CN217332144U

CN217332144U - Optical detection device

Info

Publication number: CN217332144U
Application number: CN202220934160.3U
Authority: CN
Inventors: 林于凯; 康振方; 江俊德
Original assignee: Suzhou Jiahuang Electronic Co ltd
Current assignee: Suzhou Jiahuang Electronic Co ltd
Priority date: 2022-04-20
Filing date: 2022-04-20
Publication date: 2022-08-30
Anticipated expiration: 2032-04-20

Abstract

The utility model discloses a be applied to and detect optical detection device of sample that awaits measuring, including optical module, control module and operation module. The optical module comprises a camera, an indicator lamp fixture and a to-be-detected sample fixture, the camera receives the indicator light emitted by the indicator lamp fixture, and the camera detects the to-be-detected light emitted by the to-be-detected sample and then generates an image signal. The control module is used for controlling the camera and the indicator lamp jig. The operation module receives the image signal and generates a brightness distribution result.

Description

Optical detection device

Technical Field

The present invention relates to an optical inspection device, and more particularly to an optical inspection device capable of determining whether an abnormal color separation occurs in a sample to be inspected according to a luminance distribution result of the color separation corresponding to the sample to be inspected.

Background

In recent years, with the rapid development of automated production, the production industry has created so-called Automated Optical Inspection (AOI), which is a high-speed and high-precision optical image inspection system that uses machine vision as an inspection standard technique to improve the defects of conventional inspection using optical instruments by manpower. Generally, after an object to be tested (e.g., a semiconductor chip) is manufactured, a standard inspection process is performed to inspect the appearance of the object to be tested by an automatic optical inspection apparatus, screen and remove the object with obvious defects, and then perform an optical function test on the object. More specifically, the automatic optical inspection system is performed by the operation of the optical inspection machine, and during the inspection process, the light is used to illuminate the object to be inspected or directly capture the light emitted from the object to be inspected, and then the image sensor unit is used to capture the image of the object to be inspected to determine the defects.

In the prior art, the automatic optical inspection mostly uses a surface scanning camera to capture the image of the object to be inspected. The surface scanning camera device mainly comprises a lens and a camera, wherein the visual field range of the lens brings the object to be detected into the camera for shooting. However, the image resolution of the area scan camera is limited by the resolution of the lens and the camera, so that the image resolution is worse when the field of view is larger, and the image capturing speed is slow, which is difficult to meet the industrial demand.

Therefore, how to design an optical detection device, especially to solve the above technical problems in the prior art, is an important issue studied by the present inventors.

SUMMERY OF THE UTILITY MODEL

An object of this patent is to provide an optical detection device, can solve the technical problem that prior art image resolution is poor and get for instance the speed slow, reach the purpose that improves the detection accuracy and improve detection efficiency.

In order to achieve the above object, the utility model provides an optical detection device is applied to and detects the sample that awaits measuring, and optical detection device includes optical module, control module and operation module. The optical module comprises a camera, an indicator light fixture and a to-be-detected sample fixture. The sample jig to be tested is used for configuring a sample to be tested; the camera is used for receiving the indicating light emitted by the indicating lamp fixture, and generates an image signal after detecting the light to be detected emitted by the sample to be detected. The control module is coupled with the optical module and used for controlling the camera and the indicator lamp fixture. The operation module is coupled with the control module, receives the image signal and generates a brightness distribution result. The operation module judges whether the sample to be detected is abnormal or not according to the indication light and the brightness distribution result.

Preferably, in the optical inspection apparatus, the optical module further includes a bracket, the bracket is disposed outside the indicator lamp fixture and the sample fixture to be inspected, and the bracket fixes the camera on the indicator lamp fixture and the sample fixture to be inspected.

Preferably, in the optical inspection apparatus, the optical module further includes a lens disposed below the camera and used for adjusting an aperture and/or a focal length of the sample to be inspected.

Preferably, in the optical detection apparatus, the optical module further includes a housing and a light shield; the shell cover is arranged outside the camera, the indicator lamp jig and the sample jig to be detected, and the light shield is arranged on the shell.

Preferably, in the optical detection device, the indicator lamp fixture includes at least one of a red indicator lamp, a green indicator lamp and a blue indicator lamp.

Preferably, in the optical detection device, the light to be detected includes at least one of red light to be detected, green light to be detected, and blue light to be detected.

Preferably, in the optical detection apparatus, the control module includes a single chip controller, a led chip controller and a pedal; the pedal is coupled with the single-chip controller, the single-chip controller is coupled with the LED chip controller, and the LED chip controller is coupled with the indicator lamp fixture.

Preferably, in the optical detection apparatus, the operation module includes a host computer, and the host computer is coupled to the control module and receives the image signal to generate the brightness distribution result.

Preferably, in the optical detection device, the operation module further includes a keyboard and a mouse; the keyboard and the mouse are respectively coupled to the computer host.

Preferably, in the optical detection apparatus, the operation module further includes a screen coupled to the host computer and configured to display a luminance distribution result.

