TWM538156U - Bio-sensor substrate - Google Patents

Abstract

A bio-sensor substrate and the manufacturing method is disclosed. The method includes: forms a Lift-off photo-resist layer on a substrate which has several test strip areas; exposure and development the Lift-off photo-resist layer to define several photo-resist blocks, each of the block has a test electrode which is not covered by the photo-resist block; forming a thin-film conductive layer on the substrate; and, removes the Lift-off photo-resist layer, the test electrodes are then be formed.

Description

Biodetection substrate

The present invention relates to a substrate, and more particularly to a biosensor sheet substrate and a method of manufacturing the same.

The method of biological test strips is generally to form a set of electrodes on a plastic substrate, and one end of the electrodes is configured as a reaction zone, and the other end is configured as a lead end. The reaction zone is covered by another cover plate to form a fixed space, which in turn allows it to accommodate a certain volume of reaction enzyme. Then, by the design concept of the capillary, the body fluid to be tested is mixed with the reaction enzymes in the reaction zone through the capillary to generate an electrochemical signal. The small voltage/current changes generated by this electrochemical signal will be transmitted through the conduction end of the other end.

The production of such bioassay test pieces focuses on the accuracy of the electrodes on the plastic substrate and the concentration and volume of the reaction enzyme. If the accuracy is higher, the detected numerical stability is improved. The second factor is the volume of the reaction zone. The more stable the volume of the reaction zone, the more stable the attachment of the reaction enzymes and the higher the stability.

The current method for fabricating the electrodes on the bio-detection substrate is mainly made of a carbon electrode using a printed circuit board process (screen printing), and a metal electrode which is also processed by a printed circuit board process. In addition, there are those who use the laser cutting method to make metal electrodes. The advantage of the metal electrode is that it has a high impedance stability compared to the carbon powder electrode, and therefore, it is currently a major trend.

However, the current metal detection of bio-detection substrates still cannot achieve the requirements of ultra-high precision and stability. Therefore, how to develop a bio-detection substrate with high precision, high stability and volume stability has become a development direction that bio-detection test strip developers are hoping for.

In order to achieve the above object, the present invention provides a bio-detection sheet substrate and a manufacturing method thereof, which can improve the electrode precision of the bio-detection sheet, increase the detection stability of the bio-detection sheet, and provide the reaction area of the bio-detection sheet, The accuracy of the volume greatly reduces the detection deviation of the bioassay sheet.

The invention provides a method for manufacturing a bio-detection film substrate, comprising: forming a peeling photoresist layer on a substrate, the substrate having a predetermined plurality of test piece blocks; and removing part of the peeling photoresist layer by using an exposure and development process; Defining a plurality of photoresist blocks, wherein a portion of the photoresist block not covered by the stripping photoresist layer is defined as a range of a test strip electrode region; forming a thin film conductive layer on the strip having the stripping photoresist layer And removing the stripping photoresist layer, so that the thin film conductive layer above the stripping photoresist layer is simultaneously removed, and the thin film conductive layer remaining in each of the strip blocks constitutes the strip electrode region.

The invention further provides a bio-detection film substrate, comprising: providing a bio-detection film substrate, comprising: a substrate having a predetermined plurality of test piece blocks; and a complex array test piece electrode correspondingly formed on the test piece blocks On the substrate, two ends of each of the test strip electrodes are disposed at two ends of each of the test strip blocks, and one end of each of the set of test strip electrodes is a reaction area electrode, and the other end is a gold finger electrode. The test piece electrode is fabricated by a photoresist stripping process; and a permanent photoresist layer is disposed on the substrate, the permanent photoresist layer covers a portion of the test piece electrodes and the substrate The reaction zone electrode of the electrode region of the test piece and the gold finger electrode region are exposed.

The above and other objects, features, and advantages of the present invention will become more apparent and understood.

2‧‧‧Test block

3‧‧‧ cutting line

4‧‧‧ Section

10‧‧‧Substrate

20‧‧‧ Stripped photoresist layer

21‧‧‧ Stripped photoresist layer

30‧‧‧film conductive layer

31‧‧‧film conductive layer

40‧‧‧Photomask

41‧‧‧Photomask

50‧‧‧ UV

60‧‧‧ permanent photoresist layer

61‧‧‧Permanent photoresist layer

71‧‧‧Reactive electrode zone

72‧‧‧Gold finger electrode area

Fig. 1A is a top view of a blank substrate of the biodetection sheet substrate of the present invention.

Fig. 1B is a top view of the finished product of the bioassay sheet of the present invention.

The 2A-2J figure is a schematic diagram of the enlarged cross-section and the upper view of the process part of the novel bio-detection film substrate.

Figure 3 is a flow chart of the method for fabricating the novel bioassay sheet.

4A-4D is an enlarged cross-sectional view and a top flow chart of the process of the biodetection substrate of the present invention.

According to an embodiment of the present invention, the present invention provides a bio-detection sheet substrate, which can improve the electrode precision of the bio-detection sheet, increase the detection stability of the bio-detection sheet, and provide the reaction area and volume of the bio-detection sheet. Accuracy, the detection deviation of the bioassay sheet is greatly reduced.

First, please refer to FIG. 1A, which is a top view of a blank substrate of the biodetection substrate of the present invention, and FIG. 1B is a top view of the finished product of the biodetection substrate of the present invention. It can be found that a blank substrate 10 can plan a plurality of test block blocks 2. Each test piece 2 is finally made into a test piece with electrodes, each of which has a set of electrodes, each of which has a reaction Electrode zone and gold finger electrode zone.

