TW201818056A - Leakage detection system and method for vacuum package - Google Patents

Abstract

A leakage detection system includes a first camber, a pumping unit, a gas supplier, a second chamber, and a gas detection unit. The pumping unit provides a vacuum condition in the first camber, and the gas supplier flows a test gas to the first camber. The second chamber receives a vacuum package transferred from the first camber, and the gas detection unit pumps down the second chamber to a working pressure range of the gas detection unit. The gas detection unit detects the test gas that may release from the vacuum package exists in the second chamber.

Description

 Vacuum packaging leak detection system and leak detection method  

The invention relates to a vacuum packaging leak detecting system and a leak detecting method.

Different leak detection designs for vacuum packaging of electronic components are available. For example, the conventional design reveals a leak detection method for observing whether the appearance of the vacuum package is expanded in an atmospheric environment, wherein the vacuum package is placed in a closed chamber with a variable pressure, and a detecting unit can detect whether the appearance of the vacuum package has Expand to determine if a leak has occurred. However, the above-mentioned conventional design is judged by whether or not the appearance is expanded, so that the waiting time is long, the detection speed is slow, and only the leakage is generated, and the leak rate of the vacuum packaging bag cannot be further known. Therefore, there is a need for a leak detection method that can quickly detect leaks and know the leak rate of vacuum packages.

The "prior art" paragraphs are only intended to aid in understanding the present invention, and thus the disclosure of the "prior art" section may contain some conventional techniques that are not known to those of ordinary skill in the art. The matters disclosed in the "Prior Art" section do not necessarily represent the subject matter or the problems to be solved by one or more embodiments of the present invention, which are known or recognized by those of ordinary skill in the art prior to the present application.

The invention provides a vacuum packaging leak detecting system and a leak detecting method.

Other objects and advantages of the present invention will become apparent from the technical features disclosed herein.

In order to achieve one or a part or all of the above or other purposes, an embodiment of the present invention provides a vacuum packaging leak detection system, comprising: a first cavity, accommodating at least one vacuum package; and an air suction device, Connecting the first cavity to draw the first cavity into a vacuum; a gas supply device connecting the first cavity to send a leak detection gas into the first cavity after the first cavity is evacuated; a two-chamber receiving a vacuum package transferred from the first cavity; and a gas detecting device connecting the second cavity, the gas detecting device pumping the second cavity to the pressure of the second cavity The device is lowered to a working pressure range of the gas detecting device, and the gas detecting device detects whether the second cavity has a leak detecting gas released by the vacuum package in the working pressure range.

In order to achieve one or a part or all of the above or other purposes, another embodiment of the present invention provides a vacuum packaging leak detection method, comprising: introducing a vacuum package device to be tested into a first cavity and excluding the first The atmosphere in a cavity; the leaking gas is sent to the first cavity and allowed to stand for a preset time, and after the preset time elapses, the vacuum package to be tested is transferred to a second cavity; The cavity is evacuated to reduce the pressure of the second cavity to a predetermined pressure range; and detecting whether the vacuum package releases the leak test gas within the preset pressure range.

In order to achieve one or a part or all of the above or other purposes, another embodiment of the present invention provides a vacuum packaging leak detection method, comprising: introducing a vacuum package device to be tested into a first cavity and the first a cavity is evacuated; the leak gas is sent to the first cavity and allowed to stand for a preset time, and after the preset time, the vacuum package is transferred to a second cavity; the second cavity Pumping the gas to reduce the pressure of the second chamber to a working pressure range of a gas detecting device; and detecting the leaking gas of the second chamber by using the gas detecting device Know the leak rate of the vacuum package.

With the design of each of the above embodiments, the gas detecting device is used to detect whether the leaking gas enters the vacuum packaging manner, so that the vacuum packaging can be quickly leaked to save the detection time, and if the vacuum packaging has a hole, a leak occurs. The gas detecting device can accurately know the actual leak rate of the vacuum package, so by comparing the actual leak rate of the vacuum package with the vacuum standard required for the product or the process, it can be judged whether the vacuum package can still be used or needs to be eliminated. Defective.

Other objects and advantages of the present invention will become apparent from the technical features disclosed herein. The above and other objects, features, and advantages of the invention will be apparent from

10‧‧‧Vacuum packaging leak detection system

12‧‧‧First cavity

14‧‧‧Exhaust device

141‧‧‧vacuum pump

142‧‧‧Vacuum line valve

16‧‧‧ gas supply

161‧‧‧ gas cylinder

162‧‧‧pressure regulator

163‧‧‧Flow controller

17‧‧‧Leakage gas

18‧‧‧Mobile devices

181‧‧‧Handling track

182‧‧‧Handling chucks

183‧‧‧Blowing device

22‧‧‧Second cavity

24‧‧‧ gas detection device

28, 38‧‧‧ Pressure relief valve

32‧‧‧Control unit

34, 36‧‧‧ vacuum gauge

42‧‧‧vacuum packaging

S102-S112‧‧‧ Method steps

1 is a schematic view of a vacuum packaging leak detection system in accordance with an embodiment of the present invention.

