TWM623249U - Micro point measuring device - Google Patents

Abstract

This creation is a micro point measuring device, which is set on the testing equipment, and includes: a carrier and a point measuring mechanism. The carrier has an accommodating space, and the point measuring mechanism is assembled in the accommodating space of the carrier. The point measuring mechanism has a conductive support for clamping a probe, and the probe is used for point measuring an LED die of a wafer. The point measuring mechanism includes a clamping base clamping the conductive support, and the clamping base assembly is arranged in the accommodating space and is driven by a forward and backward moving unit to move back and forth, and is driven by a left and right moving part to move left and right, and is driven by a vertical moving unit to move up and down.

Description

Micro point measuring device

This creation is about a testing device for testing electronic components, especially a micro-point testing device with probes for detecting semiconductor chips such as light-emitting diodes.

Please refer to FIG. 1, which is Taiwan Patent No. I526702 "Point Test Device for Testing Electronic Components", with a three-axis displacement adjustment base 1, which is set on a testing device (not shown), including an X-axis Displacement adjustment module 2, a Y-axis displacement adjustment module 3 and a Z-axis displacement adjustment module 4, the X-axis displacement adjustment module 2, Y-axis displacement adjustment module 3 and Z-axis displacement adjustment module 4 can be respectively Adjust the displacement in the X-axis, Y-axis and Z-axis. And has a lift driver 5 set on the three-axis displacement adjustment seat 1, the three-axis displacement adjustment seat 1 can perform three-axis displacement adjustment of the lift driver 5, and a connecting frame 6 through the sliding rail and the sliding seat. It is coupled to the three-axis displacement adjustment base 1, and is correspondingly connected to the lifting driver 5, so that the lifting driver 5 can drive the connecting frame 6 to perform lifting and lowering action, and a U-shaped fixing frame 7 is fixed on the connecting frame 6. The connecting frame 6 is articulated with a movable seat 8, and the front end of the movable seat 8 is provided with a probe holding seat 9, and the probe holding seat 9 is used for holding a probe A, and the probe A can be lifted The top surface of an LED die against the light-emitting diode is used to detect the performance of the LED die of the light-emitting diode.

Because the X-axis displacement adjustment module 2, the Y-axis displacement adjustment module 3 and the Z-axis displacement adjustment module 4 of the aforementioned point measuring device for testing electronic components are all matched with each other by the sliding rail and the sliding seat, the The X-axis displacement adjustment module 2, the Y-axis displacement adjustment module 3 and the Z-axis displacement adjustment module 4 can adjust the displacement in the X-axis, Y-axis and Z-axis respectively, resulting in large overall volume and weight, relatively It requires a large amount of material to manufacture it so that the production cost cannot be reduced.

Therefore, the main purpose of this creation is to solve the conventional point measuring device with a three-axis displacement adjustment seat, which makes the X-axis displacement adjustment module and the Y-axis displacement adjustment module cooperate with each other through the sliding rail and the sliding seat. The group and Z-axis displacement adjustment module can adjust the displacement in the X-axis, Y-axis and Z-axis respectively, which leads to the large overall volume of the adjustment seat and the relatively high manufacturing cost. , can achieve the advantages of small size, cost saving, simple structure and easy operation.

In order to achieve the above-mentioned purpose, the present invention discloses a micro-point measuring device, which is installed on the testing equipment, including: a carrier and a point-pointing mechanism, the carrier has an accommodating space; the point-pointing mechanism is assembled on the carrier. The accommodating space of the seat, the point-measuring mechanism has a conductive support to clamp a probe, the probe is used to point an LED die of a wafer, and the point-measuring mechanism includes a clamp seat to clamp the conductive The bracket, the clip seat is assembled in the accommodating space and can be displaced back and forth by a front and rear moving unit, and can be displaced left and right by a left and right moving member, and can be moved up and down by a vertical moving unit.

In application implementation, the accommodating space of the carrier is communicated with a through hole on the right wall surface of the carrier, and the clip seat protrudes from the through hole of the carrier.

