TWM633486U - Glass tube fixing equipment - Google Patents

Abstract

The invention discloses a glass tube fixing device, which includes a roller fixing device, a metal roller, a glass tube and two rubber rings. The metal roller is further defined as a chrome metal roller and is removably mounted to the roller fixture. The length of the metal roller is between 1.6m and 1.8m. The glass tubes are arranged on the metal rollers at intervals and around them, and a photoresist layer is formed on the glass tubes. The two rubber rings are sleeved on the two ends of the metal roller respectively, and the two rubber rings can be respectively used to be clamped on the two ends of the glass tube.

Description

Glass Tube Fixing Equipment

The invention relates to a fixing device for tubular objects, in particular to a fixing device for glass tubes.

Before the existing glass tubes are going to be subjected to photolithography or etching processes, position correction is often required to avoid a decrease in product yield due to deviations in the position of the glass tubes in subsequent processes. However, since the large-sized glass tube is heavy and fragile, the difficulty of correcting the position of the large-sized glass tube is proportional to the weight of the glass tube.

Therefore, how to overcome the above-mentioned defects through the improvement of structure creation has become one of the important issues that this project intends to solve.

The inventive embodiment provides a glass tube fixing device for the deficiencies of the prior art, which can effectively improve the possible defects of the existing glass tube fixing device.

The embodiment of the invention discloses a glass tube fixing device, which includes: a roller fixing device; a metal roller, detachably mounted on the roller fixing device; wherein, the length of the metal roller is between 1.6 meters and 1.8 meters The metal roller is further defined as a chromium metal roller; a glass tube is arranged on the metal roller at intervals and around it, and a photoresist layer is formed on the glass tube; and two rubber rings are respectively covered It is arranged at both ends of the metal roller, and the two rubber rings can be respectively used to be clamped at the two ends of the glass tube.

One of the beneficial effects of this creation is that the glass tube fixing device provided by this creation can pass through "the glass tube is arranged on the metal roller at intervals and around it, and the glass tube is formed with the photoresist layer" and "the two rubber rings are respectively sleeved on the two ends of the metal roller, and the two rubber rings can be respectively used to be clamped on the two ends of the glass tube", This enables the glass tube to be more finely calibrated.

In order to further understand the characteristics and technical content of this creation, please refer to the following detailed description and drawings about this creation. However, the provided drawings are only for reference and explanation, and are not used to limit this creation.

The following is a description of the implementation of the "glass tube fixing device" disclosed in this creation through specific specific examples. Those skilled in the art can understand the advantages and effects of this creation from the content disclosed in this specification. This creation can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the idea of this creation. In addition, the drawings of this creation are only for simple illustration, not according to the actual size of the depiction, prior statement. In addition, if it is pointed out below that please refer to the specific drawing or as shown in the specific drawing, it is only used to emphasize the follow-up description. Most of the relevant content mentioned appears in the specific drawing, but not In this ensuing description, reference may be made to only the specific drawings described. The following embodiments will further describe the relevant technical content of this creation in detail, but the disclosed content is not intended to limit the protection scope of this creation.

It should be understood that although terms such as "first", "second", and "third" may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one element from another element, or one signal from another signal. In addition, the term "or" used herein may include any one or a combination of more of the associated listed items depending on the actual situation.

Please refer to Figures 1 to 4, which are the embodiments of this creation. It should be noted that the drawings corresponding to this embodiment and the relevant quantities and shapes mentioned are only used for specific illustrations. The implementation method of this creation is to facilitate understanding of the content of this creation, not to limit the scope of protection of this creation.

As shown in Figures 1 to 4, the present invention provides a glass tube fixing device 100, which includes: a roller fixing device 1, a metal roller 2, a glass tube 3, two rubber rings 4, a clean chamber Body 5, a soft baking device 6, a moving device 7 and a photolithography device 8, but the invention is not limited thereto. For example, in other embodiments not shown in this creation, the glass tube fixing device 100 may not include the dust-free cavity 5, the soft-baking device 6, the moving device 7 and the The lithography apparatus 8 is described.

For the convenience of description and understanding, the roller fixing device 1, the metal roller 2, the glass tube 3, the two rubber rings 4, the dust-free cavity 5, the soft oven device 6, the lithography device 8, and the moving device 7, and timely illustrate the relative positional relationship between the above-mentioned devices.

