CN110873681A

CN110873681A - Mobile device with particle detection module

Info

Publication number: CN110873681A
Application number: CN201811002165.7A
Authority: CN
Inventors: 莫皓然; 林景松; 陈世昌; 廖家淯; 廖鸿信; 黄启峰; 韩永隆; 陈宣恺; 郭俊毅
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2018-08-30
Filing date: 2018-08-30
Publication date: 2020-03-10
Anticipated expiration: 2038-08-30
Also published as: CN110873681B

Abstract

A mobile device having a particle detection module, comprising: a base, a body having an air inlet; the particle detection module sets up in this internally, and butt joint intercommunication air inlet contains: the base is internally provided with a detection channel and a light beam channel; the detection component is arranged in the base and comprises a laser and a particle sensor, a light beam emitted by the laser is projected into the light beam channel, and the particle sensor is correspondingly arranged at the position, orthogonal to the light beam channel, of the detection channel; the micro pump is borne in the base and covers the air guide groove; the micro pump is driven to attract and guide the gas outside the base to be quickly led into the detection channel, the gas passes through the detection channel and is orthogonal to the light beam channel, the gas is irradiated by the laser to project a light spot to the particle sensor, and the particle sensor detects the size and the concentration of suspended particles contained in the gas.

Description

Mobile device with particle detection module

[ technical field ] A method for producing a semiconductor device

The present disclosure relates to a mobile device, and more particularly, to a mobile device having a thin particle detection module for gas particle monitoring.

[ background of the invention ]

The aerosol refers to solid particles or liquid droplets contained in the air, and because the particles have very fine particle sizes, the particles easily enter the lungs of a human body through nose hairs in the nasal cavity, thereby causing inflammation, asthma or cardiovascular diseases of the lungs, and if other pollutants adhere to the aerosol, the harm to the respiratory system is further aggravated. In recent years, the problem of air pollution is getting worse, especially the concentration data of fine suspended particles (such as PM2.5 or PM10) is often too high, and the monitoring of the concentration of the air suspended particles is getting more and more important, but because the air flows with variable wind direction and air volume, and most of the existing air quality monitoring stations for detecting the suspended particles are fixed-point monitoring, the concentration of the suspended particles around the air quality monitoring stations cannot be confirmed at all, so that a miniature and portable gas detection device is needed for a user to detect the concentration of the suspended particles around at any time and any place.

In view of the above, how to monitor the concentration of suspended particles at any time and any place is a problem that needs to be solved at present.

[ summary of the invention ]

The main object of the present invention is to provide a mobile device with a particle detection module, which is achieved by embedding a thin particle detection module in the mobile device, wherein a base of the particle detection module has a detection channel and a light beam channel, and a laser and a particle sensor of a positioning detection component are arranged in the detection channel to detect the size and concentration of suspended particles contained in gas passing through the detection channel and the light beam channel at an orthogonal position, and a micro pump is used to quickly draw the gas outside a body of the mobile device into the detection channel to detect the concentration of the suspended particles in the gas, so that the mobile particle detection device is formed, and a user can monitor the concentration of the suspended particles around at any time and any place.

One broad aspect of the present disclosure is a mobile device having a particle detection module, comprising: a base and a body having an air inlet; a particle detection module, set up in this body, this air inlet of butt joint intercommunication includes: a base, which is internally provided with a detection part bearing area, a micropump bearing area, a detection channel and a light beam channel, wherein the detection channel is communicated with the air inlet of the body, the micropump bearing area is provided with an air guide groove, the micropump bearing area is communicated with the detection channel, the detection part bearing area is communicated with the light beam channel, and the detection channel is orthogonally arranged with the light beam channel; the detection component comprises a laser and a particle sensor, the laser is arranged and positioned in the detection component bearing area of the base and can emit a light beam to be projected into the light beam channel, and the particle sensor is correspondingly arranged at the position, orthogonal to the light beam channel, of the detection channel; the micro pump is borne in the micro pump bearing area of the base and covers the air guide groove; the micro pump is driven to attract and guide the gas outside the body to be quickly led into the detection channel of the base, the laser irradiates the detection channel and projects a light spot to the particle sensor through the position, which is orthogonal to the light beam channel, of the detection channel, and the particle sensor detects the size and the concentration of suspended particles contained in the gas.

[ description of the drawings ]

Fig. 1 is an external view of a mobile device having a particle detection module according to the present invention.

