TWM562892U - Gas detecting module - Google Patents

Gas detecting module Download PDF

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Publication number
TWM562892U
TWM562892U TW107204232U TW107204232U TWM562892U TW M562892 U TWM562892 U TW M562892U TW 107204232 U TW107204232 U TW 107204232U TW 107204232 U TW107204232 U TW 107204232U TW M562892 U TWM562892 U TW M562892U
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Taiwan
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compartment
gas
sensor
detecting module
actuator
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TW107204232U
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Chinese (zh)
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莫皓然
陳世昌
楊啟章
李秋霖
廖家淯
林景松
陳智凱
黃啟峰
韓永隆
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研能科技股份有限公司
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Priority to TW107204232U priority Critical patent/TWM562892U/en
Publication of TWM562892U publication Critical patent/TWM562892U/en

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Abstract

一種氣體偵測模組,包含:載板,具有基板,基板上封裝傳感器,基板上設有通氣口;隔腔體,由隔片區分第一隔室及第二隔室,第一隔室具有開口,第二隔室具有出氣口,隔腔體底部設有容置槽,提供載板穿伸置入,通氣口對應出氣口,傳感器穿伸入第一隔室,隔片上方具有缺口,供第一隔室及第二隔室之連通;以及致動器,設置於第二隔室,封閉該第二隔室底部,並產生導送氣流;氣體偵測模組組配於薄型可攜裝置之殼體封閉氣體偵測模組,且殼體設有進氣口,對應到第一隔室,薄型可攜裝置之外部氣體導入第一隔室,由傳感器對流過之氣體進行監測。A gas detecting module comprises: a carrier board having a substrate, a sensor packaged on the substrate, a vent hole on the substrate; a compartment body, the first compartment and the second compartment being separated by the spacer, the first compartment has The opening, the second compartment has an air outlet, and the bottom of the compartment is provided with a receiving groove for providing the carrier plate to be inserted and inserted, the vent corresponding to the air outlet, the sensor penetrating into the first compartment, and the gap above the spacer has a gap for The first compartment and the second compartment are connected; and the actuator is disposed in the second compartment to close the bottom of the second compartment and generate a guiding airflow; the gas detecting module is assembled with the thin portable device The casing encloses the gas detecting module, and the casing is provided with an air inlet corresponding to the first compartment, and the external air of the thin portable device is introduced into the first compartment, and the gas flowing through the sensor is monitored by the sensor.

Description

氣體偵測模組Gas detection module

本案關於一種氣體偵測模組,尤指一種組配於薄型可攜式裝置應用進行氣體監測的氣體偵測模組。The present invention relates to a gas detection module, and more particularly to a gas detection module that is combined with a thin portable device for gas monitoring.

現代人對於生活周遭的氣體品質的要求愈來愈重視,例如一氧化碳、二氧化碳、揮發性有機物(Volatile Organic Compound,VOC)、PM2.5、一氧化氮、一氧化硫等等氣體,環境中這些氣體暴露會影響人體健康,嚴重的甚至危害到生命。因此環境氣體品質好壞紛紛引起各國重視,為目前急需要去重視的課題。Modern people are paying more and more attention to the gas quality around them, such as carbon monoxide, carbon dioxide, volatile organic compounds (VOC), PM2.5, nitrogen monoxide, sulfur monoxide, etc., these gases in the environment. Exposure can affect human health, and even endanger life. Therefore, the quality of environmental gases has attracted the attention of all countries, and it is an issue that needs urgent attention.

如何確認氣體品質的好壞,利用一種氣體感測器來監測周圍環境氣體是可行的,若又能即時提供監測資訊,警示處在環境中的人,能夠即時預防或逃離,避免遭受環境中的氣體暴露造成人體健康影響及傷害,利用氣體感測器來監測周圍環境可說是非常好的應用。How to confirm the quality of gas, it is feasible to use a gas sensor to monitor the surrounding environment. If it can provide monitoring information immediately, it can alert people in the environment to prevent or escape immediately, and avoid being exposed to the environment. Gas exposure causes human health effects and injuries, and the use of gas sensors to monitor the surrounding environment is a very good application.

而可攜式裝置為現代人外出皆會攜帶的行動裝置,因此將氣體偵測模組嵌設於可攜式裝置十分受到重視,特別是目前的可攜式裝置的發展趨勢為輕、薄又必須兼具高性能的情況下,如何將氣體偵測模組薄型化且組設於可攜式裝置內的同時,又能夠避免偵測氣體時受到可攜式裝置內部的處理器等主要元件的干擾,為當前的重要議題。Portable devices are mobile devices that modern people will carry out. Therefore, the integration of gas detection modules in portable devices is highly valued. In particular, the current development trend of portable devices is light and thin. In the case of high performance, how to make the gas detection module thin and set in the portable device, while avoiding the main components such as the processor inside the portable device when detecting gas Interference is an important issue at the moment.

本案之主要目的係提供一種氣體偵測模組,可組配於薄型可攜式裝置應用進行氣體監測。The main purpose of this case is to provide a gas detection module that can be combined with a thin portable device for gas monitoring.

