TWI829533B - Internal rib defect detection device and method thereof of foup for substrate used - Google Patents

Abstract

The present invention provides an internal rib defect detection device and method thereof of the foup for the substrate used, including a suspension arm, multiple sensing components and a control unit, the multiple test components are spaced arranges on the cantilevered arm to creates a suspending detection area, the control unit can driving a dual-axis driver to drive the suspension arm to be inserted into a multi-layer of the slots of a substrate box of the front opening unified pod, so that the sensing components follows a cyclic movement path to detect multiple standard positions of the internal ribs between the each slot, and the control unit can compared the each standard position with a contour standard value of the multiple internal ribs, so as to obtain a defect detection result, so that the invention is beneficial to find the substrate box with defects in the internal ribs.

Description

Internal rib defect detection device and method for front-opening substrate transfer box

The present invention relates to a front-opening transfer box for accommodating substrates, and in particular to a technology for detecting defects on the alignment of inner ribs of the transfer box. In particular, the invention relates to a device and method for detecting inner rib defects of a front-opening substrate transfer box.

Front Opening Unified Pod (hereinafter referred to as FOUP) is composed of an opening of a box body combined with a front cover that can open and close the opening. The FOUP can be commonly seen in semiconductor manufacturing processes and is used to accommodate and carry semiconductor wafers for a series of processes to ensure the high-precision process yield of semiconductor wafers; in addition, the FOUP has also been It is gradually being promoted to accommodate and carry general substrates (or carrier boards) to ensure the process yield of the substrates. The so-called substrate can include circuit carrier boards such as embedded multi-chip interconnect bridges (EMIB) or circuit carrier boards using ABF as build-up materials. The area of these high-end circuit carrier boards is relatively larger than that of traditional PCBs. And it is presented in a rectangular layout mode, making the hardness of high-end circuit carrier boards relatively softer than traditional PCBs; of course, with the diversity of demand-side customization, the substrates can also include large-area PCBs or other plate shapes. object.

Since the area of the substrate is relatively larger than that of the semiconductor wafer, there is a difference in the structure of the inner ribs between the substrate transfer box and the semiconductor wafer transfer box; furthermore, in order to create a multi-layer plug-in structure, the inner wall of the substrate transfer box Slots must be formed with a plurality of internal ribs on the inner wall of the box to form the internal rib structure. The inner rib structure, in addition to the side ribs formed in layers on both sides of the inner wall of the box, also includes a suspended support rib formed in layers on the center of the bottom wall of the box, so that the sides on both sides The ribs can act as guide ribs on the double bottom sides of each layer of slots when accommodating the substrate, and use suspended support ribs to stably support the bottom of the center of the substrate; among them, the side ribs on both sides and the central suspended support rib are In each layer of slots, they are spaced corresponding to each other with equal layer height; however, since the area of the semiconductor wafer is not large, there are no slots in the semiconductor wafer transfer box. The presence of the suspended supporting rib in the middle is required; from this, it can be seen that the inner rib structure of the box of the substrate transfer box is relatively more complicated than the inner rib structure of the semiconductor wafer transfer box.

On the other hand, since environmental factors such as temperature and humidity usually exist in the substrate manufacturing process and the semiconductor wafer manufacturing process, when the transfer box is used to carry the substrate or semiconductor wafer for processing, the box will inevitably be subjected to Due to the influence of process temperature and humidity, especially after long-term use for a period of time, the side ribs and suspended support ribs in the box are more likely to deform, and the probability of deformation of the suspended support ribs is relatively high. High; and it is known that once the side ribs or suspended support ribs are deformed, the space of the slots on each layer will inevitably be affected, making it difficult for the substrate to be implanted into the slots on each layer, or the substrate will be stuck in the slot and difficult to be inserted. The phenomenon of taking out. Therefore, after the substrate transfer box has been used in the substrate production line for a period of time, the alignment of the side ribs and suspended support ribs in the box must be inspected for defects with or without deflection or deformation; however, the defect detection , up to now, still rely on manual methods.

In view of this, the present invention aims to provide a defect detection technology that is conducive to automated implementation of the box body of the front-opening substrate transfer box, especially the overall structure of the multiple inner ribs of the box body.

A preferred embodiment of the present invention is to provide an inner rib defect detection device of a front-opening substrate transfer box, which is used to detect a box body of the substrate transfer box. The box body has an opening opening along a Y-axis direction. , and the opening of the box body has a plurality of slots extending along a Y-axis and spaced apart along a Z-axis. The plurality of slots are respectively composed of multiple slots in the box. A plurality of internal ribs are formed at intervals, and the plurality of internal ribs include two side ribs protruding relatively along an X-axis direction and an overhang located between the two side side ribs and protruding along the Y-axis direction shaped support rib; the flaw detection device includes a suspension arm, a plurality of sensing elements and a control unit; the suspension arm is configured on a dual-axis driver, and the dual-axis driver can drive the suspension arm to execute the Y-axis Bidirectional movement in the Z-axis direction; a plurality of sensing elements are arranged on the suspension arm at intervals along the X-axis direction and the Y-axis direction to form a suspended detection surface on the suspension arm domain; the control unit is built with a contour standard value of a plurality of inner ribs, and is electrically connected between the dual-axis driver and the plurality of sensing elements; the control unit can drive the dual-axis driver to cause The suspension arm is implanted in the slot on each layer, The plurality of sensing elements on the detection area are driven to detect a level of each of the plurality of side ribs and the suspended support rib layer by layer, and the control unit compares each level with the contour standard. value to obtain a defect detection result; wherein, the profile standard value includes the standard positions of the plurality of side ribs of the slots in each layer and the suspended support ribs located in the X-axis, the Y-axis and the Z-axis. , the detection area performs a distance measurement movement of a plurality of side ribs and at least one suspended support rib layer by layer along the Y-axis direction, and the detection area also performs a layer change layer by layer along the Z-axis direction. type movement, wherein during the ranging movement and the layer-changing movement, a plurality of the sensing elements are excluded from contacting a plurality of the inner ribs, and the level includes the level of a plurality of the side ribs , the position of the suspended support rib and the position between the side rib and the suspended support rib.

In further implementation, the inner rib defect detection device further includes a machine equipped with the dual-axis driver. The machine is also provided with a fixed surface for placing the box, and the control unit is configured on the machine. On stage. Wherein, the dual-axis driver includes: a pair of slide rails fixed on the machine table along the Y-axis direction, a slide table that is transmission-connected to the pair of slide rails to perform the Y-axis movement, and a transmission A slide is connected to the slide to perform the Z-axis movement, and the suspension arm is placed on the slide along the Y-axis and is then configured on the dual-axis driver to drive the suspension The plurality of sensing elements on the arm execute the ranging movement and the layer-changing movement synchronously.

In a further implementation, the plurality of sensing elements include a pair of edge rib distance measuring elements and a pair of support rib illumination elements spaced apart along the X-axis direction. Wherein, the suspension arm has two arm parts spaced apart from each other along the X-axis direction, and a plurality of the sensing elements are dispersedly arranged on the two arm parts to form the detection area; the slots at each layer The X-axis area is divided into two grooves located on both sides of each suspended support rib. Each side rib distance measuring element and each support rib irradiation element are spaced on each arm for implantation. The ranging movement is performed in each groove portion. Accordingly, the following content can be further implemented: the distance measurement movement is a continuous movement of the detection area along the Y-axis direction or a step movement of multiple fixed points, driving the pair of side ribs to measure distance. The element can project and receive a distance measuring light on each side rib in the X-axis direction to detect the position of each side rib.

