TWM528879U - Wafer bonding equipment - Google Patents

Description

Laminating device

The present invention relates to a laminating device, and more particularly to a laminating device for aligning two films.

In general, in the process of a film product such as a flexible substrate, a step of sequentially bonding a plurality of rectangular cover film films to a strip-shaped base film and winding the base film into a roll is included. And this step can be accomplished using a conventional bonding device.

One side of the conventional bonding apparatus is provided with a base film (hereinafter referred to as "raw material roll") to which a cover film has not been attached, and the other side of the conventional bonding apparatus is provided with a retractor. The initial end of the material roll is connected to the retractor, and the retractor can be intermittently rolled, so that a plurality of cover film can be sequentially attached to the base film, and then the reel can be wound up by the retractor. The base film has been bonded to the portion of the cover film to form a product roll.

More specifically, when the conventional bonding device is operated, the operator firstly places the cover film to be attached to the base film on a mounting table and wears the number of the covering film on the mounting table. Positioning pins. The cover film is removed from the mounting table by a transfer module, and the cover film is transferred to a lifting platform, and the cover film is floated to the base film by the lifting platform. Finally, the portion of the base film floating on the cover film is guided to a pressing module to press-bond the cover film and the base film to make the two firmly adhered to each other. The film is wound up to the portion where the base film has been adhered to the cover film.

The conventional bonding device described above can be used to laminate the cover film in succession. The action to the base film, but due to the dimensional tolerance between the hole of the periphery of the cover film and the corresponding positioning pin, the cover film may not be aligned to the base film at the end.

On the other hand, the raw material roll is released from the side of the conventional bonding device and is taken up by a retractor provided on the other side of the conventional bonding device, wherein the stroke is about several meters. If the initial end of the raw material roll is slightly skewed when it is connected to the retractor, the retractor will continue to accumulate deviation during the process of winding the base film, which also causes the cover film to be unfitted. The condition to the base film.

For the above reasons, when the cover film and the base film are laminated by using the conventional bonding device, the deviation of the cover film from the base film is about 0.1 to 0.2 mm, so that the alignment alignment accuracy cannot be satisfied. Demand for higher product requirements.

In view of this, the conventional bonding apparatus does have a need for improvement.

The present invention provides a bonding apparatus that corrects the relative skew deviation of the cover film before it is floated to the base film to ensure that the cover film can be positively floated to the base film.

The bonding device of the present invention comprises: a base having a film area, a correction area and a dummy area, the correction area being located between the film area and the dummy area, the base a mounting platform and a dummy platform are disposed, the mounting table is adjacent to the film receiving area, and the dummy platform is located in the false bonding area; a moving module is disposed on the base and can be disposed on the mounting base Displacement between the film and the filming zone; a correcting module having a displacement device assembled to the base, the displacement device being coupled to a rotatable lifting platform, the displacement device driving the lifting platform at the connection a reciprocating displacement between the membrane region, the correction region, and the pseudo-adjacent region; a first camera module, the first camera module recording an image toward the false following platform; and a second camera module, the second camera The module is configured to record an image of the lifting platform suspended in the correction area; wherein the first camera module and The second camera module is electrically connected to a controller, and the controller controls the rotation of the lifting platform.

Or another bonding device of the present invention, comprising: a pedestal having a film receiving area and a squeezing area, the pedestal is provided with a receiving platform and a dummy platform, the receiving table is adjacent to the connecting a membrane area, the dummy platform is located in the false following area; a moving module, the moving module is disposed on the base and can be displaced between the receiving base and the film receiving area; a correcting module, the correcting The module has a displacement device assembled on the base, the displacement device is connected to a rotatable lifting platform, and the displacement device drives the lifting platform to reciprocally move between the film receiving zone and the false bonding zone; a module, the first camera module records an image toward the fake platform; and a second camera module, the second camera module records an image above the film area; wherein the first camera module And the second camera module is electrically connected to a controller, and the controller controls the rotation of the lifting platform.

Accordingly, the bonding device of the present invention can directly affix the cover film to the base film, and improve the precision of the cover film when it is aligned to the base film, thereby satisfying the high precision of the fit alignment. Product requirements.

