TWM613230U - Double-sided and multilayer fpc substrate - Google Patents

Double-sided and multilayer fpc substrate Download PDF

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TWM613230U
TWM613230U TW110201921U TW110201921U TWM613230U TW M613230 U TWM613230 U TW M613230U TW 110201921 U TW110201921 U TW 110201921U TW 110201921 U TW110201921 U TW 110201921U TW M613230 U TWM613230 U TW M613230U
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substrate
sputtering
hole
sided
double
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蔡水河
陳正能
王允男
趙之遠
呂學聰
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大陸商常州欣盛半導體技術股份有限公司
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Abstract

本新型關於基板加工技術領域,尤其關於一種雙面及多層FPC用基板,包括:基材,基材上開設有複數沿厚度方向貫穿的斜孔;濺射層,濺射層附著在基材和斜孔的表面;導電部,導電部設于斜孔內,並與濺射層相連;複數線路銅層,複數線路銅層位於基材的上下表面,並與濺射層相連,複數線路銅層之間通過導電部相連。本新型能夠降低生產成本,降低鑽孔難度、方便孔內表面濺射並使得濺射離子濺射在孔內表面,避免濺射到對向的滾輪The present invention relates to the technical field of substrate processing, in particular to a double-sided and multi-layer FPC substrate, including: a substrate, the substrate is provided with a plurality of oblique holes penetrating in the thickness direction; a sputtering layer, the sputtering layer is attached to the substrate and The surface of the oblique hole; the conductive part, the conductive part is arranged in the oblique hole, and is connected to the sputtering layer; the plural circuit copper layer, the plural circuit copper layer is located on the upper and lower surfaces of the substrate, and is connected to the sputtering layer, the plural circuit copper layer They are connected by conductive parts. The new type can reduce the production cost, reduce the difficulty of drilling, facilitate the sputtering of the inner surface of the hole, and make the sputtering ion sputter on the inner surface of the hole, avoiding sputtering to the opposite roller

Description

雙面及多層FPC用基板Substrate for double-sided and multilayer FPC

本新型關於基板加工技術領域,尤其關於一種雙面及多層FPC用基板。The present invention relates to the technical field of substrate processing, in particular to a double-sided and multilayer FPC substrate.

FPC:柔性電路板是以聚醯亞胺或聚酯薄膜為基材製成的一種具有高度可靠性,絕佳的可撓性印刷電路板。簡稱軟板或FPC,具有配線密度高、重量輕、厚度薄的特點。FPC: Flexible circuit board is a highly reliable and excellent flexible printed circuit board made of polyimide or polyester film as the base material. Referred to as soft board or FPC, it has the characteristics of high wiring density, light weight and thin thickness.

COF:(Chip On Flex, or, Chip On Film,常稱覆晶薄膜),將驅動IC固定於柔性線路板上晶粒軟膜構裝技術,是運用軟質承載板作封裝晶片載體將晶片與軟性基板電路接合的技術,COF是FPC中精度要求較高的一種。COF: (Chip On Flex, or, Chip On Film, often referred to as flip-chip film), is the technology of fixing the driver IC on the flexible circuit board and the die soft film packaging technology, which uses a flexible carrier board as a package chip carrier to connect the chip and the flexible substrate The technology of circuit joining, COF is a kind of FPC that requires higher precision.

傳統方式製作雙面及多層FPC通過以下兩種方式: 1、半增層法,依次通過鑽導電用通孔、孔清潔、黑影、壓膜、曝光、投影、電鍍銅、剝膜、除底銅/除Tiecoat和線路檢測步驟。 2、蝕刻法,依次通過鑽導電用通孔、孔清潔、黑影、電鍍銅、壓膜前處理、壓膜、曝光、投影/蝕刻/剝膜和線路檢測步驟。 The traditional way to make double-sided and multi-layer FPC through the following two ways: 1. The semi-build-up method involves the steps of drilling conductive vias, hole cleaning, shadowing, film pressing, exposure, projection, copper electroplating, film stripping, copper removal/Tiecoat removal and circuit inspection steps in sequence. 2. The etching method is followed by the steps of drilling conductive vias, hole cleaning, shadowing, copper electroplating, pre-treatment of lamination, lamination, exposure, projection/etching/stripping and line inspection steps.