Each side rib protrudes along the Z-axis direction to form at least one hill portion, and the distance measurement movement is a continuous movement of the detection area along the Y-axis direction or a step movement method of multiple fixed points. The formula drives the pair of side rib distance measuring elements to project and receive a distance measuring light in the X-axis direction to detect the position of at least one of the side ribs and the mounds. Furthermore, the pair of side rib distance-measuring elements are respectively equipped with a triangular lens in the X-axis direction, and each of the three ribs can reflect the light projected and recovered by the pair of side-rib distance-measuring elements in the X-axis direction. The ranging light becomes the Z-axis ranging light, and at least one of each of the ribs and the mounds is illuminated by the Z-axis ranging light to detect the respective levels. .

Each of the ribs extends along the Y-axis direction or is formed at intervals. The distance measurement movement is a continuous movement of the detection area along the Y-axis direction or a stepwise movement of multiple fixed points, driving the pair of The side rib distance measuring element can project and receive a distance measuring light toward each side rib in the X-axis direction during the distance measurement movement process, so as to detect the position of each side rib.

The pair of supporting rib irradiating elements can project a contrasting light to each other in the X-axis direction, and each suspended support rib receives the projection of the contrasting light to detect the level.

Each suspended support rib forms an arc convex portion along the Z-axis direction, and the pair of support rib irradiation elements can project a contrasting light beam to each other in the X-axis direction to detect each side rib and each hill. The level of at least one of the parts.

The level between the side ribs and the suspended support rib is detected by the pair of side rib distance measuring elements and the level of each of the support ribs by the pair of support rib irradiation elements. Afterwards, the control unit compares each other and knows.

In addition, in a further implementation, an end wall is formed on the end side of each side rib, and the plurality of sensing elements further include a pair of end wall detectors arranged along the X-axis direction for detecting the end wall. distance element, each end wall distance measuring element is arranged on each arm and with each side rib distance measuring element, the detection area is composed of the pair of side rib distance measuring elements, the pair of support rib irradiation elements and the pair of end Wall ranging elements are formed spaced apart from each other.

In a further implementation, the detection area allows a projection light position difference maintained by each of the above-mentioned sensing elements in the Z-axis direction.

In a further implementation, the slots of each layer are divided into two groove parts located on both sides of each suspended support rib in the X-axis direction, and each end wall distance measuring element is arranged on each arm part, The distance-measuring elements of each of the side ribs and the irradiating elements of each of the support ribs are spaced apart from each other, so as to be implanted in each of the grooves to perform the distance-measuring movement.

Another preferred embodiment of the present invention provides a method for detecting inner rib defects of a front-opening substrate transfer box, which can be implemented based on the above-mentioned detection device. The method for detecting inner rib defects includes: constructing the inner rib contour of the box body. a contour standard value, and use multiple sensing elements to be spaced apart to build a suspended detection area, which is used to drive the detection area to be implanted in the slots of each layer, so that the multiple sensing elements Detect a level of each side rib and each suspended support rib layer by layer, and compare each level with the profile standard value to obtain a defect detection result; wherein the profile standard value includes the slots of each layer The plurality of side ribs and the suspended support rib are located at the standard coordinates of the X-axis, the Y-axis and the Z-axis, and the plurality of sensing elements are distributed along the Y-axis to form the detection surface The detection area performs a distance measurement movement of a plurality of side ribs and at least one suspended support rib layer by layer along the Y-axis direction, and the detection area performs a distance measurement movement layer by layer along the Z-axis direction. A layer-by-layer movement, wherein during the ranging movement and the layer-changing movement, a plurality of the sensing elements are excluded from contacting a plurality of the inner ribs, and the plurality of levels include detecting a plurality of all the inner ribs layer by layer. The level of the side rib, the level of the suspended support rib, and the level between the side rib and the suspended support rib.

In further implementation, the inner rib defect detection method also includes driving the detection area to select and execute a variety of loop movement paths according to the layout changes of the plurality of side ribs of the box, so as to facilitate the inspection inside the box. For defect detection of multiple internal ribs, the multiple circular movement paths include: a waveform movement path and a serpentine movement path; wherein, when a plurality of the side ribs are spaced apart along the Y-axis, the waveform The movement path is formed by the ranging movement of the detection area in series with the layer-changing movement; in addition, when a plurality of the side ribs are extended and distributed along the Y-axis, the serpentine movement path is The detection area performs a reciprocating ranging movement and is connected in series with the layer-changing movement to interactively construct the detection area.

Based on the above, the present invention can be applied to automated production lines that use front-opening substrate transfer boxes to carry and transfer substrates for processing, and perform automated internal rib defect detection on multiple internal ribs of the box to facilitate detection of defects that have been The existence of a box body with internal ribs that is offset or deformed avoids the problem that the substrate is difficult to implant into the slots on each layer, or the substrate is stuck in the slot and is difficult to take out.

In addition, the suspended detection area provided by the present invention and the various loop movement paths that the detection area can perform are helpful to adapt to the complex inner rib structure of the box body of the front-opening substrate transfer box and avoid the detection The area collides or contacts multiple inner ribs or inner walls around the accommodation cabin during the movement detection process, and has the effect of increasing the detection speed.

To this end, the details related to the implementation of the present invention will be further described below with accompanying drawings.

10:Box body

11: Open your mouth

12: Accommodation cavity

13: Inner ribs

13a:Rib

13a’: Hillside

13a”: End wall

13b:Suspended support rib

13b’: Arc convex part

20:Substrate

21:Slot

21a,21b: Groove

30:Machine

31: Countertop

32: Positioning column

40:Suspended arm

41,42:Arm

43:Support part

50: Sensing element

51: Side rib distance measuring element

52: Support rib irradiation element

53:三稜鏡

54: End wall distance measuring element

60: Dual axis drive

61:Slide rail

62:Slide

63:Sliding seat

A,B,C,D,E,F: punctuation

L: waveform movement path

L1: ranging movement

L2: Level-changing movement

M,N: Snake moving path

M1, N1: ranging movement

M2, N2: Level-changing movement

N2: Reset movement

Q: Detection area

T1, T2: gap space

S1 to S4: Steps

T1, T2: gap space

δ : illumination position difference

Figure 1 is a schematic three-dimensional view of the box body of an open substrate transfer box before inspection according to the present invention. It illustrates that the box has inner ribs for constructing multi-layer slots to accommodate substrates.

FIG. 2 is a schematic top view of the inner rib shown in FIG. 1 , illustrating that the inner rib constructs a detection area in the Y-axis direction.

Figure 3 is a schematic front view of the inner rib shown in Figure 2, illustrating that the detection area allows a projection light position difference to be generated in the Z-axis direction.

Figure 4 is a schematic three-dimensional configuration diagram of the defect detection device of the present invention.

FIG. 5 is a schematic front view of FIG. 4 , illustrating that the box body of the front-opening substrate transfer box can be placed in the defect detection device to detect defects in inner ribs.

FIG. 6 is a three-dimensional enlarged schematic diagram of the edge rib distance measuring element shown in FIG. 4 equipped with a three-dimensional sensor to detect the level of the mound or edge rib.

FIG. 7 is an enlarged plan view of the edge rib distance measuring element shown in FIG. 4 equipped with a three-dimensional detector to detect the level of the mound or edge rib.

FIG. 8 is an enlarged plan view of the support rib irradiation element shown in FIG. 4 for detecting the level of the suspended support rib.

FIG. 9 is an enlarged plan view of the edge rib distance measuring element shown in FIG. 4 for detecting the level of the edge ribs.

Figure 10 is a program block diagram of the defect detection method of the present invention.

FIG. 11 is an explanatory diagram of FIG. 2 , illustrating that the present invention can preset multiple marking points to be detected for the inner rib.

