CN216442376U

CN216442376U - Glass tube fixing device

Info

Publication number: CN216442376U
Application number: CN202122560311.1U
Authority: CN
Inventors: 林刘恭; 范健文
Original assignee: K Laser Technology Inc
Current assignee: K Laser Technology Inc
Priority date: 2021-10-22
Filing date: 2021-10-22
Publication date: 2022-05-06
Anticipated expiration: 2031-10-22

Abstract

The utility model discloses a glass tube fixing device which comprises a roller fixing device, a metal roller, a glass tube and two rubber rings. The metal roller is detachably arranged on the roller fixing device. The length of the metal roller is between 1.6 meters and 1.8 meters. The glass tube is spaced apart from the metal roller and disposed around the metal roller, and a photoresist layer is formed on the glass tube. The two rubber rings are respectively sleeved at the two ends of the metal roller and can be respectively clamped at the two ends of the glass tube. Thereby, the glass tube can be calibrated more finely.

Description

Glass tube fixing device

Technical Field

The utility model relates to tubular object fixing equipment, in particular to glass tube fixing equipment.

Background

Before the existing glass tube is subjected to the processes such as photoetching or etching, the position of the glass tube is often required to be corrected first, so that the reduction of the yield of the product caused by the deviation of the position of the glass tube in the subsequent process is avoided. However, since the large-sized glass tube is heavy and fragile, the difficulty of correcting the large-sized glass tube is proportional to the weight of the glass tube when the position correction is performed.

Therefore, how to overcome the above-mentioned drawbacks by improving the structure design has become one of the important issues to be solved by this industry.

SUMMERY OF THE UTILITY MODEL

The embodiment of the utility model provides a glass tube fixing device aiming at the defects of the prior art, which can effectively overcome the defects possibly generated by the prior glass tube fixing device.

One embodiment of the present invention discloses a glass tube fixing apparatus including: a roller fixing device; the metal roller is detachably arranged on the roller fixing device; wherein the length of the metal roller is between 1.6 and 1.8 meters; the glass tube is spaced from the metal roller and arranged around the metal roller, and a photoresist layer is formed on the glass tube; and the two rubber rings are respectively sleeved on the two ends of the metal roller, and the two rubber rings can be respectively clamped at the two ends of the glass tube.

Preferably, the roller fixing device includes a machine body and two clamping mechanisms mounted on the machine body, and the two clamping mechanisms are respectively used for clamping two ends of the metal roller.

Preferably, the glass tube fixing device further comprises a dust-free chamber, and the roller fixing device, the metal roller, the glass tube and the two rubber rings are arranged in the dust-free chamber.

Preferably, the glass tube fixing apparatus further comprises a soft baking device, the soft baking device is disposed at a distance from the roller fixing device, and the soft baking device can be used to bake the photoresist layer.

Preferably, the glass tube fixing apparatus further comprises a photolithography device disposed at a distance from the soft baking device, and the photolithography device comprises a plurality of photolithography light sources, and the photolithography device can be used to irradiate a photolithography light to the photoresist layer.

Preferably, the glass tube fixing device further comprises a moving device, and the moving device is connected with the soft baking device and can be used for moving the soft baking device.

Preferably, the lithographic apparatus comprises a reticle spaced apart from a plurality of the lithographic light sources.

Preferably, the soft-baking device comprises a plurality of soft-baking lamps, and each soft-baking lamp is an infrared lamp, a near-infrared lamp or a xenon lamp.

Preferably, a plurality of said lithographic light sources comprise a plurality of light emitting diodes for emitting ultraviolet light having a wavelength of 248 nm to 365 nm.

Preferably, the roller fixture further comprises a rotation mechanism operable to be mounted on the metal roller, and the rotation mechanism comprises a speed controller operable to rotate the metal roller at a speed of between 2900 rpm and 4500 rpm.

The glass tube fixing equipment has the beneficial effects that the glass tube can be more finely calibrated by the technical scheme that the glass tube is spaced from the metal roller and is arranged around the metal roller, the light resistance layer is formed on the glass tube, and the two rubber rings are respectively sleeved at two ends of the metal roller and can be respectively clamped at two ends of the glass tube.

For a better understanding of the nature and technical content of the present invention, reference should be made to the following detailed description of the utility model and the accompanying drawings, which are provided for illustration purposes only and are not intended to limit the scope of the utility model in any way.

Drawings

Fig. 1 is a schematic perspective view of a glass tube fixing apparatus according to an embodiment of the present invention.

FIG. 2 is a side view of a metal roller, a glass tube and two rubber rings according to an embodiment of the present invention.

Fig. 3 is an exploded view of a metal roller, a glass tube and two rubber rings according to an embodiment of the present invention.