Fig. 2A is an external view of the particle detecting module of the present invention.

Fig. 2B is an exploded view of the related components of the particle detection module according to the present disclosure.

Fig. 3 is a schematic diagram of a base of the particle detection module according to the present invention.

Fig. 4A is a schematic diagram illustrating a preferred micro-pump of the particle detection module.

FIG. 4B is a schematic diagram of another exemplary micro-pump of the particle detection module.

FIG. 5A is an exploded view of the components associated with a preferred micropump of the particle detection module of the present invention from a top view.

FIG. 5B is an exploded view of the components associated with a preferred micropump of the particle detection module of the present invention as seen from a bottom perspective.

FIG. 6A is a schematic cross-sectional view of a preferred micropump of the particle detection module of the present invention.

FIG. 6B is a cross-sectional view of another preferred piezoelectric actuator embodiment of a preferred micropump of the particle detection module of the present invention.

Fig. 6C to 6E are schematic diagrams illustrating an operation of a micro pump of the particle detecting module of fig. 6A. Fig. 7 is an exploded view of the related components of another preferred micro-pump of the particle detection module of the present invention.

FIG. 8A is a cross-sectional view of another preferred micropump of the present particle detection module.

Fig. 8B to 8C are schematic views illustrating another preferred micro pump of the particle detecting module of fig. 8A.

Fig. 9 is an external view of a base cover of the particle detecting module according to the present invention.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 1, a mobile device with a particle detection module is provided, which includes a particle detection module 10 and a main body 20, wherein the main body 20 has an air inlet 20a and an air guide channel 20b, the particle detection module 10 is embedded in the main body 20 and is in butt joint with and communicated with the air inlet 20a and the air guide channel 20b, that is, one end of the particle detection module 10 is in butt joint with the air inlet 20a, and the other end of the particle detection module 10 is in butt joint with and communicated with the air guide channel 20b, so that air outside the mobile device can be introduced into the particle detection module 10 from the air inlet 20a and then exhausted outside the mobile device from the air guide channel 20 b. The mobile device can be one of a mobile phone, a tablet computer, a wearable device and a notebook computer.

Please refer to fig. 2A, fig. 2B, fig. 3, fig. 4A and fig. 4B. The particle detecting module 10 includes a base 1, a detecting member 2 and a micro-pump 3. In order to be assembled and applied in a mobile device, the particle detection module 10 provided by the present invention is designed to be optimally configured inside the mobile device according to the detection part 2 and the micropump 3 assembled by the current base 1, and has external dimensions of a length L, a width W and a height H, and in order to meet the design of thin miniaturization, the length L of the particle detection module 10 is configured to be 10-60 mm, the length L is 34-36 mm is optimal, the width W is configured to be 10-50 mm, the width W is 29-31 mm is optimal, the height H is configured to be 1-7 mm, and the height H is 4.5-5.5 mm is optimal, so that the whole particle detection module can be assembled in the mobile device, and the implementation design of carrying convenience is provided.

Referring to fig. 1, 2A, 2B, 3, 4A and 4B, the substrate 1 has a first surface 1a and a second surface 1B opposite to each other, and has a detecting element bearing area 11, a micro-pump bearing area 12, a detecting channel 13 and a light beam channel 14 inside, wherein the micro-pump bearing area 12 is disposed on the first surface 1a and has a gas guiding groove 121, the detecting element bearing area 11, the detecting channel 13 and the light beam channel 14 respectively penetrate through the first surface 1a and the second surface 1B, the micro-pump bearing area 12 is communicated with the detecting channel 13, the detecting element bearing area 11 is communicated with the light beam channel 14, the detecting channel 13 is orthogonal to the light beam channel 14, the substrate 1 has a gas inlet 15 and a gas outlet 16 on the side, the gas inlet 15 is communicated with the detecting channel 13, the gas outlet 16 is communicated with the gas guiding groove 121, and the air guide passage 20b of the body 20 communicates with the exhaust outlet 16 of the susceptor 1 so that the gas introduced into the sensing passage 13 of the susceptor 1 can be discharged from the exhaust outlet 16 to the outside of the body 20 through the air guide passage 20 b.

