TWM610098U - Structure of metal foil - Google Patents
Structure of metal foil Download PDFInfo
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- TWM610098U TWM610098U TW110200234U TW110200234U TWM610098U TW M610098 U TWM610098 U TW M610098U TW 110200234 U TW110200234 U TW 110200234U TW 110200234 U TW110200234 U TW 110200234U TW M610098 U TWM610098 U TW M610098U
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Abstract
本創作之金屬箔結構,由下而上依序為載體層、剝離層及箔層,其中載體層為具有厚度的耐熱載體,箔層為導線性良好的金屬箔,而剝離層為鉻濃度介於5原子百分比至30原子百分比的鉻合金;本創作之金屬箔結構,其係以濺鍍製程進行製造,而實現無廢水製程的技術功效,且本創作之製造方法所殘餘之鎳鉻合金,還可以再回收利用。The metal foil structure of this creation is a carrier layer, a peeling layer, and a foil layer in order from bottom to top. The carrier layer is a heat-resistant carrier with a thickness, the foil layer is a metal foil with good conductive properties, and the peeling layer is a chromium concentration medium. In the chromium alloy of 5 atomic percent to 30 atomic percent; the metal foil structure of this creation is manufactured by a sputtering process to achieve the technical effect of the waste-free process, and the nickel-chromium alloy remaining in the manufacturing method of this creation, It can also be recycled.
Description
本創作屬於印刷電路板領域,尤其是一種附有超薄金屬的可分離金屬箔結構。This creation belongs to the field of printed circuit boards, especially a detachable metal foil structure with ultra-thin metal attached.
近年,隨著行動裝置的蓬勃發展,消費者對於行動裝置所應具備的運算速度及功能也愈趨繁多,促使行動裝置製造業者增加電路設計的密度,以提升電子零組件每單位面積的效率,驅使電路板縮減其線寬。In recent years, with the vigorous development of mobile devices, consumers have more and more computing speeds and functions for mobile devices, prompting mobile device manufacturers to increase the density of circuit design to improve the efficiency of electronic components per unit area. Drive the circuit board to reduce its line width.
為符合現代對細窄線寬的需求,電路板上的金屬箔愈趨輕薄,然而在電路板製的熱滾壓製程時,愈輕薄的金屬箔,卻愈易有斷裂之情況,導致製造良率的大幅下滑。In order to meet the modern demand for narrow line widths, the metal foils on circuit boards are becoming thinner and lighter. However, during the hot rolling process of circuit boards, the thinner and lighter the metal foil is, the more likely it is to break, resulting in good manufacturing. The rate has fallen sharply.
為解決上述問題,先前技術提出在金屬箔之一側,貼附載體層之技術手段,藉由較厚的載體層,增加金屬箔的機械性質,而避免金屬箔在熱滾壓製程時產生斷裂,並在金屬箔與PCB板的樹脂緊密貼合後,再將附載體層與金屬箔分離。In order to solve the above-mentioned problems, the prior art proposes a technical means of attaching a carrier layer to one side of the metal foil. With a thicker carrier layer, the mechanical properties of the metal foil are increased, and the metal foil is prevented from breaking during the hot rolling process. , And after the metal foil is closely attached to the resin of the PCB board, the carrier layer is separated from the metal foil.
為達成上述先前技術之目的,在金屬箔與附載體層之間,必須存在一層剝離層,而該剝離層係以化學濕製程,將鉻金屬成長在附載體層之上而形成。In order to achieve the above-mentioned purpose of the prior art, a peeling layer must exist between the metal foil and the carrier-attached layer, and the peeling layer is formed by growing chromium metal on the carrier-attached layer by a chemical wet process.
然而,在成長鉻金屬的過程中,會排放大量的鉻金屬廢液,且鉻金屬廢液中的鉻金屬難以回收,而造成環境的汙染與資源的浪費。However, in the process of growing chromium metal, a large amount of chromium metal waste liquid is discharged, and the chromium metal in the chromium metal waste liquid is difficult to recover, which causes environmental pollution and waste of resources.
本案創作人鑑於上述先前技術所衍生的各項缺點,乃亟思加以改良創新,並經多年苦心孤詣潛心研究後,終於成功研發完成本創作之金屬箔結構。In view of the various shortcomings derived from the above-mentioned prior art, the creator of this case is eager to improve and innovate, and after years of painstaking research, finally successfully developed and completed the metal foil structure of this creation.
