CN110873679A - Particle detection module - Google Patents

Particle detection module Download PDF

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Publication number
CN110873679A
CN110873679A CN201811000845.5A CN201811000845A CN110873679A CN 110873679 A CN110873679 A CN 110873679A CN 201811000845 A CN201811000845 A CN 201811000845A CN 110873679 A CN110873679 A CN 110873679A
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China
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air
gas
detection
channel
base
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CN201811000845.5A
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CN110873679B (en
Inventor
莫皓然
陈世昌
廖家淯
詹士德
曾俊隆
黄启峰
韩永隆
蔡长谚
李伟铭
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Microjet Technology Co Ltd
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Microjet Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution
    • G01N15/0205Investigating particle size or size distribution by optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • G01N15/075Investigating concentration of particle suspensions by optical means

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  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

A particle detection module, comprising: a base; the detection component is arranged in the base and comprises a particle sensor, a laser emitter and a light positioning component, the light positioning component is provided with a detection channel and a light beam channel, the detection channel and the light beam channel are arranged in an orthogonal mode, the laser emitter is arranged in the light positioning component to emit light beams to be projected into the light beam channel, and the particle sensor is correspondingly arranged on the detection channel in the orthogonal mode; a micro pump carried in the base; the micro pump is driven to adsorb and guide gas outside the base to be quickly led into the detection channel, the gas is orthogonally arranged with the light beam channel through the detection channel, the laser emitter irradiates to project a light spot to the particle sensor, and the particle sensor detects the size and the concentration of suspended particles contained in the gas.

Description

Particle detection module
[ technical field ] A method for producing a semiconductor device
The present disclosure relates to a particle detection module, and more particularly, to a particle detection module that can be assembled in a thin portable device for gas monitoring.
[ background of the invention ]
The aerosol refers to solid particles or liquid droplets contained in the air, and because the particles have very fine particle sizes, the particles easily enter the lungs of a human body through nose hairs in the nasal cavity, thereby causing inflammation, asthma or cardiovascular diseases of the lungs, and if other pollutants adhere to the aerosol, the harm to the respiratory system is further aggravated. In recent years, the problem of air pollution is getting worse, especially the concentration data of fine suspended particles (such as PM2.5 or PM10) is often too high, and the monitoring of the concentration of the air suspended particles is getting more and more important, but because the air flows with the wind direction and the air quantity in an indefinite amount, and most of the existing air quality monitoring stations for detecting the suspended particles are fixed points, the concentration of the suspended particles in the current periphery cannot be confirmed at all, so a miniature portable gas detection device is needed for a user to detect the concentration of the suspended particles in the periphery anytime, anywhere and anytime.
In view of the above, how to monitor the concentration of suspended particles at any time and any place is a problem that needs to be solved at present.
[ summary of the invention ]
The main object of the present invention is to provide a particle detection module, which is suitable for being assembled on a portable electronic device and a wearable accessory, wherein a micro pump is used to rapidly draw the air outside the base into a detection channel of the base and a light beam channel which are orthogonally arranged, and a particle sensor is used to detect the size and concentration of the suspended particles contained in the air, so as to form a mobile detection of the air particles at any time and any place, so that a user can monitor the concentration of the suspended particles around at any time and any place.
One broad aspect of the present disclosure is a particle detection module, comprising: the detection part bearing area is provided with an air inlet, an accommodating compartment and an air guide gap, the air inlet and the air guide gap form a communication path, the air guide gap is communicated with the accommodating compartment, the air guide channel is arranged between the micro pump bearing area and the detection part bearing area, and the air guide channel is communicated with the accommodating compartment and the air vent of the micro pump bearing area; the detection component comprises a particle sensor and a laser emitter, is arranged in the accommodating compartment of the bearing area of the detection component and is used for emitting light beams to the gas through the laser emitter so as to generate projection light spots to the particle sensor, and the particle sensor is used for detecting the size and the concentration of suspended particles contained in the gas; the micropump is borne in the micropump bearing area of the base, covers the air guide groove and comprises a gas transmission actuator, wherein the gas transmission actuator is formed by sequentially stacking a gas injection hole sheet, a cavity body frame, an actuating body, an insulating frame and a conductive frame and is used for drawing and transmitting the driven and controlled gas from the air guide groove; the micro pump is driven and controlled to draw and transmit the gas of the gas guide path communicated with the gas guide groove, so that the gas outside the base can be quickly led into the gas guide path, passes through the accommodating compartment, is orthogonally arranged with the detection channel through the light beam channel, and is irradiated by the laser emitter to project a light spot to the particle sensor, and the particle sensor detects the size and concentration of suspended particles contained in the gas.