FIG. 12 is a schematic diagram of a circular movement path in which the detection area shown in FIG. 2 executes a waveform movement path.

FIG. 13 is a schematic diagram of a circular movement path in which the detection area shown in FIG. 2 executes a serpentine movement path.

FIG. 14 is a schematic diagram of the circular movement path of the detection area shown in FIG. 2 executing another serpentine movement path.

First, please refer to Figure 1, which discloses a box body 10 of a front-opening substrate transfer box (FOUP). For convenience of explanation, an X-axis, a Y-axis and a Z-axis are marked in Figure 1, so The above-mentioned axial direction, according to the three-dimensional rectangular coordinate system, should include the direction pointed by the X, Y or Z axis in the positive and negative quadrants. The box body has an opening 11 that can be closed by a front cover (not shown), and the box body 10 also has a storage cabin 12 connected to the opening 11. The storage cabin 12 can provide a plurality of substrates. 20 (or carrier board) is implanted from the opening 11 along the Y-axis and is accommodated in the holding chamber 12 in a layered manner, so that one transfer box can accommodate and carry a plurality of the substrates 20 for necessary processing. process processing.

Further, please refer to FIGS. 1 to 3 together. It can be seen from FIG. 1 that a plurality of inner ribs 13 are formed on the inner wall around the receiving compartment 12 of the box 10 to construct a rib extending along the Y-axis and along the There are a plurality of slots 21 (slots) in the form of layers distributed at intervals in the Z-axis direction. Figures 2 and 3 respectively disclose the side ribs 13a and suspended support ribs 13b distributed in the slots 21 of each layer shown in Figure 1; furthermore, the slots 21 of each layer are respectively extended along the Y-axis direction. Moreover, there are two side ribs 13a protruding relatively along the X-axis direction, and a suspended support rib 13b located between the two-side side ribs 13a and protruding along the Y-axis direction. Accordingly, each of the side ribs 13a and each of the suspended support ribs 13b can protrude into the accommodating cavity 12 in a divergent manner, thereby forming a plurality of inner ribs 13 in the box body 10; wherein , from Figure 2 and Figure 3, it can be seen more clearly that the side ribs 13 and the suspended support ribs 13b in the slots 21 of each layer are spaced apart and corresponding to each other, so that each substrate 20 can be accommodated in each slot. 21, the double-sided side ribs 13a are used to support the double-sided end edges of the substrate 20, and the suspended support ribs 13b are used to support the center of the bottom surface of the substrate 20, which can avoid when multiple substrates 20 shown in Figure 1 are accommodated separately. When inside each slot 21, collapse or mutual interference occurs.

Next, with continued reference to Figures 2 and 3, it can be seen that the side ribs 13a and the suspended support ribs 13b in the slots 21 of each layer are distributed together in a plane constructed in the XY axis direction (as shown in Figure 2). The present invention A detection area Q is defined based on the plane in the XY axis, and the detection area Q allows a projection in the Z-axis direction based on the thickness (or height) of the side rib 13a and the suspended support rib 13b itself. Optical position difference δ (shown in Figure 3).

As shown in Figures 2 and 3, it is also disclosed that in a further implementation, each of the side ribs 13a can be formed with at least one hill portion 13a' protruding along the Z-axis direction. In addition, each of the suspended support ribs 13b can also form an arc convex portion 13b' along the Z-axis direction to reduce the contact area of the inner ribs when supporting the substrate.

In addition, the side ribs 13a and suspended support ribs 13b in the above-mentioned box body 10 can also be used according to customized requirements, such as the so-called ribs in the box body of the material box shown in the TWI762273 patent. (similar to the above-mentioned side ribs 13a) and support rods (similar to the above-mentioned suspended support ribs 13b); in particular, the ribs (similar to the above-mentioned side ribs 13a) mentioned in the TWI762273 patent are made along the In addition, the ribs mentioned in the TWI762273 patent (similar to the above-mentioned side ribs 13a) can also be in the form of ribs, or the above-mentioned hills 13a' are formed on the ribs and side ribs. Or on the ribs, they are all in the form of internal ribs of the box 10 that can accept the defect detection described later in the present invention.

The present invention provides a defect detection device for the inner rib 13 of the box body 10, which is used to detect whether the predetermined position (or alignment) of the side rib 13a and the suspended support rib 13b is correct; therefore, the box The inner rib 13 of the body 10 is regarded as the object used for detection in the present invention.

Next, please refer to Figure 4, which reveals that the defect detection device of the present invention can be presented in the form of a machine platform 30, and a suspension arm 40 is disposed on the machine platform 30, and the suspension arm 40 is used to deploy multiple Sensing element 50, and it is known that a control unit (not shown) can be disposed in the machine platform 30 to control the operation process of the suspension arm 40 and the sensing element 50 on the machine platform.

In addition, a table 31 arranged along the X-Y axis for placing the box 10 can also be planned on the machine 30. A plurality of positioning posts for inserting the box 10 are scattered on the table 31. 32; Accordingly, as shown in Figure 5, the box 10 to be inspected can be placed on the table 31 through a robotic arm, transportation equipment or manually. A plurality of positioning holes have been opened at the bottom of the box 10 ( (not shown) provides corresponding embedding of the positioning posts 32 so that the box 10 can be stably placed on the table 31 and stopped. When the box 10 is placed, its opening 11 must be along the The Y-axis is open toward the placement position of the suspension arm 40, so that the suspension arm 40 can be implanted into the accommodation compartment 12 of the box 10 through the opening 11 during operation.

As shown in FIGS. 4 and 5 , the suspension arm 40 can be in an H-shaped shape on the X-Y axis plane, so that the suspension arm 40 has two arm portions 41 spaced apart from each other along the X-axis direction. 42, and the support part 43 connected between the two arm parts, the detection area Q is arranged in the area surrounded by the support part 43 and the two arm parts 41, 42, and the detection area Q is on the cantilevered part. The holding arm 40 can be in a suspended state. In addition, the machine platform 30 is equipped with a dual-axis driver 60 so that the suspension arm 40 can be disposed on the dual-axis driver 60 . The dual-axis driver 60 includes a pair of slide rails 61 fixed on the machine platform 30 along the A slide base 63 is connected to the slide table 62 to perform the Z-axis movement; one end of the suspension arm 40 can be placed on the slide base 63 of the dual-axis driver 60 along the Y-axis direction, and can be suspended The other end of the arm 40 can be suspended in the space above the machine platform 30 along the Y-axis direction; with this configuration, the arm 40 can perform movement in the Y-axis direction by virtue of the slide table 62, and The sliding seat 63 can be used to perform the Z-axis movement, so that the suspension arm 40 can be implanted into the box body 10 and perform biaxial movement along the Y-Z axis by being driven by the biaxial driver 60. The detection area Q is driven to perform a ranging movement in the Y-axis direction layer by layer and a layer-changing movement in the Z-axis direction layer by layer (details will be described later). In this implementation, the transmission connection between the slide rail 61 and the slide table 62 of the dual-axis driver 60 in the Y-axis direction, or/and the transmission connection between the slide table 62 and the slide base 63 in the Z-axis direction, can be A common servo motor is used to provide power and is equipped with an optical ruler in the Z-axis, or Y and Z-axis directions to achieve higher absolute accuracy in transmission and detection of moving distance; in addition, although the dual-axis driver 60 is not disclosed, it can drive The suspension arm 40 performs a third axial movement in the X-axis direction, but additionally implements a unidirectional movement or a bidirectional reciprocating movement in the X-axis direction, which are both within the technical scope contemplated by the present invention and can be easily transformed and applied. To Chen Ming.

