TWM538596U - Vacuum packaging leak detection system - Google Patents
Vacuum packaging leak detection system Download PDFInfo
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- TWM538596U TWM538596U TW105216769U TW105216769U TWM538596U TW M538596 U TWM538596 U TW M538596U TW 105216769 U TW105216769 U TW 105216769U TW 105216769 U TW105216769 U TW 105216769U TW M538596 U TWM538596 U TW M538596U
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- 238000001514 detection method Methods 0.000 title claims description 36
- 238000009461 vacuum packaging Methods 0.000 title claims description 28
- 239000007789 gas Substances 0.000 claims description 64
- 239000001307 helium Substances 0.000 claims description 10
- 229910052734 helium Inorganic materials 0.000 claims description 10
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 10
- 238000007664 blowing Methods 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 238000005086 pumping Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000010412 perfusion Effects 0.000 description 1
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Description
本新型關於一種真空包裝測漏系統。 The present invention relates to a vacuum packaging leak detection system.
目前已有針對電子元件真空包裝的不同測漏設計。舉例而言，習知設計揭示一種觀察真空包裝於大氣環境下外觀是否膨脹的測漏方式，其中真空包裝係置於一壓力可變化的密閉腔體，且一檢測單元可檢測真空包裝外觀是否有膨脹來判斷是否有洩漏產生。然而，上述的習知設計因係利用外觀是否有膨脹來判斷，故等待時間較長導致檢測速度較慢，且僅能得知是否有洩漏產生而無法進一步得知真空包裝袋的漏率。因此亟需一種可以快速測漏且可得知真空包裝漏率的測漏方式。 Different leak detection designs for vacuum packaging of electronic components are available. For example, the conventional design reveals a leak detection method for observing whether the appearance of the vacuum package is expanded in an atmospheric environment, wherein the vacuum package is placed in a closed chamber with a variable pressure, and a detecting unit can detect whether the appearance of the vacuum package has Expand to determine if a leak has occurred. However, the above-mentioned conventional design is judged by whether or not the appearance is expanded, so that the waiting time is long, the detection speed is slow, and only the leakage is generated, and the leak rate of the vacuum packaging bag cannot be further known. Therefore, there is a need for a leak detection method that can quickly detect leaks and know the leak rate of vacuum packages.
「先前技術」段落只是用來幫助了解本新型內容，因此在「先前技術」段落所揭露的內容可能包含一些沒有構成所屬技術領域中具有通常知識者所知道的習知技術。在「先前技術」段落所揭露的內容，不代表該內容或者本新型一個或多個實施例所要解決的問題，在本新型申請前已被所屬技術領域中具有通常知識者所知曉或認知。 The "previously technical" paragraphs are only intended to aid in understanding the present invention, and thus the disclosure of the prior art paragraphs may contain prior art that is not known to those of ordinary skill in the art. The matters disclosed in the "Prior Art" section do not represent the subject matter or the problems to be solved by one or more embodiments of the present invention, which are known or recognized by those of ordinary skill in the art prior to the present application.
本新型提供一種於真空包裝測漏系統。 The present invention provides a leak detection system for vacuum packaging.
本新型的其他目的和優點可以從本新型所揭露的技術特徵中得到進一步的了解。 Other objects and advantages of the present invention will be further understood from the technical features disclosed herein.
為達上述之一或部份或全部目的或是其他目的，本新型之一實施例提出一種真空包裝測漏系統，包含：一第一腔體，容置至少一真空包裝；一抽氣裝置，連接第一腔體以將第一腔體抽成真空；一供氣裝置，連接第一腔體以於第一腔體被抽成真空後將一測漏氣體送入第一腔體；一第二腔體，容置由第一腔體移送而來的真空包裝；以及一氣體檢出裝置，連接第二腔體，氣體檢出裝置對第二腔體抽氣至使第二腔體的壓力下降至 氣體檢出裝置的一工作壓力範圍，且氣體檢出裝置於工作壓力範圍偵測第二腔體是否存在由真空包裝釋出的測漏氣體。 In order to achieve one or a part or all of the above or other purposes, an embodiment of the present invention provides a vacuum packaging leak detection system, comprising: a first cavity, accommodating at least one vacuum package; and an air suction device, Connecting the first cavity to draw the first cavity into a vacuum; a gas supply device connecting the first cavity to send a leak detection gas into the first cavity after the first cavity is evacuated; a two-chamber receiving a vacuum package transferred from the first cavity; and a gas detecting device connecting the second cavity, the gas detecting device pumping the second cavity to the pressure of the second cavity decrease to A working pressure range of the gas detecting device, and the gas detecting device detects, in the working pressure range, whether the second cavity has a leak detecting gas released by the vacuum package.
