TW201305579A - High frequency calibration device for RF measurement - Google Patents

Abstract

A high frequency calibration device for RF measurement comprises a measurement machine having a carrier, a first arm and a second arm. The carrier can support a device under test. The first arm has a first probe and the second arm has a second probe. The first and second arms are disposed correspondingly to the two ends of the carrier. The first and second probes move close to or away from the carrier in a direction. A high frequency measurement system has two cables are connected to the first and second probes respectively.

Description

High frequency correction device for radio frequency measurement

The present invention relates to a high frequency correcting device, and more particularly to a high frequency correcting device for use in radio frequency measurement.

In recent years, with the development of technology, the integrated circuit design has gradually moved toward the 3D stacked high-performance chip. In order to make the 3D stacked circuit have a vertical electrical connection, it is known as a through-silicon via (Through Silicon). Via, TSV) and the vertical interconnection of vertical through-holes (PTH), and the vertical interconnects as the frequency increases and the digital signal transmission speed increases. The analysis of the high-frequency characteristics of components has become an important issue. In order for components with vertical interconnects to function properly, it is necessary to have a more accurate and faster measurement system for vertical interconnect components.

For high-frequency measurement of a Device Under Test (DUT) with a vertical interconnect, if you do not use the double-sided measurement technology, and you want to measure the device under test in the common plane, you need to pass A microstrip line and two through holes are used to convert the opposite end to a coplanar plane, so that the signal input 埠 and the signal output 埠 can be presented on the same plane. However, the microstrip line and the through hole itself also have a high frequency response, in order to distinguish the parasitic effect generated by the microstrip line and the through hole from the high frequency response of the device to be tested, in addition to the measurement process Adding a complex set of de-embedding mathematical theories and techniques, and using the de-embedding theory, is also easy to be disturbed by the high-frequency characteristics of the microstrip line, causing the high-frequency effects of the through-holes to be effectively separated. In addition, it is not economical to manufacture a test kit for the area of the de-embedded device under test on the wafer.

In the conventional measurement method, before the high-frequency response of the device to be tested is measured, a high-frequency calibration operation is performed through a calibration plate. Referring to Fig. 1, there is disclosed a radio frequency measurement system 9 (e.g., the invention of U.S. Patent No. 6,396,296), which is required to first make the two probes 92 before performing the high frequency measurement. The tips are on the same side and are frequency corrected by a conventional coplanar correction plate 81. After the step of correcting is completed, as shown in FIG. 2, a device to be tested 82 is vertically placed in the measuring system 9, and the direction of the two probes 92 is changed by rotating the probe operator 91. The directions of the two probes 92 are respectively measured for the two ends of the device under test 82. However, during the calibration to the radio frequency measurement, the action of rotating the probe operator 91 moves to the high frequency transmission cable of the measurement system 9, causing an error in the high frequency correction accuracy.

The main object of the present invention is to provide a high frequency correcting device for radio frequency measurement, which can be applied to a device under test having a vertical interconnect, and the device to be tested does not require an additional test kit.

A secondary object of the present invention is to provide a high frequency correction device for use in radio frequency measurement, which can be applied to a device under test having vertical interconnection lines and provides a higher measurement accuracy.

In order to achieve the foregoing object, the technical means used in the present invention include: a high frequency calibration device for radio frequency measurement, comprising: a measuring machine having a loading platform, a first measuring arm and a a second measuring arm for carrying a device to be tested, the first measuring arm having a first probe, the second measuring arm having a second probe, the first measuring arm and the first measuring arm Two measuring arms are oppositely disposed at two ends of the stage, and each of the first probe and the second probe respectively move along a straight track to approach or away from the stage; a high frequency measuring device has two high frequency transmissions a cable, the two high frequency transmission cables are respectively connected to the first probe and the second probe.

The high frequency calibration device for radio frequency measurement according to the present invention, wherein the high frequency signal measurement device is a network analyzer.

The high frequency correction device for radio frequency measurement according to the present invention, wherein the network analyzer has a penetration corrector.

The high frequency correction device for radio frequency measurement according to the present invention, wherein the movement path of the first probe is perpendicular to a surface of the stage toward the first probe.

