TWM566326U - Portable gas detection device - Google Patents

Portable gas detection device Download PDF

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Publication number
TWM566326U
TWM566326U TW107207762U TW107207762U TWM566326U TW M566326 U TWM566326 U TW M566326U TW 107207762 U TW107207762 U TW 107207762U TW 107207762 U TW107207762 U TW 107207762U TW M566326 U TWM566326 U TW M566326U
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Taiwan
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gas
chamber
actuator
detecting device
air inlet
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TW107207762U
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Chinese (zh)
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莫皓然
陳世昌
李秋霖
林景松
黃啟峰
韓永隆
郭俊毅
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研能科技股份有限公司
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Priority to TW107207762U priority Critical patent/TWM566326U/en
Publication of TWM566326U publication Critical patent/TWM566326U/en

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Abstract

一種可攜式氣體偵測裝置,包含:至少一偵測腔室,具有至少一進氣口及至少一出氣口;至少一氣體傳感器,設置於該偵測腔室內,以對該偵測腔室內氣體進行偵測;以及至少一致動器,設置於該偵測腔室內,該壓電致動件被施加一致動信號而產生共振作用,致使該偵測腔外部氣體導入進行採樣,且該致動器以瞬間採樣脈衝驅動而控制微量氣體流入該偵測腔室內形成一穩定氣流環境,致使該氣體傳感器在穩定氣流環境中對通過其表面之氣體分子溶於或鍵結在反應材料上反應,以構成即時響應而確保偵測靈敏度。A portable gas detecting device includes: at least one detecting chamber having at least one air inlet and at least one air outlet; at least one gas sensor disposed in the detecting chamber to detect the chamber Gas is detected; and at least an actuator is disposed in the detection chamber, and the piezoelectric actuator is applied with a constant motion signal to generate a resonance, so that the gas outside the detection chamber is introduced for sampling, and the actuation The device is driven by an instantaneous sampling pulse to control the flow of trace gas into the detection chamber to form a stable airflow environment, so that the gas sensor dissolves or bonds on the reaction material through gas molecules passing through the surface thereof in a stable airflow environment. It forms an immediate response and ensures detection sensitivity.

Description

可攜式氣體偵測裝置Portable gas detection device

本案關於一種可攜式氣體偵測裝置,尤指一種採取瞬間採樣脈衝進行氣體偵測之可攜式氣體偵測裝置。The present invention relates to a portable gas detecting device, and more particularly to a portable gas detecting device that uses an instantaneous sampling pulse for gas detection.

現代人對於生活周遭的氣體品質的要求愈來愈重視,例如一氧化碳、二氧化碳、揮發性有機物(Volatile Organic Compound,VOC)、PM2.5、一氧化氮、一氧化硫等等氣體,環境中這些氣體暴露會影響人體健康,嚴重的甚至危害到生命。因此環境氣體品質好壞紛紛引起各國重視,為目前急需要去重視的課題。Modern people are paying more and more attention to the gas quality around them, such as carbon monoxide, carbon dioxide, volatile organic compounds (VOC), PM2.5, nitrogen monoxide, sulfur monoxide, etc., these gases in the environment. Exposure can affect human health, and even endanger life. Therefore, the quality of environmental gases has attracted the attention of all countries, and it is an issue that needs urgent attention.

如何確認氣體品質的好壞,利用一種氣體傳感器來偵測周圍環境氣體是可行的,若又能即時提供偵測資訊,警示處在環境中的人,即時預防或逃離,避免遭受環境中所暴露有害氣體造成人體健康影響及傷害,利用氣體傳感器來偵測周圍環境氣體品質可說是非常好的應用。How to confirm the quality of gas, it is feasible to use a gas sensor to detect ambient gas. If it can provide detection information immediately, it can alert people in the environment to prevent or escape immediately, and avoid exposure to the environment. Harmful gases cause human health effects and injuries, and the use of gas sensors to detect ambient gas quality is a very good application.

目前氣體傳感器針對氣體之偵測是依據氣體導送到其表面之反應材料做反應偵測,又如第1圖所示,氣體傳感器2通常會置設於一個獨立隔離之偵測腔室1中來進行偵測,以免氣體受到其他外來因素之干擾,而偵測腔室1設有一進氣口1a及一出氣口1b,如此外部氣體可慢慢自然對流由進氣口1a進入而擴散至氣體傳感器2表面進行反應偵測,再由出氣口1b排出完成氣體偵測。然,上述氣體被氣體傳感器2偵測以自然對流方式導入偵測腔室1內之方式,其氣體導流移動的時間過長,間接影響到氣體傳感器2之偵測效率,無法達到即時偵測的目的。At present, the gas sensor detects the gas based on the reaction material that is guided to the surface of the gas, and as shown in FIG. 1, the gas sensor 2 is usually disposed in an independently isolated detection chamber 1. The detection is performed to prevent the gas from being interfered by other external factors, and the detecting chamber 1 is provided with an air inlet 1a and an air outlet 1b, so that the external gas can gradually converge naturally from the air inlet 1a and diffuse to the gas. The surface of the sensor 2 is subjected to reaction detection, and then the gas outlet 1b is exhausted to complete the gas detection. However, the gas is detected by the gas sensor 2 and introduced into the detecting chamber 1 by natural convection. The gas guiding time is too long, which indirectly affects the detection efficiency of the gas sensor 2, and cannot be detected immediately. the goal of.