Fig. 4 is a schematic perspective view of a metal roller, a glass tube and two rubber rings according to an embodiment of the present invention.

Detailed Description

The following is a description of the embodiments of the "glass tube fixing device" disclosed in the present invention with reference to specific embodiments, and those skilled in the art will understand the advantages and effects of the present invention from the disclosure of the present specification. The utility model is capable of other and different embodiments and its several details are capable of modifications and various changes in detail, all without departing from the spirit and scope of the present invention. It should be noted that the drawings of the present invention are merely schematic illustrations and are not drawn to actual dimensions. Furthermore, as will be appreciated by reference to and as illustrated in the accompanying drawings, the description is intended to highlight only those specific figures that are referenced in the description. The following embodiments will further explain the related art of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention.

It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or from one signal to another signal. In addition, as used herein, the term "or" shall include any one or combination of more of the associated listed items, as the case may be.

Fig. 1 to 4 are schematic views of an embodiment of the present invention, and it should be noted that the corresponding figures and the related numbers and shapes are only used to describe the embodiment of the present invention specifically for understanding the content of the present invention, and not to limit the scope of the present invention.

As shown in fig. 1 to 4, an embodiment of the present invention provides a glass tube fixing apparatus 100 including: a roller fixing device 1, a metal roller 2, a glass tube 3, two rubber rings 4, a clean chamber 5, a soft baking device 6, a moving device 7 and a photolithography device 8, but the utility model is not limited thereto. For example, in other embodiments not shown in the present disclosure, the glass tube fixing apparatus 100 may not include the dust-free chamber 5, the soft baking device 6, the moving device 7, and the photolithography device 8.

For convenience of explanation and understanding, the roller fixing device 1, the metal roller 2, the glass tube 3, the two rubber rings 4, the dust-free chamber 5, the soft baking device 6, the photolithography device 8, and the moving device 7 will be described in sequence, and the relative position relationship between the above devices will be described in due course.

As shown in fig. 1, the roller fixing device 1 includes a machine body 11, two clamping mechanisms 12 mounted on the machine body 11, and a rotating mechanism 13 mounted on the metal roller 2, and the two clamping mechanisms 12 are respectively used for clamping two ends of the metal roller 2. Wherein the rotating mechanism 13 comprises a speed controller (not shown) that can be used to rotate the metal roller 2 at a speed between 2900 Revolutions Per Minute (RPM) and 4500 RPM.

Further, each of the clamping mechanisms 12 includes a circular elastic collet (not shown), and the clamping mechanisms 12 are hydraulically driven so that the circular elastic collet can clamp one end of the metal roller 2, and when the rotating mechanism 13 is operated, the rotating mechanism 13 rotates the clamping mechanism 12 so that the metal roller 2 is rotated by the clamping mechanism 12, but the present invention is not limited thereto. For example, the circular elastic collet may be a lathe chuck or other fixture, and the clamping mechanism 12 may be driven by air pressure or manually so that the circular elastic collet can clamp one end of the metal roller 2.

The roller holding device 1 is introduced so far, and the metal roller 2 will be described below. As shown in fig. 1 to 4, the length of the metal roller 2 is between 1.6 m and 1.8 m, and the metal roller 2 is preferably made of stainless steel, but the present invention is not limited thereto. For example, the metal roller 2 may be made of tin, lead, zinc, aluminum, copper, brass, iron, nickel, cobalt, tungsten, chromium, or a metal having a hardness greater than chromium.

The metal roller 2 is introduced so far, and the glass tube 3 and the rubber ring 4 will be described below. As shown in fig. 1 to 4, the glass tube 3 is a hollow cylinder and made of a material having a transparent property, such as soda lime glass, quartz glass, or acrylic glass, and the glass tube 3 is preferably made of quartz glass, and each of the rubber rings 4 is a hollow trapezoid, but the present invention is not limited thereto. For example, the glass tube 3 may be made of Pyrex glass or other transparent materials.

The glass tube 3 and the rubber ring 4 are introduced so far, and the introduction of the dust-free chamber 5 will begin below. As shown in fig. 1 to 4, the dust-free chamber 5 can be used to prevent the metal roller 2 and the glass tube 3 from being adhered by the pollution source in the environment, and the roller fixing device 1, the metal roller 2, the glass tube 3, the two rubber rings 4, the soft baking device 6, the moving device 7 and the photolithography device 8 are disposed in the dust-free chamber 5. Wherein, the grade of the dust-free cavity 5 is in the embodiment from the U.S. federal standard grade 1 to the U.S. federal standard grade 500.

