TWM487431U - Miniature spectroscope - Google Patents

Description

Micro spectrometer

This creation is related to a miniature spectrometer for detecting the optical spectrum signal generated by the illuminating device and its derived amount, or for analyzing the composition of the material by using the spectroscopy, especially for a plurality of micro-gratings inside to form a wider variety. A miniature spectrometer with a measurable wavelength range of light.

According to the combination of the detection substances, it is usually decomposed and isolated by various methods to understand the components of the composition, such as the composition of the mineral, the compound contained in the liquid, etc., and the above decomposition, separation and the like are all intrusive. Sexual detection, however, spectrometer is a non-invasive detection instrument, which is mainly made by the principle of optical dispersion. The degree of reflection, absorption or penetration of different wavelengths of light when irradiating different material structures by light The difference is that depending on the arrangement of wavelengths, different materials exhibit different spectra, and then understand the atomic structure and chemical bond properties in the substance, and thereby determine the composition and characteristics of the substance; see Figure 1, Figure 1 The structure shown in the figure is a schematic diagram of a conventional spectrometer. As shown in the figure, the above-mentioned spectrometer 10 mainly has a light-injecting device 101, a light-splitting device 102, and a sensing device 103, wherein the light-splitting device 102 is It belongs to the most important component of the spectrometer 10, which is mainly to enter the light source of the spectrometer 10. By the action of the spectroscopic device 102, an incident light A is generated. Surface Scattering, and A at each wavelength of the incident light, producing a diffraction or interference phenomenon, thereby enabling each wavelength of the incident light A is isolated, And is projected on the sensing device 103, and then an optical spectrum is generated by the sensing device 103. Further, the optical separating device 102 is roughly divided into a prism beam splitting, a grating splitting, and a Fourier transforming spectrometer. Commonly used spectroscopic technology, and grating spectroscopic is mainly blazed grating (directional grating), please refer to Fig. 2, which is a schematic diagram of the microstructure of the blazed grating. As shown in Fig. 2, the blazed grating 20 is utilized. Machining or etching, the surface is formed with a plurality of saw teeth 201, such that a blaze angle θ is formed between the plane 202 of the blazed grating 20 and a slope 2011 of the sawtooth 201, and the blaze angle θ is the most blazed grating 20 The important parameters are due to the action of the blazed grating 20, which concentrates the light energy in the direction corresponding to the blaze angle θ, and can only produce effects on the wavelength of light in a specific interval, resulting in a spectrometer using grating spectrometry, which can detect light. The wavelength is limited, which limits the range that the spectrometer can be applied to. In addition, in order to cope with the above problems, some people use mechanical processing to make the above-mentioned spectroscopic device have a More than one actuation surface, each actuation surface group is provided with a blazed grating, and each blazed grating can detect different wavelength bands. When the user wants to change the wavelength band that the spectrometer can detect, it only needs to change the actuation surface. The position allows the spectrometer to sense the spectrum of another wavelength band. However, although the above structure can enhance the wavelength band that the spectrometer can detect, the mechanical structure design is complicated, which causes the spectrometer to be manufactured and miniaturized, which has a certain threshold. Difficulty.

In view of the above problems, the creator is based on years of experience in research and development of related products, researching and analyzing the structure of the spectrometer and the application of the grating, and is able to develop a more suitable solution; The main objective is to provide a miniature spectrometer that increases the range of detection bands to expand the range of applications that can be applied to miniature spectrometers.

In order to achieve the above objectives, the miniature spectrometer referred to in this creation is mainly based on a miniature In the composition of the spectrometer, a plurality of micro-gratings are arranged, and each micro-grating has different operating bands, and the wavelengths of light that can be reflected by each micro-grating can be continuously or partially overlapped, so that when the micro spectrometer is activated, The incident light of different wavelength bands can be reflected by different micro-gratings and then introduced into the corresponding reflected optical channels for sensing by an inductive device to enhance the spectral range detectable by the micro spectrometer, thereby enhancing the micro spectrometer. The field that can be applied.

The above description of the present invention and the following description of the embodiments are intended to demonstrate and explain the spirit and principles of the present invention, and to provide further explanation of the scope of the patent.