In application, the front and rear moving unit includes a screw screwed on the left wall surface of the carrier, a first wheel is arranged on the left side of the screw, and the right side of the screw is connected with the clamping seat. Rotating the first wheel can Drive the clamp base to move back and forth.

In application, the front side of the carrier is provided with a wall hole, the left and right moving parts have a first end and a second end in different directions, and the first end and the second end are 90 degrees from each other. °, the first end is in the same direction as the length of the carrier and is pivotally connected to a second runner. A screw in the center of the second runner passes through the left and right moving parts, the wall hole and is connected to the clamping seat connected, the second end of the left and right moving piece is protruded into the wall hole and screwed together with the clamping base, and rotating the second wheel can drive the clamping base to move left and right.

In application implementation, the conductive support has a transverse connecting end and a straight clamping end, the connecting end is clamped by a clamping groove with an upward opening of the clamping base, and the clamping end is clamped to a probe , the probe has a transverse combination end connected with the clamping end of the conductive support and an action end, the combination end and the action end form an included angle with each other, and the included angle is greater than 90°.

In application, a convex belly with a hollow interior is provided above the right wall of the carrier, the up-and-down moving unit includes a gear assembled on the convex belly, the rear of the clamp is connected to a plate, and the gear set is provided with a Adjusting the screw, and rotating the adjusting screw can drive the gear set to drive the plate body to move up and down.

In application implementation, the rear wall of the carrier is provided with a through slot to expose the plate body, and is provided with an elastic adjustment unit and a screw, the screw passes through the through slot and is connected to the plate body, and the elastic adjustment unit is provided with An elastic piece that can be stretched axially, one end of the elastic piece is hooked on the rear wall of the carrier, the other end of the elastic piece is connected with the screw, and the screw can be rotated to fine-tune the plate body on the carrier the front and rear positions.

Thereby, the present invention is provided with a front and rear moving unit on the right side of the carrier, the first screw is screwed on the left wall of the carrier, the left side of the first screw is provided with a first runner, and the right side of the first screw is connected with the clamping base, and rotates the The first runner can drive the clamping base to move back and forth, and drive the conductive support to move back and forth, so that the front and rear positions of the first probe can be adjusted. Then, a left and right moving piece is arranged on the front wall of the carrier, the first end of which is pivotally connected to the second runner, the screw in the center of the second runner is connected with the clamping base, and the second end of the left and right moving piece is screwed with the clamping base, Rotating the second wheel can drive the left and right moving parts to move left and right, and drive the clamping base to move left and right, so that the left and right positions of the probe can be adjusted. The plate body of the up and down moving unit is connected to the back of the conductive bracket. The convex belly of the carrier is provided with a gear group, and the gear group is provided with an adjustment screw. Rotating the adjustment screw can drive the gear group to adjust the up and down displacement of the plate body, and adjust the conductive bracket to move up and down. , and then the upper and lower positions of the probe can be adjusted. With this structure, compared with the conventional point measuring device used for testing electronic components in Chinese Patent No. I526702, the X-axis displacement adjustment module can be adjusted by the mutual cooperation between the sliding rail and the sliding seat. , The Y-axis displacement adjustment module and the Z-axis displacement adjustment module can adjust the displacement in the X-axis, Y-axis and Z-axis respectively, and greatly reduce the overall volume and weight, which can miniaturize and reduce the manufacturing cost. To achieve a streamlined operation function.

The embodiments of the present creation are described in detail as follows in conjunction with the drawings. The accompanying drawings are mainly simplified schematic diagrams, and only illustrate the basic structure of the present creation in a schematic way. Therefore, only the elements related to the present creation are indicated in these drawings. , and the displayed components are not drawn according to the number, shape, size ratio, etc. of the actual implementation. The size of the actual implementation is a selective design, and the layout of the components may be more complicated.

The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the invention may be implemented. The direction terms mentioned in this creation, such as "up", "down", "front", "rear", "left", "right", "inside", "outside", "sideways", etc., are for reference only Additional schema orientation. Therefore, the directional terms used are used to describe and understand the creation, not to limit the creation. Additionally, in the specification, unless explicitly described to the contrary, the word "comprising" will be understood to mean the inclusion of stated elements but not the exclusion of any other elements.

