TWM596970U - Precision alignment lamination device applied to flexible photomask or mold - Google Patents

Abstract

This creation is a precision alignment device for flexible masks or molds, including a fixed base, a modular unit, a template unit, and a backplane unit, the center of the fixed base has a vertical through hole, The perimeter of the through hole is provided with a side ring wall; the module unit is provided on a fixed base with an annular module frame and a module; and the template unit is provided above the module unit, and the template unit and the module There is a closed lower cavity that can be evacuated between the units, and the template unit has a template with controllable deformation; and the back plate unit is located above the template unit, and has a back plate and an upper cavity cover. The deformed material is manufactured and arranged above the template, and the template and the back plate are circumferentially combined, so that the back plate and the template have a closed central cavity that can be evacuated or injected, and the upper cavity cover is arranged above the back plate and It is fixedly connected to the fixed base, and the upper cavity cover and the back plate have a sealed upper cavity that can be evacuated or injected. With this creation, the flexible mask or mold and the substrate can be better and accurately aligned.

Description

Precise positioning and fitting device for flexible mask or mold

This creation relates to a precision alignment bonding device for flexible masks or molds, mainly referring to a structure that can provide better alignment accuracy of flexible masks or molds and substrates.

With the increasing demand for semiconductor accuracy, the module (such as a soft mask or mold) and the substrate must have precise parallelism and relative position to prevent uneven exposure or imprinting depth or position error resulting in defective products.

The conventional imprinting equipment is provided with a positioning mechanism for providing the alignment of the module and the substrate. The alignment mechanism mainly has a CCD camera to move to the position mark of the module and the substrate respectively to obtain the position information of the module and the substrate. The substrate stage or the module stage is fine-tuned to the precise relative position according to the position data corresponding to the imaging.

When the flexible module is aligned, the periphery of the module is placed on the machine frame, the effective bonding area in the center of the module is suspended, and the module is deformed or not Pumping back or applying air pressure to make the CCD camera can take the image or fit the module and the substrate.

However, the application of vacuum or air pressure during the alignment or bonding process of the flexible module is likely to cause a small amount of uncontrollable deformation, and its deformation will cause a decrease in the accuracy of the alignment bonding.

The purpose of this creation is to provide a structure that can improve the better alignment accuracy of the module and the substrate.

This creation includes a fixed base, a module unit, and a template unit. The center of the fixed base has a vertical through hole, and the periphery of the through hole has a side ring wall; and the module unit is provided on the fixed base and has a ring mold Frame, the module frame is set in the through hole of the fixing seat and the module is assembled; and the template unit is set in the through hole of the fixing seat and above the module unit, and the template unit and the module unit are provided with An airtight closed lower cavity, and the template unit has a template that can be controlled to deform compared with the module; and the back plate unit is provided in the through hole of the fixed seat and above the template unit, and has a back plate and an upper cavity Cover, the back plate is made of a non-deformable material and is arranged above the template, and the template and the back plate are circumferentially combined, so that the back plate and the template have a closed central cavity that can be evacuated or injected, and the upper cavity The cover is arranged above the back plate and fixedly connected with the fixing seat. There is a sealed upper cavity between the upper cavity cover and the back plate which can be evacuated or injected.

Further, the top edge of the back plate is provided with a vertically flexible directional element to be engaged with the fixing seat.

In this creation, the flexible module can be vacuum adsorbed and attached to the template during the precise alignment and bonding process, which can avoid the uncontrollable deformation of the module during the alignment or bonding process. The indirect pressure of the board lifts the template and the deformation of the module is controlled. The back plate and vertical flexible directional element that can be lifted by precise air pressure can avoid the difference of the repeating position of the lift, and can improve the positioning and fitting accuracy.

Please refer to Figures 1 and 2. This creation includes a fixed base 1, a modular unit 2, a template unit 3, and a backplane unit 4. The center of the fixed base 1 has a vertical through hole 11, and the through hole 11 has a peripheral edge侧环墙12.

The module unit 2 is set on the fixing base 1 and has an annular module frame 21 and an annular lower cavity cover 22. The module frame 21 is set at the position of the through hole 11 of the fixing base 1 and the module 211 is assembled. The component 211 is a flexible photomask or mold, and the lower cavity cover 22 is disposed below the fixing base 1, and the module frame 21 is disposed above the lower cavity cover 22.

The template unit 3 is provided in the through hole 11 of the fixing base 1 and above the module unit 2, and has a template 31 and a connecting frame 32. The template 31 is made of a flexible polymer material with a controllable deformation amount to make a flat body. It is arranged above the module 211, and the connecting frame 32 is a hollow ring-shaped body arranged at a position below the circumference of the template 31, and the template 31, the connecting frame 32 and the module 211 and the lower cavity cover 22 have a sealed lower cavity 5. A vacuum can be applied to the lower chamber 5 by a suction device (not shown in the figure) to apply vacuum so that the module 211 can be attached to the template 31.