Referring to fig. 2A and 2B, the detecting component 2 includes a detecting driving circuit board 21, a particle sensor 22, a laser 23 and a microprocessor 24. Wherein the particle sensor 22, the laser 23 and the microprocessor 24 are packaged on the detection driving circuit board 21, the detection driving circuit board 21 is covered on the second surface 1b of the base 1, the laser 23 is correspondingly arranged in the detection component bearing area 11 and can emit a light beam to be projected into the light beam channel 14, the particle sensor 22 is correspondingly arranged at the position where the detection channel 13 is orthogonal to the light beam channel 14, so that the microprocessor 24 controls the action of the laser 23 and the particle sensor 22, the laser 23 emits the light beam to be irradiated into the light beam channel 14 and pass through the gas at the position where the detection channel 13 is orthogonal to the light beam channel 14, the gas generates a projection light spot to be projected onto the particle sensor 22, the particle sensor 22 detects the size and concentration of suspended particles contained in the gas and outputs a detection signal, and the microprocessor 24 receives the detection signal output by the particle sensor 22 for analysis, to output the detection data. The laser 23 includes a light positioning component 231 and a laser emitting element 232, the light positioning component 231 is disposed on the detection driving circuit board 21, and the laser emitting element 232 is embedded in the light positioning component 231 and electrically connected to the detection driving circuit board 21 to be controlled and driven by the microprocessor 24 and emit a light beam to irradiate the light beam channel 14. Wherein the particulate matter sensor 22 is a PM2.5 sensor or a PM10 sensor.

As shown in fig. 2A and 2B, the particle detecting module 10 further includes an insulating plate 5 covering the first surface 1a of the substrate 1, such that the gas outside the substrate 1 is introduced into the detecting channel 13 through the inlet 15 as shown in fig. 4A or 4B, passes through the gas guiding groove 121 of the micro-pump carrying region 12, and is exhausted outside the substrate 1 through the outlet 16 to form a gas guiding path. As shown in fig. 2A, fig. 2B and fig. 9, the particle detecting module further includes a base cover 6, which is disposed on the insulating plate 5 to enclose the first surface 1a of the base 1, so as to prevent the electronic interference, the base cover 6 also has an air inlet 61 corresponding to the air inlet 15 of the base 1 for communication, and the base cover 6 also has an air outlet 62 corresponding to the air outlet 16 of the base 1 for communication.

Referring to fig. 2A, fig. 2B, fig. 4A, fig. 4B, fig. 5A and fig. 5B, the micro pump 3 is carried in the micro pump carrying region 12 of the base 1 and covers the air guide groove 121. The micro-pump 3 is composed of a flow inlet plate 31, a resonance plate 32, a piezoelectric actuator 33, a first insulation plate 34, a conductive plate 35 and a second insulation plate 36 which are stacked in sequence. The inflow plate 31 has at least one inflow hole 31a, at least one bus groove 31b and a collecting chamber 31c, the inflow hole 31a is used for introducing gas, the inflow hole 31a correspondingly penetrates through the bus groove 31b, and the bus groove 31b converges to the collecting chamber 31c, so that the gas introduced by the inflow hole 31a converges to the collecting chamber 31 c. In the present embodiment, the number of the inflow holes 31a and the number of the bus bar grooves 31b are the same, the number of the inflow holes 31a and the number of the bus bar grooves 31b are respectively 4, and not limited thereto, the 4 inflow holes 31a respectively penetrate through the 4 bus bar grooves 31b, and the 4 bus bar grooves 31b are converged into the bus bar chamber 31 c.

Referring to fig. 5A, 5B and 6A, the resonator plate 32 is assembled on the flow inlet plate 31 by a bonding method, and the resonator plate 32 has a hollow hole 32a, a movable portion 32B and a fixed portion 32c, the hollow hole 32a is located at the center of the resonator plate 32 and corresponds to the collecting chamber 31c of the flow inlet plate 31, the movable portion 32B is disposed at the periphery of the hollow hole 32a and is opposite to the collecting chamber 31c, and the fixed portion 32c is disposed at the outer peripheral edge portion of the resonator plate 32 and is bonded to the flow inlet plate 31.