為了克服上述氣體移動達到即時偵測之問題,乃將偵測腔室1組配一風扇,習知的風扇為傳統馬達轉軸式之驅動方式,雖可加快氣體導送至偵測腔室1內之方式,但氣體傳感器2之偵測靈敏度會隨著氣體流速增加或混亂氣流受到影響而失真,此乃氣體傳感器2無法即時抓取氣體分子溶於或鍵結於表面的反應材料,且抓取氣體分子之反應材料也需要一些反應時間,因此氣體流過於氣體傳感器2之表面必須要求一穩定氣流的需求,故採取風扇增加氣體流速之方式,因造成流速較高或混亂流速之因素而受到限制不適用;又,採取風扇增加氣體流速方式,風扇啟動時需要一段加速度來驅動風扇,使風扇到達一定轉速而產生較高流速,而風扇停止時也需要一段減速度來停止風扇不轉動,如此風扇啟動或停止時均需要一段加速或減速度之慣性驅動方式,如此風扇要達到即時轉動/停止是需要一段時間的,因此採取風扇增加氣體流速之方式,對於即時偵測是不適用的,故如何使氣體移動達到即時偵測問題是目前急需要克服之課題。In order to overcome the problem of the above-mentioned gas movement reaching the instant detection, the detection chamber 1 is equipped with a fan, and the conventional fan is a conventional motor shaft type driving mode, which can accelerate the gas conduction into the detection chamber 1 In this way, the detection sensitivity of the gas sensor 2 is distorted as the gas flow rate increases or the chaotic air flow is affected. This is because the gas sensor 2 cannot immediately capture the reaction material in which the gas molecules are dissolved or bonded to the surface, and the grabbing is performed. The reaction material of the gas molecule also requires some reaction time, so the gas flow over the surface of the gas sensor 2 must require a stable gas flow, so the fan is used to increase the gas flow rate, which is limited by factors such as high flow rate or chaotic flow rate. Not applicable; in addition, the fan is used to increase the gas flow rate. When the fan starts, it needs an acceleration to drive the fan, so that the fan reaches a certain speed and generates a higher flow rate. When the fan stops, it also needs a deceleration to stop the fan from rotating. Initiating or stopping requires an acceleration or deceleration inertial drive mode, so the fan must reach Instant rotation / stop will take some time, so take a fan to increase air flow in such manner, for immediate detection is not applicable, it is how to achieve real-time mobile gas detection problem is urgently needed to overcome the problem.

氣體傳感器2針對氣體之偵測達到準確靈敏度及即時響應偵測,是本案新型所需克服之重要課題,且為了使氣體傳感器與偵測腔室的偵測實施達成微型化,以方便可攜達成可隨身隨時隨地偵測的應用,也是本案新型所需研發之重要課題,若採用上述風扇增加氣體流速之方式,風扇之體積也難達到微小化,故本案提供一種可攜式氣體偵測裝置具有即時偵測採樣之特點,是本案新型研發之重要課題。The gas sensor 2 achieves accurate sensitivity and immediate response detection for gas detection, which is an important subject to be overcome in this case, and is miniaturized in order to facilitate the detection of the gas sensor and the detection chamber to facilitate portability. The application that can be detected anywhere and anytime is also an important subject of the new research and development of this case. If the fan is used to increase the gas flow rate, the volume of the fan is also difficult to be miniaturized. Therefore, the present invention provides a portable gas detecting device. The characteristics of instant detection and sampling are important topics in the new research and development of this case.

本案之主要目的係提供一種可攜式氣體偵測裝置,包含至少一偵測腔室、至少一氣體傳感器及至少一致動器,利用致動器之致動可驅動引流,提升偵測效率,且配合致動器以脈衝驅動啟動偵測腔室內瞬間採樣,並能控制微量氣體流入該偵測腔室內形成一穩定氣流環境,致使氣體傳感器在穩定氣流環境中對通過其表面之氣體分子溶於或鍵結在反應材料上反應,達成氣體傳感器具備準確靈敏度及即時響應之偵測,又致動器透過偵測腔室內隔板之隔開設置,使氣體傳感器與致動器相互隔開避免彼此干擾,且致動器之結構設置具備微型化,適用組設於裝置內使整個裝置達成微型化,以方便可攜達成隨身隨時隨地之偵測應用。The main purpose of the present invention is to provide a portable gas detecting device comprising at least one detecting chamber, at least one gas sensor and at least an actuator, wherein actuation of the actuator can drive the drainage to improve detection efficiency, and The actuator is pulse-driven to start the instantaneous sampling in the detection chamber, and can control the flow of trace gas into the detection chamber to form a stable airflow environment, so that the gas sensor dissolves the gas molecules passing through the surface in a stable airflow environment or The bond reacts on the reaction material to achieve accurate sensitivity and immediate response detection of the gas sensor, and the actuator is separated from the diaphragm in the detection chamber to separate the gas sensor from the actuator to avoid mutual interference. Moreover, the structure of the actuator is miniaturized, and the assembly is set in the device to miniaturize the entire device, so as to facilitate portable detection of anytime, anywhere.

本案之一廣義實施態樣為一種可攜式氣體偵測裝置,包含:至少一偵測腔室,具有至少一進氣口及至少一出氣口;至少一氣體傳感器,設置於該偵測腔室內,以對該偵測腔室內氣體進行偵測;以及至少一致動器,設置於該偵測腔室內,該至少一致動器包含有一壓電致動件,該壓電致動件被施加一致動信號而產生共振作用,致使該偵測腔外部氣體導入進行採樣,且該致動器以瞬間採樣脈衝驅動而控制微量氣體流入該偵測腔室內形成一穩定氣流環境,致使該氣體傳感器在穩定氣流環境中對通過其表面之氣體分子溶於或鍵結在反應材料上反應以構成即時響應而確保偵測靈敏度。A generalized implementation of the present invention is a portable gas detecting device comprising: at least one detecting chamber having at least one air inlet and at least one air outlet; at least one gas sensor disposed in the detecting chamber Detecting gas in the detection chamber; and at least an actuator disposed in the detection chamber, the at least actuator comprising a piezoelectric actuator, the piezoelectric actuator being applied The signal generates a resonance effect, so that the external gas of the detection chamber is introduced for sampling, and the actuator is driven by the instantaneous sampling pulse to control the flow of trace gas into the detection chamber to form a stable airflow environment, so that the gas sensor is in a stable airflow. In the environment, gas molecules passing through the surface thereof are dissolved or bonded to react on the reaction material to form an immediate response to ensure detection sensitivity.

體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化,其皆不脫離本案的範圍,且其中的說明及圖示在本質上當作說明之用,而非用以限制本案。Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various embodiments, and is not intended to limit the scope of the invention.

