TWM569748U - Intelligent pallet box - Google Patents

Abstract

A smart pallet box suitable for carrying and accommodating at least one clean substrate container, comprising a pallet seat, a box body, and a sensing device. The box body includes a peripheral wall detachably assembled around the pallet seat, and an upper cover detachably coupled to the peripheral wall, the pallet seat and the peripheral wall jointly defining a space for accommodating the at least one clean The accommodating space of the substrate container, and the upper cover and the lower end of the accommodating space are respectively closed by the upper cover and the pallet seat. The sensing device includes at least one sensor disposed on the pallet base or the casing to sense the state of the accommodation space or the pallet seat.

Description

Smart pallet

The present invention relates to a pallet box, and more particularly to a smart pallet box for carrying and accommodating a clean substrate container for a semiconductor.

In semiconductor manufacturing, wafers are the main substrate. When wafers are transported in an external environment outside the semiconductor factory, the wafers are typically placed in a clean substrate container, such as a front-open wafer transport box. Opening shipping box, FOSB). When transporting a plurality of clean substrate containers, the clean substrate containers are usually carried or accommodated through a pallet or pallet.

However, conventional pallets do not have a protective or buffer structure, and monitoring/monitoring functions that do not provide sufficient protection or allow the carrier/transporter to confirm the status of the loaded wafer. Although the conventional pallet box can provide simple protection, the protection effect is not good, and the second has no monitoring/monitoring function, and its large volume causes it to be stored when not in use. Difficulties in storage. At the same time, neither of them can match the advanced automation equipment used in the semiconductor industry, resulting in impairment of operational timeliness.

Therefore, the purpose of the present invention is to provide a smart pallet.

Therefore, the novel smart pallet box is suitable for carrying and accommodating at least one clean substrate container, wherein the smart pallet box comprises a pallet seat, a box body, and a sensing device.

The casing includes a peripheral wall detachably coupled to the periphery of the pallet seat, and an upper cover detachably coupled to the peripheral wall, the pallet seat and the peripheral wall jointly defining a space for accommodating the at least one The accommodating space of the substrate container is cleaned, and the upper cover and the lower end of the accommodating space are respectively closed by the upper cover and the pallet seat.

The sensing device includes at least one sensor disposed on the pallet base or the casing to sense the state of the accommodation space or the pallet seat.

The utility model has the advantages that the sensor is arranged on the pallet seat or the box body, and the environment of the box body and the quantity and weight of the articles in the box body can be detected in the process of transporting the smart pallet box to assist the state. Confirm and even control the environmental status of the cabinet to ensure that the items contained therein are not contaminated or damaged by changes in environmental conditions.

Referring to Figures 1, 2 and 22, an embodiment of the present smart pallet box 1 is adapted to carry and house a plurality of clean substrate containers 100. The clean substrate container 100 may be a closed type clean container conventionally used in various industries such as semiconductor, solar, or photovoltaic, such as a photomask case, a wafer cassette, and the like. In this embodiment, the former open wafer transfer cassette (FOSB) is taken as an example.

The smart pallet 1 includes a pallet base 2, a casing 3 disposed on the pallet base 2, and a sensing device 4 disposed on the pallet base 2 or the casing 3.

Specifically, the casing 3 includes a peripheral wall 31 detachably coupled to the pallet base 2, and an upper cover 32 detachably coupled to the peripheral wall 31. The stacking base 2 and the peripheral wall 31 define an accommodating space 300 for accommodating the clean substrate containers 100, and the upper and lower ends of the accommodating space 300 are the upper cover 32 and the pallet seat 2, respectively. Closed.

The casing 3 includes a positioning buffer unit 5 disposed in the accommodating space 300. The positioning buffer unit 5 includes a buffer bottom plate 51 disposed on the pallet base 2, a buffer top plate 52 disposed adjacent to the upper cover 32, and a buffer partition disposed between the buffer bottom plate 51 and the buffer top plate 52. Plate 53.

The buffering partition 53 and the buffering bottom plate 51 and the buffering top plate 52 respectively partition the accommodating space 300 from a first space area 301 and a second space area 302 to accommodate a plurality of clean substrate containers 100, respectively. For the front-opening wafer transport cassette exemplified in the embodiment, each of the front-opening wafer transport cassettes can accommodate a plurality of wafers.