[ brief description of the drawings ]
Fig. 1 is a schematic view of an appearance of the particle detecting module according to the present invention.
Fig. 2A is an exploded view of the related components of the particle detection module from a top view.
Fig. 2B is an exploded view of the particle detection module viewed from a bottom perspective.
Fig. 3A is an external view of the base of the particle detection module from a top view.
Fig. 3B is an appearance schematic view of the base of the particle detection module from a bottom view.
Fig. 4A is an exploded view of the laser emitter and the optical positioning member of the detecting member from a front view.
Fig. 4B is an exploded view of the laser emitter and the optical positioning component of the detecting component from a rear view.
Fig. 5 is a schematic view of the detection component of the particle detection module of the present disclosure being assembled in the detection component carrying region of the base.
Fig. 6 is a first schematic diagram of a gas flow implementation of the particle detection module of the present disclosure.
Fig. 7 is a second schematic diagram of the gas flow implementation of the gas detection of the particle detection module of the present disclosure.
Fig. 8 is an appearance schematic view of the micro-pump of the particle detection module from a bottom view.
Fig. 9A is an exploded view of the related components of the micro-pump of the particle detection module from a top view.
Fig. 9B is an exploded view of the components of the micro-pump of the particle detection module from a bottom perspective.
Fig. 10 is an exploded view of the components associated with the gas delivery actuator of the present micropump.
Fig. 11A is a schematic cross-sectional view of a gas delivery actuator of the micropump of the present invention.
Fig. 11B to 11C are schematic operation diagrams of the gas transmission actuator of the micro pump in fig. 11A.
[ detailed description ] embodiments
Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.
Referring to fig. 1, fig. 2A and fig. 2B, a particle detecting module is provided, which includes a base 1, a detecting member 2 and a micro pump 3. Referring to fig. 3A, 3B, 6 and 7, the base 1 has a micro pump receiving region 11, a detecting member receiving region 12 and an air guide channel 13 therein, wherein the micro pump receiving region 11 has an air guide groove 111, one side of the air guide groove 111 has an air vent 112, the detecting member receiving region 12 has an air inlet 121, an accommodating compartment 122 and an air guide gap 123, the air inlet 121 and the air guide gap 123 form a communicating path (such as the path indicated by the arrow shown in fig. 6), the air guide gap 123 is communicated with the accommodating compartment 122, the air guide channel 13 is disposed between the micro pump receiving region 11 and the detecting member receiving region 12, and the air guide channel 13 is communicated with the accommodating compartment 122 and the air vent 112 of the micro pump receiving region 11.
Referring to fig. 2A, 2B, 4A, 4B, 5, 6 and 7, the detecting unit 2 includes a detecting unit driving circuit board 21, a particle sensor 22, a light positioning unit 23 and a laser emitter 24. The detection component driving circuit board 21 has a notch portion 211, the detection component driving circuit board 21 covers the detection component carrying region 12, the notch portion 211 corresponds to the air guide notch 123 of the base 1, the air inlet 121 and the air guide notch 123 form a communicating path (such as a path indicated by an arrow shown in fig. 6), air outside the base 1 is introduced from the air inlet 121, guided along the detection component driving circuit board 21, enters the air guide notch 123 through the notch portion 211, then introduced into the accommodating compartment 122 communicated with the air guide notch 123, and communicated with the air guide channel 13 through the accommodating compartment 122, and the air guide channel 13 is communicated with the air vent 112 of the micropump carrying region 11, and communicated with the air guide groove 111 through the air vent 112 to form an air guide path. Wherein the particulate matter sensor 22 is a PM2.5 sensor or a PM10 sensor.