Furthermore, in the implementation shown in FIG. 4 , a plurality of the sensing elements 50 can be installed on the two arm portions 41 and 42 of the suspension arm 40 at intervals along the X-Y axis; in other words, the A plurality of the sensing elements 50 distributed in the X-Y axis direction are also arranged in the suspended detection area Q. The plurality of sensing elements 50 include a pair of edge rib distance measuring elements 51 and a pair of support rib irradiation elements 52 spaced apart along the X-axis direction. in: Please refer to Figure 11 first. It can be seen that each slot 21 shown in Figure 1 is formed with two groove portions 21a and 21b located on both sides of each suspended support rib 13b in the X-axis direction. Each of the opposite side ribs is The distance element 51 and each support rib irradiation element 52 are arranged on each of the arm portions 41 and 42 at a distance from each other for implanting into each of the groove portions 21a and 21b to perform the ranging movement.

As shown in FIG. 6 , each side rib distance measuring element 51 in this embodiment is a sensor that can project laser light to an object and receive the light reflected by the laser from the object to detect the distance of the object. For example, in FIG. 4 , the double-sided rib distance measuring elements 51 that are arranged on both sides of the suspension arm 40 for measuring each other can project and receive the respective side ribs 13 a in the X-axis direction. The laser ranging light is used to detect the position of each side rib 13a; among them, since the detection area Q allows the existence of the projection position difference δ shown in Figure 3 in the Z-axis direction, each side rib 13a The distance measuring element 51 can project and receive the distance measuring light in the light projection position difference δ . In other words, the distance measuring light projected by each side rib distance measuring element 51 can cover both sides of the slots 21 of each layer in the Z-axis direction. The actual height (or thickness) position of each side rib 13a and each hill portion 13a' is convenient to detect at least one of the side ribs 13a and each hill portion 13a' on both sides of each slot 21. The actual distance is one, and the control unit calculates and compares whether the position of each side rib 13a and each hill portion 13a' is skewed or deformed, and then determines the position of each side rib 13a on both sides of each layer slot 21 Whether the intervals or/and the hills 13a' are located on the same plane (that is, coplanar).

Furthermore, please refer to FIG. 6 and FIG. 7 to reveal that the adjacent side of each side rib distance measuring element 51 can also be equipped with a distance measuring light in the X-axis direction that can reflect the distance-measuring light in the X-axis direction. A triangular lens 53 of the distance measuring light in the Z-axis direction is positioned above each side rib 13a or each hill portion 13a' along the Z-axis direction. The mirror 53 has the characteristics of an oblique mirror, so that the oblique mirror of the three mirrors 53 can reflect the laser light (indicated by the dotted arrow) projected by the rib distance measuring element 51 at a reflection angle of, for example, 90 degrees. Reflect toward the Z-axis, so as to project onto each of the mounds 13a', and determine whether the heights of the mounds 13a' distributed along the Y-axis in each layer of slots 21 are consistent in the Z-axis direction, so as to determine whether Whether it is skewed or deformed; similarly, the combination of each side rib distance measuring element 51 and the three ribs 53 can also project the height of each side rib 13a in the Z-axis direction in the slots 21 of each layer at points. Whether they are consistent, to determine whether there is any distortion or deformation (that is, to detect whether the level is up to standard), and explain it.

As shown in FIG. 8 , it is revealed that the pair of support rib irradiation elements 52 in this implementation can project a contrasting light (i.e., laser light) to each other in the X-axis direction to detect the authenticity of the object. Taking a position sensor as an example, it is explained that the suspended support ribs 13b in the slots 21 of each layer can Receive the projection of the contrasting light and detect whether it is skewed or deformed (that is, detect whether its level is up to standard). Furthermore, the contrasting light rays projected by the pair of support rib irradiation elements 52 can maintain a projection position difference δ in the Z-axis direction, so the range in which the contrasting light rays can be projected includes the suspended shapes in the slots 21 of each layer. Check whether the actual height (or thickness) of at least one of the support rib 13b and the arc convex portion 13b' is skewed or deformed (that is, it is detected whether its level is up to standard).

In addition, as shown in FIG. 6 , it can be seen that the plurality of sensing elements 50 may also include a pair of end wall ranging elements 54 arranged along the X-axis direction. The pair of end wall ranging elements 54 may also be capable of projecting radar. A sensor that emits light to detect the distance of an object is used to detect the actual distance between the end walls 13a" of the end sides of each side rib 13a as shown in Figure 9, or the actual distance between the two inner walls of the accommodation cabin 12. distance, and then determine whether the end wall 13a" of each side rib 13a or the double-sided inner wall of the accommodation cabin 12 is skewed or deformed (that is, whether its level is up to standard).

The control unit is built with a profile standard value of the inner ribs 13 of the box 10 and is electrically connected between the dual-axis driver 60 and the sensing elements 50 so that the control unit can The driving command is issued to drive the dual-axis driver 60 to drive the suspension arm 40 to be implanted in the slots 21 of each layer. The plurality of sensing elements 50 on the detection area Q can be synchronously The distance measurement movement is performed layer by layer along the Y-axis direction. The distance measurement movement can be performed in a stepwise movement mode or a continuous movement mode at multiple fixed points to detect the side ribs 13a and the hill portions. 13a', the end wall 13a", the suspended support rib 13b, and the arc convex portion 13b' are located at multiple levels in the Y-axis direction; and, the multiple sensors on the detection area Q The measuring element 50 can also synchronously perform the layer-changing movement layer by layer along the Z-axis direction to sequence between multiple ranging movements, and then detect multiple all the internal ribs 13 in each layer. The control unit compares each level with the contour standard value to obtain a defect detection result. The contour standard value includes a plurality of the side ribs 13a, the hill portion 13a', the The end wall 13a", the suspended support rib 13b, and the arc convex portion 13b' are respectively located at standard positions in the X-axis direction, the Y-axis direction, and the Z-axis direction, and a plurality of the sensing elements 50; furthermore, During the ranging movement and the layer-changing movement, the plurality of sensing elements are excluded from contacting the plurality of inner ribs.

In addition, the control unit can detect the level of the double side ribs 13a in the slots 21 of each layer through the pair of side rib distance measuring elements 51 and detect the level of each side rib 13a through the pair of supporting rib irradiation elements 52. The position of the central suspended support rib 13b is then compared with the profile standard value to determine the position between the double side ribs 13a and the central suspended support rib 13b.

The present invention also provides a method for detecting inner rib defects of a front-opening substrate transfer box, which is used to more specifically disclose the details of detecting the inner ribs 13 of the above-mentioned box body 10 . Please refer to Figure 10, which discloses a process block diagram of the defect detection method, including sequentially executing the following steps S1 to S4:

Step S1: Construct the outline standard value of the inner rib of the box

This step takes the structure of the box 10 shown in Figure 1 as an example. The standard outline of the box 10 must be built into the control unit in advance. The standard outline refers to a plurality of inner ribs 13. The plurality of side ribs 13a and the plurality of suspended support ribs 13b of the constructed multi-layer slot 21 are distributed in the contour features of the accommodation compartment 12. Among them, when at least one of the end wall 13a" of the accommodation cabin 12, each side rib 13a has a hill portion 13a', and each of the suspended support ribs 13b has an arc convex portion 13b', it must be selected as For the location of defect detection, the contour standard value should also include the contour characteristics of at least one of the end wall 13a", the hill portion 13a', and the arc convex portion 13b'. In other words, a plurality of computer digital images or numerical values of the standard coordinates of the inner ribs 13 located in the X-axis, Y-axis and Z-axis can be provided by the box design end or measured by oneself as the inner ribs 13. Contour standard value and is built into the control unit. Alternatively, a box standard fixture that has been measured and calibrated in three-dimensional axial direction is provided by the box design end, and the following steps S2 to S3 are first performed to construct in advance the location of the inner ribs 13 of the box standard fixture. The computer digital images or values of the standard coordinates in the X-axis, Y-axis and Z-axis are used as the outline standard values of the inner rib 13 and are built into the control unit.

