CN211402591U

CN211402591U - Device for detecting photoelectric performance and appearance of chip

Info

Publication number: CN211402591U
Application number: CN201922467187.7U
Authority: CN
Inventors: 郭祖福
Original assignee: Xiangneng Hualei Optoelectrical Co Ltd
Current assignee: Xiangneng Hualei Optoelectrical Co Ltd
Priority date: 2019-12-31
Filing date: 2019-12-31
Publication date: 2020-09-01
Anticipated expiration: 2029-12-31

Abstract

The utility model provides a chip photoelectric property and outward appearance detection device, including board and microscope carrier, some survey mechanism and outward appearance detection mechanism of setting on the board, the microscope carrier adopts transparent material and sets up at last material level and operation position between horizontal migration, outward appearance detection mechanism sets up light source and CDD camera on the red of microscope carrier top including setting up light source under the blue of microscope carrier below and setting up in the operation position, some survey mechanism sets up in the test probe of microscope carrier both sides and sets up in the survey optical head of microscope carrier top including the symmetry on the operation position, test probe is adjustable at XYZ orientation position and including the probe that is used for detecting the crystalline grain electrode, the needle barometer that is used for adjusting probe pressure and be used for the signal connector of output probe detected information. The utility model discloses the realization is gone on when detecting chip photoelectric property and outward appearance, avoids leading to the product to be scratched and pollute because of the circulation of making a round trip, has improved product quality, has still shortened production time, the cost is reduced.

Description

Device for detecting photoelectric performance and appearance of chip

Technical Field

The utility model belongs to the technical field of chip production, in particular, relate to a chip photoelectric property and outward appearance detection device.

Background

Before being manufactured into an illuminating lamp, the LED crystal grain needs to be subjected to various process manufacturing processes, wherein photoelectric property detection and appearance quality detection are two very important process steps.

The photoelectric performance detection means that electric properties such as Voltage (VF), Wavelength (WD), brightness (LOP), antistatic capability (ESD), and the like of all crystal grains on a wafer are tested one by one to obtain an actual value, so that reliable actual performance information of a product is provided for a subsequent customer when purchasing the crystal grains. The appearance quality detection means that the appearance of each crystal grain is carefully scanned, and defective products with poor appearance are picked out and removed.

At present, photoelectric performance detection is realized through a photoelectric testing machine, defective crystal grains are removed through automatic appearance detection equipment, two functions can be realized only independently due to complete independence of the two equipment, equipment purchase cost is high, and especially the price of the automatic appearance detection equipment is very high. In addition, products need to be transported back and forth among different devices, and the problems of product scratching, pollution and the like are easily caused in the process, so that finished product loss is caused to the products.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a can carry out the device that detects to the photoelectric property and the outward appearance of chip simultaneously, concrete scheme is as follows:

a chip photoelectric performance and appearance detection device comprises a machine table, and a carrying platform, a point measurement mechanism and an appearance detection mechanism which are arranged on the machine table, wherein a loading position and an operation position are arranged on the machine table; the point measuring mechanism comprises a detection probe symmetrically arranged on two sides of the platform and a light measuring head arranged above the platform on the operation position, the appearance detection mechanism comprises an upper light source, a lower light source and a CDD camera, the lower light source is arranged below the platform, and the upper light source and the CDD camera are both arranged above the platform on the operation position.

Preferably, the detection probe comprises an adjustment base and a needle seat, the needle seat is detachably arranged on the adjustment base, the needle seat comprises a probe for detecting a crystal grain electrode, a needle pressure gauge for adjusting the pressure of the probe and a signal connector for outputting probe detection information, the optical head comprises an optical sensor for collecting crystal grain luminescence information, and the adjustment base comprises an X-axis knob, a Y-axis knob and a Z-axis knob and is used for realizing position adjustment of the probe above a chip so as to detect different crystal grains.

Preferably, the probe is arranged on the detection probe through the matching of the probe chuck and the chuck screw, and the probe is taken out and replaced or fixed in position through the unscrewing or screwing of the chuck screw.

Preferably, the probe also comprises an acupressure adjusting knob and a knob fixing screw, scales and a pointer are arranged on the acupressure gauge, the pressure applied to the crystal grains by the probe is adjusted by rotating the acupressure adjusting knob, the pointer on the acupressure gauge points to a scale position corresponding to a numerical value, and the acupressure adjusting knob is fixed in position by screwing the knob fixing screw.