As shown in FIG. 2, the buffer bottom plate 51, the buffer partition plate 5 and the buffer top plate 52 also cooperate with the outer shape of the clean substrate container 100 to provide positioning and buffering functions to prevent the clean substrate containers 100 from shaking during transportation. Or suffer from impact and damage the wafer. In addition, in order to provide a better cushioning and protection effect, a buffer substrate 54 may be further disposed between the upper cover 32 and the buffer top plate 52.

Preferably, the positioning buffer unit 5 in this embodiment includes a buffer bottom plate 51, a buffer top plate 52, a buffer partition 53 and a buffer base material 54, and the material thereof may be selected from a foaming material. For example, a foam material such as polyethylene (PE), polypropylene (PP) or ethylene/vinyl acetate (EVA). But it is not limited to this.

More preferably, the foaming materials have a foaming ratio of between 10 and 60 times to provide a better cushioning effect. In addition, since products such as semiconductors and high-tech industries are easily damaged by electrostatic discharge, the foamed material may also be made of an antistatic foamed material, and the foamed material preferably has a resistance value of 10 ¹² Ω/sq. In the following, to avoid the occurrence of discharge after the accumulation of static charge, the wafer contained therein is damaged.

Referring to FIG. 3 to FIG. 5, the pallet base 2 includes a base body 21 having a rectangular shape, a plurality of recesses 22 recessed downwardly from an upper surface of the base body 21, and a plurality of recesses 22 respectively disposed in the recesses 22 The inner shock absorbing member 23 and a load bearing module 25 disposed between the base body 21 and the buffer bottom plate 51.

The anti-vibration member 23 is for supporting the carrying module 25 and isolating the vibration transmitted from the pallet seat 2. The anti-vibration member 23 can be made of various materials or structures, for example, a shock-proof rubber block 231 made of natural rubber, silicone rubber, or the like, or a spiral shock absorber 232 made of metal, plastic or composite material. . This embodiment does not limit this, as long as the support and shockproof effects can be achieved.

Specifically, the grooves 22 are arranged in an array on the base 21. The anti-vibration blocks 231 are disposed in the recesses 22 located at the four corners, and the spiral anti-vibrators 232 are disposed in the recesses 22 at the center of the four sides of the base body 21, that is, the anti-vibration members 23 are The spiral shock absorbers 232 are alternately disposed on the outer periphery of the base body 21.

Wherein, the anti-vibration block 231 is mainly for providing isolation against vertical ground direction vibration; the spiral anti-vibrator 232 is disposed in such a manner that the axes are all oriented in the same direction toward the stacking direction of the wafer in the clean substrate container 100 to provide The isolation effect of shaking or shaking the direction. The shock-proof members 23 of the two different structures provide a better shock-proof effect.

Referring to FIG. 3 , FIG. 6 and FIG. 8 , the load bearing module 25 disposed on the base body 21 includes two anti-vibration pieces 251 spaced apart from each other, and a plurality of anti-vibration arrays disposed between the anti-vibration pieces 251 . Block 255. Similarly to the anti-vibration rubber block 231, the anti-vibration block 255 can also be made of natural rubber, silicone rubber, or the like.

Each anti-vibration piece 251 has an inner layer 252, an outer layer 253, and a porous structure 254 between the inner layer 252 and the outer layer 253. Preferably, the porous structure 254 can be a honeycomb structure. In this way, the weight of the anti-vibration piece 251 can be greatly reduced under the premise of having extremely high structural strength, and the transportation cost can be achieved.

Similarly, the peripheral plate 310 of the peripheral wall 31 of the casing 3 can also adopt the same structure as the anti-vibration piece 251. That is, the peripheral plate 310 also has an inner layer 303, an outer layer 304, and a porous structure 305 (shown in FIG. 8) between the inner layer 303 and the outer layer 304. Moreover, the porous structure 305 can also be a honeycomb structure, which has the advantages of high strength and light weight.

Referring to FIG. 1 and FIG. 7 simultaneously, the peripheral wall 31 further includes a plurality of light transmissive windows 33 extending through the inner layer 303, the porous structure 305 and the outer layer 304. In this way, the user or the automation device can directly confirm the condition in which the clean substrate container 100 is loaded in the accommodating space 300 through the permeable window 33.

The material of the peripheral wall 31 is also selected from polyethylene or polypropylene. The porous structure 305 is further matched to make the peripheral wall 31 have the advantages of light weight, high bearing capacity and durability, and good heat insulation.