Please refer to FIG. 2 to FIG. 4 . The micro-point measuring device of the present invention is installed on the testing equipment, and includes a carrier 10 and a point-pointing mechanism 20 . The carrier 10 is a rectangular body with a front wall 11 , a rear wall 12 , a left wall 13 , and a right wall 14 . The carrier 10 has an accommodating space 15 inside, and the accommodating space 15 penetrates the A first wall hole 111 and a second wall hole 112 are respectively provided on the left and right sides of the front wall surface 11 of the carrier seat 10 on the right wall surface 14 of the carrier seat 10 , and a through groove communicating with the inside and the outside is formed on the rear wall surface 12 of the carrier seat 10 . 121, the right wall surface 14 of the carrier 10 is provided with a hollow inside of a convex belly 141 and a through hole 142.

The point-measuring mechanism 20 includes a clamping base 21 , a front-rear moving unit 22 , a left-right moving member 23 , an up-down moving unit 24 , an elastic adjustment unit 25 , a conductive support 26 and a probe 27 .

The holder 21 is assembled in the accommodating space 15 of the carrier 10 , one end of the holder 21 protrudes from the through hole 142 of the right wall 14 of the carrier 10 , and the holder 21 is provided with an opening An upward clamping groove 211, the clamping groove 211 clamps the conductive support 26, the conductive support 26 has a horizontal connection end 261 and a longitudinal clamping end 262, the connection end 261 and the clamp base 21 are clamped The groove 211 is matched, and the clamping end 262 of the conductive bracket 26 is clamped to the probe 27 . The probe 27 has a combined end 271 and an active end 272 in the transverse direction. The clamping end 262 is clamped, the working end 272 of the probe 27 and the combination end 271 form an included angle a with each other, and the included angle a is greater than 90°. For LED die, please refer to Figure 4 and Figure 5 again.

In practical application, the front and rear moving unit 22 includes a first screw 221 screwed to the left wall surface 13 of the carrier 10 , a first runner 222 is provided on the left side of the first screw rod 221 , and a right side of the first screw rod 221 is provided. Connected with the clamp base 21, rotating the first wheel 222 can drive the clamp base 21 to move forward and backward.

The left-right moving member 23 is a rod body disposed on the front wall 11 of the carrier 10 . The longitudinal direction of the left-right moving member 23 is the same as the longitudinal direction of the carrier 10 , and is laterally assembled on the side of the carrier 10 . On the front wall 11, the left and right moving parts 23 have a first end 231 and a second end 232 in different directions. The first end 231 and the second end 232 are at 90° to each other. The first end 231 is in the same direction as the length direction of the carrier 10 and is pivotally connected with a second wheel 233. The screw 234 in the center of the second wheel 233 passes through the left and right moving parts 23 and the first wall hole 111 and is connected with the clamping seat 21. The second end portion 232 of the left and right moving member 23 extends into the second wall hole 112 of the carrier base 10 and is screwed with the clamping base 21 . Rotating the second wheel 233 can drive the left and right moving member 23 to move left and right, thereby driving The clamping base 21 is displaced left and right.

The up-and-down moving unit 24 includes a plate 241 attached to and connected to the back of the conductive bracket 26 , a gear set 242 is provided inside the convex web 141 of the carrier 10 , and a cover plate 243 is covered above the gear set 242 , the gear set 242 is provided with a longitudinal adjustment screw 244, rotating the adjustment screw 244 can drive the gear set 242 to adjust the vertical displacement of the plate body 241, and then adjust the conductive bracket 26 to move up and down.

The elastic adjustment unit 25 includes a screw 251 passing through the slot 121 of the carrier 10 and connected to the plate body 241, and an elastic member 252 that can be axially stretched. One end of the elastic member 252 is hooked on the carrier On the rear wall 12 of the base 10 , the other end of the elastic member 252 is connected with the screw 251 , and rotating the screw 251 can fine-tune the front and rear positions of the plate 241 on the carrier 10 .