Referring to fig. 2A, fig. 2B, fig. 4A, fig. 4B, fig. 5, fig. 6 and fig. 7, the particle sensor 22 and the laser emitter 24 are packaged on the detection component driving circuit board 21 and electrically connected, the optical positioning component 23 has a containing slot 231, a beam channel 232, a detection frame opening 233 and a detection channel 234 (as shown in fig. 7), the laser emitter 24 is embedded in the positioning containing slot 231, and the containing slot 231 is communicated with the beam channel 232, so that the beam emitted by the laser emitter 24 is projected in the beam channel 232, the beam channel 232 is orthogonal to the detection channel 234, the detection frame opening 233 is arranged orthogonal to the beam channel 232 and the detection channel 234, the particle sensor 22 is packaged on the detection component driving circuit board 21, so that the particle sensor is detected at a position corresponding to the detection frame opening 233, and the detection component driving circuit board 21 is sealed in the detection component carrying area 12, the light positioning component 23 is disposed in the accommodating compartment 122 of the base 1, and the detection channel 234 is correspondingly communicated with the air guide gap 123 of the base 1 and is communicated with the air guide channel 13, and is communicated with the air guide gap 123 via the air inlet 121, and is then communicated with the accommodating compartment 122 and is communicated with the detection channel 234, and is communicated with the air guide channel 13 via the detection channel 234, and is then communicated with the air vent 112 of the micro-pump bearing region 11 via the air guide channel 13, and the air vent 112 is communicated with the air guide groove 111, so as to form an air guide path.
Referring to fig. 2A, fig. 2B, fig. 5, fig. 6 and fig. 7, the micro pump 3 is supported in the micro pump supporting region 11 of the base 1 and covers the gas guiding groove 111, and the micro pump 3 is driven and controlled to draw and transmit the gas in the gas guiding path communicated with the gas guiding groove 111. Thus, the air outside the base 1 is drawn by the micro-pump 3 and is rapidly guided into the air guide path, passes through the accommodating compartment 122 through the orthogonal position of the light beam channel 232 and the detection channel 234, is irradiated 24 by the laser emitter to project a light spot to the particle sensor 22, the particle sensor 22 detects the size and concentration of the suspended particles contained in the air, and the detected air can be guided into the air vent 112 of the micro-pump bearing area 11 through the air guide channel 13 in the air guide path, and then guided into the air guide groove 111 to be drawn by the micro-pump 3 to be discharged out of the base 1.
Referring to fig. 2A and 2B, the particle detecting module further includes a detecting component outer cover 4 and a base outer cover 5, wherein the detecting component outer cover 4 is disposed on the detecting component carrying region 12 to be sealed to form an electronic interference protection function, the detecting component outer cover 4 has an air inlet 41 corresponding to the air inlet 121 of the detecting component carrying region 12 to be communicated with the air inlet, and the base outer cover 5 covers a surface of the base 1 opposite to the micro pump carrying region 11 and the detecting component carrying region 12 to form an electronic interference protection function.
Referring to fig. 6, 7, 8, 9A and 9B, the micro pump 3 includes a micro pump driving circuit board 31, a gas transmission actuator 32, a supporting base 33 and a housing plate 34. Wherein the supporting base 33 is positioned on the micro-pump bearing area 11 of the base 1 and covers the air guide groove 111, and the surface of the supporting base 33 corresponding to the air guide groove 111 has a communication port 331, the supporting base 33 has a supporting frame groove 332 therein, the supporting frame groove 332 has an air inlet groove 333 therein, the air inlet groove 333 is communicated with the communication port 331, and the side of the supporting base 33 has an air outlet 334 communicated with the supporting frame groove 332, the air transmission actuator 32 is supported on the air inlet groove 333 and sealed on the air inlet groove 333, the air transmission actuator 32 is driven and controlled to suck and transmit the air in the air guide path communicated with the air guide groove 111, so that the air outside the base 1 is quickly guided into the air guide path through the air inlet 121, and the particle sensor 22 detects the size and concentration of the suspended particles contained in the air through the detection channel 234, then, the air flows into the air guiding groove 111 through the air vent 112, and then enters the supporting base 33 through the communicating port 331, and is sucked and transferred to the inside of the supporting frame groove 332 through the air transfer actuator 32, and finally is discharged out of the micro pump 3 through the air outlet 334. Of course, the micro-pump 3 can further cover the housing plate 34 on the exterior of the supporting base 33 to form an electronic interference protection function, the housing plate 34 also has a communication port 341 corresponding to the communication port 331 of the supporting base 33 for communication, and the housing plate 34 also has an exhaust port 342 corresponding to the exhaust port 334 of the supporting base 33 for communication.
