TWM596457U - Substrate conveying unit and scribing apparatus including the same - Google Patents

Abstract

A substrate conveying unit and a scribing apparatus including the substrate conveying unit are provided. The substrate conveying unit may include a stage for supporting a substrate, a frame disposed over the stage and configured to be movable in a direction of conveying the substrate, and a clamp device mounted on the frame and configured to clamp the substrate. The clamp device may include a first clamping portion having a substrate-supporting surface for supporting a first surface of the substrate and rotatably connected to a rotation axis, a second clamping portion having a substrate-supporting surface for supporting a second surface of the substrate, and an actuator connected to the first camping portion through a driving force transmission component and a driving force transmission shaft and configured to enable the first clamping portion to rotate about the rotation axis.

Description

Substrate transfer unit and scribing device with substrate transfer unit

The present invention relates to a substrate transfer unit for transferring a substrate and a scribing device provided with the substrate transfer unit.

In general, brittle mother glass panels such as glass are used in liquid crystal display panels for flat panel displays, organic electroluminescent display panels, inorganic electroluminescent display panels, transmissive projection substrates, reflective projection substrates, etc. (hereinafter, referred to as Is a "substrate") cut into a unit glass panel of a predetermined size (hereinafter, referred to as "unit substrate").

The process of cutting the substrate into unit substrates includes a scribing process in which a scribing wheel made of diamond or the like is pressed against the substrate along a cutting plan line that serves as a basis for cutting the substrate to form a scribing line on the substrate.

In this scribing process, the trailing end of the substrate is clamped by the jig device in a state where the substrate is supported by the tape, and then transferred to the scribing unit.

The clamp device generally includes a pair of clamping members. In a state where the substrate is located between the pair of clamping members, as the pair of clamping members move close to each other, the substrate is clamped by the pair of clamping members.

On the other hand, the scribing device sometimes needs to perform a process of cutting various substrates having various thicknesses. However, in the case of the conventional jig device, there is a disadvantage that it is necessary to perform the additional work of changing the overall height of the jig device according to the thickness of the substrate in order to stably hold the substrate every time the thickness of the substrate changes.

An object of the present invention is to provide a substrate transfer unit capable of stably holding a substrate and providing a substrate transfer unit that does not require additional work to change the overall height of the jig device according to the thickness of the substrate even when the thickness of the substrate is changed Scribing device for substrate transfer unit.

An embodiment of the present invention for achieving the above object provides a substrate transfer unit that may include: a support table configured to support the substrate; a frame provided above the support table and configured to move in the direction of transferring the substrate; and a fixture device, Mounted on the frame and configured to clamp the substrate, the clamp device may include: a first clamping member having a substrate supporting surface that supports the first surface of the substrate, and rotatably connected to the rotating shaft; a second clamping member , A substrate supporting surface having a second surface supporting the substrate; and an actuator, connected to the first clamping member through a driving force transmission member and a driving force transmission rod, and configured such that the first clamping member is centered on the rotation axis Spin.

The front end of the first clamping member facing the substrate may have an arc shape.

A plurality of clamp devices may be installed on the frame, and the pressure inside the plurality of actuators constituting the plurality of clamp devices may be adjusted by one regulator.

A support pad may be attached to the substrate support surface of the first clamping member or the substrate support surface of the second clamping member, and the support pad is formed of a material having a larger elastic force than the substrate.

The support area of the first surface of the substrate supported on the substrate support surface of the first clamping member may be smaller than the support area of the second surface of the substrate supported on the substrate support surface of the second clamping member.

In addition, an embodiment of the present invention provides that a substrate transfer unit may include: a support table configured to support the substrate; a frame provided above the support table and configured to move toward the direction of transferring the substrate; and a fixture device installed on the frame , And is configured to clamp the substrate, the clamp device may include: a first clamping member having a substrate supporting surface supporting the first surface of the substrate, and rotatably connected to the first rotating shaft; a second clamping member, A substrate supporting surface having a second surface supporting the substrate; the first actuator is connected to the first clamping member through the first driving force transmission member and the first driving force transmission rod, and is configured such that the first clamping member The first rotating shaft rotates around the center; and the posture holding unit maintains the posture of the first clamping member in such a manner that the substrate supporting surface of the first clamping member is parallel to the substrate supporting surface of the second clamping member.

The first driving force transmission lever may be connected to the first clamping member through the second rotating shaft, and the posture holding unit may include a second actuator, and the second actuator passes through the second driving force transmission member and the second driving force transmission lever It is connected to the first clamping member and is configured to rotate the first clamping member about a third rotating shaft spaced apart from the first rotating shaft and the second rotating shaft.

It may be that the pressure inside the first actuator and the pressure inside the second actuator are adjusted by the same regulator.

A plurality of clamp devices may be installed on the frame, and the pressure inside the plurality of actuators constituting the plurality of clamp devices and the pressure inside the plurality of second actuators may be adjusted by one regulator.

In addition, according to an embodiment of the present invention, a scribing device may include the substrate transfer unit described above.

According to the substrate transfer unit of the embodiment of the present invention, the pressure inside the first actuator is adjusted according to the thickness of the substrate, so that the first substrate supporting surface of the first clamping member and the second of the second clamping member can be adjusted The separation distance between the supporting surfaces of the substrate. Therefore, even when the thickness of the substrate is changed, it is not necessary to perform an additional work of changing the overall height of the jig device according to the thickness of the substrate, and it is possible to stably hold the substrate. Therefore, the number of work processes can be reduced, and a predetermined processing process for the substrate can be stably executed. In addition, by adjusting the pressure inside the second actuator, the posture of the first substrate support surface of the first clamping member can be maintained horizontally. Therefore, even when the separation distance between the first substrate support surface of the first clamping member and the second substrate support surface of the second clamping member is adjusted, the first substrate of the first clamping member can also be adjusted By keeping the posture of the support surface horizontal, the support area of the first surface of the substrate supported on the first substrate support surface of the first clamping member can be increased, whereby the substrate can be held more stably.