習知技術都是透過過購買FPC基材覆銅箔進行鑽垂直型導電用通孔,一方面,購買FPC基材覆銅箔相較於絕緣膜基材成本高,另一方面,由於FPC基材覆銅箔表面覆蓋有銅層的原因,鑽孔鐳射能量要求高很多,且鑽孔效率低,容易過熱產生FPC基材覆銅箔形變,造成誤差過大;The conventional technology is to drill vertical conductive through holes by purchasing FPC base copper clad foil. On the one hand, the cost of purchasing FPC base copper clad foil is higher than that of insulating film base material. On the other hand, due to FPC base The reason why the surface of the copper-clad copper foil is covered with a copper layer is that the drilling laser energy requirement is much higher, and the drilling efficiency is low, and it is easy to overheat and cause the FPC substrate copper-clad foil to deform, resulting in excessive errors;

此外,若以絕緣膜基材鑽孔為垂直孔,當垂直孔進行濺射時,垂直孔內表面很難完全披覆濺射層,並且垂直孔在濺射時,濺射離子會通過垂直孔濺射到對向的滾輪上,造成滾輪黏連,而且,濺射離子不斷黏連堆積脫落後會形成粉塵污染。In addition, if the insulating film substrate is drilled as a vertical hole, when the vertical hole is sputtered, it is difficult to completely cover the sputtering layer on the inner surface of the vertical hole, and when the vertical hole is sputtered, sputtering ions will pass through the vertical hole Sputtering on the opposing roller causes adhesion of the rollers, and the sputtering ions continue to adhere and accumulate and fall off to form dust pollution.

本新型要解決的技術問題系為:解決現有技術中購買FPC基材覆銅箔進行鑽孔,成本高且鑽孔難度大以及現有技術中鑽垂直孔,孔內難以完全披覆濺射層的問題以及垂直孔濺射離子濺射到對向滾輪造成滾輪的黏連的技術問題。本新型提供一種雙面及多層FPC用基板的加工方法,能夠降低生產成本,降低鑽孔難度、方便孔內表面濺射並使得濺射離子濺射在孔內表面,避免濺射到對向的滾輪內。The technical problem to be solved by the new model is: to solve the problem of purchasing FPC substrate copper clad foil for drilling in the prior art, which is costly and difficult to drill, and in the prior art to drill vertical holes, it is difficult to completely cover the sputtering layer in the hole. The problem and the technical problem of the sticking of the roller caused by the vertical hole sputtering ion sputtering to the opposite roller. This model provides a method for processing double-sided and multilayer FPC substrates, which can reduce production costs, reduce drilling difficulty, facilitate the sputtering of the inner surface of the hole, and make sputtering ions sputter on the inner surface of the hole, avoiding sputtering to the opposite Inside the wheel.

本新型解決其技術問題所採用的技術方案是:一種雙面及多層FPC用基板,其中,包括: 基材,該基材上開設有複數沿厚度方向貫穿的斜孔; 濺射層,該濺射層附著在該基材和斜孔的表面; 導電部,該導電部設於該斜孔內,並與該濺射層相連; 複數線路銅層,複數線路銅層位於該基材的上下表面,並與該濺射層相連,複數線路銅層之間通過該導電部相連。 The technical solution adopted by the new model to solve its technical problems is: a double-sided and multilayer FPC substrate, which includes: A substrate, the substrate is provided with a plurality of oblique holes penetrating in the thickness direction; Sputtering layer, the sputtering layer is attached to the surface of the substrate and the oblique hole; A conductive part, the conductive part is arranged in the oblique hole and connected with the sputtering layer; A plurality of circuit copper layers, a plurality of circuit copper layers are located on the upper and lower surfaces of the substrate, and are connected with the sputtering layer, and the plurality of circuit copper layers are connected through the conductive part.

所述雙面及多層FPC用基板,其中,該斜孔為圓柱形斜孔。In the double-sided and multilayer FPC substrate, the oblique hole is a cylindrical oblique hole.

所述雙面及多層FPC用基板,其中,該斜孔的上開口的正投影與該斜孔的下開口的正投影無交集,且該上開口的正投影與該下開口的正投影之間的直線距離不大於該上開口正投影的最長弦。The double-sided and multilayer FPC substrate, wherein the orthographic projection of the upper opening of the oblique hole and the orthographic projection of the lower opening of the oblique hole have no intersection, and the orthographic projection of the upper opening and the orthographic projection of the lower opening are between The straight line distance of is not greater than the longest chord of the orthographic projection of the upper opening.