本案之一廣義實施態樣為一種氣體偵測模組,包含:一載板,具有一基板,該基板上封裝定位一傳感器,該傳感器電性連接該基板運作,以及該基板上設有一通氣口;一隔腔體,由一隔片區分內部形成一第一隔室及第二隔室,其中該第一隔室具有一開口,以及該第二隔室具有一出氣口,又該隔腔體底部設有一容置槽,提供該載板穿伸置入其中定位,封閉該隔腔體底部,且使該基板之該通氣口對應到該出氣口,而該基板上該傳感器穿伸該開口而凸伸入該第一隔室,另該隔片上方具有一缺口,以供該第一隔室及該第二隔室之氣體得以相互連通;以及一致動器,設置於該第二隔室中,與設置於該第一隔室之該傳感器隔絕,使該致動器產生之熱源不對該傳感器之監測影響,而該致動器封閉該第二隔室底部,並控制致動產生一導送氣流,由該第二隔室之該出氣口排出,再經該基板之該通氣口排出於該隔腔體外;藉此構成該氣體偵測模組組配於一薄型可攜裝置內,該薄型可攜裝置之一殼體封閉該氣體偵測模組,且該殼體上設有一進氣口,對應到該隔腔體之該第一隔室,而該薄型可攜裝置之外部氣體導入該第一隔室內,由該傳感器對流過於其表面之氣體進行監測,且監測完氣體受該致動器導送,經該隔片之該缺口進入該第二隔室,再由該出氣口排出,並經該基板之該通氣口排出至該隔腔體外,構成一單向氣體導送監測。A generalized embodiment of the present invention is a gas detecting module comprising: a carrier plate having a substrate, the substrate is packaged and positioned with a sensor, the sensor is electrically connected to the substrate, and a vent is disposed on the substrate a compartment having a first compartment and a second compartment formed by a partition, wherein the first compartment has an opening, and the second compartment has an air outlet, and the compartment The bottom portion is provided with a receiving groove for positioning the carrier plate, and the bottom portion of the partition body is closed, and the vent opening of the substrate corresponds to the air outlet, and the sensor penetrates the opening on the substrate Projecting into the first compartment, and having a gap above the spacer for gas communication between the first compartment and the second compartment; and an actuator disposed in the second compartment Separating from the sensor disposed in the first compartment, so that the heat source generated by the actuator does not affect the monitoring of the sensor, and the actuator closes the bottom of the second compartment and controls actuation to generate a guide Airflow, by the second compartment The vent is discharged through the vent of the substrate and is discharged outside the compartment; thereby forming the gas detecting module in a thin portable device, and the casing of the thin portable device closes the gas detector Measuring module, and the housing is provided with an air inlet corresponding to the first compartment of the compartment body, and external air of the thin portable device is introduced into the first compartment, and the sensor convects too much The gas of the surface is monitored, and the monitored gas is guided by the actuator, the gap passing through the spacer enters the second compartment, is discharged from the air outlet, and is discharged to the vent through the substrate. A unidirectional gas delivery monitoring is formed outside the compartment.

體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化,其皆不脫離本案的範圍,且其中的說明及圖示在本質上當作說明之用,而非用以限制本案。Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various embodiments, and is not intended to limit the scope of the invention.

本案提供一種氣體偵測模組,請同時參閱第1A圖至第1C圖,氣體偵測模組包含一載板1、一隔腔體2、一致動器3及一傳感器4;載板1具有一基板11,並於基板11上設有一通氣口12,隔腔體2由一隔片21將其內部區隔出一第一隔室22及一第二隔室23,其中,第一隔室22具有一開口221,於本實施例中,開口221位於第一隔室22的底部,但不以此為限,而第二隔室23具有一出氣口231,出氣口231位於第二隔室23的底部,但不以此為限,而阻隔第一隔室22及第二隔室23之隔片21具有一缺口211,使得第一隔室22與第二隔室23能夠經由缺口211相互連通。此外,隔腔體2的底部更設有一容置槽24,容置槽24供載板1穿伸置入其中定位,以封閉隔腔體2的底部,且使基板11上的通氣口12將對應於第二隔室23的出氣口231。The present invention provides a gas detecting module. Please refer to FIG. 1A to FIG. 1C at the same time. The gas detecting module comprises a carrier board 1, a compartment body 2, an actuator 3 and a sensor 4; the carrier board 1 has a substrate 11 and a vent 12 is disposed on the substrate 11. The compartment 2 is separated from the first compartment 22 and the second compartment 23 by a spacer 21, wherein the first compartment 22 has an opening 221. In this embodiment, the opening 221 is located at the bottom of the first compartment 22, but not limited thereto, and the second compartment 23 has an air outlet 231, and the air outlet 231 is located in the second compartment. The bottom of the 23, but not limited thereto, and the spacer 21 blocking the first compartment 22 and the second compartment 23 has a notch 211, so that the first compartment 22 and the second compartment 23 can pass each other via the notch 211 Connected. In addition, the bottom of the cavity 2 is further provided with a receiving groove 24 for positioning the carrier 1 to be inserted therein to close the bottom of the cavity 2, and the vent 12 on the substrate 11 will be Corresponding to the air outlet 231 of the second compartment 23.

承上,傳感器4封裝定位於基板11上電性連接運作,當載板1容設於容置槽24內時,位於基板11上之傳感器4穿過開口221,且凸伸入第一隔室22,用以檢測第一隔室22內之氣體。The sensor 4 is disposed on the substrate 11 and electrically connected. When the carrier 1 is received in the receiving slot 24, the sensor 4 on the substrate 11 passes through the opening 221 and protrudes into the first compartment. 22, for detecting the gas in the first compartment 22.

上述之致動器3則設置於第二隔室23中,與設置於第一隔室22內之傳感器4隔絕,使得致動器3於作動時所產生之熱源能夠受隔片21阻隔,不去影響傳感器之偵測結果,且致動器3封閉第二隔室23的底部,並控制致動產生一導送氣流,再由第二隔室23的出氣口231排出,經過基板11的通氣口12而將氣體排出於隔腔體2外。The actuator 3 described above is disposed in the second compartment 23 and is isolated from the sensor 4 disposed in the first compartment 22, so that the heat source generated when the actuator 3 is actuated can be blocked by the spacer 21, The detection result of the sensor is affected, and the actuator 3 closes the bottom of the second compartment 23, and controls the actuation to generate a guiding airflow, which is then discharged by the air outlet 231 of the second compartment 23, and is ventilated through the substrate 11. The port 12 discharges the gas outside the compartment 2.

