TWM570303U - Intelligent pallet - Google Patents

Abstract

A smart pallet comprising a pallet base and a sensing device. The sensing device includes at least one sensor disposed on the pallet base.

Description

Wisdom pallet

The present invention relates to a carrier, and more particularly to a smart pallet capable of transporting articles.

Today's technology products are becoming more sophisticated, so the protection requirements for transportation are also increasing. For example, in wafers used in semiconductor processes, when wafers are transported in an external environment outside the semiconductor factory, the wafers are typically placed in a clean substrate container, such as a front opening shipping box. In FOSB, when a plurality of clean substrate containers are transported, they are usually carried by a pallet to carry the clean substrate containers.

However, conventional pallets do not have a protective or buffer structure, and monitoring/monitoring functions that do not provide sufficient protection, nor allow the carrier/transporter to confirm the status of the loaded wafer and carry it through the pallet. When the clean substrate container is transported, the quality of the wafer is often affected by factors such as collisions. Therefore, it is necessary to detect and control the state in which the pallet carries the clean substrate containers during transportation.

Therefore, the purpose of the present invention is to provide a smart pallet.

Therefore, the novel smart pallet is suitable for carrying at least one object, and comprises a pallet seat and a sensing device.

The sensing device includes at least one sensor disposed on the pallet base.

The utility model has the effect that by providing the sensing device on the pallet seat, the weight state of the pallet seat can be instantly detected or transmitted through the remote end during the transportation of the object carried by the smart pallet. Monitor and locate the position information of the pallet seat.

Referring to FIG. 1 and FIG. 2, an embodiment of the present smart pallet is adapted to carry a plurality of objects. The smart pallet includes a pallet base 2, a sensing device 3 disposed on the pallet base 2, and An identification means 4 and a transmission means 5 are disposed on the pallet base 2. Such objects may be, for example, clean substrate containers, which may be closed clean containers conventionally used in various industries such as semiconductor, solar or optoelectronics, such as photomask boxes, wafer cassettes, and the like. In the present embodiment, the former open wafer transport cassette (FOSB) is used as an example.

The sensing device 3 includes a plurality of sensors disposed on the pallet base 2, and can be used to sense the state of the pallet base 2. The type of the sensor is not particularly limited, and optical inductors can be installed, for example, as needed. Detector, pressure sensor, or position sensor. Preferably, in the embodiment, the sensing device 3 includes a pressure sensor 31 disposed on the pallet base 2, and a weight reminder 32 disposed on the pallet base 2 and a sense of position. Detector 33.

Specifically, the pressure sensor 31 is disposed at a bottom of the pallet base 2, and the weight prompter 32 and the position sensor 33 are disposed around the side of the pallet seat 2. The pressure sensing 31 is electrically connected to the weight prompting device 32, and is configured to sense the carrying state of the pallet seat 2 on the carrying object, and can be displayed through the light indicator of the weight prompting device 32 to prevent the packaging material. Abnormal state such as shortage or wafer shortage. In addition, the location sensor 33 can be remotely connected to the external portable device for remotely receiving location information and location tracking of the smart pallet.

The smart pallet of the embodiment further includes the identification means 4 for identifying the electronic information of the smart pallet. The identification means 4 can adopt a barcode, including a one-dimensional barcode or a fast response matrix code (QR). A two-dimensional bar code, such as code), or a radio frequency identification tag (RFID tag) for easy identification or management by an operator or automation device. In addition, the transmission device 5 is electrically connected to the sensing device 3 for receiving and outputting the data sensed by the sensing device 3. The transmission device 5 can be a wired electronic device connection port or a wireless transmission device, which is not limited in this embodiment. The transmission device 5 is electrically connected to the sensing device 3 to receive the data it senses, and then output the data to the outside for monitoring or recording.

It should be noted that the smart pallet can further include a battery unit (not shown) for supplying the sensing device 3 and the power required by the transmission device 5, the battery unit is in addition to the detachable dry battery. A solar charging module electrically connected to the sensing device 3 and the transmitting device 5 may be additionally provided to generate electric energy by itself to provide power required by the sensors.