Wherein, in the first bonding device, the second camera module can be selected in the correction area of the base; and the second camera module can be selected from the second camera module. The film-bonding zone or the lifting platform disposed on the correcting module can meet different configuration requirements and is easy to assemble and position.

The second camera module has two camera members, and the two camera members are erected in parallel in the translation direction of the lifting platform, so that the two camera members can separately record the cover film disposed on the lifting platform. An image of the two sides to calculate the amount of deflection of the cover film relative to the base.

Wherein, the transition module has a displacement device assembled on the base, and the displacement device is connected with a film taking device to drive the film removing member to horizontally shift between the receiving table and the film receiving area, and to drive the taking The membrane member is raised and lowered to approach or away from the mounting table to improve the convenience and efficiency of guiding the cover film.

Wherein, the mounting table is provided with a plurality of air holes for adsorbing the cover film placed on the receiving platform to prevent the cover film from drifting, so that the cover film can maintain the preset position on the receiving table to be The migration module is taken away.

The top of the lifting platform is provided with a preheating portion for receiving and heating the cover film by the preheating portion, so that the adhesive layer on the surface of the cover film is heated and melted to float to the base film.

Wherein, the dummy platform has a corresponding one of the feeding end and one discharging end, and a base film extends from the feeding end through the discharging end.

The first camera module has two camera members, and the two camera members are erected in parallel in the guiding direction of the base film, so that the two camera members can separately record images of the two side edges of the base film. So that the controller calculates the amount of deflection of the base film relative to the base.

The bonding device of the present invention may further comprise a cutting module disposed on the base and adjacent to one end of the receiving table for cutting the cover film and the cut cover film Guided to the mounting table. Accordingly, the bonding device can automatically provide the cover film to the mounting table in an automated manner, and the operator does not need to manually place the cover film on the mounting table, thereby facilitating the operation convenience and efficiency.

1‧‧‧Base

1A‧‧‧ film area

1B‧‧ ‧ calibration area

1C‧‧‧false area

11‧‧‧Holding table

12‧‧‧ false platform

12a‧‧‧ Feeding end

12b‧‧‧Drawing end

2‧‧‧Transition module

21‧‧‧ Displacement

22‧‧‧ taking the film

3‧‧‧Correction module

31‧‧‧ Displacement

32‧‧‧ Lifting platform

4‧‧‧First camera module

41a, 41b‧‧‧ camera

5‧‧‧Second camera module

51a, 51b‧‧‧ camera

6‧‧‧Cutting module

7‧‧‧Pressing module

C‧‧‧ controller

F1‧‧‧ base film

F2‧‧‧ cover film

Fig. 1 is a perspective view showing the structure of an embodiment of the present invention.

Fig. 2 is a schematic plan view showing the structure of an embodiment of the present invention.

Fig. 3 is a partially enlarged side view showing the structure of an embodiment of the present invention.

Fig. 4 is a schematic view showing the implementation of the cover film on the mounting table by the migration module in an embodiment of the present invention.

Fig. 5 is a schematic view showing the implementation of an embodiment of the present invention in which a cover film is moved by a migration module to a film area of a susceptor.

Fig. 6 is a side view showing the structure of another view of Fig. 5.

Fig. 7 is a schematic view showing the implementation of a cover film by a correction module according to an embodiment of the present invention.

Fig. 8 is a schematic view showing the implementation of recording a base film and a cover film by two camera modules in one embodiment of the present invention.

Fig. 9 is a schematic plan view showing the enlarged structure of Fig. 8.

Fig. 10 is a partially enlarged plan view showing an embodiment of the present invention.

Fig. 11 is a schematic view showing the implementation of adjusting the deflection of the cover film by the correction module according to the deflection of the base film according to the embodiment.

Fig. 12 is a schematic view showing the implementation of an embodiment of the correction module for moving a biased cover film into a dummy area of the susceptor.

Fig. 13 is a schematic view showing the implementation of an embodiment in which a cover film is floated to a base film.

Fig. 14 is a schematic view showing the implementation of an embodiment in which a portion of a base film floating with a cover film is transferred into a press-fit module.

Fig. 15 is a perspective view showing the structure of the second embodiment of the present invention.

Figure 16: Schematic diagram of a partial side view of the second embodiment of the present invention.

