TWM628897U - Optical detection apparatus - Google Patents

Abstract

An optical detection apparatus used for detecting a sample to be tested includes an optical module, a control module, and an arithmetic module. The optical module includes a camera, an indicator light fixture, and a sample fixture. The camera receives an indicator light from the indicator light fixture, and the camera detects a light from the sample to be tested and then generates an image signal. The control module is used to control the camera and the indicator light fixture. The arithmetic module receives the image signal and generates a brightness distribution result.

Description

Optical detection device

The present invention relates to an optical detection device, in particular, it can judge whether there is any abnormality in the sample to be tested according to the result of the brightness distribution corresponding to the color separation of the sample to be tested.

In recent years, with the vigorous development of automated production, the production industry has created the so-called automated optical inspection (AOI), which is a high-speed and high-precision optical image inspection system, which uses machine vision as a standard inspection technology. Disadvantages of inspections traditionally performed manually using optical instruments. Generally speaking, after the object to be tested (such as a semiconductor wafer) is fabricated, it must go through a standard inspection process, using an automatic optical inspection device to detect the appearance of the object to be tested, and screen out the objects with obvious defects in appearance, and then carry out the inspection of the objects. Optical function test. More specifically, the automatic optical inspection system is carried out by the operation of the optical inspection machine. During the inspection process, the object to be tested is illuminated with light or the light emitted from the object to be tested is directly captured, and then image sensing is performed. The detector unit captures the image of the object to be tested to judge the defect.

In the prior art, most of the automatic optical inspection uses an area scanning camera to capture the image of the object to be inspected. The area scanning photographing device mainly includes a lens and a camera, and the field of view of the lens includes the object to be measured for shooting. However, the image resolution of the area scan photographing device is limited by the resolution of the lens and the camera. Therefore, the larger the field of view, the worse the image resolution, and it also has the disadvantage of slow image acquisition, so it is difficult to meet the needs of the industry.

Therefore, how to design an optical detection device, especially how to solve the aforementioned technical problems in the prior art, is an important subject studied by the author of this case.

The purpose of this creation is to provide an optical detection device, which can solve the technical problems of poor image resolution and slow image acquisition speed in the prior art, and achieve the purpose of improving the detection accuracy and the detection efficiency.

In order to achieve the aforementioned purpose, the optical detection device proposed in the present invention is applied to detect the sample to be tested, and the optical detection device includes an optical module, a control module and an operation module. Wherein, the optical module includes a camera, an indicator light fixture and a test sample fixture. The sample fixture to be tested is used to configure the sample to be tested; the camera is used to receive the indicator light from the indicator light fixture, and the camera generates an image signal after detecting the light to be measured from the sample to be tested. The control module is coupled to the optical module for controlling the camera and the indicator light fixture. The computing module is coupled to the control module, and the computing module receives the image signal and generates a brightness distribution result. Wherein, the operation module determines whether the sample to be tested is abnormal according to the indication light and the result of the brightness distribution.

Further, in the optical detection device, the optical module further includes a bracket, the bracket is arranged outside the indicator light fixture and the sample to be tested fixture, and the bracket fixes the camera on the indicator light fixture and the sample to be tested. on the fixture.

Further, in the optical detection device, the optical module further includes a lens, and the lens is disposed under the camera and used to adjust at least one of the aperture and the focal length corresponding to the sample to be tested.

Further, in the optical detection device, the optical module further includes a casing and a light shield; wherein, the casing is arranged outside the camera, the indicator light fixture and the sample fixture to be tested, and the light shield is arranged on the outer casing. superior.

Further, in the optical detection device, the indicator light includes at least one of red indicator light, green indicator light and blue indicator light.

Further, in the optical detection device, the light to be measured includes at least one of red light to be measured, green light to be measured, and blue light to be measured.

Further, in the optical detection device, the control module includes a single-chip controller, a light-emitting diode chip controller, and a pedal; wherein, the pedal is coupled to the single-chip controller, and the single-chip controller is coupled to the light-emitting diode The body chip controller, the light emitting diode chip controller is coupled to the indicator light fixture.

Further, in the optical detection device, the computing module includes a computer host, and the computer host is coupled to the control module and receives image signals to generate luminance distribution results.

Further, in the optical detection device, the computing module further includes a keyboard and a mouse; wherein the keyboard and the mouse are respectively coupled to the computer host.

Further, in the optical detection device, the operation module further includes a screen, and the screen is coupled to the computer host and used to display the result of the luminance distribution.