10‧‧‧ Spectrometer

101‧‧‧Lighting device

102‧‧‧Splitting device

103‧‧‧Sensing device

20‧‧‧blazing grating

201‧‧‧Sawtooth

202‧‧‧ plane

2011‧‧‧Bevel

30‧‧‧Micro Spectrometer

301‧‧‧Base body

302‧‧‧First micro-grating

3011‧‧‧ accommodating space

3012‧‧‧Incoming light channel

3013‧‧‧First reflected light channel

3014‧‧‧second reflected light channel

3015‧‧‧Department of Light

3016‧‧‧Upper reflection sheet

3017‧‧‧lower reflection sheet

3018‧‧‧Light channel

3019‧‧‧Refractive surface

303‧‧‧Second micro-grating

304‧‧‧Injection slit device

305‧‧‧Induction device

3051‧‧‧First sensing unit

3052‧‧‧Second sensing unit

306‧‧‧ Cover

307‧‧‧shims

3071‧‧‧Lighting surface

308‧‧‧Refractive parts

3081‧‧‧First concave mirror

3082‧‧‧second concave mirror

31‧‧‧Lighting device

A‧‧‧ incident light

B‧‧‧ gap

E‧‧‧ edge

L1‧‧‧ light source

L1’‧‧‧ 杂光光

Θ‧‧‧ shining angle

A1‧‧‧ incident light

B1‧‧‧ reflected light

A1’‧‧‧ reflected light

B2‧‧‧ reflected light

A1”‧‧‧ reflected light

C1‧‧‧ reflected light

C2‧‧‧ reflected light

Fig. 1 is a schematic view showing the structure of a conventional spectrometer.

Figure 2 is a schematic diagram of the microstructure of a conventional blazed grating.

Figure 3 is a schematic diagram of the components of this creation.

Figure 4 is a schematic diagram of the implementation of this creation.

Figure 5 is another embodiment (I) of the present creation.

Fig. 6 is a side sectional view taken along line B-B in Fig. 5.

Fig. 7 is an enlarged schematic view of a portion A in Fig. 5.

Figure 8 is another embodiment (3) of the present creation.

Figure 9 is another embodiment (4) of the present creation.

Please refer to FIG. 3, which is a schematic diagram of the components of the present invention. The miniature spectrometer 30 shown in the figure is mainly formed by a base body 301 having an accommodating space 3011. Inside the 3011, an incident light channel 3012 is formed, and a first reflected light is formed. a channel 3013 and a second reflected light channel 3014, wherein the incident light channel 3012 is in communication with the two reflected light channels (3013, 3014), and the so-called incident light channel 3012 and the two reflected light channels (3013, Between 3014), an upper reflective sheet and a lower reflective sheet (not shown) are disposed, and a gap is formed between the two reflective sheets, and the incident optical channel 3012 is coupled to the first reflected optical channel 3013. Wherein, a first micro-grating 302 is disposed, and a second micro-grating 303 is disposed at the junction of the incident optical channel 3012 and the second reflected optical channel 3014, and the two micro-gratings (302, 303) are juxtaposed. In a manner, the two micro-gratings (302, 303) can be a concave grating, and the first micro-grating 302 and the second micro-grating 303 are respectively micro-gratings of different working wavelengths, for example, The wavelength of the micro-grating 302 is 100 nm to 300 nm, and the second micro-grating 303 is 250 nm to 500 nm. Further, at the front end of the incident optical channel 3012, an incident slit device 304 is provided, and in the two reflections. The end of the optical channel (3013, 3014) There is an inductive device 305. The micro-grating can be, for example, a reflective micro-grating. Alternatively, a cover 306 can be placed over the base body 301 so that the so-called member can be received by the base body 301. The cover 306 is covered, and the incident light channel 3012 and the two reflected light channels (3013, 3014) are fully shielded.