為解決上述先前技術之問題,本創作提供一金屬箔結構,其目的在於: 1. 減少鉻金屬在可剝離剝離層之含量; 2. 解決先前技術排放含鉻廢水之問題; 3. 增加鉻金屬的可回收性。 In order to solve the aforementioned problems of the prior art, this creation provides a metal foil structure, the purpose of which is to: 1. Reduce the content of chromium metal in the peelable layer; 2. Solve the problem of chromium-containing wastewater discharged by the previous technology; 3. Increase the recyclability of chromium metal.
本創作之金屬箔結構包含:載體層、剝離層及箔層,且剝離層夾在載體層與箔層之間,其中剝離層係由鉻濃度為5原子百分比(at.%)至30原子百分比的鉻合金所組成,且具有導電性。The metal foil structure of this creation includes: a carrier layer, a peeling layer and a foil layer, and the peeling layer is sandwiched between the carrier layer and the foil layer. The peeling layer is composed of a chromium concentration of 5 atomic percent (at.%) to 30 atomic percent It is composed of chromium alloy and has conductivity.
其中,剝離層之一側與箔層相連,而剝離層之另一側則與載體層相連。Among them, one side of the peeling layer is connected to the foil layer, and the other side of the peeling layer is connected to the carrier layer.
其中,剝離層的厚度為200-800nm。Among them, the thickness of the peeling layer is 200-800 nm.
較佳地,剝離層的厚度為300-600nm。Preferably, the thickness of the peeling layer is 300-600 nm.
其中,載體層為鋁箔、銅箔、鐵箔的其中之一或二者以上之組合。Wherein, the carrier layer is one of aluminum foil, copper foil, and iron foil or a combination of two or more of them.
較佳地,載體層為鋁銅箔。Preferably, the carrier layer is aluminum copper foil.
其中,鉻合金可以為鎳鉻合金、鋁鉻合金、鐵鉻合金及銀鉻合金的其中之一或二者以上之組合。Wherein, the chromium alloy may be one or a combination of nickel-chromium alloy, aluminum-chromium alloy, iron-chromium alloy, and silver-chromium alloy.
其中,當鉻合金為鎳鉻合金時,鎳鉻合金的含鎳濃度為70原子百分比至95原子百分比。Wherein, when the chromium alloy is a nickel-chromium alloy, the concentration of nickel in the nickel-chromium alloy is 70 atomic percent to 95 atomic percent.
較佳地,鉻合金為鎳鉻合金,且含鉻濃度為5原子百分比至20原子百分比,鉻合金的含鎳濃度為80原子百分比至95原子百分比。Preferably, the chromium alloy is a nickel-chromium alloy, and the chromium-containing concentration is 5 atomic percent to 20 atomic percent, and the chromium alloy has a nickel-containing concentration of 80 atomic percent to 95 atomic percent.
其中,箔層為金箔、銀箔、銅箔、鐵箔等金屬箔,其電阻率低於10 −7(Ω∙m)的金屬。 Among them, the foil layer is a metal foil such as gold foil, silver foil, copper foil, iron foil, etc., with a metal whose resistivity is lower than 10 −7 (Ω∙m).
較佳地,箔層為銅箔。Preferably, the foil layer is copper foil.
為利 貴審查委員了解本創作之技術特徵、內容與優點及其所能達到之功效,茲將本創作配合附圖,並以實施例之表達形式詳細說明如下,而其中所使用之圖式,其主旨僅為示意及輔助說明書之用,未必為本創作實施後之真實比例與精準配置,故不應就所附之圖式的比例與配置關係解讀、侷限本創作於實際實施上的權利範圍,合先敘明。In order to help the reviewers understand the technical features, content and advantages of this creation and its achievable effects, the creation is accompanied by drawings and detailed descriptions of the embodiments are as follows. The diagrams used therein are as follows: The subject matter is only for illustrative and auxiliary manual purposes, and may not be the true proportions and precise configuration after the implementation of the creation. Therefore, the scale and configuration relationship of the attached drawings should not be interpreted or limited to the scope of rights of the creation in actual implementation. Hexian stated.
