CN216442376U - Glass tube fixing device - Google Patents

Abstract

The utility model discloses a glass tube fixing device which comprises a roller fixing device, a metal roller, a glass tube and two rubber rings. The metal roller is detachably arranged on the roller fixing device. The length of the metal roller is between 1.6 meters and 1.8 meters. The glass tube is spaced apart from the metal roller and disposed around the metal roller, and a photoresist layer is formed on the glass tube. The two rubber rings are respectively sleeved at the two ends of the metal roller and can be respectively clamped at the two ends of the glass tube. Thereby, the glass tube can be calibrated more finely.

Description

Glass tube fixing equipment

technical field

The utility model relates to a tubular article fixing device, in particular to a glass tube fixing device.

Background technique

Before performing photolithography or etching processes, the existing glass tubes often need to be calibrated in position to avoid lowering the yield of products due to deviations in the positions of the glass tubes in subsequent processes. However, since the large-sized glass tube is heavy and fragile, the correction difficulty of the large-sized glass tube is proportional to the weight of the glass tube when performing position correction.

Therefore, how to overcome the above-mentioned defects through the improvement of structural design has become one of the important issues to be solved by this project.

Utility model content

In view of the deficiencies of the prior art, the embodiments of the present invention provide a glass tube fixing device, which can effectively improve the possible defects of the existing glass tube fixing device.

One embodiment of the present utility model discloses a glass tube fixing device. The glass tube fixing device includes: a roller fixing device; a metal roller detachably mounted on the roller fixing device; wherein, the metal roller The length of the roller is between 1.6 meters and 1.8 meters; a glass tube is spaced from the metal roller and arranged around the metal roller, and a photoresist layer is formed on the glass tube; and two rubber rings, The two rubber rings are respectively sleeved on the two ends of the metal roller, and the two rubber rings can be respectively used to be clamped on the two ends of the glass tube.

Preferably, the roller fixing device includes a machine body and two clamping mechanisms installed on the machine body, and the two clamping mechanisms are respectively used to clamp both ends of the metal roller.

Preferably, the glass tube fixing device further includes a dust-free chamber, and the roller fixing device, the metal roller, the glass tube and the two rubber rings are arranged in the dust-free chamber.

Preferably, the glass tube fixing device further comprises a soft baking device, the soft baking device is arranged at a distance from the roller fixing device, and the soft baking device can be used to bake the photoresist layer.

Preferably, the glass tube fixing device further comprises a photolithography device, the photolithography device is arranged at intervals from the soft baking device, and the photolithography device includes a plurality of photolithography light sources, and the photolithography device It can be used to irradiate a photolithographic light to the photoresist layer.

Preferably, the glass tube fixing device further comprises a moving device, the moving device is connected with the soft roasting device and can be used to move the soft roasting device.

Preferably, the lithography apparatus includes a photomask arranged at intervals from the plurality of the lithography light sources.

Preferably, the soft baking device includes a plurality of soft baking lamps, and each of the soft baking lamps is an infrared lamp, a near-infrared lamp or a xenon lamp.

Preferably, a plurality of the lithography light sources include a plurality of light emitting diodes, and the light emitting diodes are used to emit ultraviolet light with a wavelength of 248 nm to 365 nm.

Preferably, the roller fixing device further comprises a rotating mechanism that can be used to mount on the metal roller, and the rotating mechanism includes a speed controller, the speed controller can be used to make all the The metal roller rotates at a speed between 2900 rpm and 4500 rpm.

One of the beneficial effects of the present invention is that the glass tube fixing device provided by the present invention can pass through "the glass tube is spaced apart from the metal roller and arranged around the metal roller, and the glass tube is on the The photoresist layer is formed" and "The two rubber rings are respectively sleeved on both ends of the metal roller, and the two rubber rings can be used to be clamped on the two ends of the glass tube respectively" The technical solution enables the glass tube to be more finely calibrated.

In order to further understand the features and technical content of the present utility model, please refer to the following detailed description and accompanying drawings of the present utility model, but these descriptions and drawings are only used to illustrate the present utility model, rather than the protection scope of the present utility model. make any restrictions.

Description of drawings

FIG. 1 is a schematic perspective view of a glass tube fixing device according to an embodiment of the present invention.

2 is a schematic side view of a metal roller, a glass tube and two rubber rings according to an embodiment of the present invention.

3 is an exploded schematic view of a metal roller, a glass tube and two rubber rings according to an embodiment of the present invention.

FIG. 4 is a three-dimensional schematic diagram of a metal roller, a glass tube and two rubber rings according to an embodiment of the present invention.