Please continue to refer to Figure 11, which illustrates that the present invention can also preset a plurality of marking points A, B, C, D, E, F to be detected in the control unit according to the outline standard value of the inner rib of the box. In Figure 11 It is disclosed that the marking points A, B, C, D, E, and F are set up on the plurality of hill portions 13a' arranged in the X-Y plane; among them, the marking points A and B are collinear in the X-axis direction, and the marking points C and D are In the X-axis direction, the punctuation points E and F are collinear in the X-axis direction, the punctuation points A, C, and E are collinear in the Y-axis direction, and the punctuation points B, D, and F are collinear in the Y-axis direction. Accordingly, the marking points A, B, C, D, E, and F can serve as the detection area Q when performing the ranging movement in the Y-axis direction, and the plurality of sensing elements 50 (details will be described later) The target point for initiating detection can be known with certainty. The preset positions of the above-mentioned punctuation points are not limited to this. In other words, wherever the end wall 13a", Each of the side ribs 13a, each of the hill portions 13a', each of the suspended support ribs 13b, and each of the arcuate convex portions 13b' can be used as positions for establishing the mark points in the present invention.

In addition, the control unit can also pre-set a specific error range that allows the detected inner ribs 13 to deviate from the contour standard value in the X-axis, Y-axis and Z-axis according to customized requirements. The image or value of the specific error range can use the positions of the above-mentioned punctuation points A, B, C, D, E, and F as the reference point on the coordinates. When the control unit detects that the deviation (or deformation) of any of the marking points (for example, marking point B) falls within the error range, it is determined that none of the internal ribs 13 of the box 10 is correct. When there is a defect of skew or deformation, the box 10 is classified as a good product; when the control unit detects that the deviation of any of the marking points (for example, marking point B) does not fall outside the error range, it is determined that the box 10 is a good product. If at least one of the plurality of internal ribs 13 of the body 10 has a defect such as distortion or deformation, the box body 10 is classified as a defective product.

Step S2: Deploy a suspended detection area

In this step, multiple sensing elements 50 disclosed in FIGS. 4 and 5 can be used to construct the detection area Q shown in FIGS. 2 and 3 . The multiple sensing elements 50 can be, for example, radar radiation, infrared light or other light sensors that can emit light and receive or identify whether the light is blocked by an object or the distance of the object; it can be seen from the implementation details of the aforementioned flaw detection device that multiple of the sensors The element 50 particularly includes the pair of edge rib distance measuring elements 51 and the pair of support rib illumination elements 52, which drives a plurality of the sensing elements 50 to be arranged in a mutually spaced distribution form to form the detection area Q, and the detection area Q The domain Q appears to be suspended in space through the suspension arm 40 .

Step S3: Drive the detection area to detect the level of the inner ribs

In this step, the dual-axis driver 60 disclosed in FIG. 4 and FIG. 5 can be used, and a driving command is issued to the dual-axis driver 60 through the control unit that has built-in the profile standard value to drive the suspension arm 40 Implanted into the accommodation cabin 12 of the box 10, the detection area Q is caused to perform biaxial movement along the Y-Z axis in the accommodation cabin 12. The biaxial movement particularly includes the aforementioned layer-by-layer execution. The distance measuring movement in the Y-axis direction and the layer-changing movement in the Z-axis direction are performed layer by layer to perform the detection of each mark point on the plurality of inner ribs 13 as shown in Figures 6 to 9. distance movement and the layer-changing movement, as well as the steps of projecting and receiving the distance measurement light and projecting the contrast light, so as to obtain the alignment of multiple inner ribs 13 .

Further, taking the punctuation points A, B, C, D, E, and F disclosed in FIG. 11 as an example, the pair of side rib distance measuring elements 51 equipped with the three ribs 53 shown in FIGS. 6 and 7 will be described. When performing ranging movement along the Y-axis, the positions of the plurality of hill portions 13a' at marking points A and B, marking points C and D, and marking points E and F can be detected sequentially and synchronously, or/and sequentially Synchronously detecting the levels of the plurality of hill portions 13a' at the mark points E, F, mark points C, D and mark points A, B, wherein the ranging movement includes taking the mark points A, B, C, D , E, and F are used as fixed points to project and receive light in a step-by-step movement manner, or the punctuation points A, B, C, D, E, and F are used as target points for dynamic scanning to project and receive light (i.e., the (the continuous movement method described above); in addition, the distance measurement movement can also ignore the existence of the punctuation point, and directly perform a continuously moving dynamic light scanning layer by layer based on the outline standard value of the inner rib 13, so as to facilitate layer-by-layer The layer obtains the levels of a plurality of hill portions 13a'. When the ranging movement is carried out in a continuous moving manner, it can be distinguished that the moving speed when detecting the inner rib 13 or its target point is relatively slower than the ranging speed when the inner rib 13 or its target point is not detected. Movement speed, so as to increase the speed of ranging movement while ensuring detection accuracy.

On the other hand, as can be seen from Figure 11, in addition to the side rib distance measuring element 51 and the support rib irradiation element 52 respectively arranged on the two arm portions 41 and 42, the end wall distance measuring element 54 is also arranged. So that the edge rib distance measuring element 51 and the support rib irradiation element 52 can be implanted into each of the groove portions 21a and 21b together (that is, synchronously) to perform the distance measuring movement.

During the process of performing the above ranging movement, regardless of whether the mark exists or is set up on each side rib 13a or its hill portion 13a', it can be seen from Figure 11 that each side with the three ridges 53 shown in Figure 6 The rib distance measuring element 51 will step or continuously move along the Y-axis direction following the detection area Q, and then synchronously detect the position of each side rib 13a; and, from Figure 11, it can be seen that each support rib shown in Figure 8 The irradiation element 52 will step or continuously move along the Y-axis direction following the detection area Q, and then simultaneously detect the level of each of the suspended support ribs 13b, each of the side ribs 13a or/and each of the arc convex portions 13b' . In the same way, it can be seen from Figure 11 that each end wall distance measuring element 54 shown in Figure 9 will also step or continue to move along the Y-axis along the detection area Q, thereby synchronously detecting each end wall 13a" or accommodating The alignment of both side inner walls of the cabin 12. In addition, the alignment between each side rib 13a and each suspended support rib 13b is detected by the pair of side rib distance measuring elements 51. After detecting the position of each suspended support rib 13b by the pair of support rib irradiation elements 52, the control unit determines the side ribs according to the above calculation and mutual comparison method. Whether or not the level between 13a and each cantilevered support rib 13b falls within the specific error range to determine whether the level between each side rib 13a and each cantilevered support rib 13b is skewed or not. Deformation defects.

It is also explained here that among the plurality of sensing elements 50 of the present invention, each side rib distance measuring element 51 and each support rib irradiation element 52 are indispensable and necessary components, and each triangular rib distance measuring element 51 is an indispensable component. The mirror 53 and each end wall distance measuring element 54 are additional elements that can be mounted according to measurement requirements. In addition, each of the side rib distance measuring elements 51 and each of the side rib distance measuring elements 51 are made of laser, infrared light or other photo sensors that can emit light and receive or identify whether the light is blocked by an object or whether the light is blocked by an object or the distance between the object and the object. The support rib irradiation element 52 and each end wall distance measuring element 54, after each detecting the level of the inner rib 13, can each generate an analog or digital level signal and transmit it to the control unit for storage. In order to facilitate the comparison process of step S4 described later.

