TWM526179U - Annular liquid collecting device - Google Patents

Abstract

An annular liquid collecting device has an annular housing, a plurality of liquid collecting plates configured in the annular housing, a plurality of soft folded layers respectively mounted between the liquid collection plate, and a plurality of collecting plate extending brackets respectively connected to corresponding liquid collection plates to change heights of the corresponding liquid collection plates so that one of the soft folded layers is under an extended state, while the other soft folded layers are under a compressed state.

Description

Annular liquid collection device

The content of the embodiments described in the present disclosure relates to an annular liquid collection device. In particular, the embodiment described in the present disclosure relates to an annular liquid collecting device of a soft material.

In recent years, due to the advancement of semiconductor technology, the number of integrated circuits used in electronic devices has increased and the functions have become more and more powerful. Etching techniques are widely used in semiconductor processes.

Conventionally, etching techniques can be broadly classified into wet etching and dry etching. Manufacturers choose different etching methods for different materials and feature sizes. Wet etching mainly uses a chemical reaction principle to react with a layer to be etched using a chemical etching solution to dissolve it. Therefore, wet etching has the advantage of low process cost.

Wet etching uses different chemical liquids for etching semiconductor materials. In order to recover a variety of different chemical liquids, as well as DI Water for cleaning chemical liquids on semiconductor materials, conventionally simple open-type single-wafer wet etching machines use several collection tanks of different heights to Collect different liquids at different heights to reduce the contamination of chemical liquids.

Therefore, how to increase the collection space of the liquid collection tank and avoid mutual contamination of chemical liquids is highly desirable for manufacturers of semiconductors and manufacturers of semiconductor production equipment.

In view of this, the present disclosure proposes an annular liquid collecting device.

One aspect of the present disclosure relates to an annular liquid collecting device including an annular outer casing in which a plurality of liquid collecting plates are mounted, and a plurality of soft folding layers are respectively installed between the liquid collecting plates, and A plurality of collecting plate extension brackets are respectively connected to the corresponding liquid collecting plates to respectively change the height of the liquid collecting plate, so that one of the soft folded layers is stretched to perform liquid recovery.

In some embodiments, the annular housing further includes a lifter slot to allow the collector plate extension bracket to be slotted via the lifter and extend outwardly from the interior of the annular outer casing.

In some embodiments, the annular liquid collection device further includes a collection plate lifting device, and a plurality of collection plate vertical lifters are respectively coupled to the corresponding collection plate extension supports to change the height of the liquid collection plate.

In some embodiments, the collecting plate lifting device is a hydraulic collecting plate lifting device, a pneumatic collecting plate lifting device or a motor collecting plate lifting device.

In some embodiments, at least one of the liquid collection plates can be raised upwards and beyond the height of the annular casing, such as a liquid collection plate top cover.

In some embodiments, the annular liquid collection device further includes a plurality of vents respectively mounted to the corresponding liquid collection plates to discharge the recovered liquid to an external recovery device.

In some embodiments, the liquid collection plate is slanted from the inside to the outside and downward to evacuate the recovered liquid to the external recovery device by gravity.

In some embodiments, the annular liquid collection device further includes a main exhaust device and a plurality of exhaust valves respectively mounted to the corresponding liquid collecting plates to exhaust the exhaust gas to the annular liquid collecting device.

In some embodiments, the annular liquid collection device further includes a gap venting valve mounted to the annular housing to vent exhaust gas between the liquid collection plate and the annular casing from the annular liquid collection device.

In some embodiments, the annular liquid collection device is mounted in a wet etching machine, and the rotary table of the wet etching machine is located in the annular liquid collecting device to place a substrate thereon for wet Etching.

In summary, the annular liquid collecting device of the present disclosure can utilize the closing and stretching of the soft folded layer to increase the opening size between the liquid collecting plates in an extended state, thereby increasing the efficiency and stability of liquid recovery. The use of a liquid collection layer that can be opened and closed allows efficient recovery of liquids and avoids mutual contamination. The height of the collecting plate of the annular liquid collecting device can be higher than the height of loading and unloading positions of the substrate, further increasing the efficiency of operation of the device, and further increasing the size of the opening between the collecting plates, and further improving the annular liquid collecting device. Stability and efficiency.