When using the optical detection device described in this creation, the indicator light fixture can emit at least one indicator light of red, blue and green according to the control of the control module, so that the camera is controlled by the control module. control, and is adapted to the detection mode corresponding to the appropriate spectrum (for example, adjusting the peak wavelength range of the sensitivity of the sensor, etc.), so that the computing module can accurately obtain the brightness distribution result and save the amount of data acquisition The image acquisition speed is faster, and then the operation module determines whether the sample to be tested is abnormal according to the indication light and the result of the brightness distribution. Because the detection mode can be adjusted with the indicator light fixture, so that the image can be captured and analyzed for a specific spectrum when the image is captured, so it is not easy to have the problem of low resolution and difficulty in detecting the sample to be tested. .

Therefore, the optical detection device described in this creation can solve the technical problems of poor image resolution and slow image acquisition speed in the prior art, so as to achieve the purpose of improving detection accuracy and improving detection efficiency.

In order to have a better understanding of the techniques, means and effects of this creation to achieve the intended purpose, please refer to the following detailed descriptions and accompanying drawings of this creation. I believe that the features and characteristics of this creation can be used to gain an in-depth and specific understanding. , however, the attached drawings are only for reference and description, and are not intended to limit the creation.

The following describes the implementation of the present invention through specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. This creation can also be implemented or applied through other different specific examples, and various details in this creation specification can also be modified and changed based on different viewpoints and applications without departing from the spirit of this creation.

It should be noted that the structure, proportion, size, number of components, etc. shown in the drawings in this specification are only used to cooperate with the content disclosed in the specification for the understanding and reading of those who are familiar with this technology, and are not intended to limit the possibilities of this creation. The limited conditions for implementation, so it has no technical significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effect and the purpose that this creation can produce, shall fall within the scope of this work. The technical content disclosed by the creation must be within the scope of coverage.

The technical content and detailed description of this creation are described below in conjunction with the drawings.

Please refer to FIG. 1 , which is a system structure diagram of a first embodiment of an optical detection device of the present creation. The optical detection device proposed in the present invention is applied to detect a sample to be tested (not shown in the figure), and the optical detection device includes an optical module 10 , a control module 20 and an operation module 30 . The optical module 10 includes a camera 11 , an indicator light fixture 12 and a sample fixture 13 to be tested. The test sample fixture 13 is used to configure the test sample 100 (as shown in FIG. 3 ). The camera 11 is used for receiving the indicator light emitted by the indicator light fixture 12 , and the camera 11 generates an image signal after detecting the light to be measured emitted by the sample to be tested 100 . The control module 20 is coupled to the optical module 10 for controlling the camera 11 and the indicator light fixture 12 . The computing module 30 is coupled to the control module 20, and the computing module 30 receives the image signal and generates a brightness distribution result. The computing module 30 determines whether the sample to be tested 100 is abnormal according to the indication light and the brightness distribution result.

Further, in the first embodiment of the present invention, the indicator light includes at least one of red indicator light, green indicator light, and blue indicator light (eg, the three primary colors of optics). The light to be measured includes at least one of red light to be measured, green light to be measured, and blue light to be measured, such as red light-emitting diodes in the visible light range (for example: aluminum gallium arsenide (AlGaAs), gallium arsenide phosphide (GaAsP) ), Indium Gallium Aluminum Phosphide (AlGaInP), Gallium Phosphide Doped Zinc Oxide (GaP:ZnO)), Green Light Emitting Diodes (eg: Indium Gallium Nitride (InGaN), Gallium Nitride (GaN), Phosphorus Gallium Alide (GaP), Aluminum Indium Gallium Phosphide (AlGaInP), Aluminum Gallium Phosphide (lGaP), Blue Light Emitting Diodes (eg: Zinc Selenide (ZnSe), Indium Gallium Nitride (InGaN), Silicon Carbide ( SiC)) etc. In addition, the light-emitting die form of the sample to be tested 100 may also include organic light-emitting diodes (OLEDs).

Please refer to FIG. 2 and FIG. 3 , wherein, FIG. 2 is a system structure diagram of a second embodiment of the optical detection device for creating the optical detection device, and FIG. 3 is a schematic structural diagram of an optical module of the optical detection device for creating the optical device.

In the second embodiment of the present invention, it is substantially the same as the aforementioned first embodiment, except that the optical module 10 further includes a bracket 14 , a lens 15 , a housing 16 and a light shield 17 , and the control module 20 includes a single-chip controller 21 . The LED chip controller 22 and the pedal 23 , and the operation module 30 includes a computer host 31 , a keyboard 32 , a mouse 33 and a screen 34 . The pedal 23 is coupled to the single chip controller 21 , the single chip controller 21 is coupled to the LED chip controller 22 , and the LED chip controller 22 is coupled to the indicator light fixture 12 . Further, the bracket 14 is disposed outside the indicator light fixture 12 and the sample fixture 13 to be tested, and the bracket 14 fixes the camera 11 on the indicator light fixture 12 and the sample fixture 13 to be tested. The lens 15 is disposed below the camera 11 and is used to adjust at least one of the aperture and the focal length corresponding to the sample to be tested 100 . The housing 16 covers the camera 11 , the indicator light fixture 12 and the sample fixture 13 to be tested, and the light shield 17 is disposed on the housing 16 . Further, the computer host 31 is coupled to the control module 20 and receives the image signal to generate the luminance distribution result. The keyboard 32 and the mouse 33 are respectively coupled to the computer host 31 for the user to give instructions to the computer host 31 . The screen 34 is coupled to the computer host 31 and used to display the result of the luminance distribution.