When the optical detection device is used, the indicator lamp fixture can emit at least one of red, blue and green indicating light according to the control of the control module, so that the camera is controlled by the control module and is adapted to correspond to a detection mode suitable for a frequency spectrum (for example, a peak wavelength interval of sensitivity of a sensor is adjusted and the like), so that the operation module can accurately obtain the brightness distribution result, the acquisition amount of data is saved, the image acquisition speed is high, and then the operation module judges whether the sample to be detected is abnormal according to the indicating light and the brightness distribution result. The detection mode is adjustably changed by matching with the indicator lamp fixture, so that the image can be captured and analyzed according to a specific frequency spectrum when the image is captured, and the problem that the sample to be detected is difficult to detect due to low resolution is not easy to occur.

Therefore, the utility model provides an optical detection device can solve the image resolution rate difference of prior art and get for instance the slow technical problem of speed, reaches the purpose that improves and detects the rate of accuracy and improve detection efficiency.

For a further understanding of the technology, means, and functions of the invention to be achieved, reference should be made to the following detailed description and accompanying drawings which form a part hereof, and to the accompanying drawings which are incorporated in and constitute a part hereof, and in which is shown by way of illustration, and in which is not intended to be considered a limitation of the invention.

Drawings

The above and other objects, features and advantages of the present invention will become more apparent from the detailed description of the preferred embodiments of the present invention shown in the accompanying drawings. The same reference numerals are used throughout the drawings to denote the same parts, and the drawings are not intended to be drawn to scale in actual size, with emphasis instead being placed upon illustrating the principles of the invention.

Fig. 1 is a system architecture diagram of a first embodiment of the optical inspection device of the present invention;

fig. 2 is a system architecture diagram of a second embodiment of the optical inspection device of the present invention; and

fig. 3 is a schematic diagram of an optical module of the optical detection apparatus of the present invention.

Reference numerals:

10 optical module

11: camera

12 indicating lamp fixture

13, a sample to be tested jig

14, support

15 lens

16: outer casing

17 light shield

20 control module

21 single chip controller

22 LED chip controller

23 step board

30, operation module

31 computer host

32: keyboard

33 mouse

34 screen

100 sample to be measured

Detailed Description

In the description, numerous specific details are provided to provide a thorough understanding of embodiments of the invention; it will be apparent, however, to one skilled in the art that the objects of the invention can be practiced without one or more of these specific details; in other instances, well-known details are not shown or described to avoid obscuring aspects of the invention. The technical content and the detailed description of the present invention are described below with reference to the drawings:

other advantages and effects of the present invention will be apparent to those skilled in the art from the disclosure herein. The present invention can be implemented or applied through other different embodiments, and various details in the specification can be modified and changed based on different viewpoints and applications without departing from the spirit of the present invention.

It should be understood that the structure, ratio, size, and number of elements shown in the drawings attached to the present specification are only used for matching with the disclosure of the specification for the understanding and reading of the person skilled in the art, and are not used to limit the limit conditions of the present invention, so that the present invention has no technical essential meaning, and any modification of the structure, change of the ratio relationship, or adjustment of the size should fall within the scope of the present invention without affecting the function and the achievable purpose of the present invention.

The technical contents and the detailed description of the present invention are described below with reference to the drawings.

Fig. 1 is a schematic diagram of a system of an optical inspection apparatus according to a first embodiment of the present invention. The utility model provides an optical detection device is applied to and detects the sample that awaits measuring (in the figure), and optical detection device includes optical module 10, control module 20 and operation module 30. The optical module 10 includes a camera 11, an indicator light fixture 12, and a sample fixture 13. The sample fixture 13 is used for disposing a sample 100 (as shown in fig. 3). The camera 11 is used for receiving the indication light emitted by the indicator light fixture 12, and the camera 11 generates an image signal after detecting the light to be detected emitted by the sample 100 to be detected. The control module 20 is coupled to the optical module 10 for controlling the camera 11 and the indicator fixture 12. The operation module 30 is coupled to the control module 20, and the operation module 30 receives the image signal and generates a brightness distribution result. The operation module 30 determines whether the sample 100 to be tested is abnormal according to the indication light and the brightness distribution result.

Preferably, in the first embodiment of the present invention, the indication light includes at least one of a red indication light, a green indication light, and a blue indication light (e.g., three primary colors of optics). The light to be detected includes at least one of red light to be detected, green light to be detected, and blue light to be detected, such as a red light emitting diode (e.g., aluminum gallium arsenide (AlGaAs), gallium arsenide phosphide (GaAsP), indium gallium aluminum phosphide (AlGaInP), gallium phosphide-doped zinc oxide (GaP: ZnO)) in the visible light range, a green light emitting diode (e.g., indium gallium nitride (InGaN), gallium nitride (GaN), gallium phosphide (GaP), indium gallium aluminum phosphide (AlGaInP), aluminum gallium phosphide (lGaP)), a blue light emitting diode (e.g., zinc selenide (ZnSe), indium gallium nitride (InGaN), silicon carbide (SiC)), and the like. The light-emitting grain of the sample 100 may also include an organic light-emitting diode (OLED).