請參閱第2圖及第3圖所示,本案提供一種可攜式氣體偵測裝置包含至少一偵測腔室1、至少一氣體傳感器2及至少一致動器3,而如第3圖之實施例中僅以一個偵測腔室1、一個氣體傳感器2及一個致動器3來進行說明,但不以此為限。於本實施例中,偵測腔室1設置於裝置內形成一獨立隔離腔室,偵測腔室1內部由一隔板13區隔出一第一隔室11及一第二隔室12,以及設有至少一進氣口14及至少一出氣口15,但不以此為限。進氣口14連通第一隔室11,出氣口15連通第二隔室12,且隔板13具有一連通口131,以連通第一隔室11及第二隔室12,使得偵測腔室1的內部由進氣口14、第一隔室11、連通口131、第二隔室12、出氣口15構成一單向導送氣體之氣體通道(如第3圖箭頭所指方向之路徑)。氣體傳感器2設置於第一隔室11中,因此偵測腔室1外氣體能透過進氣口14而進入流通於氣體傳感器2之表面進行偵測。上述之氣體傳感器2可為一氧氣傳感器、一一氧化碳傳感器、一二氧化碳傳感器、一溫度傳感器、一臭氧傳感器及一揮發性有機物傳感器之至少其中之一或其組合。Please refer to FIG. 2 and FIG. 3 , the present invention provides a portable gas detecting device comprising at least one detecting chamber 1 , at least one gas sensor 2 and at least an actuator 3 , and implemented as shown in FIG. 3 . In the example, only one detection chamber 1, one gas sensor 2 and one actuator 3 are described, but not limited thereto. In this embodiment, the detecting chamber 1 is disposed in the device to form a separate isolation chamber. The interior of the detecting chamber 1 is partitioned by a partition 13 to form a first compartment 11 and a second compartment 12, And at least one air inlet 14 and at least one air outlet 15 are provided, but not limited thereto. The air inlet 14 communicates with the first compartment 11, the air outlet 15 communicates with the second compartment 12, and the partition 13 has a communication port 131 to communicate the first compartment 11 and the second compartment 12, so that the detection chamber The inside of the air inlet 14, the first compartment 11, the communication port 131, the second compartment 12, and the air outlet 15 constitute a gas passage for a single gas supply (the path indicated by the arrow in Fig. 3). The gas sensor 2 is disposed in the first compartment 11, so that the gas outside the detection chamber 1 can pass through the inlet port 14 and enter the surface of the gas sensor 2 for detection. The gas sensor 2 can be at least one of an oxygen sensor, a carbon monoxide sensor, a carbon dioxide sensor, a temperature sensor, an ozone sensor, and a volatile organic sensor, or a combination thereof.

上述致動器3封閉設置於第二隔室12與隔板13之間,當然,第二隔室12與隔板13之間也可設置多個致動器3來進行氣體導送,而如第3圖之實施例中僅說明一個致動器3來進行氣體導送,但不以此為限。於本實施例中,致動器3固設於第二隔室12與隔板13之間,以封閉第二隔室12,透過致動器3的致動導送氣體之運作,得以使第一隔室11內形成負壓,讓氣體由進氣口14導入氣體至第一隔室11中,通過氣體傳感器2之表面偵測,再透過連通口131進入第二隔室12中,再透過致動器3的致動導送氣體推送至第二隔室12內,最後由出氣口15排出,構成單一方向氣體導送。而氣體傳感器2設置於第一隔室11中,並且透過隔板13而與致動器3保持相互隔離,因此致動器3致動運作時,因其振動會產生熱源,隔板13就能抑制這些熱源去影響氣體傳感器2之偵測靈敏度。又,偵測腔室1設置於裝置內形成一獨立隔離腔室,不僅能隔絕其他干擾因素(例如裝置內所產生一些氣體汙染、熱源等干擾物質等等)對於氣體傳感器2所造成的影響,再透過致動器3之設置,以提供氣體導入導出,加快氣體導送到氣體傳感器2之表面進行監測,提升氣體傳感器偵測效率,並能達到可攜式氣體偵測裝置外氣體進行監測,使偵測腔室1內所需監測氣體特性等同於裝置外的氣體特性,隔絕其他干擾因素。The actuator 3 is disposed between the second compartment 12 and the partition 13 . Of course, a plurality of actuators 3 may be disposed between the second compartment 12 and the partition 13 for gas guiding. In the embodiment of Fig. 3, only one actuator 3 is illustrated for gas conduction, but not limited thereto. In the present embodiment, the actuator 3 is fixed between the second compartment 12 and the partition 13 to close the second compartment 12, and the operation of the gas guided by the actuator 3 is enabled. A negative pressure is formed in a compartment 11 to allow gas to be introduced into the first compartment 11 from the air inlet 14, detected by the surface of the gas sensor 2, and then passed through the communication port 131 into the second compartment 12, and then transmitted through The actuated pilot gas of the actuator 3 is pushed into the second compartment 12 and finally discharged by the air outlet 15 to constitute a single direction gas guide. The gas sensor 2 is disposed in the first compartment 11 and is separated from the actuator 3 by the partition plate 13. Therefore, when the actuator 3 is actuated, a heat source is generated due to the vibration thereof, and the partition plate 13 can These heat sources are suppressed to affect the detection sensitivity of the gas sensor 2. Moreover, the detecting chamber 1 is disposed in the device to form a separate isolation chamber, which can not only isolate other interference factors (such as some gas pollution generated in the device, interference substances such as heat sources, etc.), but also affect the gas sensor 2, Through the arrangement of the actuator 3, the gas is introduced and led out, the gas is sent to the surface of the gas sensor 2 for monitoring, the detection efficiency of the gas sensor is improved, and the gas outside the portable gas detecting device is monitored. The characteristics of the required monitoring gas in the detection chamber 1 are made equal to the characteristics of the gas outside the device, and other interference factors are isolated.

了解上述可攜式氣體偵測裝置之特點說明,以下就致動器3之結構及作動方式作一說明:To understand the characteristics of the above-mentioned portable gas detecting device, the following describes the structure and operation of the actuator 3:

請參閱第4A圖至第5D圖,致動器3為一氣體泵浦,包含有依序堆疊的一進氣板31、一共振片32、一壓電致動件33、一絕緣片34、一導電片35;進氣板31具有至少一進氣孔31a、至少一匯流排孔31b及一匯流腔室31c,上述之進氣孔31a與匯流排孔31b其數量相同,於本實施例中,進氣孔31a與匯流排孔31b以數量4個作舉例說明,並不以此為限;4個進氣孔31a分別貫通4個匯流排孔31b,且4個匯流排孔31b匯流到匯流腔室31c。Referring to FIG. 4A to FIG. 5D, the actuator 3 is a gas pump, and includes an air inlet plate 31, a resonant plate 32, a piezoelectric actuator 33, and an insulating sheet 34, which are sequentially stacked. a conductive sheet 35; the air inlet plate 31 has at least one air inlet hole 31a, at least one bus bar hole 31b, and a confluence chamber 31c. The number of the air inlet holes 31a and the bus bar holes 31b are the same, in this embodiment. The air intake hole 31a and the bus bar hole 31b are exemplified by the number of four, and are not limited thereto; the four air inlet holes 31a respectively penetrate the four bus bar holes 31b, and the four bus bar holes 31b merge to the confluence The chamber 31c.