Detailed ways

The following are specific specific examples to illustrate the embodiments of the "glass tube fixing device" disclosed in the present invention, and those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, it should be stated in advance that the accompanying drawings of the present invention are merely schematic illustrations, not drawn according to actual size. In addition, if it is indicated below to refer to a specific drawing or as shown in a specific drawing, it is only used for emphasis in the subsequent description, and most of the relevant content mentioned in the specific drawing appears in the specific drawing, but does not Reference in this subsequent description is limited to the specific drawings described. The following embodiments will further describe the related technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention.

It should be understood that although terms such as "first", "second", "third" and the like may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another component or a signal from another signal. Additionally, the term "or" as used herein shall include any one or combinations of any of the associated listed items, as appropriate.

Please refer to FIG. 1 to FIG. 4 , which are embodiments of the present utility model. It should be noted that the drawings corresponding to this embodiment and the related numbers and shapes mentioned in this embodiment are only used for specific description. The embodiments of the present invention are used to facilitate the understanding of the content of the present invention, rather than being used to limit the protection scope of the present invention.

As shown in FIGS. 1 to 4 , an embodiment of the present invention provides a glass tube fixing device 100 , which includes: a roller fixing device 1 , a metal roller 2 , a glass tube 3 , two rubber rings 4 , a The dust-free chamber 5 , a soft-baking device 6 , a moving device 7 and a lithography device 8 , but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the glass tube fixing device 100 may not include the dust-free chamber 5 , the soft baking device 6 , the moving device 7 and The lithography device 8.

In the following, for the convenience of explanation and understanding, the roller fixing device 1, the metal roller 2, the glass tube 3, the two rubber rings 4, the dust-free cavity 5, and the soft baking device will be described in sequence. 6. The lithography apparatus 8 and the moving apparatus 7, and the relative positional relationship between the above apparatuses will be described in a timely manner.

As shown in FIG. 1 , the roller fixing device 1 includes a machine body 11 , two clamping mechanisms 12 installed on the machine body 11 , and a rotating mechanism 13 installed on the metal roller 2 , and the two Each of the clamping mechanisms 12 is used to clamp both ends of the metal roller 2 respectively. Wherein, the rotating mechanism 13 includes a speed controller (not shown), which can be used to rotate the metal roller 2 at a speed between 2900 revolutions per minute (RPM) and 4500 revolutions per minute.

Further, each of the clamping mechanisms 12 includes a circular elastic collet (not shown), and the clamping mechanism 12 is driven by oil pressure so that the circular elastic collet can be clamped One end of the metal roller 2, and when the rotating mechanism 13 operates, the rotating mechanism 13 will make the clamping mechanism 12 rotate, so that the metal roller 2 is rotated by the clamping mechanism 12, but this The utility model is not limited to this. For example, the circular elastic collet can also be other clamps such as a lathe chuck, and the clamping mechanism 12 can also be driven by air pressure or manually, so that the circular elastic collet can clamp the One end of the metal roller 2.

The roller fixing device 1 has been introduced so far, and the metal roller 2 will be introduced below. As shown in FIG. 1 to FIG. 4 , the length of the metal roller 2 is between 1.6 meters and 1.8 meters, and the metal roller 2 is preferably made of stainless steel, but the present invention is not limited thereto. For example, the metal roller 2 can also be made of tin, lead, zinc, aluminum, copper, brass, iron, nickel, cobalt, tungsten, chromium, or a metal whose hardness is greater than that of chromium.

The metal roller 2 has been introduced so far, and the glass tube 3 and the rubber ring 4 will be introduced below. As shown in FIG. 1 to FIG. 4 , the glass tube 3 is a hollow cylinder and is made of transparent materials such as soda lime glass, quartz glass or acrylic glass, and the glass tube 3 is preferably made of quartz The rubber ring 4 is made of glass, and each of the rubber rings 4 is a hollow trapezoid, but the present invention is not limited thereto. For example, the glass tube 3 can also be made of other transparent materials such as Pyrex glass.

The glass tube 3 and the rubber ring 4 have been introduced so far, and the dust-free chamber 5 will be introduced below. As shown in FIG. 1 to FIG. 4 , the dust-free chamber 5 can be used to prevent the metal roller 2 and the glass tube 3 from being adhered by pollution sources in the environment, and the roller fixing device 1 , the metal roller 2. The glass tube 3 , the two rubber rings 4 , the soft baking device 6 , the moving device 7 and the lithography device 8 are arranged in the dust-free cavity 5 . Wherein, the grade of the dust-free cavity 5 in this embodiment is the US Federal Standard Classification 1 to the US Federal Standard Classification 500.

The dust-free chamber 5 has been introduced so far, and the soft-baking device 6 will be introduced below. As shown in FIG. 1 to FIG. 4 , the soft baking device 6 is arranged at intervals from the roller fixing device 1 , and the soft baking device 6 can be used to bake the photoresist layer 31 and make the light The solvent content of the barrier layer 31 is reduced. More specifically, the soft baking device 6 can be used to volatilize the solvent of the photoresist layer 31 and excess moisture from the photoresist layer 31, and make the solvent in the photoresist layer The content of 31 is reduced to at least about 5%. The soft baking device 6 includes a plurality of soft baking lamps 61, and each of the soft baking lamps 61 can be an infrared lamp, a near-infrared lamp or a xenon lamp, and each of the soft baking lamps 61 is preferably the near-infrared light.