With the above structure, during operation, the holder 21 can be moved back and forth by rotating the first wheel 222 , and the conductive support 26 can be moved back and forth, so that the front and rear positions of the first probe 27 can be adjusted. When the second wheel 233 is rotated, the left and right moving parts 23 can be driven to move left and right, and the clamping base 21 can be driven to move left and right, thereby driving the conductive support 26 to move left and right, and the left and right position of the probe 27 can be adjusted.

In addition, rotating the adjusting screw 244 of the up-and-down moving unit 24 can drive the gear set 242 to act, so that the plate body 241 is displaced up and down, thereby driving the conductive bracket 26 to produce up and down displacement, and the conductive bracket 26 drives the probe 27 to move up and down. The upper and lower positions of the probe 27 .

Please refer to FIG. 6 and FIG. 7 , which are respectively a comparison diagram showing the volume size of the pointing device used for testing electronic components between the present invention (shown in FIG. 6 ) and the prior art patent No. I526702 (shown in FIG. 7 ). It can be clearly seen that the front and rear moving unit 22 is provided on the left side of the carrier 10, the first screw 221 is screwed on the left wall 13 of the carrier 10, the left side of the first screw 221 is provided with a first runner 222, the first screw The right side of the 221 is connected with the clamp base 21 , and rotating the first wheel 222 can drive the clamp base 21 to move back and forth, and drive the conductive support 26 to move back and forth, so that the front and rear positions of the first probe 27 can be adjusted. Next, a left and right moving member 23 is arranged on the front wall 11 of the carrier 10 , the first end 231 of which is pivotally connected to the second rotating wheel 233 , the screw 234 in the center of the second rotating wheel 233 is connected to the clamping base 21 , and the first end portion 231 of the left and right moving member 23 is connected The two ends 232 are screwed together with the clamping base 21 , and rotating the second wheel 233 can drive the left and right moving parts 23 to move left and right, and drive the clamping base 21 to move left and right, thereby adjusting the left and right position of the probe 27 . The plate body 241 of the up-and-down moving unit 24 is connected to the back of the conductive bracket 26. The convex belly 141 of the carrier 10 has a gear set 242, and the gear set 242 is provided with an adjustment screw 244. Rotating the adjustment screw 244 can drive the gear set 242 to adjust the plate The body 241 is displaced up and down, and the conductive support 26 is adjusted to move up and down, so that the up and down position of the probe 27 can be adjusted.

With such a structure, compared with the conventional point measuring device used for testing electronic components in Patent No. I526702, the X-axis displacement adjustment module, the Y-axis displacement adjustment module and the Z-axis are formed by the mutual cooperation of the sliding rail and the sliding seat. The displacement adjustment module can adjust the displacement in the X-axis, Y-axis and Z-axis respectively, and greatly reduce the overall volume and weight by 60%~85%, which can miniaturize and reduce the manufacturing cost, and achieve a streamlined Operation function.

However, the above are only the preferred embodiments of this creation, and should not limit the scope of implementation of this creation, that is, simple equivalent changes and modifications made according to the scope of the patent application for this creation and the contents of the description of the creation, All are still within the scope of this creative patent.

