TWM573075U - Positioning jig of probe head - Google Patents

Abstract

The present disclosure provides a probe head positioning fixture, comprising: a substrate; a first positioning hole formed on the substrate for accommodating the first probe head, and the first positioning hole defines a first lateral direction on the substrate a limiting wall and a first longitudinal limiting wall; and a second positioning hole formed on the substrate for accommodating the second probe head, and the second positioning hole defines a second lateral limiting wall on the substrate And a second longitudinal limiting wall, wherein the first probe head and the second probe head are assembled on the substrate, the first probe head simultaneously abuts the first lateral limiting wall and the first a longitudinal limiting wall, and the second probe head simultaneously abuts the second lateral limiting wall and the second longitudinal limiting wall; and wherein the first lateral limiting wall and the second lateral limiting wall On the same line.

Description

Probe head positioning fixture

The present disclosure relates to a positioning fixture, and more particularly to a positioning fixture for positioning a plurality of probe heads at specific locations, respectively.

In recent years, as electronic products have moved toward precision and multi-functionality, the wafer structure of integrated circuits used in electronic products has also become more complicated. Batch production is usually carried out in the manufacture of wafers. In order to ensure the electrical quality of the wafer, the wafer is first measured before being packaged, so that the user can further reject the bad wafer according to the measurement result. The existing wafer testing device is composed of a test circuit board, an intermediate carrier, a plurality of probes, and a probe head, wherein a plurality of probes are assembled on the probe head, and the intermediate carrier is Used for electrical contact with the test board. During the measurement, the wafer to be tested is in contact with one end of the probe, so that the test signal is transmitted from the test circuit board to the interposer carrier via the transmission path, and then transmitted to the wafer through the probe for wafer testing.

Please refer to FIG. 1, which shows a schematic structural view of a probe head. The probe head 1 is a mechanism for fixing a plurality of probes and providing uniform operation of the probes. Since the probe head 1 is complicated in structure, it includes various components such as a guide plate, a pressure-proof gasket, a gasket, and the like. Therefore, the current probe head 1 mainly adopts a design in which a plurality of component layers are stacked one on another, and it is difficult to form an integral molding.

In addition, in order to match the precise distance between the upper die and the scribe line of the wafer, the test shop or customer needs to use two device under test (DUT) or multiple DUT tests to improve test efficiency and reduce production costs. Therefore, a plurality of juxtaposed probe heads must be provided correspondingly to the positions of the plurality of DUTs. However, when setting the probe head, the two adjacent probe heads need to be exactly the same in angle, parallelism, and perpendicularity, and juxtaposed in an almost error-free manner, so the second probe head must rely on labor. The way to perform precise alignment and adjustment results in operational difficulties and labor costs.

In view of the above, it is necessary to provide a probe head positioning jig to solve the problems of the prior art.

In order to solve the above technical problem, an object of the present disclosure is to provide a probe head positioning jig, which is provided with a plurality of juxtaposed positioning structures on a substrate of a positioning jig for accommodating different probe heads, and each The parameters of the positioning structure, the arrangement angle, the configuration and the like are completely identical, so that the two adjacent probe heads are juxtaposed in an almost error-free manner.

In order to achieve the above object, the present disclosure provides a probe head positioning fixture, comprising: a substrate; a first positioning hole formed on the substrate for accommodating a first probe head, and the first positioning hole Defining a first lateral limiting wall and a first longitudinal limiting wall on the substrate; and a second positioning hole formed on the substrate for accommodating a second probe head, and the second positioning The hole defines a second lateral limiting wall and a second longitudinal limiting wall on the substrate, wherein the first probe head and the second probe head are assembled on the substrate, the first probe head Simultaneously abutting the first lateral limiting wall and the first longitudinal limiting wall, and the second probe head simultaneously abuts the second lateral limiting wall and the second longitudinal limiting wall; and wherein the first Lateral limit wall and the second cross The limit wall is on the same line.

In a preferred embodiment of the present disclosure, the first longitudinal limiting wall and the second longitudinal limiting wall are parallel to each other.

In a preferred embodiment of the present disclosure, the first lateral limiting wall and the first longitudinal limiting wall are adjacent to each other.

In a preferred embodiment of the present disclosure, the first lateral limiting wall and the first longitudinal limiting wall intersect each other to define a first limiting angle.

In a preferred embodiment of the present disclosure, the first limit angle is a right angle.