As shown in Figure 1, the roller fixing device 1 includes a machine body 11, two clamping mechanisms 12 installed on the machine body 11 and a rotating mechanism 13 installed on the metal roller 2, and the two The two clamping mechanisms 12 are used to clamp the two ends of the metal roller 2 respectively. Wherein, the rotating mechanism 13 includes a speed controller (not shown in the figure), which can be used to make the metal roller 2 rotate at a speed ranging from 2900 revolutions per minute (RPM) to 4500 revolutions per minute.

Further, each of the clamping mechanisms 12 includes a circular elastic collet (not shown in the figure), and the clamping mechanism 12 is driven by hydraulic pressure, so that the circular elastic collet can clamp Hold one end of the metal roller 2, and when the rotating mechanism 13 operates, the rotating mechanism 13 will rotate the clamping mechanism 12, so that the metal roller 2 is rotated by the clamping mechanism 12, but this Creation is not limited to this. For example, the circular elastic collet can also be other fixtures such as lathe chucks, and the clamping mechanism 12 can also be driven by air pressure or manually, so that the circular elastic collet can clamp the One end of the metal roller 2.

The roller fixing device 1 has been introduced so far, and the metal roller 2 will be introduced below. As shown in FIG. 1 to FIG. 4 , the length of the metal roller 2 is between 1.6 meters and 1.8 meters, and the metal roller 2 is preferably a chrome metal roller, but the present invention is not limited thereto. For example, the metal roller 2 can also be made of tin, lead, zinc, aluminum, copper, brass, iron, nickel, cobalt, tungsten, stainless steel or a metal whose hardness is higher than stainless steel.

The metal roller 2 has been introduced so far, and the glass tube 3 and the rubber ring 4 will be introduced below. As shown in Figures 1 to 4, the glass tube 3 is a hollow cylinder and is made of transparent materials such as soda-lime glass, quartz glass or acrylic glass, and the glass tube 3 is preferably made of Made of quartz glass, and each of the rubber rings 4 is a hollow trapezoid, but the invention is not limited thereto. For example, the glass tube 3 may also be made of other transparent materials such as Pyrex glass.

The glass tube 3 and the rubber ring 4 have been introduced so far, and the dust-free cavity 5 will be introduced below. As shown in Figures 1 to 4, the dust-free cavity 5 can be used to prevent the metal roller 2 and the glass tube 3 from being adhered to by pollution sources in the environment, and the roller fixing device 1, the metal roller 2. The glass tube 3 , the two rubber rings 4 , the soft baking device 6 , the moving device 7 and the photolithography device 8 are arranged in the dust-free cavity 5 . Wherein, the grade of the dust-free cavity 5 in this embodiment is US Federal Standard Class 1 to US Federal Standard Class 500.

The dust-free cavity 5 has been introduced so far, and the soft-baking device 6 will be introduced below. As shown in Figures 1 to 4, the soft baking device 6 is arranged on the roller fixing device 1 at intervals, and the soft baking device 6 can be used to bake the photoresist layer 31 and make the photoresist layer 31 The solvent content of the barrier layer 31 is reduced. In more detail, the soft baking device 6 can be used to volatilize the solvent and excessive moisture of the photoresist layer 31 from the photoresist layer 31, and make the solvent in the photoresist layer 31 The content in at least reduced to about 5%. Wherein, described soft roasting device 6 comprises a plurality of soft roasting lamps 61, and each described soft roasting lamp 61 can be an infrared lamp, a near infrared lamp or a xenon lamp, and each described soft roasting lamp 61 is relatively Preferably, the above-mentioned near-infrared lamps are used.

The soft-baking device 6 has been introduced so far, and the photolithography device 8 will be introduced below. As shown in Figures 1 to 4, the photolithography device 8 is arranged at intervals on the soft baking device 6, and the photolithography device 8 includes a plurality of photolithography light sources 81 and is arranged at intervals on a plurality of the light sources. A photomask (not shown) for engraving the light source 81, and the photolithography device 8 can be used to irradiate a photolithography light (not shown) to the photoresist layer 31, and then form a patterned photoresist layer correspondingly (picture not drawn). Wherein, the plurality of photolithography light sources 81 include a plurality of light emitting diodes (not shown in the figure), which are used to emit ultraviolet light with a wavelength of 248 nm to 365 nm.