Preferably, the system further comprises a control host, a display screen and input equipment, wherein the point detection mechanism and the appearance detection mechanism are connected with the control host and perform control signal transmission and data feedback mutually.

Preferably, the upper light source is a red light source, and the lower light source is a blue light source.

Preferably, the carrier is provided with a plurality of vacuum adsorption holes communicated with the negative pressure generating device, so as to fix the position of the chip.

The utility model provides a technical scheme has following beneficial effect at least:

1. the utility model discloses need not to purchase expensive automatic optical detection equipment again, as long as carry out the equipment improvement on the basis of current point measuring machine, if add light source from top to bottom, change transparent microscope carrier etc. just can realize going on in step that detects chip photoelectric property and outward appearance, reduced manpower and materials expenditure cost.

2. The utility model discloses concentrate on a board chip photoelectric property and outward appearance detection function, reduce the transportation of making a round trip to the product, shorten product operation cycle, avoid the product to lead to by the scratch and pollute because of the circulation of making a round trip before selecting separately, improved product quality.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, it is obvious that the drawings described below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained without inventive efforts, wherein:

FIG. 1 is a schematic diagram of a device for detecting photoelectric properties and appearance of a chip in example 1 of the present invention;

FIG. 2 is a block diagram of the inspection probe of FIG. 1;

in the figure: the system comprises a machine table 1, a platform 2, a detection probe 3, a light measuring head 4, an upper light source 5, a lower light source 6 and a 7CDD camera; the probe comprises a 3-1 probe, a 3-2 probe chuck, a 3-3 probe pressure gauge, a 3-4 probe pressure adjusting knob, a 3-5 knob fixing screw, a 3-6 signal connector, a 3-7 quick-release knob, a 3-8X axial knob, a 3-9Y axial knob and a 3-10Z axial knob.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

Example 1

Referring to fig. 1 and 2, a device for detecting photoelectric performance and appearance of a chip includes a machine table 1, and a carrier 2, a point measurement mechanism, and an appearance detection mechanism, which are disposed on the machine table 1.

The machine table 1 is provided with a material loading position and an operation position, the carrier 2 is made of transparent materials and is arranged between the material loading position and the operation position in a horizontal moving mode, and the carrier 2 is provided with a plurality of vacuum adsorption holes communicated with a negative pressure generating device and used for fixing the position of a blue film bearing a wafer

The appearance detection mechanism comprises an upper light source 5, a lower light source 6 and a CDD camera 7, wherein the lower light source 6 is an annular lamp and is arranged under the carrier 2, the CDD camera 7 is arranged above the carrier 2 in the operation position, and the upper light source 5 is an annular lamp and is arranged on the periphery of a lens of the CDD camera 7 in an annular mode.

In this embodiment, the upper light source 5 is a red light source, and the lower light source 6 is a blue light source.

The spot measurement mechanism is arranged on an operation position and comprises a light measurement head 4 and two detection probes 3, the two detection probes 3 are symmetrically arranged on two sides of the carrying platform 2, the light measurement head 4 is arranged right above the carrying platform 2 in the operation position, and the light measurement head 4 comprises a light sensor and is used for collecting light emitting information of crystal grains in photoelectric detection.

The detection probe 3 comprises an adjusting base and a needle seat, and the needle seat is connected to the adjusting base through a quick-release knob 3-7. The needle seat comprises a probe 3-1 for detecting a crystal grain electrode, a needle pressure gauge 3-3 for adjusting the pressure of the probe and a signal connector 3-6 for outputting probe detection information, the probe 3-1 is fixed on a probe chuck 3-2 through a chuck screw, a needle pressure adjusting knob 3-4 and a knob fixing screw 3-5 are arranged on the needle pressure gauge 3-3, the adjustment of the pressure applied to the crystal grain by the probe is realized through the matching of the needle pressure adjusting knob 3-4 and the knob fixing screw 3-5, and a scale and a pointer are further arranged in a display area of the needle pressure gauge 3-3 and used for displaying real-time needle pressure.

The adjusting base comprises an X-axis knob 3-8, a Y-axis knob 3-9 and a Z-axis knob 3-10 which are matched to realize probe position movement and detect different crystal grains.

The detection device further comprises a control host, a display screen and input equipment, and the point detection mechanism and the appearance detection mechanism are connected with the control host and perform control signal transmission and data feedback mutually.