The back plate unit 4 is provided in the through hole 11 of the fixing base 1 and above the template unit 3, and has a back plate 41 and an upper cavity cover 42. The back plate 41 is made of a non-deformable steel material and is arranged above the template 31 , And the connecting frame 32 and the template 31 and the circumferential position of the back plate 41 are combined by the joining element (not shown), and the center of the back plate 41 and the template 31 can be evacuated or injected with air (not shown) The airtight or sealed air cavity 6 is provided with a sliding airtight ring 411 around the back plate 41 and the through-hole 11 side ring wall 12 of the fixing seat 1 is tightly closed, and the top edge of the back plate 41 is provided with a vertical direction The flexible directional element 412 is engaged with the fixed base 1, the vertical flexible directional element 412 can be spring steel, and the back plate 41 can be oriented upward and downward displacement corresponding to the fixed base 1; and the upper cavity cover 42 is provided at Above the back plate 41 is fixedly connected to the fixing base 1, and the upper chamber cover 42 and the back plate 41 are set to a sealed upper chamber 7 which can be evacuated or injected by an air extraction or injection device (not shown).

Please refer to Figures 3 to 5, during the implementation of this creation, a substrate stage 8 that can be raised and lowered and adjusted in position can be provided below the alignment bonding device. The substrate stage 8 is provided with a substrate 81 and a CCD camera (not shown in the figure) ) Focusing on the bonding position A of the set module 211 and the substrate 81, the positioning and bonding steps are:

S1. As shown in FIG. 3, the lower chamber 5 is maintained to evacuate during the alignment process to form a vacuum negative pressure, so that the module 211 is attached to the template 31, and the central chamber 6 is evacuated to form a vacuum negative pressure, and the upper chamber 7 is injected. The gas forms a positive pressure, and the template 31 and the back plate 41 are attached so that the module 211 is located at the bonding position A of the module 211 and the substrate 81.

S2. The CCD camera photographs the module 211, and obtains the position information of the module 211.

S3. As shown in FIG. 4, the upper cavity 7 is evacuated to raise the back plate 41, and the lower and middle cavities 5, 6 are maintained to evacuate, and the module 211 is bent upward so that the module 211 is separated from the module 211 and the substrate 81 is the fitting position A.

S4. The substrate stage 8 is raised so that the substrate 81 is located at the bonding position of the module 211 and the substrate 81, and the position information of the substrate 81 is acquired by focusing and imaging by a CCD camera.

S5. Calculate the positioning difference between the position information of the module 211 and the position information of the substrate 81 and adjust the position of the substrate stage 8.

S6. As shown in Figure 5, the middle and upper chambers 6 and 7 are injected with gas to form a positive pressure, and the pressure in the upper chamber 7 is greater than that in the middle chamber 6. The lower chamber 5 maintains pumping and moves the back plate 41 downward. The template 31 The module 211 is restored, and the module 211 is located at the bonding position A of the module 211 and the substrate 81 and the substrate 81 is bonded.

After the step S6, the substrate 81 may be subjected to alignment exposure or mold stamping.

This creation also includes the step S7 of demolding. In this S7, no air pressure is added to the middle and upper chambers 6, 7 and the lower chamber 5 is injected with gas to generate positive pressure, so that the module 211 is separated from the substrate 81.

In step S3 of this creation, the module 211 can be bent upward against the template 31 without forming a suspended state, and in step S6, the module 211 can be restored with the template 31 without uncontrollable deformation, and the back plate 41 can be aligned with the vertical The upward and downward movement of the flexible directional element 412 can make the back plate 41 have a precise upward and downward displacement path, and can improve the better alignment accuracy (such as micron level).

In this creative structure, the flexible module 211 can be vacuum-adsorbed and attached to the template 31 during the precise alignment bonding process, which can prevent the module 211 from generating uncontrollable deformation during the alignment or bonding process. The lifting back plate 41 indirectly presses the lifting template 31 and the deformation control of the module 211, and the precision lifting back plate 41 can avoid the occurrence of repeated lifting and lowering position errors, and can improve the alignment and fitting accuracy.

Therefore, as mentioned above, this creation can improve the effect of better precise alignment between the flexible mask or the mold and the substrate, and the foregoing embodiment is an example of the creation, not a limitation of this creation, which is based on the spirit of this creation Equivalent changes should also fall within the scope of this creation. 【Explanation of drawing number】

1: fixed seat 11: Through hole 12: Side ring wall 2: Modular unit 21: Modular frame 211: Modular 22: Lower chamber cover 3: template unit 31: Template 32: Link box 4: backplane unit 41: backplane 411: Airtight ring 412: Vertical flexible directional element 42: Upper chamber cover 5: Lower cavity 6: middle cavity 7: upper cavity 8: substrate stage 81: substrate

Figure 1 is an exploded view of this creation.