Knowledge part

1: Three-axis displacement adjuster

2: X-axis displacement adjustment module

3: Y-axis displacement adjustment module

4: Z-axis displacement adjustment module

5: Lifting the drive

6: Connecting frame

7: Fixed frame

8: Active seat

9: Probe holder

A: Probe

This creative part

10: Carrier

11: Front wall

111: first wall hole

112: Second wall hole

12: Back wall

121: Grooving

13: Left wall

14: Right wall

141: Convex belly

142: Through hole

15: Accommodating space

20: Point measuring mechanism

21: clip seat

211: clip slot

22: Moving the unit forward and backward

221: The first screw

222: The first runner

23: Left and right moving parts

231: First End

232: Second End

233: Second Wheel

234: Screw

24: Move the unit up and down

241: Board body

242: Gear Set

243: Cover

244: Adjustment screw

25: Elastic adjustment unit

251: Screws

252: Elastic

26: Conductive bracket

261: Connection end

262: Clamp end

27: Probe

271: Combination end

272: Action end

FIG. 1 is a perspective view of a pointing device for testing electronic components in Patent No. I526702. FIG. 2 is a perspective view of a creative embodiment. FIG. 3 is a perspective view of another direction of the inventive example. FIG. 4 is a partial detailed view of the contact between the probe and the wafer according to an embodiment of the present invention. FIG. 5 is a partial enlarged view of FIG. 4 . FIG. 6 and FIG. 7 are diagrams showing the comparison of the volume and size of the point measuring device used for testing electronic components in the present invention and the prior art patent No. I526702.

10: Carrier

11: Front wall

111: first wall hole

112: Second wall hole

12: Back wall

13: Left wall

14: Right wall

141: Convex belly

142: Through hole

15: Accommodating space

20: Point measuring mechanism

21: clip seat

211: clip slot

22: Moving the unit forward and backward

221: The first screw

222: The first runner

23: Left and right moving parts

231: First End

232: Second End

233: Second Wheel

234: Screw

24: Move the unit up and down

241: Board body

242: Gear Set

243: Cover

244: Adjustment screw

26: Conductive bracket

261: Connection end

262: Clamp end

27: Probe

271: Combination end

272: Action end

Claims (7)

A miniature point measuring device, which is arranged on the testing equipment, comprises: a carrier with an accommodating space; a point-measuring mechanism assembled in the accommodating space of the carrier, and the point-measuring mechanism has a conductive support for clamping A probe is connected, and the probe is used to perform spot measurement on an LED die of a wafer. The spot measurement mechanism includes a clamp seat to clamp the conductive support, the clamp seat is assembled in the accommodating space and received by a front and rear The moving unit can be driven to move back and forth, and is driven by a left and right moving element to move left and right, and is driven by an up and down moving unit to move up and down. The micro-point measuring device according to claim 1, wherein the accommodating space of the carrier is communicated with a through hole on the right wall surface of the carrier, and the clip seat protrudes from the through hole of the carrier. The micro-pointing device as claimed in claim 2, wherein the front-to-back moving unit comprises a screw screwed to the left wall of the carrier, a first runner is provided on the left side of the screw rod, and a right side of the screw rod is connected to the clamp base connected, and rotating the first wheel can drive the clamping base to move back and forth. The micro-pointing device according to claim 2, wherein a wall hole is provided on the front side of the carrier, the left and right moving parts have a first end and a second end in different directions, and the first end is The first end and the second end are at 90° to each other, the first end is in the same direction as the length of the carrier and is pivotally connected to a second wheel, and a screw in the center of the second wheel passes through the left and right moving parts , The wall hole is connected with the clamping seat, the second end of the left and right moving parts is inserted into the wall hole and screwed together with the clamping seat, and rotating the second wheel can drive the clamping seat to move left and right. The micro-pointing device according to claim 2, wherein the conductive support has a lateral connecting end and a straight clamping end, the connecting end is clamped by a clamping groove with an upward opening of the clamping base, the The clamping end is clamped to a probe, the probe has a transverse combination end and the conductive support The clamping end of the frame is connected to an action end, the combined end and the action end form an included angle with each other, and the included angle is greater than 90°. The micro-point measuring device as claimed in claim 2, wherein a convex belly with a hollow interior is provided above the right wall of the carrier, the up-down moving unit includes a gear assembled on the convex belly, and the rear of the clip is connected to the belly A plate body, the gear set is provided with an adjusting screw, and rotating the adjusting screw can drive the gear set to drive the plate body to move up and down. The micro-pointing device as claimed in claim 6, wherein a rear wall of the carrier is provided with a through slot to expose the board, and an elastic adjustment unit and a screw, the screw passing through the through slot and connecting the A plate body, the elastic adjustment unit is provided with an elastic member that can be stretched axially, one end of the elastic member is hooked on the rear wall of the carrier, the other end of the elastic member is connected with the screw, and the screw is rotated The front and rear positions of the board body on the carrier can be fine-tuned.

Images