Hereinafter, the substrate transfer unit and the scribing device provided with the substrate transfer unit of the embodiment of the present invention will be described with reference to the drawings.

The object to be cut by the scribing device provided with the substrate transfer unit according to the embodiment of the present invention may be a bonded substrate formed by bonding a first substrate and a second substrate. For example, the first substrate may include a thin film transistor, and the second substrate may include a color filter. In contrast, the first substrate may include a color filter, and the second substrate may include a thin film transistor. Hereinafter, the adhesion substrate is simply referred to as a substrate, the surface of the first substrate exposed to the outside is referred to as a first surface, and the surface of the second substrate exposed to the outside is referred to as a second surface.

In addition, the direction in which the substrate to be subjected to the process of cutting the substrate is transferred is defined as the Y-axis direction, and the direction perpendicular to the direction in which the substrate is transferred (Y-axis direction) is defined as the X-axis direction. Furthermore, the direction perpendicular to the X-Y plane on which the substrate is placed is defined as the Z-axis direction.

As shown in FIGS. 1 and 2, the substrate transfer unit 10 of the first embodiment of the present invention may include: a support table 11 that supports the substrate S; and a clamp device 50 that clamps the trailing end of the substrate S supported on the support table 11 ; A frame 13 connected to the fixture device 50 and extending in the X-axis direction; a first guide rail 14 connected to the frame 13 and extending in the Y-axis direction; arranged adjacent to the scribing unit 30, and suspending or sucking the substrate S to support The first flat plate 15; and a connecting assembly that selectively connects the clamp device 50 to the support table 11.

The first flat plate 15 may be configured to be able to suspend or attract the substrate S. For example, a plurality of slits connected to the gas supply source and the vacuum source may be formed on the surface of the first flat plate 15. When gas is supplied from the gas supply source to the plurality of slits of the first flat plate 15, the substrate S can be suspended from the first flat plate 15. In addition, when the gas is sucked through the plurality of slits of the first flat plate 15 under the negative pressure formed by the vacuum source, the substrate S can be adsorbed on the first flat plate 15.

In a state where the substrate S is suspended from the first flat plate 15, the substrate S can move without friction with the first flat plate 15. Moreover, the substrate S can be adsorbed and fixed to the first flat plate 15 during the formation of the scribe line on the first surface and the second surface of the substrate S.

The support table 11 can reciprocate in the Y-axis direction. As the support table 11 moves in the Y-axis direction, the substrate S supported on the support table 11 can move in the Y-axis direction. The support table 11 may be constituted by various structures capable of horizontally moving the substrate S while supporting the substrate S, such as a vacuum table or a belt.

The support table 11 may be constituted by one belt having an area equal to or greater than the entire area of the substrate S. When the support table 11 is composed of a belt, the support table 11 is supported by a plurality of pulleys 111. At least one of the plurality of pulleys 111 may be a driving pulley that provides a driving force to rotate the support table 11.

The support table 11 may have a support surface that supports the first surface or the second surface of the substrate S. An accommodating portion 112 into which the jig device 50 is inserted and accommodated may be formed on the support surface of the support table 11. It may be that the plurality of accommodating portions 112 are arranged in the X-axis direction corresponding to the plurality of clamp devices 50. The number of the accommodating parts 112 may be the same as the number of the jig devices 50. The accommodating portion 112 may be formed in the form of a through hole penetrating the support table 11 in the Z-axis direction. However, the present invention is not limited to this. When the support base 11 is thick, the accommodating portion 112 may be formed in a groove shape that is recessed in the support base 11 without penetrating the support base 11. When the accommodation portion 112 is formed in the form of a through hole or a recessed groove, interference between the accommodation portion 112 and the substrate S can be prevented.

As an example, the clamp device 50 can be selectively accommodated in the accommodating portion 112. That is, the clamp device 50 can be accommodated in the housing portion 112 or spaced apart from the housing portion 112 while moving in the Z-axis direction. As another example, the jig device 50 may continue to be held in the housing 112.

As another example, as shown in FIG. 3, the support table 11 may be configured as a gas table. In this case, in a state where the substrate S is clamped by the jig device 50 and levitated by the gas table, as the jig device 50 moves in the Y-axis direction, the substrate S can move in the Y-axis direction.

Between the frame 13 and the first guide rail 14, a linear movement mechanism such as an actuator working under pneumatic or hydraulic pressure, a linear motor working under electromagnetic interaction, or a ball screw may be provided. Therefore, in a state where the trailing end of the substrate S is clamped by the clamp device 50, as the frame 13 moves in the Y-axis direction by the linear movement mechanism, the substrate S can be transferred in the Y-axis direction. At this time, the support table 11 can stably support the substrate S while moving in synchronization with the movement of the jig device 50.

On the other hand, as shown in FIG. 4, the scribing device provided with the substrate transfer unit 10 of the first embodiment of the present invention may include: a scribing unit 30 for forming a scribing line on the substrate S; and scribing the substrate S toward the The substrate transfer unit 10 transferred by the unit 30; the substrate transfer unit 20 that transfers the substrate S from the scribing unit 30 to the subsequent process; and a control unit (not shown) that controls the operation of the constituent elements of the scribing device.

The scribing unit 30 is configured to form scribing lines along the X-axis direction on the first surface and the second surface of the substrate S, respectively.

The scribing unit 30 may include: a first support frame 31 extending in the X-axis direction; a first scribing head 32 provided on the first support frame 31 so as to be movable in the X-axis direction; A second support frame 33 extending downward in the X-axis direction parallel to the first support frame 31; and a second scribing head 34 provided on the second support frame 33 so as to be movable in the X-axis direction.