所述雙面及多層FPC用基板,其中,該斜孔的上開口的正投影與該斜孔的下開口的正投影無交集,當濺射離子垂直濺射時,濺射離子無法從上下開口直接穿出,進一步避免了濺射離子穿出孔內濺射到對向的滾輪上的技術問題,且該上開口的正投影與該下開口的正投影之間的直線距離不大於該上開口正投影的最長弦,當該上開口的正投影與該下開口的正投影之間的直線距離大於該上開口正投影的最長弦時,濺射離子濺射到斜孔內壁上的有效面積減少無法保證在後續的電鍍環節使得斜孔內導通。In the double-sided and multilayer FPC substrate, the orthographic projection of the upper opening of the oblique hole and the orthographic projection of the lower opening of the oblique hole have no intersection. When the sputtering ions are sputtered vertically, the sputtering ions cannot be opened from the upper and lower sides. Directly pass through, further avoiding the technical problem of sputtering ions from passing through the hole and sputtering on the opposite roller, and the linear distance between the orthographic projection of the upper opening and the orthographic projection of the lower opening is not greater than the upper opening The longest chord of the orthographic projection, when the linear distance between the orthographic projection of the upper opening and the orthographic projection of the lower opening is greater than the longest chord of the orthographic projection of the upper opening, the effective area of sputtering ions on the inner wall of the oblique hole There is no guarantee that the slanted hole will be connected in the subsequent electroplating process.

所述雙面及多層FPC用基板,其中,該斜孔的上開口的正投影邊緣與所述斜孔的下開口的正投影邊緣相切。當斜孔的上開口的正投影邊緣與該斜孔的下開口的正投影邊緣相切時,濺射離子無法從斜孔內濺射到對向的滾輪上的同時,保證從上開口濺射的濺射離子正好能夠在完全濺射斜孔一側內表面,進一步提高孔內濺射分佈效果。In the double-sided and multilayer FPC substrate, the orthographic projection edge of the upper opening of the oblique hole is tangent to the orthographic projection edge of the lower opening of the oblique hole. When the orthographic edge of the upper opening of the oblique hole is tangent to the orthographic edge of the lower opening of the oblique hole, sputtering ions cannot be sputtered from the oblique hole to the opposing roller, while ensuring sputtering from the upper opening The sputtering ions can completely sputter the inner surface of one side of the oblique hole, further improving the effect of sputtering distribution in the hole.

所述雙面及多層FPC用基板,其中,該基材為PI膜,PI膜具有優良的耐高低溫性、電氣絕緣性、黏結性、耐輻射性、耐介質性。In the double-sided and multilayer FPC substrate, the substrate is a PI film, and the PI film has excellent high and low temperature resistance, electrical insulation, adhesion, radiation resistance, and dielectric resistance.

根據上述任意一種雙面及多層FPC用基板的加工方法,其中,包括以下步驟: S1、在基材表面成型出沿其厚度方向貫穿的斜孔; S2、對該斜孔進行清潔; S3、在該斜孔的內表面和該基材的雙面濺射出濺射層; S4、對該基材和斜孔進行電鍍增厚處理,使該斜孔內形成導電部,並使該基材表面覆蓋複數線路銅層,複數線路銅層之間通過導電部導通。 According to any one of the above-mentioned methods for processing double-sided and multilayer FPC substrates, the method includes the following steps: S1. An oblique hole is formed on the surface of the substrate to penetrate along its thickness direction; S2, clean the oblique hole; S3. Sputtering a sputtering layer on the inner surface of the oblique hole and both sides of the substrate; S4. Perform electroplating and thickening treatment on the substrate and the oblique hole to form a conductive part in the oblique hole, and cover the surface of the substrate with a plurality of circuit copper layers, and the plurality of circuit copper layers are connected through the conductive part.