請參閱第2圖至第3C圖,前述之氣體偵測模組可組配於一薄型可攜式裝置5內,薄型可攜式裝置5包含有一殼體51,殼體51上設有一進氣口511,當氣體偵測模組嵌設於薄型可攜式裝置5內時,殼體51的進氣口511對應於隔腔體2的第一隔室22。此外,請繼續審閱第2圖及第3A圖,殼體51之進氣口511與位於第一隔室22內的傳感器4兩者不直接對應,亦即進氣口511不直接位於傳感器4之上方,兩者相互錯位。Referring to FIG. 2 to FIG. 3C, the gas detecting module can be assembled in a thin portable device 5, and the thin portable device 5 includes a casing 51. The casing 51 is provided with an air inlet. The port 511 corresponds to the first compartment 22 of the compartment 2 when the gas detecting module is embedded in the thin portable device 5. In addition, please continue to review FIG. 2 and FIG. 3A. The air inlet 511 of the housing 51 does not directly correspond to the sensor 4 located in the first compartment 22, that is, the air inlet 511 is not directly located in the sensor 4. Above, the two are misplaced.

再繼續審閱第3B圖及第3C圖,透過致動器3的作動,令第二隔室23內開始形成負壓,開始汲取薄型可攜式裝置5外的外部空氣並導入第一隔室22內,使得第一隔室22內的傳感器4開始對於流過於其表面的氣體進行監測,來偵測薄型可攜式裝置5外的空氣品質,而致動器持續地作動時,監測完之氣體將通過隔片21上的缺口211而導入第二隔室23,最後由出氣口231、基板11的通氣口12排出於隔腔體2之外,以構成一單向氣體導送監測(如箭頭方向所示)。Continuing with the review of FIGS. 3B and 3C, the operation of the actuator 3 causes the negative pressure to begin to be formed in the second compartment 23, and the external air outside the thin portable device 5 is extracted and introduced into the first compartment 22 The sensor 4 in the first compartment 22 starts to monitor the gas flowing over its surface to detect the air quality outside the thin portable device 5, and the gas is monitored when the actuator is continuously operated. The second compartment 23 is introduced through the notch 211 on the spacer 21, and finally discharged from the air outlet 231 and the vent 12 of the substrate 11 outside the compartment 2 to form a one-way gas conduction monitoring (such as an arrow). Direction shown).

上述之傳感器4可為氣體傳感器,包含一氧氣傳感器、一一氧化碳傳感器、一二氧化碳傳感器、一溫度傳感器、一臭氧傳感器及一揮發性有機物傳感器之至少其中之一或其組合而成之群組;或,上述之氣體傳感器可為監測細菌、病毒及微生物之至少其中之一或其任意組合而成之群組之氣體感測器。The sensor 4 may be a gas sensor comprising a group of an oxygen sensor, a carbon monoxide sensor, a carbon dioxide sensor, a temperature sensor, an ozone sensor, and a volatile organic sensor, or a combination thereof; or The gas sensor described above may be a gas sensor that monitors a group of at least one of bacteria, viruses, and microorganisms, or any combination thereof.

了解上述之氣體偵測模組之特點說明,以下就致動器3之結構及作動方式作一說明:To understand the characteristics of the above gas detection module, the following describes the structure and operation of the actuator 3:

請參閱第4A圖至第5A圖,上述之致動器3為一氣體泵浦,包含有依序堆疊的一進氣板31、一共振片32、一壓電致動器33、一絕緣片34、一導電片35;進氣板31具有至少一進氣孔31a、至少一匯流排孔31b及一匯流腔室31c,上述之進氣孔31a與匯流排孔31b其數量相同,於本實施例中,進氣孔31a與匯流排孔31b以數量4個作舉例說明,並不以此為限;4個進氣孔31a分別貫通4個匯流排孔31b,且4個匯流排孔31b匯流到匯流腔室31c。Referring to FIGS. 4A-5A, the actuator 3 is a gas pump, and includes an air inlet plate 31, a resonant plate 32, a piezoelectric actuator 33, and an insulating sheet stacked in sequence. 34, a conductive sheet 35; the air inlet plate 31 has at least one air inlet hole 31a, at least one bus bar hole 31b and a confluence chamber 31c, the above-mentioned air inlet hole 31a and the bus bar hole 31b are the same number, in this embodiment In the example, the intake hole 31a and the bus bar hole 31b are exemplified by the number of four, and are not limited thereto; the four air inlet holes 31a respectively penetrate the four bus bar holes 31b, and the four bus bar holes 31b merge. To the confluence chamber 31c.

上述之共振板32,可透過貼合方式組接於進氣板31上,且共振板32上具有一中空孔32a、一可動部32b及一固定部32c,中空孔32a位於共振板32的中心處,並與進氣板31的匯流腔室31c對應,而設置於中空孔32a的周圍且與匯流腔室31c相對的區域為可動部32b,而設置於共振板32的外周緣部分而貼固於進氣板31上則為固定部32c。The resonator plate 32 is assembled to the air inlet plate 31 through a bonding manner. The resonator plate 32 has a hollow hole 32a, a movable portion 32b and a fixing portion 32c. The hollow hole 32a is located at the center of the resonance plate 32. And corresponding to the confluence chamber 31c of the air intake plate 31, and a region provided around the hollow hole 32a and opposed to the confluence chamber 31c is a movable portion 32b, and is provided on the outer peripheral portion of the resonance plate 32 to be attached. The air intake plate 31 is a fixing portion 32c.