A plurality of first scribing heads 32 may be mounted on the first support frame 31 in the X-axis direction, and a plurality of second scribing heads 34 may be mounted on the second support frame 33 in the X-axis direction. A space through which the substrate S passes can be formed between the first support frame 31 and the second support frame 33. The first support frame 31 and the second support frame 33 may be manufactured as separate components for assembly, or may be manufactured as one body.

The first scribing head 32 and the second scribing head 34 may be arranged opposite to each other in the Z-axis direction. The first scribing head 32 and the second scribing head 34 may be provided with a wheel frame 35 that holds the scribing wheel 351. The scribing wheel 351 mounted on the first scribing head 32 and the scribing wheel 351 mounted on the second scribing head 34 may be arranged opposite to each other in the Z-axis direction.

The pair of scribing wheels 351 may pressurize the first surface and the second surface of the substrate S, respectively. In a state where the pair of scribing wheels 351 pressurize the first surface and the second surface of the substrate S, respectively, the first scribing head 32 and the second scribing head 34 relatively move the substrate S in the X-axis direction, thereby A scribe line can be formed on the first surface and the second surface of the substrate S along the X-axis direction.

On the other hand, the first scribing head 32 and the second scribing head 34 may be configured to be movable in the Z-axis direction relative to the first support frame 31 and the second support frame 33, respectively. For this purpose, an actuator working under pneumatic or hydraulic pressure may be provided between the first scribing head 32 and the second scribing head 34 and the first support frame 31 and the second support frame 33, under electromagnetic interaction Linear motion mechanism such as working linear motor or ball screw.

As the first scribing head 32 and the second scribing head 34 move in the Z-axis direction relative to the first support frame 31 and the second support frame 33, respectively, the pair of scribing wheels 351 pressurizes the substrate S or the substrate S Separate. Furthermore, by adjusting the degree of movement of the first scribing head 32 and the second scribing head 34 in the Z-axis direction, the pressing force applied to the substrate S by the pair of scribing wheels 351 can be adjusted. In addition, the cutting depth of the substrate S by the pair of scribing wheels 351 can be adjusted by the movement of the first scribing head 32 and the second scribing head 34 in the Z-axis direction.

The plurality of clamp devices 50 may be arranged along the X axis direction along the frame 13. The clamp device 50 may be provided so as to be able to move in the X-axis direction along with the guide 18 extending along the frame 13. To this end, an actuator that operates under pneumatic or hydraulic pressure, a linear motor that operates under electromagnetic interaction, or a linear movement mechanism such as a ball screw may be provided between the clamp device 50 and the guide 18. Therefore, as the plurality of clamp devices 50 move in the X-axis direction by the linear movement mechanism, the interval between the plurality of clamp devices 50 can be adjusted. Therefore, the plurality of clamp devices 50 are appropriately arranged corresponding to the width of the substrate S, so that the substrate S can be stably held. As the plurality of jig devices 50 move in the X-axis direction by the linear movement mechanism, the plurality of jig devices 50 can be respectively positioned corresponding to the plurality of receiving portions 112 of the support table 11.

Between the jig device 50 and the frame 13, a moving unit 19 for moving the jig device 50 in the Z-axis direction may be provided. The moving assembly 19 can be applied to an actuator that operates under pneumatic or hydraulic pressure, a linear motor that operates under electromagnetic interaction, or a linear movement mechanism such as a ball screw. When the substrate S is carried into or out of the support table 11, the jig device 50 is moved away from the support table 11 by the moving assembly 19, thereby preventing the gap between the jig device 50 and the substrate S put one's oar in.

The clamp device 50 can be accommodated in or disengaged from the accommodating portion 112 of the support table 11 while being moved in the Z-axis direction by the moving assembly 19.

In a state where the jig device 50 moves so as to be spaced apart from the support table 11, the jig device 50 can be separated from the storage portion 112 of the support table 11. Therefore, it is possible to prevent interference between the substrate S and the jig device 50 during the transportation of the substrate S to the support table 11.

The clamp device 50 can be accommodated in the accommodating portion 112 of the support table 11 by the movement assembly 19 moving in the Z-axis direction. Thereby, the substrate S can be clamped by the clamp device 50 at the same height as the support surface of the support table 11.

The substrate transfer unit 20 may include: a second flat plate 25 arranged adjacent to the scribing unit 30 and suspending or sucking the substrate S to support it; a transfer belt 21 arranged adjacent to the second flat plate 25; and the second flat plate 25 And a moving device 26 that moves the conveyor belt 21 back and forth in the Y-axis direction. The moving device 26 functions to cause the second flat plate 25 and the transfer belt 21 to reciprocate in the Y-axis direction following the second guide rail 24 extending in the Y-axis direction. The moving device 26 can be applied to an actuator that operates under pneumatic or hydraulic pressure, a linear motor that operates under electromagnetic interaction, or a linear movement mechanism such as a ball screw.

The second flat plate 25 and the transfer belt 21 may be configured to be movable together in the Y-axis direction. That is, the second flat plate 25 and the transfer belt 21 may be configured to be movable together in a direction (Y-axis direction) parallel to the direction in which the substrate S is transferred.

When the scribing unit 30 forms the scribing lines on the first surface and the second surface of the substrate S, respectively, the second flat plate 25 moves toward the first flat plate 15, whereby the first scribing head 32 and the second scribing head 34 It can be located between the first flat plate 15 and the second flat plate 25. When the scribing unit 30 forms the scribing lines on the first surface and the second surface of the substrate S, respectively, the second flat plate 25 moves toward the first flat plate 15, so the substrate S can be stably supported on the first flat plate 15 and the second Tablet 25.

The transfer belt 21 may be provided in plurality, and the plurality of transfer belts 21 may be separated from each other in the X-axis direction. Each transfer belt 21 is supported by a plurality of pulleys 211, and at least one of the plurality of pulleys 211 may be a driving pulley that provides a driving force to rotate the transfer belt 21.