As shown in fig. 5A, fig. 5B and fig. 6A, the piezoelectric actuator 33 includes a suspension plate 33a, a frame 33B, at least one support 33c, a piezoelectric element 33d, at least one gap 33e and a protrusion 33 f. The suspension plate 33a is a square suspension plate, the suspension plate 33a is square, compared with the design of a circular suspension plate, the structure of the square suspension plate 33a obviously has the advantage of saving electricity, the consumed power of the square suspension plate 33a is increased along with the increase of the frequency due to the capacitive load operated under the resonance frequency, and the relative consumed power of the square suspension plate 33a is obviously lower due to the resonance frequency of the square suspension plate 33a being obviously lower than that of the circular suspension plate, namely, the square suspension plate 33a adopted by the scheme has the advantage and benefit of saving electricity; the outer frame 33b is disposed around the outer side of the suspension plate 33 a; at least one bracket 33c connected between the suspension plate 33a and the outer frame 33b for providing a supporting force for elastically supporting the suspension plate 33 a; and a piezoelectric element 33d having a side length less than or equal to a side length of the suspension plate 33a, the piezoelectric element 33d being attached to a surface of the suspension plate 33a for applying a voltage to drive the suspension plate 33a to vibrate in a bending manner; at least one gap 33e is formed among the suspension plate 33a, the outer frame 33b and the bracket 33c for the gas to pass through; the convex portion 33f is disposed on the other surface of the suspension plate 33a opposite to the surface to which the piezoelectric element 33d is attached, and in this embodiment, the convex portion 33f may be formed by performing an etching process on the suspension plate 33a to form a convex structure integrally protruding from the other surface of the suspension plate 33a opposite to the surface to which the piezoelectric element 33d is attached.

Referring to fig. 5A, 5B and 6A, the flow inlet plate 31, the resonator plate 32, the piezoelectric actuator 33, the first insulating plate 34, the conductive plate 35 and the second insulating plate 36 are sequentially stacked and combined, wherein a cavity space 37 is required to be formed between the suspension plate 33a and the resonator plate 32, and the cavity space 37 can be filled with a material through a gap between the resonator plate 32 and the outer frame 33B of the piezoelectric actuator 33, for example: the conductive paste, but not limited thereto, maintains a certain depth between the resonator plate 32 and the suspension plate 33a to form a chamber space 37, thereby guiding the gas to flow more rapidly and reducing contact interference with each other due to the suspension plate 33a and the resonator plate 32 being maintained at a proper distance, so that noise generation can be reduced, of course, in the embodiment, the thickness of the conductive adhesive filled in the gap between the resonator plate 32 and the outer frame 33b of the piezoelectric actuator 33 can be reduced by increasing the height of the outer frame 33b of the piezoelectric actuator 33, so that the chamber space 37 formed by the micro-pump 3 will not be indirectly affected by the thickness of the filling material of the conductive adhesive changing with the hot-pressing temperature and the cooling temperature during the assembly, the actual distance between the cavity spaces 37 after molding can be prevented from being affected by the filling material of the conductive adhesive due to the expansion and contraction factors, but not limited thereto.

In addition, the chamber space 37 will affect the transmission effect of the micro pump 3, so it is important to maintain a fixed chamber space 37 for providing stable transmission efficiency for the micro pump 3, therefore, as shown in fig. 6B, in another embodiment of the piezoelectric actuator 33, the suspension plate 33a can be formed by stamping to extend outward by a distance, which can be adjusted by at least one support 33c formed between the suspension plate 33a and the outer frame 33B, so that the surface of the convex portion 33f on the suspension plate 33a and the surface of the outer frame 33B are non-coplanar, that is, the surface of the convex portion 33f is lower than the surface of the outer frame 33B, and a small amount of filling material is coated on the assembly surface of the outer frame 33B, for example: the conductive adhesive is used for adhering the piezoelectric actuator 33 to the fixing part 32c of the resonator plate 32 in a hot pressing mode, so that the piezoelectric actuator 33 can be assembled and combined with the resonator plate 32, the structural improvement of forming a cavity space 37 by directly stamping the suspension plate 33a of the piezoelectric actuator 33 is directly adopted, the required cavity space 37 can be completed by adjusting the stamping forming distance of the suspension plate 33a of the piezoelectric actuator 33, the structural design of adjusting the cavity space 37 is effectively simplified, and the advantages of simplifying the manufacturing process, shortening the manufacturing process time and the like are achieved. In addition, the first insulating sheet 34, the conducting sheet 35 and the second insulating sheet 36 are frame-shaped thin sheets, and are sequentially stacked on the piezoelectric actuator 33 to form the overall structure of the micro-pump 3.