Please refer to fig. 2 and fig. 3, wherein fig. 2 is a system architecture diagram of a second embodiment of the optical inspection apparatus of the present invention, and fig. 3 is a schematic architecture diagram of an optical module of the optical inspection apparatus of the present invention.

In the second embodiment of the present invention, substantially the same as the first embodiment, the optical module 10 further includes a bracket 14, a lens 15, a housing 16 and a light shield 17, the control module 20 includes a single chip controller 21, a led chip controller 22 and a pedal 23, and the operation module 30 includes a computer host 31, a keyboard 32, a mouse 33 and a screen 34. The pedal 23 is coupled to the single chip controller 21, the single chip controller 21 is coupled to the led chip controller 22, and the led chip controller 22 is coupled to the indicator fixture 12. Preferably, the bracket 14 is disposed outside the indicator light fixture 12 and the sample fixture 13, and the camera 11 is fixed on the indicator light fixture 12 and the sample fixture 13 by the bracket 14. The lens 15 is disposed under the camera 11 and is used to adjust at least one of an aperture and a focal length corresponding to the sample 100. The housing 16 covers the camera 11, the indicator light fixture 12 and the sample fixture 13, and the light shielding cover 17 is disposed on the housing 16. Preferably, the host computer 31 is coupled to the control module 20 and receives the image signal to generate the brightness distribution result. The keyboard 32 and the mouse 33 are respectively coupled to the host computer 31 for a user to give instructions to the host computer 31. The screen 34 is coupled to the host computer 31 and is used for displaying the brightness distribution result.

When the optical detection device is used, the indicator light fixture 12 can emit at least one of red, blue and green indicator lights according to the control of the control module 20, so that the camera 11 is controlled by the control module 20 and is adapted to correspond to a detection mode suitable for a frequency spectrum (e.g., a peak wavelength interval for adjusting the sensitivity of the sensor, etc.), so that the operation module 30 can accurately obtain the brightness distribution result, save the data acquisition amount and enable the image capturing speed to be fast, and then the operation module 30 can judge whether the sample 100 to be detected is abnormal according to the indicator lights and the brightness distribution result. Since the detection mode is adjustably changed in cooperation with the indicator light fixture 12, the image can be captured and analyzed for a specific frequency spectrum during image capture, so that the problem that the sample 100 to be detected is difficult to detect due to low resolution is not easy to occur.

However, the above description is only a preferred embodiment of the present invention, and the scope of the present invention should not be limited thereto, and all the equivalent changes and modifications made according to the claims of the present invention should still belong to the protection scope of the patent coverage of the present invention. The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features. The present invention can also be embodied in other specific forms without departing from the spirit or essential attributes thereof, and it should be understood that various changes and modifications can be made by those skilled in the art without departing from the spirit or essential attributes thereof, and that such changes and modifications are intended to be included within the scope of the appended claims.

Claims

1. An optical detection device for detecting a sample to be detected, comprising:

an optical module, including a camera, an indicator light fixture and a to-be-tested sample fixture; the to-be-detected sample jig is used for configuring the to-be-detected sample; the camera is used for receiving an indicating light emitted by the indicating lamp fixture, and an image signal is generated after the camera detects a to-be-detected light emitted by the to-be-detected sample;

the control module is coupled with the optical module and used for controlling the camera and the indicator lamp fixture; and

an operation module coupled to the control module, the operation module receiving the image signal and generating a brightness distribution result;

and the operation module judges whether the sample to be detected is abnormal or not according to the indicating light and the brightness distribution result.

2. The optical inspection apparatus of claim 1, wherein the optical module further comprises a bracket disposed outside the indicator fixture and the sample fixture, and the bracket fixes the camera on the indicator fixture and the sample fixture.

3. The optical inspection device of claim 1, wherein the optical module further comprises a lens disposed below the camera for adjusting an aperture and/or a focal length of the lens corresponding to the sample to be inspected.

4. The optical inspection device of claim 1, wherein the optical module further comprises a housing and a light shield; the shell cover is arranged outside the camera, the indicator lamp jig and the sample jig to be detected, and the light shield is arranged on the shell.

5. The optical inspection device of claim 1, wherein the indicator light fixture includes at least one of a red indicator light, a green indicator light, and a blue indicator light.

6. The optical detection device according to claim 1, wherein the light to be detected includes at least one of red light to be detected, green light to be detected, and blue light to be detected.

7. The optical inspection device of claim 1, wherein the control module includes a single chip controller, a led chip controller and a foot pedal; the pedal is coupled with the single-chip controller, the single-chip controller is coupled with the LED chip controller, and the LED chip controller is coupled with the indicator lamp fixture.

8. The optical inspection apparatus as claimed in claim 1, wherein the computing module comprises a host computer coupled to the control module and receiving the image signal to generate the brightness distribution result.

9. The optical inspection device of claim 8, wherein the computing module further comprises a keyboard and a mouse; wherein the keyboard and the mouse are respectively coupled to the host computer.

10. The optical inspection device of claim 8, wherein the computing module further comprises a screen coupled to the host computer for displaying the brightness distribution result.