所述雙面及多層FPC用基板的加工方法,其中,本新型的雙面及多層FPC用基板的加工方法,通過在基材的沿其厚度方向開設斜孔,由於基材上並沒有銅箔銅層,購買成本低,方便進行鑽孔,避免帶有銅箔銅層的導致鐳射能量要求高,且鑽孔效率低,容易過熱產生基材形變,造成誤差過大的技術問題,在對斜孔清潔後對斜孔的內表面和基材進行雙面濺射,由於開設的為斜孔,在進行濺射時,斜孔內表面為傾斜狀態,在濺射時濺射離子更容易濺射到斜孔的內表面,濺射離子更容易附著在基材的表面,並且斜孔內表面為傾斜狀態時,濺射離子不容易直接穿過孔內濺射到對向的滾輪上。In the method for processing the double-sided and multilayer FPC substrate, the method for processing the double-sided and multilayer FPC substrate of the present invention is to open oblique holes in the substrate along the thickness direction, because there is no copper foil on the substrate. Copper layer, the purchase cost is low, it is convenient for drilling, avoiding the high laser energy requirement caused by the copper foil copper layer, and the drilling efficiency is low, and it is easy to overheat and cause the deformation of the substrate, which causes the technical problem of excessive error. After cleaning, perform double-sided sputtering on the inner surface of the oblique hole and the substrate. Since the oblique hole is opened, the inner surface of the oblique hole is inclined during sputtering, and the sputtering ions are more likely to be sputtered during sputtering. On the inner surface of the oblique hole, sputtering ions are more likely to adhere to the surface of the substrate, and when the inner surface of the oblique hole is inclined, it is not easy for the sputtering ions to directly pass through the hole and sputter onto the opposite roller.

所述雙面及多層FPC用基板的加工方法,其中,為了實現金屬濺射離子在定位孔內壁分佈的均勻一致,在步驟S3中,該斜孔的一部分內壁和該基材的一面同時濺射出一部分濺射層,該斜孔的另一部分內壁和該基材的另一面同時濺射出另一部分濺射層。In the method for processing the double-sided and multilayer FPC substrate, in order to achieve uniform distribution of metal sputtering ions on the inner wall of the positioning hole, in step S3, a part of the inner wall of the oblique hole and one side of the substrate are simultaneously A part of the sputtering layer is sputtered, and another part of the inner wall of the oblique hole and the other surface of the substrate are sputtered at the same time.

所述雙面及多層FPC用基板的加工方法,其中,為了實現電鍍層均勻一致,在步驟S4中,該斜孔內壁和該基材雙面同時進行電鍍處理。In the method for processing the double-sided and multilayer FPC substrate, in order to achieve uniform plating layer, in step S4, the inner wall of the oblique hole and both sides of the base material are simultaneously electroplated.

所述雙面及多層FPC用基板的加工方法,其中,在步驟S2中,通過Plasma或Desmear對該斜孔進行清潔。In the method for processing the double-sided and multilayer FPC substrate, in step S2, the oblique hole is cleaned by Plasma or Desmear.

所述雙面及多層FPC用基板的加工方法,其中,在步驟S1中,該斜孔通過激光束成型。In the method for processing a double-sided and multilayer FPC substrate, in step S1, the oblique hole is formed by a laser beam.

本新型的雙面及多層FPC用基板及其加工方法,有益效果如下: 1. 基材沒金屬層,成本低廉且能夠使得鐳射鑽孔能量低,鑽孔速度效率高,熱量少基材變形量小,精度相對提高。 2. 採用斜孔進行濺射,孔內濺射分佈效果好並且能夠避免濺射離子穿出斜孔內濺射到對向的滾輪,造成滾輪黏連以及避免不斷黏連至脫落形成的粉塵污染。 The new type double-sided and multilayer FPC substrate and its processing method have the following beneficial effects: 1. The base material has no metal layer, the cost is low, and the laser drilling energy is low, the drilling speed is high, the heat is small, the deformation of the base material is small, and the accuracy is relatively improved. 2. Using oblique holes for sputtering, the effect of sputtering distribution in the holes is good and it can prevent sputtering ions from passing through the oblique holes and sputtering to the opposite roller, causing roller adhesion and avoiding dust pollution caused by continuous adhesion to falling off .

現在結合圖式對本新型作進一步詳細的說明。這些圖式均為簡化的示意圖,僅以示意方式說明本新型的基本結構,因此其僅顯示與本新型有關的構成。The present invention will now be described in further detail in conjunction with the drawings. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the constitutions related to the present invention.