The pallet base 2 and the upper cover 32 can be manufactured by gas-assisted injection molding, air blowing molding or double-layer plastic molding, so that the pallet seat 2 and the upper cover 32 have the advantages of hollowness and light weight, and avoid thick thickness. Depression, shrinkage, warpage, and shortening of the molding process cycle and overall strength.

Referring to FIG. 7 and FIG. 9 , the concave portions 313 and 314 of an upper peripheral edge 311 and the lower peripheral edge 312 of the peripheral wall 31 respectively engage with the positioning portion 323 of the upper cover 32 and the convex portion 26 of the pallet seat 2 to The three are assembled in a simple way. For the correct alignment and assembly, the corresponding sets of recesses 313 and the positioning portions 323 on each side and the corresponding recesses 314 and convex portions 26 of the respective groups may adopt different sizes or shapes, respectively, for the assembly personnel to correctly recognize.

More specifically, in the embodiment, the upper cover 32 has a body 321 and a plurality of grooves 322 recessed toward the body 321 by the upper peripheral edge 311 facing the peripheral wall 31, and are located in the grooves 322. The positioning portion 323 has the upper peripheral edge 311 of the peripheral wall 31 having a plurality of concave portions 313 corresponding to the positioning portions 323 and contoured.

Similarly, the pallet base 2 has a plurality of convex portions 26 projecting along the periphery of the upper surface of the base body 21, and the lower peripheral edge 312 of the peripheral wall 31 has a plurality of concave portions 314 corresponding to the convex portions 26.

In general, the width of the groove 322 is the same as the thickness of the peripheral plate 310 of the peripheral wall 31 such that the upper peripheral edge 311 of the peripheral plate 310 can be inserted into the groove 322. Through the groove 322 of the upper cover 32 and the alignment of the positioning portion 323 with the upper peripheral edge 311 of the peripheral wall 31 and the recesses 313, the operator can easily and accurately cover the upper cover 32 to the peripheral wall 31.

Similarly, by the matching of the convex portions 26 of the pallet base 2 and the concave portions 314 of the lower peripheral edge 312 of the peripheral wall 31, the foolproof positioning function when assembling the pallet seat 2 and the peripheral wall 31 can be provided. To make assembly quick and accurate.

Referring to FIGS. 7 and 10, the peripheral wall 31 has four peripheral plates 310 connected to each other, wherein the center of the opposite two peripheral plates 310 respectively has a bent portion 316 extending in the height direction of the peripheral plate 310. Each of the bent portions 316 divides the peripheral plate 310 on which it is located into two circumferential plate portions 315.

After the peripheral wall 31 is detached from the pallet base 2, the peripheral portions 315 can be aligned by bending the bent portions 316 to bring the other two opposite circumferential plates 310 toward each other. The movement moves the peripheral wall 31 in a collapsed state.

Referring to FIG. 11 and FIG. 12, if the height H of the peripheral edge 311 to the lower peripheral edge 312 of the peripheral wall 31 is less than or equal to the length and width of the pallet seat 2, the peripheral wall 31 in the collapsed state can be placed flat. The upper cover 32 and the pallet base 2 are stacked and stored. Further, as shown in FIG. 12, a plurality of smart pallets 1 in a stored state are stacked on each other to reduce the storage space.

It should be noted that when the smart pallet box 1 is not stored, a plurality of wisdom stacks may be disposed on the top surface of the upper cover 32 and the bottom surface of the pallet base 2 respectively. The crate 1 is matched by this concave-convex positioning structure and stacked quickly and stably with each other.

Referring to FIGS. 13 and 14, the other two peripheral plates 310 of the peripheral wall 31 having no bent portion 316 have a peripheral plate portion 315, a side opening 320, and a seesaw portion 317, respectively. The side opening 320 is in communication with the accommodating space 300 adjacent to the upper cover 32. The sill portion 317 can be connected to the peripheral plate portion 315 to close or expose the side opening 320.

Preferably, the box body 3 includes a plurality of connecting members 34 respectively disposed on the peripheral board portion 315 and the seesaw portion 317 to expose or close the side opening when the seesaw portion 317 is opened or closed. At 320 o'clock, the slab portion 317 can be fixed through the connecting members 34. The connecting member suitable for the embodiment is selected from the devil's felt as an example to achieve the effect of quickly bonding the slab portion 317. .

Through the design of the slab portions 317, the slab portions 317 are opened to expose the side openings 320, so that the clean substrate containers 100 located in the lower first space region 301 (see FIG. 2) can Easy to be picked up.