The second flat plate 25 may be configured to be able to suspend or attract the substrate S. For example, a plurality of slits connected to the gas supply source and the vacuum source may be formed on the surface of the second flat plate 25. When gas is supplied from the gas supply source to the plurality of slits of the second flat plate 25, the substrate S can be suspended from the second flat plate 25. In addition, when the gas is sucked through the plurality of slits of the second flat plate 25 under the negative pressure formed by the vacuum source, the substrate S can be adsorbed to the second flat plate 25.

While the substrate S is being transferred to the second flat plate 25, the slits of the second flat plate 25 are supplied with gas, whereby the substrate S can move without friction with the second flat plate 25.

Moreover, the substrate S can be adsorbed and fixed to the second flat plate 25 during the formation of the scribe lines on the first surface and the second surface of the substrate S.

Furthermore, after the scribe lines are formed on the first surface and the second surface of the substrate S, respectively, while the substrate S is attracted to the first flat plate 15 and the second flat plate 25, the second flat plate 25 moves away from the first flat plate 15 As a result, the substrate S can be divided based on the scribe line.

On the other hand, during the movement of the substrate S from the second flat plate 25 to the subsequent process, the slits of the second flat plate 25 are supplied with gas, whereby the substrate S can move without friction with the second flat plate 25.

As shown in FIGS. 5 to 7, the clamp device 50 includes a base 51, a clamping unit 52 and a driving unit 53.

The base 51 is detachably fixed to the frame 13, so that the clamp device 50 can be supported by the frame 13. A clamping unit 52 is attached to the base 51 so as to be operable. The drive unit 53 is configured to operate the clamping unit 52.

The clamping unit 52 includes a first clamping member 521, a second clamping member 522, a connecting member 523, a first rotating shaft 524, and a second rotating shaft 525.

The first clamping member 521 is rotatably connected to the first rotating shaft 524. The second clamping member 522 is attached to the base 51 and its position is fixed.

The first clamping member 521 includes a first substrate support surface 5211 that supports the first surface of the substrate S. The second clamping member 522 includes a second substrate support surface 5221 that supports the second surface of the substrate S opposite to the first surface of the substrate S.

In a state where the substrate S is located between the first clamping member 521 and the second clamping member 522, the first clamping member 521 moves close to the second clamping member 522, thereby enabling the first clamping The first substrate support surface 5211 of the member 521 and the second substrate support surface 5221 of the second clamping member 522 support (clamp) the substrate S.

A first support pad 526 is attached to the first substrate support surface 5211. The second support pad 527 is provided on the second substrate support surface 5221. The first support pad 526 and the second support pad 527 are formed of synthetic resin such as polyurethane. The first support pad 526 and the second support pad 527 are portions that are in contact with the substrate S, and serve to absorb the shock generated when the first support pad 526 and the second support pad 527 are in contact with the substrate S. The first support pad 526 and the second support pad 527 can have a larger elastic force than the substrate S. Therefore, the first support pad 526 and the second support pad 527 can hold the substrate S more stably.

In particular, as shown in FIG. 7, when the first clamping member 521 and the second clamping member 522 sandwich the relatively thick substrate S, the first substrate supporting surface 5211 of the first clamping member 521 is opposed to the substrate The substrate S is sandwiched with the first surface of S inclined at a predetermined angle. In this case, since the area of the first surface of the substrate S in contact with the first clamping member 521 is small, the substrate S may not be properly supported. According to an embodiment of the present invention, the first substrate support surface 5211 is provided with a first support pad 526 that has a greater elastic force than the substrate S. Therefore, the first substrate support surface 5211 is inclined to the first surface of the substrate S by a predetermined amount When the substrate S is sandwiched at an angle, the first support pad 526 is also elastically deformed so as to conform to the shape of the substrate S and is closely attached to the substrate S. Therefore, the substrate S can be held stably without slipping or detaching from the first support pad 526 without damage.

In particular, when the substrate S is a thin-film glass plate, the cushioning forces of the first support pad 526 and the second support pad 527 can prevent damage to the substrate S.

The connecting member 523 is configured to connect the first clamping member 521 to the drive unit 53. The connecting member 523 is connected to the first rotating shaft 524 and the second rotating shaft 525. The first clamping member 521 is connected to the first rotation shaft 524 and the second rotation shaft 525 through the connection member 523. The connecting member 523 and the first clamping member 521 can be manufactured in one piece or assembled separately after being manufactured in one piece. The connecting member 523 can rotate together with the first clamping member 521 about the first rotating shaft 524.

The first rotation shaft 524 is a fixed shaft fixed to the base 51. The second rotation shaft 525 is a movable shaft that follows the movement of the connecting member 523.

A rotating shaft bracket 513 may be attached to the base 51, and the first rotating shaft 524 may be rotatably supported by the rotating shaft bracket 513.

The driving unit 53 includes a first actuator 531, a first driving force transmission member 532, a first driving force transmission lever 533, a fluid supply source 534, a regulator 535, a first line 536, a second line 537, and a first valve 538 And the second valve 539.

The first actuator 531 functions to provide driving force to the first clamping member 521. The first actuator 531 is connected to the base 51 via the first actuator rotation shaft 5313. The first actuator rotating shaft 5313 can be fixed to the base 51 via the first actuator rotating shaft bracket 515. The first actuator 531 may include a rotation shaft block 5314 extending toward the first actuator rotation shaft 5313, and the rotation shaft block 5314 may be rotatably connected to the first actuator rotation shaft 5313.

Therefore, during the forward or backward movement of the first driving force transmission lever 533, the first actuator 531 can rotate around the first actuator rotation shaft 5313.

A first driving force transmission member 532 is arranged inside the first actuator 531 so as to be able to reciprocate. The first actuator 531 includes: a first port 5311 connected to the first line 536; and a second port 5312 connected to the second line 537.