In order to understand the output actuation manner of the micro pump 3 for providing gas transmission, please refer to fig. 6C to 6E, please refer to fig. 6C first, the piezoelectric element 33d of the piezoelectric actuator 33 is deformed to drive the suspension plate 33a to move downward after being applied with the driving voltage, at this time, the volume of the chamber space 37 is increased, a negative pressure is formed in the chamber space 37, so as to draw the gas in the confluence chamber 31C into the chamber space 37, and the resonance plate 32 is synchronously moved downward under the influence of the resonance principle, so as to increase the volume of the confluence chamber 31C, and the gas in the confluence chamber 31C is also in a negative pressure state due to the relationship that the gas in the confluence chamber 31C enters the chamber space 37, and further, the gas is sucked into the confluence chamber 31C through the inflow hole 31a and the confluence groove 31 b; referring to fig. 6D again, the piezoelectric element 33D drives the suspension plate 33a to move upward to compress the chamber space 37, and similarly, the resonator 32 is moved upward by the suspension plate 33a due to resonance, so as to force the gas in the chamber space 37 to be pushed downward through the gap 33e, thereby achieving the effect of gas transmission; finally, referring to fig. 6E, when the suspension plate 33a is driven downward, the resonator plate 32 is also driven to move downward, and at this time, the resonator plate 32 moves the gas in the compression chamber space 37 toward the gap 33E, and increases the volume in the confluence chamber 31C, so that the gas can continuously pass through the inflow hole 31a and the confluence groove 31b to be converged in the confluence chamber 31C, and by continuously repeating the gas transmission operation steps provided by the micro pump 3 shown in fig. 6C to 6E, the micro pump 3 can continuously guide the gas from the inflow hole 31a into the flow channel formed by the inflow plate 31 and the resonator plate 32 to generate a pressure gradient, and then transmit downward through the gap 33E, so that the gas flows at a high speed, and the operation of outputting the gas transmitted by the micro pump 3 is achieved.

Referring to fig. 6A, the inlet plate 31, the resonator plate 32, the piezoelectric actuator 33, the first insulating plate 34, the conducting plate 35 and the second insulating plate 36 of the micro-pump 3 can be processed by micro-electromechanical surface micromachining to reduce the volume of the micro-pump 3, thereby forming the micro-pump 3 of the micro-electromechanical system.

As can be seen from the above description, in the implementation of the mobile device with a particle detection module provided in the present invention, the micro pump 3 is driven to suck and guide the gas outside the main body 1 into the detection channel 13 of the base 1 of the particle detection module 10, the gas passes through the detection channel 13 and the light beam channel 14 at the perpendicular position, and is irradiated by the laser 23 to project the light spot to the particle sensor 22, and the particle sensor 22 detects the size and concentration of the aerosol contained in the gas. Thus, the mobile device with the particle detection module provided by the scheme can form a mobile particle detection device.

Of course, the micro-pump of the mobile device with the particle detection module provided in the present application may also be a blower box type micro-pump to implement gas transmission in another preferred embodiment, as shown in fig. 4B, fig. 7 and fig. 8A, the micro-pump 4 is carried in the micro-pump carrying region 12 of the substrate 1 and covers the gas guiding groove 121, and the micro-pump 4 includes the sequentially stacked gas injection hole sheet 41, the cavity frame 42, the actuator 43, the insulating frame 44 and the conductive frame 45. The air-ejecting hole plate 41 includes a plurality of connecting members 41a, a floating plate 41b and a central hole 41c, the floating plate 41b can be bent and vibrated, the connecting members 41a are adjacent to the periphery of the floating plate 41b, in this embodiment, the number of the connecting members 41a is 4, and the connecting members are respectively adjacent to 4 corners of the floating plate 41b, but not limited thereto, and the central hole 41c is formed at the central position of the floating plate 41 b; the cavity frame 42 is stacked on the suspension plate 41b, the actuator 43 is stacked on the cavity frame 42, and comprises a piezoelectric carrier plate 43a, an adjusting resonance plate 43b and a piezoelectric plate 43c, wherein the piezoelectric carrier plate 43a is stacked on the cavity frame 42, the adjusting resonance plate 43b is stacked on the piezoelectric carrier plate 43a, and the piezoelectric plate 43c is stacked on the adjusting resonance plate 43b for generating deformation after voltage is applied to drive the piezoelectric carrier plate 43a and the adjusting resonance plate 43b to perform reciprocating bending vibration; the insulating frame 44 is supported on the piezoelectric carrier plate 43a stacked on the actuating body 43, and the conductive frame 45 is supported on the insulating frame 44, wherein a resonant cavity 46 is formed between the actuating body 43, the cavity frame 42 and the suspension plate 41b, and the thickness of the resonant plate 43b is adjusted to be larger than that of the piezoelectric carrier plate 43 a.