The dust-free chamber 5 is introduced so far, and the soft roasting device 6 will be introduced. As shown in fig. 1 to 4, the soft baking device 6 is disposed at an interval from the roller fixing device 1, and the soft baking device 6 can be used to bake the photoresist layer 31 and reduce the solvent content of the photoresist layer 31. More specifically, the soft baking device 6 can be used to volatilize the solvent and the excessive moisture of the photoresist layer 31 from the photoresist layer 31, and reduce the content of the solvent in the photoresist layer 31 to at least about 5%. The soft-baking device 6 comprises a plurality of soft-baking lamps 61, and each soft-baking lamp 61 can be an infrared lamp, a near-infrared lamp or a xenon lamp, and each soft-baking lamp 61 is preferably the near-infrared lamp.

The soft bake apparatus 6 is introduced so far, and the lithography apparatus 8 will be described below. As shown in fig. 1 to 4, the lithography apparatus 8 is spaced apart from the soft baking apparatus 6, and the lithography apparatus 8 includes a plurality of lithography light sources 81 and a mask (not shown) spaced apart from the plurality of lithography light sources 81, and the lithography apparatus 8 can be used to irradiate a lithography light (not shown) onto the photoresist layer 31, so as to correspondingly form a patterned photoresist layer (not shown). Wherein the plurality of lithography light sources 81 comprises a plurality of light emitting diodes (not shown) for emitting ultraviolet light having a wavelength of 248 nm to 365 nm.

As shown in fig. 1 to 4, the moving device 7 is connected to the soft baking device 6 and the photolithography device 8 and can be used to move the soft baking device 6 and the photolithography device 8. Further, the moving device 7 is a lifter in the embodiment, and can be used to move the soft baking device 6 and the photolithography device 8 relative to the glass tube 3.

[ advantageous effects of the embodiments ]

One of the advantages of the present invention is that the glass tube fixing device 100 provided by the present invention can more finely calibrate the glass tube 3 by the technical scheme that "the glass tube 3 is spaced apart from the metal roller 2 and is disposed around the metal roller 2, and the photoresist layer 31" and "the two rubber rings 4 are respectively sleeved on two ends of the metal roller 2, and the two rubber rings 4 can be respectively clamped on two ends of the glass tube 3" are formed on the glass tube 3.

The disclosure is only a preferred embodiment of the utility model and should not be taken as limiting the scope of the utility model, so that the utility model is not limited by the disclosure of the utility model.

Claims

1. A glass tube fixing apparatus, characterized by comprising: a roller fixing device;

the metal roller is detachably arranged on the roller fixing device; wherein the length of the metal roller is between 1.6 and 1.8 meters;

the glass tube is spaced from the metal roller and arranged around the metal roller, and a photoresist layer is formed on the glass tube; and

and the two rubber rings are respectively sleeved at the two ends of the metal roller, and the two rubber rings can be respectively clamped at the two ends of the glass tube.

2. The glass tube fixing apparatus as claimed in claim 1, wherein the roller fixing device comprises a machine body and two clamping mechanisms mounted on the machine body, and the two clamping mechanisms are respectively used for clamping two ends of the metal roller.

3. The glass tube fixing apparatus as claimed in claim 1, further comprising a dust-free chamber, and wherein the roller fixing device, the metal roller, the glass tube and the two rubber rings are disposed in the dust-free chamber.

4. The glass tube fixing apparatus of claim 1, further comprising a soft baking device, wherein the soft baking device is spaced apart from the roller fixing device, and the soft baking device is capable of baking the photoresist layer.

5. The glass tube holding apparatus according to claim 4, further comprising a photolithography device disposed at a distance from the soft baking device, wherein the photolithography device comprises a plurality of photolithography light sources, and the photolithography device is capable of irradiating a photolithography light to the photoresist layer.

6. The glass tube fixing apparatus according to claim 4, further comprising a moving device connected to the soft baking device and capable of moving the soft baking device.

7. The glass tube holding apparatus of claim 5, wherein the lithography device comprises a reticle spaced apart from the plurality of lithography light sources.

8. The glass tube fixing apparatus according to claim 4, wherein the soft-baking device comprises a plurality of soft-baking lamps, and each of the soft-baking lamps is an infrared lamp, a near-infrared lamp, or a xenon lamp.

9. The glass tube holding apparatus as claimed in claim 5, wherein the plurality of photolithography light sources comprise a plurality of light emitting diodes for emitting ultraviolet light having a wavelength of 248 nm to 365 nm.

10. The glass tube fixing apparatus according to claim 1, wherein the roller fixing device further comprises a rotating mechanism operable to be mounted on the metal roller, and the rotating mechanism comprises a speed controller operable to rotate the metal roller at a speed of from 2900 rpm to 4500 rpm.