2 is a flow chart of a vacuum packaging leak detection method according to an embodiment of the present invention.

The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the embodiments of the invention. The directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only directions referring to the additional drawings. Therefore, the directional terminology used is for the purpose of illustration and not limitation.

1 is a schematic view of a vacuum packaging leak detection system in accordance with an embodiment of the present invention. As shown in FIG. 1 , the vacuum packaging leak detection system 10 includes a first cavity 12 , an air extracting device 14 , a gas supply device 16 , a moving device 18 , a second cavity 22 , and a gas detecting device 24 . . A test object such as vacuum package 42 can be placed in a first cavity 12 that can be opened and sealed, and the first cavity 12 can be evacuated to a certain pressure by an air extracting device 14 to remove the atmosphere in the cavity. In an embodiment, the air extracting device 14 can include, for example, a vacuum pump 141 and a vacuum line valve 142. After the first cavity 12 is evacuated or the atmosphere in the cavity has been removed, the gas supply device 16 can inject a leak detecting gas 17, such as helium or hydrogen, into the first cavity 12 to reach a predetermined pressure. Stop perfusion and wait for a preset time. In an embodiment, the gas supply device 16 can include, for example, a gas cylinder 161, a pressure regulating valve 162, and a flow controller 163. The leak detecting gas 17 such as helium or hydrogen is stored in the gas cylinder 161, and the pressure regulating valve 162 The outlet pressure of the gas cylinder 161 can be adjusted, and the flow controller 163 can facilitate controlling the flow of the leak detecting gas 17 into the first chamber 12. In the waiting time after the leak detecting gas 17 is poured into the first cavity 12, since the pressure in the first cavity 12 is higher than the pressure in the vacuum package 42, if the vacuum package 42 has a hole, the first cavity 12 is inside. The leak test gas 17 will enter the vacuum package 42. In this embodiment, the length of the preset waiting time is not limited. For example, if the vacuum package 42 has a hole, the smaller the hole is, the slower the leaking gas 17 enters the vacuum package 42, so the longer the length The waiting time can achieve a finer detection and find a very slight gas leak, but the relative detection time is longer, so the length of the waiting time can be changed depending on the actual demand.

The mobile device 18 can move the vacuum package 42 from the first cavity 12 to the second cavity 22, which is, for example, an openable and sealed vacuum cavity. Before the vacuum package 42 is transferred to the second chamber 22, the leak detection gas 17 in the first chamber 12 can be selectively withdrawn, for example, by the suction device 14, and the first chamber can be removed by the pressure relief valve 28. After the body 12 is released to, for example, atmospheric pressure, the first cavity 12 is opened. In an embodiment, as shown in FIG. 1 , the mobile device 18 can include a transport rail 181 and a transport chuck 182 . The transport chuck 182 moves along the transport rail 181 after the first cavity 12 clamps the vacuum package 42 . Upon reaching the second cavity 22 position, the carrier chuck 182 is released to allow the vacuum package 42 to remain in the second cavity 22. The moving device 18 may further include an air blowing device 183. During the movement of the vacuum package 42, the air blowing device 183 may blow the surface of the vacuum package 42 to blow off the leak detecting gas 17 attached to the surface to prevent false detection. . After the vacuum package 42 is moved into the second cavity 22, the second cavity 22 is sealed, and then the gas detecting device 24 is activated to evacuate the second cavity 22 to the working pressure range of the gas detecting device 24, and then the gas detecting device 24 is used. Start leak detection. In one embodiment, the gas detection device 24 can be, for example, a helium leak detector or a hydrogen leak detector. Since the pressure of the second chamber 22 is less than the pressure in the vacuum package 42, if the vacuum package 42 has a hole, the leak gas 17 will be released from the vacuum package 42, and the gas detecting device 24 will detect the vacuum. The leak detecting gas 17 (for example, helium or hydrogen) released from the package 42. For example, the gas detecting device 24 can be, for example, a helium leak detector. If the helium leak rate detected by the helium leak detector is a background value, it means that the vacuum package 42 has no holes; The helium leak rate detected by the instrument is greater than the background value, indicating that there is a hole in the vacuum package 42. The gas detecting device 24 can transmit information such as the actual leak rate of the vacuum package 42 to a control unit 32. Upon completion of the leak test, the gas detection device 24 can close and open the second chamber 22, and the vacuum package 42 is removed by the mobile device 18. In one embodiment, the second chamber 22 can be opened by depressurizing the second chamber 22 to, for example, atmospheric pressure using a pressure relief valve 38.