In a preferred embodiment of the present disclosure, the second lateral limiting wall and the second longitudinal limiting wall are adjacent to each other.

In a preferred embodiment of the present disclosure, the second lateral limiting wall and the second longitudinal limiting wall intersect each other to define a second limiting angle.

In a preferred embodiment of the present disclosure, the second limit angle is a right angle.

In a preferred embodiment of the present disclosure, the first limiting hole and the second limiting hole are rectangular.

In a preferred embodiment of the present disclosure, the first limiting hole and the second limiting hole are stepped holes.

In a preferred embodiment of the present disclosure, the first lateral limiting wall is the same length as the second lateral limiting wall.

In a preferred embodiment of the present disclosure, the first lateral limiting wall and the first longitudinal limiting wall have the same length.

Compared to prior art, the present disclosure provides a first positioning of the probe by positioning the probe head The parameters such as the size, the arrangement angle, and the configuration of the hole and the second positioning hole are completely identical, and the first probe head and the second probe head are respectively abutted against the specific limit wall and the limit angle. The first probe head and the second probe head thus placed in the first positioning hole and the second positioning hole are exactly the same in angle, parallelism and perpendicularity, so the first probe head The second probe head is assembled side by side on the substrate in an almost error-free manner.

1, 2, 3 ‧ ‧ probe head

10‧‧‧Probe head positioning fixture

11‧‧‧Substrate

12‧‧‧First positioning hole

121‧‧‧First lateral limit wall

122‧‧‧First longitudinal limit wall

13‧‧‧Second positioning hole

131‧‧‧Second horizontal limit wall

132‧‧‧Second longitudinal limit wall

Θ1 ‧‧‧first limit angle

a second stop angle θ2 ‧‧‧

A-A‧‧‧ cut line

1 is a schematic view showing the structure of a probe head; FIG. 2 is a perspective view showing a probe head positioning jig according to a preferred embodiment of the present disclosure; and FIG. 3 is a cross-sectional view taken along line AA of FIG. A series of cross-sectional views showing the alignment of the probe head using the probe head positioning fixture.

The above and other objects, features, and advantages of the present invention will become more apparent and understood.

Referring to FIG. 2, a perspective view of a probe head positioning fixture 10 in accordance with a preferred embodiment of the present disclosure is shown. The probe head positioning fixture 10 includes a substrate 11, a first positioning hole 12, and a second positioning hole 13, wherein the first positioning hole 12 and the second positioning hole 13 are formed on the substrate 11, and the first positioning hole 12 is used The first probe head 2 (see FIG. 3) is accommodated, and the second positioning hole 13 is for accommodating the second probe head 3 (refer to FIG. 3). It should be noted that the number of positioning holes in the present disclosure is merely an example, and two or more positioning holes may be provided in other embodiments, without being limited thereto.

As shown in FIG. 2, the first positioning hole 12 is a rectangular opening penetrating through opposite sides of the substrate 11, such that the first positioning hole 12 defines a circle of surrounding holes on the substrate 11, the hole wall including the first lateral direction. The limiting wall 121 and the first longitudinal limiting wall 122, wherein the first lateral limiting wall 121 extends along the X direction, and the first longitudinal limiting wall 122 extends along the Y direction. In the present embodiment, the first lateral limiting wall 121 and the first longitudinal limiting wall 122 are adjacent to each other, and the two intersect each other to define a first limiting angle θ1 .

As shown in FIG. 2, the second positioning hole 13 is a rectangular opening penetrating the opposite sides of the substrate 11, so that the second positioning hole 13 defines a circle of surrounding holes on the substrate 11, and the hole wall includes The second lateral limiting wall 131 and the second longitudinal limiting wall 132, wherein the second lateral limiting wall 131 extends along the X direction, and the second longitudinal limiting wall 132 extends along the Y direction. In the present embodiment, the second lateral limiting wall 131 and the second longitudinal limiting wall 132 are adjacent to each other, and the two intersect each other to define a second limiting angle θ2 .

As shown in FIG. 2, in the present disclosure, the first positioning hole 12 and the second positioning hole 13 are completely identical in size, and both are formed side by side on the substrate 11. More specifically, the first lateral limiting wall 121 has the same length as the second lateral limiting wall 131, and both are on the same straight line, that is, a straight line parallel to the X direction. Moreover, the first longitudinal limiting wall 122 is the same length as the second longitudinal limiting wall 132, and the two are parallel to each other, that is, parallel to the Y direction. Preferably, the first limit angle θ1 and the second limit angle θ2 are both designed to be substantially at right angles.