上述之共振片32,可透過貼合方式組接於進氣板31上,且共振片32上具有一中空孔32a、一可動部32b及一固定部32c,中空孔32a位於共振片32的中心處,並與進氣板31的匯流腔室31c對應,而設置於中空孔32a的周圍且與匯流腔室31c相對的區域為可動部32b,而設置於共振片32的外周緣部分而貼固於進氣板31上則為固定部32c。The resonator piece 32 can be assembled to the air inlet plate 31 through a bonding manner. The resonator piece 32 has a hollow hole 32a, a movable portion 32b and a fixing portion 32c. The hollow hole 32a is located at the center of the resonance plate 32. And corresponding to the confluence chamber 31c of the air intake plate 31, and a region provided around the hollow hole 32a and opposed to the confluence chamber 31c is a movable portion 32b, and is provided on the outer peripheral portion of the resonance piece 32 to be attached. The air intake plate 31 is a fixing portion 32c.

上述之壓電致動件33,包含有一懸浮板33a、一外框33b、至少一支架33c、一壓電元件33d、至少一間隙33e及一凸部33f;其中,懸浮板33a為一正方型懸浮板,具有第一表面331a及相對第一表面331a的一第二表面332a,外框33b環繞設置於懸浮板33a的周緣,且外框33b具有一組配表面331b及一下表面332b,並透過至少一支架33c連接於懸浮板33a與外框33b之間,以提供彈性支撐懸浮板33a的支撐力,其中,間隙33e為懸浮板33a、外框33b與支架33c之間的空隙,用以供氣體通過。The piezoelectric actuator 33 includes a suspension plate 33a, an outer frame 33b, at least one bracket 33c, a piezoelectric element 33d, at least one gap 33e and a convex portion 33f. The suspension plate 33a is a square shape. The suspension plate has a first surface 331a and a second surface 332a opposite to the first surface 331a. The outer frame 33b is disposed around the circumference of the suspension plate 33a, and the outer frame 33b has a pair of matching surfaces 331b and a lower surface 332b. At least one bracket 33c is connected between the suspension plate 33a and the outer frame 33b to provide a supporting force for elastically supporting the suspension plate 33a, wherein the gap 33e is a gap between the suspension plate 33a, the outer frame 33b and the bracket 33c for The gas passes.

此外,懸浮板33a的第一表面331a具有凸部33f,凸部33f於本實施例中係將凸部33f的周緣且鄰接於支架33c的連接處透過蝕刻製程,使其下凹,來使懸浮板33a的凸部33f高於第一表面331a來形成階梯狀結構。In addition, the first surface 331a of the suspension plate 33a has a convex portion 33f. In the embodiment, the convex portion 33f is etched by the etching process of the peripheral edge of the convex portion 33f and adjacent to the bracket 33c to be suspended. The convex portion 33f of the plate 33a is higher than the first surface 331a to form a stepped structure.

又如第5A圖所示,本實施例之懸浮板33a採以沖壓成形使其向下凹陷,其下陷距離可由至少一支架33c成形於懸浮板33a與外框33b之間所調整,使在懸浮板33a上的凸部33f的表面與外框33b的組配表面331b兩者形成非共平面,亦即凸部33f的表面將低於外框33b的組配表面331b,且懸浮板33a的第二表面332a低於外框33b的下表面332b,又壓電元件33d貼附於懸浮板33a的第二表面332a,與凸部33f相對設置,壓電元件33d被施加驅動電壓後由於壓電效應而產生形變,進而帶動懸浮板33a彎曲振動;利用於外框33b的組配表面331b上塗佈少量黏合劑,以熱壓方式使壓電致動件33貼合於共振片32的固定部32c,進而使得壓電致動件33得以與共振片32組配結合。Further, as shown in FIG. 5A, the suspension plate 33a of the present embodiment is formed by press forming to be recessed downward, and the depression distance thereof can be adjusted by at least one bracket 33c formed between the suspension plate 33a and the outer frame 33b to be suspended. Both the surface of the convex portion 33f on the plate 33a and the combined surface 331b of the outer frame 33b form a non-coplanar, that is, the surface of the convex portion 33f will be lower than the combined surface 331b of the outer frame 33b, and the suspension plate 33a The second surface 332a is lower than the lower surface 332b of the outer frame 33b, and the piezoelectric element 33d is attached to the second surface 332a of the suspension plate 33a, disposed opposite to the convex portion 33f, and the piezoelectric element 33d is applied with a driving voltage due to the piezoelectric effect. The deformation is caused to cause the suspension plate 33a to bend and vibrate. A small amount of adhesive is applied to the assembly surface 331b of the outer frame 33b, and the piezoelectric actuator 33 is bonded to the fixing portion 32c of the resonance piece 32 by heat pressing. In turn, the piezoelectric actuator 33 is combined with the resonant plate 32.

此外,絕緣片34及導電片35皆為框型的薄型片體,依序堆疊於壓電致動件33下。於本實施例中,絕緣片34貼附於壓電致動件33之外框33b的下表面332b。In addition, the insulating sheet 34 and the conductive sheet 35 are all thin frame-shaped sheets, which are sequentially stacked under the piezoelectric actuator 33. In the present embodiment, the insulating sheet 34 is attached to the lower surface 332b of the outer frame 33b of the piezoelectric actuator 33.