Referring to FIG. 3 and FIG. 4, the pallet base 2 includes a base body 21 having a rectangular shape, a plurality of recesses 22 recessed by an upper surface of the base body 21, and a plurality of recesses 22 respectively disposed in the recesses 22. The anti-vibration member 23 and a support module 25 disposed on the base 21 are supported by the anti-vibration member 23 for supporting the support module 25.

The anti-vibration members 23 are used to support the carrying module 25 and to isolate vibrations transmitted from the pallet base 2. The anti-vibration members 23 can be made of various materials or structures, for example, anti-vibration rubber blocks 231 made of natural rubber, silicone rubber, or the like, or spiral shockproof materials made of metal, plastic or composite materials. 232. This embodiment does not limit this, as long as the support and shockproof effects can be achieved.

Preferably, the grooves 22 are equally arranged in an array on the base body 21. In the embodiment, the nine grooves 22 are taken as an example for illustration, and the nine grooves 22 are respectively It is formed at the center of the base body 21, at four corners, and between the corners, and the anti-vibration members 23 are a plurality of anti-vibration rubber blocks 231 and a plurality of spiral shock absorbers 232, respectively. In detail, the anti-vibration rubber blocks 231 are disposed in the recesses 22 located at the four corners, and the spiral anti-vibration 232 is disposed between the anti-vibration rubber blocks 231, that is, to allow such The anti-vibration member 23 is disposed on the outer periphery of the base body 21 in interaction with the spiral shock absorbers 232.

Among them, the anti-vibration rubber block 231 mainly provides the isolation for the vertical ground direction vibration; when the smart pallet is used to carry the object such as the clean substrate container, the spiral shock absorber 232 is directed to the wafer in the clean substrate container. The stacking directions are set in the same direction to provide isolation for shaking or vibration along the direction. The shock-proof members 23 of the two different structures provide a better shock-proof effect.

Referring to FIG. 5 and FIG. 6 , the support module 25 includes two anti-vibration pieces 251 spaced apart from each other, and a plurality of anti-vibration blocks 255 disposed between the anti-vibration pieces 251 . Each of the anti-vibration pieces 251 has an inner layer 252, an outer layer 253, and a porous structure 254 between the inner layer 252 and the outer layer 253. Preferably, the porous structure 254 can be a honeycomb structure. In this way, the weight of the anti-vibration piece 251 can be greatly reduced under the premise of having extremely high structural strength, and the transportation cost can be achieved. It should be noted that the anti-vibration block 255 is made of a shock absorbing material and can be made of natural rubber, silicone rubber, or the like. In the embodiment, the shock absorbing material is exemplified by a silicone rubber, and the support is further described. The module 25 is not limited to the use of two pieces of the anti-vibration piece 251, and only a single piece of the anti-vibration piece 251 having the porous structure 254 may be used.

The material suitable for the anti-vibration piece 251 is selected from the group consisting of polypropylene (PP), and the polypropylene (PP) is matched with the porous (honeycomb) structure, so that the support module 25 has light weight, high bearing capacity and durability, and is waterproof. The utility model has the advantages of dustproof and good heat insulation; the body 21 of the pallet seat 2 is manufactured by gas-assisted injection molding, air blowing molding or double-layer plastic molding to make the pallet seat 2 hollow and light. Quantitative design to avoid dents, shrinkage, warpage at thick dimensions, shorten molding cycle, and increase overall strength.

The support module 25, the anti-vibration rubber blocks 231 are disposed on the pallet base 2, and the spiral shock absorbers 232 are matched with each other to enhance the anti-shock effect when the objects are carried.

In summary, the smart pallet of the present invention, by providing the sensing device 3 on the pallet base 2, can instantly detect the pallet seat during the transportation of the smart pallet carrying the objects. Receiving the weight state or positioning information of the pallet seat 2 through the remote monitoring, and further, the supporting module 25 is disposed on the base 21 and the anti-vibration rubber blocks 231 and the spiral shock absorbers 232 are mutually In combination, in addition to being able to increase the load carrying gravity, the objects carried thereon can also have the effect of damping and buffering, so that the object of the present invention can be achieved.