Furthermore, when detecting each side rib distance measuring element 51 and each support rib illuminating element 52 on the detection area Q, or each side rib distance measuring element 51, each supporting rib illuminating element 52 and each end wall measuring element, After the distance element 54 completes one layer of distance measurement movement, the dual-axis driver 60 shown in Figure 4 will drive the suspension arm 40 so that the detection area Q moves upward or downward along the Z-axis to perform one layer of distance measurement at the height of the slot 21 , so as to continue the ranging movement of the slot 21 on another layer (described in detail later).

Please continue to refer to Figures 12 to 14, which sequentially reveal the schematic diagrams of three circular movements that can be implemented in the detection area Q; wherein: Figure 12 reveals that the plurality of side ribs 13a in the box 10 are respectively In the Y-axis direction, there is a form of spaced distribution (ie, non-extended distribution), so that between the plurality of side ribs 13a in the Y-axis direction of each single layer, and the Y-axis direction of each single layer is closest to the accommodation cabin A gap space T1 is formed between the side ribs 13a of the bottom wall 12a of 12 and the bottom wall 12a. Faced with such a layout of inner ribs, the detection area Q can be made to perform a waveform movement path L along the Y-Z axis plane in the accommodation cabin 12; the waveform movement path L is formed by all the movement paths along the Y-axis direction. The range-finding movement L1 is connected in series with the layer-changing movement L2 along the Z-axis to construct a circular movement path (the dotted line in Figure 12 represents the movement path, and the solid arrow represents the movement direction); among them, when the detection area When Q performs the layer-changing movement L2 along the Z-axis direction, the gap space T1 can allow the side rib distance measuring elements 51 and the three ribs 53 on each side to move smoothly along the Z-axis direction without causing collision or collision. Contact the side rib 13a or the bottom wall 12a.

Figure 13 reveals that each of the side ribs 13a in the box 10 is provided with a plurality of arcuate convex portions 13a' at intervals, and the side ribs 13a on both sides of each layer are extended along the Y-axis direction (ie, non-spaced distribution). ) shape, so that there is no gap space between each side single-sided rib 13a in the Y-axis direction of each single layer, and there is no gap space between the end of each side single-sided rib 13a and the bottom wall 12a of the accommodation cabin 12 , or even if there is a gap space, it is very small, which is not enough to allow the one-sided side rib distance measuring element 51 and the three ribs 53 to move smoothly along the Z-axis direction. Faced with such a layout of inner ribs, the detection area Q can be made to perform another serpentine movement path M along the Y-Z axis plane in the accommodation cabin 12. The serpentine movement path M is in the slots on each layer. The distance-measuring movement M1 along the Y-axis direction is performed once each time in the space of 21, and then the layer-changing movement M2 is connected in series to interactively construct a loop movement path (the dotted line in Figure 13 represents the movement path, the solid arrow indicates the forward forward movement direction, and the hollow arrow indicates the backward reset movement direction), so that each layer-changing movement M2 can be executed outside the opening 11 of the accommodation cabin 12 . Figure 13 shows the process of performing a ranging movement M1 back and forth along the Y-axis. It can be considered that the reciprocating (or called back-and-forth) ranging movement M1 is performed along a collinear path along the Y-axis, and There is no layer-changing movement M2 in the Y-axis direction within the accommodation cabin 12 . Accordingly, it is possible to prevent the one-sided side rib distance measuring element 51 and the tripod 53 from smoothly moving along the Z-axis without colliding with or contacting the side rib 13a or the bottom wall 12a.

Figure 14 reveals that the inner ribs of the box 10 are composed of a plurality of double-sided arc convex portions 13a' arranged in layers (the aforementioned side ribs 13a do not exist), and the multiple arc convex portions 13a' on one side of each layer are It is in the form of spaced distribution in the Y-axis direction, so that there is a gap space T2 between each single-sided arc convex portion 13a' in the Y-axis direction of each single layer, which can provide distance measurement of each side rib. The components 51 and 53 move smoothly along the Z-axis direction. Faced with such a layout of inner ribs, the detection area Q can be made to perform another serpentine movement path N along the Y-Z axis plane in the accommodation cabin 12. The serpentine movement path N is in the slots on each layer. After performing the ranging movement N1 along the Y-axis in the space of 21, a recovery movement N2 is performed along the Y-axis, and then the layer-changing movement N3 is performed in series along the Z-axis to interactively construct The loop movement path (the dotted line in Figure 14 represents the movement path, the solid arrow represents the forward movement direction, and the hollow arrow represents the retreat movement direction). Among them, each return movement N2 includes that after the distance measurement movement N1 of each layer reaches the arcuate convex portion 13a' closest to the bottom wall 12a of the accommodation cabin, the gap space T2 is then used to move along the Y-axis direction. common lines The diameter is partially reset to between the two adjacent arc convex portions 13a', so that the subsequent layer-changing movement N3 can be performed along the Z-axis direction between the two adjacent arc convex portions 13a'; so The distance measurement movement N1 includes, after completing the layer-changing movement N3 along the Z-axis between the two adjacent arc convex portions 13a', then continuing to move locally along the Y-axis to the closest to the bottom wall 12a. The process of the arc convex portion 13a' position; Furthermore, each reset movement N2 also includes a process of reset movement from the arc convex portion 13a' position closest to the bottom wall 12a along the Y-axis direction to outside the opening 11 in each layer, so as to The layer-changing movement N3 performed outside the opening 11 is continued. In this way, it is possible to avoid that the single-sided side rib distance measuring element 51 and the three ribs 53 can smoothly perform the layer-changing movement N3 along the Z-axis direction in the accommodation cabin 12 without causing collision or collision. Contact the arc convex portion 13a' or the bottom wall 12a.

Among the above, compared with the single-sided side rib distance measuring elements 51 and the three side ribs 53, the end wall distance measuring elements 54 shown in Figure 11 are relatively farther away from each side rib in the X-Z axis direction. 13a, each arc convex portion 13a' and each end wall 13a", therefore when the detection area Q is executing the above-mentioned waveform movement path L or the above-mentioned two serpentine movement paths M, N, each end wall The distance measuring element 54 will not collide or contact the side ribs 13a, the arc convex portions 13a' and the end walls 13a". Similarly, since the pair of support rib irradiation elements 52 are located on both sides of the suspended support rib 13b in the X-Z axis direction, when the detection area Q is executing the above waveform movement path L or executing the above two During such serpentine movement paths M and N, the pair of support rib irradiation elements 52 will not collide or contact each of the suspended support ribs 13b.

It must be noted that the serpentine movement path M shown in FIG. 13 and the serpentine movement path N shown in FIG. 14 can be respectively implemented in a plurality of side ribs 13a shown in FIG. 12 distributed at intervals in the Y-axis direction. When the box body 10 is inspected, the inner ribs 13 can also be prevented from being collided or contacted. In any case, the implementations shown in Figures 12 and 13 only illustrate two implementations in which the detection area Q will not collide or contact each inner rib 13 during the execution of the circular movement path; in addition, the reason Changes other than the aforementioned changes to the position of the side ribs 13a of each layer due to customized requirements will naturally affect slight changes in the loop movement path. The present invention can still make corresponding movement path planning based on the above implementation content and spirit, so as to This prevents the inner rib 13 from encountering collision or contact during the defect detection process. It can be seen from this that in the process of driving the detection area Q to detect the level of the inner rib 13 in the present invention, a plurality of the The sensing element 50 can indeed eliminate collision or contact with multiple inner ribs 13, and can also select the nearest or best path, thereby improving the detection rate.