請繼續參閱第5A圖,致動器3的進氣板31、共振片32、壓電致動件33、絕緣片34、導電片35依序堆疊結合後,其中懸浮板33a之第一表面331a與共振片32之間形成一腔室間距g,腔室間距g將會影響致動器3的傳輸效果,故維持一固定的腔室間距g對於致動器3提供穩定的傳輸效率是十分重要。本案之致動器3係對懸浮板33a使用沖壓方式,使其向下凹陷,讓懸浮板33a的第一表面331a與外框33b的組配表面331b兩者為非共平面,亦即懸浮板33a的第一表面331a將低於外框33b的組配表面331b,且懸浮板33a的第二表面332a低於外框33b的下表面332b,使得壓電致動件33之懸浮板33a凹陷形成一空間得與共振片32構成一可調整間距之腔室空間36,直接透過將上述壓電致動件33之懸浮板33a採以成形凹陷構成一腔室空間36的結構改良,如此一來,所需的腔室空間36得以透過調整壓電致動件33之懸浮板33a成形凹陷距離來完成,有效地簡化了調整腔室空間的結構設計,同時也達成簡化製程,縮短製程時間等優點。Continuing to refer to FIG. 5A, the air intake plate 31, the resonant plate 32, the piezoelectric actuator 33, the insulating sheet 34, and the conductive sheet 35 of the actuator 3 are sequentially stacked and combined, and the first surface 331a of the suspension plate 33a is suspended. Forming a chamber spacing g with the resonator piece 32, the chamber spacing g will affect the transmission effect of the actuator 3, so maintaining a fixed chamber spacing g is important for providing stable transmission efficiency to the actuator 3. . The actuator 3 of the present invention uses a punching method for the suspension plate 33a to be recessed downward so that both the first surface 331a of the suspension plate 33a and the assembly surface 331b of the outer frame 33b are non-coplanar, that is, the suspension plate. The first surface 331a of the 33a will be lower than the assembly surface 331b of the outer frame 33b, and the second surface 332a of the suspension plate 33a is lower than the lower surface 332b of the outer frame 33b, so that the suspension plate 33a of the piezoelectric actuator 33 is recessed. A space is formed in the chamber 36 with an adjustable pitch, and the structure of the chamber 36 is formed by directly forming the cavity 33 by forming the recessed plate 33a of the piezoelectric actuator 33. The required chamber space 36 can be completed by adjusting the recessed distance of the suspension plate 33a of the piezoelectric actuator 33, which simplifies the structural design of the adjustment chamber space, and also achieves the advantages of simplifying the process and shortening the process time.

請閱第5B圖至第5D圖所示為致動器3的作動示意圖,請先參閱第5B圖,壓電致動件33的壓電元件33d被施加驅動電壓後產生形變帶動懸浮板33a向下位移,此時腔室空間36的容積提升,於腔室空間36內形成了負壓,便汲取匯流腔室31c內的氣體進入腔室空間36內,同時共振片32受到共振原理的影響被同步向下位移,連帶增加了匯流腔室31c的容積,且因匯流腔室31c內的氣體進入腔室空間36的關係,造成匯流腔室31c內同樣為負壓狀態,進而通過匯流排孔31b、進氣孔31a來吸取氣體進入匯流腔室31c內;請再參閱第5C圖,壓電元件33d帶動懸浮板33a向上位移,壓縮腔室空間36,迫使腔室空間36內的氣體通過間隙33e向下傳輸,來達到傳輸氣體的效果,同時間,共振片32同樣被懸浮板33a因共振而向上位移,同步推擠匯流腔室31c內的氣體往腔室空間36移動;最後請參閱第5D圖,當懸浮板33a被向下帶動時,共振片32也同時被帶動而向下位移,此時的共振片32將使壓縮腔室空間36內的氣體向間隙33e移動,並且提升匯流腔室31c內的容積,讓氣體能夠持續地通過進氣孔31a、匯流排孔31b來匯聚於匯流腔室31c內,透過不斷地重複上述步驟,使致動器3能夠連續將氣體自進氣孔31a進入,再由間隙33e向下傳輸,達成傳輸氣體至氣體傳感器2的功效,以提供氣體給氣體傳感器2偵測,提升偵測效率。5B to 5D are diagrams showing the operation of the actuator 3. Referring to FIG. 5B, the piezoelectric element 33d of the piezoelectric actuator 33 is subjected to a driving voltage to generate a deformation-driven suspension plate 33a. The lower displacement, at this time, the volume of the chamber space 36 is increased, a negative pressure is formed in the chamber space 36, and the gas in the confluence chamber 31c is taken into the chamber space 36, and the resonance piece 32 is affected by the resonance principle. Synchronous downward displacement increases the volume of the confluence chamber 31c, and due to the relationship of the gas in the confluence chamber 31c into the chamber space 36, the confluence chamber 31c is also in a negative pressure state, and further passes through the manifold hole 31b. The air inlet hole 31a sucks the gas into the confluence chamber 31c; referring to FIG. 5C, the piezoelectric element 33d drives the suspension plate 33a to move upward, compressing the chamber space 36, forcing the gas in the chamber space 36 to pass through the gap 33e. The downward transmission is performed to achieve the effect of transmitting gas. At the same time, the resonator piece 32 is also displaced upward by the suspension plate 33a due to resonance, and the gas in the confluence chamber 31c is synchronously pushed to move into the chamber space 36; finally, refer to the 5D. Figure, when the suspension board When the 33a is driven downward, the resonator piece 32 is also driven to be displaced downward, and the resonator piece 32 at this time will move the gas in the compression chamber space 36 toward the gap 33e, and raise the volume in the confluence chamber 31c. The gas can be continuously collected in the confluence chamber 31c through the intake hole 31a and the bus bar hole 31b, and the above steps are continuously repeated, so that the actuator 3 can continuously enter the gas from the intake hole 31a, and then the gap The 33e is transmitted downward to achieve the function of transmitting the gas to the gas sensor 2 to provide gas to the gas sensor 2 for detection and improve detection efficiency.

請繼續參閱第5A圖,致動器3其另一實施方式可透過微機電的方式,讓致動器3成為一微機電系統氣體泵浦,其中,進氣板31、共振片32、壓電致動件33、絕緣片34、導電片35皆可透過面型微加工技術製成,以縮小致動器3的體積。Continuing to refer to FIG. 5A, another embodiment of the actuator 3 allows the actuator 3 to be a microelectromechanical system gas pump in a microelectromechanical manner, wherein the air inlet plate 31, the resonant plate 32, and the piezoelectric element The actuating member 33, the insulating sheet 34, and the conductive sheet 35 can be made through a surface micromachining technique to reduce the volume of the actuator 3.

