In any case, the implementation shown in Figure 12 and Figure 13 only illustrates that the detection area Q is executing the loop movement path The process will not collide or touch the two implementations of each of the inner ribs 13; in addition, due to customized requirements, making changes other than the aforementioned changes to the positions of the side ribs 13a of each layer will naturally affect the loop For a slight change in the moving path, the present invention can still make a corresponding moving path planning based on the above-mentioned implementation content and spirit, so as to prevent the inner rib 13 from colliding or contacting during the defect detection process. It can be seen that, in the process of detecting the level of the inner ribs 13 by driving the detection area Q, the plurality of sensing elements 50 can indeed exclude the collision or contact with the plurality of inner ribs 13. , and can also select the nearest or best path to improve the detection rate.

Step S4: Compare alignment position and contour standard value

This step is performed by the control unit that has built-in the standard value of the profile, and the control unit can be selected from a generally well-known programmable logic controller (PLC), numerical control (NC) or/and microcontroller (MCU) A control circuit is compiled such that the control unit is built-in to include a storage body, a drive controller and a logical arithmetic unit electrically connected to each other. Wherein, the storage body can store and convert the computer digital image or value of the contour standard value, and can also store and convert the analog or digital level signals detected by a plurality of sensing elements 50; the drive The controller can issue the driving command to the biaxial driver 60 according to the computer digital image or value of the contour standard value, so as to drive the detection area Q on the suspension arm 40 to execute the waveform movement path L or the circular movement of the two serpentine moving paths M and N; moreover, the present invention can define the specific error range of the contour standard value by the logic operator; the specific error range can be used in each The image or value of the inner rib 13 located on the X-Y-Z coordinates is defined by adding a positive and negative tolerance image or value allowed on the quality control. During the definition process, the aforementioned punctuation points A, B, C, D, E can be referred to , F as the coordinate reference point and add allowable positive and negative tolerances, or directly define the specific error range by the inner walls around the accommodation cabin 12 and the contour standard values of the overall image of a plurality of inner ribs 13 ; Subsequently, the logic operator compares whether the level signal falls within the specified error range, so as to determine whether the plurality of internal ribs 13 of the box body 10 have distortion or deformation defects. Wherein, the level signal detected by the plurality of sensing elements 50 is obtained after the absolute value of the level signal is obtained through the Z-axis, or the Y- and Z-axis optical ruler mounted on the servo motor. , are stored in the storage body to provide the comparison of the logic operator; the logic operator is for all The comparison between the level signal and the image or value on the above X-Y-Z coordinates is a technical category that can be realized by simple application of known calculation technology, so it will not be described in detail.

Step S5: Obtain the defect detection result

As mentioned above, when the control unit detects the alignment of at least one of the side rib 13a, the mound 13a', the suspended support rib 13b, and the arc convex part 13b' in the box body 10, When the position falls within the error range, it is determined that the inner rib structure of the box body 10 is a good product, and can continue to be used on the production line; when the control unit detects that the side rib 13a, the When at least one of the hill portion 13a', the suspended support rib 13b, and the arc convex portion 13b' falls outside the error range, it is determined that the inner rib structure of the box body 10 is a defective product, and it should be determined from The production line is removed to prevent the substrate from being scratched when the substrate is placed in the slot 21 of each layer, or the problem that the substrate is not easy to be inserted into the slot or taken out from the slot.

The above examples only express the preferred implementation modes of the present invention, but should not be understood as limiting the patent scope of the present invention. Therefore, the present invention shall be subject to the content of the claims defined in the scope of the patent application.

30:Machine

31: Mesa

32: positioning column

40: Cantilever arm

41,42: arm

43: support part

50: Sensing element

51: Rib ranging element

52:Support Rib Irradiation Element

60: Dual shaft drive

61: slide rail

62: sliding table

63: sliding seat

Claims (16)