Referring to fig. 8A to 8C, the micro pump 4 is disposed on the micro pump bearing area 121 through the connection piece 41a, the air injection hole piece 41 and the bottom surface of the air guide groove 121 are disposed at an interval, and an air flow chamber 47 is formed therebetween; referring to fig. 8B, when a voltage is applied to the piezoelectric plate 43c of the actuating body 43, the piezoelectric plate 43c begins to deform due to the piezoelectric effect and drives the adjustment resonator plate 43B and the piezoelectric carrier plate 43a together, at this time, the air injection hole piece 41 is driven by Helmholtz resonance (Helmholtz resonance) principle, so that the actuating body 43 moves upward, as the actuating body 43 moves upward, the volume of the air flow chamber 47 between the air injection hole piece 41 and the bottom surface of the air guide groove 121 increases, the internal air pressure forms a negative pressure, and the air outside the micro pump 4 enters the air flow chamber 47 from the gap between the connecting piece 41a of the air injection hole piece 41 and the sidewall of the air guide groove 121 due to the pressure gradient and is collected; finally, referring to fig. 6C, the gas continuously enters the gas flow chamber 47 to make the gas pressure in the gas flow chamber 47 form a positive pressure, at this time, the actuating body 43 is driven by the voltage to move downward to compress the volume of the gas flow chamber 47 and push the gas in the gas flow chamber 47, so that the gas is discharged from the exhaust outlet 16 to the outside of the base 1, and by continuously repeating the gas transmission actuation steps provided by the micro pump 4 shown in fig. 8B to 8C, the micro pump 4 can continuously introduce the gas into the gas flow chamber 47 from the gap between the connecting piece 41a of the gas injection hole piece 41 and the sidewall of the gas guide groove 121 to form a flow channel to generate a pressure gradient, so that the gas flows at a high speed, and the actuation operation of the micro pump 4 for transmitting the gas output is achieved.

Referring to fig. 8A, the micro pump 4 may also be a mems gas pump manufactured by a mems process, wherein the gas injection hole plate 41, the cavity frame 42, the actuator 43, the insulating frame 44 and the conductive frame 45 may be manufactured by a surface micro machining technique to reduce the volume of the micro pump 4.

In summary, the mobile device with the particle detection module provided by the present disclosure is achieved by embedding the thin particle detection module in the mobile device, wherein the base of the particle detection module has a detection channel and a light beam channel, and a laser and a particle sensor configured to position the detection component are disposed in the detection channel to detect the size and concentration of the aerosol contained in the gas passing through the detection channel and the light beam channel, and a micro pump is used to quickly draw the gas outside the body of the mobile device into the detection channel to detect the concentration of the aerosol in the gas.

[ notation ] to show

1: base seat

1 a: first surface

1 b: second surface

10: particle detection module

11: detecting component bearing area

12: micropump carrier region

121: air guide groove

13: detection channel

14: light beam channel

15: inlet inlet

16: exhaust outlet

2: detection component

20: body

20 a: air inlet

20 b: air guide channel

21: detection driving circuit board

22: particle sensor

23: laser device

231: optical positioning component

232: laser emitting element

24: microprocessor

3: micro pump

31: intake plate

31 a: inlet orifice

31 b: bus bar groove

31 c: confluence chamber

32: resonance sheet

32 a: hollow hole

32 b: movable part

32c, the ratio of: fixing part

33: piezoelectric actuator

33 a: suspension plate

33 b: outer frame

33 c: support frame

33 d: piezoelectric element 33 e: gap

33 f: convex part

34: first insulating sheet

35: conductive sheet

36: second insulating sheet

37: chamber space

4: micro pump

41: air injection hole sheet

41 a: connecting piece

41 b: suspension plate

41 c: center hole

42: cavity frame

43: actuating body

43 a: piezoelectric carrier plate

43 b: tuning the resonator plate

43 c: piezoelectric plate

44: insulating frame

45: conductive frame

46: resonance chamber

47: airflow chamber

5: insulating plate

6: outer cover plate of base

61: inlet inlet

62: exhaust outlet

H: height

L: length of

W: width of

Claims

1. A mobile device having a particle detection module, comprising:

a body having an air inlet;