The first valve 538 is configured to open or close the flow path connected from the fluid supply source 534 to the first port 5311 via the first line 536. The second valve 539 is configured to open or close the flow path connected from the fluid supply source 534 to the second port 5312 via the second line 537.

According to this configuration, as the fluid flows into the first actuator 531 through the first line 536 and the first port 5311, the first driving force transmission member 532 can move toward the clamping unit 52. Further, as fluid flows into the first actuator 531 via the second line 537 and the second port 5312, the first driving force transmission member 532 can move away from the clamping unit 52. In this way, according to the pressure inside the first actuator 531, the first driving force transmission member 532 can move.

One end of the first driving force transmission lever 533 is connected to the first driving force transmission member 532, and the other end of the first driving force transmission lever 533 is connected to the connecting member 523 through the first connecting head 5331 and the second rotating shaft 525. The first driving force transmission lever 533 is rotatably connected to the first clamping member 521 through the second rotation shaft 525. Thus, the first driving force transmission member 532 is connected to the first clamping member 521 through the first driving force transmission lever 533, the first connection head 5331, the second rotation shaft 525, and the connection member 523. Thereby, the driving force of the first actuator 531 is supplied to the first clamp through the first driving force transmission member 532, the first driving force transmission lever 533, the first connection head 5331, the second rotation shaft 525, and the connection member 523 Part 521.

According to the pressure inside the first actuator 531, the first driving force transmission member 532 can move within the first actuator 531, and by the movement of the first driving force transmission member 532, the first driving force transmission lever 533 can move. By the movement of the first driving force transmission lever 533, the connecting member 523 and the first clamping member 521 can rotate around the first rotation shaft 524.

The first clamping member 521 can move around the first rotation shaft 524 while moving close to the second clamping member 522 or away from the second clamping member 522.

On the other hand, the first driving force transmission lever 533 can move forward or backward while moving away or approaching the base 51. The base 51 may be provided with a first guide assembly 511 to guide the movement of the first driving force transmission lever 533 relative to the base 51. For example, the first guide assembly 511 may be composed of a guide rail connected to the first driving force transmission lever 533.

The fluid supplied by the fluid supply source 534 may be a liquid or a gas. The driving unit 53 can work in a hydraulic type or a pneumatic type.

The regulator 535 is configured to regulate the pressure of the fluid supplied into the first actuator 531. The regulator 535 can adjust the pressure inside the first actuator 531. The regulator 535 can keep the internal pressure of the first actuator 531 constant. In addition, the regulator 535 can adjust the internal pressure of the first actuator 531. The internal pressure of the first actuator 531 can be determined according to the thickness of the substrate S, and the internal pressure of the first actuator 531 can determine the angle between the first clamping member 521 and the second clamping member 522 and the second An extraction angle of the driving force transmission lever 533.

When the substrate S is located between the first clamping member 521 and the second clamping member 522, the pressure inside the first actuator 531 is adjusted by the regulator 535, so that the first surface of the substrate S can contact the first clamp The first substrate supporting surface 5211 of the clamping member 521 is pressed.

As shown in FIGS. 6 and 7, as the pressure inside the first actuator 531 is adjusted by the regulator 535, the position of the first driving force transmission member 532 inside the first actuator 531 can be adjusted. As the position of the first driving force transmission member 532 is adjusted, the rotation angle of the first clamping member 521 can be adjusted. As the rotation angle of the first clamping member 521 is adjusted, the separation distance between the first substrate support surface 5211 of the first clamping member 521 and the second substrate support surface 5221 of the second clamping member 522 can be adjusted. In this way, as the pressure inside the first actuator 531 is adjusted by the regulator 535, the first substrate support surface 5211 of the first clamping member 521 and the second substrate support surface 5221 of the second clamping member 522 can be moved The separation distance is adjusted to correspond to the thickness of the substrate S.

On the other hand, as shown in FIG. 7, as the thickness of the substrate S increases, the support area of the first surface of the substrate S supported on the first substrate support surface 5211 of the first clamping member 521 is smaller than that supported by the second clamp The support area of the second surface of the substrate S on the second substrate support surface 5221 of the tightening member 522.

On the other hand, when the substrate transfer unit 10 includes a plurality of clamp devices 50, the pressure inside the plurality of first actuators 531 constituting the plurality of clamp devices 50 can be adjusted by one regulator 535. Therefore, since the plurality of first actuators 531 can be simultaneously controlled by one adjuster 535, the substrate S can be uniformly clamped by the plurality of clamp devices 50.

According to the substrate transfer unit of the first embodiment of the present invention, the pressure inside the first actuator 531 is adjusted according to the thickness of the substrate S, so that the first substrate support surface 5211 and the second of the first clamping member 521 can be adjusted The separation distance between the second substrate support surfaces 5221 of the clamping member 522. Therefore, even when the thickness of the substrate S is changed, it is not necessary to perform an additional work of changing the overall height of the jig device 50 according to the thickness of the substrate S, and the substrate S can be stably held. Therefore, the number of work processes can be reduced. In addition, a predetermined processing process for the substrate S can be stably performed, or the substrate S can be stably transferred to the subsequent process.

Hereinafter, the substrate transfer unit of the second embodiment of the present invention will be described with reference to FIG. 8. The same parts as those described in the first embodiment of the present invention described above are denoted by the same reference signs, and detailed descriptions thereof are omitted.

As shown in FIG. 8, according to the substrate transfer unit of the second embodiment of the present invention, the front end of the first clamping member 521 facing the substrate S may be arc-shaped.

The front end of the first clamping member 521 may be formed in an arc shape in a direction in which the substrate S enters between the first clamping member 521 and the second clamping member 522.

According to the substrate transfer unit of the second embodiment of the present invention, when the substrate S enters between the first clamping member 521 and the second clamping member 522, the end of the substrate S collides with the first clamping member 521 In the case of the front end of the substrate, the end of the substrate S is guided to the arc portion of the front end of the first clamping member 521, so that it can also enter stably between the first clamping member 521 and the second clamping member 522. In addition, the substrate S can be prevented from being warped or damaged.