The high frequency correction device for radio frequency measurement according to the present invention, wherein the movement path of the second probe is perpendicular to a surface of the stage toward the second probe.

The above and other objects, features and advantages of the present invention will become more <RTIgt; Reciprocity means that for a pair of networks, if the S _{12 of} the S parameter is equal to S ₂₁ , the dual network has reciprocity. Since it is easily understood by those skilled in the art, it will not be described here.

The "Device Under Test (DUT)" as used in the present invention refers to a circuit having a vertical interconnect design, and the input port of the circuit has reciprocity with the output port.

Referring to FIG. 3, the preferred embodiment of the present invention is applied to a high frequency calibration device for radio frequency measurement, comprising a measuring machine 1 and a high frequency measuring device 2, wherein the measuring machine 1 transmits a The high frequency transmission cable is coupled to the high frequency measuring device 2.

The measuring machine 1 has a loading platform 11, a first measuring arm 12 and a second measuring arm 13. The stage 11 can be used to stably carry a device to be tested.

The first measuring arm 12 and the second measuring arm 13 are respectively disposed on opposite sides of the stage 11, for example, at the upper and lower ends of the stage 11 (in terms of the drawing), the first measurement The arm 12 has a first probe 121, and the second measuring arm 13 has a second probe 131. The first probe 121 and the second probe 131 can be directed to the stage 11 by two opposite directions. The movement trajectory of a probe 121 is perpendicular to the surface of the stage 11 facing the first probe 121, and the movement trajectory of the second probe 131 is perpendicular to the surface of the stage 11 facing the second probe 131, and The opposite ends of the stage 11 abut the device to be tested placed on the stage 11, so that the first probe 121 and the second probe 131 can measure or perform a correcting action on the device to be tested.

The high frequency measuring device 2 has two high frequency transmission cables 21 and 22, and the two high frequency transmission cables 21 and 22 are respectively connected to the first probe 121 and the second probe 131. The two high frequency transmission cables 21, 22, the data sensed by the first probe 121 of the first measuring arm 12 and the second probe 131 of the second measuring arm 13 can be transmitted to the high-frequency measuring device 2. The high-frequency measuring device 2 is used for radio frequency measurement, preferably a network analyzer, and is provided with a correction software, so that the measuring machine 1 can perform high-frequency correction through the correction software. The correction software provides a short circuit, an open circuit and a load correction, and has a penetration corrector for penetration correction.

Referring to FIG. 4, when the present invention is applied to a high-frequency correction device for radio frequency measurement, the high-frequency measurement device 2 is combined with the calibration device 3 and implemented with a calibration plate 3. Correction. The correcting step includes a machine selecting step S1, selecting a measuring machine having two measuring arms; a probe selecting step S2, determining a type of the probe of the measuring machine according to the device to be tested; The calibration board selects step S3, and finds a corresponding calibration board according to the probe; a parameter input step S4, inputting one short-circuit parameter, an open-circuit parameter and a load parameter corresponding to the probe; and a correcting step S5, performing The high frequency correction of the measuring machine.

Referring to FIG. 3 and FIG. 4, the machine selects step S1, and preferably selects the measuring machine 1 of the embodiment. The measuring machine 1 is suitable for radio frequency measurement and has the correcting plate. The first measuring arm 12 and the second measuring arm 13 of the measuring machine 1 are disposed opposite to the two ends of the loading table 11 , and the first measuring arm 12 and the second measuring unit When the measuring device 1 performs the correcting action or the radio frequency measurement, the first probe 121 and the second probe 131 can abut the correcting plate 3 from the opposite ends. Or the device under test.

Referring to FIG. 3 and FIG. 4 again, the probe selects step S2, and determines the types of the first probe 121 and the second probe 131 of the measuring machine 1 according to the type of the device to be tested. It must be noted that the high frequency correction method of the present invention is directed to a device under test having vertical interconnects and reciprocity. The types of the first probe 121 and the second probe 131 are determined according to the signal configuration of the input port and the output port of the device under test, and the pitch of the signal configuration. In detail, the input port and output port of the device under test may be a signal configuration of GS (Ground-Signal), GSG or GGSSG, and the spacing of the signal configuration is two adjacent legs of GS, GSG or GGSSG. The distance between the bits. The pitch of the signal configuration can be divided into short pitches of 100 to 250 μm and long pitches of 250 to 1250 μm. In this embodiment, the present invention selects the input 埠 and output 埠 of the device under test to be a signal configuration of the GSG, and a pitch of 250 μm, and at the same time, the types of the first probe 121 and the second probe 131 are selected to correspond. GSG signal configuration probe with GSG three-terminal pin. However, the target device to be tested of the present invention is not limited thereto.