110‧‧‧ Turntable

120‧‧‧ shaft

130‧‧‧Liquid supply device

140‧‧‧ collecting plate lifting device

142‧‧‧First collection plate vertical lifter

144‧‧‧Second collection plate vertical lifter

146‧‧‧ Third collection plate vertical lifter

148‧‧‧Four collecting plate vertical lifter

150‧‧‧Motor unit

160‧‧‧Substrate

162‧‧‧ positive

164‧‧‧n

170‧‧‧ Lifter slotting

210‧‧‧First liquid collection layer

220‧‧‧Second liquid collection layer

338‧‧‧fourth discharge

340‧‧‧Gap exhaust valve

342‧‧‧First exhaust valve

344‧‧‧Second exhaust valve

346‧‧‧ Third exhaust valve

348‧‧‧fourth exhaust valve

410‧‧‧ Height

420‧‧‧ Height

510‧‧‧First soft fold layer

520‧‧‧Second soft folding layer

530‧‧‧ Third soft fold layer

540‧‧‧Four soft folding layer

610‧‧‧First liquid collection board

620‧‧‧Second liquid collection board

630‧‧‧ Third liquid collection board

230‧‧‧ third liquid collection layer

240‧‧‧ fourth liquid collection layer

300‧‧‧Circular liquid collection device

310‧‧‧Ring enclosure

320‧‧‧Main exhaust

332‧‧‧First discharge port

334‧‧‧Second drain

336‧‧‧ third discharge

640‧‧‧fourth liquid collection board

650‧‧‧ fifth liquid collection board

710‧‧‧First collection plate extension bracket

720‧‧‧Second collection plate extension bracket

730‧‧‧ Third collection plate extension bracket

740‧‧‧Four collecting plate extension bracket

A‧‧‧Axis

The above and other objects, features, advantages and embodiments of the present disclosure will be more apparent and understood. The description of the drawings is as follows: FIG. 1 is an annular liquid collecting device according to some embodiments of the present disclosure. A side view of the schematic.

2 is a side elevational view of another aspect of an annular liquid collection device in accordance with some embodiments of the present disclosure.

FIG. 3 is a partial top plan view of an annular liquid collecting device according to some embodiments of the present disclosure.

4 is a partial side elevational view of an annular liquid collection device in accordance with some embodiments of the present disclosure.

The following is a detailed description of the embodiments, but the embodiments are not intended to limit the scope of the disclosure, and the description of the structural operation is not intended to limit the order of execution, and any components are recombined. The structure and the device with equal efficiency are all covered by the disclosure. In addition, the drawings are for illustrative purposes only and are not drawn to the original dimensions. For the sake of understanding, the same or similar elements in the following description will be denoted by the same reference numerals.

In addition, the terms used in the entire specification and the scope of the patent application, unless otherwise specified, usually have the usual meaning of each word used in the field, in the content disclosed herein and in the special content. . Certain terms used to describe the disclosure are discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in the description of the disclosure.

The terms “first”, “second”, etc. used in this document are not specifically intended to refer to the order or order, nor to limit the present invention, but merely to distinguish components described in the same technical terms. Or just operate.

Secondly, the terms "including", "including", "having", "containing", and the like, as used herein, are all open terms, meaning, but not limited to.

1 is a side view of an annular liquid collecting device according to some embodiments of the present disclosure. As shown in the figure, when wet etching is performed, a substrate 160 such as a wafer is placed on the turntable 110. Above, the liquid supply device 130 can provide a chemical liquid for etching to perform chemical etching of the front side 162 and/or the reverse side 164 of the substrate 160. In general, substrate 160 is a circular semiconductor substrate or other suitable material.

One end of the rotating shaft 120 is mounted with a motor device 150, and the other end of the rotating shaft 120 is connected to the turntable 110 to rotate the substrate 160 around the axis A. Since the substrate 160 is rotated during etching or cleaning, the chemical liquid or cleaning liquid on the surface of the substrate 160 will be thrown to the outer annular liquid collecting device 300, and the annular liquid collecting device 300 can perform chemical liquid and cleaning liquid. Recycling. While etching, different types of liquids can be sorted to avoid mutual contamination. The turntable 110 is moved up and down to raise or lower the height of the substrate 160 mounted thereon and to utilize different liquid collection layers for the recovery of different classes of liquid.

The annular liquid collecting device 300 of the present invention utilizes a soft folded layer to stretch the soft folded layer of the collecting layer in use to assume a stretched state. The soft folded layer of other unused collection layers is in compression The state that the other unused collecting layers are in a close state effectively increases the opening width of the collecting layer in use. Therefore, the annular liquid collecting device 300 of the present invention not only prevents mutual contamination between different recovered liquids caused by the splashing of the recovered liquid to other collecting layers, but also effectively increases the efficiency of recovery.