Step S4: Compare alignment and contour standard values

This step is performed by the control unit that has built-in the contour standard value. The control unit can be a commonly known programmable logic controller (PLC), numerical control (NC) or/and microcontroller (MCU). etc. are compiled into a control circuit, so that the control unit includes a storage body, a drive controller and a logic operator that are electrically connected to each other. Wherein, the storage body can store and convert computer digital images or values of the contour standard value, and can also store and convert multiple analog or digital level signals detected by the sensing element 50; the drive The controller can issue the driving command to the dual-axis driver 60 based on the computer digital image or value of the contour standard value to drive the detection area Q on the suspension arm 40 to execute the waveform movement path. L or the circular movement of the two serpentine movement paths M and N; Furthermore, the present invention can use the logic operator to define the specific error range of the contour standard value; the specific error range can be in various forms. The image or value of the inner rib 13 located on the X-Y-Z coordinates is defined by adding a positive or negative tolerance image or value allowed in quality control. During the definition process, the aforementioned punctuation points A, B, C, D, and E can be referred to. , the position of F is used as the coordinate reference point and the allowable positive and negative tolerances are added, or the specific error range is directly defined by the outline standard values of the inner walls around the accommodation cabin 12 and the overall image of the multiple inner ribs 13 ; Subsequently, the logic operator is used to compare whether the level signal falls within the specific error range to determine whether the inner ribs 13 of the box 10 have distortion or deformation defects. The level signal detected by the plurality of sensing elements 50 is obtained after the absolute value of the level signal is obtained through the optical ruler in the Z-axis direction, or the Y and Z-axis directions mounted on the servo motor. , is stored in the storage body to provide comparison by the logic operator; the comparison between the level signal and the image or value on the above-mentioned X-Y-Z coordinates by the logic operator is a simple application of known calculation techniques. It is a technical category that can be realized, so no further details will be given.

Step S5: Obtain defect detection results

As mentioned above, when the control unit detects the alignment of at least one of the side ribs 13a, the hill portion 13a', the suspended support rib 13b, and the arcuate portion 13b' in the box body 10, When the position falls within the error range, it is determined that the inner rib structure of the box 10 is a good product and can be used in the production line. Continue to use; when the control unit detects that at least one of the side ribs 13a, the hill portion 13a', the suspended support rib 13b, and the arc convex portion 13b' in the box 10 falls into the error When it is outside the range, the inner rib structure of the box 10 is judged to be a defective product and should be removed from the production line to avoid scratching the substrate when placing the substrate in the slot 21 of each layer, or causing the substrate to be difficult to implant into the slot or difficult to insert. Problem of removing from the slot.

The above embodiments only express the preferred embodiments of the present invention, but should not be construed as limiting the patent scope of the present invention. Therefore, the present invention shall be subject to the content of the claims defined in the scope of the patent application.

30:Machine

31: Countertop

32: Positioning column

40:Suspended arm

41,42:Arm

43:Support part

50: Sensing element

51: Side rib distance measuring element

52: Support rib irradiation element

60: Dual axis drive

61:Slide rail

62:Slide

63:Sliding seat

Claims (32)