Hereinafter, the flow of the biodetection film substrate of the present invention will be described by a plurality of cross-sectional enlarged views and enlarged top views. Hereinafter, the flow of the present invention will be described by mixing the 2A-2J diagram and the 3rd diagram.

Please refer to Fig. 3, which is a flow chart of the method for fabricating the biodetection substrate of the present invention. The 2A-2J figure is a schematic diagram of the enlarged cross-section and the upper view of the process part of the novel bio-detection film substrate.

Step S101: forming a stripping photoresist layer 20 on a substrate 10 having a predetermined plurality of test strip blocks 2; this step is the portion of the second A-2C diagram, and the predetermined test strip block 2 on the substrate 10 is Cut line 3 is defined.

Step S102: using a exposure and development process to remove a portion of the stripping photoresist layer to define a plurality of photoresist blocks, and a portion of each of the photoresist blocks not covered by the stripping photoresist layer is defined as a test strip electrode region. The peeling photoresist layer 20 is exposed to the ultraviolet light 50 through the mask 40 (Fig. 2D), and developed with a developing solution to leave a desired peeling resist layer 21 (Fig. 2E). As can be clearly seen from Fig. 2F, the shape of the remaining peeling resist layer 21 is the shape of the electrode we want.

Step S103: forming a thin film conductive layer on the substrate having the stripping photoresist layer; in this step, as shown in FIG. 2G, the thin film conductive layer 30 is formed over the stripping photoresist layer 21, and a portion of the thin film conductive layer 31 is formed. Above the substrate 10.

Step S104: removing the peeling photoresist layer, so that the thin film conductive layer above the stripping photoresist layer is simultaneously removed, and the thin film conductive layer remaining in each of the test strip blocks constitutes the test strip electrode region. This step is illustrated by the 2H figure. When the stripping photoresist layer 21 of the 2Gth image is removed, the thin film conductive layer 30 above it is also removed at the same time. After that, only the 2H map will remain. The thin film conductive layer 31, that is, the shape of the thin film conductive layer 31 of Fig. 2, is the electrode shape we want.

Since the novel uses the photoresist stripping process in the exposure and development process, the accuracy of the nanometer level can be achieved, and therefore, the size and size of each set of electrodes can be made very precise. Moreover, the thickness of the electrode can also be very precise. In terms of materials, gold, silver, palladium, copper or any mixed metal thereof may be used. The difference in the area of the reaction electrode region may be less than 5% or even smaller. The thickness of the thin film conductive layer may be between 10 nm and 3 microns.

In addition, the present invention can further utilize the exposure and development process to further fabricate the three-dimensional space required for the reaction electrode region, that is, the permanent photoresist is used as the wall of the reaction electrode region. Next, please refer to FIG. 4A-4D for the enlarged cross-section and top view of the process section of the biodetection substrate of the present invention. The process is as follows: a permanent photoresist layer is formed on the substrate having the electrode region of the test piece by an exposure and development process, so that the electrode region of the test piece constitutes a bare reaction electrode region and a gold finger electrode region.

In Fig. 4A, the permanent photoresist layer 60 is overlaid on the entire substrate on the basis of Fig. 2J, and is generally fabricated using a negative photoresist material. Next, in FIG. 4B, the present invention also employs an exposure process, and exposes the permanent photoresist layer 60 by using the mask 41 and the ultraviolet rays 50. Next, after development, the structure of the permanent photoresist layer 61 of FIG. 4C can be obtained. As is clear from Fig. 4D, the reaction electrode region 71 and the gold finger electrode region 72 are exposed, and the reaction enzyme can be dropped, and the machine can be read to read the value.

Hereinafter, the present invention substantially provides a bio-detection film substrate, comprising: a substrate having a predetermined plurality of test piece blocks; and a plurality of complex sample test piece electrodes correspondingly formed on the substrate of the test piece blocks, each of the Two ends of the group of test piece electrodes are disposed in each of the test piece blocks At both ends, one end of each of the test strip electrodes is a reaction zone electrode, and the other end is a gold finger electrode, and the test piece electrodes are fabricated by a photoresist stripping process; and a permanent photoresist layer is disposed on the substrate. The permanent photoresist layer covers a portion of the test strip electrodes and the substrate to expose the reaction region electrode and the gold finger electrode region of the test strip electrode region.

Although the technical content of the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the present invention, and any modifications and refinements made by those skilled in the art without departing from the spirit of the present invention should be encompassed by the present invention. Therefore, the scope of protection of this new type is subject to the definition of the scope of the patent application.

4‧‧‧ Section

21‧‧‧ Stripped photoresist layer

Claims (3)

A bio-detection film substrate comprises: a substrate having a predetermined plurality of test piece blocks; a complex array test piece electrode correspondingly formed on the substrate on the test piece blocks, and each end of the set of test piece electrodes is disposed At each end of each test piece block, one end of each set of test piece electrodes is a reaction electrode area, and the other end is a gold finger electrode area, and the test piece electrodes are fabricated by a photoresist stripping process; and a permanent The photoresist layer is disposed on the substrate, and the permanent photoresist layer covers a portion of the test strip electrodes and the substrate to expose the reaction electrode region of the test strip electrode region and the gold finger electrode region. The bioassay sheet substrate of claim 1, wherein the material of the test strip electrodes comprises at least: gold, silver, palladium, copper or a mixture thereof. The biodetection sheet substrate of claim 1, wherein the thickness of the test strip electrodes is between 10 nm and 3 μm.