The annular liquid collection device 300 of the present invention comprises a plurality of liquid collection layers, such as the first liquid collection layer 210, the second liquid collection layer 220, the third liquid collection layer 230, and the fourth liquid collection, as illustrated. Layer 240. Each liquid collection layer is a combination of a liquid collection plate and a soft folded layer. Taking the four liquid collecting layers in FIG. 1 as an example, the first liquid collecting layer 210 is composed of a first liquid collecting plate 610, a second liquid collecting plate 620 and a first soft folded layer 510. The second liquid collecting layer 220 is composed of a second liquid collecting plate 620, a third liquid collecting plate 630 and a second soft folded layer 520. The third liquid collecting layer 230 is composed of a third liquid collecting plate 630, a fourth liquid collecting plate 640 and a third soft folded layer 530. The fourth liquid collecting layer 240 is composed of a fourth liquid collecting plate 640, a fifth liquid collecting plate 650 and a fourth soft folded layer 540.

When in use, taking the fourth liquid collecting layer 240 as an example, the fifth liquid collecting plate 650 is raised upward, and the fourth soft folded layer 540 is in a stretched state, and the central portion of the fifth liquid collecting plate 650 and the fourth liquid are adjacent to the center. The collecting plates 640 are separated from each other to form an annular opening. The liquid supplied to the substrate 160 by the liquid supply device 130 is first etched or cleaned on the front side 162 and/or the reverse side 164 of the substrate 160. Then, by the rotational force of the turntable 110, the liquid is thrown to the outside. At this time, since the fourth soft folded layer 540 assumes a stretched state, a loop formed between the fifth liquid collecting plate 650 and the fourth liquid collecting plate 640 The open opening provides a large opening distance so that liquid can be efficiently recovered. In addition, the other liquid collecting layers, the first liquid collecting layer 210, the second liquid collecting layer 220, and the third liquid collecting layer 230 are effectively prevented from splashing into the interior of the liquid collecting layer 230, thereby avoiding the liquid collecting layer 210 and the third liquid collecting layer 230. Mutual contamination between different recycled liquids.

Taking the first liquid collecting layer 210 as an example, when closed, the second liquid collecting plate 620 is covered on the first liquid collecting plate 610, and the first soft folded layer 510 is pressed together, and the central portion is close to the central portion. The second liquid collecting plate 620 and the first liquid collecting plate 610 are in close contact with each other, thereby effectively avoiding the entry of the recovered liquid, and also avoiding the liquid recovered by the fourth liquid collecting layer 240 and the liquid recovered by the first liquid collecting layer 210. Pollution. At the same time, the annular liquid collecting device 300 of the present invention can also effectively increase the opening distance of the liquid collecting layer being used, such as the fourth liquid collecting layer 240 in the drawing, since the other collecting layers are effectively closed.

Referring to FIG. 3 and FIG. 4 , FIG. 3 is a partial top view of an annular liquid collecting device according to some embodiments of the present disclosure, and FIG. 4 is a cross-sectional view according to some embodiments of the present disclosure. A side elevational view of a portion of an annular liquid collection device.

The outer side of the liquid collecting plate is further provided with at least one collecting plate extending bracket, preferably 2 to 3 collecting plate extending brackets, to adjust the height of the liquid collecting plate in conjunction with the collecting plate lifting device 140. In general, the bottommost first liquid collecting plate 610 may not need to be installed with the collecting plate lifting device, the other second liquid collecting plate 620, the third liquid collecting plate 630, the fourth liquid collecting plate 640, and the fifth liquid collecting plate 650. Preferably, the first collection plate extension bracket 710 is separately installed, The second collection plate extension bracket 720, the third collection plate extension bracket 730, and the fourth collection plate extension bracket 740. The collecting plate lifting device 140 further comprises a first collecting plate vertical lifter 142 connected to the first collecting plate extending bracket 710 for lifting and lowering the second liquid collecting plate 620, and the second collecting plate vertical lifting device 144 is connected to the second collecting plate for extending. The bracket 720 is configured to lift and lower the third liquid collecting plate 630, the third collecting plate vertical lifter 146 is connected to the third collecting plate extending bracket 730 to lift and lower the fourth liquid collecting plate 640, and the fourth collecting plate vertical lifter 148 is connected to The fourth collection plate extends the bracket 740 to raise and lower the fifth liquid collection plate 650.