Figure 17 is a partial plan view showing the second embodiment of the present invention.

Figure 18: Schematic diagram of the second embodiment of the present invention for adjusting the amount of deflection of the cover film.

In order to make the above and other objects, features and advantages of the present invention more comprehensible, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings.

Please refer to FIG. 1 , which is an embodiment of the present invention. The bonding device generally includes a base 1 , a moving module 2 disposed on the base 1 , and a correcting module 3 . The first camera module 4 and a second camera module 5 are provided.

In this context, it is stated that the "adjacency" described in this specification contains adjacent Nearly connected or not connected.

The type of the pedestal 1 is not limited, and the components of the traversing module 2, the correcting module 3, the first camera module 4, and the second camera module 5 can be stably installed. The schematic of the embodiment is The relative position between important members can be more clearly presented, and some skeletons are omitted, so the susceptor 1 is not limited to the type disclosed in the drawings.

Referring to FIGS. 1 and 2, the susceptor 1 has a film area 1A, a correction area 1B, and a dummy area 1C. The correction area 1B is located between the film area 1A and the dummy area 1C; The embodiment selects the film area 1A, the correction area 1B and the false area 1C of the susceptor 1 to be arranged in a straight line, which helps to simplify the displacement path and structural design of the correcting module 3 (described in detail later).

The susceptor 1 is provided with a receiving table 11 for mounting a cover film F2 to be floated to the base film F1. The mounting table 11 is adjacent to the film receiving area 1A for the moving module 2 to be removed. The cover film F2. In this embodiment, the mounting table 11 can be provided with a plurality of air holes to adsorb the cover film F2 placed on the mounting table 11 to prevent the cover film F2 from drifting, so that the cover film F2 can be maintained in the bearing. The preset position on the table 11 is set to be taken away by the transition module 2.

Moreover, the bonding device can be further provided with a cutting module 6 disposed on the base 1 and adjacent to one end of the mounting table 11. The cutting module 6 can be used to intermittently guide the roll of the cover film F2 to output the cover film F2 and cut it, and guide the cut cover film F2 to the mounting table 11. The migration module 2 is to be taken away. Accordingly, the bonding device can automatically provide the cover film F2 to the mounting table 11 in an automated manner, and the operator does not need to manually place the cover film F2 on the mounting table 11, which improves the operation convenience and efficiency. The cutting module 6 is a conventional member, and the detailed structural features thereof will not be described in detail herein.

Referring to Figures 2 and 6, the base 1 is further provided with a dummy platform 12, and the dummy platform 12 is located in the false following area 1C. The dummy platform 12 has an opposite receiving end 12a and a discharge. The end film 12b, the base film F1 extends from the feed end 12a through the discharge end 12b, the portion of the base film F1 between the feed end 12a and the discharge end 12b is a portion where the cover film F2 floats.

Referring to Figures 1 and 2, the transition module 2 is disposed on the base 1 and is displaceable between the mounting table 11 and the film receiving area 1A to remove the cover film F2 from the mounting table 11. And the cover film F2 is moved into the film area 1A and received by the correcting module 3. The traversing module 2 has a displacer 21 assembled on the pedestal 1. The displacing device 21 is connected to a detaching member 22, and the displacing member 21 can drive the ejector member 22 at the mounting table 11 and the film receiving area. The horizontal displacement between 1A, in this embodiment, produces a displacement orthogonal to the direction in which the film-attached region 1A extends toward the false-adjacent region 1C, and drives the film-removing member 22 to move up and down to approach or away from the mounting table 11 to The convenience and efficiency of guiding the cover film F2 are improved.

The film taking member 22 can be, for example, a suction cup for adsorbing the cover film F2, or a jaw to grasp the cover film F2, or other smoothly removing the cover film F2 without injuring the film. The assembly of the cover film F2 is not limited in this creation.

Referring to FIGS. 2 and 6 , the correcting module 3 has a displacement device 31 assembled on the base 1 , and the displacement device 31 is directly or indirectly connected to a rotatable lifting platform 32 for being driven by the displacement device 31 . The lifting platform 32 is reciprocally displaced between the film area 1A, the correction area 1B, and the dummy area 1C. The top of the lifting platform 32 is provided with a preheating portion 321 for receiving and heating the cover film F2 by the preheating portion 321 to heat the molten layer on the surface of the cover film F2 to be floated to the base film F1. .