如圖1所示,是本新型的第一實施例,一種雙面及多層FPC用基板,包括: 基材10,基材10上開設有複數沿厚度方向貫穿的斜孔11;斜孔11為圓柱形斜孔,斜孔11的上開口12的正投影與斜孔11的下開口13的正投影無交集,且上開口12的正投影與下開口13的正投影之間的直線距離不大於上開口12正投影的最長弦,基材10為PI膜。 濺射層1,濺射層1附著在基材10和斜孔11的表面; 導電部,導電部設于斜孔11內,並與濺射層1相連; 複數線路銅層2,複數線路銅層2位於基材10的上下表面,並與濺射層1相連,複數線路銅層2之間通過導電部相連。 As shown in Figure 1, it is the first embodiment of the present invention, a double-sided and multilayer FPC substrate, including: The base material 10 is provided with a plurality of oblique holes 11 penetrating in the thickness direction; the oblique hole 11 is a cylindrical oblique hole, the orthographic projection of the upper opening 12 of the oblique hole 11 and the orthographic projection of the lower opening 13 of the oblique hole 11 There is no intersection, and the linear distance between the orthographic projection of the upper opening 12 and the orthographic projection of the lower opening 13 is not greater than the longest chord of the orthographic projection of the upper opening 12, and the substrate 10 is a PI film. Sputtering layer 1. The sputtering layer 1 is attached to the surface of the substrate 10 and the oblique hole 11; The conductive part is arranged in the oblique hole 11 and connected to the sputtering layer 1; A plurality of circuit copper layers 2 and a plurality of circuit copper layers 2 are located on the upper and lower surfaces of the substrate 10 and are connected to the sputtering layer 1, and the plurality of circuit copper layers 2 are connected by conductive parts.

當斜孔11的上開口12的正投影與斜孔11的下開口13的正投影無交集且上開口12的正投影與下開口13的正投影之間的直線距離不大於上開口12正投影的最長弦時,如圖1和圖3所示,上開口12的正投影的最長弦的長度為L,同樣地,下開口13的最長弦的長度也為L,上開口12的正投影與下開口13的正投影之間的直線距離為d,即0<d≤L,濺射時濺射離子不能完全濺射到斜孔11的內表面,但是在後續的電鍍處理環節,通過電鍍對斜孔11的內表面導電層的基礎上進行填充,能夠使得基材10雙面導電。When the orthographic projection of the upper opening 12 of the oblique hole 11 and the orthographic projection of the lower opening 13 of the oblique hole 11 have no intersection, and the linear distance between the orthographic projection of the upper opening 12 and the orthographic projection of the lower opening 13 is not greater than the orthographic projection of the upper opening 12 As shown in Figures 1 and 3, the length of the longest chord of the orthographic projection of the upper opening 12 is L. Similarly, the length of the longest chord of the lower opening 13 is also L, and the orthographic projection of the upper opening 12 is L The linear distance between the orthographic projections of the lower opening 13 is d, that is, 0<d≤L. Sputtering ions cannot be completely sputtered to the inner surface of the oblique hole 11 during sputtering, but in the subsequent electroplating process, the electroplating Filling the conductive layer on the inner surface of the oblique hole 11 can make the substrate 10 conductive on both sides.

第一實施例的有益效果如下: 本申請的雙面及多層FPC用基板,通過在基材10的沿其厚度方向開設斜孔11,由於基材上並沒有銅箔銅層,購買成本低,方便進行鑽孔,避免帶有銅箔銅層的導致鐳射能量要求高,且鑽孔效率低,容易過熱產生基材形變,造成誤差過大的技術問題,在對斜孔清潔後對斜孔的內表面和基材進行雙面濺射,由於開設的為斜孔,在進行濺射時,斜孔內表面為傾斜狀態,在濺射時濺射離子更容易濺射到斜孔的內表面,濺射離子更容易附著在基材的表面,並且斜孔內表面為傾斜狀態時,濺射離子不容易直接穿過孔內濺射到對向的滾輪上。 The beneficial effects of the first embodiment are as follows: In the double-sided and multi-layer FPC substrate of the present application, oblique holes 11 are formed in the substrate 10 along the thickness direction. Since there is no copper foil copper layer on the substrate, the purchase cost is low, and it is convenient to drill and avoid copper. The copper foil layer requires high laser energy, and the drilling efficiency is low, and it is easy to overheat and cause the deformation of the substrate, which causes the technical problem of excessive error. After the inclined hole is cleaned, the inner surface of the inclined hole and the substrate are double-sided sputtering , Because the inclined hole is opened, the inner surface of the inclined hole is inclined during sputtering. During sputtering, the sputtered ions are more likely to be sputtered to the inner surface of the inclined hole, and the sputtered ions are more likely to adhere to the substrate. When the inner surface of the oblique hole is inclined, it is not easy for sputtering ions to directly pass through the hole and sputter onto the opposite roller.