To understand the components of the gas delivery actuator 32 of the micro pump 3 related to gas pumping and delivery, please continue to refer to fig. 10 and fig. 11A to 11C, the gas delivery actuator 32 comprises a gas hole plate 321, a cavity frame 322, an actuator 323, an insulating frame 324, and a conductive frame 325 stacked in sequence. The air injection hole 321 includes a plurality of connecting members 321a, a suspension plate 321b and a central hole 321c, the suspension plate 321b can be bent and vibrated, the connecting members 321a are adjacent to the periphery of the suspension plate 321b, in the embodiment, the number of the connecting members 321a is 4, and the connecting members are respectively adjacent to 4 corners of the suspension plate 321b, but not limited thereto, and the central hole 321c is formed in the central position of the suspension plate 321 b; the cavity frame 322 is supported and stacked on the suspension plate 321b, the actuator 323 is supported and stacked on the cavity frame 322, and comprises a piezoelectric carrier plate 323a, an adjusting resonance plate 323b, and a piezoelectric plate 323c, wherein the piezoelectric carrier plate 323a is supported and stacked on the cavity frame 322, the adjusting resonance plate 323b is supported and stacked on the piezoelectric carrier plate 323a, and the piezoelectric plate 323c is supported and stacked on the adjusting resonance plate 323b, and deforms after voltage is applied to drive the piezoelectric carrier plate 323a and the adjusting resonance plate 323b to perform reciprocating bending vibration; the insulating frame 324 is supported on the piezoelectric carrier plate 323a stacked on the actuating body 323, and the conductive frame 325 is supported on the insulating frame 324, wherein a resonant cavity 326 is formed between the actuating body 323, the cavity frame 322 and the suspension plate 321b, and the thickness of the resonant cavity 323b is adjusted to be greater than that of the piezoelectric carrier plate 323 a.
Referring to fig. 11A, the gas transmission actuator 32 is supported on the gas inlet groove 333 through a connecting member 321A, the gas injection hole piece 321 is spaced from the bottom surface of the gas inlet groove 333, and a gas flow chamber 327 is formed therebetween; as shown in fig. 11B, when a voltage is applied to the piezoelectric plate 323c of the actuating body 323, the piezoelectric plate 323c begins to deform due to the piezoelectric effect and drives the adjustment resonator plate 323B and the piezoelectric carrier plate 323a together, at this time, the gas injection hole piece 321 is driven by the Helmholtz resonance (Helmholtz resonance) principle, so that the actuating body 323 moves toward the gas flow chamber 327, the volume of the gas flow chamber 327 between the gas injection hole piece 321 and the bottom surface of the gas inlet groove 333 is compressed, the gas in the gas flow chamber 327 is compressed and enters the receiving frame groove 332 through the gap between the connecting piece 321a of the gas injection hole piece 321 and the sidewall of the gas inlet groove 333, and the gas in the gas flow chamber 327 is further transferred into the receiving frame groove 332; finally, referring to fig. 11C, when the piezoelectric plate 323C of the actuating body 323 is transformed by applying a voltage to the actuating body 323, the piezoelectric plate 323C begins to deform due to the piezoelectric effect and drives the adjusting resonator plate 323b and the piezoelectric carrier plate 323a together, at this time, the air injection hole piece 321 is driven by the Helmholtz resonance (Helmholtz resonance) principle, so that the actuating body 323 moves away from the airflow chamber 327, and therefore the volume inside the airflow chamber 327 is increased and generates a suction force to draw the air in the air guide path communicated with the air guide groove 111 (as shown in fig. 7), and the air enters the airflow chamber 327 through the communicating port 331, and the air inside the holding frame 332 is compressed to be discharged outside the micro pump 3 through the communicating port 334 and the air outlet 342 (as shown in fig. 6); by repeating the gas delivery actuation steps provided by the gas delivery actuator 32 shown in fig. 11B to 11C, the gas delivery actuator 32 can generate a pressure gradient in the flow channel formed by the gas flow chamber 327, so that the gas flows at a high speed, thereby achieving the actuation operation of the gas delivery actuator 32 to deliver the gas output.
The gas delivery actuator 32 may also be a mems gas pump fabricated by a mems process, wherein the gas injection hole 321, the cavity frame 322, the actuator 323, the insulating frame 324 and the conductive frame 325 are fabricated by a surface micromachining process to reduce the volume of the gas delivery actuator 32.
As can be seen from the above description, in the implementation of the particle detection module provided in the present invention, when the micro pump 3 is driven to adsorb and guide the gas outside the susceptor 1 into the detection channel 234 rapidly, the gas passes through the detection channel 234 and the position perpendicular to the beam channel 233, the laser emitter 24 irradiates to project a light spot to the particle sensor 22, and the particle sensor 22 detects the size and concentration of the aerosol contained in the gas. Thus, the particle detection module provided by the scheme is applied and assembled on the portable electronic device to form the movable gas particle detection module. The portable device comprises one of a mobile phone, a tablet computer, a wearable device and a notebook computer. Or the particle detection module provided by the scheme is applied and assembled on a wearing accessory to form the movable gas particle detection module. Wherein the wearing accessory comprises one of a hanging ornament, a button, a pair of glasses and a watch.