Referring to FIGS. 15 , 16 and 22 , the sensing device 4 includes a plurality of sensors disposed on the pallet base 2 and the casing 3 for sensing the accommodating space 300 or the pallet seat 2 . status.

In the present embodiment, the sensing device 4 includes a pressure sensor 41 disposed on the pallet base 2, a position sensor 43 disposed on the casing 3 and located in the accommodating space 300. A temperature sensor and a humidity sensor (not shown), and a temperature and humidity display 44 disposed outside the upper cover 32.

Specifically, the pressure sensor 41 is disposed at the bottom of the pallet base 2, and the weight prompter 42 and the position sensor 43 are disposed around the side of the pallet seat 2. The pressure sensor 41 is electrically connected to the weight indicator 42 and senses the loading state of the clean substrate containers 100 in the accommodating space 300, and can be displayed through the light indicator of the weight prompter 42 to Prevent abnormal conditions such as shortage of packaging materials or shortage of wafers.

The temperature sensor and the humidity sensor are electrically connected to the temperature and humidity display 44, and the temperature sensor and the humidity sensor are used to sense the temperature and humidity state in the accommodating space 300, and The temperature and humidity message is displayed on the temperature and humidity display 44.

In addition, the sensing device 4 may further include a temperature controller (not shown) disposed in the accommodating space 300 and a humidity controller (not shown), such as an electronic heater or refrigerator and an electronic device. Dehumidifier. When the temperature and humidity in the accommodating space 300 are abnormal, the temperature/humidity controller can be adjusted through the isothermal/humidity controller to avoid abnormal temperature and humidity in the accommodating space 300 and affect the quality of the wafer.

In addition, the smart pallet 1 provided in this embodiment may further be provided with a position sensor 43, such as a GPS locator, for positioning the smart pallet 1 and even further providing a tracking function.

Referring to FIG. 1 at the same time, the solar charging device 6 of the present embodiment is disposed on the upper cover 32, but may alternatively be disposed on the peripheral wall 31 or on the side of the pallet base 2. The power required by the sensing device 4 can be powered by the battery, and can be electrically connected to the solar charging device 6 to generate power by the solar charging device 6 to provide the power required by the sensing device 4. .

More preferably, the smart pallet box 1 of the embodiment may further be provided with a transmission device 92 for outputting the data sensed by the sensing device 4. The transmission device 92 can be a wired electronic device connection port or a wireless transmission device, which is not limited in this embodiment. The transmitting device 92 is electrically connected to the sensing device 4 to receive the data it senses, and then output the data to the outside for monitoring or recording.

In addition, the smart pallet 1 can further be provided with an identification means 91. The identification means 91 can adopt a barcode, including a one-dimensional barcode or a two-dimensional barcode such as a QR code, or a radio frequency identification tag (RFID tag) for easy identification by an operator or an automation device. Or management.

Referring to FIG. 1 and FIG. 16 to FIG. 20, a plurality of clamping slots 72, a plurality of elastic members 73 respectively located in the clamping slots 72, and a plurality of the clamping members are disposed on the upper cover 32 of the embodiment. A fastener 74 in the groove 72 and connected to the elastic member 73 has a plurality of perforations/slots 319 respectively corresponding to the fasteners 74.

The robot arm 8 in the automated handling device comprises a gripping member 81 having a gripping surface 810, an electromagnetic lock 811 disposed on the gripping surface 810, and four corresponding gripping slots 72 disposed therein. The gripping portion 812 on the face 810 is taken. The number of the gripping portions 812 can be changed according to the number of the gripping grooves 72. This embodiment is not limited thereto.

When the gripping member 81 of the robot arm 8 faces the upper cover 32 with the gripping surface 810, the four gripping portions 812 can be correspondingly placed into the gripping slots 72, and the gripping portions 812 can be made. The card fasteners 74 are respectively abutted to enable the card fasteners 74 to be locked into the closed state of the perforations/card slots 319 of the peripheral wall 31 (as shown in FIG. 17), and away from the peripheral wall 31. The perforation/slot 319 is moved between an open state (as shown in FIG. 18).

Referring to FIG. 21 to FIG. 23, when the clean substrate containers 100 in the accommodating space 300 of the smart pallet box 1 are to be gripped, the gripping portions 812 can be pressed against the fasteners 74, and The upper cover 32 and the buffer top plate 52 are taken out by the sequencer, so that the clean substrate container 100 can be grasped (as shown in FIG. 23).