The collecting plate lifting device 140 may be a motor, a pneumatic device or a hydraulic device to drive the vertical lifting device of the collecting plate to move up or down to a suitable height according to requirements, and open the collecting plate in an appropriate position. Height, recovery of liquid.

In order to cooperate with the up and down movement of the collecting plate extension bracket, the annular outer casing 310 of the annular liquid collecting device 300 is further provided with a plurality of lifter slots 170 so that the collecting plate extending bracket is pierced by the annular outer casing 310 and connected correspondingly. The collection plate is vertically lifted and provides the space needed to move up and down.

The annular liquid collection device 300 of the present invention further utilizes a fourth collection plate extension bracket 740 to raise and lower the fifth liquid collection plate 650. In some embodiments, the fifth liquid collection plate 650 can be a liquid collection plate top that only needs to shield the upper portion of the annular liquid collection device 300 to prevent the recovered liquid from escaping from above. It is also noted that the fourth collection plate extension bracket 740 can raise the fifth liquid collection plate 650 upward to a predetermined height 420 above the annular outer casing 310. Viewed from the other direction, the fifth liquid collecting plate 650 is also higher than the surface of the substrate 160 by a height 410. Therefore, the fifth liquid collecting plate 650 can be effective not only The recovery efficiency of the recovered liquid is ensured, and since the position of the substrate 160 is at a loading and unloading position at this time, that is, at a position of this height, loading or unloading of the substrate 160 can be performed by a robot arm.

When the annular liquid collection device 300 of the present invention extends the heights of the fourth collection plate extension bracket 740 and the fifth liquid collection plate 650 (liquid collection plate top cover) up to the annular outer casing 310 by the fourth collection plate vertical lifter 148 After the upper portion, the substrate 160 can be raised thereto for cleaning or etching. At this time, after the cleaning is completed, the substrate 160 does not need to change the height, and only the height of the fifth liquid collecting plate 650 (the liquid collecting plate top cover) needs to be lowered, so that the unloading of the substrate 160 can be directly performed by using the robot arm, and The loading of a substrate effectively saves the time required for semiconductor production, thereby accelerating the efficiency of semiconductor production.

Thus, in general, the height 420 is greater than the height 410 such that the substrate 160 is higher than the height of the annular outer casing 310.

Referring to FIG. 2, FIG. 2 is a side view of another aspect of an annular liquid collecting device according to some embodiments of the present disclosure, illustrating an exhaust valve of the annular liquid collecting device of the present disclosure. With the configuration of the drain. As shown in the figure, each liquid collecting plate is provided with at least one vent to discharge the recovered liquid through the vent and can be further recovered by an external recovery device.

The liquid collecting plate has a small inclination of about 0 to 20 degrees, and is inclined downward from the inside to the outside, and the discharge port is installed at a position close to the lower side of the outer side, so that the liquid can automatically flow to the vent with the relationship of gravity. Stream. Wherein, the liquid collecting plate has an upwardly extending liquid retaining wall on the inner side and the outer side, so that the liquid entering the liquid collecting plate is discharged only by the discharge port without being leaked from other places.

The first drain port 332 is installed at a position near the outer side of the first liquid collecting plate 610, and the second drain port 334 is installed at a position near the outer side of the second liquid collecting plate 620, and the third drain port 336 is provided. The fourth drain port 338 is attached to a position where the outer side of the third liquid collecting plate 630 is close to the lower side, and the fourth drain port 338 is attached to the lower side of the fourth liquid collecting plate 640.

In addition to this, the annular liquid collecting device 300 further has an exhaust device for discharging the exhaust gas generated during the operation. As shown in the figure, the exhaust device includes a main exhaust device 320, and a plurality of exhaust valves are connected to the main exhaust device 320 and corresponding liquid collecting plates, such as a first exhaust valve 342 and a second exhaust valve. 344, the third exhaust valve 346 and the fourth exhaust valve 348 are respectively connected to the first liquid collecting plate 610, the second liquid collecting plate 620, the third liquid collecting plate 630, and the fourth liquid collecting plate 640 for The exhaust gas in the liquid collecting plate is discharged.