Hereinafter, the substrate transfer unit of the third embodiment of the present invention will be described with reference to FIGS. 9 and 10. The same parts as those described in the first and second embodiments of the present invention described above are denoted by the same reference signs, and detailed descriptions thereof are omitted.

As shown in FIG. 9, the extension line EL of the first driving force transmission lever 533 may pass through the center C5 of the first actuator rotating shaft 5313. As another example, the extension line EL of the first driving force transmission lever 533 may be located at least between the base 51 and the center C5 of the first actuator rotation shaft 5313.

In addition, as shown in FIG. 10, in a state where the first substrate support surface 5211 of the first clamping member 521 and the second substrate support surface 5221 of the second clamping member 522 are in contact with each other, the center C2 of the second rotation shaft 525 It is located closer to the first clamping member 521 and the second clamping member 522 than the center C1 of the first rotating shaft 524.

According to the substrate transfer unit of the third embodiment of the present invention, cracking, scratching, stamping, crushing, breakage, damage, etc. of the brittle material substrate S can be prevented, and the first clamping member 521 and the second clamping member 522 can The substrate S can be held more stably by preventing the substrate from slipping or coming off.

In addition, when the first clamping member 521 and the second clamping member 522 release the substrate S, the substrate S can be prevented from being lifted up following the movement of the first clamping member 521 while being attached to the first clamping member 521.

Hereinafter, the substrate transfer unit of the fourth embodiment of the present invention will be described with reference to FIGS. 11 to 13. The same parts as those described in the first to third embodiments of the present invention described above are denoted by the same reference numerals, and detailed descriptions thereof are omitted.

As shown in FIGS. 11 to 13, according to the substrate transfer unit of the fourth embodiment of the present invention, the clamp device 50 further includes an attitude holding unit that holds the first clamping member 521 parallel to the second clamping member 522 54.

The clamping unit 52 further includes a third rotation shaft 528 and a fourth rotation shaft 529.

The first clamping member 521 is rotatably connected to the connecting member 523 through the third rotation shaft 528. Therefore, in a state where the connection member 523 rotates around the first rotation shaft 524, the first clamping member 521 can rotate about the third rotation shaft 528 relative to the connection member 523 via the posture holding unit 54. Thus, the posture of the first clamping member 521 can be maintained horizontally.

The first clamping member 521 is connected to the posture holding unit 54 through the fourth rotation shaft 529.

The third rotation shaft 528 and the fourth rotation shaft 529 are movable shafts that follow the movement of the first clamping member 521.

The posture holding unit 54 includes a second actuator 541, a second driving force transmission member 542, and a second driving force transmission lever 543.

The second actuator 541 functions to provide driving force to the first clamping member 521. The second actuator 541 is connected to the base 51 via a second actuator rotation shaft 5413. The second actuator rotation shaft 5413 can be fixed to the base 51 through the second actuator rotation shaft bracket 516. The second actuator 541 may include a rotation shaft block 5414 extending toward the second actuator rotation shaft 5413, and the rotation shaft block 5414 may be rotatably connected to the second actuator rotation shaft 5413.

Therefore, during the forward or backward movement of the second driving force transmission lever 543, the second actuator 541 can rotate about the second actuator rotating shaft 5413 as the center.

A second driving force transmission member 542 is arranged inside the second actuator 541 so as to be able to reciprocate. The second actuator 541 includes: a first port 5411 connected to the first line 536; and a second port 5412 connected to the second line 537.

The first valve 538 is configured to open or close the flow path connected from the fluid supply source 534 to the first port 5411 via the first line 536. The second valve 539 is configured to open or close the flow path connected from the fluid supply source 534 to the second port 5412 via the second line 537.

According to this structure, as the fluid flows into the inside of the second actuator 541 through the first line 536 and the first port 5411, the second driving force transmission member 542 can move toward the clamping unit 52. Furthermore, as fluid flows into the inside of the second actuator 541 through the second line 537 and the second port 5412, the second driving force transmission member 542 can move away from the clamping unit 52. In this manner, based on the pressure inside the second actuator 541, the second driving force transmission member 542 can move.

One end of the second driving force transmission lever 543 is connected to the second driving force transmission member 542, and the other end of the second driving force transmission lever 543 is connected to the first clamping member 521 through the second connector 5431 and the fourth rotation shaft 529. The second driving force transmission lever 543 is rotatably connected to the first clamping member 521 through the fourth rotation shaft 529. Thus, the second driving force transmission member 542 is connected to the first clamping member 521 via the second driving force transmission lever 543, the second connector 5431, and the fourth rotation shaft 529. Thus, the driving force of the second actuator 541 is supplied to the first clamping member 521 through the second driving force transmission member 542, the second driving force transmission lever 543, the second connector 5431, and the fourth rotation shaft 529.

According to the pressure inside the second actuator 541, the second driving force transmission member 542 can move within the second actuator 541. By the movement of the second driving force transmission member 542, the second driving force transmission lever 543 can move. By the movement of the second driving force transmission lever 543, the first clamping member 521 can rotate around the fourth rotation axis 529 and the third rotation axis 528 relative to the connection member 523. While the first clamping member 521 rotates around the fourth rotation axis 529, it rotates with respect to the connecting member 523 around the third rotation axis 528, whereby the posture of the first clamping member 521 is maintained horizontally. The first substrate supporting surface 5211 of one clamping member 521 and the second substrate supporting surface 5211 of the second clamping member 522 can be parallel to each other.

On the other hand, the second driving force transmission lever 543 can move forward or backward while moving away or approaching the base 51. The base 51 may be provided with a second guide assembly 512 to guide the movement of the second driving force transmission lever 543 relative to the base 51. For example, the second guide assembly 512 may be composed of a guide rail connected to the second driving force transmission lever 543.