More preferably, the present embodiment can also be provided with an anti-theft device 7 on the upper cover 32 that can control the fasteners 74. The anti-theft device 7 includes an electromagnetic lock 71. An electromagnetic lock 811 is disposed on the grasping surface 810 of the gripping member 81 of the robot arm 8 corresponding to the electromagnetic lock 71. The electromagnetic lock 811 on the robot arm 8 and the electromagnetic lock 71 of the anti-theft device 7 sense each other and perform data collation. If the data matches, the anti-theft device 7 unlocks the card firmware 74 to achieve the anti-theft function.

In summary, the smart pallet box 1 provided in this embodiment can detect the smart pallet box 1 during the transportation process of the smart pallet box 1 by providing a sensor on the pallet base 2 or the box body 3. The temperature and humidity in the casing 3 and the weight state of the pallet base 2 are used to assist in confirming and improving the environmental state in the casing 3, and the positioning buffer unit 5 is provided in the accommodating space 300 to enhance The inner wall 31 is foldable and can be placed between the upper cover 32 and the pallet base 2 for storage. The peripheral wall 31, the upper cover 32 and the pallet base 2 The anti-dwelling structure cooperates with each other to make the overall structure quick and reliable assembly. In addition, through the setting of the clamping groove 72, the robot arm 8 can be automatically used to sense opening, so that the subsequent robot arm 8 can be directly clamped. These clean substrate containers 100 are taken. It is also possible to add an anti-theft device 7 to ensure safety and indeed achieve the purpose of the present invention.

However, the above is only the embodiment of the present invention, and when it is not possible to limit the scope of the present invention, all the simple equivalent changes and modifications according to the scope of the patent application and the contents of the patent specification are still This new patent covers the scope.

1‧‧‧Smart pallets
323‧‧‧ Positioning Department
100‧‧‧Clean substrate container
300‧‧‧ accommodating space
2‧‧‧Stack base
301‧‧‧First Space Area
21‧‧‧ base
302‧‧‧Second space area
22‧‧‧ Groove
33‧‧‧Light transmissive window
23‧‧‧Anti-vibration parts
34‧‧‧Connecting parts
231‧‧‧Anti-vibration rubber block
4‧‧‧Sensing device
232‧‧‧Spiral shock absorber
41‧‧‧ Pressure Sensor
25‧‧‧ Carrying Module
42‧‧‧ Weight reminder
251‧‧‧Anti-vibration film
43‧‧‧ position sensor
252/303‧‧‧ inner layer
44‧‧‧temperature and humidity display
253/304‧‧‧ outer layer
5‧‧‧ Positioning buffer unit
254/305‧‧‧Porous structure
51‧‧‧buffer bottom plate
255‧‧‧Anti-vibration block
52‧‧‧buffer top plate
26‧‧‧ convex
53‧‧‧buffer partition
3‧‧‧ cabinet
54‧‧‧ cushioning substrate
31‧‧‧Week wall
6‧‧‧Solar charging device
310‧‧‧Week board
7‧‧‧Anti-theft device
311‧‧‧ last week
71‧‧‧Electromagnetic lock
312‧‧‧The next week
72‧‧‧Catch slot
313‧‧‧ recess
73‧‧‧Flexible parts
314‧‧‧ recess
74‧‧‧Card Firmware
315‧‧‧ Week Board
8‧‧‧Machine arm
316‧‧‧Bend
81‧‧‧ Grab
317‧‧‧掀板部
810‧‧‧ grab face
319‧‧‧Perforation/card slot
811‧‧‧Electromagnetic lock
320‧‧‧ side opening
812‧‧‧ Grasping Department
32‧‧‧Upper cover
91‧‧‧ Identification means
321‧‧‧ body
92‧‧‧Transportation device
322‧‧‧ trench
H‧‧‧ Height