When using the optical detection device described in this work, the indicator light fixture 12 can emit at least one indicator light of red, blue and green according to the control of the control module 20, so that the camera 11 can be controlled The control of the module 20 is adapted to correspond to the detection mode suitable for the spectrum (for example, adjusting the peak wavelength range of the sensitivity of the sensor, etc.), so that the computing module 30 can accurately obtain the brightness distribution result, and save In order to reduce the data acquisition amount, the image acquisition speed is faster, and then the operation module 30 determines whether the sample to be tested 100 is abnormal or not according to the indication light and the brightness distribution result. Since the detection mode can be adjusted in combination with the indicator light fixture 12, the image can be captured and analyzed for a specific spectrum when the image is captured, so it is difficult to detect the sample 100 to be tested due to low resolution. The problem.

Therefore, the optical detection device described in this creation can solve the technical problems of poor image resolution and slow image acquisition speed in the prior art, so as to achieve the purpose of improving detection accuracy and improving detection efficiency.

The above is only the detailed description and drawings of the preferred specific embodiments of this creation, but the features of this creation are not limited to this, and are not intended to limit this creation. The entire scope of this creation shall be the following patent application scope All the embodiments that conform to the spirit of the patented scope of this creation and its similar changes shall be included in the scope of this creation. Modifications can all be covered by the following patent scope of this case.

10: Optical module 11: Camera 12: Indicator light fixture 13: Sample fixture to be tested 14: Bracket 15: Lens 16: Shell 17: Hood 20: Control Module 21: Single chip controller 22: LED chip controller 23: Pedal 30: Operation module 31: computer host 32: Keyboard 33: Mouse 34: Screen 100: sample to be tested

FIG. 1 is a system architecture diagram of a first embodiment of the creation of an optical detection device;

FIG. 2 is a system architecture diagram of a second embodiment of the creation of an optical detection device; and

FIG. 3 is a schematic structural diagram of an optical module for creating an optical detection device.

10: Optical module

11: Camera

12: Indicator light fixture

13: Sample fixture to be tested

20: Control Module

30: Operation module

Claims (10)

An optical detection device, used for detecting a sample to be tested, comprising: An optical module includes a camera, an indicator light fixture and a sample fixture to be tested; wherein, the sample fixture to be tested is used to configure the sample to be tested; the camera is used to receive the light emitted by the indicator light fixture an indicator light, and the camera generates an image signal after detecting a light to be measured emitted by the sample to be tested; a control module, coupled to the optical module, for controlling the camera and the indicator light fixture; and an operation module, coupled to the control module, the operation module receives the image signal and generates a brightness distribution result; Wherein, the operation module determines whether the sample to be tested is abnormal according to the indication light and the result of the brightness distribution. The optical detection device according to claim 1, wherein the optical module further comprises a bracket, the bracket is disposed outside the indicator light fixture and the sample fixture to be tested, and the bracket fixes the camera on the on the indicator light fixture and the sample fixture to be tested. The optical detection device according to claim 1, wherein the optical module further comprises a lens, which is disposed under the camera and used to adjust at least one of the aperture and the focal length corresponding to the sample to be tested. The optical detection device according to claim 1, wherein the optical module further comprises a casing and a light shield; wherein, the casing is provided outside the camera, the indicator light fixture and the sample fixture to be tested , and the light shield is arranged on the casing. The optical detection device of claim 1, wherein the indicator light includes at least one of red indicator light, green indicator light, and blue indicator light. The optical detection device of claim 1, wherein the light to be measured includes at least one of red light to be measured, green light to be measured, and blue light to be measured. The optical detection device of claim 1, wherein the control module comprises a single-chip controller, a light-emitting diode chip controller, and a pedal; wherein, the pedal is coupled to the single-chip controller, and the single-chip controller The chip controller is coupled to the light-emitting diode chip controller, and the light-emitting diode chip controller is coupled to the indicator light fixture. The optical detection device of claim 1, wherein the computing module comprises a computer host, the computer host is coupled to the control module, and receives the image signal to generate the luminance distribution result. The optical detection device of claim 8, wherein the computing module further comprises a keyboard and a mouse; wherein the keyboard and the mouse are respectively coupled to the computer host. The optical detection device according to claim 8, wherein the computing module further comprises a screen, which is coupled to the computer host and used for displaying the luminance distribution result.

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