The fluid supply source 534 and the regulator 535 may be connected to the first actuator 531 and the second actuator 541. In this case, the first line 536 is connected to the first port 5311 of the first actuator 531 and the first port 5411 of the second actuator 541. Moreover, the second line 537 is connected to the second port 5312 of the first actuator 531 and the second port 5412 of the second actuator 541.

Therefore, the regulator 535 is configured to regulate the pressure of the fluid supplied into the first actuator 531 and the pressure of the fluid supplied into the second actuator 541. The regulator 535 can adjust the pressure inside the first actuator 531 and the pressure inside the second actuator 541. The regulator 535 can keep the internal pressures of the first actuator 531 and the second actuator 541 constant. In addition, the regulator 535 can adjust the internal pressures of the first actuator 531 and the second actuator 541. The internal pressure of the first actuator 531 and the second actuator 541 can be determined according to the thickness of the substrate S.

When the substrate S is located between the first clamping member 521 and the second clamping member 522, the pressure inside the first actuator 531 and the pressure inside the second actuator 541 are adjusted by the regulator 535, so that In the state where the posture of the first substrate support surface 5211 of the first clamping member 521 is held horizontally, the first surface of the substrate S is pressed against the first substrate support surface 5211 of the first clamping member 521.

As shown in FIGS. 12 and 13, as the pressure inside the first actuator 531 is adjusted by the regulator 535, the position of the first driving force transmission member 532 inside the first actuator 531 can be adjusted. As the position of the first driving force transmission member 532 is adjusted, the rotation angle of the connection member 523 can be adjusted. As the rotation angle of the connection member 523 is adjusted, the separation distance between the first substrate support surface 5211 of the first clamping member 521 and the second substrate support surface 5221 of the second clamping member 522 can be adjusted. In this way, as the pressure inside the first actuator 531 is adjusted by the regulator 535, the first substrate support surface 5211 of the first clamping member 521 and the second substrate support surface 5221 of the second clamping member 522 can be moved The separation distance is adjusted to correspond to the thickness of the substrate S.

In addition, as the pressure inside the second actuator 541 is adjusted by the regulator 535, the position of the second driving force transmission member 542 inside the second actuator 541 can be adjusted. As the position of the second driving force transmission member 542 is adjusted, the rotation angle of the first clamping member 521 can be adjusted. As the rotation angle of the first clamping member 521 is adjusted, the posture of the first substrate supporting surface 5211 of the first clamping member 521 can be held horizontally, and thereby the first substrate supporting surface of the first clamping member 521 can be maintained The state where 5211 and the second substrate support surface 5221 of the second clamping member 522 are parallel to each other. In this manner, as the pressure inside the second actuator 541 is adjusted by the regulator 535, the first substrate support surface 5211 of the first clamping member 521 and the second substrate support surface 5221 of the second clamping member 522 are parallel to each other In this state, the first surface and the second surface of the substrate S can be held more stably.

When the pressure inside the first actuator 531 is adjusted, the pressure inside the second actuator 541 can be adjusted at the same time. At this time, the pressure adjustment inside the second actuator 541 is executed in conjunction with the pressure adjustment inside the first actuator 531. The inside of the first actuator 531 can be executed in such a manner that the condition that the first clamping member 521 is parallel to the second clamping member 522 is satisfied while the first clamping member 521 is displaced relative to the second clamping member 522 Pressure adjustment and pressure adjustment in the second actuator 541. In order to meet this condition, the specifications of the first actuator 531 (inner diameter, length, position of the first port 5311, position of the second port 5312, installation angle of the first clamping member 521, etc.), The specifications of the driving force transmission member 532 (outer diameter, thickness, etc.), the specifications of the first driving force transmission rod 533 (diameter, length, installation angle to the first clamping member 521, etc.), the second actuator 541 Specifications (inner diameter, length, position of the first port 5411, position of the second port 5412, installation angle to the first clamping member 521, etc.), specifications of the second driving force transmission member 542 (outer diameter, thickness, etc.) 2. Specifications of the second driving force transmission lever 543 (diameter, length, installation angle of the first clamping member 521, etc.).

On the other hand, as shown in FIG. 13, as the thickness of the substrate S increases, the support area of the first surface of the substrate S supported on the first substrate support surface 5211 of the first clamping member 521 is smaller than that supported by the second clamp The support area of the second surface of the substrate S on the second substrate support surface 5221 of the tightening member 522.

On the other hand, when the substrate transfer unit 10 includes a plurality of clamp devices 50, the pressure inside the plurality of first actuators 531 and the pressure inside the plurality of second actuators 541 constituting the plurality of clamp devices 50 may be Adjusted by a regulator 535. Therefore, since the plurality of first actuators 531 can be simultaneously controlled by one adjuster 535, the substrate S can be uniformly clamped by the plurality of clamp devices 50.

According to the substrate transfer unit of the fourth embodiment of the present invention, the pressure inside the first actuator 531 is adjusted according to the thickness of the substrate S, so that the first substrate support surface 5211 and the second of the first clamping member 521 can be adjusted The separation distance between the second substrate support surfaces 5221 of the clamping member 522. Therefore, even when the thickness of the substrate S is changed, it is not necessary to perform an additional work of changing the overall height of the jig device 50 according to the thickness of the substrate S, and the substrate S can be stably held. Therefore, the number of work processes can be reduced. In addition, by adjusting the pressure inside the second actuator 541, the posture of the first substrate support surface 5211 of the first clamping member 521 can be maintained horizontally. Therefore, even when the separation distance between the first substrate support surface 5211 of the first clamping member 521 and the second substrate support surface 5221 of the second clamping member 522 is adjusted, the first clamping member can also be The posture of the first substrate support surface 5211 of 521 is maintained horizontally, whereby the support area of the first surface of the substrate S supported on the first substrate support surface 5211 of the first clamping member 521 can be increased, thereby making it more stable The substrate S is clamped.