Referring to FIGS. 2, 8, and 9, the first camera module 4 records an image toward the dummy platform 12. In this embodiment, the first camera module 4 is disposed in the dummy area 1C of the susceptor 1; the first camera module 4 can be provided with two camera members 41a and 41b, and the two camera units 41a and 41b are compared. Preferably, the two imaging members 41a, 41b can respectively record the image of the two side edges of the base film F1 in the guiding direction of the base film F1, so that the controller C calculates the relative thickness of the base film F1. The amount of deflection of the susceptor 1.

The second camera module 5 is configured to record an image when the lifting platform 32 of the correcting module 3 is suspended in the correction area 1B. In this embodiment, the second camera module 5 can be disposed in the calibration area 1B of the susceptor 1; the second camera module 5 can be provided with two imaging devices 51a, 51b, and the two camera members 51a, 51b. Preferably, the two imaging members 51a, 51b can respectively record images on both sides of the cover film F2 mounted on the lifting platform 32 to calculate the coverage. The amount of deflection of the layer film F2 relative to the susceptor 1.

Referring to FIG. 1 and FIG. 8 , the first camera module 4 and the second camera module 5 are electrically connected to a controller C to respectively transmit the captured images, and the controller C analyzes and calculates the image. The rotation of the lifting platform 32 of the correcting module 3 is controlled by a predetermined angle. In addition, in this embodiment, the direction in which the first camera module 4 and the second camera module 5 are recorded is reversed to ensure that the first camera module 4 and the second camera module 5 can respectively The image of the base film F1 and the cover film F2 is clearly recorded.

Please refer to the first and second figures. The bonding device can also be provided with a pressing module 7 disposed on the base 1 and adjacent to the discharging end 12b of the dummy platform 12. The press-fit module 7 can be used to pass and sandwich the portion of the base film F1 on which the cover film F2 is floated, so that the cover film F2 can be closely pressed and adhered to the base film F1. The press-fit module 7 is a conventional member, and its detailed structural features will not be described in detail herein.

Referring to Figures 1 and 3, according to the foregoing structure, when the bonding device of the present invention is operated, the portion of the base film F1 to be supplied with the floating cover film F2 is aligned between the feeding end 12a and the discharging end 12b. On the other hand, the cover film F2 cut by the cutting module 6 can be guided to the mounting table 11. As shown in FIG. 4 , the displacement device 21 driving the movement module 2 drives the film take-up member 22 to be displaced above the mounting table 11 , and then the film take-up member 22 is lowered to take off the mounting table 11 . Cover film F2.

Referring to FIGS. 2 and 5, the displacement of the film taking member 22 by the displacement device 21 is continued to the film area 1A located on the base 1. At this time, another perspective of FIG. 5 is as shown in FIG. The correcting module 3 can still be arranged in the false following area 1C of the base 1.

Referring to FIG. 2 and FIG. 7 , the displacement device 31 driving the correcting module 3 drives the lifting platform 32 to be displaced to the film connecting portion 1A of the base 1 , so that the preheating portion 321 of the top of the lifting platform 32 is taken. The cover film F2 held by the film member 22 is opposed to each other. The film taking member 22 is continuously driven to descend, and the cover film F2 is released, so that the cover film F2 can be switched to the preheating portion 321 of the lifting platform 32.

Referring to the second and eighth figures, after the lifting platform 32 receives the cover film F2, the displacement device 31 drives the displacement to the correction area 1B of the base 1 and pauses, so that the second camera module 5 can face the The preheating section 321 of the lifting platform 32 records an image. On the other hand, after the correcting module 3 is removed from the false bonding area 1C of the susceptor 1 , the first camera module 4 can record an image toward the false following platform 12 .

In this case, referring to FIG. 9 , the second camera module 5 can respectively record images on both sides of the cover film F2 mounted on the lifting platform 32 by the two cameras 51 a and 51 b ; The module 4 can respectively record images on both sides of the base film F1 by the two imaging devices 41a and 41b.

