TWM639219U - Fixture for measuring temperature and humidity of photomask carrier - Google Patents

Abstract

A jig for measuring the temperature and humidity of a photomask carrier, comprising: a jig body, a detection module, a wireless communication module, and a capacitor, the jig body has a storage space, at least one connected to the storage space The air inlet hole and at least one air outlet hole. The detection module includes a thermometer and a hygrometer. The thermometer and the hygrometer are arranged in the storage space. The signal of the wireless communication module is connected to the thermometer and the hygrometer. Wireless communication module. The jig for measuring the temperature and humidity of the photomask carrier created in this invention is used to grasp the temperature and humidity inside the photomask carrier and its changes.

Description

Fixture for measuring the temperature and humidity of the photomask carrier

This creation is about a jig for detecting temperature and humidity, more particularly about a jig for measuring the temperature and humidity of a photomask carrier.

In the advanced lithography process in the semiconductor field, especially the EUV (extreme ultraviolet) lithography process, the cleanliness of the process environment is extremely high. If there are dust particles (particles) contaminating the photomask, it will cause defects in the lithography process. In order to meet the requirements of cleanliness and protection of the photomask, a photomask carrier is generally used to block external dust particles. In order to keep the photomask carrier itself dry, it is common practice to introduce dry gas (compressed dry gas or nitrogen) into the photomask carrier.

However, when the gas is injected, it is necessary to know the temperature and humidity inside the photomask carrier and its changes at that time, so as to accurately grasp the internal conditions of the photomask carrier in real time.

Therefore, in order to solve various problems of the conventional photomask carrier, this invention proposes a jig for measuring the temperature and humidity of the photomask carrier.

In order to achieve the above purpose and other purposes, this creation proposes a jig for measuring the temperature and humidity of a photomask carrier, which includes: a jig body, a storage space, at least one air inlet connected to the storage space, and at least one An air outlet; a detection module, including a thermometer and a hygrometer, the thermometer and the hygrometer are arranged in the storage space; a wireless communication module, the signal is connected to the thermometer and the hygrometer; and a capacitor, Electrically connect the detection module and the wireless communication module.

In one embodiment of the present invention, the detection module further includes a flow meter and a display, the flow meter is set in the storage space and is signally connected to the display.

In one embodiment of the present invention, the detection module further includes an activation switch, which is signally connected to the thermometer and the hygrometer.

In one embodiment of the present invention, the wireless communication module is a Bluetooth communication module.

In one embodiment of the present invention, the jig body is provided with a wired charging interface.

In one embodiment of the invention, a handle is provided on the top of the jig body.

In one embodiment of the invention, a counterweight is further included in the storage space.

In this way, the jig for measuring the temperature and humidity of the photomask carrier can accurately measure the change of temperature and humidity inside the photomask carrier when the dry gas is poured into the photomask carrier through the detection module, and through wireless communication Modules and other components are used to transmit and record values, and the source of gas supply can be checked regularly and its data can be recorded, and the situation of the source of gas supply can be known to judge and analyze and prevent in advance, so as to reduce the possibility of abnormal temperature and humidity inside the photomask carrier and reduce Risk of deterioration and damage to mask carrier or mask.

100: Fixture for measuring the temperature and humidity of the photomask carrier

1: Fixture body

11: air intake

12: Vent

13: Wired charging interface

14: Handle

2: Detection module

21: Thermometer

22: Hygrometer

23: Flow meter

24: Display

25: start switch

3: Wireless communication module

4: capacitance

5: Counterweight

S: storage space

FIG. 1 is a three-dimensional schematic diagram of a jig for measuring the temperature and humidity of a photomask carrier according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a jig for measuring the temperature and humidity of a photomask carrier according to an embodiment of the present invention.

FIG. 3 is a schematic block diagram of a jig for measuring the temperature and humidity of a photomask carrier according to an embodiment of the present invention.

In order to fully understand this creation, this creation will be described in detail by the following specific examples and accompanying drawings. Those skilled in the art can understand the purpose, features and effects of this creation from the content disclosed in this specification. It should be noted that this creation can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of this creation. The following embodiments will further describe the relevant technical content of this creation in detail, but the disclosed content is not intended to limit the patent scope of this creation. The description is as follows: as shown in Fig. 1 to Fig. 3, the jig 100 for measuring the temperature and humidity of the photomask carrier in the present invention includes: a jig body 1, a detection module 2, a wireless The communication module 3 and a capacitor 4 .

The jig body 1 has a storage space S, at least one air inlet 11 and at least one air outlet 12 connected to the storage space S, and in this embodiment, there are two air inlets 11 and two air outlets 12 . These air inlet holes 11 and air outlet holes 12 run through the bottom surface of the jig body 1 . The specific shape of the jig body 1 can be compared with the shape of the photomask carrier. In this embodiment, the jig body 1 is roughly in the shape of a rectangular box, and a handle 14 is provided on the top of the jig body 1 for easy gripping. Move the jig body 1.