藉由上述各個實施例的設計，利用氣體檢出裝置檢測測漏氣體是否進入真空包裝的方式，可快速得知真空包裝是否洩露而節省檢測時間，且若真空包裝具有破洞而產生洩漏，因氣體檢出裝置可精確得知該真空包裝實際漏率，故藉由比較該真空包裝的實際漏率與產品或製程所需的真空標準，可判斷該真空包裝是否仍可使用或為需淘汰的瑕疵品。 With the design of each of the above embodiments, the gas detecting device is used to detect whether the leaking gas enters the vacuum packaging manner, so that the vacuum packaging can be quickly leaked to save the detection time, and if the vacuum packaging has a hole, a leak occurs. The gas detecting device can accurately know the actual leak rate of the vacuum package, so by comparing the actual leak rate of the vacuum package with the vacuum standard required for the product or the process, it can be judged whether the vacuum package can still be used or needs to be eliminated. Defective.
本新型的其他目的和優點可以從本新型所揭露的技術特徵中得到進一步的了解。為讓本新型之上述和其他目的、特徵和優點能更明顯易懂，下文特舉實施例並配合所附圖式，作詳細說明如下。 Other objects and advantages of the present invention will be further understood from the technical features disclosed herein. The above and other objects, features, and advantages of the present invention will become more apparent and understood.
10‧‧‧真空包裝測漏系統 10‧‧‧Vacuum packaging leak detection system
12‧‧‧第一腔體 12‧‧‧First cavity
14‧‧‧抽氣裝置 14‧‧‧Exhaust device
141‧‧‧真空幫浦 141‧‧‧vacuum pump
142‧‧‧真空管路閥 142‧‧‧Vacuum line valve
16‧‧‧供氣裝置 16‧‧‧ gas supply
161‧‧‧氣體鋼瓶 161‧‧‧ gas cylinder
162‧‧‧調壓閥 162‧‧‧pressure regulator
163‧‧‧流量控制器 163‧‧‧Flow controller
17‧‧‧測漏氣體 17‧‧‧Leakage gas
18‧‧‧移動裝置 18‧‧‧Mobile devices
181‧‧‧搬運軌道 181‧‧‧Handling track
182‧‧‧搬運夾頭 182‧‧‧Handling chucks
183‧‧‧吹氣裝置 183‧‧‧Blowing device
22‧‧‧第二腔體 22‧‧‧Second cavity
24‧‧‧氣體檢出裝置 24‧‧‧ gas detection device
28、38‧‧‧洩壓閥 28, 38‧‧‧ Pressure relief valve
32‧‧‧控制單元 32‧‧‧Control unit
34、36‧‧‧真空計 34, 36‧‧‧ vacuum gauge
42‧‧‧真空包裝 42‧‧‧vacuum packaging
S102-S112‧‧‧方法步驟 S102-S112‧‧‧ Method steps
圖1為本新型一實施例的真空包裝測漏系統的示意圖。 1 is a schematic view of a vacuum packaging leak detection system according to an embodiment of the present invention.
圖2為本新型一實施例的真空包裝測漏方法的流程圖。 2 is a flow chart of a vacuum packaging leak detection method according to an embodiment of the present invention.
有關本新型之前述及其他技術內容、特點與功效，在以下配合參考圖式之實施例的詳細說明中，將可清楚的呈現。以下實施例中所提到的方向用語，例如：上、下、左、右、前或後等，僅是參考附加圖式的方向。因此，使用的方向用語是用來說明並非用來限制本新型。 The foregoing and other technical aspects, features and advantages of the present invention will be apparent from the following detailed description of the embodiments of the invention. The directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only directions referring to the additional drawings. Therefore, the directional term used is used to describe that it is not intended to limit the invention.