Please refer to FIG. 4, which is a schematic diagram of the implementation of the present invention, and with reference to FIG. 3, as shown in FIG. 4, in the implementation of the present invention, a light-emitting device 31 is connected to the entrance slit. The device 304 is configured to allow the light source generated by the light-emitting device 31 to enter the incident light channel 3012 via the incident slit device 304, and the so-called light-emitting device 31 can be a light-emitting diode, a laser light or a stable Light source, etc.; further, the implementation of the present invention is as follows: (1) forming incident light: when the light source generated by the light-emitting device 31, enters the incident light channel 3012, that is, an incident light a1 is formed; (2) Producing reflected light: When the incident light a1 reaches the two micro-gratings (302, 303) along the incident optical channel 3012, it is then reflected by the first micro-grating 302, generating a plurality of reflected lights (b1, b2... And immediately reflected into the first reflected light channel 3013, and again, the incident light a1 is reflected by the second micro-grating 303, generating a plurality of reflected lights (c1, c2), and immediately reflected to the second reflected light channel 3014 In addition, each micro-grating reflects the corresponding light wave according to the working wavelength band. For example, the first micro-grating 302 has a working band of 100 nm to 300 nm, and reflects the wavelength of the incident light a1 from 100 nm to 300 nm. The light between the two, the second micro-grating is also the same, and will not be described here; (3) detecting the spectrum: when the reflected light (b1, b2, c1, c2) advances along the two reflected light channels (3013, 3014), When the sensing device 305 is reached, the reflected light (b1, b2, c1, c2) of each wavelength band can be sensed by the sensing device 305, and then displayed on an electronic device by using digital or data, such as a micro device. The spectrometer 30 is a computer host and display screen for information connection.

Please refer to FIG. 5, which is another embodiment of the present invention. As shown in the figure, the micro-spectrometer 30 referred to in the present invention, the sensing device 305 can be based on two micro-gratings (302, 303). a first sensing unit 3051 and a second sensing unit 3052 are respectively disposed at the ends of the two reflective optical channels (3013, 3014), and the two sensing units (3051, 3052) are grouped according to the group The reflected light channel (3013 or 3014) is set to adjust the wavelength band that can be sensed. Thus, the sensing wavelength of the first sensing unit 3051 corresponds to the operating band of the first micro-grating 302, and the second sense The measuring unit 3052 corresponds to the second micro-grating 303.

When the light of the light source enters the optical channel in the micro spectrometer, a stray light is formed in the optical channel due to the refraction of part of the light. If the stray light is too much, the data detected by the micro spectrometer will be affected, and the overall data will be affected. Interference from noise, which in turn leads to microspectroscopy The measured data is biased. Please refer to "Figure 6", which is a side cross-sectional view of another embodiment of the present creation. As shown in the figure, in order to cope with the above problems, the creation is further based on incident light. The channel 3012 and the peripheral edge E of the two reflected light channels (not shown) are formed with a light removing portion 3015 so that the light L1 from the light source enters through the incident light channel 3012 and the two reflected light channels (not shown). In the process, the generated stray light L1' can be effectively eliminated by the light removing portion 3015, and a gap B formed between the upper reflecting sheet 3016 and the lower reflecting sheet 3017 can be further provided with a plurality of The spacer 307, such that when the upper and lower reflective sheets (3016, 3017) are assembled, a gap B between the two is formed with a light passage 3018, and both ends of the optical passage 3018 are adjacent to the left and right. The refracting surface 3019 of the light removing portion 3015 on both sides, when the light L1 emitted from the light source enters the light channel 3018, the noise light L1' generated by the refracting penetrates the light channel 3018 and reaches the refractive surface 3019, and finally refracts. Therefore, the noise light L1' can no longer return to the optical channel 30. 18; please refer to Figure 7, which is shown in Figure 7 is an enlarged view of Part A of Figure 5 of the creation, and please refer to Figure 6, as shown in the figure, as shown in the present The spacer 307 is disposed between the upper reflective sheet 3016 and the lower reflective sheet 3017, and one end of the spacer 307 is formed with a light guiding surface 3071. The light guiding surface 3071 is a reflecting surface, and the light guiding surface 3071 is used. When the light passes through the incident light channel 3012, it can be smoothly reflected by the light guiding surface 3071 to the two reflecting light channels (3013, 3014).