Other features and effects of the present invention will be apparent from the following description of the drawings. FIG. 1 is a perspective view illustrating an embodiment of the present invention. FIG. 2 is a perspective view, BRIEF DESCRIPTION OF THE DRAWINGS FIG. 3 is a perspective view, and FIG. 3 is a perspective view, and a part of the board is omitted to explain a pallet seat of the embodiment; FIG. 4 is a partially enlarged view showing a shockproof rubber block of the pallet seat; 5 is a partial enlarged view illustrating a spiral shock absorber of the pallet seat; FIG. 6 is a side view for assisting a load bearing module of the pallet seat of FIG. 3; FIG. 7 is an exploded perspective view showing the same The combination of the pallet seat, the peripheral wall, and the upper cover of the embodiment; FIG. 8 is a side view showing the structure of the anti-vibration piece or the peripheral wall; FIG. 9 is a partially enlarged view, which is an explanatory view of the peripheral wall of FIG. Figure 10 is a perspective view showing the appearance of the peripheral wall of the embodiment during the folding process; Figure 11 is an exploded perspective view showing the folded state of the peripheral wall of the embodiment and the upper cover and the stack Stack of plates; Figure 12 FIG. 13 is a perspective view, and FIG. 13 is a perspective view, and a part of the components is omitted to explain the seesaw portion and the side opening of the peripheral plate of the embodiment; FIG. 14 is a perspective view for explaining the seesaw of FIG. Figure 15 is a perspective view showing the sensing device of the embodiment; Figure 16 is a plan view showing a solar charging device and a sensing device of the embodiment; Figure 17 is a view along Figure 16 A cross-sectional side view of the straight line II, illustrating the gripping groove, the fastener and the perforation/slot of the embodiment; FIG. 18 is a cross-sectional side view along line II of FIG. 16, which assists in explaining the gripping groove and the card of FIG. Figure 19 is a perspective view showing the embodiment and a robotic arm; Figure 20 is a perspective view showing a state of a gripping member of the robot arm; Figure 21 is a perspective view showing the machine The arm is gripped by the upper cover of the embodiment; FIG. 22 is a perspective view showing the machine arm gripping a buffer top plate of the positioning buffer unit of the embodiment; and FIG. 23 is a perspective view showing the robot arm gripping the implementation In-case Clean the substrate container.

Claims (41)

