TWI830502B - A fixture that automatically measures the flow rate of the mask carrier - Google Patents

Abstract

A fixture that automatically measures the flow rate of a mask carrier, including: a fixture body, a flow detection module, a wireless communication module, a capacitor and a wireless charging receiving module. The fixture body has a storage space, at least one air inlet and at least one air outlet connected to the storage space. The flow detection module includes a flow meter and a flow display signal connected to the flow meter. The flow meter is arranged in the storage space. The wireless communication module signal Connect the flow meter, the capacitor is electrically connected to the flow detection module and the wireless communication module, and the wireless charging receiving module is set at the bottom of the fixture body and electrically connected to the capacitor. The fixture for automatically measuring the flow rate of a reticle carrier of the present invention solves the problem that it is difficult to detect abnormal gas flow rate when the gas flow rate is invisible.

Description

A fixture for automatically measuring the flow rate of a mask carrier

The present invention relates to a fixture for detecting flow, and more particularly, to a fixture for automatically measuring the flow of a mask carrier.

In the advanced lithography process in the semiconductor field, especially the EUV (extreme ultraviolet light) lithography process, the cleanliness of the process environment is extremely high. If particles contaminate the photomask, it will cause defects in the lithography process. In order to meet the requirements of cleanliness and protection of the photomask, a photomask box is generally used to block external dust particles. Therefore, the cleanliness of the mask box itself is very important. The general cleaning method is to introduce clean gas (compressed dry gas or nitrogen) into the mask box to remove dust particles.

However, if the injected gas is too high or too low, the mask and mask box may deteriorate or be damaged. In order to avoid abnormal flow of supplied gas, the gas flow at the source end of the mask box will be as stable as possible. Even so, flow abnormalities occasionally occur, and gas flow is difficult to detect without visual inspection.

Therefore, in order to solve various problems of conventional reticle carriers, the present invention proposes a fixture for automatically measuring the flow rate of reticle carriers.

In order to achieve the above objects and other objects, the present invention proposes a fixture for automatically measuring the flow rate of a mask carrier, which includes: a fixture body having a storage space, at least one air inlet connected to the storage space, and at least an air outlet; a flow detection module, including a flow meter and a flow display signal connected to the flow meter, the flow meter is arranged in the storage space; a wireless communication module, the signal connected to the flow meter; A capacitor is electrically connected to the flow detection module and the wireless communication module; and a wireless charging receiving module is provided at the bottom of the fixture body and is electrically connected to the capacitor.

In one embodiment of the present invention, a power indicator is further included, electrically connected to the capacitor.

In one embodiment of the present invention, a wireless charging transmitting module is further included, wirelessly and electrically connected to the wireless charging receiving module.

In one embodiment of the present invention, the flow detection module further includes a start switch, and the signal is connected to the flow meter.

In one embodiment of the present invention, the wireless communication module is a Bluetooth communication module.

In one embodiment of the present invention, the fixture body is provided with a wired charging interface.

In one embodiment of the present invention, a carrying handle is provided on the top of the jig body.

In this way, the fixture for automatically measuring the flow rate of the mask carrier of the present invention can detect abnormal gas flow in advance, and accurately detect the gas supplied by the gas supply source through the flow detection module, and through wireless communication Modules and other components are used to transmit and record values. The gas supply source can be checked regularly and its data can be recorded. The situation of the gas supply source can be known and then judged, analyzed and prevented in advance. This can reduce supply abnormalities in the gas supply source and reduce the risk of mask carriers or Risk of photomask deterioration and damage.

In order to fully understand the present invention, the present invention is described in detail through the following specific embodiments and the accompanying drawings. Those skilled in the art can understand the purpose, features and effects of the present invention from the contents disclosed in this specification. It should be noted that the present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the patentable scope of the present invention. The description is as follows:

As shown in Figures 1 to 4, a fixture 100 for automatically measuring the flow rate of a mask carrier according to an embodiment of the present invention includes: a fixture body 1, a flow detection module 2, and a wireless communication module 3. A capacitor 4 and a wireless charging receiving module 5.

The jig body 1 has a storage space S, at least one air inlet 11 and at least one air outlet 12 communicating with the storage space S. In this embodiment, there are two air inlets 11 and two air outlets 12 . These air inlet holes 11 and air outlet holes 12 penetrate through the bottom surface of the jig body 1 . The specific shape of the jig body 1 can be compared with the shape of the photomask carrier. In this embodiment, the jig body 1 is as large as a rectangular box, and a handle 14 is provided on the top of the jig body 1 for easy gripping. Method to move the jig body 1.

The flow detection module 2 includes a flow meter 21 and a flow display 22 whose signal is connected to the flow meter 21. The flow meter 21 is arranged in the storage space S. The flow meter 21 is, for example, a flow sensor for measuring fluids such as liquids and gases, such as a thermal mass flow meter, a diaphragm flow meter, an ultrasonic flow meter, etc., and the invention is not limited thereto. The flow display 22 is, for example, a liquid crystal display, which receives the flow signal measured by the flow meter 21 and displays it. The flow indicator 22 is preferably provided on the outer surface of the fixture body 1 .

The signal of the wireless communication module 3 is connected to the flow meter 21 . The wireless communication module 3 receives the flow signal measured by the flow meter 21 and transmits it to an external organization. The wireless communication module 3 is, for example, a Bluetooth communication module, which transmits traffic signals to remote terminal devices such as computers and mobile phones through Bluetooth wireless transmission.

The capacitor 4 is electrically connected to the flow detection module 2 and the wireless communication module 3, and is used to supply the electric energy required by the flow detection module 2 and the wireless communication module 3. The capacitor 4 is, for example, a rechargeable battery. The wireless communication module 3 can also transmit the power of the capacitor 4 to an external mechanism.