上述之壓電致動器33,包含有一懸浮板33a、一外框33b、至少一連接部33c、一壓電元件33d、至少一間隙33e及一凸部33f;其中,懸浮板33a為一正方型懸浮板,具有第一表面331a及相對第一表面331a的一第二表面332a,外框33b環繞設置於懸浮板33a的周緣,且外框33b具有一組配表面331b及一下表面332b,並透過至少一連接部33c連接於懸浮板33a與外框33b之間,以提供彈性支撐懸浮板33a的支撐力,其中,間隙33e為懸浮板33a、外框33b與連接部33c之間的空隙,用以供空氣通過。The piezoelectric actuator 33 includes a suspension plate 33a, an outer frame 33b, at least one connecting portion 33c, a piezoelectric element 33d, at least one gap 33e and a convex portion 33f. wherein the suspension plate 33a is a square The suspension plate has a first surface 331a and a second surface 332a opposite to the first surface 331a. The outer frame 33b is disposed around the circumference of the suspension plate 33a, and the outer frame 33b has a pair of matching surfaces 331b and a lower surface 332b. It is connected between the suspension plate 33a and the outer frame 33b through at least one connecting portion 33c to provide a supporting force for elastically supporting the suspension plate 33a, wherein the gap 33e is a gap between the suspension plate 33a, the outer frame 33b and the connecting portion 33c. Used for air to pass.

此外,懸浮板33a的第一表面331a具有凸部33f,凸部33f於本實施例中係將凸部33f的周緣且鄰接於連接部33c的連接處透過蝕刻製程,使其下凹,來使懸浮板33a的凸部33f高於第一表面331a來形成階梯狀結構。In addition, the first surface 331a of the suspension plate 33a has a convex portion 33f. In the present embodiment, the convex portion 33f passes through the etching process of the peripheral edge of the convex portion 33f and adjacent to the connection portion 33c to be recessed. The convex portion 33f of the suspension plate 33a is higher than the first surface 331a to form a stepped structure.

又如第5A圖所示,本實施例之懸浮板33a採以沖壓成形使其向下凹陷,其下陷距離可由至少一連接部33c成形於懸浮板33a與外框33b之間所調整,使在懸浮板33a上的凸部33f的凸部表面331f與外框33b的組配表面331b兩者形成非共平面,亦即凸部33f的凸部表面331f將低於外框33b的組配表面331b,且懸浮板33a的第二表面332a低於外框33b的下表面332b,又壓電元件33d貼附於懸浮板33a的第二表面332a,與凸部33f相對設置,壓電元件33d被施加驅動電壓後由於壓電效應而產生形變,進而帶動懸浮板33a彎曲振動;利用於外框33b的組配表面331b上塗佈少量黏合劑,以熱壓方式使壓電致動器33貼合於共振板32的固定部32c,進而使得壓電致動器33得以與共振板32組配結合。Further, as shown in FIG. 5A, the suspension plate 33a of the present embodiment is formed by press forming to be recessed downward, and the depression distance thereof can be adjusted by forming at least one connecting portion 33c between the suspension plate 33a and the outer frame 33b. Both the convex surface 331f of the convex portion 33f on the suspension plate 33a and the combined surface 331b of the outer frame 33b form a non-coplanar, that is, the convex surface 331f of the convex portion 33f will be lower than the combined surface 331b of the outer frame 33b. And the second surface 332a of the suspension plate 33a is lower than the lower surface 332b of the outer frame 33b, and the piezoelectric element 33d is attached to the second surface 332a of the suspension plate 33a, disposed opposite to the convex portion 33f, and the piezoelectric element 33d is applied After the driving voltage is deformed by the piezoelectric effect, the suspension plate 33a is caused to bend and vibrate; a small amount of adhesive is applied to the assembly surface 331b of the outer frame 33b, and the piezoelectric actuator 33 is bonded to the piezoelectric actuator 33 by heat pressing. The fixing portion 32c of the resonance plate 32, in turn, allows the piezoelectric actuator 33 to be combined with the resonance plate 32.

此外,絕緣片34及導電片35皆為框型的薄型片體,依序堆疊於壓電致動器33下。於本實施例中,絕緣片34貼附於壓電致動器33之外框33b的下表面332b。In addition, the insulating sheet 34 and the conductive sheet 35 are all thin frame-shaped sheets, which are sequentially stacked under the piezoelectric actuator 33. In the present embodiment, the insulating sheet 34 is attached to the lower surface 332b of the outer frame 33b of the piezoelectric actuator 33.