由上述說明可知,本案利用致動器及氣體傳感器搭配設置於一偵測腔室內進行氣體偵測之結構設計,致動器及氣體傳感器具備微型化設置,以構成一可攜式氣體偵測裝置,例如,致動器及氣體傳感器搭配偵測腔室組配於一手機行動裝置內(如第3圖所示),即可構成一可攜式氣體偵測裝置,適合使用者可攜達成隨身隨時隨地對環境中氣體進行偵測,又可攜式氣體偵測裝置針對氣體偵測要具備準確靈敏度及即時響應偵測之構成要件,因此本案採用致動器3之致動可驅動引流,提升偵測效率,且配合致動器以脈衝驅動啟動瞬間採樣,控制微量氣體流入該偵測腔室內形成一穩定氣流,達成氣體偵測具備準確靈敏度及即時響應之偵測,亦即本案致動器3只需要壓電致動件33被施加一致動訊號即可瞬間啟動,未被施加一致動訊號時即可瞬間停止,完全取代傳統風扇啟動或停止時均需要一段加速或減速度之慣性驅動方式,而致動器3之壓電致動件33被施加一致動訊號即時啟動而產生一共振作用,如此共振作用致使偵測腔室1外部氣體導入進行採樣,而偵測腔室1一般採樣可為一種連續性採樣或間歇採樣,而本案實施例之採樣採取間歇採樣,且採取一種瞬間採樣的間歇採樣方式。因此致動器3實施驅動如第6圖所示之一種瞬間採樣之脈衝驅動方式,致動器3可以在非常短時間瞬間採樣之脈衝控制啟動或停止,此瞬間採樣脈衝之啟動時間(T on)與停止時間(T off)比值為0.001~0.5,且瞬間採樣脈衝之啟動時間(T on)與停止時間(T off)比值較佳值為0.01~0.2,即能即時驅動偵測腔室1內採樣,並讓偵測腔室1外部氣體被吸入由進氣口14導入形成一穩定氣流環境,致使氣體傳感器2在穩定氣流環境中對通過其表面之氣體分子溶於或鍵結在反應材料上反應以構成即時響應而確保偵測靈敏度,有效避免混亂或較高的流速而影響氣體傳感器2的靈敏度之失真問題。 As can be seen from the above description, the present invention utilizes an actuator and a gas sensor in combination with a structural design for gas detection in a detection chamber. The actuator and the gas sensor are miniaturized to form a portable gas detecting device. For example, the actuator and the gas sensor are combined with the detection chamber in a mobile device (as shown in FIG. 3) to form a portable gas detecting device, which is suitable for the user to carry around. The gas in the environment can be detected anytime and anywhere, and the portable gas detection device has the requirements of accurate sensitivity and instant response detection for gas detection. Therefore, the actuation of the actuator 3 can drive the drainage and improve the case. The detection efficiency is matched with the actuator to start sampling instantaneously by pulse driving, and the trace gas is controlled to flow into the detection chamber to form a stable airflow, and the gas detection has accurate sensitivity and immediate response detection, that is, the actuator of the present invention 3 only needs to be activated by the piezoelectric actuator 33 when the constant motion signal is applied, and can be stopped instantaneously when the constant motion signal is not applied, completely replacing the traditional fan activation. When the motion or the stop is required, an acceleration or deceleration inertial driving mode is required, and the piezoelectric actuator 33 of the actuator 3 is activated by the application of the constant motion signal to generate a resonance action, so that the resonance action causes the detection chamber 1 to be detected. The external gas is introduced for sampling, and the detection chamber 1 can be generally sampled for continuous sampling or intermittent sampling, while the sampling of the embodiment of the present invention adopts intermittent sampling and adopts an intermittent sampling method for instantaneous sampling. Therefore, the actuator 3 performs a pulse driving method of driving an instantaneous sampling as shown in FIG. 6, and the actuator 3 can start or stop the pulse control of the sampling in a very short time, and the starting time of the sampling pulse at this instant (T on The ratio of the stop time (T off ) is 0.001 to 0.5, and the ratio of the start time (T on ) to the stop time (T off ) of the instantaneous sampling pulse is preferably 0.01 to 0.2, that is, the detection chamber 1 can be driven immediately. Internal sampling, and let the outside air of the detection chamber 1 be sucked in by the air inlet 14 to form a stable airflow environment, so that the gas sensor 2 dissolves or bonds the gas molecules passing through the surface thereof in the reaction material in a stable airflow environment. The upper reaction forms an immediate response to ensure detection sensitivity, effectively avoiding confusion or high flow rate and affecting the distortion of the sensitivity of the gas sensor 2.

綜上所述,本案提供一種可攜式氣體偵測裝置,搭致動器3之致動可驅動引流,提升偵測效率,配合致動器以脈衝驅動啟動瞬間採樣,控制微量氣體流入該偵測腔室內形成一穩定氣流,達成氣體傳感器具備準確靈敏度及即時響應之偵測,且具備微型化方便可攜式之隨身隨時隨地偵測的應用,以及致動器透過偵測腔室內隔板之隔開設置,使氣體傳感器與致動器相互隔開避免彼此干擾,且致動器之結構設置具備微型化,適用組設於裝置內使整個裝置達成微型化,以方便可攜達成隨身隨時隨地之偵測應用,達到可隨身、隨時、隨地偵測的目的,極具產業利用性。In summary, the present invention provides a portable gas detecting device, which is driven by the actuator 3 to drive the drainage, improve the detection efficiency, and cooperate with the actuator to start sampling instantaneously by pulse driving, and control the flow of trace gas into the Detector. A stable airflow is formed in the measuring chamber to achieve accurate sensitivity and immediate response detection of the gas sensor, and the utility model has the advantages of miniaturization and portable portable detection at any time and anywhere, and the actuator passes through the detection chamber. Separately arranged, the gas sensor and the actuator are separated from each other to avoid mutual interference, and the structure of the actuator is miniaturized, and the assembly is arranged in the device to miniaturize the entire device, so as to facilitate portable and anytime, anywhere. The detection application achieves the purpose of being portable, always, and anywhere, and is highly industrially usable.