圖1為本新型一實施例的真空包裝測漏系統的示意圖。如圖1所示，真空包裝測漏系統10包含一第一腔體12、一抽氣裝置14、一供氣裝置16、一移動裝置18、一第二腔體22及一氣體檢出裝置24。一例如真空包裝42的待測物可放入一可開啟與密閉之第一腔體12內，再利用抽氣裝置14將第一腔體12抽真空至一定壓力以排除腔體內的大氣。於一實施例中，抽氣裝置14例如可包含一真空幫浦141及一真空管路閥142。於第一腔體12被抽成真空或腔體內的大氣已被排除後，供氣裝置16可將例如氦氣或氫氣的測漏氣體17灌注進入第一腔體12內，達到一預定壓力後停止灌注並等待一段預設時間。於一實施例中，供氣裝置16例如可包含一氣體鋼瓶161、一調壓閥162及一流量控制器163，例如氦氣或氫氣的測漏氣體17貯存於氣體鋼瓶161，調壓閥162可調節氣體鋼瓶161的出口壓力， 且流量控制器163可便於控制測漏氣體17進入第一腔體12的流量。在測漏氣體17灌入第一腔體12後的等待時間內，因第一腔體12內的壓力高於真空包裝42內之壓力，若真空包裝42有破洞，第一腔體12內的測漏氣體17會進入真空包裝42內。於本實施例中，預設的等待時間的長度並不限定，舉例而言，若真空包裝42存在破洞，當破洞越小測漏氣體17進入真空包裝42的速度越慢，故越長的等待時間可實現精細度更高的檢測而發現程度極輕微的氣體洩露，但相對檢測時間較長，故可視實際需求變化等待時間的長度。 1 is a schematic view of a vacuum packaging leak detection system according to an embodiment of the present invention. As shown in FIG. 1 , the vacuum packaging leak detection system 10 includes a first cavity 12 , an air extracting device 14 , a gas supply device 16 , a moving device 18 , a second cavity 22 , and a gas detecting device 24 . . A test object such as the vacuum package 42 can be placed in a first cavity 12 that can be opened and sealed, and the first cavity 12 is evacuated to a certain pressure by the air suction device 14 to remove the atmosphere in the cavity. In an embodiment, the air extracting device 14 can include, for example, a vacuum pump 141 and a vacuum line valve 142. After the first cavity 12 is evacuated or the atmosphere in the cavity has been removed, the gas supply device 16 can inject a leak detecting gas 17, such as helium or hydrogen, into the first cavity 12 to reach a predetermined pressure. Stop perfusion and wait for a preset time. In an embodiment, the gas supply device 16 can include, for example, a gas cylinder 161, a pressure regulating valve 162, and a flow controller 163. The leak detecting gas 17 such as helium or hydrogen is stored in the gas cylinder 161, and the pressure regulating valve 162 The outlet pressure of the gas cylinder 161 can be adjusted, And the flow controller 163 can facilitate controlling the flow of the leak detecting gas 17 into the first cavity 12. In the waiting time after the leak detecting gas 17 is poured into the first cavity 12, since the pressure in the first cavity 12 is higher than the pressure in the vacuum package 42, if the vacuum package 42 has a hole, the first cavity 12 is inside. The leak test gas 17 will enter the vacuum package 42. In this embodiment, the length of the preset waiting time is not limited. For example, if the vacuum package 42 has a hole, the smaller the hole is, the slower the leaking gas 17 enters the vacuum package 42, so the longer the length The waiting time can achieve a finer detection and find a very slight gas leak, but the relative detection time is longer, so the length of the waiting time can be changed depending on the actual demand.
移動裝置18可將真空包裝42由第一腔體12移動至第二腔體22，第二腔體22例如為一可開啟與密閉之真空腔體。於真空包裝42被移送至第二腔體22前，可選擇性地進行例如利用抽氣裝置14將第一腔體12內的測漏氣體17抽走，並利用洩壓閥28將第一腔體12洩壓至例如大氣壓力後再開啟第一腔體12等動作。於一實施例中，如圖1所示，移動裝置18可包含一搬運軌道181及一搬運夾頭182，搬運夾頭182於第一腔體12夾住真空包裝42後沿搬運軌道181移動，到達第二腔體22位置後搬運夾頭182鬆開讓真空包裝42留在第二腔體22。移動裝置18可另包含一吹氣裝置183，在真空包裝42的移動過程中，吹氣裝置183可朝真空包裝42的表面吹氣，吹除附著在表面的測漏氣體17以防止誤偵測。真空包裝42移入第二腔體22後密閉第二腔體22，再啟動氣體檢出裝置24將第二腔體22抽真空至氣體檢出裝置24的工作壓力範圍，再由氣體檢出裝置24開始測漏。於一實施例中，氣體檢出裝置24例如可為氦氣測漏儀或氫氣測漏儀。由於第二腔體22壓力小於真空包裝42內之壓力，若是真空包裝42有破洞，此時測漏氣體17會從真空包裝42內釋出，氣體檢出裝置24將會偵測到由真空包裝42釋出的測漏氣體17(例如氦氣或氫氣)。舉例而言，氣體檢出裝置24例如可為一氦氣測漏儀，若氦氣測漏儀偵測到之氦氣漏率為背景值，代表真空包裝42沒有破洞；若氦氣測漏儀偵測到之氦氣漏率大於背景值，代表真空包裝42存在破洞。氣體檢出裝置24可將真空包裝42之實際漏率等資訊傳送給一控制單元32。完成測漏後，氣體檢出裝置24可關閉並開啟第二腔體22，且由移動裝置18將真空包裝42取出。於一實施例中，可利 用洩壓閥38將第二腔體22洩壓至例如大氣壓力後再開啟第二腔體22。 