The working process of the detection device is as follows:

1. the machine station adopts a mode of firstly expanding and then carrying out point measurement so as to directly detect the appearance;

2. the method comprises the following steps that a carrier platform is initially positioned at a loading position, and when an engineer places a blue film bearing a wafer on the carrier platform and inputs related information of a product, the carrier platform moves to an operation position and performs horizontal position adjustment;

3. after the original positions are set on the wafer, the machine station scans all the crystal grains to determine the position of each crystal grain,

4. performing photoelectric performance detection on the chip to generate a file comprising the position coordinates of each crystal grain and corresponding electrical data, automatically uploading the file to an MES (manufacturing execution system) of a company, and performing electrical grade bin setting according to the setting of the MES;

5. and the upper light source and the lower light source are lightened, the machine reads the EXCL file and scans the appearance of the crystal grains, and the crystal grain data which do not accord with the appearance standard of the product are uniformly combined to a special bin grade according to the production requirement, so that the simultaneous spot measurement and the appearance detection are realized.

The above description is only a preferred embodiment of the present invention, and does not limit the scope of the present invention, and it will be apparent to those skilled in the art that various modifications and variations can be made in the present invention. Any improvement or equivalent replacement made by utilizing the contents of the specification and the drawings of the present invention can be directly or indirectly applied to other related technical fields within the spirit and principle of the present invention, and shall be included in the scope of the present invention.

Claims

1. The device for detecting the photoelectric performance and the appearance of the chip is characterized by comprising a machine table (1), and a carrying platform (2), a point detection mechanism and an appearance detection mechanism which are arranged on the machine table (1), wherein a loading position and an operation position are arranged on the machine table (1); the microscope carrier (2) is made of transparent materials and is arranged between a loading position and an operating position in a horizontal moving mode, the point measuring mechanism comprises detecting probes (3) symmetrically arranged on two sides of the microscope carrier (2) and a light measuring head (4) arranged above the microscope carrier (2) on the operating position, the appearance detecting mechanism comprises an upper light source (5), a lower light source (6) and a CDD camera (7), the lower light source (6) is arranged below the microscope carrier (2), and the upper light source (5) and the CDD camera (7) are arranged above the microscope carrier (2) on the operating position.

2. The device for detecting the photoelectric property and the appearance of the chip according to claim 1, wherein the detection probe (3) comprises an adjustment base and a needle base, the needle base is detachably arranged on the adjustment base, the needle base comprises a probe (3-1) for detecting a crystal grain electrode, a needle pressure gauge (3-3) for adjusting the pressure of the probe and a signal connector (3-6) for outputting probe detection information, the optical head (4) comprises an optical sensor for acquiring crystal grain luminescence information, and the adjustment base comprises an X-axis knob (3-8), a Y-axis knob (3-9) and a Z-axis knob (3-10) for realizing the position adjustment of the probe (3-1) above the chip and further detecting different crystal grains.

3. The device for detecting the photoelectric property and the appearance of the chip according to claim 2, wherein the probe (3-1) is arranged on the detection probe through the matching of a probe chuck (3-2) and a chuck screw, and the probe is taken out, replaced or fixed in position through the unscrewing or screwing of the chuck screw.

4. The device for detecting the photoelectric property and the appearance of the chip according to claim 3, wherein the detection probe further comprises a needle pressure adjusting knob (3-4) and a knob fixing screw (3-5), scales and pointers are arranged on the needle pressure gauge (3-3), the pressure applied to the crystal grains by the probe is adjusted by rotating the needle pressure adjusting knob (3-4), the pointers on the needle pressure gauge (3-3) point to scale positions corresponding to numerical values, and the needle pressure adjusting knob is fixed in position by screwing the knob fixing screw (3-5).

5. The device for detecting the photoelectric property and the appearance of the chip according to claim 4, further comprising a control host, a display screen and an input device, wherein the point detection mechanism and the appearance detection mechanism are connected with the control host and perform control signal transmission and data feedback mutually.

6. The device for detecting the optoelectronic performance and appearance of the chip as claimed in any one of claims 1 to 5, wherein the upper light source (5) is a red light source, and the lower light source (6) is a blue light source.

7. The device for detecting the photoelectric property and the appearance of the chip as claimed in claim 6, wherein the carrier (2) is provided with a plurality of vacuum absorption holes communicated with the negative pressure generating device for fixing the position of the chip.