本案得由熟知此技術之人士任施匠思而為諸般修飾,然皆不脫如附申請專利範圍所欲保護者。This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

1‧‧‧偵測腔室
1a‧‧‧進氣口
1b‧‧‧出氣口
11‧‧‧第一隔室
12‧‧‧第二隔室
13‧‧‧隔板
131‧‧‧連通口
14‧‧‧進氣口
15‧‧‧出氣口
2‧‧‧氣體傳感器
3‧‧‧致動器
31‧‧‧進氣板
31a‧‧‧進氣孔
31b‧‧‧匯流排孔
31c‧‧‧匯流腔室
32‧‧‧共振片
32a‧‧‧中空孔
32b‧‧‧可動部
32c‧‧‧固定部
33‧‧‧壓電致動件
33a‧‧‧懸浮板
331a‧‧‧第一表面
332a‧‧‧第二表面
33b‧‧‧外框
331b‧‧‧組配表面
332b‧‧‧下表面
33c‧‧‧支架
33d‧‧‧壓電元件
33e‧‧‧間隙
33f‧‧‧凸部
34‧‧‧絕緣片
35‧‧‧導電片
36‧‧‧腔室空間
g‧‧‧腔室間距
1‧‧‧Detection chamber
1a‧‧‧air inlet
1b‧‧‧ air outlet
11‧‧‧First compartment
12‧‧‧ second compartment
13‧‧‧Baffle
131‧‧‧Connected
14‧‧‧air inlet
15‧‧‧ air outlet
2‧‧‧ gas sensor
3‧‧‧Actuator
31‧‧‧Air intake plate
31a‧‧‧Air intake
31b‧‧‧ bus bar hole
31c‧‧‧ confluence chamber
32‧‧‧Resonance film
32a‧‧‧ hollow hole
32b‧‧‧movable department
32c‧‧‧ fixed department
33‧‧‧ Piezo Actuator
33a‧‧‧suspension plate
331a‧‧‧ first surface
332a‧‧‧ second surface
33b‧‧‧ frame
331b‧‧‧ matching surface
332b‧‧‧ lower surface
33c‧‧‧ bracket
33d‧‧‧Piezoelectric components
33e‧‧‧ gap
33f‧‧‧ convex
34‧‧‧Insulation sheet
35‧‧‧Conductor
36‧‧‧Case space
G‧‧‧ Chamber spacing

第1圖為習知氣體偵測裝置之偵測腔室剖面示意圖。 第2圖為本案可攜式氣體偵測裝置之外觀示意圖。 第3圖為本案可攜式氣體偵測裝置之偵測腔室剖面示意圖。 第4A圖為本案可攜式氣體偵測裝置之致動器分解示意圖。 第4B圖為本案可攜式氣體偵測裝置之致動器另一角度分解示意圖。 第5A圖為本案可攜式氣體偵測裝置之致動器剖面示意圖。 第5B圖至第5D圖為本案可攜式氣體偵測裝置之致動器作動示意圖。 第6圖為本案可攜式氣體偵測裝置之致動器採用瞬間採樣脈衝之驅動方式示意圖。Figure 1 is a schematic cross-sectional view of a detection chamber of a conventional gas detecting device. Figure 2 is a schematic view showing the appearance of the portable gas detecting device of the present invention. FIG. 3 is a schematic cross-sectional view of the detection chamber of the portable gas detecting device of the present invention. FIG. 4A is a schematic exploded view of the actuator of the portable gas detecting device of the present invention. FIG. 4B is another perspective exploded view of the actuator of the portable gas detecting device of the present invention. FIG. 5A is a schematic cross-sectional view of the actuator of the portable gas detecting device of the present invention. 5B to 5D are schematic views of the actuator actuation of the portable gas detecting device of the present invention. Fig. 6 is a schematic view showing the driving mode of the actuator of the portable gas detecting device of the present invention using an instantaneous sampling pulse.

Claims (12)