Referring to FIGS. 3 to 5, the calibration plate selects step S3, and the corresponding calibration plate 3 is found according to the types of the first probe 121 and the second probe 131. In detail, in the present embodiment, the appropriate correction plate 3 is determined based on the pins of the probe G-S-G and the pitch of 250 μm. Please refer to FIG. 4, which is a partial schematic diagram of the calibration plate 3 determined in the step S3 of the calibration plate of the present invention corresponding to the G-S-G signal configuration. The calibration plate 3 has at least two correction patterns 31 and 32. The correction pattern 31 has a first abutting portion 311, a second abutting portion 312 and a third abutting portion 313. Similarly, the correction pattern 32 has a first abutting portion 321 , a second abutting portion 322 , and a third abutting portion 323 .

Referring to FIG. 3 and FIG. 4 again, the parameter input step S4 is to input a short circuit parameter, an open circuit parameter and a load parameter corresponding to the first probe 121 and the second probe 131 into the high frequency amount. Measuring device 2. The short circuit, the open circuit and the load parameter can be queried according to the type of the first probe 121 and the second probe 131. In the embodiment, the first probe 121 represents the connection input during the measurement.第二, the second probe 131 represents the connection output 量 when measuring, and when the correction of the input 埠 and the output 欲 is to be performed, the parameter values corresponding to the first probe 121 and the second probe 131 are input. .

Referring to FIG. 3 to FIG. 5 again, the correcting step S5 is performed by using the first probe 121 and the second probe 131 to perform an input short circuit and an output short circuit (Short) of the device to be tested. Open and load corrections are performed, and a high-voltage measurement device 2 performs a penetration (Thru) parameter correction between the input and output ports.

First, the short correction of the input 埠 is performed. In the correction item, the first probe 121 and the second probe 131 are brought into contact with the first correction pattern 31 of the correction plate 3. The abutting manner is that the three ends of the G-S-G of the first probe 121 respectively contact the first abutting portion 311, the second abutting portion 312 and the third abutting portion 313 of the first correcting pattern 31. Accordingly, the correction software of the high-frequency measuring device 2 can be operated to perform short-circuit correction. Next, the load correction of the input port is performed. When the item is corrected, the first probe 121 needs to be changed to abut the second correction pattern 32 of the correction plate 3. The abutting manner is that the G-S-G three ends of the first probe 121 respectively contact the first abutting portion 321 , the second abutting portion 322 and the third abutting portion 323 of the second correcting pattern 32 . According to this, the correction software of the high-frequency measuring device 2 can be operated to perform load correction. Finally, the open circuit correction of the input port is performed. When the item is corrected, the first probe 121 needs to be floated, that is, it does not abut any correction pattern. Accordingly, the correction software of the high-frequency measuring device 2 can be operated to perform open circuit correction.

So far, the correction step S5 of the present invention has completed the short circuit, open circuit and load correction of the input port of the device under test. Then, short circuit, open circuit and load correction of the input port of the device under test are performed. By moving the correction plate 3 on the stage 11, the correction plate 3 can be corrected in the same manner as the short circuit, open circuit and load of the output of the device under test. Accordingly, the correcting step S5 of the present invention can perform short circuit, open circuit and load correction for both the input port and the output port of the device under test.

The last correction item of the correction step S5 of the present invention performs the penetration correction between the input port and the output port of the device under test. The correction is performed by operating the correction software of the high-frequency measuring device 2 to perform an unknown thru correction. At this time, the penetration parameter (for example, time delay and power loss) between the input device and the output port of the device under test can pass through the penetration corrector of the high-frequency measuring device 2 (Adapter). ) calculated. So far, the high frequency correction method of the present invention has been completed.