如圖2所示,是本新型的第二實施例,一種雙面及多層FPC用基板,與第一實施例的區別在於:斜孔11的上開口12的正投影邊緣與斜孔11的下開口13的正投影邊緣相切。As shown in Figure 2, it is the second embodiment of the present invention, a double-sided and multi-layer FPC substrate. The difference from the first embodiment is: the orthographic edge of the upper opening 12 of the inclined hole 11 and the bottom of the inclined hole 11 The orthographic projection edge of the opening 13 is tangent.

第二實施例的有益效果如下: 當斜孔11的上開口12的正投影邊緣與斜孔11的下開口13的正投影邊緣相切時,濺射離子無法從斜孔內濺射到對向的滾輪上的同時,保證從上開口12濺射的濺射離子正好能夠完全濺射在斜孔一側內表面,進一步提高孔內濺射分佈效果。 The beneficial effects of the second embodiment are as follows: When the orthographic edge of the upper opening 12 of the oblique hole 11 is tangent to the orthographic edge of the lower opening 13 of the oblique hole 11, the sputtering ions cannot be sputtered from the oblique hole to the opposing roller while ensuring the The sputtering ions sputtered by the opening 12 can be completely sputtered on the inner surface of one side of the oblique hole, which further improves the sputtering distribution effect in the hole.

根據上述兩個實施例中的雙面及多層FPC用基板的加工方法,包括以下步驟: S1、在基材10表面成型出沿其厚度方向貫穿的斜孔11;斜孔11通過雷射光束成型。 S2、對斜孔11進行清潔;在步驟S2中,通過Plasma或Desmear對斜孔11進行清潔。 S3、在斜孔11的內表面和基材10的雙面濺射出導電層;在步驟S3中,斜孔11的一部分內壁和基材10的一面同時濺射出導電層,斜孔11的另一部分內壁和基材10的另一面同時濺射出導電層。 S4、對基材10進行電鍍增厚處理,使得基材10表面覆蓋線路銅層並實現雙面導通。在步驟S4中,斜孔11內壁和基材10雙面同時進行電鍍處理。 According to the method for processing a double-sided and multilayer FPC substrate in the above two embodiments, the method includes the following steps: S1. An oblique hole 11 penetrating in the thickness direction is formed on the surface of the substrate 10; the oblique hole 11 is formed by a laser beam. S2, clean the oblique hole 11; in step S2, clean the oblique hole 11 by Plasma or Desmear. S3, a conductive layer is sputtered on the inner surface of the oblique hole 11 and both sides of the substrate 10; in step S3, a conductive layer is sputtered on a part of the inner wall of the oblique hole 11 and one side of the substrate 10 at the same time, and the other side of the oblique hole 11 A conductive layer is sputtered on a part of the inner wall and the other surface of the substrate 10 at the same time. S4. Perform electroplating and thickening treatment on the substrate 10, so that the surface of the substrate 10 is covered with the circuit copper layer and double-sided conduction is realized. In step S4, the inner wall of the oblique hole 11 and both sides of the substrate 10 are simultaneously electroplated.

總而言之,根據本新型的雙面及多層FPC用基板及其加工方法,由於基材10沒金屬層,成本低廉且能夠使得鐳射鑽孔能量低,鑽孔速度效率高,熱量少基材變形量小,精度相對提高,另外,採用斜孔11進行濺射,濺射效果好並且能夠避免濺射離子穿出斜孔內濺射到對向的滾輪,造成滾輪黏連,以及避免不斷黏連至脫落形成的粉塵污染。In a word, according to the double-sided and multilayer FPC substrate and its processing method of the present invention, since the base material 10 has no metal layer, the cost is low and the laser drilling energy is low, the drilling speed is high, and the amount of heat is small. , The accuracy is relatively improved. In addition, the use of the inclined hole 11 for sputtering has a good sputtering effect and can prevent sputtering ions from passing through the inclined hole and sputtering to the opposite roller, causing the roller to stick, and avoid continuous sticking to falling off Dust pollution formed.