The mobile device 18 can move the vacuum package 42 from the first cavity 12 to the second cavity 22, which is, for example, an openable and sealed vacuum cavity. Before the vacuum package 42 is transferred to the second chamber 22, the leak detection gas 17 in the first chamber 12 can be selectively withdrawn, for example, by the suction device 14, and the first chamber can be removed by the pressure relief valve 28. After the body 12 is released to, for example, atmospheric pressure, the first cavity 12 is opened. In an embodiment, as shown in FIG. 1 , the mobile device 18 can include a transport rail 181 and a transport chuck 182 . The transport chuck 182 moves along the transport rail 181 after the first cavity 12 clamps the vacuum package 42 . Upon reaching the second cavity 22 position, the carrier chuck 182 is released to allow the vacuum package 42 to remain in the second cavity 22. The moving device 18 may further include an air blowing device 183. During the movement of the vacuum package 42, the air blowing device 183 may blow the surface of the vacuum package 42 to blow off the leak detecting gas 17 attached to the surface to prevent false detection. . After the vacuum package 42 is moved into the second cavity 22, the second cavity 22 is sealed, and then the gas detecting device 24 is activated to evacuate the second cavity 22 to the working pressure range of the gas detecting device 24, and then the gas detecting device 24 is used. Start leak detection. In one embodiment, the gas detection device 24 can be, for example, a helium leak detector or a hydrogen leak detector. Since the pressure of the second chamber 22 is less than the pressure in the vacuum package 42, if the vacuum package 42 has a hole, the leak gas 17 will be released from the vacuum package 42, and the gas detecting device 24 will detect the vacuum. The leak detecting gas 17 (for example, helium or hydrogen) released from the package 42. For example, the gas detecting device 24 can be, for example, a helium leak detector. If the helium leak rate detected by the helium leak detector is a background value, it means that the vacuum package 42 has no holes; The helium leak rate detected by the instrument is greater than the background value, indicating that there is a hole in the vacuum package 42. The gas detecting device 24 can transmit information such as the actual leak rate of the vacuum package 42 to a control unit 32. Upon completion of the leak test, the gas detection device 24 can close and open the second chamber 22, and the vacuum package 42 is removed by the mobile device 18. In an embodiment, the profitable The second chamber 22 is opened by the pressure relief valve 38 to relieve the second chamber 22 to, for example, atmospheric pressure.
於本新型的各個實施例中，真空包裝42的種類及形式完全不限定，例如可為一真空包裝袋。再者，真空包裝測漏系統10可包含分別設置於第一腔體12及第二腔體22的真空計34及真空計36，以分別量測第一腔體12及第二腔體22內的壓力及真空度。 In various embodiments of the present invention, the type and form of the vacuum package 42 is not limited at all, and may be, for example, a vacuum package. Furthermore, the vacuum package leak detection system 10 can include a vacuum gauge 34 and a vacuum gauge 36 disposed in the first cavity 12 and the second cavity 22, respectively, to measure the first cavity 12 and the second cavity 22, respectively. Pressure and vacuum.
綜上所述，本新型之實施例的真空包裝測漏系統至少具有下列其中一個優點：藉由上述各個實施例的設計，利用氣體檢出裝置檢測測漏氣體是否進入真空包裝的方式，可快速得知真空包裝是否洩露而節省檢測時間，且若真空包裝具有破洞而產生洩漏，因氣體檢出裝置可精確得知該真空包裝實際漏率，故藉由比較該真空包裝的實際漏率與產品或製程所需的真空標準，可判斷該真空包裝是否仍可使用或為需淘汰的瑕疵品。 In summary, the vacuum packaging leak detection system of the embodiment of the present invention has at least one of the following advantages: by the design of each of the above embodiments, the gas detecting device is used to detect whether the leaking gas enters the vacuum packaging manner, and can be quickly It is known that the vacuum packaging leaks and saves the detection time, and if the vacuum packaging has a hole and leaks, the gas detecting device can accurately know the actual leak rate of the vacuum packaging, so by comparing the actual leakage rate of the vacuum packaging with The vacuum standard required for the product or process to determine if the vacuum package is still usable or is a defective product.