A device for detecting internal rib defects of a front-opening substrate transfer box, used for detecting a box body of the substrate transfer box, the box body has an opening opened along a Y axis, and the opening of the box body It has a plurality of layered slots extending along a Y axis and distributed along a Z axis at intervals, the plurality of slots are respectively formed at intervals by a plurality of internal ribs in the box, and the plurality of The inner ribs include side ribs protruding oppositely along an X-axis and a suspended support rib located between the side ribs on both sides and protruding along the Y-axis. The defect detection device includes: A suspension arm is configured on a biaxial driver, and the biaxial driver can drive the suspension arm to perform bidirectional movement in the Y-axis and the Z-axis; A plurality of sensing elements are arranged on the suspension arm at intervals along the X-axis and the Y-axis to form a suspended detection area on the suspension arm; A control unit is built with a profile standard value of a plurality of inner ribs, and is electrically connected between the biaxial driver and the plurality of sensing elements; the control unit can drive the biaxial driver to make the The cantilever arms are implanted in the slots of each layer, so that the plurality of sensing elements on the detection area can detect a level of each of the plurality of side ribs and the suspension support rib layer by layer. The control unit compares each level with the contour standard value to obtain a defect detection result; Wherein, the contour standard value includes a plurality of side ribs of each layer of the slot and the cantilever support ribs located in the standard positions of the X-axis, the Y-axis and the Z-axis, and the detection area is along the Y A distance-measuring movement of a plurality of side ribs and at least one of the suspension support ribs is performed layer by layer in the axial direction, and a layer-by-layer movement is performed in the detection area along the Z-axis, and the alignment It includes the alignment of a plurality of side ribs, the alignment of the suspension support rib and the alignment between the side ribs and the suspension support rib. The internal rib flaw detection device of the front-opening substrate transfer box as described in claim 1, which also includes a machine equipped with the biaxial drive, and the machine is also provided with a fixed surface for placing the box body, and The control unit is configured on the machine platform. The internal rib defect detection device of the front-opening substrate transfer box as described in claim 2, wherein the biaxial drive includes: a pair of slide rails fixed on the machine table along the Y axis, and connected to the pair of slide rails by transmission A slide table on the slide rail that performs the Y-axis movement, and a slide seat that is connected to the slide table to perform the Z-axis movement, and the suspension arm is mounted on the Y-axis along the Y-axis The sliding seat is further arranged on the biaxial driver, and is used to drive the plurality of sensing elements on the suspension arm to perform the ranging movement and the layer-changing movement synchronously. The internal rib defect detection device of the front-opening substrate transfer box according to claim 1, wherein the plurality of sensing elements include a pair of side rib distance measuring elements and a pair of supporting rib irradiation elements arranged at intervals along the X-axis . The device for detecting internal rib defects of a front-opening substrate transfer box according to claim 4, wherein the suspension arm has two arm parts spaced apart from each other along the X-axis, and a plurality of the sensing elements are dispersedly arranged on two sides The detection area is formed on the arm. The internal rib defect detection device of the front-opening substrate transfer box as described in claim 5, wherein the slots of each layer are divided into two grooves located on both sides of each of the suspension-shaped support ribs in the X-axis area, and each of the sides The rib ranging element and each supporting rib illuminating element are spaced apart on each of the arm portions, and are used for implanting into each of the groove portions to perform the distance measuring movement. The internal rib defect detection device of the front-opening substrate transfer box according to claim 4 or 6, wherein the distance measurement movement is the continuous movement of the detection area along the Y-axis or the step-by-step movement of multiple fixed points The method drives the pair of side rib ranging elements to project and receive a distance measuring light on each of the side ribs in the X-axis, so as to detect the position of each of the side ribs. The internal rib defect detection device of the front-opening substrate transport box as described in claim 4 or 6, wherein each side rib protrudes along the Z-axis to form at least one hump, and the distance-measuring movement is the detection area Drive the pair of side rib distance measuring elements to project and receive a distance measuring light in the X axis by continuous movement or multiple fixed-point step movements along the Y axis to detect each The alignment of at least one of the side rib and each of the mounds. The internal rib defect detection device of the front-opening substrate transfer box as described in claim item 8, wherein the distance-measuring elements for the ribs on the opposite sides are respectively equipped with a three-panel in the X-axis, and each of the three pans can reflect the opposite sides The distance-measuring light projected and recovered by the rib distance-measuring element in the X-axis becomes the distance-measuring light in the Z-axis. The respective positions are detected by the projection of the ranging light. According to claim 9, the internal rib defect detection device of a front-opening substrate transfer box, wherein the three ribs are located above at least one of each of the side ribs and each of the mounds along the Z-axis. The internal rib defect detection device of the front-opening substrate transport box as described in claim 4 or 6, wherein each of the side ribs extends along the Y axis or is formed at intervals, and the distance measurement movement is the detection area along the The Y-axis continuous movement method or the step-by-step movement method of multiple fixed points drives the pair of side rib distance measuring elements to project and project each side rib toward the X-axis during the distance measurement movement process. Receive a distance-measuring light to detect the position of each side rib. The internal rib defect detection device of the front-opening substrate transfer box as described in claim 4 or 6, wherein the pair of supporting rib illuminating elements project a contrasting light to each other along the X-axis, and each of the suspended supporting ribs receives the contrasting The level is detected by the projection of the type light. The internal rib defect detection device of the front-opening substrate transfer box according to claim 4 or 6, wherein each of the suspended support ribs forms an arc convex portion along the Z axis, and the pair of support ribs illuminate the element along the X A contrasting light is mutually projected axially to detect the position of at least one of the side ribs and the mounds. The internal rib defect detection device of the front-opening substrate transfer box as described in claim 4 or 6, wherein the alignment between the side rib and the suspension support rib is detected by the pair of side rib distance measuring elements The alignment of the ribs and the alignment of each of the supporting ribs detected by the pair of supporting rib illuminating elements are compared with each other through the control unit. The internal rib defect detection device of the front-opening substrate transport box as described in claim 6, wherein the end sides of each end rib are respectively formed with an end wall, and the plurality of sensing elements are also arranged along the X-axis for A pair of end wall ranging elements for detecting the end wall, each of the end wall ranging elements is arranged on each of the arms, and the detection area is composed of the pair of side rib ranging elements, the pair of supporting rib illuminating elements and The pair of end wall distance measuring elements are spaced apart from each other, so that the pair of end wall distance measuring elements follow each of the arms and are implanted into each of the grooves to perform the distance measuring movement. The inspection device for internal rib defects of a front-opening substrate transfer box as claimed in claim 4 or 15, wherein the detection area allows a light projection position difference of each sensing element in the Z-axis.

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