a particle detection module, set up in this body, this air inlet of butt joint intercommunication includes:

a base, which is internally provided with a detection part bearing area, a micropump bearing area, a detection channel and a light beam channel, wherein the detection channel is communicated with the air inlet of the body, the micropump bearing area is provided with an air guide groove, the micropump bearing area is communicated with the detection channel, the detection part bearing area is communicated with the light beam channel, and the detection channel is orthogonally arranged with the light beam channel;

the detection component comprises a laser and a particle sensor, the laser is arranged and positioned in the detection component bearing area of the base and can emit a light beam to be projected into the light beam channel, and the particle sensor is correspondingly arranged at the position, orthogonal to the light beam channel, of the detection channel; and

the micro pump is borne in the micro pump bearing area of the base and covers the air guide groove;

the micro pump is driven to attract and guide a gas outside the body to be quickly led into the detection channel of the base, the gas passes through the detection channel and the position which is orthogonal to the light beam channel, is irradiated by the laser to project a light spot to the particle sensor, and the particle sensor detects the size and the concentration of suspended particles contained in the gas.

2. The mobile device of claim 1, wherein the particle sensor is a PM2.5 sensor.

3. The mobile device of claim 1, wherein the base has a first surface and a second surface, the micro-pump receiving region is disposed on the first surface, the detecting member receiving region, the detecting channel and the light beam channel respectively pass through the first surface and the second surface, and the base has an air inlet and an air outlet on a side thereof, the air inlet corresponds to the air inlet of the body and is connected to the detecting channel, the air outlet is connected to the air guiding groove, the micro-pump is driven to suck and guide the air outside the body to rapidly enter the detecting channel from the air inlet corresponding to the air inlet, and to pass through the detecting channel and the light beam channel at an orthogonal position, and then enter the air guiding groove and to be discharged outside the base from the air outlet.

4. The mobile device of claim 3, wherein the body has an air guide channel, the air guide channel is connected to the exhaust outlet of the base, such that the gas introduced into the detection channel of the base can be exhausted from the exhaust outlet and then exhausted out of the body through the air guide channel.

5. The mobile device of claim 3, wherein the detecting component comprises a detecting driver circuit board and a microprocessor, the laser and the particle sensor are packaged on the detecting driver circuit board, the detecting driver circuit board is covered on the second surface of the base and the laser is correspondingly disposed in the detecting component carrying area, the particle sensor is correspondingly disposed at a position orthogonal to the detecting channel and the beam channel, the microprocessor is packaged on the detecting driver circuit board to control the operation of the laser and the particle sensor, so that the laser beam emitted by the laser is irradiated into the beam channel and passes through the gas at the position orthogonal to the detecting channel and the beam channel, the gas generates a projected light spot to be projected onto the particle sensor, and the particle sensor detects the size and concentration of the suspended particles contained in the gas, and outputs a detection signal, and the microprocessor receives the detection signal output by the particle sensor for analysis to output detection data.

6. The mobile device of claim 3, wherein the particle detection module comprises an insulating plate covering the first surface of the base, such that the gas outside the base is introduced into the detection channel through the inlet, passes through the gas-guiding recess of the micro-pump receiving region, and is exhausted outside the base through the outlet to form a gas-guiding path.

7. The mobile device of claim 6, wherein the particle detection module comprises a base cover member disposed on the insulating member to enclose the first surface of the base for preventing electrical interference, the base cover member having an inlet corresponding to the inlet of the base and an outlet corresponding to the outlet of the base.

8. The mobile device of claim 5, wherein the laser comprises a light positioning component and a laser emitting element, the light positioning component is disposed on the detection driving circuit board, and the laser emitting element is embedded in the light positioning component and electrically connected to the detection driving circuit board to be driven by the microprocessor and emit a light beam to irradiate the light beam channel.