藉由上述各個實施例的設計，可提供一種真空包裝測漏方法。首先，一待測真空包裝可置入一第一腔體並將第一腔體抽成真空以排除第一腔體內的大氣(步驟S104)，且測漏氣體可送入第一腔體並靜置一段預設時間，且於預設時間過後將待測真空包裝移送至一第二腔體(步驟S106)。接著，對第二腔體抽氣以使第二腔體之壓力降至一預設之壓力範圍，該預設壓力範圍例如可為一氣體檢出裝置的工作壓力範圍(步驟S108)，且可利用氣體檢出裝置於工作壓力範圍偵測由真空包裝釋出至第二腔體的測漏氣體(步驟S110)，以判斷真空包裝是否洩漏並可得知真空包裝的漏率。 With the design of each of the above embodiments, a vacuum packaging leak detection method can be provided. First, a vacuum package to be tested can be placed into a first cavity and the first cavity is evacuated to exclude the atmosphere in the first cavity (step S104), and the leaky gas can be sent to the first cavity and statically The preset time is set, and after the preset time elapses, the vacuum package to be tested is transferred to a second cavity (step S106). Then, the second cavity is evacuated to reduce the pressure of the second cavity to a predetermined pressure range, and the preset pressure range may be, for example, a working pressure range of the gas detecting device (step S108), and The gas detecting device detects the leaking gas released from the vacuum package to the second cavity by using the gas detecting device (step S110) to determine whether the vacuum package leaks and can know the leak rate of the vacuum package.
惟以上所述者，僅為本新型之較佳實施例而已，當不能以此限定本新型實施之範圍，即大凡依本新型申請專利範圍及新型說明內容所作之簡單的等效變化與修飾，皆仍屬本新型專利涵蓋之範圍內。另外本新型的任一實施例或申請專利範圍不須達成本新型所揭露之全部目的或優點或特點。此外，本說明書或申請專利範圍中提及的「第一」、「第二」等用語僅用以命名元件的名稱或區別不同實施例或範圍，而並非用來限制元件數量上的上限或下限。 However, the above description is only a preferred embodiment of the present invention, and the scope of the present invention cannot be limited thereto, that is, the simple equivalent change and modification made by the novel patent application scope and the novel description content, All remain within the scope of this new patent. In addition, any of the embodiments or the claims of the present invention are not required to achieve all of the objects or advantages or features disclosed herein. In addition, the terms "first" and "second" as used in the specification or the scope of the claims are only used to name the components or distinguish different embodiments or ranges, and are not intended to limit the upper or lower limits of the number of components. .
10‧‧‧真空包裝測漏系統 10‧‧‧Vacuum packaging leak detection system
12‧‧‧第一腔體 12‧‧‧First cavity
14‧‧‧抽氣裝置 14‧‧‧Exhaust device
141‧‧‧真空幫浦 141‧‧‧vacuum pump
142‧‧‧真空管路閥 142‧‧‧Vacuum line valve
16‧‧‧供氣裝置 16‧‧‧ gas supply
161‧‧‧氣體鋼瓶 161‧‧‧ gas cylinder
162‧‧‧調壓閥 162‧‧‧pressure regulator
163‧‧‧流量控制器 163‧‧‧Flow controller
17‧‧‧測漏氣體 17‧‧‧Leakage gas
18‧‧‧移動裝置 18‧‧‧Mobile devices
181‧‧‧搬運軌道 181‧‧‧Handling track
182‧‧‧搬運夾頭 182‧‧‧Handling chucks
183‧‧‧吹氣裝置 183‧‧‧Blowing device
22‧‧‧第二腔體 22‧‧‧Second cavity
24‧‧‧氣體檢出裝置 24‧‧‧ gas detection device
28、38‧‧‧洩壓閥 28, 38‧‧‧ Pressure relief valve
32‧‧‧控制單元 32‧‧‧Control unit
34、36‧‧‧真空計 34, 36‧‧‧ vacuum gauge
42‧‧‧真空包裝 42‧‧‧vacuum packaging
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105216769U TWM538596U (en) | 2016-11-03 | 2016-11-03 | Vacuum packaging leak detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105216769U TWM538596U (en) | 2016-11-03 | 2016-11-03 | Vacuum packaging leak detection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWM538596U true TWM538596U (en) | 2017-03-21 |
Family
ID=58775331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105216769U TWM538596U (en) | 2016-11-03 | 2016-11-03 | Vacuum packaging leak detection system |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWM538596U (en) |
-
2016
- 2016-11-03 TW TW105216769U patent/TWM538596U/en not_active IP Right Cessation
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| Date | Code | Title | Description |
|---|---|---|---|
| MM4K | Annulment or lapse of a utility model due to non-payment of fees |