However, the above is only the embodiment of the present invention, and when it is not possible to limit the scope of the present invention, all the simple equivalent changes and modifications according to the scope of the patent application and the contents of the patent specification are still This new patent covers the scope.

2‧‧‧Stack base

253‧‧‧ outer layer

21‧‧‧ base

254‧‧‧Porous structure

22‧‧‧ Groove

255‧‧‧Anti-vibration block

23‧‧‧Anti-vibration parts

3‧‧‧Sensing device

231‧‧‧Anti-vibration rubber block

31‧‧‧ Pressure Sensor

232‧‧‧Spiral shock absorber

32‧‧‧ Weight reminder

25‧‧‧Support module

33‧‧‧ position sensor

251‧‧‧Anti-vibration film

4‧‧‧ Identification means

252‧‧‧ inner layer

5‧‧‧Transportation device

Other features and advantages of the present invention will be apparent from the embodiments of the present invention, wherein: FIG. 1 is a perspective view illustrating an embodiment of the present invention; FIG. 2 is a perspective view illustrating the implementation FIG. 3 is a partially enlarged view showing a shockproof rubber block of the pallet seat; FIG. 4 is a partially enlarged view showing a spiral shock absorber of the pallet seat; FIG. A side view illustrating a support module of the embodiment; and FIG. 6 is a side view illustrating the structure of the two anti-vibration pieces of the support module.

Claims (23)

A smart pallet comprising: a pallet base; and a sensing device comprising at least one sensor disposed on the pallet mount. The smart pallet of claim 1, wherein the sensing device comprises a plurality of sensors. The smart pallet of claim 1, wherein the sensor comprises a pressure sensor. The smart pallet of claim 1, wherein the sensor comprises a position sensor. The smart pallet of claim 1, wherein the sensor comprises a photo-sensitometer. The smart pallet of claim 3, wherein the sensing device further comprises a weight reminder disposed on the pallet seat, the pressure sensor being disposed at a bottom of the pallet base and electrically connecting the A weight reminder for sensing and displaying or indicating the weight status of the pallet seat. The smart pallet as claimed in claim 1, wherein the pallet base comprises a base body and a support module disposed on the base body. The smart pallet as claimed in claim 7, wherein the support module comprises a shockproof sheet. The smart pallet as claimed in claim 7, wherein the supporting module comprises two phase-separated anti-vibration pieces, and a plurality of anti-vibration blocks arranged between the anti-vibration pieces. The smart pallet of claim 7 or 8, wherein each of the anti-vibration sheets has an inner layer, an outer layer, and a porous structure between the inner layer and the outer layer. The smart pallet according to claim 7, wherein the pallet base further comprises a plurality of recesses recessed by an upper surface of the base body, and a plurality of anti-vibration members respectively disposed in the recesses, Support the support module. The smart pallet as claimed in claim 11, wherein any one of the anti-vibration members is a shockproof rubber block. The smart pallet as claimed in claim 11, wherein any one of the anti-vibration members is a spiral shock absorber. The smart pallet as claimed in claim 11, wherein the anti-vibration members are respectively disposed in the grooves by a plurality of anti-vibration rubber blocks and a plurality of spiral shock absorbers. The smart pallet as claimed in claim 13 or 14, wherein the spiral shock absorbers are disposed in the same direction. The smart pallet as claimed in claim 9, wherein the anti-vibration blocks are made of a shock absorbing material. The smart pallet as claimed in claim 16, wherein the shock absorbing material is silicone. The smart pallet as claimed in claim 8 or 9, wherein the shockproof sheet is made of polypropylene. The smart pallet as claimed in claim 1 further includes an identification means. The smart pallet as claimed in claim 19, wherein the identification means is a code or a radio frequency identification tag. The smart pallet as claimed in claim 1, further comprising a transmission device for outputting the data sensed by the sensing device, the transmission device being electrically connected to the sensing device. The smart pallet as claimed in claim 21, wherein the transmission device is a wireless transmission device. The smart pallet of claim 1, further comprising a solar charging module disposed on the pallet, and the solar charging module is electrically connected to the sensing device.