The wireless charging receiving module 5 is disposed at the bottom of the jig body 1 and is electrically connected to the capacitor 4 . When charging the capacitor 4, the wireless charging receiving module 5 is relatively close to a wireless charging transmitting module 7, and energy is transmitted by magnetic induction or magnetic resonance. The wireless charging transmitting module 7 is provided with a transmitting end coil, and the wireless charging receiving module 5 is provided with a receiving end coil. The two coils transmit energy through magnetic field coupling (magnetic induction) or resonance (magnetic resonance). However, the present invention is not limited to this.

In summary, through the jig 100 for automatically measuring the flow rate of a mask carrier of the present invention, abnormal gas flow conditions can be discovered in advance, and the gas supplied by the gas supply source can be accurately detected through the flow detection module 2 , and transmit and record values through wireless communication module 3 and other components, the gas supply source can be checked regularly and its data can be recorded, the status of the gas supply source can be known, and the status of the gas supply source can be judged, analyzed and prevented in advance, thereby reducing supply abnormalities in the gas supply source. , Reduce the risk of deterioration and damage to the photomask carrier or photomask.

Furthermore, the fixture 100 for automatically measuring the flow rate of the mask carrier further includes a power indicator 6 electrically connected to the capacitor 4 . The power display 6 is, for example, a liquid crystal display, and displays the remaining power of the capacitor 4 . The power indicator 6 is preferably arranged on the outer surface of the fixture body 1 .

Further, as shown in FIG. 2 , the jig 100 for automatically measuring the flow rate of the mask carrier further includes the aforementioned wireless charging transmitting module 7 and is wirelessly and electrically connected to the wireless charging receiving module 5 . The wireless charging transmitting module 7 can be installed on an inflatable panel P (connected to a gas supply source). The inflatable panel P is provided with a plurality of air blowing nozzles P1 to blow air into the air inlet 11 or receive air from the air outlet 12 respectively. Exhaust. When the fixture 100 that automatically measures the flow rate of the mask carrier is loaded on the inflatable disk P, the gas supply source penetrates the gas through the inflatable disk P into the storage space S of the fixture body 1, and at the same time, the wireless charging transmitting module 7 faces each other at a close distance The wireless charging receiving module 5 enables the wireless charging receiving module 5 to efficiently charge the capacitor 4 using the principle of electromagnetic induction.

Furthermore, the flow detection module 2 further includes a start switch 23 whose signal is connected to the flow meter 21 . The start switch 23 can be a mechanical trigger switch to turn on/off the flow meter 21, or it can be an electric or other type of switch. The start switch 23 can also be further linked to the flow indicator 22 to turn on/off the flow indicator 22 .

Furthermore, the fixture body 1 is further provided with a wired charging interface 13. The wired charging interface 13 is, for example, a Universal Serial Bus (USB) interface or a conventional wired power transmission interface. The capacitor 4 can be wired to a charging source through the wired charging interface 13 as an auxiliary charging method.

The present invention has been disclosed in the above embodiments. However, those skilled in the art should understand that the embodiments are only used to illustrate the present invention and should not be interpreted as limiting the scope of the present invention. It should be noted that any changes and substitutions that are equivalent to this embodiment should be considered to be within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope of the patent application.

100: A fixture that automatically measures the flow rate of the mask carrier 1: Fixture body 11: Air intake hole 12: Air outlet 13:Wired charging interface 14: handle 2: Traffic detection module 21:Flowmeter 22:Flow monitor 23: Start switch 3: Wireless communication module 4: Capacitor 5: Wireless charging receiving module 6:Battery indicator 7: Wireless charging transmitter module P: Inflatable disk P1: Air blower S: storage space

FIG. 1 is a schematic three-dimensional view of a fixture for automatically measuring the flow rate of a mask carrier according to an embodiment of the present invention. FIG. 2 is a schematic perspective view of a fixture for automatically measuring the flow rate of a mask carrier according to an embodiment of the present invention. FIG. 3 is a cross-sectional view of a fixture for automatically measuring the flow rate of a mask carrier according to an embodiment of the present invention. FIG. 4 is a block diagram of a fixture for automatically measuring the flow rate of a mask carrier according to an embodiment of the present invention.

100: A fixture that automatically measures the flow rate of the mask carrier

1: Fixture body

13:Wired charging interface

14: handle

22:Flow monitor

23: Start switch

3: Wireless communication module

6:Battery indicator

Claims (7)

A fixture for automatically measuring the flow rate of a mask carrier, which includes: A jig body having a storage space, at least one air inlet and at least one air outlet connected to the storage space; A flow detection module includes a flow meter and a flow display signal connected to the flow meter, and the flow meter is arranged in the storage space; A wireless communication module, the signal is connected to the flow meter; a capacitor electrically connected to the flow detection module and the wireless communication module; and A wireless charging receiving module is disposed at the bottom of the fixture body and electrically connected to the capacitor. The fixture for automatically measuring the flow rate of a mask carrier as described in claim 1 further includes a power indicator electrically connected to the capacitor. The fixture for automatically measuring the flow rate of a photomask carrier as described in claim 1 further includes a wireless charging transmitting module that is wirelessly and electrically connected to the wireless charging receiving module. As claimed in claim 1, the fixture for automatically measuring the flow rate of a mask carrier, wherein the flow detection module further includes a start switch, and the signal is connected to the flow meter. The fixture for automatically measuring the flow rate of a mask carrier as described in claim 1, wherein the wireless communication module is a Bluetooth communication module. The fixture for automatically measuring the flow rate of a photomask carrier as described in claim 1, wherein the fixture body is provided with a wired charging interface. The jig for automatically measuring the flow rate of a mask carrier as described in claim 1, wherein the top of the jig body is provided with a handle.

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