The soft baking device 6 has been introduced so far, and the lithography device 8 will be introduced below. As shown in FIG. 1 to FIG. 4 , the lithography apparatus 8 and the soft baking apparatus 6 are arranged at intervals, and the lithography apparatus 8 includes a plurality of lithography light sources 81 and a plurality of the lithography light sources 81 A photomask (not shown) is arranged at intervals, and the photolithography device 8 can be used to irradiate a photolithography light (not shown) to the photoresist layer 31, thereby correspondingly forming a patterned photoresist layer (not shown). Wherein, the plurality of the lithography light sources 81 include a plurality of light emitting diodes (not shown), which are used for emitting ultraviolet light with a wavelength of 248 nanometers to 365 nanometers.

As shown in FIG. 1 to FIG. 4 , the moving device 7 is connected to the soft baking device 6 and the lithography device 8 and can be used to move the soft baking device 6 and the lithography device 8 . Further, the moving device 7 is an elevator in this embodiment, which can be used to move the soft baking device 6 and the lithography device 8 relative to the glass tube 3 .

[Advantageous effects of the embodiment]

One of the beneficial effects of the present invention is that the glass tube fixing device 100 provided by the present invention can pass through "the glass tube 3 is spaced apart from the metal roller 2 and arranged around the metal roller 2, and all the The glass tube 3 is formed with the photoresist layer 31" and "the two rubber rings 4 are respectively sleeved on both ends of the metal roller 2, and the two rubber rings 4 can be used for clamping respectively. The technical solution of "at both ends of the glass tube 3" enables the glass tube 3 to be calibrated more precisely.

The contents disclosed above are only preferred and feasible embodiments of the present invention, and are not intended to limit the scope of the present invention. Therefore, any equivalent technical changes made by using the contents of the description and accompanying drawings of the present invention are included in the present invention. within the scope of the new patent application.

Claims (10)

1. A glass tube fixing device, characterized in that, the glass tube fixing device comprises: a roller fixing device; a metal roller, which can be detachably installed on the roller fixing device; wherein, the length of the metal roller is between 1.6 meters and 1.8 meters; a glass tube, spaced apart from the metal roller and disposed around the metal roller, and a photoresist layer is formed on the glass tube; and Two rubber rings are respectively sleeved on both ends of the metal roller, and the two rubber rings can be respectively used to be clamped on both ends of the glass tube. 2 . The glass tube fixing device according to claim 1 , wherein the roller fixing device comprises a machine body and two clamping mechanisms installed on the machine body, and two of the clamps are installed on the machine body. 3 . The holding mechanisms are respectively used for holding both ends of the metal roller. 3 . The glass tube fixing device according to claim 1 , wherein the glass tube fixing device further comprises a dust-free cavity, and the roller fixing device, the metal roller, the glass tube and two Each of the rubber rings is arranged in the dust-free cavity. 4 . The glass tube fixing device according to claim 1 , wherein the glass tube fixing device further comprises a soft baking device, the soft baking device and the roller fixing device are arranged at intervals, and the soft baking device is 4 . A bake device can be used to bake the photoresist layer. 5 . The glass tube fixing device according to claim 4 , wherein the glass tube fixing device further comprises a photolithography device, the photolithography device and the soft baking device are arranged at intervals, and the light The lithography apparatus includes a plurality of lithography light sources, and the lithography apparatus can be used to irradiate a lithography light to the photoresist layer. 6 . The glass tube fixing device according to claim 4 , wherein the glass tube fixing device further comprises a moving device, the moving device is connected to the soft baking device and can be used to move the soft baking device. 7 . device. 7 . The glass tube fixing device according to claim 5 , wherein the lithography apparatus comprises a photomask arranged at intervals from the plurality of the lithography light sources. 8 . 8 . The glass tube fixing device according to claim 4 , wherein the soft baking device comprises a plurality of soft baking lamps, and each of the soft baking lamps is an infrared lamp, a near-infrared lamp or a xenon lamp. 9 . . 9 . The glass tube fixing device according to claim 5 , wherein a plurality of the photolithography light sources comprise a plurality of light emitting diodes, and the light emitting diodes are used for emitting ultraviolet light with a wavelength of 248 nm to 365 nm. 10 . 10 . The glass tube fixing device according to claim 1 , wherein the roller fixing device further comprises a rotating mechanism, the rotating mechanism can be used to be mounted on the metal roller, and the rotating mechanism includes: 11 . A speed controller that can be used to rotate the metal roller at a speed between 2900 rpm and 4500 rpm.

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