As shown in FIGS. 1 to 4 , the moving device 7 is connected and can be used to move the soft baking device 6 and the photolithography device 8 . Furthermore, the moving device 7 is an elevator in this embodiment, which can be used to move the soft baking device 6 and the photolithography device 8 relative to the glass tube 3 .

[Advantageous Effects of Embodiment]

One of the beneficial effects of this creation is that the glass tube fixing device 100 provided by this creation can pass through "the glass tube 3 is arranged on the metal roller 2 at intervals and around it, and the glass tube 3 Formed with the photoresist layer 31" and "the two rubber rings 4 are sleeved on both ends of the metal roller 2 respectively, and the two rubber rings 4 can be used to be clamped on the glass tube respectively 3" technical solution, so that the glass tube 3 can be more finely calibrated.

The content disclosed above is only the preferred feasible embodiment of this creation, and does not limit the scope of patent application for this creation. Therefore, all equivalent technical changes made by using the instructions and drawings of this creation are included in the application of this creation. within the scope of the patent.

100: glass tube fixing device

1: Roller fixing device

11: Machine body

12: Clamping mechanism

13: Turning mechanism

2: metal roller

3: glass tube

31: photoresist layer

4: Rubber ring

5: Dust-free cavity

6: Soft baking device

61: Soft Bake Lamp

7:Mobile device

8: Photolithography device

81: Lithography light source

Fig. 1 is a three-dimensional schematic diagram of a glass tube fixing device according to an embodiment of the present invention.

Fig. 2 is a schematic side view of the metal roller, glass tube and two rubber rings of the present invention.

Fig. 3 is an exploded schematic view of the metal roller, glass tube and two rubber rings of the present invention.

Fig. 4 is a three-dimensional schematic diagram of a metal roller, a glass tube and two rubber rings in the embodiment of the present invention.

100: glass tube fixing device

1: Roller fixing device

11: Machine body

12: Clamping mechanism

13: Turning mechanism

2: metal roller

3: glass tube

4: Rubber ring

5: Dust-free cavity

6: Soft baking device

61: Soft Bake Lamp

7:Mobile device

8: Photolithography device

81: Lithography light source

Claims (10)

A glass tube fixing device, comprising: a roller fixing device; A metal roller, detachably mounted on the roller fixing device; wherein, the length of the metal roller is between 1.6 meters and 1.8 meters, and the metal roller is further defined as a chrome metal roller; A glass tube is arranged at intervals and around the metal roller, and a photoresist layer is formed on the glass tube; and Two rubber rings are sheathed on the two ends of the metal roller respectively, and the two rubber rings can be respectively used to be clamped on the two ends of the glass tube. The glass tube fixing device according to claim 1, wherein the roller fixing device includes a machine body and two clamping mechanisms installed on the machine body, and the two clamping mechanisms are used for Clamp both ends of the metal roller. The glass tube fixing device according to claim 1, wherein the glass tube fixing device further includes a dust-free chamber, and the roller fixing device, the metal roller, the glass tube, and the two The rubber ring is arranged in the dust-free cavity. The glass tube fixing device according to claim 1, wherein the glass tube fixing device further includes a soft baking device, which is arranged at intervals on the roller fixing device, and the soft baking device can be used to bake the photoresist layer. The glass tube fixing device according to claim 4, wherein the glass tube fixing device further includes a photolithography device, which is arranged at intervals in the soft baking device, and the photolithography device includes a plurality of photolithography light sources, The photolithography device can be used to irradiate a photolithography light to the photoresist layer. The glass tube fixing device as claimed in claim 4, wherein the glass tube fixing device further comprises a moving device connected to and capable of moving the soft baking device. The glass tube fixing device as claimed in claim 5, wherein the photolithography device includes a photomask disposed on a plurality of the photolithography light sources at intervals. The glass tube fixing device according to claim 4, wherein the soft-baking device includes a plurality of soft-baking lamps, and each of the soft-baking lamps is an infrared lamp, a near-infrared lamp, or a xenon lamp. The glass tube fixing device as claimed in claim 5, wherein the plurality of photolithographic light sources include a plurality of light emitting diodes, which are used to emit ultraviolet light with a wavelength of 248 nm to 365 nm. The glass tube fixing device as claimed in claim 1, wherein the roller fixing device further includes a rotating mechanism, the rotating mechanism can be used to be installed on the metal roller, and the rotating mechanism includes a speed controller, It can be used to turn the metal roller at a speed between 2900 revolutions per minute (RPM) to 4500 revolutions per minute.

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