以上述依據本新型的理想實施例為啟示,通過上述的說明內容,相關領域普通知識者完全可以在不偏離本項新型技術思想的範圍內,進行多樣的變更以及修改。本項新型的技術性範圍並不局限於說明書上的內容,必須要根據請求項來確定其技術性範圍。Taking the above-mentioned ideal embodiment according to the present invention as inspiration, and through the above-mentioned description, persons with ordinary knowledge in related fields can make various changes and modifications without departing from the scope of the technical idea of the present invention. The technical scope of this new model is not limited to the content in the specification, and its technical scope must be determined according to the requirements.

1:濺射層 2:線路銅線 10:基材 11:斜孔 12:上開口 13:下開口 1: Sputtering layer 2: Line copper wire 10: Substrate 11: oblique hole 12: Upper opening 13: Lower opening

圖1系本新型之雙面及多層FPC用基板的第一實施例示意圖;Fig. 1 is a schematic diagram of the first embodiment of the double-sided and multilayer FPC substrate of the present invention;

圖2系本新型之雙面及多層FPC用基板的第二實施例示意圖;Figure 2 is a schematic diagram of a second embodiment of the double-sided and multilayer FPC substrate of the present invention;

圖3系本新型之雙面及多層FPC用基板的加工方法的斜孔的上開口和下開口正投影示意圖;Fig. 3 is a schematic view of the orthographic projection of the upper opening and the lower opening of the oblique hole in the method for processing the double-sided and multilayer FPC substrate of the present invention;

圖4系本新型之雙面及多層FPC用基板的截面結構示意圖。Fig. 4 is a schematic diagram of the cross-sectional structure of the double-sided and multilayer FPC substrate of the present invention.

10:基材 10: Substrate

11:斜孔 11: oblique hole

12:上開口 12: Upper opening

13:下開口 13: Lower opening

Claims (5)

一種雙面及多層FPC用基板,其中,包括:一基材,該基材上開設有複數沿厚度方向貫穿知一斜孔;一濺射層,該濺射層附著在該基材和該斜孔之表面;一導電部,該導電部設於該斜孔內,並與該濺射層相連;複數線路銅層,該些線路銅層位於該基材的上下表面,並與該濺射層相連,該些線路銅層之間通過所述導電部相連。 A double-sided and multilayer FPC substrate, which includes: a substrate with a plurality of oblique holes penetrating in the thickness direction; a sputtering layer, the sputtering layer attached to the substrate and the oblique hole The surface of the hole; a conductive part arranged in the oblique hole and connected with the sputtering layer; a plurality of circuit copper layers, the circuit copper layers are located on the upper and lower surfaces of the substrate, and are connected to the sputtering layer Connected, the copper layers of these circuits are connected through the conductive portion. 如請求項1所述之雙面及多層FPC用基板,其中,該斜孔為圓柱形斜孔。 The double-sided and multilayer FPC substrate according to claim 1, wherein the oblique hole is a cylindrical oblique hole. 如請求項2所述之雙面及多層FPC用基板,其中,該斜孔之一上開口的正投影與該斜孔之一下開口之正投影無交集,且該上開口的正投影與該下開口的正投影之間之直線距離不大於該上開口正投影的最長弦。 The double-sided and multilayer FPC substrate according to claim 2, wherein the orthographic projection of the upper opening of one of the oblique holes and the orthographic projection of the lower opening of the oblique hole have no intersection, and the orthographic projection of the upper opening is the same as that of the lower opening. The straight line distance between the orthographic projections of the openings is not greater than the longest chord of the orthographic projections of the upper openings. 如請求項3所述之雙面及多層FPC用基板,其中,該斜孔之該上開口之正投影邊緣與該斜孔之該下開口的正投影邊緣相切。 The double-sided and multilayer FPC substrate according to claim 3, wherein the orthographic projection edge of the upper opening of the oblique hole is tangent to the orthographic projection edge of the lower opening of the oblique hole. 如請求項1所述之雙面及多層FPC用基板,其中,該基材為PI膜。 The double-sided and multilayer FPC substrate according to claim 1, wherein the substrate is a PI film.
TW110201921U 2021-02-22 2021-02-22 Double-sided and multilayer fpc substrate TWM613230U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI764583B (en) * 2021-02-22 2022-05-11 大陸商常州欣盛半導體技術股份有限公司 Double-sided and multilayer fpc substrate and processing method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI764583B (en) * 2021-02-22 2022-05-11 大陸商常州欣盛半導體技術股份有限公司 Double-sided and multilayer fpc substrate and processing method thereof

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