The detection module 2 includes a thermometer 21 and a hygrometer 22 arranged in the storage space S. The thermometer 21 and the hygrometer 22 are arranged in the storage space S. The thermometer 21 is, for example, a conventional device for measuring temperature such as a thermistor thermometer, a thermocouple thermometer, an infrared thermometer; the hygrometer 22 is, for example, a conventional device for measuring humidity such as a capacitive, resistive, or heat conduction type, and the invention is not limited thereto . The thermometer 21 and the hygrometer 22 can also be combined into an integrated thermo-hygrometer (as shown in FIG. 2 ), or can be divided into two components.

The wireless communication module 3 is connected to the thermometer 21 and the hygrometer 22 by signal. The wireless communication module 3 receives the temperature and humidity information measured by the thermometer 21 and the hygrometer 22 and transmits it to an external organization. The wireless communication module 3 is, for example, a Bluetooth communication module, which transmits temperature and humidity information to remote computers, mobile phones and other terminal devices through Bluetooth wireless transmission.

The capacitor 4 is electrically connected to the detection module 2 and the wireless communication module 3 for supplying the electric energy required by the detection module 2 and the wireless communication module 3 . The capacitor 4 is, for example, a rechargeable battery. The wireless communication module 3 can also transmit the power information of the capacitor 4 to an external organization.

To sum up, with the jig 100 for measuring the temperature and humidity of the photomask carrier created by this invention, the detection module 2 can be used to accurately measure the temperature and humidity changes inside the photomask carrier when the dry gas is poured into the photomask carrier. , and use the wireless communication module 3 and other components to transmit and record the value, the gas supply source can be checked regularly and its data can be recorded, and the situation of the gas supply source can be known to judge, analyze and prevent in advance, so as to reduce the internal occurrence of the mask carrier The possibility of abnormal temperature and humidity reduces the risk of photomask carrier or photomask deterioration and damage.

Further, in this embodiment, as shown in FIG. 2 , the detection module 2 further includes a flow meter 23 and a display 24 , the flow meter 23 is set in the storage space S and is connected to the display 24 by signal. The flowmeter 23 is, for example, a flow sensor for measuring fluids such as liquids and gases, such as thermal mass flowmeters, diaphragm flowmeters, or ultrasonic flowmeters, etc., and the present invention is not limited thereto. The display 24 is, for example, a liquid crystal display, preferably disposed on the outer surface of the jig body 1 . The display 24 receives the flow signal measured by the flow meter 23 and displays it.

Further, in this embodiment, as shown in FIG. 1 , the detection module 2 further includes an activation switch 25 , which is connected to the thermometer 21 and the hygrometer 22 for signals. Start switch 25 can be opened for mechanical trigger Off, to turn on/off the thermometer 21 and the hygrometer 22, it can also be an electric or other type of switch. The activation switch 25 can also be further linked with the display 24 to turn on/off the display 24 .

Further, in this embodiment, as shown in FIG. 1 , the jig body 1 is further provided with a wired charging interface 13. The wired charging interface 13 is, for example, a Universal Serial Bus (USB) interface, or a conventional Wired power transfer interface. The capacitor 4 can be wired to a charging source through the wired charging interface 13 as an auxiliary charging method.

Furthermore, in this embodiment, as shown in FIG. 2 , the jig 100 for measuring the temperature and humidity of the photomask carrier of the present invention further includes a counterweight 5 disposed in the storage space S. The counterweight 5 can balance the load of the jig body 1 and simulate the weight of the photomask carrier when carrying the photomask.

The invention has been disclosed in the above embodiments, but those skilled in the art should understand that the embodiments are only used to describe the invention, and should not be construed as limiting the scope of the invention. It should be noted that all changes and replacements equivalent to the embodiments should be included in the scope of this creation. Therefore, the scope of protection of this creation should be defined by the scope of the patent application.

100: Fixture for measuring the temperature and humidity of the photomask carrier

1: Fixture body

13: Wired charging interface

14: Handle

24: Display

25: start switch

3: Wireless communication module

Claims (7)

A jig for measuring the temperature and humidity of a photomask carrier, which includes: a jig body with a storage space, at least one air inlet and at least one air outlet connected to the storage space; a detection module, including a thermometer and a hygrometer, the thermometer and the hygrometer are set in the storage space; a wireless communication module, the signal is connected to the thermometer and the hygrometer; and a capacitor is electrically connected to the detection module and the wireless Communication module. The jig for measuring the temperature and humidity of the photomask carrier as described in claim 1, wherein the detection module further includes a flowmeter and a display, the flowmeter is set in the storage space and is signal-connected to the display . The jig for measuring the temperature and humidity of the photomask carrier as described in claim 1, wherein the detection module further includes an activation switch, which is signal-connected to the thermometer and the hygrometer. The jig for measuring the temperature and humidity of a photomask carrier as described in Claim 1, wherein the wireless communication module is a Bluetooth communication module. The jig for measuring the temperature and humidity of the photomask carrier as described in Claim 1, wherein the jig body is provided with a wired charging interface. The jig for measuring the temperature and humidity of the photomask carrier as described in Claim 1, wherein a handle is provided on the top of the jig body. The jig for measuring the temperature and humidity of the photomask carrier as described in claim 1 further includes a counterweight disposed in the storage space.

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