Figure 3 is a series of cross-sectional views along line AA of Figure 2 showing the alignment of the probe head using the probe head positioning fixture 10. When the first probe head 2 is placed on the substrate 11, the first probe head 2 will be positioned at an arbitrary position within the first positioning hole 12. After being placed, the first probe head 2 is moved in the Y direction such that one side of the first probe head 2 abuts against the first lateral limit wall 121, and then the first probe head 2 is followed by X. The direction is moved such that the other adjacent side abuts against the first longitudinal limiting wall 122 such that the first probe head 2 will be positioned at a particular location within the first locating aperture 12 and abut the particular first The lateral limiting wall 121, the first longitudinal limiting wall 122 and the first limiting angle θ1 .

As shown in FIG. 3, similarly, when the second probe head 3 is placed on the substrate 11, the second probe head 3 will be positioned at an arbitrary position within the second positioning hole 13. After being placed, the second probe head 3 is moved in the Y direction such that one side of the second probe head 3 abuts against the second lateral limit wall 131, and then the second probe head 3 is along the X The direction is moved such that the other adjacent side abuts against the second longitudinal limiting wall 132 such that the second probe head 3 will be positioned at a specific position within the second positioning hole 13 and abuts against a particular second The lateral limiting wall 131, the second longitudinal limiting wall 132 and the second limiting angle θ2 . With this design, the first probe head 2 and the second probe head 3 placed in the first positioning hole 12 and the second positioning hole 13 are exactly the same in angle, parallelism, and perpendicularity.

It can be understood that in the present disclosure, the first positioning hole 12 and the second positioning hole 13 are stepped holes, so that it is convenient to provide a proper locking structure on the substrate 11 to use the first probe head 2 and the second probe. The head 3 assembly is locked at the position of the first positioning hole 12 and the second positioning hole 13.

In summary, the disclosure is designed to completely conform to the parameters of the first positioning hole and the second positioning hole of the probe positioning fixture, such as the size, arrangement angle, configuration, and the like, and by using the first probe The head and the second probe head respectively abut against the specific limiting wall and the limiting angle, so that the first probe head and the second probe head placed in the first positioning hole and the second positioning hole are placed in the pendulum The angle, parallelism, and perpendicularity are exactly the same, so the first probe head and the second probe head are assembled side by side on the substrate in an almost error-free manner.

Claims (12)

A probe head positioning fixture includes: a substrate; a first positioning hole formed on the substrate for accommodating a first probe head, and the first positioning hole defines a first on the substrate a lateral limiting wall and a first longitudinal limiting wall; and a second positioning hole formed on the substrate for accommodating a second probe head, and the second positioning hole defines a first surface on the substrate a lateral limiting wall and a second longitudinal limiting wall, wherein the first probe head and the second probe head are assembled on the substrate, the first probe head simultaneously abuts the first lateral limit a wall and the first longitudinal limiting wall, and the second probe head simultaneously abuts the second lateral limiting wall and the second longitudinal limiting wall; and wherein the first lateral limiting wall and the second The lateral limit wall is on the same line. The probe head positioning fixture of claim 1, wherein the first longitudinal limiting wall and the second longitudinal limiting wall are parallel to each other. The probe head positioning fixture of claim 1, wherein the first lateral limiting wall and the first longitudinal limiting wall are adjacent to each other. The probe head positioning fixture of claim 1, wherein the first lateral limiting wall and the first longitudinal limiting wall intersect each other to define a first limiting angle. The probe head positioning fixture of claim 4, wherein the first limit angle is a right angle. The probe head positioning fixture of claim 1, wherein the second lateral limiting wall and the second longitudinal limiting wall are adjacent to each other. The probe head positioning fixture of claim 1, wherein the second lateral limiting wall and the second longitudinal limiting wall intersect each other to define a second limiting angle. The probe head positioning fixture of claim 7, wherein the second limit angle is a right angle. The probe head positioning fixture of claim 1, wherein the first positioning hole and the second positioning hole are rectangular. The probe head positioning fixture of claim 1, wherein the first positioning hole and the second positioning hole are stepped holes. The probe head positioning fixture of claim 1, wherein the first lateral limiting wall has the same length as the second lateral limiting wall. The probe head positioning fixture of claim 1, wherein the first lateral limiting wall and the first longitudinal limiting wall have the same length.