請參閱圖1,其係為本創作之金屬箔結構的示意圖。本創作之金屬箔結構1,由下而上依序為載體層11、剝離層12及箔層13,其中載體層11為具有厚度的耐熱載體,箔層13為具有良好導電性質(電阻率低於10
−7Ω∙m)的金屬箔,剝離層12則為夾在載體層11及箔層13之間,具有適當剝離強度及導電性的剝離薄膜。
Please refer to Figure 1, which is a schematic diagram of the metal foil structure of this creation. The
在本創作之實施例中,載體層11為鋁箔或銅箔,其係用於於承載箔層13,增加使箔層13的韌性,降低箔層13斷裂的機率,以便於電路板製造業以熱滾壓技術,將箔層13貼合於PCB用樹脂基板上。In the embodiment of this creation, the
此外,經過熱滾壓製程的載體層11,還可以被回收再利用其中,載體層11較佳為銅箔,且經過熱滾壓製程的載體層11,載體層11可以被回收再利用。In addition, the
請參閱圖2,其係為本創作之金屬箔結構的製造方法步驟圖。本創作之金屬箔結構的製造方法包含:
S201:提供一載體層11;
S202:將鎳鉻合金靶材,以濺鍍製程,濺鍍於載體層11,而形成剝離層12;
S203:將銅金屬,以電鑄製程,成膜於剝離層12上,而形成箔層13。
Please refer to Figure 2, which is a step diagram of the manufacturing method of the metal foil structure of this creation. The manufacturing method of the metal foil structure of this creation includes:
S201: Provide a
在本創作之實施例中,載體層11的厚度高於15μm。In the embodiment of the present invention, the thickness of the
在本創作之實施例中,箔層13的厚度為0.5μm至5μm。In the embodiment of the present creation, the thickness of the
在本創作之實施例中,當剝離層12為鎳鉻合金,且當鎳與鉻的原子比例為90:10,剝離層12的厚度為600nm時,剝離層12剝離強度測試機測試,其剝離強度為0.15至3 kgf-cm。In the embodiment of the present creation, when the
在本創作之實施例中,當剝離層12為鎳鉻合金,且當鎳與鉻的原子比例為85:15,剝離層12的厚度為400nm時,剝離層12以剝離強度測試機測試,其剝離強度為0.15至3 kgf-cm。In the embodiment of this creation, when the
如上所述,本創作之金屬箔結構,利用微量的鉻金屬,形成輕薄的剝離層12,卻仍可維持其剝離強度介於0.15至3 kgf-cm的特性。As mentioned above, the metal foil structure of the present invention uses a small amount of chromium metal to form a
此外,本創作的剝離層12以濺鍍製程,取代先前技術以化學濕製程形成含鉻剝離層之製造方法,進而解決先前技術必須排放含鉻金屬廢液之問題,且本創作之金屬箔結構製造方法,在完成濺鍍製程後,還可以取下濺鍍腔體內的鉻金屬,而達到回收再利用之目的。In addition, the
綜上所述,本創作減少鉻金屬的使用,且採用無廢液問題之濺鍍製程,並有效地回收鉻金屬及鋁/銅載體層,而達到在環境友善之前提下,製造剝離強維持在0.15至3 kgf-cm之間的金屬箔結構之目的。In summary, this creation reduces the use of chromium metal, and adopts a sputtering process with no waste liquid problem, and effectively recovers chromium metal and aluminum/copper carrier layer, and achieves that it is environmentally friendly and maintains strong peeling. The purpose of the metal foil structure between 0.15 to 3 kgf-cm.
1:金屬箔結構 11:載體層 12:剝離層 13:箔層 S201-S203:步驟 1: Metal foil structure 11: carrier layer 12: peeling layer 13: foil layer S201-S203: steps
圖1為本創作之金屬箔結構的示意圖; 圖2為本創作之金屬箔結構的製造方法步驟圖。 Figure 1 is a schematic diagram of the metal foil structure created; Figure 2 is a step diagram of the manufacturing method of the created metal foil structure.
1:金屬箔結構 1: Metal foil structure
11:載體層 11: carrier layer
12:剝離層 12: peeling layer
13:箔層 13: foil layer
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TWI746345B (en) * | 2021-01-08 | 2021-11-11 | 昂筠國際股份有限公司 | Metal foil structure and manufacturing method thereof |
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TWI746345B (en) * | 2021-01-08 | 2021-11-11 | 昂筠國際股份有限公司 | Metal foil structure and manufacturing method thereof |
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