Please refer to FIG. 8. The figure is another embodiment of the present invention. The present invention can be implemented in another aspect. As shown, the incident optical channel 3012 is coupled to the two reflected light channels (3013, 3014). Further, a reflector 308 is further disposed, wherein the reflector 308 has a first concave mirror 3081 and a second concave mirror 3082, and the first micro grating 302 is disposed at a position opposite to the first concave mirror 3081, and second. The micro-grating 303 is disposed at a position opposite to the second concave mirror 3082. After the assembly is completed, the overall view is formed into a symmetrical state; further, the implementation of the embodiment is as follows. The following describes: (1) forming incident light: when the light source generated by the light-emitting device 31 enters the incident light channel, an incident light a1 is formed; (2) refraction is generated: the incident light a1 advances along the incident light channel 3012. Then, the first concave mirror 3081 and the second concave mirror 3082 are respectively acted to generate a reflected light (a1', a1"), and the reflected light (a1', a1") is subjected to the action of two concave mirrors (3081, 3082), respectively. The first micro-grating 302 and the second micro-grating 303; (3) generating reflected light: when the reflected light (a1', a1") reaches the two micro-gratings (302, 303), the reflected light a1' is subjected to the first micro-grating 302 The reflection generates a plurality of reflected lights (b1, b2, ...) and is then reflected into the first reflected light channel 3013. Further, the reflected light a1" is reflected by the second micro-grating 303, thereby generating a plurality of reflected lights ( C1, c2), and then reflected into the second optical channel, however, the operation mode of the two micro-gratings is as described in "Fig. 4", and will not be described here; (4) Detection spectrum: when each reflected light (b1, b2, c1, c2) advancing along the two reflected light channels (3013, 3014) to reach the sensing device 30 At 5 o'clock, the reflected light (b1, b2, c1, c2) of each band can be induced by the sensing device 305, and then displayed on an electronic device in a digital or data manner.

Although in the present embodiment, the light is reflected by the reflector 308 to the reflected light channels 3013, 3014, the present invention is not limited thereto, and the light may be refracted to the light channels 3013, 3014 by the refracting members.

Please refer to FIG. 9 , which is another embodiment of the present invention. As shown in FIG. 8 , the micro spectrometer 30 referred to in this embodiment can be based on two micro-gratings (302, In the actuating band of 303), a first sensing unit 3051 and a second sensing unit 3052 are respectively disposed at the ends of the two reflected light channels (3013, 3014), and the detailed implementation process is as described in FIG. This will not be repeated.

In summary, the creation is mainly at the junction of the incident light channel and the two reflected light channels, and a plurality of micro-gratings are arranged, and the operating bands of the micro-gratings are different, so that the light source enters the micro spectrometer and the different bands are The light is reflected by different micro-gratings and introduced into the corresponding reflected light channels, so that the spectral range that the spectrometer can detect can be improved; accordingly, according to the realization of the present invention, it is indeed possible to provide an increase The band is tested to expand the range of miniature spectrometers that can be used in miniature spectrometers.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention; any person skilled in the art can make equal changes and modifications without departing from the spirit and scope of the present invention. All should be covered by the scope of this creation patent.

30‧‧‧Micro Spectrometer

301‧‧‧Base body

3011‧‧‧ accommodating space

3012‧‧‧Incoming light channel

3013‧‧‧First reflected light channel

3014‧‧‧second reflected light channel

302‧‧‧First micro-grating

303‧‧‧Second micro-grating

304‧‧‧Injection slit device

305‧‧‧Induction device

306‧‧‧ Cover

Claims (8)

A miniature spectrometer for detecting a light source and a material structure generated by a light-emitting device, comprising: a base body, forming an accommodation space, wherein the accommodation space is formed with an incident light channel and a plurality of reflected light channels And the incident optical channel is in communication with the reflected light channels; a plurality of micro-gratings are respectively disposed at the junction of the incident light channel and the reflected light channels; and a sensing device is disposed at the The end of each reflected light channel. The micro spectrometer of claim 1, wherein the front end of the incident optical channel is provided with an incident slit device. The micro spectrometer of claim 1, wherein the incident light path and the reflected light path are coupled to each other with a refractive member having a plurality of concave mirrors. The micro spectrometer according to claim 1, wherein an upper reflective sheet and a lower reflective sheet are disposed in the incident optical channel and the reflected optical channels. The micro spectrometer of claim 4, wherein a spacer is disposed between the upper and lower reflective sheets, and the spacer has a light guiding surface. The micro spectrometer of claim 1, wherein the micro gratings have different operating bands. The micro spectrometer of claim 1, wherein the sensing device is replaceable with a plurality of sensing elements. The micro spectrometer of claim 1, wherein the micrograting is a reflective micrograting.