An inner rib defect detection device of a front-opening substrate transfer box, used to detect a box body of the substrate transfer box, the box body has an opening opened along a Y-axis direction, and the opening of the box body is It has a plurality of slots in the form of layers extending along a Y-axis and spaced apart along a Z-axis. The plurality of slots are respectively formed by a plurality of internal ribs in the box body, and the plurality of slots are spaced apart from each other. The inner rib includes two side ribs that project relatively along an X-axis direction and a suspended support rib that is located between the side ribs on both sides and projects along the Y-axis direction. The defect detection device includes: A suspension arm is configured on a dual-axis driver, and the dual-axis driver can drive the suspension arm to perform bidirectional movement in the Y-axis direction and the Z-axis direction; a plurality of sensing elements, along the X-axis direction and the Y-axis direction Axial intervals are arranged on the suspension arm to form a suspended detection area on the suspension arm; a control unit is built with a plurality of profile standard values of the inner ribs and is electrically connected Between the dual-axis driver and the plurality of sensing elements; the control unit can drive the dual-axis driver to implant the suspension arm in the slots on each layer to drive multiple sensors on the detection area. The sensing element can detect a level of each of the plurality of side ribs and the suspended support rib layer by layer, and the control unit compares each level with the contour standard value to obtain a defect detection result; wherein , the profile standard value includes the plurality of side ribs of the slots in each layer and the suspended support ribs located at the standard positions in the X-axis, the Y-axis and the Z-axis, and the detection area is along the Y-axis A distance measurement movement of a plurality of the side ribs and at least one of the suspended support ribs is performed layer by layer, and the detection area also performs a layer-changing movement layer by layer along the Z-axis, wherein during the distance measurement movement And during the layer-changing movement, a plurality of the sensing elements are excluded from contacting a plurality of the inner ribs, and the levels include the levels of the plurality of side ribs and the level of the suspended support ribs. and the alignment between the side ribs and the suspended support ribs. The inner rib defect detection device of a front-opening substrate transfer box as described in claim 1, which further includes a machine equipped with the dual-axis driver, and the machine is also provided with a fixed surface for placing the box, and The control unit is configured on the machine. The inner rib defect detection device of the front-opening substrate transfer box as described in claim 2, wherein the dual-axis driver includes: a pair of slide rails fixed on the machine table along the Y-axis direction, and the drive connection A slide table that performs the Y-axis movement on the pair of slide rails, and a slide seat that is drivingly connected to the slide table to perform the Z-axis movement, and the suspension arm moves along the Y-axis The sliding seat is placed on the dual-axis driver to drive the plurality of sensing elements on the suspension arm to synchronize the ranging movement and the layer-changing movement. The internal rib defect detection device of a front-opening substrate transfer box according to claim 1, wherein the plurality of sensing elements include a pair of side rib distance measuring elements and a pair of supporting rib irradiation elements spaced apart along the X-axis. . The inner rib defect detection device of a front-opening substrate transfer box as claimed in claim 4, wherein the suspension arm has two arm parts spaced apart from each other along the X-axis direction, and a plurality of the sensing elements are dispersedly arranged on both sides The detection area is formed on the arm portion. The internal rib defect detection device of a front-opening substrate transfer box as described in claim 5, wherein the slots of each layer are divided into two grooves located on both sides of each suspended support rib in the X-axis direction, and each side The rib distance-measuring elements and each of the support rib irradiation elements are arranged on each of the arms at intervals, so as to be implanted in each of the grooves to perform the distance-measuring movement. The internal rib defect detection device of a front-opening substrate transfer box according to claim 4 or 6, wherein the distance measurement movement is a continuous movement of the detection area along the Y-axis or a step movement of multiple fixed points. In this way, the distance-measuring element of the pair of side ribs is driven to project and receive a distance-measuring light to each side rib in the X-axis direction to detect the position of each side rib. The internal rib defect detection device of a front-opening substrate transfer box as claimed in claim 4 or 6, wherein each side rib protrudes along the Z-axis to form at least one hill portion, and the distance measurement movement is the detection area. Along the Y-axis direction, the distance-measuring element of the pair of side ribs can be projected and received a distance-measuring light in the X-axis direction by continuous movement or step-by-step movement of multiple fixed points, so as to detect each The position of at least one of the ribs and the mounds. The inner rib defect detection device of a front-opening substrate transfer box as described in claim 8, wherein the pair of rib distance measuring elements are each equipped with a three-dimensional lens in the X-axis direction, and each of the three lens can reflect the opposite edge. The ranging light projected and recovered by the rib ranging element in the X-axis direction becomes the ranging light in the Z-axis direction, and at least one of each side rib and each hill portion receives the Z-axis ranging light. The respective positions are detected by measuring the projection of light. The internal rib defect detection device of a front-opening substrate transfer box according to claim 9, wherein the three ribs are located above at least one of the side ribs and the hill portions along the Z-axis direction. The internal rib defect detection device of a front-opening substrate transfer box as described in claim 4 or 6, wherein each of the side ribs extends along the Y-axis direction or is formed at intervals, and the distance measurement movement moves the detection area along the The continuous movement in the Y-axis direction or the step-by-step movement of multiple fixed points drives the distance-measuring elements of the pair of side ribs to project and project each side rib in the X-axis direction during the distance-measuring movement. Receive a ranging light to detect the position of each rib. The inner rib defect detection device of a front-opening substrate transfer box as claimed in claim 4 or 6, wherein the pair of support rib irradiation elements project a contrasting light to each other along the X-axis direction, and each of the suspended support ribs receives the contrast The level is detected by the projection of type light. The inner rib defect detection device of a front-opening substrate transfer box according to claim 4 or 6, wherein each of the suspended support ribs forms an arc convex portion along the Z-axis direction, and the pair of support rib irradiation elements are along the X-axis direction. A contrasting light beam is projected to each other in the axial direction to detect the position of at least one of the side ribs and the mounds. The inner rib defect detection device of the front-opening substrate transfer box according to claim 4 or 6, wherein the alignment between the side ribs and the suspended support rib is detected by the pair of side rib distance measuring elements. After the level of the ribs and the level of each support rib are detected by the pair of support rib irradiation elements, they are compared with each other through the control unit. The inner rib defect detection device of the front-opening substrate transfer box according to claim 6, wherein an end wall is formed on the end side of each side rib, and the plurality of sensing elements further include a plurality of sensing elements arranged along the X-axis direction. A pair of end wall distance measuring elements for detecting the end wall. Each end wall distance measuring element is arranged on each arm. The detection area consists of the pair of edge rib distance measuring elements, the pair of support rib irradiation elements and The pair of end wall distance measuring elements are spaced apart from each other, so that the pair of end wall distance measuring elements follow each of the arm parts and are implanted in each of the groove parts to perform the distance measuring movement. The inner rib defect detection device of a front-opening substrate transfer box as described in claim 4 or 15, wherein the detection area allows a projection light position difference maintained by each sensing element in the Z-axis direction. A method for detecting inner rib defects of a front-opening substrate transfer box, used to detect a box body of the substrate transfer box, the box body has an opening opened along a Y-axis, and the opening of the box body is It has a plurality of slots in the form of layers extending along a Y-axis and spaced apart along a Z-axis. The plurality of slots are respectively formed by a plurality of internal ribs in the box body, and the plurality of slots are spaced apart from each other. The inner rib includes two side ribs that project relatively along an X-axis and a suspended support rib that is located between the side ribs on both sides and projects along the Y-axis; the defect detection method includes: Construct a profile standard value of the inner rib profile of the box, and use multiple sensing elements to construct a suspended detection area at intervals to drive the detection area to be implanted in the slots on each layer. , allowing a plurality of the sensing elements to detect a level of each side rib and each suspended support rib layer by layer, and comparing each level with the contour standard value to obtain a defect detection result; wherein , the profile standard value includes the standard coordinates of the plurality of side ribs and the suspended support ribs of each layer of slots located in the X-axis, the Y-axis and the Z-axis, and the plurality of sensing elements are located along The Y-axis distribution forms the detection area. The detection area performs a distance measurement movement of a plurality of side ribs and at least one of the suspended support ribs layer by layer along the Y-axis. The detection area is also along the Y-axis direction. The Z-axis performs a layer-changing movement layer by layer, wherein during the ranging movement and the layer-changing movement, a plurality of the sensing elements are excluded from contacting a plurality of the inner ribs, and a plurality of the The level includes detecting the levels of a plurality of side ribs, the level of the suspended support ribs, and the level between the side ribs and the suspended support ribs layer by layer. The internal rib defect detection method of a front-opening substrate transfer box according to claim 17, wherein a plurality of the sensing elements are arranged on a suspension arm to form the detection area, and the detection area passes through the suspension arm The ranging movement and the layer-changing movement are carried out under the guidance of the system. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 17, wherein the detection area allows a projection light position difference maintained by each sensing element in the Z-axis direction. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 17, wherein a plurality of the side ribs are spaced apart along the Y-axis, and the distance measurement movement of the detection area is connected in series with the layer-changing type Move and interact to build a wave-shaped movement path. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 17, wherein the side ribs located on one side of each layer extend along the Y-axis direction, and the detection area performs a reciprocating distance measurement movement. The layer-changing movements are connected in series and interactively constructed into a serpentine movement path. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 17, 18, 19, 20 or 21, wherein a plurality of the sensing elements include a pair of side rib distance measurement spaced apart along the X-axis. The element and a pair of supporting ribs illuminate the element. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 22, wherein the distance measurement movement is a continuous movement of the detection area along the Y-axis direction or a step movement of multiple fixed points, The pair of side rib distance measuring elements are driven to project and receive a distance measuring light to each side rib along the X-axis direction to detect the level of each side rib. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 22, wherein each side rib protrudes along the Z-axis to form at least one hill portion, and the distance measurement moves the detection area along the The continuous movement in the Y-axis direction or the step-by-step movement of multiple fixed points drives the pair of side rib distance measuring elements to project and receive a distance measurement light along the X-axis direction to detect each side. The position of at least one of the ribs and the hills. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 24, wherein the pair of rib distance measuring elements are each equipped with a three-dimensional lens in the X-axis direction, and each of the three lens can reflect the opposite edge. The ranging light projected and recovered by the rib ranging element in the X-axis direction becomes the ranging light in the Z-axis direction, and at least one of each side rib and each hill portion receives the Z-axis ranging light. The respective positions are detected by measuring the projection of light. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 22, wherein the pair of support rib irradiation elements project a contrasting light to each other along the X-axis direction, and each of the suspended support ribs receives the contrasting light. The respective said levels are detected by the projection. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 22, wherein each of the suspended support ribs forms an arc convex portion along the Z-axis direction, and the pair of support rib irradiation elements are along the X-axis direction. A contrasting light beam is projected to each other to detect the level of at least one of the side ribs and the mounds. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 22, wherein the alignment between the side ribs and the suspended support rib is detected by the pair of side rib distance measuring elements. The level and the level of each support rib are detected by the pair of support rib irradiation elements, and then the profile standard values are compared with each other to obtain it. The method for detecting inner rib defects of a front-opening substrate transfer box according to claim 22, wherein an end wall is formed on the end side of each side rib, and the plurality of sensing elements further include a plurality of sensing elements arranged along the X-axis direction. A pair of end wall ranging elements detecting said end wall. As claimed in claim 22, the method for detecting inner rib defects of a front-opening substrate transfer box, wherein the detection area allows a projection light position difference maintained by each sensing element in the Z-axis direction. The internal rib defect detection method of a front-opening substrate transfer box as described in claim 22, wherein the slots of each layer are divided into two grooves located on both sides of each suspended support rib in the X-axis direction, and each of the sensing The measuring elements are respectively implanted in each of the grooves to perform the ranging movement. As claimed in claim 29, the method for detecting inner rib defects of a front-opening substrate transfer box, wherein the level of the end wall is determined by comparing the profile standard value after detecting the pair of end wall distance measuring elements.

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