請繼續參閱第5A圖,致動器3的進氣板31、共振板32、壓電致動器33、絕緣片34、導電片35依序堆疊結合後,其中懸浮板33a之第一表面331a與共振板32之間形成一腔室間距g,腔室間距g將會影響致動器3的傳輸效果,故維持一固定的腔室間距g對於致動器3提供穩定的傳輸效率是十分重要。本案之致動器3係對懸浮板33a使用沖壓方式,使其向下凹陷,讓懸浮板33a的第一表面331a與外框33b的組配表面331b兩者為非共平面,亦即懸浮板33a的第一表面331a將低於外框33b的組配表面331b,且懸浮板33a的第二表面332a低於外框33b的下表面332b,使得壓電致動器33之懸浮板33a凹陷形成一空間得與共振板32構成一可調整之腔室間距g,直接透過將上述壓電致動器33之懸浮板33a採以成形凹陷構成一腔室空間36的結構改良,如此一來,所需的腔室間距g得以透過調整壓電致動器33之懸浮板33a成形凹陷距離來完成,有效地簡化了調整腔室間距g的結構設計,同時也達成簡化製程,縮短製程時間等優點。Referring to FIG. 5A, the air intake plate 31, the resonance plate 32, the piezoelectric actuator 33, the insulating sheet 34, and the conductive sheet 35 of the actuator 3 are sequentially stacked and combined, wherein the first surface 331a of the suspension plate 33a is suspended. Forming a chamber spacing g with the resonator plate 32, the chamber spacing g will affect the transmission effect of the actuator 3, so maintaining a fixed chamber spacing g is important for providing stable transmission efficiency to the actuator 3. . The actuator 3 of the present invention uses a punching method for the suspension plate 33a to be recessed downward so that both the first surface 331a of the suspension plate 33a and the assembly surface 331b of the outer frame 33b are non-coplanar, that is, the suspension plate. The first surface 331a of the 33a will be lower than the assembly surface 331b of the outer frame 33b, and the second surface 332a of the suspension plate 33a is lower than the lower surface 332b of the outer frame 33b, so that the suspension plate 33a of the piezoelectric actuator 33 is recessed. A space is formed with the resonator plate 32 to form an adjustable chamber spacing g, which is directly improved by adopting a structure in which the suspension plate 33a of the piezoelectric actuator 33 is formed into a recessed space to form a chamber space 36. The required chamber spacing g can be achieved by adjusting the recessed distance of the suspension plate 33a of the piezoelectric actuator 33, which effectively simplifies the structural design of the adjustment chamber spacing g, and also achieves the advantages of simplifying the process and shortening the process time.

第5B圖至第5D圖為第5A圖所示之致動器3的作動示意圖,請先參閱第5B圖,壓電致動器33的壓電元件33d被施加驅動電壓後產生形變帶動懸浮板33a向下位移,此時腔室空間36的容積提升,於腔室空間36內形成了負壓,便汲取匯流腔室31c內的空氣進入腔室空間36內,同時共振片32受到共振原理的影響被同步向下位移,連帶增加了匯流腔室31c的容積,且因匯流腔室31c內的空氣進入腔室空間36的關係,造成匯流腔室31c內同樣為負壓狀態,進而通過匯流排孔31b、進氣口31a來吸取空氣進入匯流腔室31c內;請再參閱第5C圖,壓電元件33d帶動懸浮板33a向上位移,壓縮腔室空間36,迫使腔室空間36內的空氣通過間隙33e向下傳輸,來達到傳輸空氣的效果,同時間,共振板32同樣被懸浮板33a因共振而向上位移,同步推擠匯流腔室31c內的空氣往腔室空間36移動;最後請參閱第5D圖,當懸浮板33a被向下帶動時,共振板32也同時被帶動而向下位移,此時的共振板32將使壓縮腔室空間36內的空氣向間隙33e移動,並且提升匯流腔室31c內的容積,讓空氣能夠持續地通過進氣口31a、匯流排孔31b來匯聚於匯流腔室31c內,透過不斷地重複上述步驟,使致動器3能夠連續將空氣自進氣口31a進入,再由間隙33e向下傳輸,以不斷地汲取氣體偵測模組外的空氣進入,提供空氣給感測器4感測,提升感測效率。5B to 5D are diagrams showing the operation of the actuator 3 shown in FIG. 5A. Referring to FIG. 5B, the piezoelectric element 33d of the piezoelectric actuator 33 is subjected to a driving voltage to generate a deformation-driven suspension plate. 33a is displaced downward, at which time the volume of the chamber space 36 is increased, and a negative pressure is formed in the chamber space 36, so that the air in the confluence chamber 31c is taken into the chamber space 36, and the resonator 32 is subjected to the resonance principle. The influence is synchronously displaced downward, which increases the volume of the confluence chamber 31c, and due to the relationship of the air in the confluence chamber 31c entering the chamber space 36, the confluence chamber 31c is also in a negative pressure state, and then passes through the busbar. The hole 31b and the air inlet 31a suck air into the confluence chamber 31c; referring to FIG. 5C, the piezoelectric element 33d drives the suspension plate 33a upward to compress the chamber space 36, forcing the air in the chamber space 36 to pass. The gap 33e is transmitted downward to achieve the effect of transmitting air. At the same time, the resonance plate 32 is also displaced upward by the suspension plate 33a due to resonance, and the air in the confluence chamber 31c is synchronously pushed to move into the chamber space 36; Figure 5D, when hanging When the plate 33a is driven downward, the resonance plate 32 is also simultaneously driven to be displaced downward. At this time, the resonance plate 32 moves the air in the compression chamber space 36 toward the gap 33e, and raises the volume in the confluence chamber 31c. The air can be continuously collected in the confluence chamber 31c through the air inlet 31a and the bus hole 31b, and the above steps are continuously repeated, so that the actuator 3 can continuously enter the air from the air inlet 31a, and then The gap 33e is transmitted downward to continuously capture the air outside the gas detecting module, and the air is supplied to the sensor 4 for sensing, thereby improving the sensing efficiency.

請繼續參閱第5A圖,致動器3其另一實施方式可透過微機電的方式使致動器3為一微機電系統氣體泵浦,其中,進氣板31、共振片32、壓電致動器33、絕緣片34、導電片35皆可透過面型微加工技術製成,以縮小致動器3的體積。Continuing to refer to FIG. 5A, another embodiment of the actuator 3 can electrically actuate the actuator 3 into a MEMS gas pump in a microelectromechanical manner, wherein the air inlet plate 31, the resonant plate 32, and the piezoelectric body The actuator 33, the insulating sheet 34, and the conductive sheet 35 can be made through a surface micromachining technique to reduce the volume of the actuator 3.

請繼續參閱第1圖,上述之基板11可為一電路板,且其上具有一連接器6,連接器6供一電路軟板(未圖示)穿伸入連接,提供基板11電性連接及訊號連接。Referring to FIG. 1 , the substrate 11 can be a circuit board and has a connector 6 . The connector 6 is provided with a circuit board (not shown) extending through the connection to provide electrical connection of the substrate 11 . And signal connection.