In summary, the particle detection module provided by the present invention is very suitable for being assembled on a portable electronic device and a wearable accessory, a micro pump is used to rapidly draw the air outside the base into the orthogonal position of the detection channel and the light beam channel of the base, the particle sensor is used to detect the size and concentration of the aerosol contained in the air, so as to form a mobile air particle detection module, which allows a user to monitor the concentration of the aerosol around anytime and anywhere, and has industrial applicability and advancement.
[ notation ] to show
1: base seat
11: micropump carrier region
111: air guide groove
112: vent port
12: detecting component bearing area
121: inlet inlet
122: accommodation compartment
123: air guide notch
13: air guide channel
2: detection component
21: detection component drive circuit board 211: gap part
22: particle sensor
23: optical positioning component
231: containing groove
232: light beam channel
233: detection frame mouth
234: detection channel
24: laser transmitter
3: micro pump
31: micropump driving circuit board
32: gas delivery actuator
321: air injection hole sheet
321 a: connecting piece
321b, and 2: suspension plate
321c, and (2): center hole
322: cavity frame
323: actuating body
323 a: piezoelectric carrier plate
323 b: tuning the resonator plate
323 c: piezoelectric plate
324: insulating frame
325: conductive frame
326: resonance chamber
327: airflow chamber
33: bearing base
331: communication port
332: bearing frame groove
333: air inlet groove
334: exhaust port
34: shell plate
341: communication port
342: exhaust port
4: outer cover plate of detection part
41: inlet inlet
5: outer cover plate of base

Claims (13)

1. A particle detection module, comprising:
the detection part bearing area is provided with an air inlet, an accommodating compartment and an air guide gap, the air inlet and the air guide gap form a communication path, the air guide gap is communicated with the accommodating compartment, the air guide channel is arranged between the micro pump bearing area and the detection part bearing area, and the air guide channel is communicated with the accommodating compartment and the air vent of the micro pump bearing area;
the detection component comprises a particle sensor and a laser emitter, is arranged in the accommodating compartment of the bearing area of the detection component, emits a light beam to passing gas through the laser emitter to generate a projection light spot to the particle sensor, and detects the size and concentration of suspended particles contained in the gas through the particle sensor; and
the micropump is borne in the micropump bearing area of the base, covers the air guide groove and comprises a gas transmission actuator, wherein the gas transmission actuator is formed by sequentially stacking a gas injection hole sheet, a cavity body frame, an actuating body, an insulating frame and a conductive frame and is used for drawing and transmitting the driven and controlled gas from the air guide groove;
the micro pump is driven and controlled to draw and transmit the gas in the gas guide path communicated with the gas guide groove, so that the gas outside the base can be quickly led into the gas guide path and is irradiated by the laser emitter in the accommodating compartment to project a light spot to the particle sensor, and the particle sensor detects the size and concentration of suspended particles contained in the gas.
2. The particle detection module as claimed in claim 1, wherein the detection component comprises a detection component driver circuit board and a light positioning component, wherein the particle sensor and the laser emitter are packaged and electrically connected to the detection component driver circuit board, the light positioning component has a containing slot, a beam channel, a detection frame opening and a detection channel, the laser emitter is embedded and positioned in the containing slot, and the containing slot is communicated with the beam channel, so that the beam emitted by the laser emitter is projected into the beam channel, the beam channel is orthogonal to the detection channel, the detection frame opening is arranged orthogonal to the beam channel and the detection channel, the particle sensor is packaged on the detection component driver circuit board, the position of the particle sensor corresponds to the detection frame opening, and the detection component driver circuit board is sealed in the detection component bearing area, the light positioning part is arranged in the containing compartment of the base, the detection channel is correspondingly communicated with the air guide notch of the base and communicated with the air guide channel, the air inlet is communicated with the air guide notch, the containing compartment is communicated with the detection channel and communicated with the air guide channel, the detection channel is communicated with the air guide channel, the air guide channel is communicated with the air vent, and the air vent is communicated with the air guide groove to form the air guide path.