The exemplary embodiment of the present invention has been exemplified, and the scope of the present invention is not limited to this specific embodiment, and can be appropriately changed within the scope described in the scope of the patent application.

10: substrate transfer unit 11: Support table 111: pulley 112: Accommodation Department 13: Frame 14: First rail 15: The first tablet 18: Guide 19: Mobile components 20: substrate transfer unit 21: Transfer belt 211: Pulley 24: Second rail 25: second tablet 26: Mobile device 30: scribe unit 31: The first support frame 32: The first underline head 33: Second support frame 34: Second underline head 35: Round frame 351: Scribing wheel 50: Fixture device 51: Base 511: the first guide assembly 512: second guide assembly 513: Rotating shaft bracket 515: First actuator rotating shaft bracket 516: Second actuator rotating shaft bracket 52: clamping unit 521: First clamping part 5211: First substrate support surface 522: second clamping part 5221: Second substrate support surface 523: connecting parts 524: first rotation axis 525: Second axis of rotation 526: First support pad 527: Second support pad 528: Third axis of rotation 529: Fourth axis of rotation 53: drive unit 531: First actuator 5311: First port 5312: Second port 5313: Rotating shaft of the first actuator 5314: Rotating shaft block 532: The first driving force transmission component 533: The first driving force transmission rod 5331: First connector 534: Fluid supply source 535: Regulator 536: First line 537: Second line 538: First valve 539: Second valve 54: attitude holding unit 541: Second actuator 5411: First port 5412: Second port 5413: Rotating shaft of the second actuator 5414: Rotating shaft block 542: Second driving force transmission part 543: Second driving force transmission lever 5431: Second connector C1, C2, C5: Center EL: extension line S: substrate

FIG. 1 is a plan view showing a substrate transfer unit of a first embodiment of the present invention. 2 is a side view schematically showing the substrate transfer unit according to the first embodiment of the present invention. 3 is a side view schematically showing another example of the substrate transfer unit according to the first embodiment of the present invention. 4 is a side view schematically showing a scribing device provided with the substrate transfer unit according to the first embodiment of the present invention. 5 is a diagram schematically showing a jig device included in the substrate transfer unit according to the first embodiment of the present invention. 6 and 7 are diagrams schematically showing the operating state of the clamp device included in the substrate transfer unit according to the first embodiment of the present invention. 8 is a diagram schematically showing a jig device included in the substrate transfer unit according to the second embodiment of the present invention. 9 and 10 are diagrams schematically showing a jig device included in the substrate transfer unit according to the third embodiment of the present invention. 11 is a diagram schematically showing a jig device included in a substrate transfer unit according to a fourth embodiment of the present invention. 12 and 13 are diagrams schematically showing the operating state of the jig device included in the substrate transfer unit according to the fourth embodiment of the present invention.

10: substrate transfer unit

11: Support table

112: Accommodation Department

13: Frame

14: First rail

50: Fixture device

Claims (10)

A substrate transfer unit, including: The support table is configured to support the substrate; A frame provided above the support table and configured to move in the direction of transferring the substrate; and The fixture device is mounted on the frame and is configured to clamp the substrate, The clamp device includes: The first clamping member has a substrate supporting surface supporting the first surface of the substrate, and is rotatably connected to the rotating shaft; A second clamping member having a substrate supporting surface supporting the second surface of the substrate; and The actuator is connected to the first clamping member via the driving force transmission member and the driving force transmission rod, and is configured to rotate the first clamping member about the rotation axis. The substrate transfer unit according to claim 1, wherein a front end of the first clamping member facing the substrate is arc-shaped. The substrate transfer unit according to claim 1, wherein a plurality of clamp devices are mounted on the frame, and pressure inside the plurality of actuators constituting the plurality of clamp devices is adjusted by one regulator. The substrate transfer unit according to claim 1, wherein a support pad is attached to the substrate support surface of the first clamping member or the substrate support surface of the second clamping member, and the support pad is formed by It is formed from a material with greater elasticity. The substrate transfer unit according to claim 1, wherein the support area of the first surface of the substrate supported on the substrate support surface of the first clamping member is smaller than the substrate support surface supported on the second clamping member The support area on the second surface of the substrate. A substrate transfer unit, including: The support table is configured to support the substrate; A frame provided above the support table and configured to move in the direction of transferring the substrate; and The fixture device is mounted on the frame and is configured to clamp the substrate, The clamp device includes: The first clamping member has a substrate supporting surface supporting the first surface of the substrate, and is rotatably connected to the first rotating shaft; A second clamping member having a substrate supporting surface supporting the second surface of the substrate; The first actuator is connected to the first clamping member through the first driving force transmission member and the first driving force transmission rod, and is configured to rotate the first clamping member about the first rotation axis; as well as The posture holding unit maintains the posture of the first clamping member so that the substrate supporting surface of the first clamping member is parallel to the substrate supporting surface of the second clamping member. The substrate transfer unit according to claim 6, wherein: The first driving force transmission rod is connected to the first clamping member through a second rotating shaft, The posture holding unit includes a second actuator, the second actuator is connected to the first clamping member through a second driving force transmission member and a second driving force transmission lever, and is configured such that the first A clamping member rotates around a third rotation axis spaced apart from the first rotation axis and the second rotation axis. The substrate transfer unit according to claim 7, wherein the pressure inside the first actuator and the pressure inside the second actuator are adjusted by the same regulator. The substrate transfer unit according to claim 7, wherein a plurality of jig devices are installed in the frame, the pressure inside the plurality of first actuators constituting the plurality of jig devices, and the plurality of second actuators The pressure inside the actuator is regulated by a regulator. A scribing device includes the substrate transfer unit according to any one of claims 1 to 9.

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