綜上所述,本案所提供之氣體偵測模組,利用致動器的懸浮板下凹來使得致動器得以快速、穩定地將氣體導入氣體偵測模組內,提升感測效率,又透過第一隔室與第二隔室將致動器與傳感器相互隔開,於傳感器偵測時,能夠避免干擾,且也阻隔致動器的影響,此外,當氣體偵測模組真正導入薄型可攜式裝置內以進行氣體監測時,能夠不被薄型可攜式裝置內的處理器或其他元件影響,達到氣體偵測模組真正導入薄型可攜式裝置以達到可隨時、隨地偵測的目的。In summary, the gas detection module provided in the present invention utilizes the suspension plate of the actuator to make the actuator quickly and stably introduce the gas into the gas detection module, thereby improving the sensing efficiency. The actuator and the sensor are separated from each other through the first compartment and the second compartment, thereby avoiding interference when the sensor is detected, and also blocking the influence of the actuator, and further, when the gas detecting module is actually introduced into the thin type When the gas monitoring is carried out in the portable device, it can be not affected by the processor or other components in the thin portable device, and the gas detecting module can be truly introduced into the thin portable device to be detected at any time and anywhere. purpose.

本案得由熟知此技術之人士任施匠思而為諸般修飾,然皆不脫如附申請專利範圍所欲保護者。This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

1‧‧‧載板
11‧‧‧基板
12‧‧‧通氣口
2‧‧‧隔腔體
21‧‧‧隔片
211‧‧‧缺口
22‧‧‧第一隔室
221‧‧‧開口
23‧‧‧第二隔室
231‧‧‧出氣口
24‧‧‧容置槽
3‧‧‧致動器
31‧‧‧進氣板
31a‧‧‧進氣孔
31b‧‧‧匯流排孔
31c‧‧‧匯流腔室
32‧‧‧共振板
32a‧‧‧中空孔
32b‧‧‧可動部
32c‧‧‧固定部
33‧‧‧壓電致動器
33a‧‧‧懸浮板
331a‧‧‧第一表面
332a‧‧‧第二表面
33b‧‧‧外框
331b‧‧‧組配表面
332b‧‧‧下表面
33c‧‧‧連接部
33d‧‧‧壓電元件
33e‧‧‧間隙
33f‧‧‧凸部
331f‧‧‧凸部表面
34‧‧‧絕緣片
35‧‧‧導電片
36‧‧‧腔室空間
4‧‧‧傳感器
5‧‧‧薄型可攜式裝置
51‧‧‧殼體
511‧‧‧進氣口
6‧‧‧連接器
g‧‧‧腔室間距
1‧‧‧ Carrier Board
11‧‧‧Substrate
12‧‧‧ vent
2‧‧‧ Compartment
21‧‧‧ spacer
211‧‧ ‧ gap
22‧‧‧First compartment
221‧‧‧ openings
23‧‧‧Second compartment
231‧‧‧ air outlet
24‧‧‧ accommodating slots
3‧‧‧Actuator
31‧‧‧Air intake plate
31a‧‧‧Air intake
31b‧‧‧ bus bar hole
31c‧‧‧ confluence chamber
32‧‧‧Resonance board
32a‧‧‧ hollow hole
32b‧‧‧movable department
32c‧‧‧ fixed department
33‧‧‧ Piezoelectric Actuator
33a‧‧‧suspension plate
331a‧‧‧ first surface
332a‧‧‧ second surface
33b‧‧‧ frame
331b‧‧‧ matching surface
332b‧‧‧ lower surface
33c‧‧‧Connecting Department
33d‧‧‧Piezoelectric components
33e‧‧‧ gap
33f‧‧‧ convex
331f‧‧‧ convex surface
34‧‧‧Insulation sheet
35‧‧‧Conductor
36‧‧‧Case space
4‧‧‧ sensor
5‧‧‧Thin portable device
51‧‧‧Shell
511‧‧‧air inlet
6‧‧‧Connector
G‧‧‧ Chamber spacing

第1A圖為本案氣體偵測模組的立體示意圖。 第1B圖為本案氣體偵測模組的另一角度示意圖。 第1C圖為本案氣體偵測模組的分解示意圖。 第2圖為本案氣體偵測模組應用於薄型可攜式裝置之導氣方向示意圖。 第3A圖為第2圖薄型可攜式裝置之進氣口示意圖。 第3B圖為第3A圖中A-A剖面線方向所視剖面示意圖。 第3C圖為第3A圖中B-B剖面線方向所視剖面示意圖。 第4A圖為本案氣體偵測模組之致動器的分解示意圖。 第4B圖為本案氣體偵測模組之致動器另一角度的分解示意圖。 第5A圖為本案氣體偵測模組之致動器的剖面示意圖。 第5B圖至第5D圖本案氣體偵測模組之致動器作動示意圖。FIG. 1A is a perspective view of the gas detecting module of the present invention. FIG. 1B is another perspective view of the gas detecting module of the present invention. Figure 1C is an exploded view of the gas detection module of the present invention. Fig. 2 is a schematic view showing the gas guiding direction of the gas detecting module of the present invention applied to a thin portable device. Figure 3A is a schematic view of the air inlet of the thin portable device of Figure 2. Fig. 3B is a schematic cross-sectional view taken along line A-A of Fig. 3A. Fig. 3C is a schematic cross-sectional view taken along line B-B of Fig. 3A. FIG. 4A is an exploded perspective view of the actuator of the gas detecting module of the present invention. FIG. 4B is an exploded perspective view of the actuator of the gas detecting module of the present invention at another angle. FIG. 5A is a schematic cross-sectional view of the actuator of the gas detecting module of the present invention. 5B to 5D are schematic diagrams of actuator actuation of the gas detection module of the present invention.