9. The mobile device of claim 1, wherein the micro pump comprises:

the inflow plate is provided with at least one inflow hole, at least one bus groove and a confluence chamber, wherein the inflow hole is used for introducing the gas, the inflow hole correspondingly penetrates through the bus groove, and the bus groove is converged in the confluence chamber, so that the gas introduced by the inflow hole can be converged in the confluence chamber;

a resonance sheet, which is connected on the flow inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the confluence chamber of the flow inlet plate, the movable part is arranged at the area around the hollow hole and opposite to the confluence chamber, and the fixed part is arranged at the outer peripheral part of the resonance sheet and is attached on the flow inlet plate; and

a piezoelectric actuator, which is jointed on the resonance sheet and correspondingly arranged;

the resonance plate is provided with a flow inlet hole, a flow outlet hole and a flow inlet hole, wherein a cavity space is arranged between the resonance plate and the piezoelectric actuator, so that when the piezoelectric actuator is driven, the gas is led in from the flow inlet hole of the flow inlet plate, is collected into the flow inlet cavity through the bus groove, flows through the hollow hole of the resonance plate, and is subjected to resonance transmission by the piezoelectric actuator and the movable part of the resonance plate.

10. The mobile device of claim 9, wherein the piezoelectric actuator comprises:

a suspension plate having a square shape and capable of bending and vibrating;

an outer frame surrounding the suspension plate;

at least one bracket connected between the suspension plate and the outer frame to provide elastic support for the suspension plate; and

the piezoelectric element is attached to one surface of the suspension plate and used for applying voltage to drive the suspension plate to vibrate in a bending mode.

11. The mobile device of claim 9, wherein the micro pump further comprises a first insulating plate, a conducting plate and a second insulating plate, and wherein the flow inlet plate, the resonator plate, the piezoelectric actuator, the first insulating plate, the conducting plate and the second insulating plate are sequentially stacked and combined.

12. The mobile device of claim 9, wherein the suspension plate comprises a protrusion disposed on another surface of the suspension plate opposite to the surface attached to the piezoelectric element.

13. The mobile device of claim 12, wherein the protrusion is a protrusion integrally formed on the other surface of the suspension plate opposite to the surface attached to the piezoelectric element by etching.

14. The mobile device of claim 9, wherein the piezoelectric actuator comprises:

a suspension plate having a square shape and capable of bending and vibrating;

an outer frame surrounding the suspension plate;

at least one bracket, which is connected and formed between the suspension plate and the outer frame to provide the suspension plate with elastic support, and a surface of the suspension plate and a surface of the outer frame form a non-coplanar structure, and a cavity space is kept between the surface of the suspension plate and the resonance plate; and

15. The mobile device of claim 1, wherein the micro pump comprises:

the air injection hole sheet is arranged above the air guide groove of the micro pump bearing area of the base through a plurality of connecting pieces, an air flow chamber is formed between the air guide groove and the air injection hole sheet, and at least one gap is formed between the plurality of supports and the suspension sheet;

a cavity frame bearing and superposed on the suspension plate;

an actuating body bearing and overlapping on the cavity frame to receive voltage to generate reciprocating bending vibration;

an insulating frame bearing and superposed on the actuating body; and

a conductive frame, which is arranged on the insulating frame in a bearing and stacking manner; wherein, a resonance chamber is formed among the actuating body, the cavity frame and the suspension sheet, the actuating body is driven to drive the air injection hole sheet to generate resonance, so that the suspension sheet of the air injection hole sheet generates reciprocating vibration displacement, the gas enters the airflow chamber through the at least one gap, and the transmission and flow of the gas are realized.

16. The mobile device of claim 15, wherein the actuator comprises:

a piezoelectric carrier plate bearing and superposed on the cavity frame;

the adjusting resonance plate is loaded and stacked on the piezoelectric carrier plate; and

and the piezoelectric plate is loaded and stacked on the adjusting resonance plate to receive voltage to drive the piezoelectric carrier plate and the adjusting resonance plate to generate reciprocating bending vibration.

17. The mobile device of claim 1, wherein the micro-pump is a micro-electromechanical system micro-pump.

18. The mobile device with particle detection module of claim 1, wherein the mobile device is one of a mobile phone, a tablet computer, a wearable device and a notebook computer.

19. The mobile device of claim 1, wherein the particle detection module has a length, a width and a height, the length is 10-60 mm, the width is 10-50 mm, and the height is 1-7 mm.

20. The mobile device of claim 19, wherein the base has a length of 34-36 mm.

21. The mobile device of claim 19, wherein the base has a width of 29 to 31 mm.

22. The mobile device of claim 19, wherein the height of the base is 4.5-5.5 mm.