In various embodiments of the present invention, the type and form of the vacuum package 42 is not limited at all, and may be, for example, a vacuum package. Furthermore, the vacuum package leak detection system 10 can include a vacuum gauge 34 and a vacuum gauge 36 disposed in the first cavity 12 and the second cavity 22, respectively, to measure the first cavity 12 and the second cavity 22, respectively. Pressure and vacuum.

In summary, the vacuum packaging leak detection system of the embodiment of the present invention has at least one of the following advantages: by the design of each of the above embodiments, the gas detecting device is used to detect whether the leaking gas enters the vacuum packaging manner, and can be quickly It is known that the vacuum packaging leaks and saves the detection time, and if the vacuum packaging has a hole and leaks, the gas detecting device can accurately know the actual leak rate of the vacuum packaging, so by comparing the actual leakage rate of the vacuum packaging with The vacuum standard required for the product or process to determine if the vacuum package is still usable or is a defective product.

With the design of each of the above embodiments, a vacuum packaging leak detection method can be provided. First, a vacuum package to be tested can be placed into a first cavity and the first cavity is evacuated to exclude the atmosphere in the first cavity (step S104), and the leaky gas can be sent to the first cavity and statically The preset time is set, and after the preset time elapses, the vacuum package to be tested is transferred to a second cavity (step S106). Then, the second cavity is evacuated to reduce the pressure of the second cavity to a predetermined pressure range, and the preset pressure range may be, for example, a working pressure range of the gas detecting device (step S108), and The gas detecting device detects the leaking gas released from the vacuum package to the second cavity by using the gas detecting device (step S110) to determine whether the vacuum package leaks and can know the leak rate of the vacuum package.

The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent. In addition, any of the objects or advantages or features of the present invention are not required to be achieved by any embodiment or application of the invention. In addition, the terms "first" and "second" as used in the specification or the scope of the claims are only used to name the components or distinguish different embodiments or ranges, and are not intended to limit the upper or lower limits of the number of components. .

Claims (10)

 A vacuum packaging leak detection system comprising: a first cavity for accommodating at least one vacuum package; an air extraction device connecting the first cavity to evacuate the first cavity; a gas supply device, connecting The first cavity is configured to feed a leak detection gas into the first cavity after the first cavity is evacuated; and a second cavity to accommodate the vacuum transferred from the first cavity And a gas detecting device connected to the second cavity, the gas detecting device pumping the second cavity to reduce the pressure of the second cavity to a working pressure range of the gas detecting device And the gas detecting device detects, in the working pressure range, whether the second cavity has the leaking gas released by the vacuum package.    The vacuum packaging leak detection system according to claim 1, wherein the leak detecting gas is helium gas or hydrogen gas, and the gas detecting device is a helium gas leak detector or a hydrogen leak detector.    The vacuum packaging leak detection system of claim 1, further comprising: a moving device for moving the vacuum package from the first cavity to the second cavity.    The vacuum packaging leak detection system of claim 3, wherein the moving device comprises an air blowing device for blowing air toward the surface of the vacuum package during movement of the vacuum package.    The vacuum package leak detection system of claim 1, wherein the air supply device includes a flow controller to control the flow of the leak detection gas into the first cavity.    A vacuum packaging leak detection method comprises: introducing a vacuum package device to be tested into a first cavity and excluding an atmosphere in the first cavity; feeding a leak detection gas into the first cavity and allowing a preset Time, and after the preset time has elapsed, the vacuum package to be tested is transferred to a second cavity; the second cavity is evacuated to reduce the pressure of the second cavity to a predetermined pressure range; Detecting whether the vacuum package releases the leak test gas within the preset pressure range.    A vacuum packaging leak detection method comprises: introducing a vacuum package device to be tested into a first cavity and drawing the first cavity into a vacuum; feeding the leak detection gas into the first cavity and resting for a period of time Setting a time, and after the preset time, transferring the vacuum package to a second cavity; pumping the second cavity to reduce the pressure of the second cavity to a working pressure of a gas detecting device a range; and detecting, by the gas detecting device, the leaking gas of the second cavity in the working pressure range to know a leak rate of the vacuum package.    The vacuum packaging leak detection method of claim 6 or 7, further comprising: decompressing the first cavity before the vacuum package is transferred to the second cavity.    The vacuum packaging leakage detecting method according to claim 6 or 7, further comprising: removing the leak detecting gas on the vacuum packaging surface during the vacuum packaging transfer process.    The vacuum packaging leak detection method according to claim 6 or 7, further comprising: transmitting the leak detection information of the vacuum package to a control unit.