Claims (12)

一種氣體偵測模組,包含: 一載板,具有一基板,該基板上封裝定位一傳感器,該傳感器電性連接該基板運作,以及該基板上設有一通氣口; 一隔腔體,由一隔片區分內部形成一第一隔室及第二隔室,其中該第一隔室具有一開口,以及該第二隔室具有一出氣口,又該隔腔體底部設有一容置槽,提供該載板穿伸置入其中定位,封閉該隔腔體底部,且使該基板之該通氣口對應到該出氣口,而該基板上該傳感器穿伸該開口而凸伸入該第一隔室,另該隔片上方具有一缺口,以供該第一隔室及該第二隔室之氣體得以相互連通;以及 一致動器,設置於該第二隔室中,與設置於該第一隔室之該傳感器隔絕,使該致動器產生之熱源不對該傳感器之監測影響,而該致動器封閉該第二隔室底部,並控制致動產生一導送氣流,由該第二隔室之該出氣口排出,再經該基板之該通氣口排出於該隔腔體外; 藉此構成該氣體偵測模組組配於一薄型可攜裝置內,該薄型可攜裝置之一殼體封閉該氣體偵測模組,且該殼體上設有一進氣口,對應到該隔腔體之該第一隔室,而該薄型可攜裝置之外部氣體導入該第一隔室內,由該傳感器對流過於其表面之氣體進行監測,且監測完氣體受該致動器導送,經該隔片之該缺口進入該第二隔室,再由該出氣口排出,並經該基板之該通氣口排出至該隔腔體外,構成一單向氣體導送監測。A gas detecting module comprises: a carrier plate having a substrate, the substrate is packaged and positioned with a sensor, the sensor is electrically connected to the substrate, and the substrate is provided with a vent; the compartment is provided by a The partition forms a first compartment and a second compartment, wherein the first compartment has an opening, and the second compartment has an air outlet, and the bottom of the compartment is provided with a receiving slot. The carrier plate is positioned therein to close the bottom of the compartment body, and the vent opening of the substrate corresponds to the air outlet, and the sensor extends through the opening and protrudes into the first compartment And a gap is formed above the spacer for the first compartment and the second compartment to communicate with each other; and an actuator is disposed in the second compartment, and is disposed on the first compartment The sensor of the chamber is isolated such that the heat source generated by the actuator does not affect the monitoring of the sensor, and the actuator closes the bottom of the second compartment and controls actuation to generate a flow of air by the second compartment The gas outlet is discharged and passed through the substrate The venting port is disposed outside the compartment; the gas detecting module is assembled in a thin portable device, and the casing of the thin portable device closes the gas detecting module, and the casing An air inlet is disposed on the first compartment corresponding to the compartment body, and external air of the thin portable device is introduced into the first compartment, and the sensor convects the gas flowing over the surface thereof, and monitors The gas is guided by the actuator, the gap enters the second compartment through the gap, is discharged from the air outlet, and is discharged to the outside of the compartment through the vent of the substrate to form a one-way Gas guidance monitoring. 如申請專利範圍第1項所述之氣體偵測模組,其中該薄型可攜裝置之該殼體之該進氣口設置位置,不直接對應該第一隔室內之該傳感器上方。The gas detecting module of claim 1, wherein the inlet port of the housing of the thin portable device is disposed not to directly correspond to the sensor in the first compartment. 如申請專利範圍第1項所述之氣體偵測模組,其中該傳感器為氣體傳感器。The gas detecting module of claim 1, wherein the sensor is a gas sensor. 如申請專利範圍第3項所述之氣體偵測模組,其中該氣體傳感器包含一氧氣感測器、一一氧化碳感測器及一二氧化碳感測器之至少其中之一或其任意組合而成之群組。The gas detecting module of claim 3, wherein the gas sensor comprises at least one of an oxygen sensor, a carbon monoxide sensor, and a carbon dioxide sensor, or any combination thereof. Group. 如申請專利範圍第3項所述之氣體偵測模組,其中該氣體傳感器包含一揮發性有機物傳感器。The gas detecting module of claim 3, wherein the gas sensor comprises a volatile organic sensor. 如申請專利範圍第3項所述之氣體偵測模組,其中該氣體傳感器包含監測細菌、病毒及微生物之至少其中之一或其任意組合而成之群組之傳感器。The gas detecting module of claim 3, wherein the gas sensor comprises a sensor that monitors at least one of bacteria, viruses, and microorganisms or any combination thereof. 如申請專利範圍第1項所述之氣體偵測模組,其中該致動器為一微機電系統氣體泵浦。The gas detecting module of claim 1, wherein the actuator is a MEMS gas pump. 如申請專利範圍第1項所述之氣體偵測模組,其中該致動器為一氣體泵浦,其包含: 一進氣板,具有至少一進氣孔、至少一匯流排孔及一匯流腔室,其中該至少一進氣孔供導入氣流,該匯流排孔對應該進氣孔,且引導該進氣孔之氣流匯流至該匯流腔室; 一共振片,具有一中空孔對應該匯流腔室,且該中空孔之周圍為一可動部;以及 一壓電致動器,與該共振片相對應設置; 其中,該共振片與該壓電致動器之間具有一間隙形成一腔室空間,以使該壓電致動器受驅動時,使氣流由該進氣板之該至少一進氣孔導入,經該至少一匯流排孔匯集至該匯流腔室,再流經該共振片之該中空孔,由該壓電致動器與該共振片之該可動部產生共振傳輸氣流。