一種可攜式氣體偵測裝置,包含: 至少一偵測腔室,具有至少一進氣口及至少一出氣口; 至少一氣體傳感器,設置於該偵測腔室內,以對該偵測腔室內氣體進行偵測;以及 至少一致動器,設置於該偵測腔室內,該至少一致動器包含有一壓電致動件,該壓電致動件被施加一致動信號而產生共振作用,致使該偵測腔室外部氣體導入進行採樣,且該致動器以一瞬間採樣脈衝驅動而控制微量氣體流入該偵測腔室內形成一穩定氣流環境,致使該至少一氣體傳感器在穩定氣流環境中對通過其表面之氣體分子溶於或鍵結在反應材料上反應,以構成即時響應而確保偵測靈敏度。A portable gas detecting device comprises: at least one detecting chamber having at least one air inlet and at least one air outlet; at least one gas sensor disposed in the detecting chamber to detect the chamber Detecting gas; and at least an actuator disposed in the detection chamber, the at least one actuator comprising a piezoelectric actuator, the piezoelectric actuator being subjected to an excitation signal to generate a resonance effect, such that The gas is introduced outside the detection chamber for sampling, and the actuator is driven by an instantaneous sampling pulse to control the flow of trace gas into the detection chamber to form a stable airflow environment, so that the at least one gas sensor passes through in a stable airflow environment. The gas molecules on the surface are dissolved or bonded to react on the reaction material to form an immediate response to ensure detection sensitivity. 如申請專利範圍第1項所述之可攜式氣體偵測裝置,其中該瞬間採樣脈衝之啟動時間(T on)與停止時間(T off )比值為0.001~0.5。 The portable gas detecting device according to claim 1, wherein a ratio of a start time (T on ) to a stop time (T off ) of the instantaneous sampling pulse is 0.001 to 0.5. 如申請專利範圍第1項所述之可攜式氣體偵測裝置,其中該瞬間採樣脈衝之啟動時間(T on)與停止時間(T off )比值為0.01~0.2。 The portable gas detecting device according to claim 1, wherein a ratio of a start time (T on ) to a stop time (T off ) of the instantaneous sampling pulse is 0.01 to 0.2. 如申請專利範圍第1項所述之可攜式氣體偵測裝置,其中該偵測腔室內部由一隔板區隔出一第一隔室及一第二隔室,該進氣口連通該第一隔室,該出氣口連通該第二隔室,且該隔板具有一連通口,以連通該第一隔室及該第二隔室,而該至少一氣體傳感器組設於該第一隔室內。The portable gas detecting device of claim 1, wherein the inside of the detecting chamber is partitioned by a partition to form a first compartment and a second compartment, and the air inlet is connected to the air inlet. a first compartment, the air outlet is connected to the second compartment, and the partition has a communication port to communicate the first compartment and the second compartment, and the at least one gas sensor is disposed in the first compartment Indoors. 如申請專利範圍第4項所述之可攜式氣體偵測裝置,其中該致動器固設於該第二隔室與該隔板之間,與該至少一氣體傳感器隔開。The portable gas detecting device of claim 4, wherein the actuator is fixed between the second compartment and the partition, and is spaced apart from the at least one gas sensor. 如申請專利範圍第1項所述之可攜式氣體偵測裝置,其中該至少一氣體傳感器包含一氧氣感測器、一一氧化碳感測器及一二氧化碳感測器之至少其中之一或其組合。The portable gas detecting device of claim 1, wherein the at least one gas sensor comprises at least one of an oxygen sensor, a carbon monoxide sensor, and a carbon dioxide sensor, or a combination thereof . 如申請專利範圍第1項所述之可攜式氣體偵測裝置,其中該至少一氣體傳感器包含一揮發性有機物傳感器。The portable gas detecting device of claim 1, wherein the at least one gas sensor comprises a volatile organic sensor. 如申請專利範圍第1項所述之可攜式氣體偵測裝置,其中該致動器為一微機電系統氣體泵浦。The portable gas detecting device of claim 1, wherein the actuator is a MEMS gas pump. 如申請專利範圍第1項所述之可攜式氣體偵測裝置,其中該致動器為一氣體泵浦,其包含: 一進氣板,具有至少一進氣孔、至少一匯流排孔及一匯流腔室,其中該至少一進氣孔供導入氣流,該至少一匯流排孔對應該至少一進氣孔,且引導該至少一進氣孔之氣流匯流至該匯流腔室; 一共振片,具有一中空孔對應該匯流腔室,且該中空孔之周圍為一可動部; 其中該壓電致動件,與該共振片相對應設置,而該共振片與該壓電致動件之間具有一腔室空間,以使該壓電致動件受驅動時,使氣流由該進氣板之該至少一進氣孔導入,經該至少一匯流排孔匯集至該匯流腔室,再流經該共振片之該中空孔,由該壓電致動件與該共振片之該可動部產生共振傳輸氣流。The portable gas detecting device of claim 1, wherein the actuator is a gas pump, comprising: an air inlet plate having at least one air inlet hole, at least one bus bar hole, and a confluence chamber, wherein the at least one air inlet hole is configured to introduce a gas flow, the at least one bus line hole corresponding to the at least one air inlet hole, and the air flow guiding the at least one air inlet hole is converged to the confluence chamber; Having a hollow hole corresponding to the confluence chamber, and the periphery of the hollow hole is a movable portion; wherein the piezoelectric actuator is disposed corresponding to the resonance piece, and the resonance piece and the piezoelectric actuator Having a chamber space therebetween, such that when the piezoelectric actuator is driven, the air flow is introduced from the at least one air inlet hole of the air inlet plate, and is collected into the convergence chamber through the at least one bus bar hole, and then The hollow hole flowing through the resonance piece generates a resonant transmission airflow by the piezoelectric actuator and the movable portion of the resonance piece. 如申請專利範圍第9項所述之可攜式氣體偵測裝置,其中該壓電致動件包含: 一懸浮板,具有一第一表面及一第二表面,該第一表面具有一凸部; 一外框,環繞設置於該懸浮板之外側,並具有一組配表面; 至少一支架,連接於該懸浮板與該外框之間,以提供彈性支撐該懸浮板;以及 一壓電元件,貼附於該懸浮板之該第二表面上,用以施加電壓以驅動該懸浮板彎曲振動; 其中,該至少一支架成形於該懸浮板與該外框之間,並使該懸浮板之該第一表面與該外框之該組配表面形成為非共平面結構,且使該懸浮板之該第一表面與該共振板保持一腔室空間。The portable gas detecting device of claim 9, wherein the piezoelectric actuator comprises: a suspension plate having a first surface and a second surface, the first surface having a convex portion An outer frame disposed around the outer side of the suspension plate and having a set of matching surfaces; at least one bracket connected between the suspension plate and the outer frame to provide elastic support for the suspension plate; and a piezoelectric element Attaching to the second surface of the suspension plate for applying a voltage to drive the suspension plate to bend vibration; wherein the at least one bracket is formed between the suspension plate and the outer frame, and the suspension plate is The first surface and the assembled surface of the outer frame are formed in a non-coplanar structure, and the first surface of the suspension plate and the resonant plate are maintained in a chamber space. 如申請專利範圍第9項所述之可攜式氣體偵測裝置,其中該氣體泵浦包括一導電片以及一絕緣片,該進氣板、該共振片、該壓電致動件、該導電片及該絕緣片依序堆疊設置。The portable gas detecting device of claim 9, wherein the gas pump comprises a conductive sheet and an insulating sheet, the air bearing plate, the resonant plate, the piezoelectric actuator, and the conductive The sheet and the insulating sheet are stacked in sequence. 一種可攜式氣體偵測裝置,包含: 至少一偵測腔室,具有至少一進氣口及至少一出氣口; 至少一氣體傳感器,設置於該偵測腔室內,以對該偵測腔室內氣體進行偵測;以及 至少一致動器,設置於該偵測腔室內,該致動器包含有至少一壓電致動件,該壓電致動件被施加至少一致動信號而產生共振作用,致使該偵測腔室外部氣體導入進行採樣,且該致動器以至少一瞬間採樣脈衝驅動而控制微量氣體流入該偵測腔室內形成至少一穩定氣流環境,致使該氣體傳感器在穩定氣流環境中對通過其表面之氣體分子溶於或鍵結在反應材料上反應,以構成即時響應而確保偵測靈敏度。A portable gas detecting device comprises: at least one detecting chamber having at least one air inlet and at least one air outlet; at least one gas sensor disposed in the detecting chamber to detect the chamber Detecting a gas; and at least an actuator disposed in the detection chamber, the actuator including at least one piezoelectric actuator, the piezoelectric actuator being applied with at least a constant motion signal to generate a resonance effect, Causing the gas outside the detection chamber to be sampled, and the actuator is driven by at least one instantaneous sampling pulse to control the flow of trace gas into the detection chamber to form at least one stable airflow environment, so that the gas sensor is in a stable airflow environment. The gas molecules passing through the surface are dissolved or bonded to react on the reaction material to form an immediate response to ensure detection sensitivity.
TW107207762U 2018-06-08 2018-06-08 Portable gas detection device TWM566326U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI664410B (en) * 2018-06-08 2019-07-01 研能科技股份有限公司 Portable gas detecting device
TWI723771B (en) * 2020-02-11 2021-04-01 研能科技股份有限公司 Miniature gas detection and purification device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI664410B (en) * 2018-06-08 2019-07-01 研能科技股份有限公司 Portable gas detecting device
TWI723771B (en) * 2020-02-11 2021-04-01 研能科技股份有限公司 Miniature gas detection and purification device

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