3. The particle detecting module as claimed in claim 2, wherein the detecting member driving circuit board has a gap portion, the detecting member driving circuit board covers the detecting member carrying region to allow the gap portion to correspond to the air guiding gap of the base, the air outside the base is introduced from the air inlet, guided along the detecting member driving circuit board, enters the air guiding gap through the gap portion, is then introduced into the accommodating compartment, and is then communicated with the air guiding channel through the accommodating compartment, and the air guiding channel is communicated with the air vent, and is then communicated with the air guiding groove through the air vent to form the air guiding path.
4. The particulate detection module of claim 1, wherein the particulate sensor is a PM2.5 sensor.
5. The particle detection module of claim 1, further comprising a detection element cover and a base cover, wherein the detection element cover is supported on the detection element support region and is sealed to form an electrical interference protection, and the detection element cover has an inlet corresponding to the inlet of the detection element support region and is sealed to form an electrical interference protection on a surface of the base opposite to the micro-pump support region and the detection element support region.
6. The module of claim 1, wherein the micro-pump includes a supporting base, wherein the supporting base is located on the micro-pump supporting region of the base and covers the air guiding groove, the supporting base has a connection opening corresponding to the surface of the air guiding groove, the supporting base has a supporting frame groove therein, the supporting frame groove has an air inlet groove therein, the air inlet groove is connected to the connection opening, the supporting base has an exhaust opening at a side thereof and is connected to the supporting frame groove, the gas transmission actuator is supported on the air inlet groove and seals the air inlet groove, the gas transmission actuator is driven and controlled to draw and transmit the gas of the air guiding path connected to the air guiding groove, so that the gas outside the base is rapidly introduced into the air guiding path through the air inlet opening, the particle sensor detects the size and concentration of suspended particles contained in the gas through the detection channel, the suspended particles flow into the air guide groove through the air vent, then enter the bearing base through the communication port of the bearing base, are sucked by the gas transmission actuator and transmitted to the inside of the bearing frame groove, and finally are exhausted out of the micro pump through the exhaust port.
7. The particle detection module of claim 6, wherein the micro-pump includes a micro-pump driving circuit board, the micro-pump driving circuit board is disposed on the receiving frame slot to close the receiving frame slot, and the gas transmission actuator is electrically connected to the micro-pump driving circuit board for being driven by the control circuit.
8. The particle detection module of claim 7, wherein the air hole plate comprises a plurality of connecting members, a suspension plate and a central hole, the suspension plate can be bent and vibrated, the connecting members are adjacent to the periphery of the suspension plate, the central hole is formed at the central position of the suspension plate, the central hole is fixedly arranged above the air inlet groove of the bearing base through the connecting members and is used for positioning, the suspension plate is elastically supported, an air flow chamber is formed between the air hole plate and the air inlet groove, and at least one gap is formed between the connecting members and the suspension plate; the cavity frame is supported and superposed on the suspension plate; the actuating body is loaded and superposed on the cavity frame to receive voltage to generate reciprocating bending vibration; the insulating frame is loaded and superposed on the actuating body; the conductive frame is arranged on the insulating frame in a bearing and stacking mode; wherein, a resonance chamber is formed among the actuating body, the cavity frame and the suspension plate, the actuating body is driven to drive the air injection hole plate to generate resonance, the suspension plate of the air injection hole plate generates reciprocating vibration displacement to cause a flow channel pressure gradient in the airflow chamber, and the gas is led out through the at least one gap and then is discharged from the exhaust outlet of the bearing base, thereby realizing the transmission flow of the gas.
9. The particle detection module of claim 8, wherein the actuator comprises:
a piezoelectric carrier plate bearing and superposed on the cavity frame;
the adjusting resonance plate is loaded and stacked on the piezoelectric carrier plate; and
and the piezoelectric plate is loaded and stacked on the adjusting resonance plate to receive voltage to drive the piezoelectric carrier plate and the adjusting resonance plate to generate reciprocating bending vibration.
10. The particle detection module of claim 6, wherein the micro-pump includes a housing plate covering the exterior of the loading base for electrical interference protection, the housing plate having a communication opening corresponding to the communication opening of the loading base for communication therewith, and an exhaust opening corresponding to the exhaust opening of the loading base for communication therewith.
11. The particle detection module of claim 8, wherein the gas delivery actuator is a MEMS-based gas pump.
12. The particle detection module of claim 1, wherein the particle detection module is adapted to be mounted to a portable electronic device.
13. The particle detection module of claim 12, wherein the portable device comprises one of a mobile phone, a tablet computer, a wearable device, and a notebook computer.
CN201811000845.5A 2018-08-30 2018-08-30 Particle detection module Active CN110873679B (en)

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CN110873679B CN110873679B (en) 2023-02-21

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