The gas detecting module of claim 1, wherein the actuator is a gas pump, comprising: an air inlet plate having at least one air inlet hole, at least one bus bar hole and a confluence a chamber, wherein the at least one air inlet hole is configured to introduce a gas flow, the bus bar hole corresponding to the air inlet hole, and the air flow guiding the air inlet hole is merged into the convergence flow chamber; a resonance piece having a hollow hole corresponding to the flow a chamber, and the periphery of the hollow hole is a movable portion; and a piezoelectric actuator disposed corresponding to the resonance piece; wherein the resonance piece and the piezoelectric actuator have a gap to form a cavity a chamber space for driving the piezoelectric actuator to be introduced from the at least one air inlet hole of the air intake plate, collecting the flow through the at least one bus bar hole, and flowing through the resonance The hollow hole of the sheet generates a resonant transmission airflow by the piezoelectric actuator and the movable portion of the resonance piece. 如申請專利範圍第8項所述之氣體偵測模組,其中該壓電致動器包含: 一懸浮板,具有一第一表面及一第二表面,該第一表面具有一凸部; 一外框,環繞設置於該懸浮板之外側,並具有一組配表面; 至少一連接部,連接於該懸浮板與該外框之間,以提供彈性支撐該懸浮板;以及 一壓電元件,貼附於該懸浮板之該第二表面上,用以施加電壓以驅動該懸浮板彎曲振動; 其中,該至少一連接部成形於該懸浮板與該外框之間,並使該懸浮板之該第一表面與該外框之該組配表面形成為非共平面結構,且使該懸浮板之該第一表面與該共振板保持一腔室間距。The gas detecting module of claim 8, wherein the piezoelectric actuator comprises: a suspension plate having a first surface and a second surface, the first surface having a convex portion; The outer frame is disposed on the outer side of the suspension plate and has a set of matching surfaces; at least one connecting portion is connected between the suspension plate and the outer frame to provide elastic support for the suspension plate; and a piezoelectric element, Attached to the second surface of the suspension plate for applying a voltage to drive the suspension plate to bend vibration; wherein the at least one connecting portion is formed between the suspension plate and the outer frame, and the suspension plate is The first surface and the assembled surface of the outer frame are formed in a non-coplanar structure, and the first surface of the suspension plate is maintained at a chamber spacing from the resonant plate. 如申請專利範圍第9項所述之氣體偵測模組,其中該懸浮板為一正方形懸浮板,並具有一凸部。The gas detecting module of claim 9, wherein the suspension plate is a square suspension plate and has a convex portion. 如申請專利範圍第8項所述之氣體偵測模組,其中該氣體泵浦包括一導電片 以及一絕緣片,其中該進氣板、該共振片、該壓電致動器、該導電片、該絕緣片及依序堆疊設置。The gas detecting module of claim 8, wherein the gas pump comprises a conductive sheet and an insulating sheet, wherein the air inlet plate, the resonant plate, the piezoelectric actuator, and the conductive sheet The insulating sheet is stacked and arranged in sequence. 如申請專利範圍第1項所述之氣體偵測模組,其中該基板為一電路板,具有一連接器,以供一電路軟板穿伸入連接,提供該基板電性連接及訊號連接。The gas detecting module of claim 1, wherein the substrate is a circuit board having a connector for a circuit board to penetrate and connect to provide electrical connection and signal connection.
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI681116B (en) * 2018-08-27 2020-01-01 研能科技股份有限公司 Miniature fluid transportation device
CN110718051A (en) * 2018-07-13 2020-01-21 研能科技股份有限公司 Information transmission system of gas monitoring device
CN110873686A (en) * 2018-08-30 2020-03-10 研能科技股份有限公司 Particle detection module
CN110873679A (en) * 2018-08-30 2020-03-10 研能科技股份有限公司 Particle detection module
TWI693389B (en) * 2018-08-30 2020-05-11 研能科技股份有限公司 Particle detecting module
TWI709739B (en) * 2018-08-30 2020-11-11 研能科技股份有限公司 Mobile device having particle detecting module
TWI720649B (en) * 2019-10-09 2021-03-01 研能科技股份有限公司 Gas detection module
CN113669239A (en) * 2020-05-14 2021-11-19 研能科技股份有限公司 Reinforcement method for thin pump
TWI811664B (en) * 2020-09-14 2023-08-11 皓博科技股份有限公司 Vibration collection device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110718051A (en) * 2018-07-13 2020-01-21 研能科技股份有限公司 Information transmission system of gas monitoring device
TWI681116B (en) * 2018-08-27 2020-01-01 研能科技股份有限公司 Miniature fluid transportation device
CN110873686A (en) * 2018-08-30 2020-03-10 研能科技股份有限公司 Particle detection module
CN110873679A (en) * 2018-08-30 2020-03-10 研能科技股份有限公司 Particle detection module
TWI693389B (en) * 2018-08-30 2020-05-11 研能科技股份有限公司 Particle detecting module
TWI709739B (en) * 2018-08-30 2020-11-11 研能科技股份有限公司 Mobile device having particle detecting module
CN110873686B (en) * 2018-08-30 2023-02-03 研能科技股份有限公司 Particle detection module
CN110873679B (en) * 2018-08-30 2023-02-21 研能科技股份有限公司 Particle detection module
TWI720649B (en) * 2019-10-09 2021-03-01 研能科技股份有限公司 Gas detection module
US11353438B2 (en) 2019-10-09 2022-06-07 Microjet Technology Co., Ltd. Gas detecting module
CN113669239A (en) * 2020-05-14 2021-11-19 研能科技股份有限公司 Reinforcement method for thin pump
TWI811664B (en) * 2020-09-14 2023-08-11 皓博科技股份有限公司 Vibration collection device

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