After the high frequency correction of the present invention is completed, since the tips of the first probe 121 and the second probe 131 are respectively directed to the stage 11 by the upper and lower ends (in terms of the drawing), the correction plate 3 can be moved. In addition, the device to be tested is placed on the stage 11 to perform high frequency testing related to the device to be tested. According to the high-frequency calibration device of the present invention, the first probe 121 and the second probe 131 do not need to be rotated by 90 degrees, and the high-frequency transmission cable can be prevented from moving due to the rotation of the first probe 12 and the second probe 13. Lines 21, 22, in turn, affect the shortcomings of high frequency correction accuracy.

Compared with the conventional practice, it is necessary to open the through-holes of the microstrip line and the vertical interconnect line on the device to be tested to convert the different end faces into a coplanar plane, thus requiring the use of complicated de-embedding calculations and the cost-producing test suite. The high-frequency calibration device of the present invention can eliminate the need for the micro-belt line and the vertical interconnection line through the hole of the device to be tested under the premise of reciprocity of the device to be tested, thereby eliminating the relevant de-embedding calculation. And save the area of the wafer.

The invention is applied to a high frequency calibration device for radio frequency measurement, and the measurement machine can be applied to a device to be tested having a vertical interconnection, and has the effect of making the device to be tested unnecessary to additionally add a test suite.

The invention is applied to a high frequency calibration device for radio frequency measurement, and the measurement machine can be applied to a device to be tested having a vertical interconnection line, and has the effect of providing a higher measurement accuracy.

While the invention has been described in connection with the preferred embodiments described above, it is not intended to limit the scope of the invention. The technical scope of the invention is protected, and therefore the scope of the invention is defined by the scope of the appended claims.

[this invention]

1. . . Measuring machine

11. . . Loading platform

12. . . First measuring arm

121. . . First probe

13. . . Second measuring arm

131. . . Second probe

2. . . High frequency measuring device

twenty one. . . High frequency transmission cable

twenty two. . . High frequency transmission cable

3. . . Calibration board

31. . . First correction pattern

311. . . First abutment

312. . . Second abutment

313. . . Third abutment

32. . . Second correction pattern

321. . . First abutment

322. . . Second abutment

323. . . Third abutment

S1. . . Machine selection step

S2. . . Probe selection step

S3. . . Calibration board selection step

S4. . . Parameter input step

S5. . . Correction step

[知知]

8. . . Device under test

9. . . Measuring system

91. . . Probe operator

92. . . Probe

Figure 1: Schematic diagram of the conventional RF measurement system architecture correction.

Figure 2: Schematic diagram of the conventional RF measurement system architecture measurement.

Figure 3 is a block diagram showing the architecture of a measurement system in accordance with a preferred embodiment of the present invention.

Figure 4 is a flow chart of a preferred embodiment of the invention.

Figure 5 is a partial schematic view of a calibration plate in accordance with a preferred embodiment of the present invention.

1. . . Measuring machine

11. . . Loading platform

12. . . First measuring arm

121. . . First probe

13. . . Second measuring arm

131. . . Second probe

2. . . High frequency measuring device

twenty one. . . High frequency transmission cable

twenty two. . . High frequency transmission cable

Claims (5)

A high frequency calibration device for radio frequency measurement comprises: a measuring machine having a loading platform, a first measuring arm and a second measuring arm, wherein the loading platform is configured to carry a device to be tested, The first measuring arm has a first probe, and the second measuring arm has a second probe. The first measuring arm and the second measuring arm are opposite to each other at the two ends of the loading platform. The first probe and the second probe respectively move along a straight track to approach or away from the stage; a high frequency measuring device has two high frequency transmission cables, and the two high frequency transmission cables are respectively connected to the first probe Needle and second probe. The high frequency calibration device according to claim 1, wherein the high frequency measurement device is a network analyzer. The high frequency calibration device of claim 2, wherein the network analyzer has a penetration corrector. The high frequency correcting device according to claim 1, wherein the movement path of the first probe is perpendicular to a surface of the stage toward the first probe. The high frequency correcting device according to claim 1, wherein the movement path of the second probe is perpendicular to a surface of the stage toward the second probe.