Accordingly, referring to the first and the tenth, the controller C can calculate the skew amount of the base film F1 relative to the base 1 according to the image data returned by the first camera module 4; The image data returned by the second camera module 5 calculates the amount of deflection of the cover film F2 relative to the susceptor 1. Further, as shown in FIG. 11, the lifting platform 32 that controls the correcting module 3 is rotated until the amount of deflection of the cover film F2 relative to the base 1 and the deviation of the base film F1 from the base 1 The amount of slope is equal.

Referring to FIGS. 1 and 12, after the lifting platform 32 is corrected in the correction area 1B of the base 1, the displacement device 31 will again drive the lifting platform 32 to the false contact area 1C of the base 1, so that The lifting platform 32 is suspended below the dummy landing platform 12 such that the cover film F2 is positioned below the base film F1. In the process, the warming up of the lifting platform 32 The portion 321 has completed preheating the cover film F2 so that the adhesive layer on the surface of the cover film F2 is heated and melted.

Referring to FIG. 13, the lifting platform 32 is continuously driven up until the lifting platform 32 touches the dummy platform 12, so that the cover film F2 can be floated to the base film F1.

Referring to FIGS. 1 and 14, the substrate film F1 is continuously wound up, and the portion of the base film F1 floating with the cover film F2 can be pulled away from the discharge end 12b of the dummy landing platform 12, and enters. The press-fit module 7 is then suspended again, and the cover film 7 is sandwiched so that the cover film F2 can be closely pressed and attached to the base film F1. In this way, the process of bonding the cover film F2 to the base film F1 can be completed, and the two can be aligned correctly, and the degree of deviation can be reduced to about 0.05 mm, which can greatly improve the alignment of the two. Precision.

Please refer to FIGS. 15 and 16 , which are the second embodiment of the present invention. The second embodiment of the present invention is substantially the same as the first embodiment described above, and the main difference is that the second embodiment of the present creation The second camera module 5 is selected to record an image above the film area 1A of the susceptor 1 for recording the cover film F2 before the cover film F2 is received by the lifting platform 32 of the correcting module 3. The image is to confirm whether the integrity and flatness of the cover film F2 meets the standard, and the lifting platform 32 is corrected by the image to ensure that the cover film F2 can be preheated on the top of the lifting platform 32. Part 321.

In detail, the second camera module 5 of the embodiment can be selected from the film area 1A of the susceptor 1 to record an image from the bottom up; or, as shown, the second camera module is selected. 5 is assembled in the lifting platform 32 of the correcting module 3, so that when the lifting platform 32 is displaced to the film receiving area 1A of the base 1, the film taking portion 22 of the moving module 2 can be recorded to cover the film F2 moves to the image when the film area 1A.

The second camera module 5 can include two camera members 51a, 51b. The two camera members 51a, 51b are preferably erected in parallel in the translation direction of the lifting platform 32, so that the two camera members 51a, 51b can Recording the shadows on both sides of the cover film F2 held on the film taking member 22 For example, in order to calculate the amount of deflection of the cover film F2 relative to the lifting platform 32. Accordingly, the lifting platform 32 can be rotated and corrected according to the amount of deflection between the cover film F2, and after the film taking member 22 is lowered and the cover film F2 is released, the cover film F2 can be aligned. The position is to the preheating portion 321 of the lifting platform 32.

On the other hand, referring to the images of the base film F1, the image of the base film F1 relative to the base 1 can be obtained by the first camera module 4 recording the image of the base film F1. The amount of deflection, and further the amount of offset of the lifting platform 32 to be corrected, is used to synchronously actuate the lifting platform 32 during the displacement of the lifting platform 32 toward the false landing platform 12, When the lifting platform 32 is moved under the dummy platform 12, the side edge of the cover film F2 placed on the lifting platform 32 can be parallel to the side edge of the base film F1, and can be aligned. .

Therefore, the advantage of this embodiment is that the integrity and flatness of the cover film F2 can be confirmed to meet the standard before the cover film F2 is placed on the lifting platform 32 and the subsequent displacement and correcting action are performed; It is avoided that half of the cover film F2 is found to be defective and needs to be suspended. The poor cover film F2 is removed, and the next cover film is removed from the transfer module 2 by the transfer module 2 again. F2, so as to reduce the overall efficiency of the work. In short, the embodiment can ensure that the overlay film F2 received by the lifting platform 32 is good, and subsequent operations such as rectification and migration can be continued without interruption and re-entry, so that the working efficiency is better.