Figure 2 is a three-dimensional sectional view of this creation.

Figure 3 is a schematic diagram of the action corresponding to step S1 in this creation.

Figure 4 is a schematic diagram of the actions corresponding to step S3 in this creation.

Figure 5 is a schematic diagram of the action corresponding to step S6 in this creation.

1: fixed seat

11: Through hole

12: Side ring wall

2: Modular unit

21: Modular frame

211: Modular

22: Lower chamber cover

3: template unit

31: Template

32: Link box

4: backplane unit

41: backplane

412: Vertical flexible directional element

42: Upper chamber cover

Claims (10)

A precision alignment and bonding device for flexible masks or molds, including: A fixed seat with a vertical through hole in the center, and a side ring wall on the periphery of the through hole; A module unit, which is arranged on the fixing base and has an annular module frame, which is arranged at the through hole position of the fixing base and sets up the module; A formwork unit is provided in the through hole of the fixing seat and above the module unit, and the airtight lower cavity between the formwork unit and the module unit can be evacuated, and the formwork unit has a controllable deformation than the module template; A backboard unit is provided in the through hole of the fixing seat and above the template unit. It has a backboard and an upper cavity cover. The backboard is made of a non-deformable material and is arranged above the template. The template and backplate ring The combination of the peripheral positions makes the back plate and the center of the template have a sealed middle cavity that can be evacuated or injected, and the upper cavity cover is provided above the back plate and fixedly connected to the fixed seat, and there is a space between the upper cavity cover and the back plate Airtight upper chamber for pumping or insufflation. The precision alignment bonding device for a flexible reticle or mold as described in claim 1, wherein a slidable airtight ring is provided around the back plate ring and is in close contact with the through-hole side ring wall of the fixing seat. The precision alignment bonding device for a flexible mask or mold as described in claim 1, wherein the top edge of the back plate is provided with a vertical flexible directional element to be engaged with the fixing seat. The precision alignment bonding device for a flexible mask or mold as described in claim 3, wherein the vertical flexible directional element is spring steel. The precision alignment bonding device for a flexible mask or mold as described in claim 1, wherein the module is a flexible mask or mold. The precision alignment bonding device for a flexible mask or mold as described in claim 1, wherein the module unit further includes a lower cavity cover, the lower cavity cover is disposed under the fixing seat, and the module frame is disposed Above the lower chamber cover. The precise alignment bonding device for a flexible mask or mold as described in claim 1, wherein the template is made of a flexible polymer material with a controllable deformation amount to form a flat plate. The precision alignment bonding device for a flexible photomask or mold as described in claim 1, wherein the template unit further includes a connecting frame, the connecting frame is a hollow ring-shaped body provided at a position below the circumference of the template, The lower cavity is sealed between the template, the connecting frame and the module and the lower cavity cover, and the circumferential position of the connecting frame, the template and the back plate is combined by the joining element. The precise alignment bonding device for flexible masks or molds as described in claim 1, wherein a substrate stage capable of raising and lowering and adjusting position is provided under the alignment bonding device, and a CCD camera is used to set the mold Focusing on the bonding position of the piece and the substrate, the alignment and bonding steps are: S1. Maintain the suction of the lower chamber during the alignment process to form a vacuum negative pressure, so that the module and the template are attached, and the middle chamber is suctioned to form a vacuum negative pressure, and the upper chamber is injected with gas to form a positive pressure, and the template and the back plate Attaching makes the module located at the bonding position of the module and the substrate; S2. The CCD camera captures the module and obtains the module position information; S3. Pumping the upper cavity to raise the backplane, the lower and middle cavities maintain pumping, and the module is separated from the bonding position of the module and the substrate; S4. The substrate stage is raised so that the substrate is located at the bonding position of the module and the substrate, and the CCD camera is used to focus and acquire the substrate position information; S5. Calculate the positioning difference between the position information of the module and the position information of the substrate and adjust the position of the substrate stage; S6. Inflate the air in the middle and upper chambers to form a positive pressure, and the pressure in the upper chamber is greater than the middle chamber. The lower chamber maintains suction, and the back plate moves down and the template and module are restored, and the module is located between the module and The bonding position of the substrate is bonded to the substrate. The precision alignment device for flexible masks or molds as described in claim 1, which further includes a demolding step S7, which does not add any air pressure to the middle and upper chambers, and the lower chamber generates gas injection Positive pressure separates the module from the substrate.

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