The venting device further includes a gap exhaust valve 340 having one end mounted to the annular casing 310 and the other end coupled to the main exhaust device 320 for discharging exhaust gas between the annular casing 310 and the liquid collecting plate. In general, the gap vent valve 340 maintains long-term operation, while the first exhaust valve 342, the second exhaust valve 344, the third exhaust valve 346, and the fourth exhaust valve 348 are visible to the respective liquid collecting plates. Open the exhaust valve only when opening for liquid recovery to maintain maximum exhaust.

In summary, the annular liquid collecting device of the present disclosure can utilize the soft folded layer to expand the opening between the liquid collecting plates and increase the efficiency and stability of liquid recovery. The use of a liquid collection layer that can be opened and closed can more effectively recover liquids and avoid mutual contamination. The height of the collecting plate can be higher than the height of the loading and unloading position of the substrate, which can increase the efficiency of the operation of the device. The rate can increase the size of the opening between the collecting plates, and more effectively improve the stability and efficiency of the annular liquid collecting device.

The present disclosure has been disclosed in the above embodiments, and is not intended to limit the disclosure. Any one of ordinary skill in the art can make various changes and refinements without departing from the spirit and scope of the disclosure. The scope of protection is subject to the definition of the scope of the patent application.

110‧‧‧ Turntable

120‧‧‧ shaft

130‧‧‧Liquid supply device

140‧‧‧ collecting plate lifting device

142‧‧‧First collection plate vertical lifter

144‧‧‧Second collection plate vertical lifter

146‧‧‧ Third collection plate vertical lifter

148‧‧‧Four collecting plate vertical lifter

150‧‧‧Motor unit

160‧‧‧Substrate

162‧‧‧ positive

164‧‧‧n

210‧‧‧First liquid collection layer

220‧‧‧Second liquid collection layer

230‧‧‧ third liquid collection layer

240‧‧‧ fourth liquid collection layer

300‧‧‧Circular liquid collection device

310‧‧‧Ring enclosure

410‧‧‧ Height

420‧‧‧ Height

510‧‧‧First soft fold layer

520‧‧‧Second soft folding layer

530‧‧‧ Third soft fold layer

540‧‧‧Four soft folding layer

610‧‧‧First liquid collection board

620‧‧‧Second liquid collection board

630‧‧‧ Third liquid collection board

640‧‧‧fourth liquid collection board

650‧‧‧ fifth liquid collection board

710‧‧‧First collection plate extension bracket

720‧‧‧Second collection plate extension bracket

730‧‧‧ Third collection plate extension bracket

740‧‧‧Four collecting plate extension bracket

A‧‧‧Axis

Claims (10)

An annular liquid collecting device comprises: an annular outer casing; a plurality of liquid collecting plates installed in the annular outer casing; a plurality of soft folding layers respectively installed between the liquid collecting plates; and a plurality of collecting plates extending The brackets are respectively connected to the corresponding liquid collecting plates to respectively change the heights of the liquid collecting plates, so that one of the soft folding layers presents a stretched state for liquid recovery. The annular liquid collecting device of claim 1, wherein the annular casing further comprises a lifter slot to allow the collecting plate extension bracket to be slotted via the lifter and extend outwardly from the interior of the annular casing. The annular liquid collecting device of claim 2, further comprising a collecting plate lifting device, and a plurality of collecting plate vertical lifting devices respectively connected to the corresponding collecting plate extending brackets to change the height of the liquid collecting plates. The annular liquid collecting device according to claim 3, wherein the collecting plate lifting device is a hydraulic collecting plate lifting device, a pneumatic collecting plate lifting device or a motor collecting plate lifting device. The annular liquid collecting device of claim 4, wherein at least one of the liquid collecting plates is raised upward and beyond the annular casing the height of. The annular liquid collecting device according to claim 5, further comprising a plurality of drain ports respectively installed on the corresponding liquid collecting plates to discharge the recovered liquid to an external recovery device. The annular liquid collecting device according to claim 6, wherein the liquid collecting plates are inclined from the inner side to the outer side and downward to discharge the recovered liquid to the external recovery device. The annular liquid collecting device of claim 7, further comprising a main exhaust device and a plurality of exhaust valves respectively installed on the corresponding liquid collecting plates to exhaust the exhaust gas to the ring Liquid collection device. The annular liquid collecting device of claim 8, further comprising a gap exhaust valve mounted to the annular casing to exhaust the exhaust gas between the liquid collecting plates and the annular casing to the annular liquid collecting device. The annular liquid collecting device of claim 9, further comprising a turntable disposed in the annular liquid collecting device to place a substrate thereon for wet etching.