In summary, the bonding device of the present invention can correct the relative skew deviation of the cover film before floating on the base film, and adjust the deflection of the cover film according to the deflection of the base film. The cover film can be positively floated to the base film without causing a cumulative deviation during the winding process due to the skew of the base film. Therefore, the bonding device of the present invention can improve the precision of the overlay film to the base film, and can meet the requirements of the product with high precision of the matching alignment.

Although the present invention has been disclosed by the above-described preferred embodiments, it is not intended to limit the present invention, and it is still within the spirit and scope of the present invention to make various changes and modifications to the above embodiments. The technical scope of the protection is created, so the scope of protection of this creation is subject to the definition of the patent application scope attached.

1‧‧‧Base

11‧‧‧Holding table

12‧‧‧ false platform

2‧‧‧Transition module

21‧‧‧ Displacement

22‧‧‧ taking the film

3‧‧‧Correction module

31‧‧‧ Displacement

32‧‧‧ Lifting platform

4‧‧‧First camera module

41a, 41b‧‧‧ camera

5‧‧‧Second camera module

51a, 51b‧‧‧ camera

6‧‧‧Cutting module

7‧‧‧Pressing module

C‧‧‧ controller

F1‧‧‧ base film

F2‧‧‧ cover film

Claims (11)

A bonding device comprising: a base having a film area, a correction area and a dummy area, the correction area being located between the film area and the dummy area, the base being provided with a a mounting platform and a dummy platform, the mounting table abutting the film receiving area, the dummy platform is located in the false bonding area; a moving module, the moving module is disposed on the base and the mounting platform is Displacement between the film areas; a correcting module having a displacement device assembled to the base, the displacement device being coupled to a rotatable lifting platform, the displacement device driving the lifting platform in the film receiving area And a reciprocating displacement between the correction area and the false area; a first camera module, the first camera module images the image toward the false platform; and a second camera module, the second camera module The image of the lifting platform is suspended in the calibration area; wherein the first camera module and the second camera module are electrically connected to a controller, and the controller controls the rotation of the lifting platform. The bonding device of claim 1, wherein the second camera module is disposed in a correction area of the base. A bonding device comprising: a base having a film receiving area and a false bonding area, the base being provided with a receiving platform and a dummy platform, the receiving table adjoining the film connecting area, the The platform is located in the false following area; a moving module is disposed on the base and can be displaced between the receiving base and the film receiving area; and a correcting module, the correcting module is assembled a displacement device of the base, the displacement device is connected to a rotatable lifting platform, and the displacement device drives the lifting platform to reciprocally move between the film receiving zone and the false bonding zone; a first camera module, wherein the first camera module records an image toward the dummy platform; and a second camera module, wherein the second camera module images the image above the film area; A camera module and the second camera module are electrically connected to a controller, and the controller controls the rotation of the lifting platform. The bonding device of claim 3, wherein the second camera module is disposed in a film receiving area of the base or a lifting platform disposed on the correcting module. The bonding device of claim 2, wherein the second camera module has two camera members, and the two camera members are erected in parallel in the translation direction of the lifting platform. The bonding device of claim 1 or 3, wherein the migration module has a displacement device assembled on the base, the displacement device is connected to a film taking member to drive the film take-up member The horizontal displacement between the mounting table and the film receiving area, and the lifting of the film taking device to move up to or away from the mounting table. The bonding apparatus according to claim 1 or 3, wherein the mounting table is provided with a plurality of air holes. The bonding device of claim 1 or 3, wherein the top of the lifting platform is provided with a preheating portion. The bonding apparatus of claim 1 or 3, wherein the dummy platform has an opposite receiving end and a discharging end, and a base film extends from the feeding end through the discharging end. The bonding device of claim 9, wherein the first camera module has two imaging devices, and the two imaging devices are erected in parallel in the guiding direction of the base film. The bonding device of claim 1 or 3, further comprising a cutting module disposed on the base and adjacent to one end of the receiving table for cutting the cover film. And guiding the cut cover film to the mounting table.