A smart pallet box suitable for carrying and accommodating at least one clean substrate container, comprising: a pallet base; a box body comprising a peripheral wall detachably assembled around the pallet seat, and a detachable In combination with the upper cover on the peripheral wall, the stacking seat and the peripheral wall together define an accommodating space for accommodating the at least one clean substrate container, and the upper cover and the lower end of the accommodating space are respectively the upper cover and the stack The pedestal is closed; and a sensing device includes at least one sensor disposed on the pallet base or the casing to sense the state of the accommodating space or the pallet cradle. The smart pallet box according to claim 1, further comprising a positioning buffer unit disposed in the accommodating space, the positioning buffer unit comprising a buffer bottom plate disposed on the pallet base and a set adjacent to the upper cover Buffer top plate. The smart pallet box according to claim 2, wherein the positioning buffer unit further comprises a buffer partition disposed between the buffer bottom plate and the buffer bottom plate, the buffer partition plate and the buffer bottom plate and the buffer top plate respectively Separating the accommodating space from a first space area and a second space area for accommodating at least one of the clean substrate containers. The smart pallet box of claim 2, wherein the positioning buffer unit further comprises a buffer substrate disposed between the upper cover and the buffer top plate. The smart pallet box according to claim 2 or 3, wherein the material of the positioning buffer unit is selected from a foam material. A smart pallet as described in claim 5, wherein the foamed material is selected from the group consisting of polyethylene (PE), polypropylene (PP) or ethylene-vinyl acetate copolymer (EVA). The smart pallet as described in claim 5, wherein the foaming material has a foaming ratio of between 10 and 60 times. The smart pallet box according to claim 5, wherein the foaming material is an antistatic foaming material, and the foaming material has an impedance value of less than 10 ¹² Ω/sq. The smart pallet box of claim 2, wherein the pallet base comprises a base body and a load bearing module disposed between the base body and the buffer bottom plate. The smart pallet box according to claim 9, wherein the carrying module comprises a shockproof sheet. The smart pallet box according to claim 10, wherein the carrying module comprises two anti-vibration pieces arranged at intervals. The smart pallet box according to claim 11, wherein the carrying module comprises a plurality of anti-vibration blocks arranged between the anti-vibration pieces. The smart pallet as described in claim 10, 11 or 12, wherein each of the anti-vibration sheets has an inner layer, an outer layer, and a porous structure between the inner layer and the outer layer. The smart pallet box according to claim 9, wherein the pallet base further comprises a plurality of grooves recessed from an upper surface of the base body away from the accommodating space. The smart pallet box according to claim 14, wherein the pallet base further comprises a plurality of anti-vibration members respectively disposed in the grooves for supporting the carrying module. The smart pallet box according to claim 15, wherein any one of the anti-vibration members is a shockproof rubber block. The smart pallet box according to claim 15, wherein any one of the anti-vibration members is a spiral shock absorber. The smart pallet box according to claim 15, wherein the anti-vibration members comprise a plurality of anti-vibration rubber blocks and a plurality of spiral shock absorbers, and the anti-vibration rubber blocks and the spiral anti-vibrators are respectively disposed in the same Wait for the groove. The smart pallet as described in claim 17 or 18, wherein when the pallet base comprises a plurality of the spiral shock absorbers, the spiral shock absorbers are disposed in the same direction. The smart pallet as described in claim 10, 11 or 12, wherein the anti-vibration sheet is made of polypropylene. The smart pallet as described in claim 13, wherein the anti-vibration sheet is made of polypropylene. The smart pallet as described in claim 1, wherein the peripheral wall has an inner layer, an outer layer, and a porous structure between the inner layer and the outer layer. The smart pallet box according to claim 1, wherein the pallet base and the upper cover are formed by gas-assisted injection molding, air blowing molding or double-layer suction molding. The smart pallet as described in claim 22, wherein the peripheral wall further comprises at least one permeable window extending through the inner layer, the porous structure and the outer layer. The smart pallet box according to claim 1, wherein the peripheral wall has four circumferential plates connected to each other, wherein the two opposite circumferential plates respectively have at least one bent portion extending along a height direction of the circumferential plate. When the peripheral wall is separated from the pallet seat, the bending portions can be bent to drive the other two opposite circumferential plates to move toward each other, so that the peripheral wall is in a folded state. The smart pallet box according to claim 25, wherein at least one of the peripheral plates has a side opening adjacent to the upper cover and communicating with the receiving space, and a seesaw portion for closing or exposing the side opening, The box body further includes a plurality of connecting members respectively disposed on the box body and the seesaw portion. When the seesaw portion closes or exposes the side opening, the jaw portion is fixed through the connecting members. . The smart pallet box according to claim 25, wherein a height from an upper circumference of the peripheral wall to a lower circumference of the peripheral wall is less than or equal to a length and a width of the pallet seat. The smart pallet box according to claim 1, wherein the upper circumference and the lower circumference of the peripheral wall respectively have concave portions that are positioned to cooperate with the upper cover and the pallet seat. The smart pallet box of claim 1, wherein the sensing device comprises a plurality of sensors, and the sensors are selectable from a temperature sensor, a humidity sensor, a pressure sensor, a position A sensor, or any combination of the various sensors described above. The smart pallet box of claim 1, wherein the sensing device comprises a temperature sensor and a temperature controller located in the accommodating space. The smart pallet box according to claim 1, wherein the sensing device comprises a humidity sensor located in the accommodating space, and a humidity controller. The smart pallet as described in claim 1, wherein the sensing device comprises a pressure sensor, and the smart pallet has a weight reminder for displaying or prompting the weight status of the smart pallet The pressure sensor is electrically connected to the weight reminder. The smart pallet box according to claim 1, wherein a solar charging device is disposed on the outer surface of the upper cover, the peripheral wall or the stacking seat, and the solar charging device is electrically connected to the sensing device. The smart pallet as described in claim 1 further includes an identification means. The smart pallet as described in claim 34, wherein the identification means is a code or a radio frequency identification tag. The smart pallet box of claim 1, further comprising a transmission device for outputting the data sensed by the sensing device, the transmission device being electrically connected to the sensing device. The smart pallet of claim 36, wherein the transmission device is a wireless transmission device. The smart pallet box according to claim 1, further comprising a plurality of clamping slots disposed on the upper cover. The smart pallet box of claim 38, further comprising a plurality of elastic members respectively located in the clamping slots, and a plurality of elastic members respectively connected to the elastic members and each at least partially located in the clamping slots The card wall has a plurality of perforations or card slots respectively corresponding to the card fasteners, and the card fasteners can be clamped into the corresponding perforations or a closed position of the card slot, and away from the corresponding perforations Or move between an open position of the card slot. The smart pallet as described in claim 39, further comprising an anti-theft device disposed on the upper cover. The smart pallet as described in claim 40, wherein the anti-theft device comprises an electromagnetic lock capable of abutting or releasing the fastener through the elastic member, so that the fastener is in the closed position and the open position Move between.